CN118081493A - Magnetic field distribution detection device and method for magnetorheological polishing equipment - Google Patents
Magnetic field distribution detection device and method for magnetorheological polishing equipment Download PDFInfo
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- CN118081493A CN118081493A CN202410515061.5A CN202410515061A CN118081493A CN 118081493 A CN118081493 A CN 118081493A CN 202410515061 A CN202410515061 A CN 202410515061A CN 118081493 A CN118081493 A CN 118081493A
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- 238000005498 polishing Methods 0.000 title claims abstract description 131
- 238000009826 distribution Methods 0.000 title claims abstract description 95
- 238000000034 method Methods 0.000 title claims abstract description 19
- 238000001514 detection method Methods 0.000 title claims abstract description 18
- 239000000523 sample Substances 0.000 claims abstract description 23
- 230000006698 induction Effects 0.000 claims abstract description 11
- 238000009434 installation Methods 0.000 claims abstract description 9
- 238000005070 sampling Methods 0.000 claims description 29
- 238000012545 processing Methods 0.000 claims description 14
- 239000012530 fluid Substances 0.000 claims description 6
- 238000004891 communication Methods 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Measuring Magnetic Variables (AREA)
Abstract
The invention relates to the technical field of optical manufacturing, in particular to a magnetic field distribution detection device and method of magnetorheological polishing equipment; the probe of the Gaussian meter acquires the two-dimensional magnetic field distribution of the polishing module perpendicular to the magnetic induction line direction of the polishing module under the adjustment of the external moving component, and the position coordinates of the external moving component, the probe and the polishing module are measured by utilizing the line laser measuring instrument; the control unit receives all the position coordinates and the two-dimensional magnetic field distribution, obtains the three-dimensional magnetic field distribution of the lowest point of the polishing wheel through three-dimensional reconstruction, obtains the magnet installation deviation according to the three-dimensional magnetic field distribution, and further adjusts. The invention can intuitively obtain the distribution of the lowest point of the magnetic field relative to the polishing wheel, improves the magnet installation flow of the magnetorheological polishing equipment, and improves the polishing precision and the polishing stability of the magnetorheological polishing equipment.
Description
Technical Field
The invention relates to the technical field of optical manufacturing, in particular to a magnetic field distribution detection device and method for magnetorheological polishing equipment.
Background
Magnetorheological polishing (Magnetorheological Finishing, MRF) is an advanced optical manufacturing technology developed in recent years, and has the advantages of stable removal function, controllable edge effect, small lower surface damage layer, no copying effect, strong shape modifying capability, high machining precision and the like. Therefore, magnetorheological polishing technology has received a great deal of attention in high-precision optical processing. In a magnetorheological polishing system, a magnetic field generated by a magnet plays a vital role in the magnetorheological polishing effect, if the magnet deflects in the installation process, a polishing sensitive area which is unfavorable for the material removal stability is generated on the magnetorheological polishing wheel, the robustness of a ribbon is greatly reduced, the volume removal rate of the magnetorheological polishing removal function possibly jumps along with the fluctuation of the polishing ribbon, namely the stability of the removal function is reduced, and the polishing precision is affected.
However, at present, a three-dimensional magnetic field distribution of a working area of the magnetorheological polishing equipment does not have a good measurement method, a detection flow after the magnet is installed is lacked, and an installation state of a magnet module does not have a proper detection means in an assembly process of the magnetorheological polishing equipment at present, and whether the magnet module is deviated or not cannot be known after the installation is completed. Because the magnetorheological polishing wheel is in a circular shape with errors, the existing three-dimensional magnetic field measuring device cannot measure the magnetic field distribution on the surface of the polishing wheel with high precision.
Disclosure of Invention
The invention aims to solve the problems, and provides a magnetic field distribution detection device and method for magnetorheological polishing equipment.
