CN1504743A - 测定连续移动的透明带材中的缺陷部位的方法和装置 - Google Patents
测定连续移动的透明带材中的缺陷部位的方法和装置 Download PDFInfo
- Publication number
- CN1504743A CN1504743A CNA031586341A CN03158634A CN1504743A CN 1504743 A CN1504743 A CN 1504743A CN A031586341 A CNA031586341 A CN A031586341A CN 03158634 A CN03158634 A CN 03158634A CN 1504743 A CN1504743 A CN 1504743A
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- CN
- China
- Prior art keywords
- band
- light
- liquid
- strip
- coupled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
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- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Pathology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Immunology (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
Claims (28)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10221945.1 | 2002-05-13 | ||
DE10221945A DE10221945C1 (de) | 2002-05-13 | 2002-05-13 | Verfahren und Vorrichtung zur Ermittlung von Fehlstellen in einem kontinuierlich fortbewegten Band aus transparentem Material |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1504743A true CN1504743A (zh) | 2004-06-16 |
CN100350236C CN100350236C (zh) | 2007-11-21 |
Family
ID=7714547
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB031586341A Expired - Fee Related CN100350236C (zh) | 2002-05-13 | 2003-05-13 | 测定连续移动的透明带材中的缺陷部位的方法和装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US6927848B2 (zh) |
JP (1) | JP4216639B2 (zh) |
KR (1) | KR101039686B1 (zh) |
CN (1) | CN100350236C (zh) |
DE (1) | DE10221945C1 (zh) |
SG (1) | SG105576A1 (zh) |
TW (1) | TWI277733B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104620096A (zh) * | 2012-07-23 | 2015-05-13 | Msc&Sgcc公司 | 用于检测特别是折射缺陷的方法和装置 |
CN104698145A (zh) * | 2013-12-05 | 2015-06-10 | 珠海格力电器股份有限公司 | 用于u形管的探伤装置 |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040196454A1 (en) * | 2003-04-03 | 2004-10-07 | Takayuki Ishiguro | Optical system, detector and method for detecting peripheral surface defect of translucent disk |
DE10316707B4 (de) * | 2003-04-04 | 2006-04-27 | Schott Ag | Verfahren und Vorrichtung zur Erkennung von Fehlern in transparentem Material |
AU2003290503A1 (en) | 2003-12-30 | 2005-07-21 | Agency For Science, Technology And Research | Method and apparatus for detection of inclusions in glass |
DE102005022271B3 (de) * | 2005-05-10 | 2006-08-17 | Schott Ag | Verfahren und Vorrichtung zum Detektieren von Blasen in einem Glaskörper sowie zur Herstellung von Glaskörpern |
JP4688150B2 (ja) * | 2005-08-03 | 2011-05-25 | Hoya株式会社 | マスクブランク用ガラス基板の製造方法、マスクブランクの製造方法、露光用マスクの製造方法、及び欠陥検査装置 |
US7869021B2 (en) * | 2007-04-05 | 2011-01-11 | Asti Holdings Limited | Multiple surface inspection system and method |
DE102009017786B3 (de) * | 2009-04-20 | 2010-10-14 | Intego Gmbh | Verfahren zur Detektion von Fehlstellen in einer dünnen Waferscheibe für ein Solarelement sowie Vorrichtung zur Durchführung des Verfahrens |
TWI412736B (zh) * | 2009-12-04 | 2013-10-21 | Delta Electronics Inc | 基板內部缺陷檢查裝置及方法 |
CH709474A1 (fr) * | 2014-04-07 | 2015-10-15 | Suisse Electronique Microtech | Dispositif pour la détection de défauts dans des pièces transparentes. |
JP2015200610A (ja) * | 2014-04-10 | 2015-11-12 | 株式会社レイテックス | 欠陥測定装置及び欠陥測定方法 |
KR102003781B1 (ko) * | 2014-09-16 | 2019-07-25 | 한화정밀기계 주식회사 | 초분광영상화 기법을 이용한 글라스(Glass) 결함 검출 장치 |
JP7351364B1 (ja) | 2022-03-15 | 2023-09-27 | フジテック株式会社 | マンコンベヤ欄干装置及びマンコンベヤ |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH535430A (de) * | 1971-02-17 | 1973-03-31 | Gretag Ag | Verfahren und Vorrichtung zur Detektierung von staubförmigen Partikeln |
US4297032A (en) | 1980-02-14 | 1981-10-27 | The United States Of America As Represented By The Secretary Of The Navy | Dark field surface inspection illumination technique |
US4402607A (en) * | 1980-05-16 | 1983-09-06 | Gca Corporation | Automatic detector for microscopic dust on large-area, optically unpolished surfaces |
