CN118032015B - Method for improving quality factor of hemispherical resonator gyroscope - Google Patents
Method for improving quality factor of hemispherical resonator gyroscope Download PDFInfo
- Publication number
- CN118032015B CN118032015B CN202410437305.2A CN202410437305A CN118032015B CN 118032015 B CN118032015 B CN 118032015B CN 202410437305 A CN202410437305 A CN 202410437305A CN 118032015 B CN118032015 B CN 118032015B
- Authority
- CN
- China
- Prior art keywords
- hemispherical resonator
- quality factor
- resonator gyroscope
- frequency
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 19
- 230000005284 excitation Effects 0.000 claims abstract description 31
- 238000005086 pumping Methods 0.000 claims abstract description 17
- 230000006872 improvement Effects 0.000 claims abstract description 10
- 238000005070 sampling Methods 0.000 claims description 13
- 230000003321 amplification Effects 0.000 claims description 3
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 3
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 3
- 238000013016 damping Methods 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 230000001808 coupling effect Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000005865 ionizing radiation Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012858 packaging process Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
- 238000009461 vacuum packaging Methods 0.000 description 1
Landscapes
- Gyroscopes (AREA)
Abstract
The application discloses a method for improving the quality factor of a hemispherical resonator gyroscope, and relates to the technical field of hemispherical resonator gyroscopes. Wherein the method comprises the following steps: applying a driving pump signal to the hemispherical resonator gyroscope; comparing the frequency of the driving pump signal with the frequency of the output signal, and adjusting the phase of the driving pump signal to a preset interval when the difference between the frequency of the driving pump signal and the frequency of the output signal meets a first preset condition; demodulating the output signal and the driving pumping signal, and determining a reference quality factor of the hemispherical resonator gyroscope by combining an excitation signal of an excitation electrode of the hemispherical resonator gyroscope; and under the condition that the reference quality factor and the real-time quality factor of the hemispherical resonator gyroscope meet a third preset condition, determining that the improvement of the real-time quality factor of the hemispherical resonator gyroscope is finished. The application realizes the improvement of the real-time quality factor of the half-ball resonance gyroscope.
Description
Technical Field
The invention relates to the technical field of hemispherical resonator gyroscopes, in particular to a method for improving the quality factor of a hemispherical resonator gyroscope.
Background
Classical gyroscopes are made by exploiting the dead-axis and precession of the mass rotating at high speed, conservation of angular momentum according to a main principle. Such gyroscopes are structurally subject to rotor and frame support and thus create various additional errors to the gyroscope. To avoid additional errors caused by moving parts and mechanical friction, new types of optical gyroscopes, resonant gyroscopes and piezoelectric crystal gyroscopes have been developed. Among them, the resonant gyroscopes are becoming more and more important with their unique advantages, and hemispherical resonant gyroscopes are a new type of gyroscopes that are only developed in the 60 s of the 20 th century. Compared with the traditional mechanical gyro and optical gyro, the hemispherical resonator gyro has the advantages of no high-speed rotor and no movable part, no need of preheating and short starting time; the high-quality quartz resonator has the characteristics of high Q value, and even if a driving electrode fails, the hemispherical resonator gyro of the high-quality quartz resonator can still keep the working time of more than 20 minutes; meanwhile, quartz glass has intrinsic radiation resistance, so that the hemispherical resonator gyroscope is commonly used for attitude determination and navigation of a space spacecraft and military navigation.
The quality factor is an important performance index of the resonant micro gyroscope, reflects the loss condition of the energy of the resonator in one period, and is used for representing the damping characteristic of the resonant structure. In general, the main damping items of the MEMS resonant structure include thermoelastic damping, supporting loss, air damping, etc., which are mainly determined by the structural shape, mode shape, motion state and packaging process of the resonant structure. Therefore, for a resonant structure that actually operates in a particular mode, the quality factor characteristics are determined by both the resonant structure operating characteristics and the design processing stage. The existing solution mainly suppresses damping items of the gyroscope resonance structure and improves the quality factor by optimizing structural design and a high-vacuum packaging process, but lacks effective quality factor improving means for the processed gyroscope resonance structure.
