CN117850119A - Beam deflector based on corrugated pipe structure and application method thereof - Google Patents
Beam deflector based on corrugated pipe structure and application method thereof Download PDFInfo
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- CN117850119A CN117850119A CN202311590303.9A CN202311590303A CN117850119A CN 117850119 A CN117850119 A CN 117850119A CN 202311590303 A CN202311590303 A CN 202311590303A CN 117850119 A CN117850119 A CN 117850119A
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- 238000000034 method Methods 0.000 title claims abstract description 9
- 239000005304 optical glass Substances 0.000 claims abstract description 38
- 239000012530 fluid Substances 0.000 claims abstract description 18
- 230000004044 response Effects 0.000 claims abstract description 8
- 230000005540 biological transmission Effects 0.000 claims description 13
- 239000011521 glass Substances 0.000 claims description 11
- 238000006073 displacement reaction Methods 0.000 claims description 7
- 230000009471 action Effects 0.000 claims description 6
- 229920002545 silicone oil Polymers 0.000 claims description 6
- 229920006351 engineering plastic Polymers 0.000 claims description 4
- 230000001276 controlling effect Effects 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000003491 array Methods 0.000 description 3
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- 239000007788 liquid Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 239000000741 silica gel Substances 0.000 description 2
- 229910002027 silica gel Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- QJVKUMXDEUEQLH-UHFFFAOYSA-N [B].[Fe].[Nd] Chemical compound [B].[Fe].[Nd] QJVKUMXDEUEQLH-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
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- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
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- 239000004973 liquid crystal related substance Substances 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/14—Structural association with mechanical loads, e.g. with hand-held machine tools or fans
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/035—DC motors; Unipolar motors
- H02K41/0352—Unipolar motors
- H02K41/0354—Lorentz force motors, e.g. voice coil motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/035—DC motors; Unipolar motors
- H02K41/0352—Unipolar motors
- H02K41/0354—Lorentz force motors, e.g. voice coil motors
- H02K41/0356—Lorentz force motors, e.g. voice coil motors moving along a straight path
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
The invention discloses a beam deflector based on a corrugated pipe structure and a using method thereof. The main cavity is a corrugated pipe, transparent fluid is filled in the main cavity, optical glass is packaged at the upper end and the lower end of the main cavity, the actuating part comprises an annular permanent magnet and a coil array, the annular permanent magnet is embedded at the upper end of the outer cavity as a stator, the outer cavity and the corrugated pipe are of coaxial nested structures, the coil array is fixed on a rotor support in an annular mode by a plurality of coils at equal intervals and is positioned right above the permanent magnet, the rotor support is connected with the upper end of the corrugated pipe, the rotor coil drives the corrugated pipe to deform under electromagnetic driving, the optical glass at an upper port of the corrugated pipe inclines along with the corrugated pipe, so that a light beam deflects, the size and direction of working current are controlled, the deflection angle of the light beam is continuously adjustable within-35 degrees, and the deflection direction is 360-degree omnibearing controllable within a two-dimensional plane. The beam deflector has the advantages of simple structure, high response speed, high deflection angle control precision, good stability, excellent light control capability and the like.
Description
Technical Field
The invention belongs to the technical field of optical devices, and particularly relates to a beam deflector based on a corrugated pipe structure and a using method thereof.
Background
The beam deflector is a basic and critical optical device capable of deflecting the beam as a whole at an angle for exit. The beam deflector is a core component in the application fields of laser radar detection, projection display, optical scanning and the like. The beam deflectors commonly used fall into two main categories: mechanical deflectors and non-mechanical deflectors. The mechanical deflector mainly comprises a rotary mirror, a vibrating mirror and the like, changes the path of a light beam through a physical and mechanical device, and has the defects of complex structure, huge volume, low precision, mechanical abrasion and the like.
Non-mechanical deflectors mainly include electro-optical deflectors, acousto-optic deflectors, liquid crystal beam deflectors, etc., which are realized by changing the propagation characteristics of light in a medium. With the continuous progress of technology, liquid prisms in non-mechanical deflectors are becoming hot spots, however, such deflectors are limited by the manner in which they are driven, with less ability to deflect the beam. In order to increase the beam deflection performance of the device, a multi-liquid prism based on a plurality of mutually-insoluble liquids with different refractive indexes is proposed, however, the design still has the defects of poor adaptability, caliber size limitation, reduced response speed, low efficiency, high cost, reduced deflection angle control precision, limited deflection angle and the like.
