CN1260599A - Apparatus for treating backing and method thereof - Google Patents

Apparatus for treating backing and method thereof Download PDF

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Publication number
CN1260599A
CN1260599A CN99127779A CN99127779A CN1260599A CN 1260599 A CN1260599 A CN 1260599A CN 99127779 A CN99127779 A CN 99127779A CN 99127779 A CN99127779 A CN 99127779A CN 1260599 A CN1260599 A CN 1260599A
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China
Prior art keywords
substrate
space
processing
film
processing space
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CN99127779A
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Chinese (zh)
Inventor
森山公一朗
金井正博
大利博和
芳里直
冈田直人
下田宽嗣
尾裕之
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Canon Inc
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Canon Inc
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Publication of CN1260599A publication Critical patent/CN1260599A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67236—Apparatus for manufacturing or treating in a plurality of work-stations the substrates being processed being not semiconductor wafers, e.g. leadframes or chips
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/6776—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers

Abstract

A substrate-processing method comprising transporting a substrate to pass through a plurality of processing spaces communicated with each other while processing said substrate in each processing space, characterized in that based on an inner pressure of (a) one of said plurality of processing spaces, said inner pressure of said processing space (a) and an inner pressure of (b) at least one of the processing spaces arranged before or after said processing space (a) are controlled.A substrate-processing apparatus comprising a plurality of processing spaces, a substrate transportation means for transporting a substrate to pass through said plurality of processing spaces while said substrate being processed in each processing space, and a pressure gage of measuring an inner pressure of (a) one of said plurality of processing spaces, characterized in that said substrate-processing apparatus has a control unit for controlling the inner pressure of said processing space (a) and that of (b) at least one of the processing spaces arranged before or after said processing space (a) based on information obtained from said pressure gage.

Description

Handle the equipment and the method for substrate
The present invention relates to the processing method and the equipment of the substrate of employing in the semiconductor device manufacturing.(in order to simplify, hereinafter the method for handling substrate is called " Method of processing a substrate ", the equipment that substrate processing is used is called " substrate-treating apparatus ").The invention still further relates to film formation method and film forming device.Film formation method comprises the film formation method that forms the film of deposit with plasma chemical vapor deposition (below be called plasma CVD) or sputtering method on substrate continuously.The film forming device comprises the film forming device that forms deposited film with plasma CVD or sputtering method on substrate continuously.The present invention includes technology and the equipment of making photoelectric cell.
In order to form the function deposited film with a plurality of process chambers (film formation chamber) on substrate, known have plurality of devices to can be used as on band shape substrate, promptly forms deposited film on the coiled material substrate, to obtain semiconductor device.The typical example of these equipment has for example with the disclosed rolling type system continuous film forming device that forms deposited film on the coiled material substrate that is called in the United States Patent (USP) 4400409.This film forming device comprises the double-chamber structure that is arranged on a plurality of film formation chamber that are interconnected in a plurality of process chambers.Disclose in the described document make the long coiled material substrate that Rack is arranged by length direction along order by the transmitting continuously of process chamber to fixed line, and be formed with the element of semiconductor junction continuously.In the film forming device, each film formation chamber does not have can keep the alignment processing of vacuum state indoor in it.In order to prevent that the gaseous diffusion that the formation deposited film is used in each film formation chamber from polluting it, is provided with valve between two adjacent process chambers in the film formation chamber of next position.Valve comprises the elongated shape split tunnel, through this split tunnel adjacent process chamber is communicated with.Divided gas flow is Ar gas for example, H 2Gas flows to split tunnel and forms the divided gas flow air-flow, and adjacent process chamber is spaced from each other.In each process chamber, equipment is provided with the device of handling the film formation chamber that is provided with in the gas introducing equipment, comprise that blast pipe, vacuum pump etc. are used for the exhaust apparatus to vacuumizing in the film formation chamber, carry out for example plasma CVD of plasma treatment, or supply of electrical energy for example high-frequency electrical energy carry out sputter equipment, in film formation chamber, to produce isoionic device.Constitute the element of film formation chamber, and heater, for example be used for the coiled material substrate is heated to the heater that will form the required temperature of film on the coiled material substrate.
With above-mentioned a plurality of process chambers, can be on substrate the stacked multilayer deposited film that is formed with different materials or the different chemical component is arranged continuously.But, this a plurality of deposition chamber example of structure for example has (1) to be provided with a film formation chamber in a process chamber, in a process chamber, on the coiled material substrate, form a kind of deposited film, in (2) process chambers a plurality of film formation chamber are set, form the deposited film of same kind of multilayer or similar kind in a process chamber on the coiled material substrate respectively, one in (3) a plurality of process chambers is used for the heating cooling or corrodes the coiled material substrate not forming any deposited film thereon.For example, Japan special permission discloses the method that discloses the PIN junction type photoelectric cell that a kind of manufacturing property improved in 191120/1977, wherein, form P under certain condition with mutual different a plurality of film shapes chamber and form semiconductor layer, particularly, disclosed in this article with comprising a plurality of process chambers, and each process chamber there is the film forming device of film formation chamber, forms required deposited film in each film formation chamber that in a process chamber, is provided with and form the multi-lager semiconductor layer and make p type semiconductor layer.Can think that the situation of structure and above-mentioned (1) of this equipment is identical.In the above-mentioned document, owing to identical processing gas is arranged (promptly respectively in described each film formation chamber that is used to form p type semiconductor layer, film forms unstrpped gas), can think that equipment can adopt above-mentioned (2) described structure, is provided with the whole film formation chamber that are used to form p type semiconductor layer in a process chamber.
In addition, form and obtain under the situation of required film thickness being difficult in a film formation chamber, to carry out film, can be as device structure as described in above-mentioned (2), the identical a plurality of film formation chamber of film formation condition are set in a process chamber, utilize these a plurality of film formation chamber to form deposited film then and obtain required thickness.And, under the situation of above-mentioned (2), can reduce the quantity of process chamber and air valve, thereby can simplified apparatus and reduction equipment manufacturing cost.
And, as above-mentioned,, be suitable for producing in batches the function deposited film or the semiconductor device of photoelectric cell for example with the film formation method of film forming device of this continuous rolling that comprises a plurality of process chambers that communicate with each other.But, particularly in order to widely popularize the application of photoelectric cell (solar cell), then require further to improve conventional film forming device and method, with can be stable and produced better photoelectric conversion efficiency, the high-quality light electric device (solar cell) that character constancy is consistent with performance in batch in reasonable prices with these equipment and method with imitating.
The major reason that conventional film forming device and method can not satisfy this requirement is these problems about room pressure and bleed control and film formation condition that process chamber or film formation chamber will mention below existing.
Promptly, by film formation chamber inside being vacuumized come the internal pressure of (exhaust) control film formation chamber, known method is, with pressure controller internal pressure value that records in process chamber or the film formation chamber and the target internal force value of being scheduled to are compared, and the openings of sizes of adjusting vario valve, make its coupling.Fig. 3 and 4 all shows substrate-treating apparatus, wherein uses the internal pressure control method (this method is called " interior voltage-controlled method for making " hereinafter) of film formation chamber.
The problem that exists in the equipment shown in Figure 3 is that the pump speed imbalance of discharging gas from each film formation chamber changes.The problem that exists the film formation condition not change rapidly in the equipment shown in Figure 4.
Below will describe this situation in detail.
In the equipment shown in Figure 3, vario valve 109a-109c is connected among the processing space 104a-104c (film formation space) in the process chamber 103, for example, the measured value of pressure gauge 106a-106c is input to the pressure controller 110a-110c with valve controlled function, so that the openings of sizes amount of control vario valve 109a-109c is the internal pressure in controlling diaphragm formation space thus, each film forms the FEEDBACK CONTROL in space and carries out separately.In the equipment shown in Figure 3 used in the problem that exists of pressure-controlled method be, when the openings of sizes amount of vario valve 109a to 109c changes, correspondingly uneven and change from the pump speed of each film formation chamber's gas bleeding.
Cause the reason of this problem to think, it may be mutual spatial communication that each film formation space is set in same process chamber, for this reason, may be because following will illustrate former thereby cause film to form the internal pressure in space with different by the pressure of pressure controller demonstration.
Above-mentioned reason is: (I) the zero point error range or the pressure gauge linearity change, (II) in the error range of the setup pressure value of pressure controller, change or in described setup pressure value, change, (III) setting pressure that causes owing to the output drift changes, or because film forms the processing long time period and the variations in temperature of build-up of pressure meter itself, (IV) since the reactiveness of the processing gas in the discharge space (film formation space) that discharge is interrupted causing in undesired discharge or its change, (V) mechanical oscillation owing to substrate change the closed state of discharge space and (VI) generation of the electrical noise of the internal pressure of interference discharge space (film formation space).Actual interior pressure that makes given film form the space owing to these reasons changes.
