CN1197992C - Deivce for preventing condensation of plasma eraporating and plating equipment - Google Patents
Deivce for preventing condensation of plasma eraporating and plating equipment Download PDFInfo
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- CN1197992C CN1197992C CN 02125790 CN02125790A CN1197992C CN 1197992 C CN1197992 C CN 1197992C CN 02125790 CN02125790 CN 02125790 CN 02125790 A CN02125790 A CN 02125790A CN 1197992 C CN1197992 C CN 1197992C
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Abstract
The present invention discloses a device of plasma evaporation plating equipment, which is used for preventing condensation, which relates to the invention of an aspect of plasma evaporation plating equipment. A structure of the present invention comprises a plasma evaporation plating work room, a winding machine for driving materials, a cooling machine connected with a cooling jacket, a storage container loading liquid state corrosion proof raw materials and gas injection pipe, wherein after heat exchange is carried out, the cooling jacket of the work room is connected with a heater, and the heater is connected with pipes enclosing the external side of the periphery of the gas injection pipe. Because high-temperature external side pipes are wrapped at the periphery of the gas injection pipe, the gas injection pipe can be heated, and the present invention can prevent hexamethyl disiloxane HMDSO conveyed towards the inner part of the work room by the gas injection pipe from being concentrated; after the heat exchange is carried out, mild water of the cooling jacket of the work room is heated in the heater, and thus, the present invention has the advantages of short water heating time, energy saving and low cost; the present invention guarantees the uniformity of evaporation plating thickness.
Description
Technical field
What the present invention relates to is the invention of plasma body evaporated device aspect, particularly be the invention that prevents the condensing device of gas injection tube aspect in the plasma body evaporated device.
Background technology
Usually the cabinet inside at air-conditioner outdoor unit has heat exchanger, and this heat exchanger is made up of the bracing frame of stainless steel and the radiator element and the copper pipe of aluminium material.Because the heat exchanger operated by rotary motion of air-conditioner outdoor unit out of doors, often contacts with wind facies with rainwater, therefore, not only require heat-exchange capacity strong to the heat exchanger of air-conditioner outdoor unit, also need the requirement of certain corrosion resistance nature.Though the material of radiator element is selected material preferably, i.e. processing easily, corrosion-resistant good with heat-exchange capacity, but because the coastland high temperature in South-West Asia or South East Asia wets more and salt is big, so the radiator element of the heat exchanger of air-conditioner outdoor unit still corrodes easily.
In order to adapt to above-mentioned harsh climate condition, for the air-conditioner outdoor unit that is provided with in above-mentioned area, the processing using plasma evaporation coating method to the radiator element of heat exchanger is plated in the insulating corrosion-resisting film on the radiator element of heat exchanger.At present very active to the research of this technology.
Utilizing plasma body to form in the method for corrosion-resisting film, the most representative is with hexamethyldisiloxane MDSO (Hexamethylidisiloxane, (CH3) 3SiOSi (CH3) 3) utilize the carrying gas delivery in workplace, form the corrosion-resisting film of insulativity, but carry hexamethyldisiloxane HMDSO at normal temperatures in workplace, hexamethyldisiloxane HMDSO can be condensing, causes this technology normally not carry out.
Summary of the invention
The objective of the invention is to overcome the deficiency of above-mentioned technology, a kind of plasma body evaporating-plating equipment that utilizes is provided, the heated water coolant that will circulate wraps in outside the gas injection tube after being input to heater heats, prevents the condensing device of hexamethyldisiloxane HMDSO in the gas injection tube.
The present invention solves the problems of the technologies described above the technical scheme that is adopted: a kind of deivce for preventing condensation of plasma eraporating and plating equipment, its structure comprises that inside is equipped with the plasma body evaporation workplace of electrode, the up-coiler that the workplace both sides have the driving strip material to move, the workplace upside has the cooler that is connected with the workplace cooling jacket, the downside of workplace has its inside that liquid corrosion-resistant raw material tank is housed, be connected with gas injection tube between workplace and the tank, workplace cooling jacket after heat exchange connects a well heater, and well heater is connected with the outboard tube that is enclosed in the gas injection tube periphery.
