CN118328903A - Photoelectric laser optical axis azimuth and height synchronous measurement device and method - Google Patents
Photoelectric laser optical axis azimuth and height synchronous measurement device and method Download PDFInfo
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Abstract
The invention relates to a photoelectric type laser optical axis azimuth angle and height synchronous measuring device, which comprises a mechanical module, a photoelectric module and a circuit, wherein the mechanical module is connected with the photoelectric module; wherein the mechanical module comprises a base, a guide rail and a frame; the photoelectric module comprises a light splitting element, a first light spot position sensor, a second light spot position sensor and a position sensor; the beam splitting element, the first light spot position sensor and the second light spot position sensor are arranged on the frame; the position sensor is arranged on the stator and the rotor of the guide rail. According to the invention, a double-facula position sensor and displacement sensor structure is utilized to digitize the adjustment process of the azimuth angle and the height of the laser optical axis, and the high-precision measurement data is utilized to improve the adjustment speed and the adjustment efficiency; meanwhile, the device integrates the vertical guide rail, so that different requirements of different system installation and adjustment processes, such as optical axis height, multi-optical axis vertical spacing and the like, can be met.
Description
Technical Field
The invention belongs to the technical field of space optical axis measurement, and particularly relates to a photoelectric type laser optical axis azimuth angle and height synchronous measurement device and method.
Background
The precise adjustment of the laser optical axis is a key step in the establishment of optical experiments and the adjustment of optical instruments. Taking a michelson laser interferometer as an example, both the position mismatch (with parallel but some distance between the axes) and the angular mismatch (with included angle between the axes) between the reference and measurement axes affect the interference signal strength. Therefore, the reference optical axis and the measuring optical axis need to be adjusted to coincide as much as possible, and the optimal experimental result can be obtained. At present, the experimental adjustment often adopts a passive target and visual judgment method, such as a magnetic collimation ruler, a fixed-height diaphragm, a fluorescent plate, a paperboard and the like, and has the problems of low precision, low efficiency, easiness in causing eye fatigue of operators and difficulty in completing the long-light path adjustment by one person.
The common optical axis azimuth detection is mainly based on a projection target plate target center calibration method or a collimator method. The method is generally a qualitative method, namely, a target plate is placed at a certain distance of a detected system, so that a light beam emitted by a detected optical axis is projected onto the projected target plate to form bright spots, then the target plate is moved along the optical axis direction, the distance between the bright spots before and after the movement is compared, the smaller the distance is, the better the optical axis parallelism is, and if the target plate is provided with a scale, the azimuth angle of the optical axis can be obtained by visual measurement; the method has low cost and simple structure, but is greatly influenced by subjective factors, the measurement accuracy is not high, and visual measurement can cause visual fatigue of operators to cause coarse errors.
The collimator method is generally a quantitative method, which is to adjust a large-caliber collimator to be coaxial with an optical axis to be measured, so that an emitted parallel beam passes through an optical system to be measured and then is imaged on a receiving screen or a photoelectric receiving device, and an azimuth angle of the optical axis is calculated through received image deviation. The method can realize extremely high azimuth angle measurement precision by utilizing the amplification effect of the flat light pipe, but also has the problems of complex system and high machining and adjusting precision.
Unlike the above schemes, another more common method is dual PSD measurement. The method is to calculate the azimuth angle of the optical axis by using the space geometrical relationship between two light spot positions measured by PSD in different planes and the PSD distance. The method can provide high-precision measurement data and realize digital measurement of the azimuth angle of the laser optical axis. In many precise optical experiment/optical-mechanical system adjustment occasions, adjustment needs to be performed on multiple optical axes, and the optical axes are often not required to have a definite spatial position relationship in the same horizontal plane even in the numerical direction. The above solution does not provide an absolute height of the optical axes (relative to the horizontal table reference) and a relative vertical distance between the optical axes, and is limited in application.
Disclosure of Invention
The invention aims to solve the problems and provide a photoelectric type laser optical axis azimuth and height synchronous measuring device which provides the effects of increasing the system adjustment efficiency, wherein the optical axis azimuth angle and the parallel optical axis are higher than the table top.