Based on the above, it is very significant to propose a method for improving the quality factor of hemispherical resonator gyroscopes.
Disclosure of Invention
The invention aims to provide a method for improving the quality factor of a hemispherical resonator gyroscope, so as to solve the technical problems.
The application provides a method for improving the quality factor of a hemispherical resonator gyroscope, which comprises the following steps: applying a driving pumping signal to the hemispherical resonator gyroscope, wherein driving pumping parameters corresponding to the driving pumping signal are set based on a parameter amplification effect; sampling with a preset sampling frequency to obtain an output signal of the hemispherical resonator gyroscope; comparing the frequency of the driving pumping signal with the frequency of the output signal, and adjusting the phase of the driving pumping signal to a preset interval until the vibration amplitude of the hemispherical resonator gyroscope meets a second preset condition when the difference between the frequency of the driving pumping signal and the frequency of the output signal meets a first preset condition; demodulating the output signal and the driving pump signal, and determining a reference quality factor of the hemispherical resonator gyroscope by combining an excitation signal of an excitation electrode of the hemispherical resonator gyroscope; and under the condition that the reference quality factor and the real-time quality factor of the hemispherical resonator gyroscope meet a third preset condition, determining that the improvement of the real-time quality factor of the hemispherical resonator gyroscope is completed.
Further, the real-time quality factor of the hemispherical resonator gyroscope is obtained based on the following manner: calculating the decay time constant of the driving pump signal; demodulating the output signal and the driving pump signal, and determining the real-time quality factor of the hemispherical resonator gyroscope by combining the decay time constant.
Further, an excitation signal of the excitation electrode is applied to an inner edge of the hemispherical resonator gyroscope.
Further, the driving pump parameter is adjusted if the reference quality factor and the real-time quality factor of the hemispherical resonator gyroscope do not satisfy the third preset condition.
Further, the preset sampling frequency is 500KHz to 2MHz.
Further, the frequency of the excitation signal of the excitation electrode is at least one of the following: the sum of the coupling modes, the frequency multiplication, the secondary frequency and the frequency sidebands.
Compared with the prior art, the invention has the following advantages and beneficial effects:
1. The method for improving the quality factor of the hemispherical resonator gyroscope provided by the invention can compare the frequency of the driving pump signal with the frequency of the output signal after the driving pump signal is applied to the hemispherical resonator gyroscope, and adjust the phase of the driving pump signal to a preset interval until the vibration amplitude of the hemispherical resonator gyroscope meets a second preset condition under the condition that the difference value between the frequency of the driving pump signal and the frequency of the output signal meets a first preset condition, demodulate the output signal and the driving pump signal, and determine the reference quality factor of the hemispherical resonator gyroscope by combining the excitation signal of the excitation electrode of the hemispherical resonator gyroscope; under the condition that the reference quality factor and the real-time quality factor of the hemispherical resonator gyroscope meet a third preset condition, the improvement of the real-time quality factor of the hemispherical resonator gyroscope is confirmed to be completed, so that the improvement of the real-time quality factor of the hemispherical resonator gyroscope is realized, and the overall performance of the hemispherical resonator gyroscope is further improved.
Drawings
The accompanying drawings, which are included to provide a further understanding of embodiments of the application and are incorporated in and constitute a part of this specification, illustrate embodiments of the application and together with the description serve to explain the principles of the application. In the drawings:
FIG. 1 is a flow chart of an alternative method of improving the quality factor of a hemispherical resonator gyroscope according to an embodiment of the application.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures. In the description of the present invention, it should be noted that, directions or positional relationships indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., are directions or positional relationships based on those shown in the drawings, or are directions or positional relationships conventionally put in use of the inventive product, are merely for convenience of describing the present invention and simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific direction, be constructed and operated in a specific direction, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance.
The hemispherical resonant gyroscope is a novel high-precision gyroscope with great development prospect, and has the advantages that: the hemispherical resonator gyro has the advantages of small volume, high precision, low power consumption, high reliability, short starting time, simple mechanical component structure, large working temperature range, strong ionizing radiation resistance, insensitivity to linear overload, good stability when power is off, automatic production and the like when the hemispherical resonator gyro is manufactured, and the hemispherical resonator gyro also has longer service life, and related data show that the hemispherical resonator gyro can continuously work for more than 15 years and maintain the required performance, so the hemispherical resonator gyro is recognized as the gyro with the longest service life.
