CN117629163A - MEMS gyroscope mode matching method and angular velocity reading method based on dual-mode simultaneous excitation - Google Patents
MEMS gyroscope mode matching method and angular velocity reading method based on dual-mode simultaneous excitation Download PDFInfo
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Abstract
The invention discloses a MEMS gyroscope mode matching method and an angular velocity reading method based on dual-mode simultaneous excitation, and belongs to the field of micro-mechanical gyroscopes. According to the characteristic that the resonance frequencies of two working modes of the gyroscope can be directly read when the two working modes are excited at the same time, the resonance frequency difference value of the two working modes is obtained, frequency trimming is carried out according to the resonance frequency difference value, and finally, the resonance frequency difference value of the two working modes is zero, namely, the resonance frequencies of the two working modes are equal, and finally, mode matching is realized. After mode matching is achieved, by locking the difference between the vibration phases of the two working modes to a specific constant value, an angular velocity output with optimal accuracy can be obtained from the vibration displacement amplitudes or driving force amplitudes of the two working modes.
Description
Technical Field
The invention relates to the field of micro-mechanical gyroscopes, in particular to a MEMS gyroscope mode matching method and an angular velocity reading method based on dual-mode simultaneous excitation.
Background
The way in which micromechanical gyroscopes detect angular velocity is typically based on amplitude modulation. When the micromechanical gyroscope based on amplitude modulation works, a driving mode is excited in a resonance state, when external angular velocity is input, coriolis force related to the angular velocity can be generated on a detection mode due to coriolis effect, and then vibration displacement is generated on the detection mode, and the angular velocity can be read out through the vibration displacement of the detection mode. When the resonance frequencies of the driving mode and the detection mode are equal, the detection mode vibration displacement caused by the unit angular velocity is the largest, the noise equivalent angular velocity is the smallest, and the accuracy of the angular velocity output is the highest.
After the actual processing of the micromechanical gyroscope, the resonance frequencies of the driving mode and the detection mode in the initial state are often not equal due to processing errors or the like. By applying a tuning voltage to the tuning electrode on the micromechanical gyroscope, the resonant frequencies of the drive mode and the detection mode can be manually changed, respectively, and the resonant frequencies of the drive mode and the detection mode can be tuned to be consistent by the tuning electrode when the resonant frequencies of the drive mode and the detection mode are known.
The off-line frequency calibration of the micro-mechanical gyroscope is that when the micro-mechanical gyroscope does not work, the resonant frequencies of a driving mode and a detection mode are measured in advance, and frequency trimming is carried out by applying fixed tuning voltage on a tuning electrode, so that mode matching is realized. However, when the micro-mechanical gyroscope is actually operated, the resonance frequencies of the driving mode and the detection mode may be changed due to factors such as environment, so that the micro-mechanical gyroscope cannot keep a mode matching state.
The on-line frequency calibration of the micro-mechanical gyroscope can change the tuning voltage applied to the tuning electrode in real time by utilizing the characterization quantity for characterizing the difference value of the resonance frequency of the driving mode and the detection mode when the micro-mechanical gyroscope works, so that the tuning voltage can be correspondingly changed no matter how the environmental factors change, and the micro-mechanical gyroscope is still in a mode matching state. The current common online frequency calibration technology relies on applying a disturbance signal on a detection mode, and the displacement response of the disturbance signal on the detection mode is detected to obtain a characterization quantity for characterizing the difference value between the resonance frequencies of a driving mode and the detection mode.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention discloses a MEMS gyroscope mode matching method and an angular velocity reading method based on dual-mode simultaneous excitation, and belongs to the field of micro-mechanical gyroscopes. According to the characteristic that the resonance frequencies of the two working modes of the gyroscope can be directly read when the two working modes are excited at the same time, the resonance frequency difference value of the two working modes is directly obtained, frequency trimming is carried out, and finally the resonance frequencies of the two working modes are equal, so that mode matching is realized. After mode matching is achieved, by locking the difference between the vibration phases of the two working modes to a specific constant value, an angular velocity output with optimal accuracy can be obtained from the vibration displacement amplitudes or driving force amplitudes of the two working modes.