Disclosure of Invention
The invention aims to overcome the defects and shortcomings of the prior art, and provides a beam deflector based on a corrugated pipe structure and a use method thereof, which greatly improve the deflection performance of light beams and have the advantages of high response speed, high regulation precision and the like. When working current is applied to the mover coil, the mover coil drives the corrugated pipe to deform to a certain extent, and the optical glass at the upper port of the corrugated pipe also inclines to a certain extent along with the deformation of the corrugated pipe. When a beam of light exits through the inclined surface, the exiting light deviates from the direction of the original incident light. By controlling the size and distribution of the working current, the deflection angle of the light beam is continuously adjustable, and the deflection direction is controllable within 360 degrees of the two-dimensional plane.
The technical scheme adopted by the invention for solving the technical problems is as follows: the utility model provides a light beam deflector based on bellows structure, this light beam deflector divide into transmission type light beam deflector and reflection type light beam deflector, the main cavity of light beam deflector comprises bellows 7, transparent fluid 6 is filled to bellows 7 inside, both ends are by optical glass 1 encapsulation about the bellows 7, the actuating part of light beam deflector includes annular permanent magnet and coil array, annular permanent magnet is inlayed at outer chamber 4 upper end, outer chamber 4 and bellows 7 are coaxial nested structure, coil array is fixed on rotor support 5 by a plurality of coils equidistant arrangement annular, coil array is located annular permanent magnet directly over, rotor support 5 and bellows 7 upper port connection.
Further, the main cavity of the beam deflector is formed by a corrugated pipe 7, the corrugated pipe 7 is made of a silica gel material, and the elastic performance of the beam deflector is adjusted by controlling the quantity of the corrugations, the spacing of the corrugations, the thickness of the pipe wall and the Young modulus, so that the control precision and the response time are improved, and the deflection of the beam is realized. The deflection angle of the light beam is continuously adjustable by controlling the size and the distribution of the working current, and the deflection direction is controllable within 360 degrees of the two-dimensional plane.
Further, the inside of the corrugated tube 7 is filled with transparent fluid 6, and the two ends of the corrugated tube 7 are packaged with the optical glass 1.
Further, the optical glass 1 is BK7 glass or K9 glass.
Further, the transparent fluid 6 is silicone oil 8, and forms a main body part of a transmission type beam deflector together with the corrugated tube 7, the BK7 glass or the corrugated tube 7, the K9 glass, and the beam deflector is a transmission type beam deflector.
Further, the transparent fluid 6 is air 10, the optical glass 1 at the upper port of the bellows 7 is optical glass 9 plated with a total reflection film, and forms a main body part of a reflective beam deflector with the bellows 7, and the beam deflector is a reflective beam deflector.
Further, the outer cavity 4 and the rotor support 5 are made of engineering plastics PC-ABS with good impact resistance and easy processing.
Further, the annular permanent magnet is a stator permanent magnet 3, the coil array is a rotor coil array 2, and the size, the distribution and the spacing of the rotor coil array and the stator coil array are controlled to ensure that the annular permanent magnet and the coil array can generate enough driving force and movement space.
Further, the invention also provides a using method of the beam deflector based on the corrugated pipe structure, which comprises the following steps:
step 1: when working current is applied to any rotor coil in the rotor coil array 2, the rotor coil generates certain displacement under the action of Lorentz force to drive the rotor support 5 to incline, so that the corrugated pipe 7 connected with the rotor support 5 generates certain deformation;
step 2: when the corrugated pipe 7 is deformed, the optical glass 1 at the upper port of the corrugated pipe 7 is inclined to a certain extent, so that the light beam is deflected, the size and the distribution of working current in the coil array are controlled, the deflection angle of the light beam can be continuously adjusted within-35 degrees, and the deflection direction is 360-degree omnibearing controllable within a two-dimensional plane;
step 3: when the power supply to the coil array is stopped, the lorentz force is eliminated, and the corrugated tube 7 immediately restores to the original shape due to the excellent elastic performance, so that the optical glass 1, the rotor support 5 and the coil array are driven to return to the original positions.