The invention has the beneficial effects as follows: water coolant of the present invention is after cooling jacket is to the workplace cooling, the warm water that is heated to form certain temperature enters heater heats again, this warm water heater via further is transported to the inside that surrounds the gas injection tube outboard tube after the heating, and gas injection tube is heated.Owing to wrapping the pyritous outboard tube in the gas injection tube periphery, guarantee the high temperature in the gas injection tube, can prevent that the homogeneity of evaporation thickness is guaranteed by gas injection tube condensing to the hexamethyldisiloxane HMDSO of workplace delivered inside.The time of water heating is short, saves the energy, reduces cost.
Description of drawings
Fig. 1 is that plasma body evaporating-plating equipment of the present invention prevents gas injection tube condensing works structural representation;
Fig. 2 points out out A-A ' sectional view among Fig. 1.
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are described in further detail:
The present invention is a kind of deivce for preventing condensation of plasma eraporating and plating equipment, its structure comprises that inside is equipped with the plasma body evaporation workplace 101 of electrode, the up-coiler 105 and 107 that workplace 101 both sides have the driving strip material to move, the workplace upside has the cooler 115 that is connected with workplace cooling jacket 114, the downside of workplace has its inside that liquid corrosion-resistant raw material tank 111 is housed, be connected with gas injection tube 112 between workplace 101 and the tank 111, workplace cooling jacket 114 after heat exchange connects a well heater 117, and well heater 117 is connected with the outboard tube 118 that is enclosed in gas injection tube 112 peripheries.
Be connected on the cooler 115 through the outboard tube after the heat exchange 118.
As shown in the figure, the upside of box-type plasma body evaporation workplace 101 inside is fixed with upper electrode 102, and the downside of this upper electrode 102 is fixed with lower electrode 103.
Be provided with between coiling 106 at the front end of workplace 101, up-coiler 105 be housed in 106 between reeling, up-coiler 105 is to workplace 101 inner supply strip material 104.Be provided with between coiling 108 in the rear end of workplace 101, between reeling, up-coiler 107 be housed, the strip material 104 that up-coiler 107 is reeled and come out from workplace 101 in 108.Between coiling 105 export department and reel between 108 inlet portion be provided with a pair of pedestal fairload 109 that guiding strip material 104 moves.
In addition, on one side be provided with tank 111 in the bottom of workplace 101, storage hexamethyldisiloxane MDSO (Hexamethylidisiloxane, (CH3) 3SiOSi (CH3) 3) 110 in the tank 111.Tank 111 is attached at by gas injection tube 112 and workplace 101.In addition, tank 111 also is attached on the gaseous storage container (not expressing in the drawing), and the above-mentioned gas tank is used for storage carrying gas, and above-mentioned carrying gas can make above-mentioned storage hexamethyldisiloxane HMDSO110 foaming.
Above-mentioned carrying gas generally adopts argon gas, oxygen, the nonreactive gas of nitrogen etc. arrives in the above-mentioned tank 111 in the carrying gas delivery, after the hexamethyldisiloxane HMDSO110 that is stored at tank 111 inside foamed, just be fed in the workplace 101.
The periphery of above-mentioned workplace 101 is provided with cooling jacket 114, and the water coolant in order to by carrying to the cooler 115 that is arranged on workplace 101 tops makes above-mentioned workplace 101 inner sustain certain temperatures.
In addition, the downside of above-mentioned workplace 101 is provided with well heater 117, and well heater 117 is attached on the cooling jacket 114 by recovery tube 116.So the warm water of spending in 114 pairs of above-mentioned workplaces 101 cooled Celsius approximately 30 of above-mentioned cooling jacket to 50 degree can be recovered to well heater 117 and heat.Surround the outboard tube 118 that supplying high temperature water is used in the outside of above-mentioned gas injection tube 112, the outboard tube 118 that supplying high temperature water is used is attached on the well heater 117 by connecting piece 119 and carries high-temperature water, above-mentioned gas injection tube 112 is heated, make it keep certain temperature.
In addition supplying high temperature water with outboard tube 118 by being attached on the cooler 115, so the above-mentioned supplying high temperature water of flowing through comes back on the cooler 115 after with the high-temperature water of outboard tube 118 gas injection tube 112 being heated at supply pipe 120.
