CN115284079A - Magnetorheological polishing calibration method - Google Patents
Magnetorheological polishing calibration method Download PDFInfo
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- CN115284079A CN115284079A CN202211204854.2A CN202211204854A CN115284079A CN 115284079 A CN115284079 A CN 115284079A CN 202211204854 A CN202211204854 A CN 202211204854A CN 115284079 A CN115284079 A CN 115284079A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/10—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work
- B24B31/112—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work using magnetically consolidated grinding powder, moved relatively to the workpiece under the influence of pressure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The invention provides a magnetorheological polishing calibration method, which comprises the following steps: s1, establishing a measurement coordinate system of a laser tracker based on the laser tracker and a tool coordinate system of processing equipment; s2, measuring the space coordinate of the measuring head in a measuring coordinate system based on the ball fitting function or the circle fitting function of the laser tracker, and measuring the space coordinate of the magnetorheological polishing wheel in the measuring coordinate system based on the ball fitting function of the laser tracker; and S3, the data processor obtains the spatial position conversion relation between the measuring head and the magnetorheological polishing wheel by obtaining and subtracting the spatial coordinates of the measuring head and the spatial coordinates of the magnetorheological polishing wheel. The invention accurately calibrates the spatial position relation between the magnetorheological polishing wheel and the measuring head in a non-contact mode, the calibration method does not depend on the processing precision and the assembling precision of hardware, does not need to assist calibration by a standard block, and can reduce the requirement of operation experience of an operator.
Description
Technical Field
The invention relates to the technical field of magnetorheological polishing calibration, in particular to a magnetorheological polishing calibration method.
Background
The magneto-rheological polishing technology is a common processing technology in the field of high-precision optical processing, and has the advantages of stable removal function, high processing certainty, high convergence efficiency and the like. The magnetorheological polishing technology is usually combined with processing equipment, and can realize nanometer-level processing precision on large-caliber optical elements with the caliber of more than 1m level based on excellent motion performance and higher track precision of a machine tool. A precondition for achieving a high-precision machining target by using a magnetorheological polishing technology is to accurately calibrate the spatial position of the optical element relative to the machine tool, and a commonly used calibration method is to determine the spatial pose of the optical element by using a measuring head positioning method and finally determine the spatial pose of the optical element relative to the machine tool according to the spatial transformation relationship between the measuring head and the polishing wheel. Therefore, whether the accurate spatial position conversion relationship can be established between the measuring head and the polishing wheel directly influences the calibration precision of the optical element relative to the machine tool, and further influences the final machining precision.
At present, two methods for calibrating the spatial position conversion relationship between a measuring head and a polishing wheel are mainly used: one method is to calculate a space transformation matrix between the design drawing and the machining and assembling precision of the equipment, and the method depends on the machining and assembling precision of hardware, so that the overall cost of the equipment is increased; the other method is to obtain the space conversion relation between the two by a contact type calibration method based on a standard block, the method depends on the operation experience of an operator, and the risk of reduction of calibration precision due to misoperation exists.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a magnetorheological polishing calibration method, which is based on the advantage of high measurement precision of a laser tracker and realizes the precise calibration of the space conversion relation between a magnetorheological polishing wheel and a measuring head by a non-contact calibration method. The method does not depend on the machining precision and the assembling precision of hardware, and reduces the operation experience requirements of operators.
In order to realize the purpose, the invention adopts the following specific technical scheme:
the magnetorheological polishing calibration method provided by the invention is realized by utilizing a magnetorheological polishing calibration device, the magnetorheological polishing calibration device comprises processing equipment, a magnetorheological polishing wheel, a measuring head, a laser tracker and a data processor, the magnetorheological polishing wheel and the measuring head are respectively arranged on the processing equipment, and the magnetorheological polishing calibration method comprises the following steps:
s1, establishing a measurement coordinate system of a laser tracker based on the laser tracker and a tool coordinate system of machining equipment;
s2, measuring the space coordinate of the measuring head in a measuring coordinate system based on the ball fitting function or the circle fitting function of the laser tracker, and measuring the space coordinate of the magnetorheological polishing wheel in the measuring coordinate system based on the ball fitting function of the laser tracker;
and S3, the data processor obtains the spatial position conversion relation between the measuring head and the magnetorheological polishing wheel by obtaining and subtracting the spatial coordinates of the measuring head and the spatial coordinates of the magnetorheological polishing wheel.