Specifically, with equipment shown in Figure 3 is example, when the setting pressure of above-mentioned any one reason build-up of pressure controller 110c changes, actual interior pressure that film forms space 104b increases, the processing gas that film forms in the 104b of space flows among adjacent the film formation space 104a and 104c, the internal pressure that makes film form space 104a and 104c increases, and each pressure controller 110a and 110c starting enlarge the opening size of vario valve 109a and 109c.Thereby the interior pressure that makes each film form space 104a and 104c reduces.Form under the state that the interior pressure in space changes by this mode at film, when order is carried out the opening and closing of variable valve openings, the vario valve that can occur given film formation space under the limiting case is opened fully, and simultaneously, adjacent film forms the vario valve in space and also opens fully.
As mentioned above, because it is mutual spatial communication that film forms the space, under worst case, although the interior pressure value in each film formation space all remains on the force value of setting, can occur also supplying with that processing gas that given film forms the space forms the space through adjacent film and the problem of discharging, made handle gaseous contamination adjacent film form the space.Even divided gas flow also same phenomenon can occur when flowing into valve 101.
These problems that cause owing to these above-mentioned reasons are provided with each film and form space and film and form the space and also can occur under the interconnective situation by valve (position for example shown in Figure 4 concerns) in different process chambers.
Now want the interior pressure-controlled method in key diagram 4 apparatus shown.
In the equipment shown in Figure 4, the blast pipe 108a-108c of the processing space 104a-104c that is provided with among the process chamber 103a-103c (film formation space) is pooled in the single tracheae that is connected to exhaust apparatus, and vario valve 109 is located at single tracheae place.According to any the openings of sizes of output control vario valve 109 among the pressure gauge 106a-106c, controlling diaphragm forms the interior pressure of space 104a-104c thus with pressure controller 110, and film forms the single tracheae exhaust (vacuumizing) that space 104a-104c compiles.By pressure-controlled method in being somebody's turn to do, make the speed of evacuation of the discharge gas that flows among each blast pipe 108a-108c reach the best with the pin hole that is arranged in each blast pipe.The interior pressure energy that makes each film form space 104a-104c meets the requirements of force value.But, when the film formation condition changes, for example, when given film forms the change in flow of the processing gas in the space, the interior pressure difference that film forms space 104a-104c then can appear, perhaps, film forms processing gas in the space and enters adjacent membranes and form the space and make its pollution, and cause the gas flow paths that is difficult to form requirement, and the result, the film formation condition that can set is limited.In other words, change the film formation condition on request, then the structure that must improve equipment.Therefore, the shortcoming of used interior voltage-controlled method for making is to be not easy to change on request the film formation condition in the equipment shown in Figure 4.
The generation of the problems referred to above is not limited only to form the situation of deposited film on the coiled material substrate.Same problem also can appear at the coiled material substrate and carry in the situation about in each process chamber the coiled material substrate being handled by a plurality of process chambers continuously.By this situation the coiled material substrate processing is comprised and to use sputter that methods such as vacuum evaporation or CVD rather than plasma CVD, burn into thermal annealing are carried out film and formed and handle.Each handles easier appearance under the different situation of the gas component in space and/or interior pressure to described problem in adjacent processing space.
Main purpose of the present invention is to solve problems of the prior art, provide through improved Method of processing a substrate and equipment, make the processing gas flow of handling in the space reach optimum state easily, thereby the highly reliable deposited film that can under rational cost, be formed with the stable and uniform characteristic, can not be damaged in the long time cycle to steady and continuous.Make it can produce out the photoelectric cell (or solar cell) of function admirable effectively by batch by reasonable price.
Another object of the present invention provides a kind of processing method of substrate, comprise substrate transfer by a plurality of processing spaces that are interconnected, handle the described substrate of processing in the space at each, it is characterized in that, according to the interior pressure of one of the processing space in described a plurality of processing space (a), make the interior pressure of described processing space (a) at least one before and in the processing space that is provided with afterwards and handle the interior pressure in space (b) controlled in described processing space (a).
Another object of the present invention is, a kind of substrate-treating apparatus is provided, comprise: a plurality of processing space, be used for transport substrates to handle the conveying device of handling described substrate in space by described a plurality of processing space and while at each, and the pressure gauge of interior pressure usefulness of testing the processing space (a) in one of described a plurality of processing space, it is characterized in that the information Control that the with good grounds described pressure gauge of described substrate-treating apparatus obtains is handled the internal pressure in space (a) and is arranged on the control unit that the internal pressure of at least one (b) in a plurality of processing space before or after the described processing space (a) is used.
Fig. 1 is the schematic diagram of explanation by the structure of an example of substrate-treating apparatus of the present invention.
Fig. 2 is the schematic diagram of explanation by another exemplary construction of substrate-treating apparatus of the present invention.
Fig. 3 is the schematic diagram of structure of an example of the conventional substrate-treating apparatus of explanation.
Fig. 4 is the schematic diagram of structure of another example of the conventional substrate-treating apparatus of explanation.
Fig. 5 is the schematic diagram of explanation by the structure of an example of continuous rolling type film forming device of the present invention.
Fig. 6 is the schematic diagram of structure of an example of the conventional continuous rolling type film forming device of explanation.
Fig. 7 is the schematic diagram of explanation by the structure of another example of continuous rolling type film forming device of the present invention.
Fig. 8 is the schematic section of structure of an example of the photoelectric cell made among the present invention of explanation.
The present invention has overcome the above-mentioned defective that exists in the prior art, has realized the foregoing invention purpose.
As mentioned above, the first string of the present invention is, a kind of Method of processing a substrate is provided, comprise substrate transfer by a plurality of processing spaces that are interconnected, and in each processing space, handle substrate, it is characterized in that, according to the interior pressure in the processing space (a) in one of described a plurality of processing space, control and treatment space (a) and be arranged on the interior pressure of one of a plurality of processing space before and after the described processing space (a) (b).
Second scheme of the present invention is, a kind of substrate-treating apparatus is provided, comprise a plurality of processing space, be used for substrate transfer by described a plurality of processing space, and in handling space, each handles the substrate conveying device of described substrate, test the pressure gauge of interior pressure in the processing space (a) in one of a plurality of processing space, it is characterized in that, described substrate-treating apparatus has and is used for the information that shows according to described pressure gauge, controls described processing space (a) and is arranged on the control unit of interior pressure of at least one (b) in the processing space of handling front and back, space (a).
By Method of processing a substrate of the present invention, come control and treatment space (a) and interior pressure (b) by controlling these vacuum pumping rate of handling each space in space.Be arranged on each by adjusting and handle the openings of sizes of vent valve at the blast pipe place that the space is connected or the openings of sizes of each vent valve of regulating a plurality of vent valves of interlock, make their openings of sizes become the speed of evacuation that requirement ratio is controlled each processing space.
By Method of processing a substrate of the present invention, can be handling space (a) and (b) being arranged in the same process chamber, perhaps, they are interconnected by valve.
By Method of processing a substrate of the present invention, substrate processing comprises uses sputter, and methods such as vacuum evaporation or CVD (comprising plasma CVD), corrosion treatment and thermal anneal process are carried out film and formed processing.
Substrate can comprise the coiled material substrate.But, be not limited thereto.Method of processing a substrate of the present invention can be used for for example processing of cylindrical substrate of other substrate, the processing of square shaped substrate etc.
By substrate-treating apparatus of the present invention, preferably each of described a plurality of spaces handled the blast pipe that the space is provided with vario valve and is connected to the gas extraction system that is provided with vacuum pump, and described control unit is used for directly or indirectly controlling the openings of sizes of each vario valve.
By substrate-treating apparatus of the present invention, preferably pressure controller connects vario valve, described pressure controller can be used for regulating the openings of sizes of described vario valve, according to the openings of sizes of regulating each vario valve from the signal of described control unit output with connected pressure controller.
By substrate-treating apparatus of the present invention, can perhaps, it be interconnected handling space (a) and (b) being located in the same process chamber by valve.
By substrate-treating apparatus of the present invention, can handle the space at least one membrane formation device is set.In this case, membrane formation device can comprise the combination of handling gas feeder and supply unit, sputter equipment or CVD device, (comprising plasma CVD apparatus).Substrate-treating apparatus of the present invention can be the film forming device, CVD equipment (comprising plasma CVD equipment) for example, sputtering equipment, or vacuum evaporation apparatus, etching apparatus or thermal annealing equipment.
The substrate of handling in substrate-treating apparatus of the present invention can comprise the coiled material substrate.But, be not limited thereto.But substrate-treating apparatus of the present invention can be used for handling for example cylinder substrate, other substrate such as square shaped substrate.
The present invention is to there being a pair of adjacent processing space, and the component of its internal gas is or/and the situation that its internal pressure differs from one another again is effective especially.