In a first aspect, the magnetic field distribution detection device of the magnetorheological polishing equipment provided by the invention comprises a nonmagnetic platform, a polishing module, a gauss meter, a line laser measuring instrument and a control unit; wherein,
The polishing module is arranged on the free end of the external moving assembly and is positioned above the nonmagnetic platform;
The probes of the Gaussian meter are perpendicular to the magnetic induction line direction of the polishing module and are fixed on a non-magnetic platform and used for acquiring the two-dimensional magnetic field distribution of the polishing module;
the line laser measuring instrument is positioned at one side of the polishing module and is used for measuring the position coordinates of the moving assembly, the probe and the polishing module;
The control unit is in communication connection with the line laser measuring instrument and the gauss meter, and comprises: the control module is used for controlling the moving assembly to adjust the position of the probe and controlling the line laser measuring instrument to measure the position coordinates; the data receiving module is used for receiving all the position coordinates and the two-dimensional magnetic field distribution; and the data processing module is used for integrating the two-dimensional magnetic field distribution to obtain three-dimensional magnetic field distribution.
Further, the polishing module comprises a polishing wheel, a polishing mounting frame, a magnet and a nozzle; wherein, the polishing wheel is arranged in the polishing mounting frame; the nozzle is arranged on the polishing mounting frame along the rotation direction of the polishing wheel and is used for providing magnetorheological fluid for polishing for the polishing wheel; a magnet is mounted on the polishing mount proximate the polishing wheel for changing the shear stress of the magnetorheological fluid during processing.
Further, the two-dimensional magnetic field distribution of the polishing module is the two-dimensional magnetic field distribution of the polishing wheel.
In a second aspect, the method for detecting magnetic field distribution of magnetorheological polishing equipment provided by the invention is suitable for the magnetic field distribution detection device of magnetorheological polishing equipment provided by the first aspect, and specifically comprises the following steps:
S1: the control module controls the moving assembly to enable the probe to enter the measuring range of the line laser measuring instrument, controls the line laser measuring instrument to record the coordinate A of the probe, the coordinate B of the lowest point in the polishing wheel and the coordinate C of the moving assembly at the moment, and transmits the coordinate A, the coordinate B and the coordinate C into the data receiving module;
S2: tangential sampling points are arranged at intervals of Mmm along the tangential direction of the polishing wheel, and axial sampling points are arranged at intervals of Nmm along the axial direction of the polishing wheel;
S3: controlling the moving assembly to enable the probe to move in the working area of the polishing wheel, and acquiring magnetic field intensity at tangential sampling points and axial sampling points so as to obtain two-dimensional magnetic field distribution;
S4: reconstructing three-dimensional magnetic field distribution under a coordinate system of the moving assembly by utilizing a data processing module according to the two-dimensional magnetic field distribution, wherein tangential sampling frequency of the three-dimensional magnetic field distribution is Mmm, and axial sampling frequency is Nmm;
s5: and converting the three-dimensional magnetic field distribution into final three-dimensional magnetic field distribution of the lowest point of the polishing wheel by using a data processing module, and judging whether the magnet installation generates offset or not according to the final three-dimensional magnetic field distribution.
Further, the process of acquiring the two-dimensional magnetic field distribution in step S3 is as follows: firstly, tangential magnetic induction intensity is measured at a tangential sampling point by utilizing a Gaussian meter, and then axial magnetic induction intensity is measured at an axial sampling point, so that two-dimensional magnetic field distribution is obtained.
Further, the process of obtaining the final three-dimensional magnetic field distribution in step S5 is as follows: subtracting the coordinate A from the coordinate C in the three-dimensional magnetic field distribution to obtain the three-dimensional magnetic field distribution under the coordinate system of the line laser measuring instrument, and finally obtaining the final three-dimensional magnetic field distribution by the coordinate B.
Further, the resolution of the line laser gauge is set between 20-25 um.