Compared with the traditional mechanical gyroscope, the hemispherical resonator gyroscope has the advantages of no high-speed rotor and no movable support in structure, good stability, high precision, small volume, low noise, high resolution, long service life, high reliability, nuclear radiation resistance and other functions, and therefore has wide application prospect in the technical field of inertia. The key vibration part harmonic oscillator is manufactured by high-quality fused quartz glass materials through complex processing procedures. In most processes, the Q value of the harmonic oscillator is affected to different degrees, and the instability of the Q value can cause the accuracy of the gyroscope to be affected. As hemispherical resonator gyroscopes are increasingly used in the aerospace field, their accuracy is receiving more and more attention. The main factors responsible for the errors are the manufacturing process errors of gyroscopes, such as: the hemispherical harmonic oscillator has uneven quality, uneven stress, uneven quality factor, uneven thickness of thin shell, etc.
The modal coupling effect is a unique nonlinear vibration phenomenon in the MEMS resonant structure, different modes of the resonator are not independent of each other, but are mutually related, and the state change of any mode can influence the characteristics of other modes. The coupling effect between the same-order modes and different-order modes of the resonator can dynamically control the working modes of the resonator, and the energy interaction between modes can be regulated by changing the amplitude of excitation voltage or applying a pumping signal form, so that the quality factor of the resonator is further improved, the quantum noise of the resonator is reduced, and the precision of the micromechanical resonator is further improved.
Optionally, as an optional embodiment, as shown in fig. 1, the method for improving the quality factor of the hemispherical resonator gyroscope provided by the application includes:
s101, applying a driving pumping signal to a hemispherical resonator gyroscope, wherein driving pumping parameters corresponding to the driving pumping signal are set based on a parameter amplification effect;
S102, sampling at a preset sampling frequency to obtain an output signal of the hemispherical resonator gyroscope;
S103, comparing the frequency of the driving pump signal with the frequency of the output signal, and adjusting the phase of the driving pump signal to a preset interval until the vibration amplitude of the hemispherical resonator gyroscope meets a second preset condition under the condition that the difference between the frequency of the driving pump signal and the frequency of the output signal meets the first preset condition;
S104, demodulating the output signal and the driving pumping signal, and determining a reference quality factor of the hemispherical resonator gyroscope by combining an excitation signal of an excitation electrode of the hemispherical resonator gyroscope;
In some embodiments of the application, the output signal is an output signal that is responsive to a test signal of the natural resonant frequency of the hemispherical resonator gyroscope, the test signal being a vibration signal applied to the hemispherical resonator gyroscope for a set length of time, typically 3 seconds, the decay time constant being independent of the magnitude of the vibration intensity, a drive intensity, for example a drive vibration intensity of a 10V voltage output, may be set for ease of sampling. The sampling frequency may be a set frequency of the driving pump signal, and the sampling time may be set according to the sampling frequency.
Optionally, as an optional embodiment, the frequency of the excitation signal of the excitation electrode is at least one of the following: the sum of the coupling modes, the frequency multiplication, the secondary frequency and the frequency sidebands. The parameter excitation is realized by applying alternating excitation voltage to the annular electrode around the harmonic oscillator, the frequency of the voltage is the same as the second-order natural frequency of the harmonic oscillator, and the function of the parameter excitation is to constantly supplement energy to the harmonic oscillator so that the radial vibration displacement is always in a certain resonance state.
S105, under the condition that the reference quality factor and the real-time quality factor of the hemispherical resonator gyroscope meet a third preset condition, the improvement of the real-time quality factor of the hemispherical resonator gyroscope is determined to be completed.