Preferably, the measuring head comprises a measuring head support, a measuring head body and a measuring head ball part which are coaxially connected from top to bottom, and the measuring head body is fixedly connected with the processing equipment through the measuring head support.
Preferably, in the process of measuring the space coordinates of the measuring head by the ball fitting function of the laser tracker, the target ball of the laser tracker is placed at different positions on the surface of the measuring head ball part, the coordinates of the target ball at different positions are measured by the laser tracker, and the coordinates of the center point (x) of the measuring head ball part are determined by the ball fitting function of the laser tracker 2 ，y 2 ，z 2 ) And radius R of the probe ball 2 The space coordinate of the sphere of the stylus in the measurement coordinate system is (x) 2 ，y 2 ，z 2 -R 2 )。
Preferably, in the process of measuring the space coordinate of the measuring head through the circle fitting function of the laser tracker, firstly, placing an object in a working area of the processing equipment, driving the processing equipment to slowly move downwards along the Z-axis direction of the tool coordinate system, stopping the movement of the processing equipment when the measuring head ball part just touches the upper surface of the object, and keeping the current posture unchanged; secondly, placing the target ball at different positions on the surface of the measuring head body, measuring the coordinates of the target ball at different positions by using a laser tracker, and determining the coordinate (x) of the central point of the circle of the measuring head body by using the circle fitting function of the laser tracker 2 ，y 2 ) (ii) a Then, the position of the probe ball on the upper surface of the object is marked and the probe is moved away from the upper surface of the object, the target ball is placed at the marked position and the position coordinate z of the target ball at this time is measured by the laser tracker 2 The space coordinate of the sphere of the stylus in the measurement coordinate system is (x) 2 ，y 2 ，z 2 -r), r being the radius value of the target sphere.
Preferably, in the process of measuring the space coordinates of the magnetorheological polishing wheel through the ball fitting function of the laser tracker, when the processing equipment is in a static state, the target balls are placed at different positions on the surface of the magnetorheological polishing wheel, the coordinates of the target balls at different positions are measured through the laser tracker, and the coordinates (x) of the center point of the magnetorheological polishing wheel are determined through the ball fitting function of the laser tracker 1 ，y 1 ，z 1 ) And polishing wheel radius R 1 Thus, the space coordinate (x) of the magnetorheological polishing wheel in the measuring coordinate system can be obtained 1 ，y 1 ，z 1 -R 1 )。
Preferably, the space position conversion relation between the measuring head and the magnetorheological polishing wheel is expressed as (x) 2 ，y 2 ，z 2 -R 2 )-(x 1 ，y 1 ，z 1 -R 1 ) Or is represented by (x) 2 ，y 2 ，z 2 -r)-(x 1 ，y 1 ，z 1 -R 1 )。
Preferably, the target ball of the laser tracker is placed on the processing equipment, the processing equipment carries the target ball to move along three coordinate axes of a tool coordinate system of the processing equipment respectively, coordinates of the target ball at different positions are measured by the laser tracker at the same time, and directions of the three coordinate axes of the measurement coordinate system of the laser tracker are determined based on a straight line fitting function of the laser tracker, so that the directions of the three coordinate axes of the measurement coordinate system are consistent with the directions of the three coordinate axes of the tool coordinate system.
The invention can obtain the following technical effects: based on the geometric shape characteristics of the magnetorheological polishing wheel and the measuring head, the space position relation between the magnetorheological polishing wheel and the measuring head is accurately calibrated in a non-contact mode by utilizing the advantage of high measurement precision of a laser tracker.
Drawings
FIG. 1 is a schematic structural diagram of a magnetorheological polishing calibration apparatus provided according to an embodiment of the invention;
FIG. 2 is a schematic flow chart of a magnetorheological polishing calibration method according to an embodiment of the invention.
Wherein the reference numerals include: the magnetorheological finishing device comprises a laser tracker 1, a target ball 2, a magnetorheological finishing module 3, a finishing device 4, a magnetorheological finishing wheel 5, a transition plate 6, a measuring head 7, a measuring head support 7-1, a measuring head body 7-2 and a measuring head ball part 7-3.
Detailed Description
Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the following description, like modules are denoted by like reference numerals. In the case of the same reference numerals, their names and functions are also the same. Therefore, detailed description thereof will not be repeated.