The technical scheme adopted by the invention is as follows:
the invention provides a MEMS gyroscope mode matching method based on dual-mode simultaneous excitation, which comprises the following steps of;
1) The X mode of the MEMS gyroscope is actively driven by the X mode driving force to generate a vibration displacement signal;
2) Extracting vibration phase information and vibration amplitude information according to the vibration displacement signal in the step 1); obtaining the frequency for generating the X-mode driving force according to the obtained vibration phase, the preset reference vibration phase and the set X-mode initial driving force frequency; obtaining the amplitude for generating the X-mode driving force according to the obtained vibration amplitude, the preset reference vibration amplitude and the set X-mode initial driving force amplitude;
3) The X-mode driving force generation module generates electrostatic force with corresponding frequency and amplitude according to the frequency output of the X-mode phase-locked loop module and the amplitude output of the X-mode automatic gain control module; when the X-mode phase-locked loop is closed, the final frequency output of the X-mode phase-locked loop module is equal to the resonant frequency of the X-mode, at the moment, the X-mode is in a resonant state, and when the X-mode automatic gain control is closed, the vibration amplitude of the X-mode is equal to the reference vibration amplitude; 4) The Y mode of the MEMS gyroscope is actively driven by the Y mode driving force to generate a vibration displacement signal;
5) Extracting vibration phase information and vibration amplitude information according to the vibration displacement signal in the step 4); obtaining the frequency for generating the Y-mode driving force according to the vibration phase, the preset reference vibration phase and the set Y-mode initial driving force frequency; obtaining the amplitude for generating the Y-mode driving force according to the vibration amplitude, the preset reference vibration amplitude and the set Y-mode initial driving force amplitude;
6) The Y-mode driving force generation module generates electrostatic force with corresponding frequency and amplitude according to the frequency output of the Y-mode phase-locked loop module and the amplitude output of the Y-mode automatic gain control module; when the Y-mode phase-locked loop is closed, the final frequency output of the Y-mode phase-locked loop module is equal to the resonant frequency of the Y mode, and the Y mode is in a resonant state at the moment; when the Y-mode automatic gain control is closed-loop, the Y-mode vibration amplitude is equal to the reference vibration amplitude;
7) Obtaining a resonance frequency difference value between the X mode and the Y mode according to the resonance frequency of the X mode obtained in the step 3) and the resonance frequency of the Y mode obtained in the step 6), obtaining a tuning voltage output quantity by the difference value through a PI controller, and acting on a tuning electrode of the micromechanical gyroscope so as to change the resonance frequency difference value between the X mode and the Y mode; when the tuning loop is closed-loop, the resonance frequency difference between the final X mode and the Y mode is trimmed to zero, and at the moment, the X mode resonance frequency is equal to the Y mode resonance frequency, and the micromechanical gyroscope is in a mode matching state.
The invention further provides an angular velocity reading method based on the MEMS gyroscope mode matching method, when the micro-mechanical gyroscope is in a mode matching state, the vibration phase difference value between the X mode and the Y mode is locked to be a set constant value (0 degrees or 180 degrees);
when external angular velocity is input, the X mode can generate the Coriolis force with the same phase as that of the Y mode driving force on the Y mode due to the Coriolis effect, the Y mode can generate the Coriolis force with the same phase as that of the X mode driving force on the X mode, and the amplitude of the Coriolis force is related to the external input angular velocity;
when the automatic amplitude gain modules of the X mode and the Y mode are opened, the Coriolis force can cause the change of the vibration amplitude of the X mode and the Y mode, and the vibration amplitude can be used for representing the external input angular speed; when the automatic amplitude gain modules of the X mode and the Y mode are closed-loop, in order to enable the vibration amplitude of the X mode and the Y mode to be equal to the reference vibration amplitude, the amplitude output of the automatic gain module is changed, so that the driving force generated by the driving force generation module can counteract the Coriolis force, and the external input angular speed can be represented by using the amplitude of the driving force; therefore, the angular velocity output with the best accuracy can be obtained from the vibration displacement amplitudes or the driving force amplitudes of the X mode and the Y mode. The invention also provides a MEMS gyroscope mode matching control system based on dual-mode simultaneous excitation, which comprises:
the X-mode driving force generation module is used for generating an X mode of the electrostatic force driven MEMS gyroscope according to the input frequency and amplitude;