By the present invention, can make the described defective that causes because of following reason in the existing processing space (film formation space) reduce to minimum about interior pressure, these reasons are that the error range at (I) zero point changes or the barometrical linearity changes, (II) error range of the setup pressure value of pressure controller changes or described setup pressure value changes, (III) because the setup pressure value variation that the output drift produces or because of make the variations in temperature of pressure gauge self according to processing substrate processing long time period.For this reason, can make substrate processing conditional stability as requested.Thereby special in the batch production type equipment that can connect work for a long time, the state continuous effective is handled substrate on request, can the uniform substrate goods of batch processing stability of characteristics.
Below will make pending substrate with the coiled material substrate, describe Method of processing a substrate of the present invention and substrate-treating apparatus in detail referring to accompanying drawing.But, be noted that to the invention is not restricted to only handle the coiled material substrate, can also be used to handle for example cylindrical substrate, other substrate such as square shaped substrate.
Fig. 1 is the schematic diagram of explanation by an example of substrate-treating apparatus of the present invention.
Equipment shown in Figure 1 comprises process chamber 103, wherein is provided with 3 and handles space 104a to 104c.As shown in Figure 1, handle space 104a and be provided with blast pipe 108a, this blast pipe is provided with vario valve 109a and is connected to the vacuum extractor that comprises vacuum pump (Fig. 4 is not shown); Handle space 104b and be provided with blast pipe 108b, this blast pipe is provided with vario valve 109b and is connected to the vacuum extractor that comprises the vacuum pump (not shown); Handle space 104c and be provided with blast pipe 108c, this blast pipe is provided with vario valve 109c and is connected to the vacuum extractor that comprises the vacuum pump (not shown).Each label 106a to 106c represents to be connected to the pressure gauge that each handles space 104a to 104c.Label 107a to 107c represents to be connected to the processing gas appendix of each process chamber 104a to 104c.
Label 110a to 110c represents pressure controller.Pressure controller 110a is electrically connected to vario valve 109a, and pressure controller 110b is electrically connected to vario valve 109b, and pressure controller 110c is electrically connected to vario valve 109c.Label 111 expressions are electrically connected to each control unit of pressure controller 110a to 110c.Control unit 111 is also connected to pressure gauge 106b.
Label 100 expression coiled material substrates, in the drawings, the coiled material substrate is carried from left to right by process chamber 104a-104c, simultaneously in each process chamber on request to the coiled material substrate processing.Label 101 expression valves.Label 102 expression separation gas input pipes, label 105a to 105c represents to heat the heater of coiled material substrate 100.
Now, shown in Fig. 1 in the equipment, pressure controller (110a, 110b, 110c) with good grounds from pressure gauge (106a, 106b, 106c) pressure signal of Huo Deing is controlled vario valve (109a, 109b, the function of openings of sizes 109c), control vario valve (109a, 109b, another kind of function 109c) with basis from the openings of sizes signal of control unit 111 outputs.Pressure controller (can change by the signal of exporting from control unit 111 for 110a, 110b by two kinds of functions of 110c) this.Control unit 111 handlebars are imported the function of arbitrary pressure controller 109a-109c (being vario valve 109b in the example shown in Figure 1) by the pressure-dependent signal of any pressure gauge 106a-106c (being pressure gauge 106b in the example shown in Figure 1) output, receive any one vario valve 109a-109c (embodiment of Fig. 1 with the corresponding pressure controller of process, be vario valve 109b in the example) the extent of opening value, and will be worth other another merit function of pressure controller (being pressure controller 110a and 110c in the example shown in Figure 1) of input.Control unit 111 also has the function that described openings of sizes signal is carried out addition calculation (this can illustrate in the back) and result of calculation is defeated by pressure controller 110a-110c.
Be that example describes when becoming following situation with device design now, in this equipment, under identical condition, (be the flow velocity and the component of used processing gas, handle the interior pressure in space, underlayer temperature, handle the configuration and the size in space, under the same terms such as configuration from the processing space to the blast pipe of vario valve and size), handle the spatial manipulation substrate at each, for example, handle in space deposited film on coiled material substrate 100 at each.In this case, control unit 111 receives from the signal of the next expression openings of sizes of pressure controller 110b, and with this signal input pressure controller 110a and 110c.Vario valve 109a-109c moves simultaneously with identical extent of opening, thereby, can make the speed of evacuation of extracting processing gas from each processing space out identical.Thus, can reach essentially identical treatment conditions in whole spaces of handling.In addition, because all vario valve have identical openings of sizes, thereby can not have the problem that exists in the equipment, the openings of sizes that is each vario valve is different mutually, the speed of evacuation of exhaust is inhomogeneous and change, and treatment conditions in case set always remain unchanged.And, owing to be that the basis is come a plurality of vario valve are operated simultaneously and regulated with test pressure value and a setup pressure value a position.Thereby the negative effect that produces of the variation that can not occur force value that records because of pressure gauge or the force value of being transmitted basically, realize all are handled the control of stabilizer pole of the interior pressure in spaces easily.
For example, making the flow velocity of handling the processing gas among space 104a and the 104c is to handle under the condition of twice of flow velocity of the processing gas among the 104b of space, when in handling space 104a-104c, handling substrate, control unit 111 receives the openings of sizes signal by the vario valve 109b of pressure controller 110b control, calculate the openings of sizes of the vario valve that can reach the twice speed of evacuation in control unit 111, the signal of the openings of sizes that calculates is from control unit 111 input pressure controller 110a and 110c.The account form of openings of sizes comprises (I) according to the account form of determining the required openings of sizes of relevant vario valve in order to the configuration of equipment and the analogy method that is of a size of the label calculating on basis, and the openings of sizes of (II) device therefor being carried out relevant test in advance and obtaining relevant vario valve and the relational expression of the speed of evacuation are determined the account form of the required openings of sizes of relevant vario valve.
By above-mentioned this control mode, can form the required flow path of handling gas, ((104c), (108a, 108b 108c) discharge effectively through blast pipe for 104a, 104b 107c) to enter the processing space for 107a, 107b through appendix promptly to handle gas.
Among the present invention, itself have according to (pressure signal 106c) is directly controlled vario valve (109a for 106a, 106b from pressure gauge at control unit 111,109b, openings of sizes 109c), and control forms space (104a, 104b thus, under the situation of the function of interior pressure 104c), then needn't adopt pressure controller (110a, 110b, 110c).
Adopt an example of the equipment of structure of the present invention below in conjunction with description of drawings, in manufacturing equipment, obtain semiconductor element by continuous formation deposited film.This continuous formation deposited film obtains the manufacturing equipment of semiconductor element, can be described continuous rolling type (roll-to-roll type) manufacturing equipment.In this continuous rolling type manufacturing equipment, the film formation chamber that the coiled material substrate communicates with each other by what by the length direction transmission forms required deposited film, simultaneously to form semiconductor element on the coiled material substrate on the coiled material substrate in each film formation chamber.The film formation method that adopts in this continuous rolling type manufacturing equipment comprises plasma CVD and sputter.
The semiconductor element made from the roll type manufacturing equipment can be described various semiconductor integrated circuit, various semiconductor transducers and the various photoelectric cells that comprise solar cell.
Be specially adapted to make the big large tracts of land photoelectric cell (solar cell) of light receiving area by Method of processing a substrate of the present invention and substrate-treating apparatus.
Fig. 8 is the cross-sectional view of structure of an example of this photoelectric cell of explanation.Photoelectric cell shown in Figure 8 comprises black reflector layer 801, lower floor's transparency conducting layer 802, semiconductor photosensitive layer (comprising n type semiconductor layer 803, I type semiconductor layer 804 and p type semiconductor layer 805) and upper strata transparent conductive body 806 are stacked on the substrate 800 in this order.Label 807 expressions are formed on the collector electrode on the upper strata transparency conducting layer 806.
The continuous rolling type manufacturing equipment that can form this semiconductor element is described referring to Fig. 5.
Fig. 5 is the schematic diagram of structure of an example of explanation continuous rolling type plasma CVD manufacturing equipment.Equipment shown in Figure 5 comprises the substrate transfer chamber 500 that is used for transporting rolls substrate 100, be used for forming the process chamber 501 of n type semiconductor layer with plasma CVD method, be used for forming the process chamber 502 of I type semiconductor layer with plasma CVD method, be used for forming the formation chamber 503 of p type semiconductor layer, be used for the substrate rewind room 504 of roll film coiled material substrate with plasma method.Forming chamber 500 to 504 is to be interconnected by being provided with the valve 101 of separating gas inlet tube 102.
Coiled material substrate 100 from be located at substrate transfer chamber 500, its volume has the feed axle 505 of coiled material rolls of substrate to extract out through handling after tube carries, batch transportation enters substrate rewind room 504 by process chamber 501-503, herein substrate on the roll film spool 506 that is located in the substrate rewind room 504.The coiled material substrate by this mode from substrate transfer chamber 500 to the process that substrate rewind room 504 carries, on the coiled material substrate, form n type semiconductor layer with the processing space 104a (film formation space) that is located in the process chamber 501, form the I type semiconductor layer thereon with the processing space 104b (film formation space) that is located in the process chamber 502, form p type semiconductor layer thereon with the processing space 104c and the 104d (film formation space) that are located in the process chamber 503, on the coiled material substrate, be formed with the photoelectric cell of PIN knot thus.
