CN104765160B - A kind of light beam bearing calibration system and calibration method - Google Patents
A kind of light beam bearing calibration system and calibration method Download PDFInfo
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Abstract
The invention discloses a kind of light beam bearing calibration system, including the first optical frames, the second optical frames, the 3rd optical frames, the 4th optical frames and wedge, light beam is successively by after the reflection of the first optical frames and the second optical frames, pass through from above or below the 4th optical frames, and wedge is incident upon from the 3rd optical frames below or above after being reflected via the 3rd optical frames and the 4th optical frames, two reflecting surfaces of the wedge favour incident beam direction；Including two optical pickup apparatus, for receiving through the light beam after two reflecting surfaces reflection of wedge；Second optical frames and the 4th optical frames are adjustable optical mirror.The invention also discloses the calibration method of above-mentioned calibration system.Light beam alignment system of the invention and calibration method have the automatic real time calibration function in light beam orientation, can be used as the front-end system of various laser accurate application systems.The state of normal work light path is able to record that using the system, realizes that quick accurate light path is recovered.
Description
Technical field
The invention belongs to field of photoelectric technology, and in particular to the bearing calibration system and its calibration method of a kind of light beam.
Background technology
In laser technology application field, such as FSO, accurate laser measurement, Laser Biomedicine application neck
In domain, there is requirement higher in direction, azimuth stabilization to laser beam.
For accurate laser application, because there is optical element in temperature deformation, transmission path in laser resonant cavity
The influence of unstability and various environmental perturbation factors, laser beam occurs micro azimuth deviation all the time, including angle is inclined
Move and parallel offset.When side-play amount is larger, the job stability of follow-up system can be had a strong impact on.
Additionally, usually need to recover the light path of optical system again in the working environment for changing in real work, it is right
For Large optical system, accurate light path is resumed work and take time and effort very much.
How effectively optical system easily, fast and accurately to be calibrated, be always laser technology application field or
The emphasis and focus of ray machine electro-technical field research.It is precisely and convenient past in the technical scheme of existing light beam bearing calibration
Toward can not have both simultaneously, although complicated optical system is precisely, generally can not accomplish quickly and easily to carry out the calibration of light path
Or recover, and general cost is high；Although simple optical system account for the latter, but often not enough precisely, existing side
Case constrains application of the laser in desired field is pointed to precision significantly.
The content of the invention
Present invention aim at solving the above problems, there is provided a kind of new Light beam alignment system and calibration method.
For realize one of technical scheme that the purpose of the present invention is used for：A kind of light beam bearing calibration system, including the
One optical frames, the second optical frames, the 3rd optical frames, the 4th optical frames and wedge, light beam is successively by the first optical frames and second
After the reflection of optical frames, pass through from above or below the 4th optical frames, and after being reflected via the 3rd optical frames and the 4th optical frames
Wedge is incident upon from the 3rd optical frames below or above, two reflecting surfaces of the wedge favour incident beam direction；Including
Two optical pickup apparatus, are respectively used to receive the light beam after being reflected through two reflecting surfaces of wedge；Second optical frames is
Adjustable optical mirror, can do alternating translational, and can rotate in the horizontal plane along the direction of the light beam of incident second optical frames；Described
Four optical frames are adjustable optical mirror, can do alternating translational along the direction of the light beam of the optical frames of outgoing the 4th, and can be in perpendicular
Interior rotation.
For " orientation " of the present invention calibration, its meaning is, it is assumed that transmitted light need to be entered by diaphragm D1, D2 and finally
Enter follow-up work system, straight line determined by diaphragm D1, D2 is that we need the direction of the specific objective of correction, is different from
General geometric direction definition without status requirement in the prior art.
It is further improved, also including controller, the motion for controlling the second optical frames and the 4th optical frames respectively；The
Two optical frames and the 4th optical frames are respectively connected with rotary electric machine and electronic control translation stage, controller by drive rotary electric machine and
Electronic control translation stage controls the motion of the second speculum and the 4th speculum.
Further improved, controller is connected with two optical pickup apparatus, and optical pickup apparatus are used to monitor wedge two instead
The spot center offset information of reflective surface institute the reflected beams is simultaneously transferred to controller, controller according to spot center offset information from
Dynamic regulation the second optical frames and the 4th optical frames, with the outgoing orientation of calibration beam.