Compared with the prior art, the invention has the following beneficial effects:
According to the invention, the three-dimensional magnetic field distribution reconstructed by measuring a plurality of groups of two-dimensional magnetic field distribution at different sampling points under the robot coordinate system is converted into the polishing wheel coordinate system by the line laser measuring instrument, so that the offset condition of the magnet relative to the lowest point of the polishing wheel can be intuitively obtained, the installation and detection flow of the magnet of the magnetorheological polishing equipment is perfected, and the polishing stability of the polishing equipment is improved. The reconstruction method based on the line laser measuring instrument and the Gaussian meter is not only suitable for measuring the magnetic field distribution of magneto-rheological equipment, but also suitable for all three-dimensional magnetic field distribution which is difficult to measure by using a three-dimensional magnetic field instrument, and the application range is enlarged.
Drawings
FIG. 1 is a schematic structural diagram of a magnetic field distribution detecting device of a magnetorheological polishing apparatus according to an embodiment of the present invention;
FIG. 2 is a flow chart of a method for detecting magnetic field distribution of a magnetorheological polishing apparatus according to an embodiment of the present invention;
FIG. 3 is a schematic view of the relative movement of a polishing apparatus with respect to a probe according to an embodiment of the present invention;
fig. 4 is a three-dimensional magnetic field distribution diagram under the coordinates of a line laser measuring instrument according to an embodiment of the present invention.
Reference numerals: a non-magnetic platform 1, a probe 2, a line laser measuring instrument 3, a polishing wheel 4, a polishing mounting frame 5, a magnet 6, a nozzle 7 and a control unit 8.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described in detail with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not to be construed as limiting the invention.
The magnetic field distribution detection device and method of the magnetorheological polishing equipment are improved on the basis of the traditional single-point magnetic induction intensity detection equipment, and the three-dimensional slave magnetic field distribution relative to the lowest point of the polishing wheel is constructed by using the line laser measuring instrument and the Gaussian meter, so that the installation offset of the magnet can be obtained simply and intuitively, the installation detection flow of the magnet of the magnetorheological polishing equipment is perfected, and the polishing stability is improved.
Fig. 1 shows a structure of a magnetic field distribution detecting device of a magnetorheological polishing apparatus according to an embodiment of the present invention.
In the first aspect, as shown in fig. 1, the magnetic field distribution detecting device of the magnetorheological polishing apparatus provided by the embodiment of the invention includes a nonmagnetic platform 1, a polishing module, a gauss meter, a line laser measuring instrument 3 and a control unit 8.
Wherein the polishing module is mounted on the free end of the external moving assembly above the nonmagnetic platform 1. The probes 2 of the Gaussian meter are perpendicular to the magnetic induction line direction of the polishing module and fixed on the nonmagnetic platform 1, and are used for acquiring the two-dimensional magnetic field distribution of the polishing wheel 4 in the polishing module. A line laser gauge 3 is located at one side of the polishing module for measuring the position coordinates of the moving assembly, the probe 2 and the polishing module.
The polishing module comprises a polishing wheel 4, a polishing mount 5, a magnet 6 and a nozzle 7. Wherein the polishing wheel 4 is mounted inside the polishing mounting frame 5, and the nozzle 7 is mounted on the polishing mounting frame 5 in the rotation direction of the polishing wheel 4 for supplying magnetorheological fluid for polishing to the polishing wheel 4. A magnet 6 is mounted on the polishing mount 5 adjacent the polishing wheel 4 for changing the shear stress of the magnetorheological fluid during processing.
The control unit 8 is in communication connection with the line laser measuring instrument 3 and the gauss meter, and comprises a control module, a data receiving module and a data processing module.
The control module is used for controlling the moving assembly to adjust the position of the probe 2 and controlling the line laser measuring instrument 3 to measure the position coordinates. The data receiving module is used for receiving all the position coordinates and the two-dimensional magnetic field distribution. The data processing module is used for integrating the two-dimensional magnetic field distribution to obtain three-dimensional magnetic field distribution.
