CN1249419C - Light-spot tracking device of atomic force microscope - Google Patents
Light-spot tracking device of atomic force microscope Download PDFInfo
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- CN1249419C CN1249419C CN 200410053442 CN200410053442A CN1249419C CN 1249419 C CN1249419 C CN 1249419C CN 200410053442 CN200410053442 CN 200410053442 CN 200410053442 A CN200410053442 A CN 200410053442A CN 1249419 C CN1249419 C CN 1249419C
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- condenser lens
- cantilever tip
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Abstract
The present invention relates to a light-spot tracking device for the probe tip scanning of an atomic force microscope. The light-spot tracking device comprises a laser light lever, wherein the laser light lever comprises a laser, and a reflector is arranged in the advance direction of parallel light beams radiated by the laser; the reflector is matched with a regulating device, and a condenser lens and a micro cantilever probe tip are orderly arranged in the advance direction of the reflective light ray G of the reflector; the center of the condenser lens and the top end on the back surface of the micro cantilever probe tip are arranged on the optical axis of the light ray G, and the top end of the micro cantilever probe tip is arranged on the focal point of the condenser lens; an imaging lens and a two-dimensional adjustable four-quadrant photoelectric detector are orderly arranged in the advance direction of the reflective light ray H of the micro cantilever probe tip; a combined scanning device is formed from a xy direction scanner and a z direction scanner fixed on the xy direction scanner, and the components are modularized. The present invention has the advantages of simple structure, easy regulation and change of all devices and components, and reliable tracking of laser light focusing light spots.
Description
Technical field
The present invention relates to atomic force microscope, a kind of optical tracking device that is used for atomic force microscope.
Background technology
Atomic force microscope is the surface measurement instrument with very high resolution and lot of advantages, is the important foundation of Nano-technology Development, has application fields.The optical lever detection mode that all adopts the existing atomic force microscope of great majority detects the deflection after micro-cantilever tip is subjected to atomic force, and this method is very ripe, and precision is also very high.Particularly for the atomic force microscope of sample scanning, the fine realization of this detection mode.But because sample is placed on the top of scanner, size and weight all will be restricted, and have therefore limited the microscopical application of sample scanning atomic force.The relative sample scanning atomic force of needle point scanning atomic force microscope microscope has many good qualities, but the optical lever pick-up unit of needle point scanning atomic force microscope is not to be easy to realize.In scanning process, it is very big technological difficulties that the optical lever pick-up unit will keep relative static, the flare center with micro-cantilever tip of micro-cantilever tip back side focal spot and four-quadrant photelectric receiver center consistent, relates to the optical tracking problem.
For addressing this problem, there have been a lot of schemes to be suggested.As technology l (U.S. Patent No. 5025658) formerly shown in figure one; Formerly technology 2 (Putman et al, presented at theOE/LEASE ' 93 Conference, Jan.19,1993, Los Angeles is Calif.) shown in figure two.Formerly the micro-cantilever tip 14 of atomic force microscope is very near from the exit facet of laser diode 21 in the technology 1, receives from micro-cantilever tip light quilt that reflects and the photodetector 22 that laser diode 21 is packaged together.Laser diode 21 comprises that photodetector 22 is fixed on scanatron 12 ends by installing 23.Because laser instrument, photodetector and micro-cantilever tip combination are very near, and and scanner be fixed together, so laser instrument and photodetector tracking microcantilever needle point well.Formerly in the technology 2, laser instrument 10, condenser lens 30 and micro-cantilever tip 14 all are fixed on the same scanning element 12, move together because of these parts during scanning, so can reach tracking effect.But formerly technology 1 and 2 all obviously has the following disadvantages:
(1) formerly the photodetector of technology 1 has only with the micro-cantilever tip spacing and could guarantee measuring accuracy in the time of very little (being less than 100 microns), and this requires align the accurately top of micro-cantilever tip of laser focusing point.
(2) formerly technology 1 can't be introduced very much the optical microscope of observing micro-cantilever tip and sample near micro-cantilever tip because of laser diode.
(3) formerly in the technology 2, micro-cantilever tip all moves relative to photodetector with laser instrument during scanning, even this causes micro-cantilever tip not have under the situation of deflection, the light that reflects from micro-cantilever tip also can move relative to photodetector.
