CN1297385A - 用于处理诸如半导体晶片之类的工件的工艺和设备 - Google Patents
用于处理诸如半导体晶片之类的工件的工艺和设备 Download PDFInfo
- Publication number
- CN1297385A CN1297385A CN99805068A CN99805068A CN1297385A CN 1297385 A CN1297385 A CN 1297385A CN 99805068 A CN99805068 A CN 99805068A CN 99805068 A CN99805068 A CN 99805068A CN 1297385 A CN1297385 A CN 1297385A
- Authority
- CN
- China
- Prior art keywords
- liquid
- ozone
- workpiece
- equipment
- fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
- B08B2203/005—Details of cleaning machines or methods involving the use or presence of liquid or steam the liquid being ozonated
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2230/00—Other cleaning aspects applicable to all B08B range
- B08B2230/01—Cleaning with steam
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning In General (AREA)
Abstract
Description
Claims (99)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US6131898A | 1998-04-16 | 1998-04-16 | |
US9906798P | 1998-09-03 | 1998-09-03 | |
US12530999P | 1999-03-19 | 1999-03-19 | |
US60/125,309 | 1999-03-19 | ||
US60/099,067 | 1999-03-19 | ||
US09/061,318 | 1999-03-19 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1297385A true CN1297385A (zh) | 2001-05-30 |
CN1126609C CN1126609C (zh) | 2003-11-05 |
Family
ID=27370024
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN99805068A Expired - Fee Related CN1126609C (zh) | 1998-04-16 | 1999-04-16 | 用于处理半导体晶片工件的工艺和设备 |
Country Status (8)
Country | Link |
---|---|
EP (1) | EP1100630B1 (zh) |
JP (1) | JP3515521B2 (zh) |
KR (1) | KR100572295B1 (zh) |
CN (1) | CN1126609C (zh) |
AT (1) | ATE259681T1 (zh) |
DE (2) | DE1100630T1 (zh) |
TW (1) | TW405178B (zh) |
WO (1) | WO1999052654A1 (zh) |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1324659C (zh) * | 2002-04-09 | 2007-07-04 | 夏普株式会社 | 半导体圆片清洗设备 |
CN1326638C (zh) * | 2002-07-19 | 2007-07-18 | 上海华虹(集团)有限公司 | 一种去除硅化物形成过程中多余金属的方法 |
CN100444309C (zh) * | 2003-12-22 | 2008-12-17 | 拉姆研究公司 | 边沿轮干燥流管 |
CN102000676A (zh) * | 2009-08-31 | 2011-04-06 | 日立电线株式会社 | 金属元件的表面处理方法及清洁喷嘴 |
CN101262938B (zh) * | 2005-06-28 | 2011-10-26 | 迦南精机株式会社 | 表面改质构件、表面处理方法及表面处理装置 |
CN102027581B (zh) * | 2008-03-13 | 2012-12-26 | 可持续能源联盟有限责任公司 | 用于半导体晶片处理的光腔炉 |
CN102902169A (zh) * | 2011-07-29 | 2013-01-30 | 中芯国际集成电路制造(上海)有限公司 | 去除光刻胶层的方法 |
WO2014183339A1 (zh) * | 2013-05-15 | 2014-11-20 | 京东方科技集团股份有限公司 | 基板清洗装置、***及方法 |
CN101001704B (zh) * | 2004-06-14 | 2016-01-20 | Fsi国际公司 | 在一个或多个晶片上带出流体及随后干燥处理的***和方法 |
CN105336577A (zh) * | 2014-08-14 | 2016-02-17 | 无锡华瑛微电子技术有限公司 | 半导体基片表面钝化层的形成方法 |
CN105336645A (zh) * | 2014-08-14 | 2016-02-17 | 无锡华瑛微电子技术有限公司 | 利用含臭氧的流体处理半导体晶片表面的装置及方法 |
CN105408032A (zh) * | 2013-05-31 | 2016-03-16 | 米切尔·鲍尔戴特 | 电子部件和/或电路专用清洁装置 |
CN106606890A (zh) * | 2015-10-27 | 2017-05-03 | 细美事有限公司 | 溶存臭氧去除单元、基板处理装置、溶存臭氧去除方法及基板清洗方法 |