In some embodiments of the application, when an excitation signal for exciting electrodes is applied to the inner edge of the hemispherical resonator gyroscope, the energy of the steered mode around the natural angular frequency is enhanced and the quality factor is increased due to the internal coupling effect between the different modes of the hemispherical resonator gyroscope. By edge excitation, the quality factor of the hemispherical resonator gyroscope can be improved, so that the mechanical sensitivity of the gyroscope is improved. Alternatively, the difference between the frequency of the driving pump signal and the frequency of the output signal satisfying the first preset condition may include, but is not limited to, the difference between the frequency of the driving pump signal and the frequency of the output signal being less than 2MHz. It should be understood that the above 2MHz is only an example, and the specific values thereof are not limited in any way by the embodiments of the present application. Analyzing the driving pump signal of the hemispherical resonator gyroscope to obtain a vibration amplitude of the hemispherical resonator gyroscope in a driving mode, wherein the vibration amplitude of the hemispherical resonator gyroscope meets a second preset condition and can include, but is not limited to, the vibration amplitude of the hemispherical resonator gyroscope being smaller than 10m/s P. It should be understood that the above 10m/s, P is only an example, and the specific numerical values of the embodiment of the present application are not limited in any way.
In some embodiments of the present application, the driving pump signal may be used as an excitation signal to excite the harmonic oscillator, the sensor detects the output signal of the harmonic oscillator and analyzes the output signal to obtain an amplitude-frequency response curve of the harmonic oscillator, the stepping motor is used to control the turntable to drive the harmonic oscillator to rotate, and the amplitude-frequency response curve is measured and analyzed at intervals of a preset angle, so as to obtain the quality factor of the hemispherical resonator gyroscope, and the circumference distribution curve of the quality factor of the harmonic oscillator is obtained according to the relation between the rotating angle and the quality factor. The reference figure of merit and the real-time figure of merit for the hemispherical resonator gyroscope meeting a third preset condition may include, but is not limited to, a difference between the reference figure of merit and the real-time figure of merit for the hemispherical resonator gyroscope being less than a preset difference. Under the condition that the difference value between the reference quality factor and the real-time quality factor of the hemispherical resonator gyroscope is smaller than a preset difference value, the quality factors after trimming of the resonators are distributed uniformly along with the circumference, and the real-time quality factor of the hemispherical resonator gyroscope can be effectively improved.
Based on the embodiment provided by the application, after the driving pump signal is applied to the hemispherical resonator gyroscope, the frequency of the driving pump signal and the frequency of the output signal are compared, and under the condition that the difference value between the frequency of the driving pump signal and the frequency of the output signal meets a first preset condition, the phase of the driving pump signal is adjusted to a preset interval until the vibration amplitude of the hemispherical resonator gyroscope meets a second preset condition, the output signal and the driving pump signal are demodulated, and the reference quality factor of the hemispherical resonator gyroscope is determined by combining the excitation signal of the excitation electrode of the hemispherical resonator gyroscope; under the condition that the reference quality factor and the real-time quality factor of the hemispherical resonator gyroscope meet a third preset condition, the improvement of the real-time quality factor of the hemispherical resonator gyroscope is confirmed to be completed, so that the improvement of the real-time quality factor of the hemispherical resonator gyroscope is realized, and the overall performance of the hemispherical resonator gyroscope is further improved.
Optionally, as an alternative embodiment, the real-time quality factor of the hemispherical resonator gyroscope is obtained based on the following manner: calculating the decay time constant of the driving pump signal; demodulating the output signal and the driving pump signal, and determining the real-time quality factor of the hemispherical resonator gyroscope by combining the attenuation time constant.
Alternatively, as an alternative embodiment, the excitation signal of the excitation electrode is applied to the inner edge of the hemispherical resonator gyroscope.
Optionally, as an alternative embodiment, the driving pump parameter is adjusted in case the reference figure of merit and the real-time figure of merit of the hemispherical resonator gyroscope do not meet a third preset condition.
Alternatively, as an alternative embodiment, the preset sampling frequency is 500KHz to 2MHz. In the foregoing embodiments of the present application, the descriptions of the embodiments are emphasized, and for a portion of this disclosure that is not described in detail in this embodiment, reference is made to the related descriptions of other embodiments.
