CN1368529A - 合成氧化铈研磨颗粒的组合物及方法 - Google Patents
合成氧化铈研磨颗粒的组合物及方法 Download PDFInfo
- Publication number
- CN1368529A CN1368529A CN01103719A CN01103719A CN1368529A CN 1368529 A CN1368529 A CN 1368529A CN 01103719 A CN01103719 A CN 01103719A CN 01103719 A CN01103719 A CN 01103719A CN 1368529 A CN1368529 A CN 1368529A
- Authority
- CN
- China
- Prior art keywords
- cerium oxide
- cerium
- composition
- temperature
- particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002245 particle Substances 0.000 title claims abstract description 32
- 239000000203 mixture Substances 0.000 title claims abstract description 18
- 229910000420 cerium oxide Inorganic materials 0.000 title claims description 32
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 title claims description 32
- 238000000034 method Methods 0.000 title claims description 22
- 230000002194 synthesizing effect Effects 0.000 title abstract description 11
- 238000000227 grinding Methods 0.000 title abstract description 9
- 229910002651 NO3 Inorganic materials 0.000 claims abstract description 12
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 claims abstract description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 12
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 claims abstract description 8
- -1 amine salt Chemical class 0.000 claims abstract description 8
- 239000004202 carbamide Substances 0.000 claims abstract description 8
- 238000002156 mixing Methods 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 8
- 239000011259 mixed solution Substances 0.000 claims description 7
- 238000010992 reflux Methods 0.000 claims description 7
- 229910052684 Cerium Inorganic materials 0.000 claims description 6
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 claims description 5
- LQCIDLXXSFUYSA-UHFFFAOYSA-N cerium(4+);tetranitrate Chemical compound [Ce+4].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O LQCIDLXXSFUYSA-UHFFFAOYSA-N 0.000 claims description 3
- 150000002823 nitrates Chemical class 0.000 claims description 3
- 238000003303 reheating Methods 0.000 claims 1
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 abstract description 3
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 abstract description 3
- 238000005498 polishing Methods 0.000 description 17
- 238000004519 manufacturing process Methods 0.000 description 12
- 239000002002 slurry Substances 0.000 description 12
- 239000000843 powder Substances 0.000 description 11
- YNKVVRHAQCDJQM-UHFFFAOYSA-P diazanium dinitrate Chemical compound [NH4+].[NH4+].[O-][N+]([O-])=O.[O-][N+]([O-])=O YNKVVRHAQCDJQM-UHFFFAOYSA-P 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 229910052581 Si3N4 Inorganic materials 0.000 description 6
- 229910052681 coesite Inorganic materials 0.000 description 6
- 229910052906 cristobalite Inorganic materials 0.000 description 6
- 238000002360 preparation method Methods 0.000 description 6
- 239000000377 silicon dioxide Substances 0.000 description 6
- 229910052682 stishovite Inorganic materials 0.000 description 6
- 229910052905 tridymite Inorganic materials 0.000 description 6
- 239000008367 deionised water Substances 0.000 description 5
- 229910021641 deionized water Inorganic materials 0.000 description 5
- 230000006911 nucleation Effects 0.000 description 4
- 238000010899 nucleation Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000003837 high-temperature calcination Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000001556 precipitation Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000012736 aqueous medium Substances 0.000 description 2