(4) formerly in the technology 1, scanner will carry laser diode and photodetector; Formerly in the technology 2, scanner will carry laser instrument and condenser lens, and the decline that this all can cause the scanner resonant frequency makes scanner more responsive to vibration, influences the performance of atomic force microscope.
(5) laser diode, the photodetector in the technology 1 formerly if the laser instrument formerly in the technology 2 is damaged, will be difficult to change.
Summary of the invention
The problem to be solved in the present invention is to overcome the deficiency of above-mentioned technology formerly, a kind of optical tracking device by the modularization idea design is provided, this device should be simple in structure, each assembly of elements is easy to adjust and change, the motion of laser focusing luminous point tenacious tracking micro-cantilever tip in scanning process, guarantee that micro-cantilever tip does not take place under the situation of actual deflection, reflected light can not move relative to photodetector yet.
Basic thought of the present invention: at first package unit must design by modularization idea, is convenient for changing in case assembly of elements goes wrong, and perhaps for improving the performance of atomic force microscope, directly changes whole module.We are laser instrument, and catoptron, imaging len and four-quadrant photelectric receiver be as a module, and micro-cantilever probe and condenser lens be as a module, z to scanner and xy to scanner respectively as a module.Micro-cantilever probe and condenser lens module are fixed on z on scanner module, then z to scanner module and xy to scanner module synthetic one can be at the parts of xyz scanning direction needle point.The convergent point of directional light after by condenser lens just can the motion of tracking microcantilever needle point all the time in whole scanning process like this.Adjust four-quadrant photo detector certain location behind imaging len again, guarantee that micro-cantilever tip does not have under the situation of actual deflection, reflected light can not move relative to photodetector yet, just can solve the problem of optical tracking well.
Technical solution of the present invention is as follows:
A kind of optical tracking device that is used for atomic-force microscope needle-tip scanning comprises laser lever and array sweeping device, it is characterized in that:
Described laser lever: comprise laser instrument, on the working direction of the parallel beam of laser emitting, catoptron is arranged, this catoptron is furnished with regulating device, on the working direction of the reflection ray G of catoptron is condenser lens and micro-cantilever tip successively, the center of this condenser lens and the top of micro-cantilever tip are in together on the optical axis of reflection ray G, and the top of micro-cantilever tip is positioned at the focus of condenser lens, on the working direction of the reflection ray H of micro-cantilever tip is imaging len and four-quadrant photo detector successively, and the position bidimensional of this four-quadrant photo detector is adjustable;
One xy is to scanner and be fixed on the z of this xy on scanner and form described array sweeping device to scanner;
Described laser instrument, catoptron, imaging len and four-quadrant photo detector are formed a module, micro-cantilever tip and condenser lens are formed a module, z respectively is a module to scanner and xy to scanner, micro-cantilever tip and condenser lens module are fixed on z on scanner module, then z to scanner module and xy to scanner module synthetic one can be at the parts of xyz scanning direction needle point.The center of described catoptron should be in the focal position of condenser lens.Described four-quadrant photo detector places from the image point position of the virtual focus of the reflection ray of micro-cantilever tip.
Described laser instrument is a laser instrument that comprises pancratic lens, can directly export directional light.
Compare advantage of the present invention with technology formerly:
1) motion of the extraordinary tracking microcantilever needle point of luminous point energy, micro-cantilever tip does not have under the situation of actual deflection, and the light that reflects from micro-cantilever tip can not move relative to photodetector yet, and not limited by sweep limit;
2) rational in infrastructure, facilitate the introduction of optical microscope and CCD surveillance, real-time observation micro-cantilever tip;
3) scanner only need carry the weight of condenser lens and needle point seat, and the resonant frequency of scanner is had no impact;
4) modular design makes and changes assembly of elements, or changing whole module all makes things convenient for feasible.
