CN2846440Y - Heater for continuous coating device - Google Patents
Heater for continuous coating device Download PDFInfo
- Publication number
- CN2846440Y CN2846440Y CN 200520106338 CN200520106338U CN2846440Y CN 2846440 Y CN2846440 Y CN 2846440Y CN 200520106338 CN200520106338 CN 200520106338 CN 200520106338 U CN200520106338 U CN 200520106338U CN 2846440 Y CN2846440 Y CN 2846440Y
- Authority
- CN
- China
- Prior art keywords
- continuous coating
- well heater
- coating apparatus
- utility
- model
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The utility model discloses a heater for continuous filming devices, which comprises a cavity enclosed by a periphery plate, the side surface of the utility model is provided with an axial through hole and a set of heating lamp tubes are arranged in the utility model. The inner front side, the inner rear side and the inner upper side of a long cavity are all provided with more than one layer of baffle plates. The lower side of each heating lamp tube is provided with a quartz baffle plate which can be drawn and pulled. A bracket is fixedly connected to the heater for fixing the outside. The utility model can be suitable for continuous filming heating in a continuous filming device.
Description
Technical field
The utility model relates to a kind of continuous coating apparatus well heater.
Background technology
Existing electric thin technology of preparing partly adopts magnetron sputtering, electron beam evaporation and thermal evaporation plated film, need implement heating to film-coating workpiece usually in coating process.In vacuum plating in the past, take the contact heating usually, its defective is: mobile example is difficult to realize, can not satisfies the heat request that adds of continuous coating.Utilize the mode of platinum wire, platinum sheet heating in addition in addition, but, should not use on a large scale because material is very expensive.
Summary of the invention
The purpose of this utility model provides the continuous coating apparatus well heater of a kind of heating efficiency height and dependable performance, and it is applicable to the continuous coating heating of continuous coating apparatus.
For achieving the above object, the utility model is taked following design: a kind of continuous coating apparatus well heater, and it comprises:
The one long cavity that is surrounded by peripheral board, downside is opened axial port, built-in one group of heating fluorescent tube.The intravital forward and backward and upside in long chamber is equipped with the above thermal baffle of one deck.
But establish the quartz baffle of a pull at heating fluorescent tube downside.
Affixed one is used for and extraneous fixed support on well heater.
The utility model has the advantages that: adopt the Infrared Heating mode, temperature rise rate is fast, the significant temp height, and heating-surface area is big, and good uniformity helps continuous coating technology, helps the quick growth of multilayer film.
Description of drawings
Fig. 1 is the utility model structural representation.
Embodiment
As shown in Figure 1, the utility model continuous coating apparatus with well heater comprise one by forward and backward, go up the long cavity 1 that peripheral board 7 and two ends riser 3 surround, downside is opened axial port, built-in one group is heated fluorescent tube 2.
Described one group of heating fluorescent tube 2 can be 1 or many according to the needs of heating power.
Riser 3 places at long cavity two ends are provided with wiring end plate 4, for being connected of heating fluorescent tube and power switch.
The intravital forward and backward and upside in long chamber is equipped with the above baffle plate 8 of one deck.
But establish the quartz baffle 5 of a pull at heating fluorescent tube downside, its effect is to prevent to be polluted by lamp tunicle in the coating process, and is convenient for changing.
Affixed one is used for and extraneous fixed support 6 on the metazonite of well heater.
Described heating fluorescent tube is good to adopt halogen lamp tube.
Be subjected to thermal effect preferably for obtaining, the utility model well heater places vacuum plating indoor, and be located at the plated film base band top of advancing, make the base band of advancing just in time pass through along the port that the well heater downside axially leaves, because the effect that well heater is forward and backward and go up side shield, the uniform downward radiation of the heat energy (almost being whole) that halogen lamp tube is sent, can be heated to the highest 900 ℃ to base band, and heated length can be grown (being close to cavity length in the long cavity), on certain-length temperature homogeneity can reach ± 2 ℃, effectively guaranteed the homogeneity of continuous coating.
Claims (6)
1, a kind of continuous coating apparatus well heater is characterized in that it comprises:
The one long cavity that is surrounded by peripheral board, downside is opened axial port, built-in one group of heating fluorescent tube.
2, continuous coating apparatus well heater according to claim 1 is characterized in that: the intravital forward and backward and upside in long chamber is equipped with the above thermal baffle of one deck.
3, continuous coating apparatus well heater according to claim 1 is characterized in that: but heating the quartz baffle that the fluorescent tube side is provided with pull.
4, continuous coating apparatus well heater according to claim 1 is characterized in that: be used for and extraneous fixed support at well heater affixed.
5, continuous coating apparatus well heater according to claim 1 is characterized in that: described heating fluorescent tube is a halogen lamp tube.
6, continuous coating apparatus well heater according to claim 1 is characterized in that: described heating fluorescent tube is one or more.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520106338 CN2846440Y (en) | 2005-08-25 | 2005-08-25 | Heater for continuous coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520106338 CN2846440Y (en) | 2005-08-25 | 2005-08-25 | Heater for continuous coating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2846440Y true CN2846440Y (en) | 2006-12-13 |
Family
ID=37511860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200520106338 Expired - Lifetime CN2846440Y (en) | 2005-08-25 | 2005-08-25 | Heater for continuous coating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2846440Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103901070A (en) * | 2014-04-08 | 2014-07-02 | 山东省纺织科学研究院 | Radiation heat source device for testing radiant heat penetration resistance |
| CN108456873A (en) * | 2017-02-22 | 2018-08-28 | 北京北方华创微电子装备有限公司 | A kind of lower electrode arrangement and processing chamber |
-
2005
- 2005-08-25 CN CN 200520106338 patent/CN2846440Y/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103901070A (en) * | 2014-04-08 | 2014-07-02 | 山东省纺织科学研究院 | Radiation heat source device for testing radiant heat penetration resistance |
| CN103901070B (en) * | 2014-04-08 | 2015-11-11 | 山东省纺织科学研究院 | The radiation heat device of penetrating quality of anti radiant heat performance test |
| CN108456873A (en) * | 2017-02-22 | 2018-08-28 | 北京北方华创微电子装备有限公司 | A kind of lower electrode arrangement and processing chamber |
| CN108456873B (en) * | 2017-02-22 | 2020-04-28 | 北京北方华创微电子装备有限公司 | Lower electrode structure and process chamber |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Expiration termination date: 20150825 Granted publication date: 20061213 |
|
| EXPY | Termination of patent right or utility model |