It should be noted that, for simplicity of description, the foregoing embodiments are all illustrated as a series of acts, but it should be understood by those skilled in the art that the present application is not limited by the order of acts, as some steps may be performed in other order or concurrently in accordance with the present application. Further, those skilled in the art will also appreciate that the embodiments described in the specification are all preferred embodiments, and that the acts and modules referred to are not necessarily required for the present application.
The foregoing detailed description of the invention has been presented for purposes of illustration and description, and it should be understood that the invention is not limited to the particular embodiments disclosed, but is intended to cover all modifications, equivalents, alternatives, and improvements within the spirit and principles of the invention.
Claims (5)
1. A method of improving the quality factor of a hemispherical resonator gyroscope, comprising:
applying a driving pump signal to the hemispherical resonator gyroscope, wherein driving pump parameters corresponding to the driving pump signal are set based on a parameter amplification effect;
sampling at a preset sampling frequency to obtain an output signal of the hemispherical resonator gyroscope;
comparing the frequency of the driving pumping signal with the frequency of the output signal, and adjusting the phase of the driving pumping signal to a preset interval until the vibration amplitude of the hemispherical resonator gyroscope meets a second preset condition under the condition that the difference between the frequency of the driving pumping signal and the frequency of the output signal meets a first preset condition;
Demodulating the output signal and the driving pumping signal, and determining a reference quality factor of the hemispherical resonator gyroscope by combining an excitation signal of an excitation electrode of the hemispherical resonator gyroscope;
Determining that the improvement of the real-time quality factor of the hemispherical resonator gyroscope is completed under the condition that the reference quality factor and the real-time quality factor of the hemispherical resonator gyroscope meet a third preset condition;
Wherein the first preset condition includes, but is not limited to, a difference between a frequency of the driving pump signal and a frequency of the output signal being less than 2MHz; the second preset condition includes, but is not limited to, the vibration amplitude of the hemispherical resonator gyroscope being less than 10m/s, P; the third preset condition includes, but is not limited to, a difference between the reference figure of merit and the real-time figure of merit of the hemispherical resonator gyroscope being less than a preset difference;
The real-time quality factor of the hemispherical resonator gyroscope is derived based on:
calculating the decay time constant of the driving pump signal;
Demodulating the output signal and the driving pump signal, and determining the real-time quality factor of the hemispherical resonator gyroscope in combination with the decay time constant.
2. The method of improving the quality factor of a hemispherical resonator gyroscope of claim 1,
The excitation signal of the excitation electrode is applied to the inner edge of the hemispherical resonator gyroscope.
3. The method of improving the quality factor of a hemispherical resonator gyroscope of claim 1,
And adjusting the driving pumping parameters under the condition that the reference quality factor and the real-time quality factor of the hemispherical resonator gyroscope do not meet the third preset condition.
4. The method of improving the quality factor of a hemispherical resonator gyroscope of claim 1,
The preset sampling frequency is 500KHz to 2MHz.
5. The method of improving the quality factor of a hemispherical resonator gyroscope of claim 1,
