CN1460804A - Leaf valve - Google Patents

Leaf valve Download PDF

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Publication number
CN1460804A
CN1460804A CN03145445A CN03145445A CN1460804A CN 1460804 A CN1460804 A CN 1460804A CN 03145445 A CN03145445 A CN 03145445A CN 03145445 A CN03145445 A CN 03145445A CN 1460804 A CN1460804 A CN 1460804A
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China
Prior art keywords
valve
reed
valve opening
opening
leaf
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN03145445A
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Chinese (zh)
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CN1289843C (en
Inventor
安达真也
落合修一
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Honda Motor Co Ltd
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Honda Motor Co Ltd
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Publication of CN1460804A publication Critical patent/CN1460804A/en
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Publication of CN1289843C publication Critical patent/CN1289843C/en
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K15/00Check valves
    • F16K15/14Check valves with flexible valve members
    • F16K15/16Check valves with flexible valve members with tongue-shaped laminae
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01LCYCLICALLY OPERATING VALVES FOR MACHINES OR ENGINES
    • F01L3/00Lift-valve, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces; Parts or accessories thereof
    • F01L3/20Shapes or constructions of valve members, not provided for in preceding subgroups of this group
    • F01L3/205Reed valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01NGAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
    • F01N3/00Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
    • F01N3/02Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for cooling, or for removing solid constituents of, exhaust
    • F01N3/05Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for cooling, or for removing solid constituents of, exhaust by means of air, e.g. by mixing exhaust with air
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01NGAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
    • F01N3/00Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
    • F01N3/08Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous
    • F01N3/10Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous by thermal or catalytic conversion of noxious components of exhaust
    • F01N3/24Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous by thermal or catalytic conversion of noxious components of exhaust characterised by constructional aspects of converting apparatus
    • F01N3/30Arrangements for supply of additional air
    • F01N3/32Arrangements for supply of additional air using air pump

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Check Valves (AREA)
  • Exhaust Gas After Treatment (AREA)

Abstract

The invention provides a reed valve in which the failure in operation caused by insertion of a reed into a valve hole is prevented, while securing a predetermined opening area of the valve hole, and improving the responsiveness of the reed to the pressure pulsation, by determining an overlap amount of the reed and the valve seat to a minimum value necessary for closing the valve hole. A projection 27 is formed on an inner face along the longitudinal direction of the reed 24, of the valve hole 21 to prevent the insertion of the reed 24 into the valve hole 21.