In the embodiment of the invention, the moving component can be a machine tool, a robot or a mechanical arm with a pose adjusting function.
Fig. 2 shows a flow of a magnetic field distribution detection method of a magnetorheological polishing apparatus according to an embodiment of the present invention.
In a second aspect, the method for detecting magnetic field distribution of magnetorheological polishing equipment provided by the invention is suitable for the device for detecting magnetic field distribution of magnetorheological polishing equipment provided by the first aspect, as shown in fig. 2, and specifically comprises the following steps:
S1: the control module controls the moving assembly so that the probe 2 enters the measuring range of the line laser measuring instrument 3, and controls the line laser measuring instrument 3 to record the coordinate A of the probe 2, the coordinate B of the lowest point in the polishing wheel 4, and the coordinate C of the moving assembly at the moment, and transmits the coordinate A, the coordinate B and the coordinate C to the data receiving module.
Preferably, the resolution of the line laser measuring instrument 3 is set between 20-25 μm, and in the embodiment of the present invention, the resolution of the line laser measuring instrument 3 is set to 20 μm with an error of ±25 μm.
S2: tangential sampling points are arranged at intervals of Mmm in the tangential direction of the polishing wheel, and axial sampling points are arranged at intervals of Nmm in the axial direction of the polishing wheel.
Preferably, in the embodiment of the present invention, the interval M between tangential sampling points is 0.1mm, and the interval N between axial sampling points is also 0.1mm.
S3: the moving assembly is controlled so that the probe 2 moves in the working area of the polishing wheel 4, and the magnetic field intensity is acquired at the tangential sampling point and the axial sampling point, so that the two-dimensional magnetic field distribution is obtained.
Fig. 3 illustrates the motion of a polishing apparatus relative to a probe according to an embodiment of the present invention.
As shown in fig. 3, in the embodiment of the present invention, the radius of the polishing wheel 4 is 180mm, and the working area of the polishing wheel 4 is a circular arc area of ±15° of the lowest point of the polishing wheel 4.
The process for acquiring the two-dimensional magnetic field distribution comprises the following steps: firstly, tangential magnetic induction intensity is measured by using a Gaussian meter 2 at a tangential sampling point, and then axial magnetic induction intensity is measured at an axial sampling point, so that two-dimensional magnetic field distribution is obtained.
S4: and reconstructing the three-dimensional magnetic field distribution under the coordinate system of the moving assembly according to the two-dimensional magnetic field distribution by utilizing the data processing module.
Fig. 4 shows a three-dimensional magnetic field distribution in the coordinates of a line laser measuring instrument according to an embodiment of the present invention.
As shown in fig. 4, the tangential sampling frequency of the three-dimensional magnetic field distribution is Mmm, and the axial sampling frequency is Nmm. That is, in the embodiment of the invention, the tangential sampling frequency and the axial sampling frequency of the three-dimensional magnetic field distribution are both 0.1mm.
S5: the three-dimensional magnetic field distribution is converted into final three-dimensional magnetic field distribution of the lowest point of the polishing wheel by the data processing module, and whether the magnet 6 is installed to generate offset is judged according to the final three-dimensional magnetic field distribution. The process for obtaining the final three-dimensional magnetic field distribution comprises the following steps: subtracting the coordinate A from the coordinate C in the three-dimensional magnetic field distribution to obtain the three-dimensional magnetic field distribution under the coordinate system of the line laser measuring instrument, and finally obtaining the final three-dimensional magnetic field distribution by the coordinate B. If the point of the final three-dimensional magnetic field distribution where the magnetic field is strongest is not aligned with the lowest point of the polishing wheel 4, it is indicated that the magnet 6 is installed to be offset, and readjustment is required.
It should be appreciated that various forms of the flows shown above may be used to reorder, add, or delete steps. For example, the steps described in the present disclosure may be performed in parallel, sequentially, or in a different order, provided that the desired results of the technical solutions of the present disclosure are achieved, and are not limited herein.