Each is handled space 104a to 104d (film formation space) and is made of with the coiled material substrate 100 that is positioned at its upper open face of container parts top covering the container parts towards upper shed.
The lamp unit heater that temporarily heats coiled material substrate 100 from coiled material substrate 100 tops (not shown go out) is housed and from the heater 105 of coiled material substrate 100 tops in each process chamber 501 and 502 to its heating.Equally, be provided with a pair of lamp unit heater and the heater 105 that are used to handle space 104c (film formation space) in the process chamber 503, and be used to handle a pair of lamp unit heater (not shown go out) and the heater 105 in space 104d (film formation space).
The processing space 104a that is arranged in the process chamber 501 is provided with: the processing gas (or film formation raw gas) that is used for the air supply system (not shown) is provided is introduced the air supply pipe 107 of handling space 104a; Be used for from handling the blast pipe 108a of space 104a exhaust (vacuumizing), this blast pipe 108a is connected to the exhaust apparatus that comprises the vacuum pump (not shown), and is provided with the vario valve 109a of the interior pressure that is used for control and treatment space 104a; Be used for to make it handle the high-frequency electrode (not shown) that the space produces plasma discharge to introducing the processing gas power supply of handling space 104a; The barometer 106a that is used for the interior pressure of test processes space 104a; Be electrically connected to the pressure controller 110a of pressure gauge 106a and vario valve 109a; And the wall heater (not shown) that is used to heat the parts that constitute processing space 104a.
The processing space 104b that is located in the process chamber 502 is provided with: processing gas (or film forms raw material) gas that is provided by the air supply system (not shown) is introduced the air supply pipe 107 of handling space 104b; Be used for from handling the blast pipe 108b of space 104b exhaust (vacuumizing), this blast pipe 108b is connected to the exhaust apparatus that comprises the vacuum pump (not shown) and is provided with the vario valve 109b of the interior pressure that is used for control and treatment space 104b; Be used for making it handle the high-frequency electrode (not shown) that space 104b produces plasma discharge to introducing the processing gas power supply energy of handling space 104b; The pressure gauge 106b that is used for the interior pressure of test processes space 104b; Be electrically connected to the pressure controller 110b of pressure gauge 106b and vario valve 109b; And the wall heater (not shown) that is used to heat the parts that constitute processing space 104b.Each that is located in the process chamber 503 handled space 104c and 104d, is equipped with: the processing gas (or film formation raw gas) that is used for the air supply system (not shown) is supplied with is introduced the air supply pipe 107 of handling space 104c or 104d; Be used for to make it handle the high-frequency electrode (not shown) that space 104c and 104d produce plasma discharge to introducing the processing gas power supply of handling space 104c and 104d; To be used to heat the wall heater (not shown) that constitutes the parts of handling space 104c and 104d.
Handle space 104c and also be provided with the blast pipe 108c that is used for from processing space 104c exhaust (vacuumizing), this blast pipe 108c is connected to the exhaust apparatus that comprises the vacuum pump (not shown), and is provided with the vario valve 109c of the interior pressure that is used for control and treatment space 104c; The pressure gauge 106c that is used for the interior pressure of test processes space 104c; Pressure controller 110c and control unit 111.Pressure controller 110c is electrically connected to vario valve 109c, and control unit is electrically connected to pressure gauge 106c and pressure controller 110c.Control unit also is electrically connected to and is located at the pressure controller 110d that handles space 104d, will illustrate it below.
That is, handle space 104d and also be provided with from handling the blast pipe 108d of space 104d exhaust (vacuumizing), this blast pipe 108d is connected to the exhaust apparatus that comprises the vacuum pump (not shown) and is provided with the vario valve 109d of the interior pressure that is used for control and treatment space 104d; The pressure gauge 106d that is used for the interior pressure of test processes space 104d; And the pressure controller 110d that is electrically connected to vario valve 109d and above-mentioned control unit 111.
As mentioned above, in the manufacturing equipment shown in Figure 5, coiled material substrate 100 is on the feed tube 505 that is provided with in the substrate transfer chamber 500 and carry, it is in proper order by handling space 104a to 104d (film formation space) and entering rolls of substrate sheet chamber 504, at this by rolling, and around to loading on the spool 506.In this case, importantly carry at the bottom of the belt material, must transporting velocity in accordance with regulations plethora, distortion or warpage can not occur by each processing space.When coiled material substrate 100 is magnetic material, with the rotation magnetic roller supporting coiled material substrate that comprises the magnet (not shown), can make the coiled material substrate along the route conveying of regulation and the shape of maintenance regulation, the transporting velocity of coiled material will be determined according to used film formation condition.But, usually in 200 mm/min in the scope of 5000 mm/min.
Mode forms the deposited film that comprises different materials continuously with a plurality of film formation chamber that are provided with continuously in each film formation chamber as shown in Figure 5, can form the lamination that comprises the multilayer deposited film, and every layer of deposited film comprises different materials.In this case, be preferably in valve 101 (see figure 5)s are set between each adjacent film formation chamber, be subjected to being positioned at the interference of other film formation chamber of next position to prevent each film formation chamber.
The valve of separating and completely cut off all processing spaces all is set in any case, substrate transfer chamber, substrate rewind room and film formation chamber's (process chamber) are spaced from each other, the indoor gas of adjacent processing is not mixed mutually.Valve must be arranged to allow the coiled material substrate to waltz through herein.Valve constitute the channel structure allow the coiled material substrate by and the film formation face of the internal face that makes channel and coiled material substrate keep the spacing stipulated.This spacing is width preferably, for example, and in 1mm to 5mm scope, to reduce conductivity and to prevent counterdiffusion of gas phase and pollution in each film formation chamber.And the structure of valve 101 should make separation gas be incorporated herein through separation gas inlet tube 102, to push and to return the processing gas that can release valve from film formation chamber's (process chamber).
Introduce the separation gas of valve, can enumerate for example Ar gas of rare gas, He gas, Ne gas, Kr gas, Xe gas and Rn gas.In addition, carrier gas such as the H that uses in the also available semiconductor manufacturing 2Gas etc.
Separate gas flow velocity can according to related factors for example the conductivity of whole valve determine.For example, the point of air pressure maximum is in when being positioned at the valve core, separates gas and divides from central division seeing film formation chamber's side stream, then is in adjacent membranes and forms indoor processing gas through valve and the gas flow that expands mutually can be less to ignoring.
As the coiled material substrate of the substrate among the present invention, require the coiled material parts that include slight deformation or distortion, required physical strength and conductivity are arranged.The concrete example of this parts is sheet metals made from the metal material that is selected from stainless steel, aluminium, aluminium alloy, iron, ferroalloy, copper and copper alloy and comprises that these metals belong to the composite members of plate.In addition, can also be with being selected from polyimides, polyamide, polyethylene terephthalate, the tree of more than one in the epoxy resin refers to the heat-resistant synthetic resin plate made, and this synthetic resin board can carry out conductive processing by sputter, vacuum evaporation, plated film or spraying process with metal, alloy or transparent conductive oxide (TCO).
The thickness that is used as the coiled material substrate of substrate of the present invention is considered to require it thinner from price and the space that occupies, and can keep the transport path and the shape of regulation but it also should have suitable physical strength.But, require the thickness range of coiled material substrate to be preferably 0.01mm to 1mm usually, perhaps more preferably in the scope of 0.05mm to 0.5mm.
When being used as substrate, even its thinner thickness also can reach required physical strength with metal thin plate.
There is no particular limitation to the width of coiled material substrate.The width of coiled material substrate will be determined according to for example factors such as size of used membrane formation device, used reaction vessel.Length to the coiled material substrate also is not particularly limited.Coiled material substrate length should be able to be rolled into tubular.The substrate that the coiled material substrate can be the lengthening that connected together with methods such as welding by plural substrate.
Among the present invention, can use thin slab substrate rather than coiled material substrate.When adopting the coiled material substrate in this example, be difficult to make two adjacent process chambers isolated fully.But under the situation with this thin slab substrate, adjacent process chamber can be isolated fully each other, and effect of the present invention thus is more obvious.
Following with reference to the preferred embodiment of Fig. 1 and 2 explanation by the film forming device of substrate-treating apparatus of the present invention.
Fig. 1 is the schematic diagram of explanation by the critical piece of an example of the film forming device of substrate-treating apparatus of the present invention.
Fig. 2 is the schematic diagram of explanation by the critical piece of another example of the film forming device of substrate-treating apparatus of the present invention.
Key diagram 1 apparatus shown at first.