CN108431929A (zh) * | 2015-11-14 | 2018-08-21 | 东京毅力科创株式会社 | 使用稀释的tmah处理微电子基底的方法 |
CN109659229A (zh) * | 2017-10-10 | 2019-04-19 | 应用材料公司 | 用臭氧进行化学机械抛光(cmp)处理的方法 |
CN113613803A (zh) * | 2019-04-08 | 2021-11-05 | Mks仪器有限公司 | 用于产生具有降低的溶解载气和氧含量的溶解氨溶液的***和方法 |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6701941B1 (en) | 1997-05-09 | 2004-03-09 | Semitool, Inc. | Method for treating the surface of a workpiece |
US7264680B2 (en) | 1997-05-09 | 2007-09-04 | Semitool, Inc. | Process and apparatus for treating a workpiece using ozone |
US7404863B2 (en) | 1997-05-09 | 2008-07-29 | Semitool, Inc. | Methods of thinning a silicon wafer using HF and ozone |
US20020157686A1 (en) * | 1997-05-09 | 2002-10-31 | Semitool, Inc. | Process and apparatus for treating a workpiece such as a semiconductor wafer |
US6869487B1 (en) | 1997-05-09 | 2005-03-22 | Semitool, Inc. | Process and apparatus for treating a workpiece such as a semiconductor wafer |
US5971368A (en) | 1997-10-29 | 1999-10-26 | Fsi International, Inc. | System to increase the quantity of dissolved gas in a liquid and to maintain the increased quantity of dissolved gas in the liquid until utilized |
US6235641B1 (en) | 1998-10-30 | 2001-05-22 | Fsi International Inc. | Method and system to control the concentration of dissolved gas in a liquid |
US6406551B1 (en) * | 1999-05-14 | 2002-06-18 | Fsi International, Inc. | Method for treating a substrate with heat sensitive agents |
US6790783B1 (en) * | 1999-05-27 | 2004-09-14 | Micron Technology, Inc. | Semiconductor fabrication apparatus |
US6982006B1 (en) | 1999-10-19 | 2006-01-03 | Boyers David G | Method and apparatus for treating a substrate with an ozone-solvent solution |
US6686297B1 (en) | 2000-08-17 | 2004-02-03 | Georg Gogg | Method of manufacturing a semiconductor device and apparatus to be used therefore |
WO2002029857A1 (en) | 2000-10-05 | 2002-04-11 | Koninklijke Philips Electronics N.V. | Method of cleaning electronic device |
DE10061288A1 (de) * | 2000-12-08 | 2002-07-11 | Steag Micro Tech Gmbh | Vorrichtung und Verfahren zum Behandeln von Substraten |
KR100526575B1 (ko) * | 2003-12-11 | 2005-11-04 | 주식회사 하이닉스반도체 | 반도체 소자의 소자 분리막 형성 방법 |
US20060070979A1 (en) * | 2004-09-17 | 2006-04-06 | Christenson Kurt K | Using ozone to process wafer like objects |
US7592264B2 (en) | 2005-11-23 | 2009-09-22 | Fsi International, Inc. | Process for removing material from substrates |
DE102006003990A1 (de) * | 2006-01-23 | 2007-08-02 | Gebr. Schmid Gmbh & Co. | Verfahren und Vorrichtung zum Aufbereiten bzw. Bearbeiten von Siliziummaterial |
KR100880510B1 (ko) * | 2006-09-26 | 2009-01-28 | 주식회사 포스코 | 표면세정장치 |
JP4536711B2 (ja) * | 2006-12-25 | 2010-09-01 | 東京エレクトロン株式会社 | 基板処理装置 |
JP2007266636A (ja) * | 2007-07-09 | 2007-10-11 | Tokyo Electron Ltd | 基板処理装置 |