Do not express in the drawing to the direct current power supply mechanism of upper electrode 102 and lower electrode 103 supplying DC power sources and the motor of rotation up-coiler 105 and up-coiler 107.
Below working process of the present invention is elaborated:
Connect power supply, then up-coiler 105 is to rotation counterclockwise, up-coiler 107 makes the strip material 104 that is wound on the above-mentioned up-coiler 105 through being arranged between the upper electrode 102 and lower electrode 103 in the workplace 101 to the clockwise direction rotation, and continuous reeling is on above-mentioned up-coiler 107.
Open the valve of gaseous storage container (not expressing in the drawing), then carry gas and carry to above-mentioned tank 111.Carrying gas is foamed the hexamethyldisiloxane HMDSO110 in the tank 111, and the hexamethyldisiloxane HMDSO110 that is foamed is to the interior conveying of workplace 101.
Be transported to the inside of workplace 101 as HMDSO110 after, direct current power supply mechanism then produces plasma body between upper electrode 102 and the lower electrode 103 to upper electrode 102 and lower electrode 103 supplying DC power sources.By plasma body, excite the gas of workplace on the surface of the strip material of transferring continuously 104, to carry out evaporation.
In addition, the machine 115 refrigerative water that are cooled are transported to cooling jacket 114, the above-mentioned workplace 101 of carrying out the evaporation operation are cooled off, so certain temperature can be kept in workplace 101 inside.
Being transported to water coolant after the above-mentioned workplace 101 of above-mentioned cooling jacket 114 coolings will become Celsius approximately 30 and spend the warm water of spending to 50; Warm water is transported to well heater 117 by recovery tube 116, and warm water is heated and becomes high-temperature water; High-temperature water be transported to by connecting piece 119 outboard tube 118 of surrounding gas injection tube 112 peripheries in, gas injection tube 112 is heated, so can prevent by above-mentioned gas injection tube 112 condensing to the HMDSO110 of above-mentioned workplace 101 delivered inside.
In addition, the above-mentioned supplying high temperature water of flowing through has heated after the above-mentioned gas injection tube 112 with the warm water of outboard tube 118 inside, comes back to above-mentioned cooler 115 by supply pipe 120 again and cools off, and becomes water coolant and re-uses.
Claims (2)
1. deivce for preventing condensation of plasma eraporating and plating equipment, its structure comprises that inside is equipped with the plasma body evaporation workplace (101) of electrode, up-coiler (105) and (107) that workplace (101) both sides have the driving strip material to move, the workplace upside has the cooler (115) that is connected with workplace cooling jacket (114), the downside of workplace has its inside that liquid corrosion-resistant raw material tank (111) is housed, be connected with gas injection tube (112) between workplace (101) and the tank (111), it is characterized in that the workplace cooling jacket (114) after heat exchange connects a well heater (117), well heater (117) is connected with the outboard tube (118) that is enclosed in gas injection tube (112) periphery.
2. according to the device in the claim 1, it is characterized in that being connected on the cooler (115) through the outboard tube after the heat exchange (118).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02125790 CN1197992C (en) | 2002-08-19 | 2002-08-19 | Deivce for preventing condensation of plasma eraporating and plating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02125790 CN1197992C (en) | 2002-08-19 | 2002-08-19 | Deivce for preventing condensation of plasma eraporating and plating equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1475598A CN1475598A (en) | 2004-02-18 |
| CN1197992C true CN1197992C (en) | 2005-04-20 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 02125790 Expired - Fee Related CN1197992C (en) | 2002-08-19 | 2002-08-19 | Deivce for preventing condensation of plasma eraporating and plating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1197992C (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8741062B2 (en) | 2008-04-22 | 2014-06-03 | Picosun Oy | Apparatus and methods for deposition reactors |
| US10595365B2 (en) | 2010-10-19 | 2020-03-17 | Applied Materials, Inc. | Chamber lid heater ring assembly |
-
2002
- 2002-08-19 CN CN 02125790 patent/CN1197992C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1475598A (en) | 2004-02-18 |
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| C14 | Grant of patent or utility model | ||
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| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20050420 |