The invention relates to a photoelectric type laser optical axis azimuth angle and height synchronous measuring device, which comprises a mechanical module 1, a photoelectric module 2 and a circuit 3; wherein,
The machine module 1 comprises a base 11, a guide rail 12 and a frame 13;
the photoelectric module 2 includes a spectroscopic element 21, a first light spot position sensor 22a, a second light spot position sensor 22b, and a position sensor 23;
The spectroscopic element 21, the first spot position sensor 22a, the second spot position sensor 22b are mounted on the frame 13; the position sensor 23 is mounted on the stator and mover of the guide rail 12.
Further, the spectroscopic element 21 is a general spectroscopic prism, a polarization spectroscopic prism, a depolarization spectroscopic prism, or a pentaprism.
Further, the first spot position sensor 22a and the second spot position sensor 22b are sensitive detectors PSD, four-quadrant detectors QPD, image sensors, or photodiode arrays.
Further, the first spot position sensor 22a and the second spot position sensor 22b also contain circuitry associated with the sensitive element and optical path elements.
Further, the first spot position sensors 22a and 22b may be the same or different sensors.
Further, the device comprises a horizontal angle sensor 24 placed on the frame 13.
Further, the circuit 3 is connected to the first spot position sensor 22a and the second spot position sensor 22b by wireless or wired means.
The invention also relates to a method for utilizing the photoelectric laser optical axis azimuth and height synchronous measuring device, which comprises the following steps:
The laser to be measured enters a measuring range through the guide rail 12, the laser to be measured is firstly divided into two parts by the light splitting element 21 and respectively enters the light spot position sensors 22a and 22b, the position sensors 22a and 22b output electric signals according to the light spot positions, and the optical axis azimuth angle is calculated by the circuit 3; the position height of the frame 13 relative to the table top is obtained by a position sensor 23, the measurement signal of the position sensor 23 is transmitted to the circuit 3 for processing, the calculation is carried out with the data of the light spot position sensor 22a and/or the light spot position sensor 22b, and the position sensor 23 outputs the height value of the parallel optical axis from the table top at the moment.
Further, after laser is emitted, the laser strikes a position (x, y) away from the center of the spot position sensor, and four paths of output electrodes of the single spot position sensor generate a current signal I x1、Ix2、Iy1、Iy2 related to the spot position;
The location of the spot center is as follows:
Wherein L x、Ly is the side length of the PSD photosensitive surface in two directions, and K is the proportionality coefficient related to the PSD load resistance; in the double PSD system, the light spot positions (x 1,y1)、(x2,y2) respectively obtained by the two PSDs are further deduced and obtained according to the geometric relationship to obtain the optical axis attitude;
The height of the intersection point of the optical axis and the two detected surfaces can be obtained by the positions y1 and y2 of the light spots relative to the center of the sensor and the height of the light spot sensor relative to the table surface obtained by the position sensor 23.
Advantageous effects
According to the invention, a double-facula position sensor and displacement sensor structure is utilized to digitize the adjustment process of the azimuth angle and the height of the laser optical axis, and the high-precision measurement data is utilized to improve the adjustment speed and the adjustment efficiency; meanwhile, the device integrates the vertical guide rail, so that different requirements of different system installation and adjustment processes, such as optical axis height, multi-optical axis vertical spacing and the like, can be met.
Drawings
FIG. 1 is a schematic diagram of the connection relationship of the components of the present invention.
Fig. 2 is a schematic structural diagram of a synchronous measuring device for azimuth and altitude of an optical axis of a photoelectric laser according to the present invention.
The reference numerals in the figures illustrate: the laser spot measuring device comprises a mechanical module 1, a base 11, a guide rail 12, a frame 13, a photoelectric module 2, a beam splitting element 21, a first light spot position sensor 22a, a second light spot position sensor 22b, a position sensor 23, a sensing module 230, a tape 231, a horizontal angle sensor 24 and a circuit 3.
Detailed Description
The present embodiment will be specifically described with reference to fig. 1 to 2.