the X-mode amplitude-phase extraction module is used for extracting and obtaining vibration phase information and vibration amplitude information according to the X-mode vibration displacement signal of the MEMS gyroscope;
the X-mode phase-locked loop module obtains a frequency output correction amount by an internal PI controller according to the difference value between the vibration phase obtained by the X-mode amplitude-phase extraction module and a preset reference vibration phase; adding the frequency output correction quantity and the set frequency of the X-mode initial driving force to obtain frequency output, wherein the frequency output is used as the frequency for generating the X-mode driving force and is output to an X-mode driving force generation module and a frequency trimming module;
the X-mode automatic gain control module obtains an amplitude output correction amount by an internal PI controller according to the difference value between the vibration amplitude obtained by the X-mode amplitude-phase extraction module and a preset reference vibration amplitude; adding the amplitude output correction quantity and the set X-mode initial driving force amplitude to obtain an amplitude output, wherein the amplitude output is used as the amplitude for generating the X-mode driving force and is output to an X-mode driving force generation module;
the Y-mode driving force generation module is used for generating an electrostatic force to drive a Y mode of the MEMS gyroscope according to the input frequency and amplitude;
the Y-mode amplitude-phase extraction module is used for extracting and obtaining vibration phase information and vibration amplitude information according to a Y-mode vibration displacement signal of the MEMS gyroscope;
the Y-mode phase-locked loop module obtains a frequency output correction amount by an internal PI controller according to the difference value between the vibration phase obtained by the Y-mode amplitude-phase extraction module and a preset reference vibration phase; adding the frequency output correction quantity and the set Y-mode initial driving force frequency to obtain frequency output, wherein the frequency output is used as the frequency for generating Y-mode driving force and is output to a Y-mode driving force generation module and a frequency trimming module;
the Y-mode automatic gain control module obtains an amplitude output correction amount by an internal PI controller according to the difference value between the vibration amplitude obtained by the Y-mode amplitude-phase extraction module and a preset reference vibration amplitude; adding the amplitude output correction quantity and the set Y-mode initial driving force amplitude to obtain an amplitude output, wherein the amplitude output is used as the amplitude for generating Y-mode driving force and is output to a Y-mode driving force generation module;
the frequency trimming module obtains a resonant frequency difference value between the X mode and the Y mode according to the resonant frequency of the X mode and the resonant frequency of the Y mode, and the difference value obtains a tuning voltage output quantity through an internal PI controller and acts on a tuning electrode of the micromechanical gyroscope so as to change the resonant frequency difference value between the X mode and the Y mode.
Compared with the prior art, the invention has the beneficial effects that:
the mode matching is realized by a mode of dual-mode simultaneous excitation. Compared with the existing technology for realizing mode matching by injecting disturbance signals, the method does not need to additionally introduce disturbance signals outside the working bandwidth of the micromechanical gyroscope, namely, the final angular velocity output is not interfered; meanwhile, compared with the prior art, the invention has the advantages that as the two modes are actively excited, the accuracy of the resonant frequencies of the two working modes output by the phase-locked loop is higher, the input quantity accuracy of the tuning loop is higher, and the accuracy of the input quantity of the tuning loop is lower because the disturbance signal is outside the working bandwidth of the micromechanical gyroscope in the prior art, and the accuracy of the input quantity of the tuning loop determines the accuracy of the mode matching, the invention can also realize higher mode matching accuracy. When the micromechanical gyroscope is in a mode matching state, by locking the vibration phase difference value between the X mode and the Y mode to a specific constant value, the angular velocity output with the best precision can be obtained from the vibration displacement amplitude or the driving force amplitude of the two working modes.
Drawings
FIG. 1 is a schematic diagram of a control system of an alternative MEMS gyroscope mode matching method based on dual mode simultaneous excitation.
Fig. 2 is a plot of amplitude-frequency response between force and displacement for the micromechanical gyroscope operating mode.
Detailed Description
The present invention will now be described in further detail with reference to the drawings and formulas. It should be understood that the principles herein are for purposes of illustration and not limitation.