Further improved, first, second, third, fourth optical frames is speculum, and other are similar to can change optics
The optics lens device of the direction of propagation also may be used.
It is further improved, described first and the 3rd optical frames to be fixedly installed.
It is further improved, light beam of the beam direction from the outgoing of this calibration system parallel to incident this calibration system
Direction.
Further improved, the optical pickup apparatus are light trap, face battle array photodetector, 4 quadrant detector or have
The display of optical signal receiving terminal.
Further improved, the optical pickup apparatus are light trap, face battle array photodetector or with optical signal receiving terminal
Display, such as CMOS cameras.Have on the optical pickup apparatus and be divided into 4 reception areas of quadrant of orthogonal coordinate system, its seat
Coordinate position centered on mark system origin position.Different optical pickup apparatus can be used for different calibration occasions.
Further improved, the second optical frames and the 3rd optical frames are located on same operation planar, the height of the 4th optical frames
Degree is less than second and the 3rd optical frames.
Further improved, the translation stage is high precision electric control translation stage；The rotary electric machine is high accuracy stepping electricity
Machine.
It is further improved, also including host computer, such as PC computers, host computer is connected with controller, logical for visualizing
News control, interface operation or auxiliary carry out light spot image denoising and side-play amount is calculated.
For realize the two of the technical scheme that the purpose of the present invention is used for：A kind of light beam bearing calibration method, including the
One optical frames, the second optical frames, the 3rd optical frames, the 4th optical frames, wedge, optical pickup apparatus and controller, the method include
Following steps：
A, the second optical frames, the 4th optical frames are manually adjusted first make light beam accurately by two diaphragms, now by light-receiving
The spot center position of the wedge reflected light of device detection is initial hot spot center；
B, by light beam successively by after the reflection of the first optical frames and the second optical frames, from above or below the 4th optical frames
By, and wedge, wedge two are incident upon from the 3rd optical frames below or above after being reflected via the 3rd optical frames and the 4th optical frames
The light beam that individual reflecting surface is reflected is received with optical pickup apparatus；
C, optical pickup apparatus real-time detection receive the offset information of the spot center of light beam, and offset information is transferred to
Controller；
D, controller control the second optical frames and the 4th optical frames to translate or rotate according to offset information, to change wedge
Two spot center deviation posts of reflecting surface institute the reflected beams；
The optical pickup apparatus have two, are respectively used in detection two hot spots of reflecting surface institute the reflected beams of wedge
The offset information of the heart, two optical pickup apparatus are different from wedge pip distance.
Further improved, the second optical frames of control and the 4th optical frames rotate, and make two each self-inspections of optical pickup apparatus
The offset information of survey is intended to identical, and reduces the side-play amount of the spot center；Control the second optical frames to translate, can change
Spot center deviation post in the horizontal direction；Control the 4th optical frames to translate, the spot center can be changed and existed
Deviation post on vertical direction.
Further improved, the optical pickup apparatus are face battle array photodetector, and controller is detected according to optical pickup apparatus
The hot spot light distribution information for arriving calculates the side-play amount size of the spot center, and automatically controls second according to side-play amount size
Optical frames and the 4th optical frames are with the outgoing orientation of calibration beam.
Further improved, the computational methods of the side-play amount size include one of following two computational methods or whole：
Computational methods one, fast locating algorithm：
Wherein, Δ x, Δ y are side-play amount of the spot center in X and Y coordinates, SⅠ、SⅡ、SⅢ、SⅣIt is respectively described
The area that spot center falls on four quadrants divided to detector photosurface, can respectively be carried out by force by four quadrants
Angle value summation is obtained；K is constant coefficient；
Computational methods two, Precision Orientation Algorithm：
Wherein,The coordinates of laser spot center being as calculated, I (xi,yi) for i-th on detector photosurface
The light intensity that pixel elements are obtained, xi、yiIt is the coordinate value of ith pixel unit；
When jointly include fast locating algorithm and Precision Orientation Algorithm when, two kinds of computational methods can free switching use.
It is further improved, in the Precision Orientation Algorithm before side-play amount is calculated, first optical pickup apparatus are detected
Light spot image information carry out denoising.