Description

Leaf valve
Technical field
The present invention relates to a kind of leaf valve of improvement, this leaf valve has: have valve seat and at the valve base part of the valve opening of this valve seat upper shed, by valve opening being implemented open and close and reference edge is being fixed on the reed that free end is longitudinally extended when covering valve opening on the valve base part with the interlock of valve seat.
Background technique
As everyone knows, this leaf valve, once open in the public clear 60-32339 communique of spy.
This leaf valve opens and closes valve opening by made reed produce flexible vibration by pressure pulsation on every side usually, is widely used in unidirectional conveying gas aspect.But exist because of the flowing gas state around the reed makes reed produce torsional deformation around the axis longitudinally at it and enter valve opening.
For preventing such state of affairs in advance, be that the part that reed and valve seat is overlapping forms enough greatly in the prior art, the partial design that reed and valve seat is overlapping must exceed the needed size of close valve orifice, then the increase by the spring constant of reed can reduce the responsiveness of reed to pressure pulsation, perhaps reduce the opening area of valve opening, do the fault that the feed flow that reduces gas all can be arranged in any case and take place.For this reason, in order to replenish the gas delivery flow that reduces, then need to make the leaf valve body to become big.
Summary of the invention
The present invention develops in view of the problems referred to above that exist, its purpose is to provide a kind of leaf valve with following characteristics: reed and the equitant part of valve seat are set in are used for valve opening is closed necessary minimum limit value, make reed good to the responsiveness of pressure pulsation, when guaranteeing that valve opening has the opening area of regulation, can prevent that reed from entering valve opening.
For achieving the above object, the leaf valve of first aspect present invention comprises: have valve seat and be fixed at the valve base part of the valve opening of this valve seat upper shed, with valve seat interlinked open-close valve opening and with reference edge and covering the reed that in the valve opening free end is longitudinally extended on the valve base part.Wherein, be formed with the projection that stops reed to enter valve opening at valve opening longitudinally on the inner side surface along reed.
Characteristics according to this first aspect, by the flowing gas state around the reed, although reed can produce distortion and will enter valve opening around longitudinal axis, owing to can stopping reed long side edge portion, the projection on the reed inner side surface suppresses its distortion, can prevent that like this reed from entering in the valve opening.Its result can be set in the increase that the needed minimum limit value of close valve orifice has been avoided the reed spring constant again with reed and the equitant part of valve seat, thereby both made reed good, can when guaranteeing the desired flow of gas, realize the miniaturization of leaf valve again the responsiveness of pressure pulsation.
The leaf valve of second aspect present invention comprises: have valve seat and be fixed at the valve base part of the valve opening of this valve seat upper shed, with valve seat interlinked open-close valve opening and with reference edge and covering the reed that in the valve opening free end is longitudinally extended on the valve base part.Wherein, be formed with the projection that stops reed to enter valve opening at lateral margin longitudinally along reed.
Characteristics according to this second aspect, by reed ambient gas flowing state, although reed can produce distortion around the longitudinal axis and will enter valve opening,, thereby can stop reed to enter valve opening because the projection of reed lateral margin can stop by valve seat and can suppress its distortion.Its result, reed and the equitant part of valve seat can be set in the necessary inferior limit value of close valve orifice, avoided the increase of reed spring constant, both can make reed good to the responsiveness of pressure pulsation, can not make the opening area minimizing of valve opening again, thereby when guaranteeing the desired flow of gas, can also realize the miniaturization of leaf valve because of above-mentioned projection.
In addition, the leaf valve of third aspect present invention be first or the leaf valve of second aspect in, valve opening forms its vertically roughly rectangular identical with reed, will be from the reference edge edge of the reed of this valve opening to the distance setting of above-mentioned projection be valve opening long edge lengths about 75%.
According to the feature of this third aspect, projection is obvious to the inhibition effect of reed distortion, can prevent the distortion of reed when reducing the outstanding length of projection effectively as far as possible.
In addition, the leaf valve of fourth aspect present invention is in any one leaf valve of first~third aspect, with secondary air path that the vent systems of internal-combustion engine is connected in, make the downstream side install spring plate valve of reed towards this path.
In addition, above-mentioned vent systems is corresponding to the relief opening in the following embodiment of the invention 6.
According to this fourth aspect feature, reed often correctly with the response and the vibration of the pressure pulsation of vent systems, can reliably secondary air be offered vent systems and realize exhaust gas purification.
Description of drawings
Fig. 1 is the sectional arrangement drawing that the internal-combustion engine of the leaf valve that relates to the first embodiment of the present invention has been installed;
Fig. 2 is the amplification sectional arrangement drawing of above-mentioned leaf valve;
Fig. 3 is the partial sectional view (view of arrow 3 among Fig. 2) of the leaf valve of first embodiment of the invention;
Fig. 4 is the rear view (view of arrow 4 among Fig. 2) of the leaf valve of first embodiment of the invention;
Fig. 5 relates to the partial sectional view of the leaf valve of second embodiment of the invention;
Fig. 6 is the rear view of the leaf valve of second embodiment of the invention.
Embodiment
According to one embodiment of the invention of representing at accompanying drawing embodiments of the present invention are introduced.
Fig. 1 is the sectional arrangement drawing that the internal-combustion engine of the leaf valve that relates to the first embodiment of the present invention is housed, Fig. 2 is the amplification sectional arrangement drawing of above-mentioned leaf valve, Fig. 3 is the partial sectional view (view of arrow 3 among Fig. 2) of the leaf valve of first embodiment of the invention, Fig. 4 is the rear view (view of arrow 4 among Fig. 2) of the leaf valve of first embodiment of the invention, Fig. 5 is the partial sectional view of the leaf valve of the second embodiment of the present invention, and Fig. 6 is the rear view of second embodiment of the invention leaf valve.