As shown in FIG. 1, an optional MEMS gyroscope mode matching control system based on dual-mode simultaneous excitation is provided, wherein the components in the system comprise an MEMS gyroscope, an X-mode amplitude-phase extraction module, an X-mode automatic gain control module, an X-mode phase-locked loop module, an X-mode driving force generation module, a Y-mode amplitude-phase extraction module, a Y-mode automatic gain control module, a Y-mode phase-locked loop module, a Y-mode driving force generation module and a frequency trimming module. The modules may be implemented in analog circuitry or in digital circuitry. The MEMS gyroscope is provided with tuning electrodes in an X mode and a Y mode, namely the MEMS gyroscope has the following functions: (1) A voltage is applied to one electrode, and corresponding electrostatic force is generated on the gyroscope mass block along the X mode direction. (2) When the gyroscope mass block has certain displacement along the X-mode direction, the capacitance value between certain two electrodes of the gyroscope changes. (3) And applying voltage to the X-mode tuning electrode, and correspondingly changing the rigidity of the X-mode of the gyroscope. (4) A voltage is applied to one electrode, and corresponding electrostatic force is generated on the gyroscope mass block along the Y mode direction. (5) When the gyroscope mass block has certain displacement along the Y mode direction, the capacitance value between certain two electrodes of the gyroscope changes. (6) And applying voltage to the Y-mode tuning electrode, and correspondingly changing the rigidity of the Y mode of the gyroscope.
The X-mode driving force generation module generates an X-mode of the electrostatic force driving MEMS gyroscope, so that an X-mode vibration displacement signal is generated; the X-mode amplitude-phase extraction module extracts X-mode vibration displacement signals to obtain vibration displacement phase information and vibration displacement amplitude information; the X-mode phase-locked loop module obtains the frequency output of the X-mode phase-locked loop according to the vibration displacement phase information, specifically, the difference value between the vibration displacement phase (vibration phase) and the preset reference vibration displacement phase passes through a PI controller in the module to obtain the frequency output correction quantity of the X-mode phase-locked loop module, and the frequency output correction quantity is added with the set X-mode initial driving force frequency to be used as the frequency output of the X-mode phase-locked loop module; the X-mode automatic gain control module obtains the amplitude output of the X-mode automatic gain control module according to the vibration displacement amplitude information, specifically, the difference value between the vibration displacement amplitude (vibration amplitude) and the preset reference vibration displacement amplitude is passed through a PI controller in the module to obtain the amplitude output correction quantity of the X-mode automatic gain control module, and the amplitude output correction quantity is added with the set X-mode initial driving force amplitude to be used as the amplitude output of the X-mode automatic gain control module; the X-mode driving force generation module generates electrostatic force according to the frequency output of the X-mode phase-locked loop and the amplitude output of the X-mode automatic gain control module; the Y-mode driving force generation module generates an electrostatic force to drive a Y mode of the MEMS gyroscope, so that a Y-mode vibration displacement signal is generated; the Y-mode amplitude-phase extraction module extracts Y-mode vibration displacement signals to obtain vibration displacement phase information and vibration displacement amplitude information; the Y-mode phase-locked loop module obtains the frequency output of the Y-mode phase-locked loop according to the vibration displacement phase information, specifically, the difference value between the vibration displacement phase (vibration phase) and the preset reference vibration displacement phase passes through a PI controller in the module to obtain the frequency output correction quantity of the Y-mode phase-locked loop module, and the frequency output correction quantity is added with the set frequency of the Y-mode initial driving force to be used as the frequency output of the Y-mode phase-locked loop module; the Y-mode automatic gain control module obtains the amplitude output of the Y-mode automatic gain control module according to the vibration displacement amplitude information, specifically, the difference value between the vibration displacement amplitude (vibration amplitude) and the preset reference vibration displacement amplitude is passed through a PI controller in the module to obtain the amplitude output correction quantity of the Y-mode automatic gain control module, and the amplitude output correction quantity is added with the set Y-mode initial driving force amplitude to be used as the amplitude output of the Y-mode automatic gain control module; and the Y-mode driving force generation module generates electrostatic force according to the frequency output of the Y-mode phase-locked loop and the amplitude output of the Y-mode automatic gain control module.