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not to be construed as limiting the invention.
The embodiment of the invention provides a magnetorheological polishing calibration method which is realized based on a magnetorheological polishing calibration device, and the calibration device is described before the calibration method is described.
FIG. 1 shows a structure of a magnetorheological polishing calibration device provided according to an embodiment of the invention.
As shown in fig. 1, the magnetorheological polishing calibration device provided by the embodiment of the invention comprises a laser tracker 1, target balls 2, a magnetorheological processing module 3, processing equipment 4 and a data processor, wherein the target balls 2 are placed at different positions of the magnetorheological processing module 3 and cooperate with the laser tracker 1 to complete measurement; the magnetorheological processing module 3 is arranged on the processing equipment 4, the processing equipment 4 drives the magnetorheological processing module 3 to move, the processing equipment 4 can be a precision numerical control machine or a six-degree-of-freedom industrial mechanical arm, the precision numerical control machine is used as the processing equipment 4 for explanation, and the six-degree-of-freedom industrial mechanical arm is known in the same way.
The magnetorheological processing module 3 comprises a magnetorheological polishing wheel 5, a transition plate 6 and a measuring head 7, the magnetorheological polishing wheel 5 is installed on the precision numerical control machine 4 through the transition plate 6, and the measuring head 7 is also installed on the precision numerical control machine 4 and is positioned on one side of the magnetorheological polishing wheel 5.
The measuring head 7 comprises a measuring head support 7-1, a measuring head body 7-2 and a measuring head ball part 7-3 which are coaxial from top to bottom, the measuring head ball part 7-3 is positioned at the lower end of the measuring head body 7-2, and the measuring head support 7-1 fixes the measuring head body 7-2 on the precision numerical control machine tool 4.
The space coordinate measurement of the measuring head 7 and the magnetorheological polishing wheel 5 is realized through the cooperation of the laser tracker 1 and the target ball 2, and the data processor obtains the space position conversion relation between the measuring head 7 and the magnetorheological polishing wheel 5 by obtaining and subtracting the space coordinate of the measuring head 7 and the space coordinate of the magnetorheological polishing wheel 5.
FIG. 2 shows a flow chart of a magnetorheological polishing calibration method provided according to an embodiment of the invention.
As shown in fig. 2, the method for calibrating magnetorheological polishing according to the embodiment of the present invention includes the following steps:
s1, establishing a measurement coordinate system { M } of the laser tracker.
A measurement coordinate system { M } of the laser tracker 1 is established based on a tool coordinate system { F } of the precision numerical control machine tool 4 so that the measurement coordinate system { M } coincides with the tool coordinate system { F }.
More specifically, the target ball 2 is placed on the upper surface of the transition plate 6 and fixed. The tool coordinate system { F } is enabled to be in a zero-point pose, the precision numerical control machine tool 4 is driven to move along the directions of the X axis, the Y axis and the Z axis of the tool coordinate system { F }, the coordinates of the target ball 2 at different positions are measured by the laser tracker 1, the number of the measuring points of each axis is not less than 2, the directions of the X axis, the Y axis and the Z axis of the measuring coordinate system { M } are determined through the straight line fitting function of the laser tracker 1, and the directions of the X axis, the Y axis and the Z axis of the measuring coordinate system { M } are enabled to be consistent with the directions of the X axis, the Y axis and the Z axis of the tool coordinate system { F }.
And S2, respectively measuring the space coordinates of the measuring head and the magnetorheological polishing wheel by using a laser tracker.
And measuring the space coordinate of the measuring head in a measuring coordinate system based on the ball fitting function or the circle fitting function of the laser tracker.
The ball fitting function and the circle fitting function of the laser tracker are the prior art, the ball fitting function refers to the last section of laser tracking measurement system in Baidu encyclopedia, and the circle fitting function refers to the first page and the second page of rapid conversion method of a robot coordinate system and a laser tracker coordinate system.