Among Fig. 1, label 100 is meant the coiled material substrate, label 101 expression valves, and label 102 is meant the separation gas inlet tube, label 103 is meant the film formation chamber as process chamber.Each label is represented to form the space as the film of handling the space among the 104a-104c.Each label among the 105a-105c represents to be used to heat the heater of coiled material substrate 100.Each label among the label 106a-106c is represented pressure gauge.Each label among the 107a-107c represents to handle the gas air supply pipe.Each label is represented blast pipe among the 108a-108c.Each label among the 109a-109c is represented vario valve.Each label among the 110a-110c is represented pressure controller.Label 111 expression control units.
As top explanation referring to Fig. 1, the film forming device as substrate-treating apparatus shown in Figure 1 comprises that wherein is provided with the film formation chamber 103 that three films form space 104a-104c.
Film forms the blast pipe 108a that space 104a is provided with belt variable valve 109a and is connected to the exhaust apparatus that comprises the vacuum pump (not shown), film forms the blast pipe 108b that space 104b is provided with belt variable valve 109b and is connected to the exhaust apparatus that comprises the vacuum pump (not shown), and film forms the blast pipe 108c that space 104c is provided with belt variable valve 109c and is connected to the exhaust apparatus that comprises the vacuum pump (not shown).Each film form space 104a-104c be equipped with the processing gas air supply pipe that is connected to the air supply system (not shown) (107a, 107b, 107c).
Pressure gauge 106a to 106c is connected respectively to film and forms space 104a to 104c.Pressure controller 110a is electrically connected to vario valve 109a, and pressure controller 110b is electrically connected to vario valve 109b, and pressure controller 110c is electrically connected to vario valve 109c.Control unit 111 is electrically connected to each pressure controller 110a to 110c.Control unit 111 also is electrically connected to pressure gauge 106b.
Now, in film forming device shown in Figure 1, coiled material substrate 100 begins to carry from its substrate feed tube (not shown) that rolls of substrate is housed that is located at substrate transfer chamber (not shown), it at first enters film formation chamber 103 through valve 101, it passes through the 104a to 104c of film formation chamber in proper order at this, afterwards, enters substrate rewind room (not shown) through valve 101, at this, substrate is received and is wound up on the substrate carrier tube (not shown) of the indoor setting of described substrate roll film.The coiled material substrate is by in the course of conveying of this route, the required treated gas air supply pipe of processing gas (107a, 107b, 107c) introduce film and form space (104a, 104b, 104c) on coiled material substrate 100, form deposited film, controlling diaphragm forms space (104a as follows, 104b, interior pressure 104c), form the space by power supply (not shown) supply of electrical energy for each film, make and introduce the processing gas decomposition that film forms the space, in each film forms the space, on the coiled material substrate, form deposited film with plasma CVD or sputtering method.
To form according to the film on the coiled material substrate and come controlling diaphragm to form space (104a, 104b, interior pressure 104c).This will be in following explanation.
That is, required processing gas is through handling gas air supply pipe (107a, 107b, 107c) introduce film and form space (104a, 104b, 104c), through having vario valve (109a, 109b, 109c) and be connected to the blast pipe of exhaust apparatus (not shown) (108a, 108b 108c) form space (104a from film, 104b, 104c) exhaust (vacuumizing).106b measures force value with pressure gauge, the force value that control unit 111 records according to pressure gauge 106b calculates the openings of sizes of vario valve and by the openings of sizes operating pressure controller (110a that calculates, 110b, 110c), be used for regulating vario valve (109a, 109b by pressure controller, openings of sizes 109c), controlling diaphragm forms space (104a, 104b, interior pressure (air pressure inside) 104c) on request thus.For example, when the flow velocity of used processing gas is identical with component in film formation space 104a-104c, it can make control unit 111 work fully, the pressure signal that records with pressure gauge 106b is the openings of sizes of basis with pressure controller 110b control vario valve 109b, and control vario valve 109b and 109c, make their openings of sizes and the openings of sizes coupling of vario valve 109b.Thus, the exhaust velocity through vario valve 109a-109c becomes identical.At this moment, when shape, size and the performance of film formation space, blast pipe and air extractor are basic identical, the interior pressure of film formation space 104a-104c is also basic identical, each film forms space 104a-104c and forms suitable airflow route, and prevents that each film from forming the flow of process air of using in the space and going into adjacent film formation space.Term " airflow route " is meant that (((108a, 108b 108c) discharge (finding time) to processing gas 104c) through blast pipe for 104a, 104b 107c) to introduce film formation space for 107a, 107b through handling the gas air supply pipe.
The following describes film forming device as substrate-treating apparatus shown in Figure 2.
Equipment shown in Figure 2 is that the part of equipment shown in Figure 1 is improved.The difference of equipment shown in Figure 2 and equipment shown in Figure 1 be the film formation chamber of separating (103a, 103b, be provided with in 103c) each film form space (104a, 104b, 104c).
In the equipment shown in Figure 2, first valve 101 that is provided with branch trapping inlet tube 102 is located between substrate transfer chamber (not shown) and the 103a of film formation chamber, be provided with in this substrate transfer chamber and roll up the substrate feed tube that coiled material substrate 100 is arranged on it, be provided with film among the 103a of film formation chamber and form space 104a, the duaspiracle 101 that is provided with branch trapping inlet tube 102 is located at the 103a of film formation chamber and is provided with between the 103b of film formation chamber that film forms space 104b; The third valve 101 that is provided with branch trapping inlet tube 102 is located at the 103b of film formation chamber and wherein is provided with between the 103c of film formation chamber that film forms space 104c; The 4th valve 101 that is provided with branch trapping inlet tube 102 is located at film and forms box 103c and wherein be provided with between the substrate rewind room (not shown) of substrate coil (not shown), receives on the coil and volume has the coiled material substrate 100 that transports from the 103c of film formation chamber.
Identical with the situation in the film forming device shown in Figure 1, in the film forming device shown in Fig. 2, with the openings of sizes that control unit 111 is regulated vario valve (109a-109c) on request, each film forms space (104a-104c) can obtain suitable airflow route.
By with film forming device shown in Figure 1 in identical method, in film forming device shown in Figure 2, on the coiled material substrate, carry out the formation of deposited film.Specifically, coiled material substrate 100 from the substrate transfer chamber to the course of conveying of substrate rewind room, required processing gas is introduced each film through the air supply pipe 107a-107c that regulates the flow of vital energy everywhere form space 104a-104c, by with film forming device shown in Figure 1 in identical method controlling diaphragm form interior pressure among the 104a-104c of space, the electric energy of being supplied with by power supply is supplied with each film forms the space to activate and wherein processing gas has been introduced in decomposition, thus, in each film formation space, on the coiled material substrate, form deposited film with plasma CVD or sputtering method.After forming, film the gas that film forms in the space is entered in the exhaust apparatus (not shown) by the blast pipe that is provided with vario valve.
In the forming device of film shown in Fig. 1 and 2, be stacked with on it in last input of coiled material substrate 100 substrate rewind rooms of multilayer deposited film, at this coiled material substrate usually with the interlayer rete of the film carrier face of protection coiled material substrate on the substrate coil.Used interlayer rete can be with heat stable resin such as polyimides or for example fluororesin of TefloN or the band shape rete that glass fibre is made.
As mentioned above, when on long substrate, forming deposited film continuously in order to make large area film semiconductor element such as large tracts of land photoelectric cell (or solar energy in large area battery), on long substrate, form the high-quality deposited film continuously with stablizing by film forming device of the present invention, overcome defective of the prior art simultaneously, and can satisfy continuous film formed requirement.Therefore, by the present invention, can produce the large-area high-quality photoelectric cell (solar cell) of uniform properties by batch.
Below be described in more detail the present invention referring to example.Be to be noted that these examples are just in order to illustrate the present invention rather than to the restriction of invention scope.
Example 1
In this example, on the coiled material substrate, form photoelectric cell continuously with PIN junction structure with the following continuous rolling formula plasma CVD equipment shown in Figure 5 that will illustrate.
At first, one rolls of substrate is provided, it comprises the thick 0.2mm that makes with stainless steel SUS430, wide 350mm, the coiled material substrate of long 300m, it has with continuous rolling type film forming device sputtering method commonly used, and the double-deck black reflection layer of Zinc oxide film (ZnO) formation that aluminium film that the 0.1 μ m that forms thereon is thick and 1.0 μ m are thick successively is the coiled material rolls of substrate scroll that is formed with this double-deck reflector on it.
Rolls of substrate is placed on the feed tube 505 in the substrate transfer chamber 500 of equipment shown in Figure 5.Coiled material substrate as coiled material substrate 100 is extracted out and 500 conveyings from the substrate transfer chamber from feed tube 505, enter substrate rewind room 504 through valve 101, process chamber 501, valve 101, process chamber 502, valve 101, process chamber 503 and valve 101, herein, the start-up portion of coiled material substrate is fixed and is rolled onto on the substrate coil 506.Regulate the conveying system of coiled material substrate, make the coiled material substrate be transported to the substrate rewind room and indeformable or warpage from the substrate transfer chamber continuously and smoothly.
