CN1433039A - Panchromatic great-arear flat display based on carbon nanotube field emitting array - Google Patents
Panchromatic great-arear flat display based on carbon nanotube field emitting array Download PDFInfo
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The panchromatic great-area flat display based on carbon nanotube field emitting array has three electrode structure, and the cathode and the grid are in the same substrate plane and made on channel wall. The emitting material of carbon nanotube is either transplanted via electrophoresis to the channel wall or in-situ grown on the channel wall. The carbon nanotube array can be on one side or two sides of the cathode. The electronic output ratio may be regulated and raised through altering the grid and anode voltage, channel shape and the height different of cathode and grid. Through electrophoresist, the carbon nanotubes may be oriented and arranged on the cathode and the grid, or some electric field may be applied across the cathode and the grid for the carbon nanotubes to grow in electric field direction to form array.
Description
Progress from present Field Emission Display, the surface conductance type of Japanese Canon company design that representative is, see U.S. Pat 005593335, US005861227, US005905335, US005936343, US006060113, US006060219, US006106906A, US00612467, US006124671A for details, although this surface conductance type Field Emission Display simple in structure, be fit to make large area display.Emitter with low-work-function material (as PdO) but according to they the report technical data, the efficiency of transmission of its electronics emission has only about 1% 1,2, moulding (the Energizing Forming Process) process of energizing exists many uncertain factors (as the trend of slit, the position, width all can not be determined well), energize follow-up work complexity after the moulding (as there being activation length consuming time, uniformity is not good enough, also to carry out the reduction of non-emitter region resistance etc.), and it is said the sort of with the moon as patent US6011567, grid, anode (above deposit fluorescent material) also places same way on the substrate, certainly will reduce the spatial resolution of display.The Spindt type Field Emission Display that has PixTech company to release in addition, adopt three-electrode structure, emissive material metal and silicon etc., but this structure requires very high to photoetching technique, generally require to make 5000 pointed cone arrays in diameter is the 1mm area of a circle, the radius of curvature of pointed cone is 500 , this can reduce rate of finished products greatly, the large tracts of landization that more difficult realization shows.Especially because the problem on the manufacturing process, may make height, the radius of curvature difference of emission point, like this when adding identical the moon, grid, anode voltage, near the emission point local field strength differs bigger, cause emission current inhomogeneous, finally cause shielding brightness irregularities, and because the sharp vulnerable to pollution of emission, the emitting performance instability, useful life is short.Thereby though can make the effect that a N channel enhancement field effect transistor plays constant current by plating one deck amorphous silicon in the negative electrode wiring or with each emitter, this is a kind of with increasing the method that the manufacture craft difficulty exchanges launch stability for.SI Diamond company has developed and has adopted diamond thin to do the diode-type Field Emission Display of negative electrode, diamond film has negative electron affinity, good chemical stability, high rigidity, high anti-ion erosion ability, do not resemble the little sharp emitting cathode of metal, adsorb impurity easily and cause work function to increase, make before using, must under high vacuum condition, heat and make the metal desorption, the emissivities of nano-sized crystal diamond and N type doped polycrystalline diamond film are stronger, when launching the thresholding field intensity less than 20V/ μ m, just can obtain the emission current of 10 μ A, on the other hand, diamond cold cathode even can adopt membrane structure makes the low-cost flat-panel monitor of producing large-screen in enormous quantities become possibility.But there is any to merit attention: though pure diamond has negative electron affinity and less work function, but since pure diamond crystal have bigger energy gap (～5.5eV), almost there is not electronics in the conduction band, cause rather than desirable emitting cathode, reaching 200-1000V/ μ m in field intensity just has stronger electronics emission.But can adopt following measure: A, mix, be injected into as ion and produce defective in the diamond, form dipole, thereby reduce adamantine work function with modulation carrier concentration and corresponding change energy gap.The condition of B, control diamond film makes the diamond of growth various defectives occur and form defect level, and for example the amorphous diamond film for preparing with the vacuum arc deposition source is the sp by a large amount of tetrahedral structures
3The network structure that the random stacking of key forms, energy gap is narrower, make the a-D film not only have negative electron affinity and lower work function but also have than higher carrier concentration (this is that the charge carrier in these states all may have been led contribution to electricity because there is defect localized state in expansion attitude, magnetic tape trailer localized state, the band gap in amorphous diamond).C, carry out surface treatment (, plating Cs layer formation O-Cs structure again) and further reduce its work function, the emission current of diamond film and launch stability all can be improved greatly as handling earlier with oxygen plasma gas.D, growth diamond-film-like make existing sp in this film