The beneficial effects are that:
1. according to the invention, the corrugated pipe is used as the main cavity, and the corrugated pipe has the characteristics of axial expansion and radial deformation resistance, so that the corrugated pipe can deform to different degrees along any direction of a two-dimensional plane by controlling the size and distribution of working current in the coil array, and the corrugated pipe has a larger beam deflection range and a faster response speed. The design is simple in structure, can realize accurate deflection of the light beam, ensures high-precision and high-dynamic regulation and control of the light beam, and can be rapidly positioned and scanned in a large range.
2. The transmission type beam deflector based on the corrugated pipe structure, which is designed by the invention, uses the corrugated pipe as a main cavity, so that the caliber size of the transmission type beam deflector can meet various application requirements, and the problem of limited deflection angle of the existing transmission type beam deflector is solved. The magnitude and distribution of working current in the coil array are controlled, so that the deflection angle of emergent light is continuously adjustable within the range of-35 degrees to +35 degrees, and the deflection direction is 360-degree omnibearing controllable within a two-dimensional plane.
3. The reflective beam deflector based on the corrugated pipe structure, which is designed by the invention, does not need to use a complex motor driving device by virtue of the unique structural design of the corrugated pipe, and changes the inclined direction and the inclined degree of the corrugated pipe by electromagnetic driving, so that the dynamic regulation and control of the beam deflection are realized, and the beam deflection range can reach-35 degrees to +35 degrees or even higher.
Drawings
Fig. 1 is a schematic cross-sectional view of a beam deflector based on a bellows structure according to the present invention.
Identification description: 1-optical glass, 2-rotor coil arrays, 3-stator permanent magnets, 4-outer cavities, 5-rotor supports, 6-transparent fluid and 7-corrugated pipes.
Fig. 2 is a schematic cross-sectional view of a transmissive beam deflector based on a bellows structure deflected 25 ° in a 7-point orientation in accordance with an embodiment of the present invention.
Identification description: 1-optical glass, 2-rotor coil arrays, 3-stator permanent magnets, 4-outer cavities, 5-rotor supports, 7-corrugated pipes and 8-silicone oil.
FIG. 3 is a schematic cross-sectional view of a reflective beam deflector in 7-point orientation based on bellows structure according to an embodiment of the present invention.
Identification description: 2-rotor coil array, 3-stator permanent magnet, 4-outer cavity, 5-rotor bracket, 7-corrugated pipe, 9-optical glass plated with total reflection film and 10-air.
Fig. 4 is a three-dimensional perspective view of a beam deflector in a 7-point orientation based on a bellows structure according to an embodiment of the present invention.
Identification description: 1-optical glass, 2-rotor coil arrays, 3-stator permanent magnets, 4-outer cavities, 5-rotor supports, 6-transparent fluid and 7-corrugated pipes.
Detailed Description
The present invention will be further described with reference to the following detailed description of an embodiment of a beam deflector based on a bellows structure. It is noted that the following examples are given for the purpose of illustration only and are not to be construed as limiting the scope of the invention, since numerous insubstantial modifications and adaptations of the invention will be within the scope of the invention as viewed by one skilled in the art from the foregoing disclosure.
As shown in fig. 1 and 4, the invention provides a beam deflector based on a corrugated pipe structure, which is divided into a transmission beam deflector and a reflection beam deflector, wherein a main cavity of the beam deflector is formed by a corrugated pipe 7, transparent fluid 6 is filled in the corrugated pipe 7, the upper end and the lower end of the corrugated pipe 7 are encapsulated by optical glass 1, an actuating part of the beam deflector comprises an annular permanent magnet and a coil array, the annular permanent magnet is inlaid at the upper end of an outer cavity 4, the outer cavity 4 and the corrugated pipe 7 are in a coaxial nested structure, the coil array is formed by a plurality of coils which are arranged at equal intervals and are fixed on a rotor bracket 5 in an annular shape, and the rotor bracket 5 is connected with an upper port of the corrugated pipe 7.
The main cavity of the beam deflector is formed by the corrugated pipes 7, the corrugated pipes 7 are made of silica gel materials, and the elastic performance of the beam deflector is adjusted by controlling the quantity of the corrugations, the distance between the corrugations, the thickness of the pipe wall and the Young modulus, so that the control precision and the response time are improved, and the deflection of the light beam is realized. The deflection angle of the light beam is continuously adjustable by controlling the size and the distribution of the working current, and the deflection direction is controllable within 360 degrees of the two-dimensional plane.