Afterwards, starting exhaust apparatus (not shown) vacuumizes 104a-104d between process chamber from the blast pipe 108a-108d that is provided with vario valve 109a-1090d, presses to reach till 1 torr in it.When vacuumizing continuously, make He gas flow into each processing space 104a-104d by handling gas air supply pipe 107 by flow velocity 100sccm, and the interior pressure of testing 104a-104d between chambers with each barometer 106a-106d, and, make that the interior pressure of 104a-104d remains on 1.0 torrs between each process chamber according to the openings of sizes that the reading on each barometer 106a-106d is regulated each vario valve 109a-109d.Afterwards, 105 pairs of heaters of starting are respectively handled the internal atmosphere heating of space 104a-104d, make the coiled material substrate temperature become 300 ℃, heating was kept 5 hours, thus baking processing is carried out in each inside of handling space 104a-104d, so that wherein the impurity compound gas that exists discharges and removes.
After this, stop space 104a-104d is respectively handled in the introducing of He gas, afterwards, the mist of the layer of N type shown in the formation table 1 is introduced 104a-104d between process chamber through the air supply pipe 107 that is used for that the air supply system (not shown) stretches out.Through the air supply pipe 107 that the air supply system (not shown) stretches out the gas mixture that is used to form the type of N shown in the table 1 layer is introduced processing space 104b; Tracheae 107 through stretching out from the air supply system (not shown) is handled space 104C to the mist that is used to form the type of P shown in the table 1 layer for introducing; Through stretch out air supply pipe 107 from the air supply system (not shown) mist that is used to form the type of P shown in the table 1 layer is introduced processing space 104a; H 2Gas is introduced each valve 101 through each minute trapping inlet tube 102 with flow velocity 1000sccm.Coiled material substrate 100 begins to transmit continuously by 1000mm/ minute transporting velocity.By handling the high-frequency electrode (not shown) that is provided with in the 104a of space 400 watts of RF power that provided by RF (radio frequency) power supply (not shown) are added to processing space 104a, the coiled material substrate is remained under 300 ℃ of conditions in handling space 104a; By handling the high-frequency electrode (not shown) that is provided with in the 104b of space 200 watts of radio-frequency powers being supplied with by RF power supply (drawing) are added to processing space 104b, the coiled material substrate is remained under 350 ℃ of conditions in handling space 104b, by handling the high-frequency electrode (not shown) that is provided with among the 104c of space 1000 watts of RF power supplies being supplied with by RF power supply (not shown) are handled space 104C, the coiled material substrate is remained under 300 ℃ of conditions in handling space 104C, by handling the high-frequency electrode (not drawing) that is provided with in the 104d of space, 1000 watts of RF power being supplied with by the RF power supply are offered process chamber 104d, the coiled material substrate is remained under 300 ℃ of conditions in handling space 104d.By above-mentioned processing, in handling space 104a, form the thick N type semiconductor film of 20nm continuously as N type layer at coiled material substrate 100; In handling space 104b, form the thick P type semiconductor film of 80nm and make P type layer, in handling space 104c, form the thick P type semiconductor film of 3nm, in handling space 104d, form the thick P type semiconductor film of 3nm as P type layer as P type layer.Therefore, formed the semiconductor layer that the PIN structure is arranged continuously on the double-deck black reflection layer that forms already on the coiled material substrate, each film formation condition of handling space 104a-104d is listed in table 1.
In this example,, thereby make the stacked formation of this two-layer P type semiconductor film P type semiconductor by P type semiconductor film that in handling space 104C, is formed with excellent properties and the P type semiconductor film of handling formation excellent performance among the 104d of space.Find that the P type layer of the photoelectric cell of formation has bigger thickness and excellent performance like this.
As mentioned above, only, make the openings of sizes of vario valve 109c-109d remain on the interior pressure that identical size is come control and treatment space 104c and 104d with handling the test value that 104c used pressure gauge 106c in space records.For this reason, the interior pressure of processing space 104c and 104d all can remain under the authorized pressure shown in the table 1 in the film forming process.
The coiled material substrate is carried out about 5 hours continuously film form processing, the length overall of coiled material substrate is 300mm, and the semiconductor layer that can form the PIN junction structure surpasses 250m length.
504 take out it and roll up the coil 506 that the coiled material substrate is arranged from the substrate rewind room, have double-deck black reflection layer on this substrate and the semiconductor layer of PIN junction structure is arranged on this reflector.
Afterwards, empty substrate coil 506 is put in the substrate rewind room 504.Rolls of substrate is provided, it comprises the thick 0.2mm that stainless steel SUS430 makes, the coiled material substrate of wide 350mm and long 300m, form the double-deck black reflection layer that comprises thick aluminium film of 0.1 μ m and the thick zinc oxide of 1.0 μ m (ZnO) film with continuous rolling type membrane formation device commonly used in order with the sputtering method (not shown) on the coiled material substrate, formed the coiled material rolls of substrate scroll of double-deck black reflection layer.This rolls of substrate is placed on the substrate feed tube 505 in the substrate transfer chamber 500 of equipment shown in Figure 5.
Afterwards, be recycled and reused for the manufacturing technology that forms PIN junction structure semiconductor layer.
According to said method, add up to the film formation technology (hereinafter being called " film forms operation ") of 10 times rolls of substrate.
After this, check process chamber 501-503 inside.Found that the internal face that comprises the process chamber 501-503 that handles space 104a-104d does not form deposited film does not have byproduct yet.
After the 10th film forms operation, the substrate tube that volume is had the coiled material substrate, the semiconductor layer of the PIN junction structure that double-deck black reflection layer is arranged on the coiled material substrate and form thereon, from rewind room 504, take out, place conventional continuous rolling type film forming device, with forming the thick nesa coating of 800 dusts that comprise ITO on the PIN junction structure semiconductor layer that sputters at the coiled material substrate as the upper strata conductive layer.
Afterwards, the rolls of substrate of more than making is put into cutting equipment (not shown) commonly used, carries long-pending thing substrate from rolls of substrate, presses the cut-space coiled material substrate of the throughput direction of coiled material substrate by every 100mm, obtains many element samples.Silk screen printing silver slurry above in the element sample that these are made each.Make many photoelectric cells of structure shown in Figure 8 thus.
Under the simulated solar of AM1.5, use 100mW/cm 2Each photoelectric cell of energy density irradiation, test its photoelectric conversion efficiency (η), obtain the mean value of the measured photoelectric conversion efficiency of photoelectric cell, assess the characteristic of made photoelectric cell with this.
The mean value of the photoelectric conversion efficiency that is obtained is listed in the table 2.
Comparative Examples 1
Repeat the manufacture method of example 1, just separately carry out from the exhaust of handling space 104c and 104d, and on request to handling the interior pressure separate regulation of space 104c and 104d.Particularly, to handling space 104c, use pressure controller 110c to control the openings of sizes of vario valve 109c with the force value that pressure gauge 106c records,, use pressure controller 110d to control the openings of sizes of vario valve 109d with the force value that pressure gauge 106d records to handling space 104d.
Identical with the situation of example 1, in this Comparative Examples 1, the film that adds up to 10 times forms operation, after this, and the inside of check process chamber 501 to 503.Found that, the internal face of process chamber 503 and handle space 104c and 104d the internal face deposit a large amount of byproducts.The special discovery formed a large amount of byproducts with the coiled material substrate channel period of process between processing space 104c and 104d.The byproduct of removing deposit then will expend long time.Then will prolong service time in order to reuse the equipment of using over, the result greatly reduces operating efficiency.
In fact and do not match in this Comparative Examples, the openings of sizes amount of each vario valve is mated in design, but they.The ratio that first film forms two openings of sizes amounts in the operation is 1: 1.1, but it gradually changes along with film formed repetition, and this ratio becomes 1: 1.2 in the 10th film formation operation.For this reason, the reason that this byproduct produces thinks to have set up an airflow route, allow to handle the inner space that the flow of process air of using among the 104c of space is crossed process chamber 503, flow out outside the 104c that handles the space, and enter and handle space 104d, therefore, the active material of handling the processing gas that produces among the 104c of the space described inner space of process chamber 103 of bleeding.
In this Comparative Examples, use the method identical, be used in the 10th film and form the coiled material substrate that double-deck black reflection layer is arranged and be formed with the semiconductor layer of PIN structure thereon that obtains in the operation and make many photoelectric cells with example 1.
Under the AM1.5 simulated solar, use 100mW/cm 2Each photoelectric cell testing photoelectronic conversion efficiency (η) of energy density irradiation, obtain the mean value of the measured photoelectric conversion efficiency of these photoelectric cells, assess the characteristic of the photoelectric cell of making like this.