3Hybridized orbit has sp again
2Hybridized orbit, because it is generally acknowledged, because the positive tetrahedron structure makes this film have negative electron affinity, layer structure makes this film have the good electron transport capability again.It is generally acknowledged: in first time during making alive, diamond-film-like carries out arc discharge earlier, forms the projection of the volcano shape of the mouth as one speaks, and electronics emits from these kicks just, this process is called the activation of diamond film, has only the diamond film of activation could form stable emission.But the emission of diamond field-transmitting cathode is inhomogeneous, makes image quality degenerate, and when adopting the triode display structure, it is difficult that the making of grid often becomes.And carbon nano-tube is used as Field Emission Display, great majority all adopt diode-type
3,4,5(two electrode structures), this two electrode structures require driving voltage than higher, and generally all use low-voltage phosphor, and that is that all right development present stage of low-voltage phosphor is ripe.There is driving voltage height (100～300V) problem equally in the structure that grid is made in below the negative electrode.The method (seeing U.S. Pat 2001000783 for details) of continued growth carbon nano-tube on Spindt type structure emission point that the Korean proposes has increased the complexity of technology especially.
The Panchromatic great-arear flat-panel monitor based on the CNT (carbon nano-tube) field emission array that we propose is a kind of plane Field Emission Display, and anode generally adds the high pressure V of 3kV～6kV
a, the general ground connection of negative electrode, grid is the driving voltage V of 10～100V
g, this driving voltage is shown to realize the different tonal gradations of image by the vision signal modulation.Fig. 1 is the pixel structural representation of (comprising three inferior pixels), wherein 101 is negative electrode, 102 is the back glass substrate, 103 is grid, and 104 for aligning neat carbon nano pipe array, and 105 are the aluminium mirror coating effect of anode of holding concurrently, 106 front glass substrates, 107 be black CuO every vitta, 108,109,110 are respectively red, green, blue fluorescent material, back glass substrate 102 and front glass panel 106 and package assembling can provide one 10 for the stable emission of cathode electronics
-5～10
-7The vacuum environment of torr.Its operation principle is: at driving voltage V
gEffect under, negative electrode carbon tip end produces highfield, the electronics of carbon tip end runs through the carbon tip end surfaces that flies out by potential barrier, so a part of electronics flies to anode and passes the aluminium film under the effect of anode high voltage, bombards three primary colours fluorescent material of red, green, blue respectively, produce the photon of different wave length, realize the demonstration of colour signal, the photon of back scattering is propagated forward after the aluminium mirror coating reflection, to strengthen the intensity of colour signal.And another part electronics arrives grid formation conduction current.Fig. 2 is X and Y cloth line electrode, be connected with grid with the negative electrode of transmitter unit respectively, when X electrode delegation and a certain row of Y electrode add address signal (being generally a negative pulse) and data-signal (positive pulse) respectively, selected and the emitting electrons of one transmitter unit is then arranged, and simultaneously corresponding pixel is lighted.Fig. 3 and Fig. 4 are respectively " U " shape groove and " V " shape groove, the groove two walls carbon nano pipe array that all distributes, and obviously, when each electrode adds identical voltage, the transfer ratio of " V " shape groove electronics will be higher than the transfer ratio of " U " shape groove.Fig. 5 and Fig. 6 are respectively only at " U " shape groove and " V " shape groove cathode side walls arranging nanotube array, Fig. 7 and Fig. 8 are for directly at arranging nanotube array between cloudy, grid groove, compare with Fig. 5 and situation shown in Figure 6, owing to lost " dual " humidification of internal field, reach the emission identical, need higher grid voltage with Fig. 5 and Fig. 6.The schematic diagram (at metacoxal plate place) of Fig. 9 for placing separaant, Figure 10 is that two ends all have a metal film and a separaant schematic diagram wiry up and down, before Figure 11 is, the aligned relationship sectional view of metacoxal plate and separaant, for large screen display, because device inside is evacuated, to bear very big atmospheric pressure between the front and rear panel, must be between front and rear panel the supporter of shelving separated by a distance---separaant, here adopt strip pottery separaant, trench wall is vertical but parallel with barrier (every vitta) on the prebasal plate on the placement of separaant and the metacoxal plate, on the one hand separaant is hidden between the neighbor, on the other hand, because the electronics that emits has certain deflection under the grid voltage effect, the yawing moment of electronics is parallel with separaant like this, can not cause the accumulation of electric charge on the separaant and influences the emission of electronics.In a word, the choosing of material should be observed and be held one's breath or give vent to anger less in a vacuum avoiding destroying high vacuum or to cause destructive electric arc, also want to stand stray electron bombardment and can be not breakdown, degenerate or produce secondary electron.Figure 12 is separaant and a fluorescent material distribution schematic diagram on the prebasal plate.