For realize the three of the technical scheme that the purpose of the present invention is used for：A kind of calibration side for above-mentioned calibration system
Method, comprises the following steps：
A, two optical pickup apparatus difference real-time monitoring two facula deviation information of reflecting surface institute the reflected beams of wedge,
Facula deviation information is calculated by spot center coordinate with initial center coordinate, using the facula deviation information and two
The optical path difference of optical pickup apparatus calculates light beam in level and the offset of vertical direction in real time；
B, the second optical frames of control and/or the 4th optical frames are rotated, and reduce the offset of the light beam；
C, circulation step a, b, make the offset constantly be decreased to minimum or less than error margin；
D, using the spot center coordinate and initial center coordinate, calculate in real time light beam in the horizontal direction laterally partially
Shifting amount and light beam vertical side-play amount in vertical direction；
E, the second optical frames of regulation and/or the translation of the 4th optical frames, reduce the transverse direction and vertical side-play amount of light beam；
F, circulation step d, e, make the horizontal and vertical side-play amount minimize or less than error margin.
The present invention has relative to the beneficial effect of prior art：
1st, the invention provides a kind of new light path calibration scheme, it is different from existing other beam directions correction or is aligned
(single target) technology, we are using the double targets calibration light path based on tilting mirror shifting method.
2nd, due to sensitive angular deflection amount is converted into insensitive translational movement, under the premise of equivalent device, regulation
Ratio of precision only will be significantly improved using the method for tilting mirror.So the system calibration light path is succinct, should for single target alignment
With that can accomplish accuracy very high, for azimuth deviation correction (double targets) application, shifting method can also make up general to a certain extent
The deficiency of logical rotary electric machine angular adjustment precision.
3rd, wedge is incorporated into the thinking of light beam alignment, for by originally determined light beam orientation, two light-receiving dresses
Put two spot center positions of reflecting surface institute reflected light of recorded wedge can uniquely reflected collimated light beam orientation (2 points determination
Straight line).If incident beam orientation shifts, also there is corresponding skew in the spot center on two detectors.
4th, the present invention has the automatic real time calibration function in light beam orientation, can be used as the preposition of various laser accurate application systems
System is used.The state of normal work light path is able to record that using the system, realizes that quick accurate light path is recovered.
5th, the present invention has various beam alignment correction algorithms, i.e. fast locating algorithm and Precision Orientation Algorithm, the former it is quick but
Precisely it is not so good as the latter, the latter is precisely but calibration speed is not so good as the former, according to different occasion demands switching can be facilitated to use.
Brief description of the drawings
Fig. 1 is that diagram is overlooked in a kind of structure connection of embodiment of light beam bearing calibration system of the present invention
Fig. 2 is the side view of optical frames mutual alignment relation in the embodiment of the present invention
Fig. 3 is a kind of exemplary graph picture of optical pickup apparatus institute light spot received in the embodiment of the present invention
Fig. 4 is another exemplary graph picture of optical pickup apparatus institute light spot received in the embodiment of the present invention
Specific embodiment
Specific embodiment of the invention is described further below in conjunction with the accompanying drawings：
Embodiment one：
A kind of light beam bearing calibration system of the present embodiment, including the first optical frames, the second optical frames, the 3rd optical frames,
4th optical frames and wedge, light beam successively by after the reflection of the first optical frames and the second optical frames, from the 4th optical frames top
Or lower section pass through, and via the 3rd optical frames and the 4th optical frames reflection after be incident upon wedge from the 3rd optical frames below or above,
Two reflecting surfaces of the wedge favour incident beam direction；Including two optical pickup apparatus, it is respectively used to receive through light
Light beam after two reflecting surfaces reflection of wedge；Second optical frames is adjustable optical mirror, can be along incident second optical frames
Alternating translational is done in the side of light beam, and can rotate in the horizontal plane；4th optical frames is adjustable optical mirror, can be along outgoing the
Alternating translational is done in the side of the light beam of four optical frames, and can be rotated in perpendicular.First, second, third, fourth light
Mirror is speculum, described first and the 3rd optical frames to be fixedly installed.The optical pickup apparatus are the receiving terminal of display, are shown
Show that the hot spot that device will be received is included on screen, have on screen and be divided into 4 quadrants of orthogonal coordinate system, its coordinate origin
Coordinate position centered on position.
The present embodiment is a kind of simple application scheme, by observing facula deviation situation of the hot spot on screen come manually
The translation or rotation of the second, the 4th optical frames are adjusted, makes the hot spot rehabilitation center coordinate position on screen, play the work of calibration
With.The present embodiment belongs to primary application, and can be used in follow-up improved embodiment scheme.