According to the invention, transparent fluid 6 is filled in the corrugated pipe 7, and the optical glass 1 is packaged at two ends of the corrugated pipe 7.
The optical glass 1 is BK7 glass or K9 glass.
The transparent fluid 6 is silicone oil 8, and forms a main body part of a transmission type light beam deflector together with corrugated pipes 7 and BK7 glass or corrugated pipes 7 and K9 glass, wherein the light beam deflector is a transmission type light beam deflector.
The transparent fluid 6 is air 10, the optical glass 1 at the upper port of the corrugated pipe 7 is optical glass 9 plated with a total reflection film, the optical glass and the corrugated pipe 7 form a main body part of a reflective beam deflector, and the beam deflector is a reflective beam deflector.
The outer cavity 4 and the rotor support 5 are made of engineering plastics PC-ABS with good impact resistance and easy processing.
The annular permanent magnet is a stator permanent magnet 3, the coil array is a rotor coil array 2, and the size, the distribution and the spacing of the rotor coil array and the stator coil array are controlled to ensure that the annular permanent magnet and the coil array can generate enough driving force and movement space.
Example 1
As shown in fig. 2, the invention provides a transmission type beam deflector based on a corrugated pipe structure, which mainly comprises a main cavity and an actuating part, wherein the main cavity is formed by a corrugated pipe 7 filled with transparent fluid 6, the upper end and the lower end of the main cavity are respectively provided with optical glass 1, the actuating part comprises an annular permanent magnet and a coil array, the rotor coil drives the corrugated pipe 7 to deform under electromagnetic driving, the optical glass 1 at the upper end port of the corrugated pipe 7 is inclined along with the deformation, the deflection angle of a light beam is continuously adjustable within-35 degrees, and the deflection direction is 360-degree omnibearing controllable within a two-dimensional plane, and the specific scheme is as follows:
as shown in fig. 2, the main cavity of the deflector is mainly a corrugated pipe 7, transparent fluid 6 is filled in the main cavity, and the upper end and the lower end of the corrugated pipe 7 are respectively encapsulated with optical glass 1; the actuating part comprises an annular permanent magnet and a coil array, the annular permanent magnet is inlaid at the upper end of the outer cavity 4, the outer cavity 4 and the corrugated pipe 7 are of a coaxial nested structure, the coil array is fixed on the rotor support 5 in an annular mode through a plurality of coils which are arranged at equal intervals, the coil array is located right above the annular permanent magnet, the rotor support 5 is connected with an upper port of the corrugated pipe 7, working current is applied to any rotor coil through electromagnetic driving to enable the rotor support 5 to generate certain displacement under the action of Lorentz force, the rotor support 5 is driven to incline, accordingly, the corrugated pipe 7 connected with the rotor support 5 generates certain deformation, optical glass 1 at an upper port of the corrugated pipe 7 also generates certain inclination along with the deformation of the corrugated pipe 7, and when one beam of light exits through the inclined surface, the emergent light deviates from the direction of original incident light. By controlling the size and distribution of the working current, the deflection angle of the light beam is continuously adjustable, and the deflection direction is controllable within 360 degrees of the two-dimensional plane. Therefore, the deflection angle of the emergent light can be continuously adjustable within-35 degrees by controlling the working current in the appointed coil array, and the deflection direction is 360-degree omnibearing controllable within a two-dimensional plane.
The corrugated pipe 7 made of silica gel forms a main cavity part of the beam deflector, and the unique corrugated structure of the corrugated pipe improves the elastic performance and the response speed of the corrugated pipe; the corrugated pipe 7 has the characteristics of easy axial expansion and radial deformation prevention by optimally designing the corrugated density, the corrugated interval and the pipe wall thickness.
The transparent fluid 6 of the present invention is silicone oil 8 which is filled in the bellows 7 and can be kept stable for a long time in different working environments due to good optical characteristics, chemical stability, etc.
The optical glass 1 of the present invention was BK7 glass with a thickness of 1mm.
According to the invention, the outer cavity 4 and the rotor support 5 are made of engineering plastic PC-ABS with good impact resistance and easy processing, and the rotor support 5 is of an eight-tooth ring gear structure and is used for fixing a coil array. The calibration of the coil position on the ring gear is respectively marked as 1-8 points in the clockwise direction, wherein 1 point is defined as 1 point of the clock.