And (3) frequency trimming, namely obtaining tuning voltage output by the tuning module through the PI controller according to the obtained X-mode resonance frequency and Y-mode resonance frequency. Acting on the tuning electrode of the micromechanical gyroscope, thereby changing the resonance frequency difference between the X mode and the Y mode. When the tuning loop is closed-loop, the resonance frequency difference between the final X mode and the Y mode is trimmed to zero, and at the moment, the X mode resonance frequency is equal to the Y mode resonance frequency, and the micromechanical gyroscope is in a mode matching state.
Based on the system provided by the embodiment, the MEMS gyroscope mode matching method based on the dual-mode simultaneous excitation can be implemented according to the following process:
1) The X mode of the MEMS gyroscope is actively driven by the electrostatic force generated by the X mode driving force generating module to generate vibration displacement;
2) The vibration displacement signal of the X mode of the MEMS gyroscope is converted into a voltage signal, vibration phase information and vibration amplitude information are obtained through extraction of an X mode amplitude-phase extraction module, wherein a difference value between a vibration phase and a preset reference vibration phase passes through a PI controller in the X mode phase-locked loop module to obtain a frequency output correction amount of the X mode phase-locked loop module, and the frequency output correction amount is added with the set frequency of the X mode initial driving force to be used as frequency output of the X mode phase-locked loop module, namely, the frequency of the X mode driving force is generated; the difference between the vibration amplitude and the preset reference vibration amplitude passes through a PI controller in the X-mode automatic gain control module to obtain an amplitude output correction quantity of the X-mode automatic gain control module, and the amplitude output correction quantity is added with the set X-mode initial driving force amplitude to be used as the amplitude output of the X-mode automatic gain control module, namely, the amplitude of the X-mode driving force is generated;
3) Generating electrostatic force with corresponding frequency according to the frequency output of the X-mode phase-locked loop module; when the X-mode phase-locked loop is closed, the final frequency output of the X-mode phase-locked loop module is equal to the resonant frequency of the X-mode, at the moment, the X-mode is in a resonant state, and when the X-mode automatic gain control is closed, the vibration amplitude of the X-mode is equal to the reference vibration amplitude;
4) The Y mode of the MEMS gyroscope is actively driven by the electrostatic force generated by the Y mode driving force generating module to generate vibration displacement;
5) After a Y-mode vibration displacement signal of the MEMS gyroscope is converted into a voltage signal, vibration phase information and vibration amplitude information are obtained through extraction of a Y-mode amplitude-phase extraction module, wherein a difference value between a vibration phase and a preset reference vibration phase passes through a PI controller in the Y-mode phase-locked loop module to obtain a frequency output correction amount of the Y-mode phase-locked loop module, and the frequency output correction amount is added with a set Y-mode initial driving force frequency to be used as frequency output of the Y-mode phase-locked loop module, namely as frequency for generating Y-mode driving force; the difference between the vibration amplitude and the preset reference vibration amplitude passes through a PI controller in the Y-mode automatic gain control module to obtain an amplitude output correction quantity of Y-mode automatic gain control, and the amplitude output correction quantity is added with the set Y-mode initial driving force amplitude to be used as the amplitude output of the Y-mode automatic gain control module, namely the amplitude for generating Y-mode driving force;
6) Generating electrostatic force with corresponding frequency according to the frequency output of the Y-mode phase-locked loop module; when the Y-mode phase-locked loop is closed, the final frequency output of the Y-mode phase-locked loop module is equal to the resonant frequency of the Y mode, and the Y mode is in a resonant state at the moment; when the Y-mode automatic gain control is closed-loop, the Y-mode vibration amplitude is equal to the reference vibration amplitude;
7) After the resonant frequency of the X mode and the resonant frequency of the Y mode are output through the phase-locked loop modules corresponding to each other, the resonant frequency difference between the X mode and the Y mode can be obtained, the difference is processed by a PI controller in the frequency trimming module to obtain a tuning voltage output quantity, and the tuning voltage output quantity acts on a tuning electrode of the micromechanical gyroscope, so that the resonant frequency difference between the X mode and the Y mode is changed. When the tuning loop is closed-loop, the resonance frequency difference between the final X mode and the Y mode is trimmed to zero, and at the moment, the X mode resonance frequency is equal to the Y mode resonance frequency, and the micromechanical gyroscope is in a mode matching state.