The invention relates to a photoelectric type laser optical axis azimuth angle and height synchronous measuring device, which comprises a mechanical module 1, a photoelectric module 2 and a circuit module 3.
Wherein the machine module 1 comprises a base 11, a guide rail 12 and a frame 13.
The optoelectronic module 2 includes a spectroscopic element 21, a first spot position sensor 22a, a second spot position sensor 22b, and a position sensor 23.
The spectroscopic element 21 may be a general spectroscopic prism, a polarizing spectroscopic prism or a depolarizing spectroscopic prism, a pentaprism.
The first spot position sensor 22a and the second spot position sensor 22b may be a sensitive detector PSD, a four-quadrant detector QPD, an image sensor (CCD or CMOS), or a photodiode array.
The first spot position sensor 22a and the second spot position sensor 22b refer not only to the sensitive element itself, but also include circuitry associated with the sensitive element as well as optical path elements. The first spot position sensor 22a and the second spot position sensor 22b may be the same or different sensors.
The position sensor 23 includes a sensing module 230 and a blade 231.
The circuit 3 and each photosensor can be connected in a wireless or wired manner. The circuit 3 can be in communication with an upper computer through wires or wireless, and can also be added with a direct display digital display device.
The connection relationship between each part of the components and the object to be measured is shown in fig. 1.
The spectroscopic element 21, the first spot position sensor 22a, the second spot position sensor 22b are mounted on the frame 13; the position sensor 23 is mounted on the stator and mover of the guide rail 12. After the laser to be measured enters the measuring range of the device according to the invention through the guide rail 12, the laser to be measured is firstly divided into two parts by the light splitting element 21 and respectively enters the first light spot position sensor 22a and the second light spot position sensor 22b, the first position sensor 22a and the second light spot position sensor 22b output electric signals according to the light spot positions, and the optical axis azimuth angle is calculated by the circuit 3; the position height of the frame 13 relative to the table top is obtained by a position sensor 23, and a measurement signal of the position sensor 23 is transmitted to the circuit 3 for processing, and is calculated with the data of the first light spot position sensor 22a and/or the second light spot position sensor 22b to obtain a parallel light wheelbase table top height value.
Example 1
In this embodiment, the method for synchronously measuring the azimuth angle and the altitude of the optical axis of the photoelectric laser is as follows:
The laser to be measured enters the measuring range of the device, is split into two beams by the beam splitting element 21, and respectively enters the first light spot position sensor 22a and the second light spot position sensor 22b to serve as horizontal zero points of the device. The first spot position sensor 22a and the second spot position sensor 22b each employ a two-dimensional Position Sensor (PSD). In the measuring process, firstly, the guide rail is adjusted to enable the laser to be measured to enter the measuring range of the device, and the position sensor 23 outputs the height value of the parallel optical axis from the table top at the moment. The laser light is emitted at a certain angle, and when striking at the center (x, y) of the spot position sensor, four output electrodes of the single spot position sensor generate a current signal I x1、Ix2、Iy1、Iy2 related to the spot position.
The position of the center of the light spot is deduced by the PSD positioning principle as follows: Where L x、Ly is the length of the PSD photosensitive surface in two directions, and K is the proportionality coefficient related to the PSD load resistance. In the dual PSD system, the light spot positions (x 1,y1)、(x2,y2) respectively obtained by the two PSDs can be further deduced according to the geometric relationship to obtain the optical axis attitude.
The height of the intersection point of the optical axis and the two detected surfaces can be obtained by the positions y1 and y2 of the light spots relative to the center of the sensor and the height of the light spot sensor relative to the table surface obtained by the position sensor 23.
Example 2
The present embodiment is provided with a horizontal angle sensor 24 on the frame 13 on the basis of embodiment 1. The horizontal angle sensor can measure the horizontal angle of the whole device, which is influenced by the flatness of the tabletop, and the horizontal angle sensor can compensate in the circuit 3.
The double-light-spot position sensor and the displacement sensor realize that the optical axis provides an optical axis space angle by the double-light-spot position sensor, the displacement sensor measures the height of the light-spot position sensor, and the height of the light spot in space is calculated by the multi-sensor measured value.
