CN1282878A - Small high-speed piezoelectric tilting mirror - Google Patents
Small high-speed piezoelectric tilting mirror Download PDFInfo
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- CN1282878A CN1282878A CN99115049.XA CN99115049A CN1282878A CN 1282878 A CN1282878 A CN 1282878A CN 99115049 A CN99115049 A CN 99115049A CN 1282878 A CN1282878 A CN 1282878A
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- 239000000919 ceramic Substances 0.000 claims abstract description 22
- 230000003287 optical effect Effects 0.000 abstract description 3
- 238000004458 analytical method Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
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Abstract
A small high-speed piezoelectric inclined reflector belongs to the technical field of beam control optical wavefront correction and is characterized in that an even number of driving units (1) and (2) which are respectively used as the x direction and the y direction are integrated on a piezoelectric ceramic piece (4), one surface of each driving unit is an anode, the other surface of each driving unit is a cathode, a plurality of piezoelectric ceramic pieces (4) with an even number of driving units used as the x direction and the y direction are correspondingly overlapped, bonded and connected in parallel according to each driving unit to form an integrated multipoint integral structure piezoelectric driver (17), the front surface of the driver (17) is connected with a reflector (19), and the back surface of the driver (17) is fixedly connected with. The product has the advantages of small volume, light weight, low cost, good performance, wide application range and the like.
Description
The present invention is a kind of high-speed small piezoelectric tilt reflector, belongs to optical wavefront alignment technique field in the Beam Control technology, particularly the design and manufacturing technology field of analysis of fast piezo steering catoptron.
The analysis of fast piezo steering catoptron with its at a high speed (response time≤1ms), high precision (the active controllable characteristics of resolution 0.1 "); be applied in the Beam Control of multiple optical system; can finish correct for tilt errors, follow the tracks of, light beam is stable or the multiple function of beam flying or the like by precision optics.
Bidimensional (or one dimension) analysis of fast piezo steering catoptron, normally adopt three piezoelectric actuators to be fixed between microscope base base plate and the catoptron, one of them piezoelectric actuator is a fixed pivot, and two other piezoelectric actuator is respectively and promotes the moving fulcrum of catoptron around x axle or the rotation of y axle.Its weak point is:
1, each piezoelectric actuator all adopts bonding being formed in parallel of multi-disc piezoelectric ceramics stack, and the making workload of three drivers is big, and the cycle is long, the cost height.
2, because tilting mirror will guarantee the size of the rigidity of piezoelectric actuator and displacement, driver can not do too for a short time, so whole tilting mirror size is bigger, volume, weight are big, and usable range is limited, especially can't satisfy the application in spationautics field, particularly moonlet.
The objective of the invention is to avoid above-mentioned the deficiencies in the prior art and provide that a kind of volume is little, in light weight, cost is low, broad-spectrum microminiature analysis of fast piezo steering catoptron.
Purpose of the present invention can reach by following measure: high-speed small piezoelectric tilt reflector, its x, the driver of y both direction concentrates on each piece piezoelectric ceramic piece, promptly on a piezoelectric ceramic piece, be integrated with even number at least respectively as the driver element of x and y direction, x, the one side of the driver element of y direction is anodal, another side is a negative pole, multi-disc has even number respectively as the bonding integrated form multi-point integral structure piezoelectric actuator that constitutes in parallel of the corresponding stack of piezoelectric ceramic piece of the driver element of x and y direction, the one end is fixed in the microscope base base plate, and the other end and catoptron connect.
Purpose of the present invention can also reach by following measure: each piezoelectric ceramic piece is integrated with two driver elements as x and y direction, and with the distribution triangular in shape of center fixation fulcrum; Be integrated with four on each sheet piezoelectric ceramic piece in twos as the driver element of x and y direction, and with the distribution that is centrosymmetric of center fixation fulcrum; The positive pole and the negative wire of the driver element of x, y direction are drawn by the side respectively on each piezoelectric ceramic piece, are connected with high-voltage amplifier respectively after the corresponding separately parallel connection of each sheet both positive and negative polarity.
Description of drawings:
Fig. 1 is embodiment 1 piezoelectric ceramic piece Facad structure figure
Fig. 2 is embodiment 1 piezoelectric ceramic piece structure figure
Fig. 3 is embodiment 2 piezoelectric ceramic piece Facad structure figure
Fig. 4 is embodiment 2 piezoelectric ceramic piece structure figure
Fig. 5 is a structural drawing of the present invention
The present invention is further detailed in conjunction with the accompanying drawings below
As shown in Figure 1, be integrated with two on each sheet piezoelectric ceramic piece (4) respectively as driver element (1), (2) of x, y direction, and with center fixation fulcrum (3) distribution triangular in shape, the front is anodal, the back side is negative pole (as shown in Figure 2).The positive wire of each driver element (5,6), negative wire (7,8) is drawn by the side.
As shown in Figure 3, be integrated with four driver element (1), (2) on each sheet piezoelectric ceramic piece (4) as x, y direction, and with center fixation fulcrum (3) arranged distribution that is centrosymmetric, its front is anodal, the back side is negative pole (as shown in Figure 4).Positive wire of each driver element (9,10,11,12) and negative wire (13,14,15,16) are drawn by the side.
