CN1251012C - 液晶显示装置的制造方法 - Google Patents
液晶显示装置的制造方法 Download PDFInfo
- Publication number
- CN1251012C CN1251012C CN 02132129 CN02132129A CN1251012C CN 1251012 C CN1251012 C CN 1251012C CN 02132129 CN02132129 CN 02132129 CN 02132129 A CN02132129 A CN 02132129A CN 1251012 C CN1251012 C CN 1251012C
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- CN
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- Prior art keywords
- making
- protective film
- film
- insulating protective
- layer
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- 238000009413 insulation Methods 0.000 claims abstract description 67
- 229910052751 metal Inorganic materials 0.000 claims abstract description 65
- 239000002184 metal Substances 0.000 claims abstract description 65
- 238000001259 photo etching Methods 0.000 claims abstract description 60
- 239000010408 film Substances 0.000 claims description 258
- 239000010410 layer Substances 0.000 claims description 209
- 239000000758 substrate Substances 0.000 claims description 93
- 230000001681 protective effect Effects 0.000 claims description 88
- 239000003870 refractory metal Substances 0.000 claims description 56
- 239000011229 interlayer Substances 0.000 claims description 29
- 229910052782 aluminium Inorganic materials 0.000 claims description 28
- 239000011651 chromium Substances 0.000 claims description 28
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 26
- 239000004411 aluminium Substances 0.000 claims description 24
- 239000012528 membrane Substances 0.000 claims description 22
- 229910000838 Al alloy Inorganic materials 0.000 claims description 21
- 229910052804 chromium Inorganic materials 0.000 claims description 17
- 238000000576 coating method Methods 0.000 claims description 17
- 229910052750 molybdenum Inorganic materials 0.000 claims description 17
- 230000003287 optical effect Effects 0.000 claims description 17
- 239000011248 coating agent Substances 0.000 claims description 16
- 239000004065 semiconductor Substances 0.000 claims description 15
- 238000004380 ashing Methods 0.000 claims description 13
- 239000010409 thin film Substances 0.000 claims description 13
- 238000005530 etching Methods 0.000 claims description 12
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 8
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 8
- 239000011733 molybdenum Substances 0.000 claims description 8
- 230000033228 biological regulation Effects 0.000 claims description 7
- 230000015572 biosynthetic process Effects 0.000 claims description 7
- 239000012212 insulator Substances 0.000 claims description 6
- 238000007639 printing Methods 0.000 claims description 6
- 238000000206 photolithography Methods 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 abstract description 55
- 239000010703 silicon Substances 0.000 abstract description 55
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 2
- 239000000463 material Substances 0.000 description 29
- 239000011159 matrix material Substances 0.000 description 10
- 238000005516 engineering process Methods 0.000 description 7
- 239000011521 glass Substances 0.000 description 7
- 229910052719 titanium Inorganic materials 0.000 description 6
- 239000010936 titanium Substances 0.000 description 6
- 229910004205 SiNX Inorganic materials 0.000 description 5
- 238000010828 elution Methods 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 5
- 229910021417 amorphous silicon Inorganic materials 0.000 description 4
- 150000001455 metallic ions Chemical class 0.000 description 4
- 238000002161 passivation Methods 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
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- 238000012986 modification Methods 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- MYRTYDVEIRVNKP-UHFFFAOYSA-N 1,2-Divinylbenzene Chemical compound C=CC1=CC=CC=C1C=C MYRTYDVEIRVNKP-UHFFFAOYSA-N 0.000 description 2
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
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- 239000004615 ingredient Substances 0.000 description 2
- 239000000049 pigment Substances 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229920006037 cross link polymer Polymers 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
- RNWHGQJWIACOKP-UHFFFAOYSA-N zinc;oxygen(2-) Chemical compound [O-2].[Zn+2] RNWHGQJWIACOKP-UHFFFAOYSA-N 0.000 description 1
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- Liquid Crystal (AREA)
Abstract
Description
Claims (33)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 02132129 CN1251012C (zh) | 2002-08-30 | 2002-08-30 | 液晶显示装置的制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 02132129 CN1251012C (zh) | 2002-08-30 | 2002-08-30 | 液晶显示装置的制造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1479145A CN1479145A (zh) | 2004-03-03 |
CN1251012C true CN1251012C (zh) | 2006-04-12 |
Family
ID=34145113
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 02132129 Expired - Fee Related CN1251012C (zh) | 2002-08-30 | 2002-08-30 | 液晶显示装置的制造方法 |
Country Status (1)
Country | Link |
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CN (1) | CN1251012C (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100356261C (zh) * | 2004-12-01 | 2007-12-19 | 鸿富锦精密工业(深圳)有限公司 | 液晶显示器 |
EP1843194A1 (en) | 2006-04-06 | 2007-10-10 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device, semiconductor device, and electronic appliance |
JP5484853B2 (ja) * | 2008-10-10 | 2014-05-07 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
CN103487999B (zh) * | 2013-05-24 | 2016-03-02 | 合肥京东方光电科技有限公司 | 一种阵列基板、制备方法以及显示装置 |
-
2002
- 2002-08-30 CN CN 02132129 patent/CN1251012C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN1479145A (zh) | 2004-03-03 |
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Owner name: NIPPON ELECTRIC CO., LTD. Free format text: FORMER OWNER: NEC LCD TECHNOLOGY CO.,LTD Effective date: 20100608 |
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Effective date of registration: 20100608 Address after: Tokyo, Japan Patentee after: NEC Corp. Address before: Kanagawa, Japan Patentee before: NEC LCD Technologies, Ltd. |
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Owner name: GETENA FUND CO., LTD. Free format text: FORMER OWNER: NEC CORP. Effective date: 20110803 |
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Effective date of registration: 20110803 Address after: Delaware, USA Patentee after: Nippon Electric Co. Address before: Tokyo, Japan Patentee before: NEC Corp. |
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Granted publication date: 20060412 Termination date: 20140830 |
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