At first introduce Fig. 1-first embodiment of the present invention shown in Figure 4.
Parameter symbol E among Fig. 1 represents the internal-combustion engine that motorcycle is used.This internal-combustion engine E has cylinder block 1, cylinder head 2 and the top cover 3 that connects successively from down.On cylinder head 2, form firing chamber 4 and respectively at the suction port 5 and the relief opening 6 of these firing chamber 4 upper sheds, also be provided with the valve driving mechanism 9 that these air inlets, relief opening 5,6 is carried out the Aspirating valves 7 of switch and outlet valve 8 and these suctions of switch drive, outlet valve 7,8 simultaneously.This valve driving mechanism 9 is provided between cylinder head 2 and the top cover 3 in the formed valve Transmission Room 10.Upstream side at intakeport 5 is equipped with vaporizer, links to each other with baffler (all not shown among the figure) by outlet pipe in the downstream side of relief opening 6.
In addition, on top cover 3, be provided with the valve chest 11 that leaf valve V of the present invention has been installed.This valve chest 11 is made up of the upper half-shell 11a that forms the housing lower half 11b of one and be bolted to top cover 3 tops with top cover 3.When leaf valve V is installed on the upper half-shell 11a, pushed by housing lower half 11b below.This leaf valve V only allow gas from upper half shell side 11a to housing lower half 11b side folk prescription to flowing.
Link to each other with air cleaner 14 by secondary upstream passageway 12a at upper half-shell 11a, check is installed greater than the intake negative-pressure of specified value and open the control valve 15 of valve midway at this secondary upstream passages 12a.In addition, housing lower half 11b links to each other with relief opening 6 by secondary downstream passages 12b.Above-mentioned secondary upstream and downstream passages 12a, 12b are made of secondary air path 12, therefore this secondary air path 12 can be directed to relief opening 6 with crossing the air that filters through air cleaner 14, at this secondary air path 12 be installed in series leaf valve V and control valve 15 midway.
Below, introduce the structure of above-mentioned leaf valve V with reference to figure 2-Fig. 4.
Leaf valve V comprises valve base part 20, reed 24 and check plate 25.
It is slightly rectangular tabular that valve base part 20 is, and vertically leaving its reed assembly department 20a of an end longitudinally, and be provided with the valve opening 21 that passes valve base part 20 bi-side.This valve opening 21 also is slightly rectangular vertically identical with valve base part 20, and the made valve seat 22 of rubber elastomeric material around this valve opening 21 is connected with valve base part 20 1 sides.In addition, around valve base part 20, embed the sealed member of making by the rubber elastomeric material 23.
Reed 24 is made of elastic sheet metal as thin as a wafer, is adapted to cover valve opening 21 and be landed on the valve seat 22.This reed 24 is vertically identical with valve base part 20, also be slightly rectangular shape, its vertical end (reference edge) is fixed on the reed assembly department 20a of valve base part 20 with a pair of Screw 26,26 simultaneously with an end of check plate 25, and an other end forms free end.This reed 24 is set at the required minimal value of above-mentioned valve opening 21 sealings with valve seat 22 equitant part S.And, enter valve opening 21 for preventing this reed 24, on two inner side surfaces of the long side of valve opening 21, formed a pair of projection 27,27.At this moment, these projections 27,27 are pressed the following formula configuration.
If the long edge lengths of valve opening 21 is L, from the reference side edge of the reed 24 of valve opening 21 to oneself distance L of 27 of above-mentioned prominent spring ' be
L′
Figure A0314544500061
0.75L
That is to say that if from the reference side edge metering of the reed 24 of valve opening 21, then projection 27,27 is arranged on the place of the long edge lengths L about 75% of valve opening 21.
Check plate 25 is lifted off a seat when valve opened when reed 24, stop the back side of reed and limit the maximum deflection of reed 24, so can be from the end of the reed assembly department 20a that is fixed on valve base part 20 towards the other end away from reed 24 ground bendings.
The leaf valve V of this structure makes reed 24 and check plate 25 in the face of housing lower half 11b as shown in Figure 1, and valve base part 20 is inlaid in the upper half-shell 11a.At this moment, sealed member 23 connects airtight the inner peripheral surface at upper half-shell 11a, the sealing of the embedding part of maintaining valve base member 20 and upper half-shell 11a.
Introduce this first embodiment's effect below.
Be in deceleration regime as internal-combustion engine E and make negative suction reach specified value when above, the control valve 15 that detects its value is opened, and makes secondary upstream passages 12a be on state.Therefore, when producing pressure pulsation in the vent systems that comprises relief opening 6 and coupled outlet pipe, this pulsation is in secondary downstream passages 12b arrives housing lower half 11b, thereby the reed 24 that makes leaf valve V is along opening and closing the directions vibration.That is to say that when being in negative pressure in second housing 11b, reed 24 is lifted off a seat and 22 valve opening 21 opened, its negative pressure sends secondary upstream passages 12a to.So, the extraneous gas that filters through air cleaner 14 just is sucked into relief opening 6 by secondary air path 12 and valve opening 21; And when reaching malleation in second housing 11b, reed 24 is seated on the valve seat 22 and valve opening 21 is closed, thereby the back flow of gas in the secondary air path 12 is stoped to live.By the pressure pulsation of this vent systems and the effect of reed valve V, owing to be interrupted to 6 li importings of relief opening secondary air by secondary air path 12, even so the increase of the not clean-burning constituent concentration of the gas of discharging along with decelerate, also can be with this unburnt ingredient in vent systems internal combustion and purification.
In addition, when internal-combustion engine E is in normal operation, owing to acting on the pressure pulsation of vent systems on the housing lower half 11b, so although the reed 24 of leaf valve V opens and closes vibration, but intake negative-pressure was lower in the time of should turning round usually, secondary upstream passages 12a is closed and cut off to control valve 15, so can't provide secondary air to relief opening 6.