US8709165B2 (en) | 2010-12-03 | 2014-04-29 | Lam Research Ag | Method and apparatus for surface treatment using inorganic acid and ozone |
CN102799083A (zh) * | 2012-08-29 | 2012-11-28 | 上海宏力半导体制造有限公司 | 光刻胶去除***以及光刻设备 |
US8871108B2 (en) | 2013-01-22 | 2014-10-28 | Tel Fsi, Inc. | Process for removing carbon material from substrates |
US10464107B2 (en) | 2013-10-24 | 2019-11-05 | SCREEN Holdings Co., Ltd. | Substrate processing method and substrate processing apparatus |
CN107138474B (zh) * | 2017-07-19 | 2019-05-07 | 丽水学院 | 一种模具生产用自动清洗应力处理装置 |
WO2019024892A1 (zh) * | 2017-08-03 | 2019-02-07 | 无锡华瑛微电子技术有限公司 | 一种光刻胶的去除液及光刻胶的去除方法 |
JP6560373B2 (ja) * | 2018-01-15 | 2019-08-14 | 株式会社Screenホールディングス | 基板処理方法および基板処理装置 |
CN112909131A (zh) * | 2021-03-15 | 2021-06-04 | 宁夏隆基乐叶科技有限公司 | 硅片的处理***及处理方法、太阳能电池及其制作方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3818714A1 (de) * | 1988-06-01 | 1989-12-14 | Wacker Chemitronic | Verfahren zur nasschemischen oberflaechenbehandlung von halbleiterscheiben |
ATE152487T1 (de) * | 1988-07-08 | 1997-05-15 | Rhone Poulenc Chimie | Reinigung und trocknung von elektronischen bauteilen |
US5261966A (en) * | 1991-01-28 | 1993-11-16 | Kabushiki Kaisha Toshiba | Method of cleaning semiconductor wafers using mixer containing a bundle of gas permeable hollow yarns |
JPH04302145A (ja) * | 1991-03-29 | 1992-10-26 | Hitachi Ltd | 洗浄方法 |
US5120370A (en) * | 1991-04-01 | 1992-06-09 | Shinichi Mori | Cleaning process |
JP3261683B2 (ja) * | 1991-05-31 | 2002-03-04 | 忠弘 大見 | 半導体の洗浄方法及び洗浄装置 |
JPH05152203A (ja) * | 1991-11-29 | 1993-06-18 | Chlorine Eng Corp Ltd | 基板処理方法および処理装置 |
KR940012061A (ko) * | 1992-11-27 | 1994-06-22 | 가나이 쯔또무 | 유기물제거방법 및 그 방법을 이용하기 위한 유기물제거장치 |
US5647386A (en) * | 1994-10-04 | 1997-07-15 | Entropic Systems, Inc. | Automatic precision cleaning apparatus with continuous on-line monitoring and feedback |
JPH0969509A (ja) * | 1995-09-01 | 1997-03-11 | Matsushita Electron Corp | 半導体ウェーハの洗浄・エッチング・乾燥装置及びその使用方法 |
US5858107A (en) * | 1998-01-07 | 1999-01-12 | Raytheon Company | Liquid carbon dioxide cleaning using jet edge sonic whistles at low temperature |
-
1999
- 1999-04-16 KR KR1020007011436A patent/KR100572295B1/ko not_active IP Right Cessation
- 1999-04-16 DE DE1100630T patent/DE1100630T1/de active Pending
- 1999-04-16 EP EP99918658A patent/EP1100630B1/en not_active Expired - Lifetime
- 1999-04-16 AT AT99918658T patent/ATE259681T1/de active
- 1999-04-16 JP JP2000543258A patent/JP3515521B2/ja not_active Expired - Fee Related
- 1999-04-16 TW TW088106089A patent/TW405178B/zh not_active IP Right Cessation
- 1999-04-16 DE DE69914917T patent/DE69914917T2/de not_active Expired - Lifetime
- 1999-04-16 WO PCT/US1999/008516 patent/WO1999052654A1/en active IP Right Grant