Embodiment two：
As depicted in figs. 1 and 2, a kind of light beam bearing calibration system of the present embodiment, the optical frames uses speculum, bag
The first speculum M1, the second speculum M2, the 3rd speculum M3, the 4th speculum M4 are included, using wedge W as beam splitter,
Described two optical pickup apparatus use two cmos detectors C1, C2, are respectively used to receive anti-through two reflecting surfaces of wedge
Light beam after penetrating.Attenuator F is selectively placed in the reflected light path of wedge W, to control the light intensity into detector C 1 and C2, is kept away
Exempt from reception saturation occur.
First speculum M1 and the 3rd speculum M3 is stationary mirror, and the second speculum M2, the 4th speculum M4 are can
Speculum is adjusted, wherein the second speculum M2 can rotate in X/Y plane, can be translated along Y-direction, the 4th speculum M4 can be flat in XZ
Face rotates, and can translate in X direction.D1, D2 are positioning diaphragm in figure.Also include controller 10 and computer 20.
Laser (Laser) enters system, successively by the first speculum M1, the second speculum M2, the 3rd speculum M3,
After the reflection of four speculum M4, incident wedge W, wherein most energy transmissive wedge W, fraction luminous energy is by two of wedge W
Reflective surface and by two the cmos detector C1, C2 of diverse location.
Transmitted light is by diaphragm D1, D2 and eventually enters into follow-up work system, and straight line determined by diaphragm D1, D2 is
We need the specific objective direction of correction, to be different from the general geometric direction definition without status requirement, referred to herein as light
Beam bearing calibration.
Before system works first, the second speculum M2, the 4th speculum M4 are manually adjusted first makes light beam accurately by two
Diaphragm, now by cmos detector C1, the spot center position of the wedge reflected light that C2 is recorded is initial hot spot center,
Now uniquely reflect the position (determine straight line) of diaphragm D1, D2 at 2 points.If incident beam orientation shifts, two visit
The spot center surveyed on device also accordingly shifts.
When system works, the light distribution information input measured in real time on cmos detector C1 and C2 is opened to based on single-chip microcomputer
The controller 10 of hair, controller 10 is by the reflections of spot center offset information real-time feedback control the second speculum M2 and the 4th
The deflection or translation of mirror M4, enable outgoing beam real-time automatic calibrating to recover former orientation.
In Fig. 1, when light beam accurately passes through diaphragm D1, D2, the spot center position of detector C 1, C2 record is reflection
Light beam orientation determined by D1, D2 (double targets).When light beam shifts, just can be fed back by the offset information of above-mentioned acquisition
Control adjustable mirror regulation light beam orientation, when the spot center on C1, C2 returns to the position of original records, light beam also just recovers
To the former orientation that D1, D2 determine.
It is different from and has seen the correction of open or report other beam directions or alignment (single target) technology, the present embodiment uses base
Light path is calibrated in double targets of tilting mirror shifting method.In Fig. 1 the second speculum M2 and the 4th speculum M4 all respectively by stepper motor and
Electronic control translation stage drives and (in other embodiments, can use such as device costly such as piezoelectric ceramics galvanometer and nanometer translation stage
Part, can obtain degree of regulation higher, but cost is of a relatively high), wherein the second speculum M2 to can be controlled in X/Y plane level inclined
Turn, and can be translated along beam direction (Y-direction)；4th speculum M4 then can be controlled in XZ plane vertical deflections, and can be along light beam
Direction (X-direction) translates.
, in about 90 degree of reflections, the 4th speculum M4 is than the second reflection for (Fig. 1) light beam and the second speculum M2 on X/Y plane
The position of mirror M2 and the 3rd speculum M3 is lower slightly, as shown in Figure 2.
The translation of the second speculum M2 can make light beam produce horizontal direction parallel displacement.On the other hand, (the figure on X/Y plane
1) light beam is basic along backtracking in the 4th speculum M4, therefore the translation of the 4th speculum M4 can only make light beam produce vertical direction
Translation.
The translation of the second speculum M2 correct light beam horizontal direction translational movement while, the translation of the 4th speculum M4
There is adjustment effect to the translational movement of vertical direction, level can be calibrated independently with the translational movement of vertical both direction, therefore
Precise calibration can be carried out to the angle in horizontally and vertically direction, parallel offset amount based on above-mentioned calibration flow.