The above embodiments do not limit the scope of the present invention. It will be apparent to those skilled in the art that various modifications, combinations, sub-combinations and alternatives are possible, depending on design requirements and other factors. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of the present invention.
Claims (7)
1. The magnetic field distribution detection device of the magnetorheological polishing equipment is characterized by comprising a nonmagnetic platform, a polishing module, a Gaussian meter, a line laser measuring instrument and a control unit; wherein,
The polishing module is arranged on the free end of the external moving assembly and is positioned above the nonmagnetic platform;
the probes of the Gaussian meter are perpendicular to the magnetic induction line direction of the polishing module and are fixed on the nonmagnetic platform and are used for acquiring the two-dimensional magnetic field distribution of the polishing module;
The line laser measuring instrument is positioned on one side of the polishing module and is used for measuring the position coordinates of the moving assembly, the probe and the polishing module;
The control unit is in communication connection with the line laser measuring instrument and the gauss meter, and comprises: the control module is used for controlling the moving assembly to adjust the position of the probe and controlling the line laser measuring instrument to measure position coordinates; the data receiving module is used for receiving all the position coordinates and the two-dimensional magnetic field distribution; and the data processing module is used for integrating the two-dimensional magnetic field distribution to obtain three-dimensional magnetic field distribution.
2. The magnetorheological polishing apparatus magnetic field distribution detection device of claim 1, wherein the polishing module comprises a polishing wheel, a polishing mounting frame, a magnet, and a nozzle; wherein the polishing wheel is arranged in the polishing mounting frame; the nozzle is arranged on the polishing mounting frame along the rotation direction of the polishing wheel and is used for providing magnetorheological fluid for polishing for the polishing wheel; the magnet is mounted on the buffing mount proximate to the buffing wheel for altering the shear stress of the magnetorheological fluid during processing.
3. The magnetorheological polishing apparatus magnetic field distribution detection device according to claim 2, wherein the two-dimensional magnetic field distribution of the polishing module is a two-dimensional magnetic field distribution of the polishing wheel.
4. A method for detecting magnetic field distribution of magnetorheological polishing equipment, which is suitable for the magnetic field distribution detection device of magnetorheological polishing equipment according to any one of claims 2 or 3, and is characterized by comprising the following steps:
S1: the control module controls the moving assembly to enable the probe to enter the measuring range of the line laser measuring instrument, controls the line laser measuring instrument to record the coordinate A of the probe and the coordinate B of the lowest point in the polishing wheel, and the coordinate C of the moving assembly at the moment, and transmits the coordinate A, the coordinate B and the coordinate C into the data receiving module;
s2: tangential sampling points are arranged at intervals of Mmm along the tangential direction of the polishing wheel, and axial sampling points are arranged at intervals of Nmm along the axial direction of the polishing wheel;
S3: controlling the moving assembly to enable the probe to move in the working area of the polishing wheel, and acquiring magnetic field intensity at the tangential sampling point and the axial sampling point so as to obtain two-dimensional magnetic field distribution;
S4: reconstructing three-dimensional magnetic field distribution under the coordinate system of the moving assembly according to the two-dimensional magnetic field distribution by using the data processing module, wherein tangential sampling frequency of the three-dimensional magnetic field distribution is Mmm, and axial sampling frequency is Nmm;
S5: and converting the three-dimensional magnetic field distribution into a final three-dimensional magnetic field distribution of the lowest point of the polishing wheel by using the data processing module, and judging whether the magnet installation generates offset according to the final three-dimensional magnetic field distribution.
5. The method for detecting magnetic field distribution of magnetorheological polishing apparatus according to claim 4, wherein the step S3 of obtaining the two-dimensional magnetic field distribution comprises the steps of:
firstly, tangential magnetic induction intensity is measured at the tangential sampling point by utilizing the Gaussian meter, and then axial magnetic induction intensity is measured at the axial sampling point, so that the two-dimensional magnetic field distribution is obtained.