; by reed 24 ambient gas flowing states; sometimes can produce longitudinal axis torsional deformation on every side at reed 24; even but in such occasion; owing on two inner side surfaces of valve opening 21 long sides, formed a pair of projection 27,27,, can restrain the distortion of reed so these projections 27,27 can be blocked the both side edges of reed 24 long sides; prevent to enter in the valve opening 21 bootable reed 24 normally taking a seat again to valve seat 22.
According to experiment as can be known, the distortion of reed 24 is in valve opening 21 vertical central part maximums, but alignment error according to reed 24 relative reed assembly department 20a, consider that again reed 24 has the installation of inclination, when valve opening 21 is vertical identical summary rectangular with reed 24, as mentioned above, reference edge edge metering from the reed 24 of valve opening 21, the projection 27,27 of valve opening 21 be arranged on the long edge lengths L of valve opening 21 about 75% local time, can confirm the inhibition best results of the distortion of 27,27 pairs of reeds 24 of projection.Therefore, if more effectively suppress the distortion of reed 24 simultaneously, just can prevent reliably that reed 24 from entering valve opening 21 in the outstanding length that reduces projection 27,27 as possible.
So, just reed 24 and the equitant part of valve seat can be set in close valve orifice 21 necessary minimum limit value, avoid the increase of the spring constant of reed, thereby make reed good for the responsiveness of pressure pulsation, this is external can also to make leaf valve V miniaturization when guaranteeing the gas flow expected value.
In addition, if more this leaf valve V is used as aforementioned in the secondary air of the vent systems of internal-combustion engine E is supplied with, can make reed 24 respond the pulsation of exhaust pressure exactly, reliably secondary air be supplied with vent systems, thereby obtain good exhaust gas purification effect.
Introduce the second embodiment of the present invention below with reference to Fig. 5 and Fig. 6.
This second embodiment forms a pair of projection 37,37 at the place, both sides of the edge of the long side of reed 24, thereby the projection 27,27 that replaces the valve opening 21 among first embodiment, other formation is identical with first embodiment, so in Fig. 5 and Fig. 6, the part corresponding with first embodiment all adopted identical symbol, omits its explanation.
In the present embodiment, even reed 24 will enter valve opening 21 in the distortion around axis longitudinally, but owing to the projection 37,37 of reed 24 both sides of the edge can be blocked by the valve seat 22 of valve opening 21 both sides of the edge, thereby can suppress the distortion of reed 24, prevent that reed from entering valve opening 21.So, bootable reed 24 normally taking a seat to valve seat 22.Thereby, at this moment because reed 24 and the equitant part of valve seat are set in close valve orifice 21 necessary minimum limit value, thereby both avoided the increase of reed spring constant, can make the responsiveness of reed relative pressure pulsation good again, can not reduce simultaneously the opening area of valve opening 21 again because of above-mentioned projection 37,37, in the hope flow that guarantees gas, can also make leaf valve V miniaturization.
In addition, if as previous embodiment, this leaf valve V use is supplied with at the secondary air of the vent systems of internal-combustion engine E again, make reed 24 follow the tracks of exhaust gas pressure pulse exactly, secondary air is supplied with vent systems reliably, certainly obtain the optimum efficiency of exhaust gas purification.
The invention is not restricted to above-mentioned experimental example, only otherwise breaking away from its main idea scope all can carry out various design alterations.
According to the feature of above a first aspect of the present invention, leaf valve of the present invention comprises having valve seat and at the valve base part of the valve opening of this valve seat upper shed, cover the reed that in the valve opening free end is longitudinally extended on the valve base part by being fixed on the valve opening of switch linkedly of valve seat and with reference edge.Owing to prevent that being formed with on the inner side surface longitudinally of valve opening reed from entering the projection in the valve opening, so also can stop it to enter even reed produces distortion and will enter into valve opening around axis longitudinally along reed.Thereby, reed and the equitant part of valve seat may be set in the necessary minimum limit value of close valve orifice, so both avoided increasing the spring constant of reed, can make the responsiveness of reed relative pressure pulsation good again, can when guaranteeing the desired flow of gas, realize the miniaturization of leaf valve again.
In addition, according to the feature of a second aspect of the present invention, leaf valve of the present invention comprises having valve seat and at the valve base part of the valve opening of this valve seat upper shed, cover the reed that in the valve opening free end is longitudinally extended on the valve base part by being fixed on the valve opening of switch linkedly of valve seat and with reference edge.Owing to forming the projection that stops reed to enter valve opening, so also can stop it to enter even reed twists and will enter valve opening in axis generation on every side longitudinally in edge longitudinally along reed.So, just reed and the equitant part of valve seat can be set in the necessary minimum limit value of close valve orifice, both avoided increasing the spring constant of reed, can make reed good again to the responsiveness of pressure pulsation, especially can the valve opening opening area be reduced, can when guaranteeing the desirable flow of gas, also realize the miniaturization of leaf valve because of above-mentioned projection is set.
Feature according to a third aspect of the present invention, owing to valve opening is become the roughly rectangular identical with reed along the vertical of valve opening, will be from the reference edge edge of the reed of this valve opening to the distance setting of above-mentioned projection be valve opening long edge lengths about 75%, even so the outstanding less distortion that also can suppress reed effectively of length of projection, and can prevent reliably that reed from entering valve opening.
In addition, feature according to a fourth aspect of the present invention, since with secondary air path that the vent systems of internal-combustion engine is connected in, make reed face toward the downstream side install spring plate valve of this path, reed often correctly responds and vibration with the vent systems pulsation, and reliably secondary air is supplied with vent systems, and realize exhaust gas purification.