Embodiment three：
The present embodiment three is a kind of calibration method in light beam orientation, and embodiment two can combine the present embodiment three to be turned into more preferably
Embodiment.
The calibration method in the light beam orientation of the present embodiment three, including the first optical frames, the second optical frames, the 3rd optical frames,
4th optical frames, wedge, optical pickup apparatus and controller, the method are comprised the following steps：
A, the second optical frames, the 4th optical frames are manually adjusted first make light beam accurately by two diaphragms, now by light-receiving
The spot center position of the wedge reflected light of device detection is initial hot spot center；
B, by light beam successively by after the reflection of the first optical frames and the second optical frames, from above or below the 4th optical frames
By, and wedge, wedge two are incident upon from the 3rd optical frames below or above after being reflected via the 3rd optical frames and the 4th optical frames
The light beam that individual reflecting surface is reflected is received with optical pickup apparatus；
C, optical pickup apparatus real-time detection receive the offset information of the spot center of light beam, and offset information is transferred to
Controller；
D, controller control the second optical frames and the 4th optical frames to translate or rotate according to offset information, to change wedge
Two spot center deviation posts of reflecting surface institute the reflected beams；
For the scheme described in above-mentioned steps, the optical pickup apparatus have two, are respectively used to detection wedge two anti-
The offset information of the spot center of reflective surface institute the reflected beams, two optical pickup apparatus are different from wedge pip distance.
Control the second optical frames and the 4th optical frames to rotate, the offset information of two each Autonomous tests of optical pickup apparatus is become
To in identical, and reduce the side-play amount of the spot center；Control the second optical frames to translate, the spot center can be changed and existed
Deviation post in horizontal direction；Control the 4th optical frames to translate, the inclined of the spot center in the vertical direction can be changed
Pan position.The optical frames of Repetitive controller second is translated and the translation of the 4th optical frames, to reduce the side-play amount of the spot center.
The optical pickup apparatus are face battle array photodetector, the hot spot light intensity point that controller is detected according to optical pickup apparatus
Cloth information calculates the side-play amount size of the spot center, and automatically controls the second optical frames and the 4th light according to side-play amount size
Mirror is learned with the outgoing orientation of calibration beam.
Real-time bearing calibration is realized to light beam (laser beam), first have to position it.Light with reference to shown in Fig. 1
Knowable to the principle of road, the spot center coordinate on two detectors is actually determined to laser beam positioning.We use CMOS
As detector, absolute location information and comprehensive light intensity cross direction profiles information can be obtained.
Furthermore, it is contemplated that different application demands, uses two sets of different location algorithms, two sets of algorithms in use in system
Can free switching.
(1) first set algorithm is fast locating algorithm, computing is carried out by SCM Based controller, for required precision
Not high but real-time speed requirement occasion high.The image planes that CMOS image planes regard 4 quadrant detector as are carried out into calculation process herein.
As shown in figure 3, cmos pixel array is divided into four quadrants, the hot spot for falling on is also divided into four parts, its
Area is denoted as SⅠ、SⅡ、SⅢ、SⅣ.The size of this four parts facula area reflects spot center for photosurface center (four
The origin of individual quadrant) side-play amount information.Grey scale pixel value summation is carried out respectively to four quadrants, the value for obtaining is proportional to respectively
Four part facula areas, and spot center offset Δ x and Δ y are then represented by following computing formula：
In formula k be constant coefficient (for determine light source, what the coefficient was to determine, calibration factor is needed to different light sources
k).This algorithm calculating speed is very fast, and processing speed is can further improve by the way of interval takes a little.
(2) second sets of algorithms are Precision Orientation Algorithm, for required precision to be high but the less demanding occasion of real-time speed.It is excellent
Choosing carries out computing by host computer (computer 20 as shown in Figure 1), and host computer is connected with controller communication.Computing formula is：
Wherein,The coordinates of laser spot center being as calculated, I (xi,yi) for i-th on detector photosurface
The light intensity that pixel elements are obtained, xi、yiIt is the coordinate value of ith pixel unit.
The first moment computational methods of above-mentioned (2) formula are adapted to the situation of single mode and multimode distribution.The method can make full use of
The light distribution information that cmos sensor is obtained, any situation on photosurface that falls to hot spot can be obtained in accurate hot spot
Heart coordinate information.The situation as shown in for Fig. 4, first set positioning mode cannot obtain spot center coordinate, and the method is not received then
Limitation, this is one of advantage of the method.