When the micromechanical gyroscope is in a mode matching state, by locking the vibration phase difference value between the X mode and the Y mode to a specific constant value, the angular velocity output with the best precision can be obtained from the vibration displacement amplitude or the driving force amplitude of the two working modes.
Specifically, when the micromechanical gyroscope is in a mode matching state, the vibration phase difference value between the X mode and the Y mode is locked to a set constant value (0 degrees or 180 degrees); when external angular velocity is input, the X mode can generate the Coriolis force with the same phase as that of the Y mode driving force on the Y mode due to the Coriolis effect, the Y mode can generate the Coriolis force with the same phase as that of the X mode driving force on the X mode, and the amplitude of the Coriolis force is related to the external input angular velocity; when the automatic amplitude gain modules of the X mode and the Y mode are opened, the Coriolis force can cause the change of the vibration amplitude of the X mode and the Y mode, and the vibration amplitude can be used for representing the external input angular speed; when the automatic amplitude gain modules of the X mode and the Y mode are closed-loop, in order to enable the vibration amplitude of the X mode and the Y mode to be equal to the reference vibration amplitude, the amplitude output of the automatic gain module is changed, so that the driving force generated by the driving force generation module can counteract the Coriolis force, and the external input angular speed can be represented by using the amplitude of the driving force; therefore, the angular velocity output with the best accuracy can be obtained from the vibration displacement amplitudes or the driving force amplitudes of the X mode and the Y mode.
As shown in fig. 2, the amplitude-frequency response curve between the force and displacement of the working mode of the micromechanical gyroscope is shown, when the amplitude of the force received by the working mode is fixed, if the frequency of the received force is equal to the resonant frequency of the working mode, the working mode will generate the largest amplitude of displacement response, for example, when the resonant frequency of the working mode is 4500Hz, the normalized amplitude of displacement response is only 0.1 when the force of 4498.1Hz is received, the normalized amplitude of displacement response is 0.3 when the force of 4499.2Hz is received, and the normalized amplitude of displacement response is 1 when the force of 4500Hz is received. When the mode matching of the two working modes is realized according to the method of the invention, the resonant frequencies of the two working modes are equal, and when the angular velocity is input, the frequency of the Coriolis force which is received by each working mode and is related to the angular velocity is equal to the resonant frequency of the working mode, so that the maximum displacement response amplitude can be obtained, and the angular velocity output with the best precision can be obtained.
The above examples merely represent several embodiments of the present invention, which are described in more detail and are not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of the invention should be assessed as that of the appended claims.
Claims (7)
1. A MEMS gyroscope mode matching method based on dual-mode simultaneous excitation is characterized by comprising the following steps of;
1) The X mode of the MEMS gyroscope is actively driven by the X mode driving force to generate a vibration displacement signal;
2) Extracting vibration phase information and vibration amplitude information according to the vibration displacement signal in the step 1); obtaining the frequency for generating the X-mode driving force according to the obtained vibration phase, the preset reference vibration phase and the set X-mode initial driving force frequency; obtaining the amplitude for generating the X-mode driving force according to the obtained vibration amplitude, the preset reference vibration amplitude and the set X-mode initial driving force amplitude;
3) The X-mode driving force generation module generates electrostatic force with corresponding frequency and amplitude according to the frequency output of the X-mode phase-locked loop module and the amplitude output of the X-mode automatic gain control module; when the X-mode phase-locked loop is closed, the final frequency output of the X-mode phase-locked loop module is equal to the resonant frequency of the X-mode, at the moment, the X-mode is in a resonant state, and when the X-mode automatic gain control is closed, the vibration amplitude of the X-mode is equal to the reference vibration amplitude; 4) The Y mode of the MEMS gyroscope is actively driven by the Y mode driving force to generate a vibration displacement signal;