Claims (4)

1, a kind of leaf valve, it comprises: have valve seat (22) and at the valve base part (20) of the valve opening (21) of this valve seat (22) upper shed; Open and close valve opening (21) linkedly and reference edge is fixed on the reed (24) that valve base part (20) upward longitudinally extends free end when covering valve opening (21) with valve seat (22), it is characterized in that,
Be formed with the projection (27) that stops reed (24) to enter valve opening (21) at valve opening (21) longitudinally on the inner side surface along reed (24).
2, a kind of leaf valve, it comprises: have valve seat (22) and at the valve base part (20) of the valve opening (21) of this valve seat (22) upper shed; Be fixed on the reed (24) that valve base part (20) upward longitudinally extends free end with valve seat (22) interlinked open-close valve opening (21) and with reference edge when covering valve opening (21), it is characterized in that,
Be formed with the projection (37) that stops reed (24) to enter valve opening (21) at lateral margin longitudinally along reed (24).
3, leaf valve as claimed in claim 1 or 2 is characterized in that,
Valve opening (21) forms its vertically roughly rectangular identical with reed (24), and will be from reed (24) the reference edge edge of valve opening (21) to the distance (L ') of above-mentioned projection (27,37) be set at valve opening (21) long edge lengths (L) about 75%.
4, as each requires described leaf valve in the claim 1~3, it is characterized in that,
Reed (24) is installed in the secondary air path (12) that is connected with the vent systems (6) of internal-combustion engine (E), towards the downstream side of this path (12).
CNB031454453A 2002-02-15 2003-02-11 Leaf valve Expired - Fee Related CN1289843C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002038301A JP4226251B2 (en) 2002-02-15 2002-02-15 Reed valve
JP038301/02 2002-02-15
JP038301/2002 2002-02-15

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CN1289843C CN1289843C (en) 2006-12-13

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104102237A (en) * 2014-07-08 2014-10-15 北京七星华创电子股份有限公司 Regulating valve characteristic optimization method for mass flow controller
CN107709859A (en) * 2015-06-30 2018-02-16 五十铃自动车株式会社 Reed valve device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014031775A (en) * 2012-08-03 2014-02-20 Denso Corp Reed valve

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104102237A (en) * 2014-07-08 2014-10-15 北京七星华创电子股份有限公司 Regulating valve characteristic optimization method for mass flow controller
CN104102237B (en) * 2014-07-08 2016-09-07 北京七星华创电子股份有限公司 A kind of regulation valve characteristic optimization method of mass flow controller
CN107709859A (en) * 2015-06-30 2018-02-16 五十铃自动车株式会社 Reed valve device

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CN1289843C (en) 2006-12-13
KR20030069053A (en) 2003-08-25
JP4226251B2 (en) 2009-02-18
KR100560827B1 (en) 2006-03-13
JP2003240142A (en) 2003-08-27

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Granted publication date: 20061213

Termination date: 20140211