The vertical guide rail provided by the invention realizes the height adjustment of the whole device in the vertical direction by utilizing the adjustable sliding guide rail.
The foregoing is merely illustrative of the present invention and is not intended to limit the embodiments of the present invention, and those skilled in the art can easily make corresponding variations or modifications according to the main concept and spirit of the present invention, so that the protection scope of the present invention shall be defined by the claims.
Claims (9)
1. The photoelectric type laser optical axis azimuth and height synchronous measuring device is characterized by comprising a mechanical module (1), a photoelectric module (2) and a circuit (3); wherein,
The mechanical module (1) comprises a base (11), a guide rail (12) and a frame (13);
The photoelectric module (2) comprises a light splitting element (21), a first light spot position sensor (22 a), a second light spot position sensor (22 b) and a position sensor (23);
The beam-splitting element (21), the first light spot position sensor (22 a) and the second light spot position sensor (22 b) are arranged on the frame (13); the position sensor (23) is mounted on the stator and mover of the guide rail (12).
2. The photoelectric type laser optical axis azimuth and height synchronous measuring device according to claim 1, wherein the beam splitting element (21) is a common beam splitting prism, a polarization beam splitting prism, a depolarizing beam splitting prism or a pentaprism.
3. The optoelectronic laser optical axis azimuth and altitude synchronous measurement device according to claim 1, wherein the first spot position sensor (22 a) and the second spot position sensor (22 b) are sensitive detectors PSD, four-quadrant detectors QPD, image sensors, or photodiode arrays.
4. The optoelectronic laser optical axis azimuth and altitude synchronization measurement device of claim 1, wherein the first spot position sensor (22 a) and the second spot position sensor (22 b) further comprise circuitry associated with the sensing element and an optical path element.
5. The device according to claim 1, wherein the first spot position sensor (22 a) and the second spot position sensor (22 b) may be the same or different sensors.
6. Optoelectronic laser optical axis azimuth and altitude synchronous measuring device according to claim 1, characterized in that the frame (13) is placed with a horizontal angle sensor (24).
7. The method for simultaneous measurement of azimuth and altitude of an optical axis of a photoelectric laser according to claim 1, wherein the circuit (3) is connected to the first spot position sensor (22 a) and the second spot position sensor (22 b) in a wireless or wired manner.
8. A method of using the electro-optical laser optical axis azimuth and altitude synchronization measurement device according to any one of claims 1 to 7, comprising the steps of:
The laser to be measured enters a measuring range through the guide rail 12, the laser to be measured is divided into two parts after passing through the light splitting element (21), the two parts are respectively incident into the first light spot position sensor (22 a) and the second light spot position sensor (22 b), the position sensors (22 a) and the second light spot position sensor (22 b) output electric signals according to the light spot positions, and the optical axis azimuth angle is calculated by the circuit (3); the position height of the frame (13) relative to the table top is obtained by a position sensor (23), a measuring signal of the position sensor (23) is transmitted to a circuit (3) for processing, the measuring signal is calculated by data of a first light spot position sensor (22 a) and/or a second light spot position sensor (22 b), and the position sensor (23) outputs a height value of a parallel optical axis from the table top at the moment.
9. The method for synchronously measuring the azimuth angle and the height of the optical axis of the photoelectric laser according to claim 8, wherein the laser is shot at the center (x, y) of the spot position sensor after being emitted, and four output electrodes of the single spot position sensor generate a current signal I x1、Ix2、Iy1、Iy2 related to the position of the spot;
The location of the spot center is as follows:
Wherein L x、Ly is the side length of the PSD photosensitive surface in two directions, and K is the proportionality coefficient related to the PSD load resistance; in the double PSD system, the light spot positions (x 1,y1)、(x2,y2) respectively obtained by the two PSDs are further deduced and obtained according to the geometric relationship to obtain the optical axis attitude;
The height of the intersection point of the optical axis and the two detected surfaces can be obtained by the positions y1 and y2 of the light spots relative to the center of the sensor and the height of the light spot sensor relative to the table surface obtained by the position sensor 23.
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