- HSJPMRKMPBAUAU-UHFFFAOYSA-N cerium(3+);trinitrate Chemical compound [Ce+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O HSJPMRKMPBAUAU-UHFFFAOYSA-N 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000001027 hydrothermal synthesis Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 239000003082 abrasive agent Substances 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000005442 atmospheric precipitation Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 150000001639 boron compounds Chemical class 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- GHLITDDQOMIBFS-UHFFFAOYSA-H cerium(3+);tricarbonate Chemical compound [Ce+3].[Ce+3].[O-]C([O-])=O.[O-]C([O-])=O.[O-]C([O-])=O GHLITDDQOMIBFS-UHFFFAOYSA-H 0.000 description 1
- ITZXULOAYIAYNU-UHFFFAOYSA-N cerium(4+) Chemical compound [Ce+4] ITZXULOAYIAYNU-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- QBEGYEWDTSUVHH-UHFFFAOYSA-P diazanium;cerium(3+);pentanitrate Chemical compound [NH4+].[NH4+].[Ce+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O QBEGYEWDTSUVHH-UHFFFAOYSA-P 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000010335 hydrothermal treatment Methods 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G07—CHECKING-DEVICES
- G07F—COIN-FREED OR LIKE APPARATUS
- G07F17/00—Coin-freed apparatus for hiring articles; Coin-freed facilities or services
- G07F17/32—Coin-freed apparatus for hiring articles; Coin-freed facilities or services for games, toys, sports, or amusements
-
- G—PHYSICS
- G07—CHECKING-DEVICES
- G07F—COIN-FREED OR LIKE APPARATUS
- G07F17/00—Coin-freed apparatus for hiring articles; Coin-freed facilities or services
- G07F17/32—Coin-freed apparatus for hiring articles; Coin-freed facilities or services for games, toys, sports, or amusements
- G07F17/3225—Data transfer within a gaming system, e.g. data sent between gaming machines and users
- G07F17/3232—Data transfer within a gaming system, e.g. data sent between gaming machines and users wherein the operator is informed
-
- G—PHYSICS
- G07—CHECKING-DEVICES
- G07F—COIN-FREED OR LIKE APPARATUS
- G07F17/00—Coin-freed apparatus for hiring articles; Coin-freed facilities or services
- G07F17/32—Coin-freed apparatus for hiring articles; Coin-freed facilities or services for games, toys, sports, or amusements
- G07F17/3244—Payment aspects of a gaming system, e.g. payment schemes, setting payout ratio, bonus or consolation prizes
- G07F17/3253—Payment aspects of a gaming system, e.g. payment schemes, setting payout ratio, bonus or consolation prizes involving articles, e.g. paying in bottles, paying out toys
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pinball Game Machines (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
Description
SiO2磨除率(Å/min) | Si3N4磨除率(Å/min) | 选择率 | |
实施例1 | 1969.3 | 161.16 | 12.22 |
实施例2 | 2387.4 | 250.92 | 9.52 |
实施例3 | 3436.2 | 686.61 | 5.00 |
实施例4 | 604.23 | 65.331 | 9.25 |
实施例5 | 2258.5 | 220.82 | 10.23 |
实施例6 | 3723.4 | 455.72 | 8.17 |
Claims (13)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000159201A JP3411255B2 (ja) | 2000-05-29 | 2000-05-29 | ゲーム機の景品管理システム |
CNB011037199A CN1164710C (zh) | 2000-05-29 | 2001-02-06 | 合成氧化铈研磨颗粒的组合物及方法 |
US10/143,218 US7112132B2 (en) | 2000-05-29 | 2002-05-09 | Prize management system of game machine |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000159201A JP3411255B2 (ja) | 2000-05-29 | 2000-05-29 | ゲーム機の景品管理システム |
CNB011037199A CN1164710C (zh) | 2000-05-29 | 2001-02-06 | 合成氧化铈研磨颗粒的组合物及方法 |
US10/143,218 US7112132B2 (en) | 2000-05-29 | 2002-05-09 | Prize management system of game machine |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1368529A true CN1368529A (zh) | 2002-09-11 |
CN1164710C CN1164710C (zh) | 2004-09-01 |
Family
ID=31498876
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB011037199A Expired - Fee Related CN1164710C (zh) | 2000-05-29 | 2001-02-06 | 合成氧化铈研磨颗粒的组合物及方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7112132B2 (zh) |