The key technology of this patent is the making of cathode construction and the orderly arrangement of carbon nano-tube.The advantage of this structure is conspicuous.At first, compare with Spindt type Field Emission Display structure, its technical process has obtained very big simplification, and it organically combines the emitting structural of plane and the strong emission characteristics of carbon pipe.If adopt the silk screen printing technology, be expected to make above 40 inches large tracts of land field emission arrays, especially carbon nano-tube itself most advanced and sophisticated (no matter being opening or sealing) has little radius of curvature, make that a geometry enhancer of emission is very high, and the quantum limitation effect of nanoscale physical dimension local quantum level occurs near making its Fermi level, the unit's of making tip end surface can be held more electronics, this also has humidification to local field, carbon nano-tube for top end opening, it is more outstanding that this quantum effect shows, because the opening of equal length and bottom surface radius and the carbon nano-tube of remaining silent, be arranged in macroscopical induction field of same intensity, in the scope of the bottom surface radius in distance top, the charge inducing density of open tube is bigger than closed end tube charge inducing density, thereby its most advanced and sophisticated local field strength that forms is just strong.And below the bottom surface radius in distance top, the charge inducing density of the two is suitable.Owing to all be distributed with carbon nano pipe array on groove two walls (cloudy, gate electrode), electric field is had dual humidification on the other hand, the field enhancing factor of this three aspect can allow driving voltage reduce, thereby has reduced the cost of drive circuit.Compare with metal emission point, the ability of its antipollution and anti-ion bombardment is stronger, thereby emission is stable, and the life-span is long, and it is not very high that vacuum degree is required.Compare with the diamond film emitter, the uniformity of its emission is greatly improved again.Compare with the Field Emission Display scheme of Canon company, can further improve electron transmission efficiency (arriving the electron number of anode and the ratio of cathode emission electron number), data according to Canon company, its transfer ratio is only less than 1%, and the position of slit in the forming process of energizing, there are certain randomness in shape and width, energize follow-up work complexity after the moulding (as there being activation length consuming time, uniformity is not good enough, also to carry out the reduction of non-emitter region resistance), by contrast, the transfer ratio of electronics is easy to surpass this value (Theoretical Calculation can reach 40%) in this patent, because by changing the overall orientation of carbon nano pipe array, can make the most advanced and sophisticated outstanding wiring electrode plane of carbon nano-tube, be easy to reach the high brightness requirement of Field Emission Display.And can adjust transfer ratio, a kind of is to adjust (will be subjected to drive circuit to can bear the restriction of voltage certainly) by adjusting grid and anode voltage, a kind of is on substrate of glass in the etching groove, be carved into trapezoidal it or rectangle, the overall orientation of carbon pipe array and the angle of substrate surface are changed, the overall orientation that also can be when generating carbon nano pipe array with electrophoresis changes carbon nano pipe array by the way that adds auxiliary electrode reaches the purpose of adjusting transfer ratio, also can adjust the transfer ratio of emitting electrons by changing difference in height between negative electrode and the grid.Another characteristics of this patent are, have avoided the difficult problem of low-voltage phosphor development, adopt the high-pressure fluorescence powder of mature technology, and Figure 12 is two kinds of typical fluorescent material distribution schematic diagrams.
Technical scheme:
1, the formation of glass groove (as Fig. 3,4,5,6) or metal valley (as Fig. 7,8): the formation of glass (or metal) groove can the method by physics or chemical etching directly form in substrate, its technical process comprises processes such as the formation of template, even glue, exposure, colloidal sol, etching, also can form by the silk screen printing technology with glass cement, can also form with the way of ion beam by " sandblasting ", the degree of depth of glass groove and width generally about tens micron to 100 microns, specifically are subjected to the restriction of process conditions and device space resolution.