US4401893A (en) * | 1981-07-29 | 1983-08-30 | Intec Corporation | Method and apparatus for optically inspecting a moving web of glass |
JPS60262036A (ja) | 1984-06-08 | 1985-12-25 | Matsushita Electric Ind Co Ltd | 光学一軸結晶体の光学欠陥検出装置 |
DE3565893D1 (en) * | 1984-12-14 | 1988-12-01 | Flachglas Ag | Method and device for inspecting transparent strip material, in particular flat glass ribbons |
US4715717A (en) * | 1985-12-05 | 1987-12-29 | The Dow Chemical Company | Method for monitoring surface texture and quality for moving transparent film bodies |
DE3806608A1 (de) * | 1987-03-18 | 1988-09-29 | Deutsches Textilforschzentrum | Verfahren zur geschwindigkeits- und/oder laengenmessung von endlosen textilen warenbahnen sowie vorrichtung zur durchfuehrung des verfahrens |
JPH0682392A (ja) * | 1992-09-04 | 1994-03-22 | Nhk Spring Co Ltd | 透明体の破損検出装置 |
DE4406398A1 (de) * | 1994-02-26 | 1995-08-31 | Bosch Gmbh Robert | Regensensor |
FR2718232B1 (fr) * | 1994-03-31 | 1996-05-24 | Saint Gobain Vitrage | Procédé et dispositif pour mesurer la qualité optique de la surface d'un objet transparent. |
DE4444165A1 (de) * | 1994-12-12 | 1996-06-13 | Wissenschaftlich Tech Optikzen | Vorrichtung zur Prüfung transparenter und/oder einseitig optisch undurchsichtig beschichteter Objekte auf Materialfehler |
JP3329233B2 (ja) * | 1997-06-09 | 2002-09-30 | 旭硝子株式会社 | 板状透明体の欠陥検査方法及びその装置 |
JPH11337323A (ja) * | 1998-05-25 | 1999-12-10 | Sumitomo Metal Ind Ltd | 表面検査方法 |
JP3673649B2 (ja) * | 1998-08-27 | 2005-07-20 | Hoya株式会社 | 透光性物質の不均一性検査方法及びその検査装置 |
US6160625A (en) * | 1998-11-25 | 2000-12-12 | Eastman Kodak Company | Laser scanner projection system for viewing features on substrates and on coated substrates |
EP1151281A1 (en) * | 1999-02-09 | 2001-11-07 | Acordis Industrial Fibers GmbH | Process for determining the dye uptake of polyethylene terephthalate fibres |
JP2001305072A (ja) * | 2000-04-25 | 2001-10-31 | Advantest Corp | 基板の欠陥検出方法及び装置 |
US6819427B1 (en) * | 2001-10-10 | 2004-11-16 | Advanced Micro Devices, Inc. | Apparatus of monitoring and optimizing the development of a photoresist material |
-
2002
- 2002-05-13 DE DE10221945A patent/DE10221945C1/de not_active Expired - Fee Related
-
2003
- 2003-05-12 KR KR1020030029736A patent/KR101039686B1/ko not_active IP Right Cessation
- 2003-05-12 US US10/435,952 patent/US6927848B2/en not_active Expired - Lifetime
- 2003-05-12 JP JP2003132495A patent/JP4216639B2/ja not_active Expired - Fee Related
- 2003-05-13 TW TW092112955A patent/TWI277733B/zh not_active IP Right Cessation
- 2003-05-13 SG SG200302766A patent/SG105576A1/en unknown
- 2003-05-13 CN CNB031586341A patent/CN100350236C/zh not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104620096A (zh) * | 2012-07-23 | 2015-05-13 | Msc&Sgcc公司 | 用于检测特别是折射缺陷的方法和装置 |
CN104698145A (zh) * | 2013-12-05 | 2015-06-10 | 珠海格力电器股份有限公司 | 用于u形管的探伤装置 |
Also Published As
Publication number | Publication date |
---|---|
TW200400350A (en) | 2004-01-01 |
JP4216639B2 (ja) | 2009-01-28 |
TWI277733B (en) | 2007-04-01 |
CN100350236C (zh) | 2007-11-21 |
KR101039686B1 (ko) | 2011-06-08 |
US20030218743A1 (en) | 2003-11-27 |
SG105576A1 (en) | 2004-08-27 |
KR20030088342A (ko) | 2003-11-19 |
JP2003329602A (ja) | 2003-11-19 |
US6927848B2 (en) | 2005-08-09 |
DE10221945C1 (de) | 2003-07-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: SCHOTT GLAS Free format text: FORMER OWNER: SCHOTT GLASS MFG. PLANT Effective date: 20051021 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20051021 Address after: Germany Mainz Applicant after: Schott AG Address before: The Federal Republic of Germany in Mainz Applicant before: Schott Glasswork |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20071121 Termination date: 20180513 |
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CF01 | Termination of patent right due to non-payment of annual fee |