The embodiment of the invention realizes the measurement of the space coordinate of the measuring head by two measuring methods, the first measuring method is to directly measure the space coordinate of the measuring head ball part 7-3 by utilizing the fitting ball function of the laser tracker 1; the second measuring method is that the X-axis and Y-axis coordinates of the measuring head body 7-2 are determined by utilizing the fitting circle function of the laser tracker 1, because the measuring head support 7-1, the measuring head body 7-2 and the measuring head ball part 7-3 are on the same central line, the X-axis and Y-axis coordinates of the measuring head ball part 7-3 are equal to the X-axis and Y-axis coordinates of the measuring head body 7-2, and then the Z-axis coordinates of the measuring head ball part 7-3 are determined by utilizing a stable object with a flat upper surface, so that the space coordinates of the measuring head ball part 7-3 are measured.
For the first measurement method, the specific steps are as follows:
the target ball 2 is placed at different positions on the outer surface of the measuring head ball part 7-3, the number of the positions is not less than 4, meanwhile, the laser tracker 1 is used for measuring the coordinates of the target ball 2 at different positions, and the ball fitting function of the laser tracker 1 is used for determining the coordinate (x) of the central point of the measuring head ball part 7-3 2 ，y 2 ，z 2 ) And R of radius of the probe ball part 7-3 2 。
R 2 = R 2 `-r，R 2 ' is the radius value of the ball with the target ball 2 as the center and the center point of the measuring head ball part 7-3 as the radius when the target ball 2 is positioned on the outer surface of the measuring head ball part 7-3, and r is the radius value of the target ball 2, thereby obtaining the space coordinate (x) of the measuring head ball part 7-3 in the measuring coordinate system { M }, wherein x is the space coordinate 2 ，y 2 ，z 2 -R 2 )=(x 2 ，y 2 ，z 2 -R 2 `+r)。
The method can directly obtain the space position of the measuring head ball part 7-3 in a measuring coordinate system { M }, but the position of the measuring head ball part 7-3 is easy to be slightly moved when the target ball 2 is contacted with the measuring head ball part 7-3, the measuring precision is reduced, and therefore, the acting force between the target ball 2 and the measuring head ball part 7-3 needs to be strictly controlled during operation.
For the second measurement method, the specific steps are as follows:
(1) An object is placed in a working area of the precision numerical control machine tool 4, the size of the object in the height direction needs to be within the measurable range of the measuring head 7, the object is placed and then is still, the upper surface of the object is flat without obvious inclination by visual inspection, and the size of the object in other directions and the weight and the material of the object are not limited.
(2) The precision numerically controlled machine tool 4 is driven to move slowly downward along the Z-axis direction of the tool coordinate system { F }, and when the probe ball portion 7-3 just touches the upper surface of the object, the movement of the precision numerically controlled machine tool 4 is stopped, and the current posture is kept unchanged. The target ball 2 is placed at different positions on the outer surface of the measuring head body 7-2, the number of the positions is not less than 3, and the laser tracker 1 is utilized to measure the target ball 2 at different positionsCoordinates, namely, coordinates (x) of the central point of the circle where the measuring head body 7-2 is located are determined by utilizing the circle fitting function of the laser tracker 1 2 ，y 2 )。
(3) The position of the probe ball section 7-3 on the upper surface of the object is marked and the probe 7 is moved away from the upper surface of the object, the target ball 2 is placed at the marked position and the position coordinate z of the target ball 2 at that time is measured by the laser tracker 1 2 。
Since the stylus ball portion 7-3, the stylus body 7-2, and the stylus holder 7-1 are on the same center line, the spatial coordinate of the stylus ball portion 7-3 in the measurement coordinate system { M } is (x) 2 ，y 2 ，z 2 -r)。
The method needs to assist in determining the space coordinates of the measuring head ball part 7-3 by means of an object, but can avoid the micro-movement of the position of the measuring head ball part 7-3 caused by the direct contact between the target ball 2 and the measuring head ball part 7-3, and is beneficial to reducing the measurement error.
The method is characterized in that the space coordinate of the magnetorheological polishing wheel in a measurement coordinate system is measured based on the ball fitting function of a laser tracker, and the method comprises the following specific steps:
and when the head 7-3 of the measuring head is kept in a static state after contacting the upper surface of the object, the space coordinate of the magnetorheological polishing wheel 5 is measured.