2, the formation of grid and negative electrode, direct evaporation or printing one deck conductive metal film on the glass groove, thickness is 0.5 micron to tens microns, material can be a chromium, platinum, gold, the conducting metal that copper etc. are commonly used, after the film forming, etching forms the moon, gate electrode and cloth line electrode, the orthogonal distribution on X and Y direction of cloth line electrode, as shown in Figure 2, cloth line electrode and the moon, gate electrode can not once form, and such as the cloth line electrode that forms earlier directions X, is forming insulating barrier such as layer of silicon dioxide with mask with Y electrode intersection then, form Y cloth line electrode at last, thereby make the cloth line electrode of X and Y direction keep electricity to isolate.With alcohol and deionized water it is cleaned up hill and dale at last.If without the glass groove, it is thicker that negative electrode and grid will be done, and guarantees that the groove between them has certain degree of depth can deposit enough carbon nano-tube.In addition, if the end that separaant contacts with the cloth line electrode has wire and metal film, so also must on the cloth line electrode, deposit one deck megohmite insulant in the relevant position, in order to avoid make the mutual short circuit of cloth line electrode.
3, the preparation of carbon nano-tube and purification, no matter be single wall or multiple wall carbon pipe, the technology of its preparation and purification is comparative maturity all, wherein technology of preparing has chemical gaseous phase deposition method, arc discharge method, heated filament plasma method, laser ablation method etc., it is to be noted, according to glass groove width difference, need the carbon nano-tube of different length, this can realize by the growth time of control carbon pipe.The purification of carbon pipe, method with the strong oxidizer oxidation is finished, earlier the sample for preparing is ground fully, make it be dispersed into littler group's a small bundle of straw, etc. for silkworms to spin cocoons on ultrasonic or aqueous slkali, add the concentrated sulfuric acid and red fuming nitric acid (RFNA) after the cleaning, the two acts synergistically the red fuming nitric acid (RFNA) of strong oxidizing property and the high dehydrated concentrated sulfuric acid, amorphous carbon and carbon nano-particles are at first oxidized away, remaining more stable carbon nano-tube, use deionized water rinsing, and with the test of PH test paper, about its acid-base value was near 7, filtration was dried stand-by.
4, arranging nanotube array.Scheme one: electrophoresis, be scattered in deionized water or the own propyl alcohol solvent with the even carbon nanotube after ultrasonic will purification ground and form suspension, add an amount of La (NO again
3)
3Or Mg (NO
3)
26H
2O solution is modified carbon nano-tube, may be because the carbon nano-tube two ends have dangling bonds, make the functional group that builds up more positive and negative ion on carbon nano-tube two end surfaces, the cloth line electrode that will connect grid then respectively couples together with the cloth line electrode that is connected negative electrode, add suitable voltage (can be alternating voltage or direct voltage) respectively, for alternating current, the orientation of carbon pipe is relevant with the change frequency of alternating current, frequency is high more, arranges neat more.If the overall orientation of carbon pipe array is adjusted, then need to add again an auxiliary electrode, the direction of an electric field that auxiliary electrode, negative electrode and grid voltage form on trench wall is exactly an overall orientation of wanting the carbon nanotubes arranged array.In order to access higher electrophoretic velocity, must be on electrode interface well-off electrophoretic voltage, keep bigger electric potential gradient, the content of decorating liquid is wanted suitably, if not enough, electrophoresis liquid resistance is excessive, can't form electrophoretic current, the deposition that the carbon pipe do not occur is arranged, if excessive, then electric potential gradient is too smooth, does not also have electrophoresis to produce.Behind making alive on each electrode, the carbon nano-tube that the surface has an electric charge to grid and cathodic migration, discharges or obtains being deposited on the carbon nano pipe array that forms proper alignment on the electrode behind the electric charge under the acting in conjunction of ultrasonic and electric field.Carbon pipe and interelectrode bonding are maintained by Van der Waals force.After arranging Deng carbon nano pipe array, take out glass substrate, clean fully with deionized water, be placed on then in the environment of dried and clean and dry, even handle with the hydrogen plasma gas, the metal ion and the electronegativity adatom of carbon tube-surface are removed completely, and these