The annular permanent magnet is a stator permanent magnet 3, is made of high-permeability material iron neodymium boron, the coil array is a rotor coil array, and is made of pure copper, and the size, the distribution and the spacing of the rotor coil array are controlled to ensure that the annular permanent magnet and the coil array can generate enough force and displacement space.
According to the invention, electromagnetic drive is adopted in a driving mode, when working current is applied to any rotor coil in a magnetic field generated by the stator permanent magnet 3, the rotor coil generates certain displacement under the action of Lorentz force to drive the rotor support 5 to incline, so that the corrugated pipe 7 connected with the rotor support 5 generates certain degree of deformation, and the optical glass 1 at the upper port of the corrugated pipe 7 also inclines to a certain degree along with the deformation of the corrugated pipe 7, thereby realizing the deflection function of the prism on light beams.
Example two
As shown in fig. 3, the invention also provides a reflective beam deflector based on a corrugated pipe structure, wherein the upper port of a corrugated pipe 7 in the deflector is sealed by adopting optical glass 1 plated with a total reflection film, the corrugated pipe 7 is filled with air 10, and the lower port of the corrugated pipe 7 can be sealed or not. The working current is applied to any rotor coil by electromagnetic drive to enable the rotor coil to generate certain displacement under the action of Lorentz force, so that the rotor support 5 is inclined, the corrugated pipe 7 connected with the rotor support 5 is driven to generate certain deformation, the optical glass 9 plated with the total reflection film at the upper port of the corrugated pipe 7 is inclined to a certain extent along with the deformation of the corrugated pipe 7, and one beam of light is reflected from the inclined surface after entering the optical glass 9 plated with the total reflection film and the reflected light deviates from the original incident light direction. The deflection angle of the reflected light can be continuously adjustable within-35 degrees by controlling the working current in the appointed coil array, and the deflection direction is 360-degree omnibearing controllable within a two-dimensional plane.
The invention also provides a using method of the beam deflector based on the corrugated pipe structure, which comprises the following steps:
step 1: when working current is applied to any rotor coil in the rotor coil array 2, the rotor coil generates certain displacement under the action of Lorentz force to drive the rotor support 5 to incline, so that the corrugated pipe 7 connected with the rotor support 5 generates certain deformation;
step 2: when the corrugated pipe 7 is deformed, the optical glass 1 at the upper port of the corrugated pipe 7 is inclined to a certain extent, so that the light beam is deflected, the size and the distribution of working current in the coil array are controlled, the deflection angle of the light beam can be continuously adjusted within-35 degrees, and the deflection direction is 360-degree omnibearing controllable within a two-dimensional plane;
step 3: when the power supply to the coil array is stopped, the lorentz force is eliminated, and the corrugated tube 7 immediately restores to the original shape due to the excellent elastic performance, so that the optical glass 1, the rotor support 5 and the coil array are driven to return to the original positions.
The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (8)
1. The utility model provides a beam deflector based on bellows structure, its characterized in that, beam deflector divide into transmission type beam deflector and reflection type beam deflector, beam deflector's main cavity body comprises bellows (7), transparent fluid (6) are filled to bellows (7) inside, both ends are packed by optical glass (1) about bellows (7), beam deflector's actuation part includes annular permanent magnet and coil array, annular permanent magnet is inlayed in outer chamber (4) upper end, outer chamber (4) and bellows (7) are coaxial nested structure, coil array is equidistant to arrange into annular fixed on rotor support (5) by a plurality of coils, coil array is located annular permanent magnet directly over, rotor support (5) are connected with bellows (7) upper end.
2. A bellows-based beam deflector as claimed in claim 1, wherein: the main cavity of the beam deflector is formed by a corrugated pipe (7), and the elastic performance of the beam deflector is regulated by controlling the quantity of the corrugations, the spacing of the corrugations, the thickness of the pipe wall and the Young modulus, so that the control precision and the response time are improved.
3. A bellows-based beam deflector as claimed in claim 1, wherein: the transparent fluid (6) is silicone oil (8), the optical glass (1) is BK7 glass, and the beam deflector is a transmission type beam deflector.
4. A bellows-based beam deflector as claimed in claim 1, wherein: the transparent fluid (6) is silicone oil (8), the optical glass (1) is K9 glass, and the beam deflector is a transmission type beam deflector.
5. A bellows-based beam deflector as claimed in claim 1, wherein: the transparent fluid (6) is air (10), the optical glass (1) at the upper port of the corrugated pipe (7) is optical glass (9) plated with a total reflection film, the lower port of the corrugated pipe (7) can be sealed or unsealed, and the beam deflector is a reflection type beam deflector.