As shown in Figure 5, with multi-disc have as above-mentioned Fig. 1,2 or Fig. 3,4 x, y direction driver element arranged piezoelectric ceramic piece (4) by the bonding integrated form multiple spot piezoelectric actuator (17) that constitutes in parallel of the corresponding stack of each driver element, the positive bonding catoptron (19) of driver (17), its reverse side fixed bonding is on microscope base base plate (18).The positive and negative lead wires of each driver element is drawn corresponding separately parallel connection by the side and is connected with high-voltage amplifier respectively.
During work, high-voltage amplifier imposes on the positive and negative external voltage of integrated form Multipoint Drive device (17) respectively, and the driver element (1) of x, y both direction, (2) deform, and promotes catoptron and does positive and negative direction inclination around x, y axle respectively.
The present invention compares prior art and has following advantage:
Adopt multi-disc with even number respectively as the piezoelectricity of the driver element of x, y direction Potsherd, whole by the bonding integrated form multiple spot that consists of in parallel of the corresponding stack of each driver element The body structure piezoelectric actuator, an end is fixed in the microscope base base plate, other end stationary mirror Structure, the size of greatly having dwindled tilting mirror, same the inclining of ± 1 ' tilt quantity that produces Tiltedly the mirror size can be decreased to φ 20 * 30, and than original little 4～5 times, weight reduces 6～9 Doubly. Resonant frequency can be enhanced about more than once, and can reach 600Hz at least. Owing to make Reducing of the raw material of driver and workload, cost reduce more than one times at least. By Reduce in volume, the little and high-performance of weight has enlarged range of application, and mainly being can Be applied in the space industry and go, particularly can adopt above the moonlet, solve country Urgent need.
Claims (5)
1, high-speed small piezoelectric tilt reflector, x between microscope base base plate and the catoptron, it is fixed pivot that the y axle intersects the center, the x that driven by the high-voltage amplifier signal, the y piezoelectric actuator is fixed between microscope base base plate and the catoptron, be to promote catoptron respectively around x, the moving fulcrum that the y axle rotates, it is characterized in that being integrated with even number respectively as x on the piezoelectric ceramic piece (4), the driver element of y direction (1), (2), the one side of driver element is anodal, another side is a negative pole, multi-disc has even number as x, the piezoelectric ceramic piece of the driver element of y direction (4), by the bonding integrated form multi-point integral structure piezoelectric actuator (17) that constitutes in parallel of the corresponding stack of each driver element, the front of driver (17) connects catoptron (19), and the back side is fixedly connected on microscope base base plate (18).
2, high-speed small piezoelectric tilt reflector as claimed in claim 1 is characterized in that being integrated with on each piezoelectric ceramic piece (4) two driver elements of x, y (1), (2), and with center fixation fulcrum (3) distribution triangular in shape.
3, high-speed small piezoelectric tilt reflector as claimed in claim 1, it is characterized in that being integrated with on each sheet piezoelectric ceramic piece (4) four respectively as driver element (1), (2) of x, y direction, and with center fixation fulcrum (3) arranged distribution that is centrosymmetric.
4, high-speed small piezoelectric tilt reflector as claimed in claim 1 or 2, it is characterized in that x, the driver element (1) of y direction, the positive and negative lead wires (5) of (2), (6), (7), (8) on each sheet piezoelectric ceramic piece (4) are drawn by the side, both positive and negative polarity (7), (8) parallel connection separately are connected with high-voltage amplifier respectively.
5, high-speed small piezoelectric tilt reflector as claimed in claim 1, it is characterized in that the x on the every piezoelectric ceramic piece (4), the driver element of y direction, draw from the side positive and negative lead wires (11), (12), (14), (16) of the positive and negative lead wires (9) of two driver elements (1), (10), (13), (15) and two driver elements (2), and corresponding one by one in parallel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB99115049XA CN1138990C (en) | 1999-07-30 | 1999-07-30 | Small high-speed piezoelectric tilting mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB99115049XA CN1138990C (en) | 1999-07-30 | 1999-07-30 | Small high-speed piezoelectric tilting mirror |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1282878A true CN1282878A (en) | 2001-02-07 |
| CN1138990C CN1138990C (en) | 2004-02-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB99115049XA Expired - Fee Related CN1138990C (en) | 1999-07-30 | 1999-07-30 | Small high-speed piezoelectric tilting mirror |
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| CN (1) | CN1138990C (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101878549B (en) * | 2007-11-28 | 2013-06-19 | 京瓷株式会社 | Laminated piezoelectric element, and injection device and fuel injection system having the element |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101455385B (en) * | 2008-11-27 | 2012-03-21 | 成都润馨堂药业有限公司 | Nutrient food capable of stimulating the appetite and invigorating the spleen |
-
1999
- 1999-07-30 CN CNB99115049XA patent/CN1138990C/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101878549B (en) * | 2007-11-28 | 2013-06-19 | 京瓷株式会社 | Laminated piezoelectric element, and injection device and fuel injection system having the element |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1138990C (en) | 2004-02-18 |
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