Description of drawings
Fig. 1: the principle schematic of technology 1 formerly
Fig. 2: the principle schematic of technology 2 formerly
Fig. 3: the structural representation of the optical tracking device of atomic force microscope of the present invention
Fig. 4: the synoptic diagram of determining four-quadrant photelectric receiver position among the present invention
Embodiment
See also Fig. 3 earlier, Fig. 3 is the structural representation of the optical tracking device of atomic force microscope of the present invention, as seen from the figure, and a kind of formation that is used for the optical tracking device of atomic-force microscope needle-tip scanning of the present invention:
One laser lever: comprise laser instrument 1, on the working direction of the parallel beam of laser instrument 1 outgoing, catoptron 2 is arranged, this catoptron 2 is furnished with regulating device, be condenser lens 4 and micro-cantilever tip 6 successively on the working direction of catoptron 2 reflection ray G, the top, the back side of the center of this condenser lens 4 and micro-cantilever tip 6 is in together on the optical axis of light G, and the top of micro-cantilever tip 6 is positioned at the focus of condenser lens 4, on the working direction of the reflection ray H of micro-cantilever tip 6 is the adjustable four-quadrant photo detector 8 of imaging len 7 and bidimensional successively, but this four-quadrant photo detector 8 is contained in (not shown) on the adjustment rack that a bidimensional adjusts;
One xy is to scanner 3 and be fixed on the z of this xy on scanner 3 to scanner 5 formation array sweeping devices;
Described laser instrument 1, catoptron 2, imaging len 7 and four-quadrant photelectric receiver 8 are formed a module, micro-cantilever probe 6 and condenser lens 4 are formed a module, z respectively is a module to scanner 5 and xy to scanner 3, micro-cantilever probe and condenser lens module are fixed on z on scanner module, then z to scanner module and xy to scanner module synthetic one can be at the parts of xyz scanning direction needle point.
Described laser instrument 1 is a laser instrument that comprises pancratic lens, can directly export directional light.
The center of described catoptron 2 should be in the focal position of condenser lens 4.
Optical tracking device of the present invention has aforesaid structure.In the time of work, laser instrument 1 sends directional light, and this directional light reflects on catoptron 2, and reflection ray G sees through the top that condenser lens 4 converges to micro-cantilever tip 6.Because micro-cantilever tip 6 and condenser lens 4 are fixed on z on scanner 5 as a module, and z is fixed on xy on scanner 3 to scanner 5, so no matter array sweeping parts part scans on which direction, directional light G can converge on the focus of condenser lens 4, just the tracking of focal spot to micro-cantilever tip 6 so just finished on the top of micro-cantilever tip 6.The tracking of the light that reflects from the top of micro-cantilever tip 6 relates to the putting position of four-quadrant photo detector 8, and it must meet some requirements, and reflection ray H just can not have to move relative to photodetector 8 under the situation of actual deflection at micro-cantilever tip.We are selected like this in this position: shown in figure four, the light of directional light G optical axis position is corresponding to the center of hot spot on the four-quadrant photo detector 8 significantly. Light 10,20,30 among the figure four is exactly the light that the light of directional light G optical axis position reflects on micro-cantilever tip 6, and their reverse extendings can be given a bit mutually, i.e. the virtual focus of imaging lens 7.Imaging len 7 is to this virtual focus imaging, and the light that the light of all directional light G optical axis positions reflects on micro-cantilever tip 6 in the scanning process all can converge to the image point position of this virtual focus.Four-quadrant photo detector is placed on this image point position in other words, and the center of the hot spot that reflected light H forms on four-quadrant photo detector 8 can remain unchanged.For the light that guarantees directional light G optical axis can vertically be radiated at the top of micro-cantilever tip 6 all the time by condenser lens 4, the center of catoptron 2 should be in the focal position of condenser lens 4.Behind each replacing needle point, the angle of accommodation reflex mirror 2, converge in the top of micro-cantilever tip 6 to guarantee the luminous point that is focused on.
Specific embodiment as shown in Figure 3, laser instrument 1 adopts the semiconductor laser that has comprised pancratic lens, wavelength 650nm, catoptron 2 is general catoptron, xy adopts the product of PI company to scanner 3 and z to scanner 5, xy is 0.1mm*0.1mm to the sweep limit of scanner 3, and the focal length of condenser lens 4 is 2cm, the angle that micro-cantilever tip 6 keeps from the horizontal by 15 °.Shown in figure four, the distance that imaginary intersection point o ' is ordered apart from o is about 10.16mm by calculating, place apart from o ' some 6cm on the direction of o ' o is provided with the imaging len 7 that focal length is 3cm, and four-quadrant photelectric receiver 8 is placed on the position of imaging len 7 back 3cm, just the image point position of virtual focus.
This embodiment uses proof through reality, the present invention has simple in structure, each assembly of elements is easy to adjust and change, the motion of laser focusing luminous point tenacious tracking micro-cantilever tip in scanning process, guarantee that micro-cantilever tip does not take place under the situation of actual deflection, reflected light can not move relative to photodetector.