The mean value of the photoelectric conversion efficiency that is obtained is listed in the table 2.
As shown in table 2, can see the photoelectric conversion efficiency height of the photoelectric conversion efficiency of example 1 than Comparative Examples 1.
Check forms face through the film of the film formed coiled material substrate of example 1 and Comparative Examples 1 respectively.Found that, be deposited with many pulverulent materials on the film formation face of the coiled material substrate in the Comparative Examples 1, and find that these pulverulent materials are white stains.These pulverulent materials are that the byproduct that produces in the process chamber 103 constitutes.Think that the pulverulent material of deposit is the reason that causes light transmission to descend or produce leakage current.As a result, the photoelectric conversion efficiency in the Comparative Examples 1 descends.In the example 1, do not have this pulverulent material of deposit, do not find this stain yet.
Example 2
Repeat the manufacturing process of example 1, just in handling space 104c, form the used SiH of P type layer in the example 1 4Gas velocity 20sccm, H 2Gas velocity 3000sccm, PF 3/ H 2Gas velocity 30sccm becomes 10sccm, 1500sccm and 15sccm in this example respectively.Film formation condition in this example is listed in the table 3.In addition, in this example, regulate the openings of sizes amount of vario valve 109c and 109d, startup control unit 111, and the force value that records with pressure gauge 106c only, make exhaust velocity through vario valve 109c become through the exhaust velocity of vario valve 109d half, the interior pressure of control and treatment space 104c and 104d on request.
Identical with example 1 situation, the film that adds up to 10 times forms.Have double-deck black reflection layer and the coiled material substrate of semiconductor layer of PIN junction structure on it that are used in that the 10th film form that operation obtains use the method identical with example 1 to make many photoelectric cells.
Under the simulated solar of AM1.5, and 10mW/cm 2Each photoelectric cell of energy density irradiation, test its photoelectric conversion efficiency (η), and get the mean value of the photoelectric conversion efficiency of these photoelectric cells, assess the characteristic of photoelectric cell with this.
The mean value of the photoelectric conversion efficiency that is obtained is listed in the table 4.
Comparative Examples 2
In this Comparative Examples, with continuous rolling type film forming device commonly used shown in Figure 6, identical with the situation of Comparative Examples 1, the test value that records with each processing corresponding each pressure gauge 106a of space 104a-104c among the process chamber 501-503 and 106d is the basis, and the openings of sizes of regulating each vario valve 109a-109d is carried out the film formation of coiled material substrate.The film formation condition of the employing in the film formation condition in this Comparative Examples and the example 2 shown in the table 3 is identical.
Identical with the situation of example 2, film forms to be operated after total 10 times, be used in the 10th film and form coiled material substrate that double-deck black reflection layer is arranged that obtains in the operation and the coiled material substrate that the semiconductor layer of PIN junction structure is arranged on it, make many photoelectric cells by the method identical with example 1.
Under the simulated solar of AM1.5, and use 100mW/cm 2Each photoelectric cell of energy density irradiation, test its photoelectric conversion efficiency (η), and get the mean value of the photoelectric conversion efficiency of these photoelectric cells, assess the performance of photoelectric cell with this.
The mean value of the photoelectric conversion efficiency that is obtained is listed in the table 4.
As shown in table 4, the photoelectric conversion efficiency height of the photoelectric conversion efficiency comparison example 2 of discovery example 2.
Respectively inspection example 2 and Comparative Examples 2 through the formation film surface of film formed coiled material substrate, the result finds to be deposited with many pulverulent materials on the formation film surface of coiled material substrate in the Comparative Examples 2.Find that these pulverulent materials are white stains.These pulverulent materials are to be made of the byproduct that produces in the process chamber 103.Think that the pulverulent material of institute's deposit has become printing opacity matter difference or produced the reason of leakage current, the result, photoelectric conversion efficiency descends in the Comparative Examples 2.In the example 2, both do not found that this pulverulent material deposit do not find stain yet.
Example 3
In this example, with continuous rolling type film forming device shown in Figure 7, as the situation in the example 1, the film that carries out the coiled material substrate forms.Continuous rolling type film forming device shown in Figure 7 is that the part of equipment shown in Figure 5 is improved, and the process chamber 502 that forms I type layer in the equipment is added ambassador 3 processing space 104b-104d wherein are set.Handle space 104b-104d for 3 that are provided with in the process chamber 502, can make in 3 each that handle among the 104b-104d of space by less deposition speed under the identical film formation condition shown in the table 5.Formation includes the I type layer of the three stacked I N-type semiconductor N films of putting that big thickness and excellent properties are arranged.Used film formation condition is listed in the table 5 in this example.
In this example, only the test value of the pressure gauge 106c that uses with processing space 104c makes the openings of sizes of vario valve remain on identical size, with the interior pressure of this control and treatment space 104b-104d.Thus, can make the interior pressure in each processing space of handling space 104b-104d in the film forming process remain on the required force value shown in the table 5.Equally, as example 1, only make the openings of sizes of each vario valve 109e-109f keep identical size, control the processing space 104e of setting in the process chamber 502 that is used to form P type layer and the interior pressure of 104f thus with the test value of handling the used pressure gauge 106e of space 104e.Thus, the interior pressure energy that makes in the film forming process each handle space 104e and 104f remains on the required force value shown in the table 5.
In this example, as the situation of example 1, film forms operation and adds up to after 10 times, form the coiled material substrate that double-deck black reflection coiled material substrate is arranged on its that obtains in the operation and be formed with the semiconductor layer of PIN junction structure thereon with the 10th film, make many photoelectric cells by the same procedure of example 1.
Under the simulated solar of AM1.5, and use 100mW/cm 2Each photoelectric cell of energy density irradiation, test its photoelectric conversion efficiency (η), and get the mean value of the photoelectric conversion efficiency of these photoelectric cells, assess the performance of photoelectric cell with this.The mean value of the photoelectric conversion efficiency that obtains in the mean value ratio 1 of photoelectric conversion efficiency is big.
Check the formation film surface of the film formed coiled material substrate of process in this example respectively.As a result, on the coiled material substrate of check, both do not found that the pulverulent material deposit do not find stain yet.
Example 4
With the manufacturing process of equipment repetition example 3 shown in Figure 7, just handle the used H of semiconductor film that is used to form among the 104d of space as I type layer the 3rd in the example 3 2Gas velocity 500sccm becomes 1500sccm, and the 3rd handles the I N-type semiconductor N film that forms among the 104d of space as I type layer and be added to the 3rd RF power 150W that handles space 104d and become 500W in the example 1.Owing to form the I/P interface between the 3rd I type layer and the P type layer below it, under the described conditions,, can further improve the I/P interface between the 3rd I type layer and the P type layer by forming the 3rd I type layer.
Specifically, handle among the 104d of space, strengthen and use H 2The amount of dilution of gas strengthens the wattage of added RF power.Make the 3rd flow of process air speed of handling among the 104d of space different with the flow of process air speed that is arranged in the described second processing space 104c thereafter with component with component.Formula according to said method, when processing gas component in the adjacent processing space is differed from one another, the openings of sizes of each vario valve and become fixing ratio by each relation that becomes between the exhaust velocity of valve.For this reason, prediction vario valve 109b-109d openings of sizes and exhaust velocity, they are similar to cubic equation.The control unit 111 of this approximate cubic equation input corresponding to process chamber 502.Only the test pressure value of the pressure gauge 106c of usefulness alignment processing space 104c is determined the openings of sizes amount of each vario valve 109b-109d, the interior pressure of control and treatment space 104b-104d also with the approximate cubic equation in the control unit 111.Thus, can make the interior pressure of each processing space 104b-104c in the film forming process remain on the required force value shown in the table 6.
Used film formation condition is listed in the table 6 in this example.
In this example, as the situation of example 1, film forms to be operated after total 10 times, check process chamber 501-503 inside.Found that the internal face that comprises each the process chamber 501-503 that handles space 104a-104f had not both had the film deposit is not had byproduct yet.
In this example, with the 10th film form obtain in the operation have double-deck black reflection layer with its on be formed with the coiled material substrate of the semiconductor layer of PIN junction structure, use the method identical to make many photoelectric cells with example 1.
Under the simulated solar of AM1.5, and use 100mW/cm 2Each photoelectric cell of energy density irradiation, test its photoelectric conversion efficiency (η), get the mean value of the photoelectric conversion efficiency of these photoelectric cells test, assess the performance of the photoelectric cell of making like this with this.The photoelectric conversion efficiency mean value that is obtained in the mean value ratio 1 of the photoelectric conversion efficiency that is obtained is big.
Find that by foregoing the present invention has following obvious advantage.