The frequency of the excitation signal of the excitation electrode is at least one of the following: the sum of the coupling modes, the frequency multiplication, the secondary frequency and the frequency sidebands.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410437305.2A CN118032015B (en) | 2024-04-12 | 2024-04-12 | Method for improving quality factor of hemispherical resonator gyroscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410437305.2A CN118032015B (en) | 2024-04-12 | 2024-04-12 | Method for improving quality factor of hemispherical resonator gyroscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN118032015A CN118032015A (en) | 2024-05-14 |
| CN118032015B true CN118032015B (en) | 2024-06-11 |
Family
ID=90986241
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202410437305.2A Active CN118032015B (en) | 2024-04-12 | 2024-04-12 | Method for improving quality factor of hemispherical resonator gyroscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN118032015B (en) |
Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5444639A (en) * | 1993-09-07 | 1995-08-22 | Rockwell International Corporation | Angular rate sensing system and method, with digital synthesizer and variable-frequency oscillator |
| JP2003121156A (en) * | 2001-10-19 | 2003-04-23 | Matsushita Electric Ind Co Ltd | Drive method and adjustment method of vibration gyro |
| DE102006015984A1 (en) * | 2006-04-05 | 2007-10-11 | Siemens Ag | Method for operating a vibration gyro and sensor arrangement |
| CN108844531A (en) * | 2018-04-03 | 2018-11-20 | 清华大学 | The fast start-up control method and device of high q-factor microelectromechanicgyroscope gyroscope |
| CN111536994A (en) * | 2020-04-29 | 2020-08-14 | 中国人民解放军国防科技大学 | Resonant micro gyroscope multi-mode cooperative control method and system and resonant micro gyroscope |
| WO2021227013A1 (en) * | 2020-05-11 | 2021-11-18 | 中国科学院地质与地球物理研究所 | Solid-state resonant gyroscope self-calibration method and system |
| CN115388910A (en) * | 2022-07-28 | 2022-11-25 | 西北工业大学 | Hemispherical resonant gyro error self-excitation method and system |
| CN115540903A (en) * | 2022-09-14 | 2022-12-30 | 哈尔滨工业大学 | Method and system for correcting and adjusting non-uniform damping and rigidity of hemispherical resonator gyroscope |
| CN115824263A (en) * | 2023-02-13 | 2023-03-21 | 中国船舶集团有限公司第七〇七研究所 | Damping trimming method and system based on hemispherical resonator gyroscope |
| CN116046016A (en) * | 2022-12-30 | 2023-05-02 | 北京自动化控制设备研究所 | Hemispherical resonator gyro control circuit phase lag compensation method |
| CN116734820A (en) * | 2023-05-15 | 2023-09-12 | 武汉华中旷腾光学科技有限公司 | Hemispherical resonant gyroscope and excitation detection method thereof |
| CN117330044A (en) * | 2023-11-27 | 2024-01-02 | 四川图林科技有限责任公司 | Hemispherical harmonic oscillator standing wave output electric signal demodulation method of hemispherical harmonic oscillator |
| CN117629163A (en) * | 2023-11-27 | 2024-03-01 | 浙江大学 | MEMS gyroscope mode matching method and angular velocity reading method based on dual-mode simultaneous excitation |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9464899B2 (en) * | 2013-01-25 | 2016-10-11 | MCube Inc. | Method of reducing gyroscope oscillator start-up time and device therefor |
| US9917571B2 (en) * | 2014-06-13 | 2018-03-13 | Georgia Tech Research Corporation | Resonant gyroscopes and methods of making and using the same |
| WO2016164543A1 (en) * | 2015-04-07 | 2016-10-13 | Analog Devices, Inc. | Quality factor estimation for resonators |
| JP6571064B2 (en) * | 2016-11-21 | 2019-09-04 | 株式会社東芝 | Detection device and sensor device |
| US10578435B2 (en) * | 2018-01-12 | 2020-03-03 | Analog Devices, Inc. | Quality factor compensation in microelectromechanical system (MEMS) gyroscopes |
-
2024
- 2024-04-12 CN CN202410437305.2A patent/CN118032015B/en active Active
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5444639A (en) * | 1993-09-07 | 1995-08-22 | Rockwell International Corporation | Angular rate sensing system and method, with digital synthesizer and variable-frequency oscillator |
| JP2003121156A (en) * | 2001-10-19 | 2003-04-23 | Matsushita Electric Ind Co Ltd | Drive method and adjustment method of vibration gyro |
| DE102006015984A1 (en) * | 2006-04-05 | 2007-10-11 | Siemens Ag | Method for operating a vibration gyro and sensor arrangement |
| CN108844531A (en) * | 2018-04-03 | 2018-11-20 | 清华大学 | The fast start-up control method and device of high q-factor microelectromechanicgyroscope gyroscope |