adsorbates may have a strong impact on the emission characteristics of carbon nano-tube.In order to prevent deposition of carbon nanotubes on the wiring electrod-array, under the situation that has auxiliary electrode to exist, can adopt the method that adds auxiliary template (as organic membrane) in advance to cover the cloth line electrode, allow carbon nano-tube only on trench wall, deposit.After arranging etc. carbon nano-tube, organic membrane is dissolved or wash with hydrogen plasma, but under the situation that does not add auxiliary electrode, because the field intensity in the groove will be far longer than electric field strength on other edge, position of cloth line electrode, so generally can be at these local deposition of carbon nanotubes.Can adopt the electrophoresis liquid that intelligent shower nozzle (being similar to the accurately position of positioning nozzle of Digit Control Machine Tool) will contain carbon nano-tube to be sprayed onto in each groove in addition, just not worry that carbon nano-tube can be at the groove external sediment.Carbon nano-tube for form " bridging " individually between the moon, grid than length can with its " fusing ", be trimmed to the carbon nano pipe array of length unanimity by add pulse voltage between the moon, grid.Scheme two: select growth method, this scheme all has certain restriction to insulating barrier between cloth line electrode and the cloth line electrode etc., as the cloth line electrode can not be transition metal, insulating barrier is wanted anti-certain high temperature (as adopting pottery), the forming process such as the step 3 of groove, on the entire electrode plane, use gluing then, exposure, the way of colloidal sol only allows the trench wall one or both sides come out, especially can not expose channel bottom, drip the organic solution of an amount of transition metal then at expose portion, heating and decomposition generates metal oxide, photoresist can gasify with the way of heating, also can dissolve,, make it be reduced into the catalyst of nano level metal particle as carbon nano tube growth with hydrogen plasma gas reducing metal oxide with corresponding solvent.Also can spray organic metal solution in fact in the entire electrode wiring portion; need not accurately aim at; the metal oxide particle that only is arranged on the photoresist can be dissolved in solvent with the dissolving of photoresist thereupon; have only the metal catalyst particles on the trench wall to be cured on the trench wall; the local carbon nano-tube that at this moment metal catalyst particles can be arranged on trench wall with existing chemical gaseous phase deposition method; for the oriented growth of realizing carbon nano-tube must be simultaneously at the moon; add stronger electric field between gate electrode; this be because; though it is the deciding factor of opening in growth course that the actual field intensity that can reach can not guarantee the carbon pipe; but the existence of electric field can have guide effect to the growth of carbon pipe; make the carbon pipe to grow, thereby realize the orderly arrangement of carbon pipe along direction of an electric field.Equally, the carbon nano-tube for form " bridging " individually between the moon, grid than length can with its " fusing ", be trimmed to the carbon nano pipe array of length unanimity by add pulse voltage between the moon, grid.
5, existing ripe system screen technology is adopted in fluoroscopic making.Generally on prebasal plate, deposit or print fluorescent material, it can be strip, also can be block, print the glass bar of projection between pixel (comprising three sub-pixs of red, green, blue) and the pixel with the silk screen printing technology, we are called barrier, and width is wideer than the distance between the sub-pix, separaant is exactly that vertical support is on these barriers, the cupric oxide of using printing black between the red, green, blue phosphor strip is avoided colour contamination, as shown in figure 12 every vitta.Of particular note phosphor surface will plate the very thin aluminium film of one deck, can be used as the anode of display, it can prevent that the fluorescence dust is scattered and pollutes carbon nano-tube emission point under the bombardment of electronics on the other hand, secondly can make backscattered light to front-reflection to strengthen display brightness.Perhaps when selecting fluorescent material for use, select oxide fluorescent powder for use and without sulphide fluorescent material as far as possible, because sulphide fluorescent material can discharge sulfur vapor under electron bombard, influence the vacuum degree of device, the electrodeposition substance that fluorescent material sputters reduces little sharp emissivities even the forfeiture emissivities to the sharp surface of emission, it two is that sulfide decay is more serious than oxide, therefore should adopt the not fluorescent material of sulfur-bearing as far as possible.