JP (1) | JP3411255B2 (zh) |
CN (1) | CN1164710C (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100351179C (zh) * | 2005-06-09 | 2007-11-28 | 江苏工业学院 | 单分散球形氧化铈的制备方法及其在高精密抛光中的用途 |
US7682584B2 (en) | 2005-11-14 | 2010-03-23 | Lg Chem, Ltd. | Cerium carbonate powder, cerium oxide powder, method for preparing the same, and CMP slurry comprising the same |
US10639621B2 (en) | 2018-03-05 | 2020-05-05 | Qatar University | Nanoporous cerium oxide with interconnected pores for catalysis and a cost-effective method of preparing thereof |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002065278A2 (en) * | 2001-02-12 | 2002-08-22 | Lto Limited | A presentation server which enables a client device to run a network based application |
JP4178285B2 (ja) * | 2002-08-09 | 2008-11-12 | 豊丸産業株式会社 | 遊技機 |
JP2004084258A (ja) * | 2002-08-26 | 2004-03-18 | Toyomaru Industry Co Ltd | 施錠システム、遊技機及び装置管理システム |
JP2005084827A (ja) * | 2003-09-05 | 2005-03-31 | Ntt Docomo Inc | サーバ装置、及び情報提供方法 |
JP4821103B2 (ja) * | 2004-09-24 | 2011-11-24 | 富士通株式会社 | 人気景品情報取得システム及びプログラム |
JP4692920B2 (ja) * | 2005-01-12 | 2011-06-01 | 株式会社セガ | 景品取得ゲーム装置及びその運用システム |
JP4552678B2 (ja) * | 2005-02-04 | 2010-09-29 | 株式会社セガ | 景品取得遊戯装置 |
JP2007007123A (ja) * | 2005-06-30 | 2007-01-18 | Hitachi Ltd | 景品ゲーム機の景品管理システム、景品ゲーム機の景品管理装置、及びサーバ装置 |
JP4500966B2 (ja) * | 2005-07-12 | 2010-07-14 | 株式会社タイトー | 景品取得ゲーム機及び景品取得ゲームシステム |
KR101961072B1 (ko) * | 2018-11-12 | 2019-03-21 | 김현기 | 온라인용 크레인 게임기 및 크레인게임 시스템 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5271628A (en) * | 1987-05-30 | 1993-12-21 | Universal Co., Ltd. | Crane game machine |
JPH07148344A (ja) | 1993-11-30 | 1995-06-13 | Kokoro:Kk | 自動販売機 |
JPH07246282A (ja) | 1994-03-09 | 1995-09-26 | Sega Enterp Ltd | プライズゲームマシン |
US5982284A (en) * | 1997-09-19 | 1999-11-09 | Avery Dennison Corporation | Tag or label with laminated thin, flat, flexible device |
US6609969B1 (en) * | 1999-09-13 | 2003-08-26 | Sierra Design Group | Apparatus and method for dispensing of awards |
JP2001276411A (ja) | 2001-03-27 | 2001-10-09 | Keiei Kikakushitsu:Kk | プライズマシン用景品の在庫及び利益管理システム |
-
2000
- 2000-05-29 JP JP2000159201A patent/JP3411255B2/ja not_active Expired - Fee Related
-
2001
- 2001-02-06 CN CNB011037199A patent/CN1164710C/zh not_active Expired - Fee Related
-
2002
- 2002-05-09 US US10/143,218 patent/US7112132B2/en not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100351179C (zh) * | 2005-06-09 | 2007-11-28 | 江苏工业学院 | 单分散球形氧化铈的制备方法及其在高精密抛光中的用途 |
US7682584B2 (en) | 2005-11-14 | 2010-03-23 | Lg Chem, Ltd. | Cerium carbonate powder, cerium oxide powder, method for preparing the same, and CMP slurry comprising the same |
US10639621B2 (en) | 2018-03-05 | 2020-05-05 | Qatar University | Nanoporous cerium oxide with interconnected pores for catalysis and a cost-effective method of preparing thereof |
Also Published As
Publication number | Publication date |
---|---|
US7112132B2 (en) | 2006-09-26 |
CN1164710C (zh) | 2004-09-01 |
JP2001334063A (ja) | 2001-12-04 |
JP3411255B2 (ja) | 2003-05-26 |
US20030211876A1 (en) | 2003-11-13 |
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SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: CHANGXING DEVELOPMENT TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: CHANGXING CHEMICAL INDUSTRY CO LTD Effective date: 20060707 |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20060707 Address after: Taiwan, China Patentee after: Changxing Development Technology Co., Ltd. Address before: Taiwan, China Patentee before: Changxing Chemical Industrial Co., Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20040901 Termination date: 20190206 |
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CF01 | Termination of patent right due to non-payment of annual fee |