The preferred scheme of second set of algorithm is generally deposited in the actual facula intensity distribution image detected due to detector
In noise, there is certain influence on speckle analysis.Therefore before location Calculation, denoising can be carried out first with spatial domain sparse constraint algorithm
Treatment.Specifically, sparse principal component analysis first is carried out to light spot image, obtains wavelet filter group, become image by it
Wavelet field is changed to, and carries out thresholding treatment, inverse wavelet transform is finally carried out again.Only need to be at the beginning of light source be changed to different light sources
Beginning carries out once sparse principal component analysis.Light spot image quality after denoising will be improved significantly, but will not change
Become former beam pattern.Then, then using the first moment shown in (2) formula spot center coordinate offset amount is calculated.
Example IV：
The present embodiment four is a kind of calibration method for being applied to above-described embodiment, the present embodiment four can combine before implementation
Example two or embodiment three form more excellent embodiment.
A kind of calibration method in light beam orientation of the present embodiment, comprises the following steps：
A, two optical pickup apparatus difference real-time monitoring two facula deviation information of reflecting surface institute the reflected beams of wedge,
Facula deviation information is calculated by spot center coordinate with initial center coordinate, using the facula deviation information and two
The optical path difference of optical pickup apparatus calculates light beam in level and the offset of vertical direction in real time；
B, the second optical frames of control and/or the 4th optical frames are rotated, and reduce the offset of the light beam；
C, circulation step a, b, make the offset constantly be decreased to minimum or less than error margin；
D, using the spot center coordinate and initial center coordinate, calculate in real time light beam in the horizontal direction laterally partially
Shifting amount and light beam vertical side-play amount in vertical direction；
E, the second optical frames of regulation and/or the translation of the 4th optical frames, reduce the transverse direction and vertical side-play amount of light beam；
F, circulation step d, e, make the horizontal and vertical side-play amount minimize or less than error margin.
For the application scenario for only needing single target to be aligned, need to only circulate execution above-mentioned steps d-f and be capable of achieving accurate alignment.
And due to sensitive angular deflection amount is converted into insensitive translational movement, under the premise of equivalent device, degree of regulation is than it
To be only significantly improved using the method for tilting mirror.The system calibration light path is succinct, can accomplish very for single target alignment applications
Accuracy high, for azimuth deviation correction (double targets) application, shifting method also can largely compensate for common stepping electricity
The deficiency of machine angular adjustment precision.
The announcement and teaching of book according to the above description, those skilled in the art in the invention can also be to above-mentioned embodiment party
Formula is changed and changed.Therefore, the invention is not limited in specific embodiment disclosed and described above, to of the invention
Some modifications and changes should also be as falling into scope of the claims of the invention.Although additionally, being used in this specification
Some specific terms, but these terms are merely for convenience of description, do not constitute any limitation to the present invention.
Claims (10)
1. a kind of light beam bearing calibration system, it is characterised in that：
Including the first optical frames, the second optical frames, the 3rd optical frames, the 4th optical frames and wedge, light beam is successively by the first light
After learning the reflection of mirror and the second optical frames, pass through from above or below the 4th optical frames, and via the 3rd optical frames and the 4th light
Wedge is incident upon from the 3rd optical frames below or above after learning mirror reflection, two reflecting surfaces of the wedge favour incident beam
Direction；
Including two optical pickup apparatus, it is respectively used to receive the light beam after being reflected through two reflecting surfaces of wedge；
Second optical frames is adjustable optical mirror, can do alternating translational along the direction of the light beam of incident second optical frames, and can
Rotate in the horizontal plane；
4th optical frames is adjustable optical mirror, can do alternating translational along the direction of the light beam of the optical frames of outgoing the 4th, and can
Rotated in perpendicular.
2. calibration system according to claim 1, it is characterised in that：Also include controller, for controlling the second light respectively
Learn the motion of mirror and the 4th optical frames；Second optical frames and the 4th optical frames are respectively connected with rotary electric machine and automatically controlled translation
Platform, controller controls the motion of the second speculum and the 4th speculum by driving rotary electric machine and electronic control translation stage.