5) Extracting vibration phase information and vibration amplitude information according to the vibration displacement signal in the step 4); obtaining the frequency for generating the Y-mode driving force according to the vibration phase, the preset reference vibration phase and the set Y-mode initial driving force frequency; obtaining the amplitude for generating the Y-mode driving force according to the vibration amplitude, the preset reference vibration amplitude and the set Y-mode initial driving force amplitude;
6) The Y-mode driving force generation module generates electrostatic force with corresponding frequency and amplitude according to the frequency output of the Y-mode phase-locked loop module and the amplitude output of the Y-mode automatic gain control module; when the Y-mode phase-locked loop is closed, the final frequency output of the Y-mode phase-locked loop module is equal to the resonant frequency of the Y mode, and the Y mode is in a resonant state at the moment; when the Y-mode automatic gain control is closed-loop, the Y-mode vibration amplitude is equal to the reference vibration amplitude;
7) Obtaining a resonance frequency difference value between the X mode and the Y mode according to the resonance frequency of the X mode obtained in the step 3) and the resonance frequency of the Y mode obtained in the step 6), obtaining a tuning voltage output quantity by the difference value through a PI controller, and acting on a tuning electrode of the micromechanical gyroscope so as to change the resonance frequency difference value between the X mode and the Y mode; when the tuning loop is closed-loop, the resonance frequency difference between the final X mode and the Y mode is trimmed to zero, and at the moment, the X mode resonance frequency is equal to the Y mode resonance frequency, and the micromechanical gyroscope is in a mode matching state.
2. The method for matching the mode of the MEMS gyroscope based on the dual-mode simultaneous excitation as claimed in claim 1, wherein the X-mode driving force of the step 1) is generated by an X-mode driving force generating module according to the frequency and the amplitude of the X-mode driving force generated in the step 2);
the Y-mode driving force of the step 4) is generated by a Y-mode driving force generating module according to the frequency and the amplitude of the Y-mode driving force generated in the step 5).
3. The method for matching the modes of the MEMS gyroscope based on the dual-mode simultaneous excitation according to claim 1, wherein the step 2) is specifically: the vibration displacement signal of the X mode of the MEMS gyroscope is converted into a voltage signal, vibration phase information and vibration amplitude information are obtained through extraction of an X mode amplitude-phase extraction module, wherein a difference value between the vibration phase and a preset reference vibration phase passes through a PI controller in the X mode phase-locked loop module to obtain a frequency output correction amount of the X mode phase-locked loop module, and the frequency output correction amount is added with the set frequency of the X mode initial driving force to be used as frequency output of the X mode phase-locked loop module, namely, the frequency of the X mode driving force is generated; the difference between the vibration amplitude and the preset reference vibration amplitude passes through a PI controller in the X-mode automatic gain control module to obtain an amplitude output correction quantity of the X-mode automatic gain control module, and the amplitude output correction quantity is added with the set X-mode initial driving force amplitude to be used as the amplitude output of the X-mode automatic gain control module, namely, the amplitude for generating the X-mode driving force.
4. The method for matching the modes of the MEMS gyroscope based on the dual-mode simultaneous excitation according to claim 1 or 3, wherein the step 5) is specifically: the vibration displacement signal of the Y mode of the MEMS gyroscope is converted into a voltage signal, vibration phase information and vibration amplitude information are obtained through extraction of a Y mode amplitude-phase extraction module, wherein a difference value between the vibration phase and a preset reference vibration phase passes through a PI controller in the Y mode phase-locked loop module to obtain a frequency output correction amount of the Y mode phase-locked loop module, and the frequency output correction amount is added with the set Y mode initial driving force frequency to serve as frequency output of the Y mode phase-locked loop module, namely the frequency for generating Y mode driving force; the difference between the vibration amplitude and the preset reference vibration amplitude passes through a PI controller in the Y-mode automatic gain control module to obtain an amplitude output correction quantity of the Y-mode automatic gain control, and the amplitude output correction quantity is added with the set Y-mode initial driving force amplitude to serve as the amplitude output of the Y-mode automatic gain control module, namely the amplitude for generating the Y-mode driving force.