6, the processing of separaant and placement, separaant look like one very simple, implementing but is the ten minutes complicated problems, the choosing of material should be observed and be held one's breath or give vent to anger less in a vacuum avoiding destroying high vacuum or to cause destructive electric arc, also want to stand stray electron bombardment and can be not breakdown, degenerate or produce secondary electron.Simultaneously can't be in image shading or block electrons emission and the quality of infringement image, enough mechanical strengths must be arranged, pottery is a kind of more satisfactory material, usually it is rectangular with laser cutting technique potsherd to be cut into the rectangular bodily form, the uniformity that its height will be done as far as possible, otherwise cause higher separaant cracked because of the power of bearing on each separaant is inhomogeneous, cracked in order to prevent separaant, generally after separaant processes, with it and put, thereon, it is low that lower surface plates one deck fusing point respectively, the good metal film of ductility is (as aluminium, gold etc.), simultaneously when placing separaant, in that up and down both sides or a side want the bonded metal silk (should have low melting point equally, the characteristics that ductility is good), as shown in figure 10, the benefit of doing like this is: on the one hand plated film and wire can be used as separaant is fixed on adhesive between front and rear panel, on the other hand, when separaant the time, make this deformation energy be in the elasticity excursion of wire and metal film and can not cause separaant cracked because of certain reason generation deformation.The method that separaant is fixed between the front-back baseboard pixel pitch has pressure sintering, heat sound method and ultrasonic method etc., the working temperature of hot pressing, heat sound method can not be above 500 ℃, otherwise can cause electrode wiring, anode and the oxidation of cathode emission point, must in vacuum or inert gas environment, operate.If separaant all has wire and metal film in two ends up and down, to make one deck megohmite insulant in the corresponding electrode wiring on the metacoxal plate so.
Description of drawings:
Fig. 1 is the color monitor structural representation based on carbon nano-tube field emission array, wherein 101 is negative electrode, 102 is the back glass substrate, 103 is grid, 104 for aligning neat carbon nano pipe array, and 105 are the aluminium mirror coating effect of anode of holding concurrently, 106 front glass substrates, 107 be black CuO every vitta, 108,109,110 are respectively red, green, blue fluorescent material.
Fig. 2 is the electrode wiring structural representation, wherein 201,202,203 is respectively X cloth line electrode, Y cloth line electrode and carbon nano pipe array.
Fig. 3 is the arrangement of carbon pipe on " U " shape trench wall, and wherein 301 is the back glass substrate, and 302 is negative electrode, and 303 is carbon nano pipe array, and 304 is grid.
Fig. 4 is the arrangement of carbon pipe on " V " shape trench wall, and wherein 401 is the back glass substrate, and 402 is negative electrode, and 403 is carbon nano pipe array, and 404 is grid.
Fig. 5 is the only arrangement on " U " shape groove cathode side walls of carbon pipe, and wherein 501 is the back glass substrate, and 502 is negative electrode, and 503 is carbon nano pipe array, and 504 is grid.
Fig. 6 is the only arrangement on " V " shape groove cathode side walls of carbon pipe, and wherein 601 is the back glass substrate, and 602 is negative electrode, and 603 is carbon nano pipe array, and 604 is grid.
At arranging nanotube array between cloudy, grid, wherein 701 be back glass substrate to Fig. 7 for directly, and 702 is negative electrode, and 703 is carbon nano pipe array, and 704 is grid.
Fig. 8 is only at negative electrode one side arranging nanotube array, and wherein 801 be back glass substrate, and 802 is negative electrode, and 803 is carbon nano pipe array, and 804 is grid.
Fig. 9 is the placement of separaant on metacoxal plate, and wherein 901 is the cloth line electrode, and 902 is pottery, and 903 is metal film, and 904 is wire, and 905 is carbon nano pipe array.
Figure 10 has the separaant stereogram of wire and metal film for two ends up and down, and wherein 1001 be ceramic, and 1002 is wire, and 1003 is metal film.
Figure 11 places sectional view for separaant, wherein 1101 is metacoxal plate, 1102,1003,1104 be respectively red, green, blue fluorescent material, 1105 is barrier, and 1106 is prebasal plate, 1107 is every vitta, 1108 is aluminium mirror coating, and 1109 is wire, and 1110 is metal film, 1111 is pottery, and 1112 is electrode wiring.
Figure 12 is the distribution map of barrier on prebasal plate, and wherein 1201 is prebasal plate, and 1202 is barrier, and 1203 is fluorescent material.List of references:
1, U.S. Pat 005861227
2、Electron?trajectory?analysis?of?surface?conduction?electron?emitter?displays(SEDS)，
J.SID，6，1998.