When the precise numerical control machine tool 4 is in a static state, the target balls 2 are placed at different positions on the outer surface of the magnetorheological polishing wheel 5, the number of the positions is not less than 4, meanwhile, the laser tracker 1 is utilized to measure the coordinates of the target balls 2 at different positions, and the ball fitting function of the laser tracker 1 is utilized to determine the coordinates (x) of the central point of the magnetorheological polishing wheel 5 1 ，y 1 ，z 1 ) And R of radius of magnetorheological polishing wheel 5 1 。
R 1 = R 1 `-r，R 1 ' is the radius value of a ball which is positioned by taking the sphere center of the target ball 2 and the central point of the measuring head sphere part 7-3 as the radius when the target ball 2 is positioned on the outer surface of the magnetorheological polishing wheel 5, thereby obtaining the space coordinate (x) of the magnetorheological polishing wheel 5 in the measuring coordinate system { M } 1 ，y 1 ，z 1 -R 1 )= (x 1 ，y 1 ，z 1 -R 1 `+r)。
And S3, the data processor obtains the spatial position conversion relation between the measuring head and the magnetorheological polishing wheel by obtaining and subtracting the spatial coordinates of the measuring head and the spatial coordinates of the magnetorheological polishing wheel.
Because the measuring head 7 and the magnetorheological polishing wheel 5 are in the translational state when the optical element is positioned by using the measuring head positioning method, the spatial position conversion relationship between the measuring head 7 and the magnetorheological polishing wheel 5 can be expressed as T = (Δ x, Δ y) Δ = (x) 2 ，y 2 ，z 2 -R 2 )- (x 1 ，y 1 ，z 1 -R 1 )= (x 2 -x 1 ，y 2 -y 1 ，z 2 -z 1 +R 1 `-R 2 "or T = (Δ x, Δ z) = (x) 2 ，y 2 ，z 2 -r)- (x 1 ，y 1 ，z 1 -R 1 )= (x 2 -x 1 ，y 2 -y 1 ，z 2 -z 1 +R 1 `-2r)。
In actual use, it is only necessary to confirm the coordinates (x) of the optical element in the tool coordinate system { F } by the stylus 7 F ，y F ，z F ) The coordinates of the working point of the optical element relative to the magnetorheological polishing wheel 5 can be determined as (x) F ，y F ，z F )= (x F ，y F ，z F )-T=(x F -∆x，y F -∆y，z F -∆z)。
The invention is based on the geometric shape characteristics of the magnetorheological polishing wheel and the measuring head, utilizes the advantage of high measuring precision of the laser tracker to accurately calibrate the spatial position relation between the working point of the magnetorheological polishing wheel and the measuring head by a non-contact method, does not depend on the processing precision and the assembly precision of hardware, does not need to assist in calibration by a standard block, simultaneously reduces the requirement of operating experience of operators, has simple operation steps, short calibration time and high calibration precision in the whole calibration process, and meets the requirement of the magnetorheological processing equipment on the calibration precision of the spatial position relation between the working point of the magnetorheological polishing wheel and the measuring head.
The method is not only suitable for high-precision calibration of the spatial position relationship between the magnetorheological polishing wheel and the measuring head, but also suitable for high-precision calibration of the spatial position relationship between the measuring head and processing tools with obvious geometric dimensions, such as a small grinding head, an air bag and the like.
In the description of the specification, reference to the description of "one embodiment," "some embodiments," "an example," "a specific example," or "some examples" or the like means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.
The above embodiments of the present invention should not be construed as limiting the scope of the present invention. Any other corresponding changes and modifications made according to the technical idea of the present invention should be included in the protection scope of the claims of the present invention.
Claims (7)
1. A magnetorheological polishing calibration method is realized by utilizing a magnetorheological polishing calibration device, the magnetorheological polishing calibration device comprises processing equipment, a magnetorheological polishing wheel, a measuring head, a laser tracker and a data processor, and the magnetorheological polishing wheel and the measuring head are respectively arranged on the processing equipment, and the magnetorheological polishing calibration method is characterized by comprising the following steps of:
s1, establishing a measurement coordinate system of the laser tracker based on the laser tracker and a tool coordinate system of the processing equipment;
s2, measuring the space coordinate of the measuring head in the measuring coordinate system based on the ball fitting function or the circle fitting function of the laser tracker, and measuring the space coordinate of the magnetorheological polishing wheel in the measuring coordinate system based on the ball fitting function of the laser tracker;
and S3, the data processor obtains the spatial position conversion relation between the measuring head and the magnetorheological polishing wheel by obtaining and subtracting the spatial coordinates of the measuring head and the spatial coordinates of the magnetorheological polishing wheel.