6. A bellows-based beam deflector as claimed in claim 1, wherein: the annular permanent magnet is a stator permanent magnet (3), the coil array is a rotor coil array (2), and the size, the distribution and the spacing of the rotor coil array and the stator coil array are controlled to ensure that the annular permanent magnet and the coil array generate enough driving force and movement space.
7. A beam deflector based on a bellows structure according to claim 1, characterized in that the outer cavity (4) and the mover carriage (5) are made of engineering plastic PC-ABS.
8. A method of using a beam deflector based on a bellows structure, the method comprising the steps of:
step 1: when working current is applied to any rotor coil in the rotor coil array (2), the rotor coil generates certain displacement under the action of Lorentz force and drives the rotor support (5) to incline, so that the corrugated pipe (7) connected with the rotor support (5) generates certain deformation;
step 2: when the corrugated pipe (7) is deformed, the optical glass (1) at the upper port of the corrugated pipe (7) is inclined to a certain extent, so that the light beam is deflected, the size and the distribution of working current in the coil array are controlled, the deflection angle of the light beam can be continuously adjusted within-35 degrees, and the deflection direction is 360-degree omnibearing controllable within a two-dimensional plane;
step 3: when the power supply to the coil array is stopped, the Lorentz force disappears, and the corrugated pipe (7) immediately restores to the original form due to the excellent elastic performance, so that the optical glass (1), the rotor support (5) and the coil array are driven to return to the original position.
Priority Applications (1)
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| CN202311590303.9A CN117850119A (en) | 2023-11-27 | 2023-11-27 | Beam deflector based on corrugated pipe structure and application method thereof |
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|---|---|---|---|---|
| US5796531A (en) * | 1993-07-22 | 1998-08-18 | Canon Kabushiki Kaisha | Light beam deflection unit |
| JP2007094095A (en) * | 2005-09-29 | 2007-04-12 | Olympus Imaging Corp | Projection type video display device |
| RU131507U1 (en) * | 2013-04-24 | 2013-08-20 | Открытое акционерное общество "ГИРООПТИКА" (ОАО "ГИРООПТИКА") | OPTICAL DEFLECTOR |
| US20140240810A1 (en) * | 2012-11-02 | 2014-08-28 | ISC8 Inc. | MEMS Drive and Beam-Steering Apparatus |
| WO2015052233A1 (en) * | 2013-10-08 | 2015-04-16 | Optotune Ag | Tunable lens |
| US20160259094A1 (en) * | 2013-10-08 | 2016-09-08 | Optotune Ag | Tunable lens device |
| DE102020210771A1 (en) * | 2020-08-26 | 2021-08-19 | Carl Zeiss Smt Gmbh | FACETED MIRROR FOR A PROJECTION EXPOSURE SYSTEM AND PROJECTION EXPOSURE SYSTEM WITH THE CORRESPONDING FACETED MIRROR AND PROCEDURES FOR OPERATING THE SAME |
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2023
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Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5796531A (en) * | 1993-07-22 | 1998-08-18 | Canon Kabushiki Kaisha | Light beam deflection unit |
| JP2007094095A (en) * | 2005-09-29 | 2007-04-12 | Olympus Imaging Corp | Projection type video display device |
| US20140240810A1 (en) * | 2012-11-02 | 2014-08-28 | ISC8 Inc. | MEMS Drive and Beam-Steering Apparatus |
| RU131507U1 (en) * | 2013-04-24 | 2013-08-20 | Открытое акционерное общество "ГИРООПТИКА" (ОАО "ГИРООПТИКА") | OPTICAL DEFLECTOR |
| WO2015052233A1 (en) * | 2013-10-08 | 2015-04-16 | Optotune Ag | Tunable lens |
| US20160259094A1 (en) * | 2013-10-08 | 2016-09-08 | Optotune Ag | Tunable lens device |
| DE102020210771A1 (en) * | 2020-08-26 | 2021-08-19 | Carl Zeiss Smt Gmbh | FACETED MIRROR FOR A PROJECTION EXPOSURE SYSTEM AND PROJECTION EXPOSURE SYSTEM WITH THE CORRESPONDING FACETED MIRROR AND PROCEDURES FOR OPERATING THE SAME |
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