6. The method for detecting magnetic field distribution of magnetorheological polishing apparatus according to claim 4, wherein the step S5 of obtaining the final three-dimensional magnetic field distribution comprises the steps of:
and subtracting the coordinate A from the coordinate C in the three-dimensional magnetic field distribution to obtain the three-dimensional magnetic field distribution under the coordinate system of the line laser measuring instrument, and finally subtracting the coordinate B to obtain the final three-dimensional magnetic field distribution.
7. The method for detecting magnetic field distribution of a magnetorheological polishing apparatus according to claim 4, wherein the resolution of the line laser measuring instrument is set between 20 and 25 um.
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| CN202410515061.5A CN118081493A (en) | 2024-04-26 | 2024-04-26 | Magnetic field distribution detection device and method for magnetorheological polishing equipment |
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| CN202410515061.5A CN118081493A (en) | 2024-04-26 | 2024-04-26 | Magnetic field distribution detection device and method for magnetorheological polishing equipment |
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Citations (7)
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|---|---|---|---|---|
| JP2001269850A (en) * | 2000-03-23 | 2001-10-02 | Fuji Electric Co Ltd | Surface polishing method and device for magnetic disk medium |
| CN106225714A (en) * | 2016-08-02 | 2016-12-14 | 中国科学院长春光学精密机械与物理研究所 | A kind of optical calibration method of MR fluid ribbon in magnetorheological process equipment |
| CN111766550A (en) * | 2020-07-08 | 2020-10-13 | 致真精密仪器(青岛)有限公司 | Three-dimensional magnetic field probe station test system and test method |
| CN112484640A (en) * | 2020-11-23 | 2021-03-12 | 中国科学院光电技术研究所 | Device and method for calibrating magnetorheological polishing tool head for robot based on tracker |
| CN114393448A (en) * | 2022-01-21 | 2022-04-26 | 中国科学院长春光学精密机械与物理研究所 | Method for improving track precision of magnetorheological robot polishing equipment |
| CN115284079A (en) * | 2022-09-30 | 2022-11-04 | 中国科学院长春光学精密机械与物理研究所 | Magnetorheological polishing calibration method |
| CN117556345A (en) * | 2024-01-11 | 2024-02-13 | 中国科学院长春光学精密机械与物理研究所 | Magnetorheological polishing removal function prediction device and method based on neural network |
-
2024
- 2024-04-26 CN CN202410515061.5A patent/CN118081493A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001269850A (en) * | 2000-03-23 | 2001-10-02 | Fuji Electric Co Ltd | Surface polishing method and device for magnetic disk medium |
| CN106225714A (en) * | 2016-08-02 | 2016-12-14 | 中国科学院长春光学精密机械与物理研究所 | A kind of optical calibration method of MR fluid ribbon in magnetorheological process equipment |
| CN111766550A (en) * | 2020-07-08 | 2020-10-13 | 致真精密仪器(青岛)有限公司 | Three-dimensional magnetic field probe station test system and test method |
| CN112484640A (en) * | 2020-11-23 | 2021-03-12 | 中国科学院光电技术研究所 | Device and method for calibrating magnetorheological polishing tool head for robot based on tracker |
| CN114393448A (en) * | 2022-01-21 | 2022-04-26 | 中国科学院长春光学精密机械与物理研究所 | Method for improving track precision of magnetorheological robot polishing equipment |
| CN115284079A (en) * | 2022-09-30 | 2022-11-04 | 中国科学院长春光学精密机械与物理研究所 | Magnetorheological polishing calibration method |
| CN117556345A (en) * | 2024-01-11 | 2024-02-13 | 中国科学院长春光学精密机械与物理研究所 | Magnetorheological polishing removal function prediction device and method based on neural network |
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