Claims (2)
1, a kind of optical tracking device that is used for atomic-force microscope needle-tip scanning comprises laser lever and scanning device, it is characterized in that:
Described laser lever: comprise laser instrument (1), on the working direction of the parallel beam of laser instrument (1) outgoing, catoptron (2) is arranged, this catoptron (2) is furnished with regulating device, be condenser lens (4) and micro-cantilever tip (6) successively on the working direction of catoptron (2) reflection ray (G), the top of center of this condenser lens (4) and micro-cantilever tip (6) is in together on the optical axis of reflection ray (G), and the top of micro-cantilever tip (6) is positioned at the focus of condenser lens (4), is the adjustable four-quadrant photo detector (8) of imaging len (7) and bidimensional successively on the working direction of the reflection ray (H) of micro-cantilever tip (6);
One xy is to scanner (3) and be fixed on the z of this xy on scanner (3) to the described array sweeping device of scanner (5) formation;
Described laser instrument (1), catoptron (2), imaging len (7) and four-quadrant photo detector (8) are formed a module, micro-cantilever tip (6) and condenser lens (4) are formed a module, z respectively is a module to scanner (5) and xy to scanner (3), micro-cantilever tip and condenser lens module are fixed on z on scanner module, then z to scanner module and xy to scanner module synthetic one can be at the parts of xyz scanning direction needle point, the center of described catoptron (2) should be in the focal position of condenser lens (4), and described four-quadrant photo detector (8) places from the image point position of the virtual focus of the reflection ray of micro-cantilever tip (6).
2, optical tracking device according to claim 1 is characterized in that described laser instrument (1) is a laser instrument that comprises pancratic lens, can directly export directional light.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410053442 CN1249419C (en) | 2004-08-04 | 2004-08-04 | Light-spot tracking device of atomic force microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410053442 CN1249419C (en) | 2004-08-04 | 2004-08-04 | Light-spot tracking device of atomic force microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1587981A CN1587981A (en) | 2005-03-02 |
| CN1249419C true CN1249419C (en) | 2006-04-05 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200410053442 Expired - Fee Related CN1249419C (en) | 2004-08-04 | 2004-08-04 | Light-spot tracking device of atomic force microscope |
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| CN (1) | CN1249419C (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7767961B2 (en) * | 2005-06-09 | 2010-08-03 | Hitachi Global Storage Technologies Netherlands B.V. | Method for determining material interfacial and metrology information of a sample using atomic force microscopy |
| CN103207035B (en) * | 2013-05-14 | 2015-07-15 | 南京因艾生生物科技有限公司 | Force spectrometer for measuring intermolecular forces |
| CN103645348B (en) * | 2013-12-03 | 2016-03-30 | 中国科学院电工研究所 | A kind of micro-nano-scale coupled vibrations high-resolution measurement method |
| CN103645347B (en) * | 2013-12-03 | 2016-08-17 | 中国科学院电工研究所 | The single-point tracking measurement method of micro-nano-scale Dynamic Coupling vibration |
| JP6588278B2 (en) * | 2015-09-01 | 2019-10-09 | 株式会社日立ハイテクサイエンス | Scanning probe microscope and method of adjusting optical axis of scanning probe microscope |
| CN107063115A (en) * | 2017-01-17 | 2017-08-18 | 天津众科创谱科技有限公司 | A kind of light path system of Kelvin probe |
| CN108489414A (en) * | 2018-05-07 | 2018-09-04 | 中国矿业大学 | A kind of micro/nano-scale memorial alloy round trip memory strain test device and test method |
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2004
- 2004-08-04 CN CN 200410053442 patent/CN1249419C/en not_active Expired - Fee Related
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| CN1587981A (en) | 2005-03-02 |
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| PB01 | Publication | ||
| ASS | Succession or assignment of patent right |
Owner name: SHANGHAI AIJIAN NANOMETER TECHNOLOGY DEVELOPMENT Effective date: 20050304 |
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| C41 | Transfer of patent application or patent right or utility model | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20050304 Address after: Shanghai 800-211 post office box Applicant after: Shanghai Optical Precision Machinery Inst., Chinese Academy of Sciences Co-applicant after: Shanghai AJ Nano-Science Development Co., Ltd. Address before: Shanghai 800-211 post office box Applicant before: Shanghai Optical Precision Machinery Inst., Chinese Academy of Sciences |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20060405 Termination date: 20130804 |