| CN111536994A (en) * | 2020-04-29 | 2020-08-14 | 中国人民解放军国防科技大学 | Resonant micro gyroscope multi-mode cooperative control method and system and resonant micro gyroscope |
| WO2021227013A1 (en) * | 2020-05-11 | 2021-11-18 | 中国科学院地质与地球物理研究所 | Solid-state resonant gyroscope self-calibration method and system |
| CN115388910A (en) * | 2022-07-28 | 2022-11-25 | 西北工业大学 | Hemispherical resonant gyro error self-excitation method and system |
| CN115540903A (en) * | 2022-09-14 | 2022-12-30 | 哈尔滨工业大学 | Method and system for correcting and adjusting non-uniform damping and rigidity of hemispherical resonator gyroscope |
| CN116046016A (en) * | 2022-12-30 | 2023-05-02 | 北京自动化控制设备研究所 | Hemispherical resonator gyro control circuit phase lag compensation method |
| CN115824263A (en) * | 2023-02-13 | 2023-03-21 | 中国船舶集团有限公司第七〇七研究所 | Damping trimming method and system based on hemispherical resonator gyroscope |
| CN116734820A (en) * | 2023-05-15 | 2023-09-12 | 武汉华中旷腾光学科技有限公司 | Hemispherical resonant gyroscope and excitation detection method thereof |
| CN117330044A (en) * | 2023-11-27 | 2024-01-02 | 四川图林科技有限责任公司 | Hemispherical harmonic oscillator standing wave output electric signal demodulation method of hemispherical harmonic oscillator |
| CN117629163A (en) * | 2023-11-27 | 2024-03-01 | 浙江大学 | MEMS gyroscope mode matching method and angular velocity reading method based on dual-mode simultaneous excitation |
Non-Patent Citations (2)
| Title |
|---|
| 一种硅MEMS陀螺谐振频率与Q值的快速测量方法;卜峰;徐大诚;赵鹤鸣;;中国惯性技术学报;20180215(第01期);133-140 * |
| 半球谐振陀螺仪谐振子品质因数不均匀引起的误差分析;李巍;任顺清;王常虹;;航空学报;20130125(第01期);121-129 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN118032015A (en) | 2024-05-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104976995B (en) | Become the nested ring type MEMS oscillation gyros of resonant ring wall thickness | |
| KR100486129B1 (en) | A angular rate sensor | |
| Nitzan et al. | Epitaxially-encapsulated polysilicon disk resonator gyroscope | |
| US6629460B2 (en) | Isolated resonator gyroscope | |
| CN101968359B (en) | Campaniform oscillator type angular rate gyroscope | |
| CN108613669A (en) | Regular polygon plate-like MEMS resonant gyro | |
| US20060070440A1 (en) | Isolated resonator gyroscope with a drive and sense plate | |
| CN109945894A (en) | The installation error compensation method of hemispherical resonant gyro harmonic oscillator and outer frame | |
| CN109839104A (en) | The MEMS gyroscope substantially symmetrical about its central axis of the more sensing units of single-chip | |
| CN1008399B (en) | Dither suspension mechanism for a ring laser angular rate sensor | |
| CN115574798B (en) | Method for improving comprehensive performance of hemispherical resonator gyroscope | |
| CN105203132A (en) | Output frequency detection method of resonant mode vibrating gyro | |
| CN103644901B (en) | For assembling jig and the assembly detection system of the responsive gauge outfit of hemispherical reso nance gyroscope | |
| CN113686326B (en) | Fused quartz micromechanical gyroscope with in-plane sensitive axis and preparation method thereof | |
| CN117330044A (en) | Hemispherical harmonic oscillator standing wave output electric signal demodulation method of hemispherical harmonic oscillator | |
| US6698287B2 (en) | Microgyro tuning using focused ion beams | |
| CN115248051A (en) | Device and method for determining unbalanced mass of harmonic oscillator of micro-hemispherical gyroscope | |
| CN118032015B (en) | Method for improving quality factor of hemispherical resonator gyroscope | |
| CN115950451A (en) | Damping uneven drift compensation method for full-angle hemispherical resonant gyroscope | |
| Hu et al. | Precise dynamic mass-stiffness balancing of cylindrical shell vibrating gyroscope along working modal axis | |
| US20030019296A1 (en) | Nuclear radiation hard high accuracy rotation sensor system | |
| RU151978U1 (en) | SENSITIVE ELEMENT OF A WAVE SOLID GYROSCOPE | |
| CN117928605B (en) | Error analysis method for hemispherical resonator gyro quadrature control | |
| US20040118204A1 (en) | Vibratory gyroscopic rate sensor | |
| Gallacher et al. | Initial test results from a 3-axis vibrating ring gyroscope |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |