CN1202279C - Heating device for electronic film material growth - Google Patents
Heating device for electronic film material growth Download PDFInfo
- Publication number
- CN1202279C CN1202279C CN 03114636 CN03114636A CN1202279C CN 1202279 C CN1202279 C CN 1202279C CN 03114636 CN03114636 CN 03114636 CN 03114636 A CN03114636 A CN 03114636A CN 1202279 C CN1202279 C CN 1202279C
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- China
- Prior art keywords
- heating
- heater
- electronic film
- well heater
- material growth
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- Expired - Fee Related
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Abstract
The present invention relates to an electronic film heater, particularly to a heater for a growth system of a novel electronic film material. The heater for a growth system of a novel electronic film material is formed by assembling supporting hangers, heating lamp tubes and two annular electrodes, wherein a heating element is an iodine tungsten lamp tube; the heating lamp tubes are fixed on the two annular electrodes; a plurality of installing grooves of the heating lamp tubes are symmetrically arranged on the two annular electrodes; the heating lamp tubes are arranged in the installing grooves to be pressed tightly by screws; a reflecting cover is arranged at the outer layer of each heating lamp tube to form a lamp light irradiating heater. The installation between the heating lamp tubes and the annular electrodes uses a quickly-installed L type groove and screw press-tightened structure, which is convenient and reliable. The present invention has the advantages of simple structure, convenient manufacture and installation and rapid lamp tube replace; especially, a vacuum chamber can also be placed in the heater; gas with a certain component is led into the vacuum chamber according to different needs, and then, the growth of different films can be implemented. The electronic film heater has the characteristics of high heating speed, uniform heating and simple maintenance, and can be widely applied to the heating of the growth of the novel electronic film material.
Description
One, technical field
The present invention relates to well heater, especially for the well heater of novel electron thin-film material growing system.
Two, background technology
System's heater mechanism of novel electron thin-film material growth has intermediate frequency coil induction type heating arrangement, resistance wire heating arrangement, graphite resistance heating arrangement, glow discharge etc. in the prior art.
Above-mentioned several well heaters all exist heating even inadequately, and work-ing life is short, change the Heating element difficulty, strike sparks easily in the joint, and maintenance is convenient inadequately.
Three, summary of the invention
It is a kind of simple in structure that goal of the invention of the present invention is to provide, make easy for installation, easily control, cost is low, satisfies the well heater that a kind of electric thin material novel electron thin-film material growing system is under grown.
The technical scheme that realizes the object of the invention is to solve like this, comprise a voltage regulator controllers, voltage regulator controllers is connected with terminal stud, its improvements of the present invention are also to comprise that terminal stud links to each other with ring electrode respectively, ring electrode is interconnected as one by pillar stiffener, insulation covering, nut, and ring electrode is provided with heating fluorescent tube mounting groove, and passes through screw in compression, heating fluorescent tube peripheral hardware has reflection shield, and reflection shield, insulated enclosure circle are fixedly connected.
Pillar stiffener has at least more than 3 or 3, its two ends and ring electrode, insulation covering, nut connect and compose framework, heating fluorescent tube mounting groove has more than 4 or 4, be symmetricly set on the ring electrode, the heating fluorescent tube is selected quartz-iodine lamp for use, adopts " L " type groove and screw in compression formula structure between heating lamp pipe end and the electrode.
Four, description of drawings
Fig. 1 is a sectional structure synoptic diagram of the present invention;
Fig. 2 is that the A of Fig. 1 is to view;
Fig. 3 is the vacuum state heating arrangement sectional view of Fig. 1.
Five, embodiment
Accompanying drawing is specific embodiments of the invention
Below in conjunction with accompanying drawing content of the present invention is described further
Referring to Fig. 1, shown in Figure 2, terminal stud 1,9 links to each other with ring electrode 2,7 respectively, and ring electrode 2,7 is connected as a single entity by 4 pillar stiffeners 5, insulation covering 6, nut 8. Ring electrode 2,7 is provided with 12 " L " type heating fluorescent tube mounting grooves 10, and quartz-iodine lamp 4 is installed in " L " type groove 10 and by screw 3 and compresses.The heating fluorescent tube 4 outer reflection shields 12 that connect, reflection shield 12 is fixedlyed connected with insulated enclosure circle 11.
On terminal stud 1,9, insert power supply, just can realize fluorescent tube irradiation heating, realize adding thermal control by voltage regulator controllers.
Figure 3 shows that user mode embodiment of the present invention, the inner chamber of ring electrode is equipped with a transparent tube 13, and transparent tube 13 is connected to form a vacuum chamber by sealing-ring 15 and ring flange 16, is heated workpiece 14 in the vacuum chamber.
Lighting fluorescent tube heats workpiece by light-illuminating and reflection.Different needs feed the gas of certain component in the vacuum chamber, promptly realize different growth for Thin Film.The present invention also can make rotary well heater.Reflection shield 12 is removed, implement the peripheral workpiece heating of well heater.
The present invention compared with prior art has simple in structurely, makes easy for installation, the replacing fluorescent tube is quick, especially can also be equipped with a vacuum chamber in the well heater, feed the gas of certain component in the vacuum chamber according to different needs, can realize different growth for Thin Film.It is fast that this well heater has rate of heating, homogeneous heating, and characteristics easy to maintenance are widely used in the heating of novel electron thin-film material growth.
Claims (6)
1, a kind of well heater of electric thin material growth, comprise a voltage regulator controllers, voltage regulator controllers is connected with terminal stud (1,9), it is characterized in that also comprising that terminal stud (1,9) links to each other with ring electrode (2,7) respectively, ring electrode (2,7) is interconnected as one by pillar stiffener (5), insulation covering (6), nut (8), ring electrode (2,7) is provided with heating fluorescent tube mounting groove (10), and compress by screw (3), heating fluorescent tube (4) is outer to be provided with reflection shield (12), and reflection shield (12) is fixedlyed connected with insulated enclosure circle (11).
2, the well heater of electric thin material growth according to claim 1 is characterized in that said pillar stiffener (5) has at least more than 3 or 3, and its two ends and ring electrode (2,7), insulation covering (6), nut (8) are interconnected to constitute framework.
3, the well heater of electric thin material growth according to claim 1 is characterized in that being symmetrically arranged with on the said ring electrode (2,7) heating fluorescent tube mounting groove (10) more than 4 or 4.
4, the well heater of electric thin material growth according to claim 1 is characterized in that adopting between heating lamp pipe end and the electrode " L " type groove and screw in compression formula structure.
5, the well heater of electric thin material growth according to claim 1 is characterized in that said heating fluorescent tube (4) is a quartz-iodine lamp.
6, the well heater of electric thin material growth according to claim 1, the inner chamber that it is characterized in that said ring electrode is equipped with a transparent tube (13), transparent tube (13) is connected to form a vacuum chamber by sealing-ring (15) and ring flange (16), is heated workpiece (14) in the vacuum chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03114636 CN1202279C (en) | 2003-04-15 | 2003-04-15 | Heating device for electronic film material growth |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03114636 CN1202279C (en) | 2003-04-15 | 2003-04-15 | Heating device for electronic film material growth |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1443869A CN1443869A (en) | 2003-09-24 |
| CN1202279C true CN1202279C (en) | 2005-05-18 |
Family
ID=27814807
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 03114636 Expired - Fee Related CN1202279C (en) | 2003-04-15 | 2003-04-15 | Heating device for electronic film material growth |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1202279C (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104359748B (en) * | 2014-11-10 | 2017-03-01 | 河海大学 | A kind of small sample heater |
| CN106282914B (en) * | 2015-05-15 | 2019-11-29 | 北京北方华创微电子装备有限公司 | Heating chamber and semiconductor processing equipment |
-
2003
- 2003-04-15 CN CN 03114636 patent/CN1202279C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1443869A (en) | 2003-09-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: JIANGSU HUASHENG TIANLONG MACHINERY CO., LTD. Free format text: FORMER OWNER: XI'AN UNIVERSITY OF TECHNOLOGY Effective date: 20081107 |
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| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20081107 Address after: Changzhou, Jiangsu Province, Jintan City, 1 mother Road Patentee after: Jiangsu Huashengtianlong Mechanical Co., Ltd. Address before: No. 5 Jinhua South Road, Shaanxi, Xi'an Patentee before: Xi'an University of Technology |
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| C56 | Change in the name or address of the patentee |
Owner name: JIANGSU HUASHENG TIANLONG PHOTOELECTRICITY EQUIPME Free format text: FORMER NAME: JIANGSU HUASHENG TIANLONG MACHINERY CO., LTD. |
|
| CP01 | Change in the name or title of a patent holder |
Address after: Changzhou, Jiangsu Province, Jintan City, 1 mother Road Patentee after: Jiangsu Huasheng Tianlong Machinery Co., Ltd. Address before: Changzhou, Jiangsu Province, Jintan City, 1 mother Road Patentee before: Jiangsu Huashengtianlong Mechanical Co., Ltd. |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20050518 Termination date: 20170415 |
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| CF01 | Termination of patent right due to non-payment of annual fee |