2. The magnetorheological polishing calibration method according to claim 1, wherein the measuring head comprises a measuring head support, a measuring head body and a measuring head ball part which are coaxially connected from top to bottom, and the measuring head body is fixedly connected with the processing equipment through the measuring head support.
3. The magnetorheological polishing and calibration method according to claim 2, wherein in the process of measuring the space coordinates of the measuring head by the ball fitting function of the laser tracker, the target ball of the laser tracker is placed at different positions on the surface of the ball part of the measuring head, the coordinates of the target ball at different positions are measured by the laser tracker, and the coordinates of the center point (x) of the ball part of the measuring head are determined by the ball fitting function of the laser tracker 2 ，y 2 ，z 2 ) And a radius R of the probe ball portion 2 The space coordinate of the measuring head ball part in the measuring coordinate system is (x) 2 ，y 2 ，z 2 -R 2 )。
4. The magnetorheological polishing calibration method according to claim 2, wherein in the process of measuring the space coordinates of the measuring head by the circle fitting function of the laser tracker,
firstly, placing an object in a working area of the machining equipment, driving the machining equipment to slowly move downwards along the Z-axis direction of the tool coordinate system, stopping the movement of the machining equipment when the measuring head ball part just touches the upper surface of the object, and keeping the current posture unchanged;
secondly, placing the target ball at different positions on the surface of the measuring head body, measuring the coordinates of the target ball at different positions through the laser tracker, and determining the coordinates (x) of the central point of the circle of the measuring head body by utilizing the circle fitting function of the laser tracker 2 ，y 2 )；
Then, the position of the stylus ball on the upper surface of the object is marked and the stylus is moved away from the upper surface of the object, the target ball is placed at the marked position and the position coordinate z of the target ball at this time is measured by the laser tracker 2 The space coordinate of the measuring head ball part in the measuring coordinate system is (x) 2 ，y 2 ，z 2 -r), r being the value of the radius of the target sphere.
5. The magnetorheological polishing calibration method according to claim 3 or 4, wherein in the process of measuring the space coordinates of the magnetorheological polishing wheel by the ball fitting function of the laser tracker, the target balls are placed at different positions on the surface of the magnetorheological polishing wheel when the processing equipment is in a static state, the coordinates of the target balls at different positions are measured by the laser tracker, and the coordinates (x) of the center point of the magnetorheological polishing wheel are determined by the ball fitting function of the laser tracker 1 ，y 1 ，z 1 ) And polishing wheel radius R 1 Thereby obtaining the space coordinate of the magnetorheological polishing wheel in the measuring coordinate system as (x) 1 ，y 1 ，z 1 -R 1 )。
6. The magnetorheological polishing calibration method according to claim 5, wherein the spatial position conversion relationship between the measuring head and the magnetorheological polishing wheel is represented by (x) 2 ，y 2 ，z 2 -R 2 )-(x 1 ，y 1 ，z 1 -R 1 ) Or is represented by (x) 2 ，y 2 ，z 2 -r)-(x 1 ，y 1 ，z 1 -R 1 )。
7. The magnetorheological polishing calibration method according to claim 1, wherein a target ball of the laser tracker is placed on the processing equipment, the processing equipment carries the target ball to move along three coordinate axes of a tool coordinate system of the processing equipment respectively, coordinates of the target ball at different positions are measured by the laser tracker, and directions of the three coordinate axes of the measurement coordinate system of the laser tracker are determined based on a straight line fitting function of the laser tracker, so that the directions of the three coordinate axes of the measurement coordinate system are consistent with the directions of the three coordinate axes of the tool coordinate system.
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| CN118081493A (en) * | 2024-04-26 | 2024-05-28 | 中国科学院长春光学精密机械与物理研究所 | Magnetic field distribution detection device and method for magnetorheological polishing equipment |
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| CN114393448A (en) * | 2022-01-21 | 2022-04-26 | 中国科学院长春光学精密机械与物理研究所 | Method for improving track precision of magnetorheological robot polishing equipment |
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| CN118081493A (en) * | 2024-04-26 | 2024-05-28 | 中国科学院长春光学精密机械与物理研究所 | Magnetic field distribution detection device and method for magnetorheological polishing equipment |
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