Promptly, adopt the control device of the openings of sizes of judging each vario valve that is connected to a plurality of substrate processing spaces that communicate with each other, with with the pressure test value in one of described substrate processing space, the openings of sizes amount of the vario valve that can definite link to each other with the substrate processing space, operate vario valve thus simultaneously, make the flow of process air speed in the substrate processing space reach best.Thereby can obtain the substrate goods after treatment of excellent properties continuously.
And, the improved Method of processing a substrate that comprises improved film formation method can be provided, with the improved substrate-treating apparatus that comprises improved film forming device, thereby, can be by rational cost stable and be formed with continuously evenly and the high-quality of excellent specific property and highly reliable deposited film.
Be suitable for producing by batch effectively the high-quality of excellent properties and highly reliable photoelectric cell.
In addition, by the present invention, can be stable and form high-quality and highly reliable function deposited film continuously, it has good characteristic, can long preservation and be not damaged, can high productivity ratio be arranged by reasonable price, can prevent byproduct, the frequency of maintenance of used manufacturing equipment descends, and operating efficiency improves.This is suitable for producing by batch effectively high-quality and highly reliable photoelectric cell, makes photoelectric cell excellent performance under reasonable manufacturing cost.
Table 1
Handle the space Cambial title: thickness (nm) Gases used flow velocity (sccm) Interior press (Torr) Institute adds effective power (W) Underlayer temperature (℃) Film deposition speed (nm/sec)
??104a N type layer: 20nm SiH 4：100 H 2：1000 PH 3/H 2(PH 3：2％)：150 ????1.0 ??RF：400 ???300 ?????1.2
??104b I type layer: 80nm SiH 4：200 H 2：500 ????1.0 ??RF：200 ???350 ?????0.6
??104c P type layer: 3nm SiH 4：20 H 2：3000 PF 3/H 2(PF 3：2％)：30 ????1.0 ??RF：1000 ???300 ?????0.2
??104d P type layer: 3nm SiH 4：20 H 2：3000 PF 3/H 2(PF 3：2％)：30 ????1.0 ??RF：1000 ???300 ?????0.2
Table 2
Photoelectric conversion efficiency (η)
Example 1 ????4.7％
Comparative Examples 1 ????3.9％
Table 3
Handle the space Cambial title: thickness (nm) Gases used flow velocity (sccm) Interior press (Torr) Institute adds effective power (W) Underlayer temperature (℃) Film deposition speed (nm/sec)
??104a N type layer: 20nm ?SiH 4：100 ?H 2：1000 ?PH 3/H 2(PH 3：2％)：150 1.0 ?RF：400 ???300 ????1.2
??104b I type layer: 80nm ?SiH 4：200 ???H 2：500 1.0 ?RF：200 ???350 ????0.6
??104c P type layer: 1.6nm ?SiH 4：20 ?H 2：1500 ?PF 3/H 2(PF 3：2％)：15 1.0 ?RF：1000 ???300 ????0.1
??104d P type layer: 3nm ?SiH 4：20 ?H 2：3000 ?PF 3/H 2(PF 3：2％)：30 1.0 ?RF：1000 ???300 ????0.2
Table 4
Photoelectric conversion efficiency (η)
Example 2 ????4.9％
Comparative Examples 2 ????4.1％
Table 5
Handle the space Cambial title: thickness (nm) Gases used flow velocity (sccm) Interior press (Torr) Institute adds effective power (W) Underlayer temperature (℃) Film deposition speed (nm/sec)
??104a N type layer: 20nm ?SiH 4：100 ?H 2：1000 ?PH 3/H 2(PH 3：2％)：150 ?1.0 ??RF：400 ???300 ?????1.2
??104b I type layer: 35nm ?SiH 4：120 ?H 2：500 ?1.0 ??RF：150 ???350 ?????0.3
??104c I type layer: 35nm ?SiH 4：120 ?H 2：500 ?1.0 ??RF：150 ???350 ?????0.3
??104d I type layer: 35nm ?SiH 4：120 ?H 2：500 ?1.0 ??RF：150 ???350 ?????0.3
??104e P type layer 3nm ?SiH 4：10 ?H 2：1500 ?PF 3/H 2(PF 3：2％)：15 ?1.0 ??RF：1000 ???300 ?????0.1
??104f P type layer: 3nm ?SiH 4：20 ?H 2：3000 ?PF 3/H 2(PF 3：2％)：30 ?1.0 ??RF：1000 ???300 ?????0.2
Table 6
Form the space Cambial title: thickness (nm) Gases used flow velocity (sccm) Interior press (Torr) Institute adds effective power (W) Underlayer temperature (℃) Film deposition speed (nm/sec)
??104a N type layer: 20nm ?SiH 4：100 ?H 2：1000 ?PH 3/H 2(PH 3：2％)：150 ?1.0 ?RF：400 ??300 ?????1.2
??104b I type layer: 35nm ?SiH 4：120 ?H 2：500 ?1.0 ?RF：150 ??350 ?????0.3
??104c I type layer: 35nm ?SiH 4：120 ?H 2：500 ?1.0 ?RF：150 ??350 ?????0.3
??104d I type layer: 20nm ?SiH 4：120 ?H 2：500 ?1.0 ?RF：500 ??350 ?????0.2
??104e P type layer: 3nm ?SiH 4：10 ?H 2：1500 ?PF 3/H 2(PF 3：2％)：15 ?1.0 ?RF：1000 ??300 ?????0.1
??104f P type layer: 3nm ?SiH 4：20 ?H 2：3000 ?PF 3/H 2(PF 3：2％)：30 ?1.0 ?RF：1000 ??300 ?????0.2

Claims (20)

1. Method of processing a substrate, comprise a plurality of processing space of transport substrates by being interconnected, and handle the step of the described substrate of spatial manipulation at each, it is characterized in that, according to interior pressure as the processing space (a) in one of described a plurality of processing space, to press and be arranged in described processing space (a) described before or after the described processing space (a), as in a plurality of processing space at least one processing space (b) in compress into row control.
2. according to the Method of processing a substrate of claim 1, wherein, come control and treatment space (a) and interior pressure (b) by controlling these exhaust velocities of handling each processing space in space.
3. according to the Method of processing a substrate of claim 2, wherein, the openings of sizes that is arranged on the vent valve at the blast pipe place that is connected with each processing space by adjusting is controlled the exhaust velocity that each handles the space.
4. according to the Method of processing a substrate of claim 3, wherein, it is identical that the openings of sizes of controlling each vent valve becomes its openings of sizes.
5. according to the Method of processing a substrate of claim 3, wherein, the openings of sizes of controlling each vent valve makes the ratio that has regulation between its openings of sizes.
6. according to the Method of processing a substrate of claim 1, wherein, handle space (a) and handle space (b) being arranged in the same process chamber.
7. according to Method of processing a substrate, wherein, handle space (a) and handle space (b) being interconnected by valve by claim 1.
8. according to the Method of processing a substrate of claim 1, wherein, substrate processing comprises that film forms processing.
9. Method of processing a substrate according to Claim 8, wherein, film forms to handle and comprises sputter.
10. Method of processing a substrate according to Claim 8, wherein, film forms to handle and comprises CVD.
11. according to the Method of processing a substrate of claim 1, wherein, substrate comprises the coiled material substrate.
12. a substrate-treating apparatus comprises: a plurality of processing space; Substrate conveying device is used for transport substrates by described a plurality of processing space, and handles described substrate in each handles the space; Barometer, be used to measure interior pressure as the processing space (a) in one of described a plurality of processing space, it is characterized in that, described substrate-treating apparatus has control unit, this control unit is according to the information that obtains from described pressure gauge, to the interior pressure in described processing space (a) and be positioned at described processing space (a) front or rear, as a plurality of processing space at least one processing space (b) compress into row control.
13. according to the substrate-treating apparatus of claim 12, wherein, each of described a plurality of processing space handled the blast pipe that the space is equipped with the belt variable valve, described control unit is used for controlling directly or indirectly the openings of sizes of each vario valve.
14. substrate-treating apparatus according to claim 13, wherein, pressure controller is connected on each vario valve, described pressure controller is used to regulate the openings of sizes of described vario valve, and the openings of sizes of each vario valve is according to being regulated by coupled pressure controller from the signal of described control unit input.
15. according to the substrate-treating apparatus of claim 12, wherein, described processing space (a) and (b) be located in the same process chamber.
16. according to the substrate-treating apparatus of claim 12, wherein, described processing space (a) and (b) be interconnected by valve.
17. according to the substrate-treating apparatus of claim 12, wherein, at least one in described a plurality of processing space is provided with membrane formation device.
18. according to the substrate-treating apparatus of claim 17, wherein, described membrane formation device comprises handles air feed system and power supply device.
19. according to the substrate-treating apparatus of claim 17, wherein, described membrane formation device comprises sputter equipment.
20. according to the substrate-treating apparatus of claim 17, wherein, described membrane formation device comprises the CVD device.
CN99127779A 1998-12-22 1999-12-22 Apparatus for treating backing and method thereof Pending CN1260599A (en)

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