3、arbon?nanotube-based?field-emission?displays?for?large-area?and?full-color?applications
Japanese?journal?of?applied?physics，Vol.39(2000)pp.7154-7158，part?14、Field?emission?from?4.5?in.single-walled?and?multiwalled?carbon?nanotube?films， J.Vac.Sci.Technol.B?Mar/Apr?2000，pp.1054-10585、Fully?sealed，high-brightness?carbon-nanotube?field-emission?display， Applied?physics?letters，Vol.75，No.20，pp.3129-3131
Claims (11)
1, a kind of method of making based on three electrode Panchromatic great-arear flat-panel monitors of CNT (carbon nano-tube) field emission array, it is characterized in that negative electrode, grid are made on the same plane of metacoxal plate, and link to each other with Y cloth line electrode with mutually orthogonal X respectively, on substrate, constitute the equal electronics emission array of spacing one by one, forward and backward substrate supports with separaant, is shaped on colour screen and anode on the prebasal plate.
2, according to claims 1, said negative electrode and grid, it is characterized in that making metal valley by methods such as etching or printings, and directly in the trench wall two side or negative electrode one side with electrophoresis or select growth method (CVD method) arranging nanotube or carbon nano wire array.Utilize the big geometric field enhancer of carbon nano-tube and form dual enhancement effect, to reduce the cost of driving voltage and reduction Field Emission Display drive circuit by all arrange the carbon pipe at trench wall the moon, gate electrode.
3, according to claims 1, said negative electrode and grid, it is characterized in that by etching, print or the way that sandblasts is made the glass groove, at glass groove evaporation or printing metal film, and etching forms negative electrode and grid, then with electrophoresis or select growth method (CVD method) in the trench wall both sides or negative electrode one side arranging nanotube or carbon nano wire array.
4, according to claims 2 and 3, said metal valley and glass groove, it is characterized in that by changing the geometry of groove, for example groove is made " U " shape or " V " shape, or make negative electrode a little higher than or be lower than grid, adjust the overall orientation of carbon nano pipe array and layout to reach the transfer ratio (guiding anode electron number and the ratio of negative electrode into) of adjusting emitting electrons to grid emitting electrons number.
5, according to claims 2 and 3, said electrophoresis is characterized in that adding auxiliary electrode and makes carbon pipe overall orientation point to anode as far as possible, thereby increases substantially the transfer ratio of electronics in electrophoresis.
6, according to claims 2 and 3, said electrophoresis, it is characterized in that in electrophoresis, adding auxiliary electrode and change the overall orientation that direction of an electric field reaches the adjustment carbon nano pipe array, thereby reach the transfer ratio of adjusting emitting electrons by changing each electrode voltage.
7, according to claims 2 and 3, the said electrophoresis that utilizes is characterized in that utilizing mask means to prevent arranging nanotube array on the cloth line electrode at trench wall arranging nanotube array.
8, according to claims 2 and 3, the said back-and-forth method carbon nano tube array grows of using, it is characterized in that only allowing metal catalyst particles deposit at trench wall by the way of photoetching, thereby carbon nano-tube or carbon nano wire can only be grown at trench wall, and in growth course, come the overall orientation of controlling carbon nanotube with electric field.
9, according to claims 6 and 7, said carbon nano-tube or carbon nano wire array, it is characterized in that the carbon nano-tube (carbon nano wire) that fuses and to form " bridging " between negative electrode and grid by the method that adds pulse current, and make carbon nano-tube or carbon nano wire that approximately uniform length be arranged.
10, according to claims 1, said prebasal plate utilizes screen printing technique or dispensing technology to form barrier rib, forms the red, green, blue phosphor powder layer with dotting glue method between adjacent barrier, AM aluminum metallization reflectance coating on bisque again, and this aluminium lamination also is an anode.
11, according to claims 1, said separaant is characterized in that making with potsherd, and trench wall is vertical between cloudy on its trend and the metacoxal plate, grid, and with prebasal plate on barrier move towards vertical.
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Cited By (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1725416A (en) * | 2004-07-22 | 2006-01-25 | 清华大学 | Field emission display device and preparation method thereof |
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| CN100405524C (en) * | 2004-06-02 | 2008-07-23 | 清华大学 | Double faced field emission display |
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