5. An angular velocity reading method based on the MEMS gyroscope mode matching method of claim 1, wherein when the micromechanical gyroscope is in a mode matching state, the vibration phase difference value between the X mode and the Y mode is locked to a set constant value;
when external angular velocity is input, the X mode can generate the Coriolis force with the same phase as that of the Y mode driving force on the Y mode due to the Coriolis effect, the Y mode can generate the Coriolis force with the same phase as that of the X mode driving force on the X mode, and the amplitude of the Coriolis force is related to the external input angular velocity;
when the automatic amplitude gain modules of the X mode and the Y mode are opened, the Coriolis force can cause the change of the vibration amplitude of the X mode and the Y mode, and the vibration amplitude can be used for representing the external input angular speed; when the automatic amplitude gain modules of the X mode and the Y mode are closed-loop, in order to enable the vibration amplitude of the X mode and the Y mode to be equal to the reference vibration amplitude, the amplitude output of the automatic gain module is changed, so that the driving force generated by the driving force generation module can counteract the Coriolis force, and the external input angular speed can be represented by using the amplitude of the driving force; therefore, the angular velocity output with the best accuracy can be obtained from the vibration displacement amplitudes or the driving force amplitudes of the X mode and the Y mode.
6. The angular velocity reading method according to claim 5, wherein the set constant value is 0 ° or 180 °.
7. The MEMS gyroscope mode matching control system based on the dual-mode simultaneous excitation is characterized by comprising:
the X-mode driving force generation module is used for generating an X mode of the electrostatic force driven MEMS gyroscope according to the input frequency and amplitude;
the X-mode amplitude-phase extraction module is used for extracting and obtaining vibration phase information and vibration amplitude information according to the X-mode vibration displacement signal of the MEMS gyroscope;
the X-mode phase-locked loop module obtains a frequency output correction amount by an internal PI controller according to the difference value between the vibration phase obtained by the X-mode amplitude-phase extraction module and a preset reference vibration phase; adding the frequency output correction quantity and the set frequency of the X-mode initial driving force to obtain frequency output, wherein the frequency output is used as the frequency for generating the X-mode driving force and is output to an X-mode driving force generation module and a frequency trimming module;
the X-mode automatic gain control module obtains an amplitude output correction amount by an internal PI controller according to the difference value between the vibration amplitude obtained by the X-mode amplitude-phase extraction module and a preset reference vibration amplitude; adding the amplitude output correction quantity and the set X-mode initial driving force amplitude to obtain an amplitude output, wherein the amplitude output is used as the amplitude for generating the X-mode driving force and is output to an X-mode driving force generation module;
the Y-mode driving force generation module is used for generating an electrostatic force to drive a Y mode of the MEMS gyroscope according to the input frequency and amplitude;
the Y-mode amplitude-phase extraction module is used for extracting and obtaining vibration phase information and vibration amplitude information according to a Y-mode vibration displacement signal of the MEMS gyroscope;
the Y-mode phase-locked loop module obtains a frequency output correction amount by an internal PI controller according to the difference value between the vibration phase obtained by the Y-mode amplitude-phase extraction module and a preset reference vibration phase; adding the frequency output correction quantity and the set Y-mode initial driving force frequency to obtain frequency output, wherein the frequency output is used as the frequency for generating Y-mode driving force and is output to a Y-mode driving force generation module and a frequency trimming module;
the Y-mode automatic gain control module obtains an amplitude output correction amount by an internal PI controller according to the difference value between the vibration amplitude obtained by the Y-mode amplitude-phase extraction module and a preset reference vibration amplitude; adding the amplitude output correction quantity and the set Y-mode initial driving force amplitude to obtain an amplitude output, wherein the amplitude output is used as the amplitude for generating Y-mode driving force and is output to a Y-mode driving force generation module;
the frequency trimming module obtains a resonant frequency difference value between the X mode and the Y mode according to the resonant frequency of the X mode and the resonant frequency of the Y mode, and the difference value obtains a tuning voltage output quantity through an internal PI controller and acts on a tuning electrode of the micromechanical gyroscope so as to change the resonant frequency difference value between the X mode and the Y mode.
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| CN118032015B (en) * | 2024-04-12 | 2024-06-11 | 四川图林科技有限责任公司 | Method for improving quality factor of hemispherical resonator gyroscope |
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