- 1999-04-16 CN CN99805068A patent/CN1126609C/zh not_active Expired - Fee Related
Cited By (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7360546B2 (en) | 2002-04-09 | 2008-04-22 | Sharp Kabushiki Kaisha | Cleaning apparatus for semiconductor wafer |
CN1324659C (zh) * | 2002-04-09 | 2007-07-04 | 夏普株式会社 | 半导体圆片清洗设备 |
CN1326638C (zh) * | 2002-07-19 | 2007-07-18 | 上海华虹(集团)有限公司 | 一种去除硅化物形成过程中多余金属的方法 |
CN100444309C (zh) * | 2003-12-22 | 2008-12-17 | 拉姆研究公司 | 边沿轮干燥流管 |
CN101001704B (zh) * | 2004-06-14 | 2016-01-20 | Fsi国际公司 | 在一个或多个晶片上带出流体及随后干燥处理的***和方法 |
CN101262938B (zh) * | 2005-06-28 | 2011-10-26 | 迦南精机株式会社 | 表面改质构件、表面处理方法及表面处理装置 |
CN102027581B (zh) * | 2008-03-13 | 2012-12-26 | 可持续能源联盟有限责任公司 | 用于半导体晶片处理的光腔炉 |
CN102000676A (zh) * | 2009-08-31 | 2011-04-06 | 日立电线株式会社 | 金属元件的表面处理方法及清洁喷嘴 |
CN102902169A (zh) * | 2011-07-29 | 2013-01-30 | 中芯国际集成电路制造(上海)有限公司 | 去除光刻胶层的方法 |
WO2014183339A1 (zh) * | 2013-05-15 | 2014-11-20 | 京东方科技集团股份有限公司 | 基板清洗装置、***及方法 |
CN105408032A (zh) * | 2013-05-31 | 2016-03-16 | 米切尔·鲍尔戴特 | 电子部件和/或电路专用清洁装置 |
CN105336577A (zh) * | 2014-08-14 | 2016-02-17 | 无锡华瑛微电子技术有限公司 | 半导体基片表面钝化层的形成方法 |
CN105336645A (zh) * | 2014-08-14 | 2016-02-17 | 无锡华瑛微电子技术有限公司 | 利用含臭氧的流体处理半导体晶片表面的装置及方法 |
CN105336645B (zh) * | 2014-08-14 | 2021-04-30 | 无锡华瑛微电子技术有限公司 | 利用含臭氧的流体处理半导体晶片表面的装置及方法 |
CN106606890A (zh) * | 2015-10-27 | 2017-05-03 | 细美事有限公司 | 溶存臭氧去除单元、基板处理装置、溶存臭氧去除方法及基板清洗方法 |
US10453672B2 (en) | 2015-10-27 | 2019-10-22 | Semes Co., Ltd. | Dissolved ozone removal unit, apparatus for treating substrate, method of removing dissolved ozone, and method of cleaning substrate |
CN108431929A (zh) * | 2015-11-14 | 2018-08-21 | 东京毅力科创株式会社 | 使用稀释的tmah处理微电子基底的方法 |
CN108431929B (zh) * | 2015-11-14 | 2023-03-31 | 东京毅力科创株式会社 | 使用稀释的tmah处理微电子基底的方法 |
CN109659229A (zh) * | 2017-10-10 | 2019-04-19 | 应用材料公司 | 用臭氧进行化学机械抛光(cmp)处理的方法 |
CN113613803A (zh) * | 2019-04-08 | 2021-11-05 | Mks仪器有限公司 | 用于产生具有降低的溶解载气和氧含量的溶解氨溶液的***和方法 |
US11691111B2 (en) | 2019-04-08 | 2023-07-04 | Mks Instruments, Inc. | Systems and methods for generating a dissolved ammonia solution with reduced dissolved carrier gas and oxygen content |
CN113613803B (zh) * | 2019-04-08 | 2024-02-02 | Mks仪器有限公司 | 用于供应清洗液体的***和方法 |
Also Published As
Publication number | Publication date |
---|---|
KR20010034784A (ko) | 2001-04-25 |
WO1999052654A1 (en) | 1999-10-21 |
EP1100630A4 (en) | 2001-07-04 |
DE1100630T1 (de) | 2001-09-06 |
DE69914917D1 (de) | 2004-03-25 |
EP1100630B1 (en) | 2004-02-18 |
CN1126609C (zh) | 2003-11-05 |
DE69914917T2 (de) | 2005-01-05 |
JP3515521B2 (ja) | 2004-04-05 |
KR100572295B1 (ko) | 2006-04-24 |
JP2002511644A (ja) | 2002-04-16 |
TW405178B (en) | 2000-09-11 |
ATE259681T1 (de) | 2004-03-15 |
EP1100630A1 (en) | 2001-05-23 |
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