3. calibration system according to claim 2, it is characterised in that：Controller is connected with two optical pickup apparatus, and light connects
Receiving apparatus are used to monitor two spot center offset informations of reflecting surface institute the reflected beams of wedge and be transferred to controller, control
Device automatically adjusts the second optical frames and the 4th optical frames according to spot center offset information, with the outgoing orientation of calibration beam.
4. calibration system according to claim 1, it is characterised in that：The optical pickup apparatus are light trap, face battle array photoelectricity
Detector, 4 quadrant detector or the display with optical signal receiving terminal.
5. a kind of light beam bearing calibration method, it is characterised in that including the first optical frames, the second optical frames, the 3rd optical frames,
Four optical frames, wedge, optical pickup apparatus and controller, the method are comprised the following steps：
A, the second optical frames, the 4th optical frames are manually adjusted first make light beam accurately by two diaphragms, now by optical pickup apparatus
The spot center position of the wedge reflected light of detection is initial hot spot center；
B, by light beam successively by after the reflection of the first optical frames and the second optical frames, being passed through from above or below the 4th optical frames
Cross, and be incident upon wedge, wedge two from the 3rd optical frames below or above after being reflected via the 3rd optical frames and the 4th optical frames
The light beam that reflecting surface is reflected is received with optical pickup apparatus；
C, optical pickup apparatus real-time detection receive the offset information of the spot center of light beam, and offset information is transferred into control
Device；
D, controller control the second optical frames and the 4th optical frames to translate or rotate according to offset information, to change wedge two
The spot center deviation post of reflecting surface institute the reflected beams；
The optical pickup apparatus have two, are respectively used to detect two spot centers of reflecting surface institute the reflected beams of wedge
Offset information, two optical pickup apparatus are different from wedge pip distance.
6. calibration method according to claim 5, it is characterised in that：The second optical frames and the 4th optical frames is controlled to turn
It is dynamic, the offset information of two each Autonomous tests of optical pickup apparatus is intended to identical, and reduce the side-play amount of the spot center；
Control the second optical frames to translate, spot center deviation post in the horizontal direction can be changed；Control the 4th light
Learn mirror to translate, the deviation post of the spot center in the vertical direction can be changed.
7. calibration method according to claim 6, it is characterised in that：The optical pickup apparatus are face battle array photodetector,
The hot spot light distribution information that controller is detected according to optical pickup apparatus calculates the side-play amount size of the spot center, and root
The second optical frames and the 4th optical frames are automatically controlled with the outgoing orientation of calibration beam according to side-play amount size.
8. calibration method according to claim 7, it is characterised in that：The computational methods of the side-play amount size include following
One of two kinds of computational methods or all：
Computational methods one, fast locating algorithm：
Wherein, Δ x, Δ y are side-play amount of the spot center in X and Y coordinates；SⅠ、SⅡ、SⅢ、SⅣIn respectively described hot spot
The area that the heart falls on four quadrants divided to detector photosurface, k is constant coefficient；
Computational methods two, Precision Orientation Algorithm：
Wherein,The coordinates of laser spot center being as calculated, I (xi,yi) it is ith pixel unit on detector photosurface
The light intensity of acquisition, xi、yiIt is the coordinate value of ith pixel unit；
When jointly include fast locating algorithm and Precision Orientation Algorithm when, two kinds of computational methods can free switching use.
9. calibration method according to claim 8, it is characterised in that：Side-play amount is being calculated using the Precision Orientation Algorithm
Before, the light spot image information for first being detected to optical pickup apparatus carries out denoising.
10. a kind of calibration method for calibration system described in claim 3, it is characterised in that comprise the following steps：
A, two optical pickup apparatus difference real-time monitoring two facula deviation information of reflecting surface institute the reflected beams of wedge, hot spot
Offset information is calculated by spot center coordinate with initial center coordinate, is connect using the facula deviation information and two light
The optical path difference of receiving apparatus calculates light beam in level and the offset of vertical direction in real time；
B, the second optical frames of control and/or the 4th optical frames are rotated, and reduce the offset of the light beam；
C, circulation step a, b, make the offset constantly be decreased to minimum or less than error margin；
D, using the spot center coordinate and initial center coordinate, light beam transversal displacement in the horizontal direction is calculated in real time
And light beam vertical side-play amount in vertical direction；
E, the second optical frames of regulation and/or the translation of the 4th optical frames, reduce the transverse direction and vertical side-play amount of light beam；
F, circulation step d, e, make the horizontal and vertical side-play amount minimize or less than error margin.
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