CN117711968A - Repeated positioning precision detection device, method and storage medium - Google Patents
Repeated positioning precision detection device, method and storage medium Download PDFInfo
- Publication number
- CN117711968A CN117711968A CN202410161600.XA CN202410161600A CN117711968A CN 117711968 A CN117711968 A CN 117711968A CN 202410161600 A CN202410161600 A CN 202410161600A CN 117711968 A CN117711968 A CN 117711968A
- Authority
- CN
- China
- Prior art keywords
- positioning accuracy
- optical detection
- detection system
- target distance
- detecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 149
- 238000000034 method Methods 0.000 title claims abstract description 45
- 230000033001 locomotion Effects 0.000 claims abstract description 109
- 230000003287 optical effect Effects 0.000 claims abstract description 97
- 238000004364 calculation method Methods 0.000 claims abstract description 49
- 230000007246 mechanism Effects 0.000 claims description 72
- 238000003780 insertion Methods 0.000 claims description 48
- 230000037431 insertion Effects 0.000 claims description 48
- 239000000523 sample Substances 0.000 claims description 43
- 230000003595 spectral effect Effects 0.000 claims description 33
- 230000008569 process Effects 0.000 claims description 23
- 238000012360 testing method Methods 0.000 claims description 17
- 238000004590 computer program Methods 0.000 claims description 13
- 230000003252 repetitive effect Effects 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 238000004891 communication Methods 0.000 description 7
- 230000001360 synchronised effect Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000007771 core particle Substances 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
Abstract
The application relates to the technical field of semiconductor devices, in particular to repeated positioning precision detection equipment, a repeated positioning precision detection method and a storage medium, wherein the repeated positioning precision detection equipment comprises: the system comprises a motion platform, an optical detection system, a motion control system and a calculation analysis system; the optical detection system is arranged on the motion platform and can reciprocate on the motion platform along a first direction, and is used for detecting and collecting a target distance between out-of-focus points of an object to be detected and outputting the target distance to the calculation analysis system; the motion control system is used for controlling the detection position of the optical detection system; the calculation analysis system is used for determining repeated positioning accuracy of the measured object according to the target distance. By adopting the method and the device, the repeated positioning accuracy of the measured object can be calculated.
Description
Technical Field
The present disclosure relates to the field of semiconductor devices, and in particular, to a device and method for detecting repeated positioning accuracy, and a storage medium.
Background
In the testing of semiconductors and LEDs, it is often necessary to use probes to apply voltages to the PADs (PADs) of the core to detect core properties; the mechanism that clamps the probe on the probe station and controls the movement of its tip is called a needle mount. The existing needle inserting mechanism which converts rotary motion into linear motion by a motor driving synchronous belt transmission screw rod is applied to a wafer factory to perform high-frequency micro-motion needle inserting action. The repeated positioning precision of the existing needle inserting mechanism mainly depends on the screw rod precision and the assembly precision, and the precision cannot be effectively and intuitively detected before use.
Disclosure of Invention
The main aim of the application is to provide a repeated positioning precision detection device, a repeated positioning precision detection method and a storage medium, and aims to solve the technical problem that repeated positioning precision of a needle insertion mechanism cannot be detected.
To achieve the above object, the present application provides a duplicate positioning accuracy detection apparatus including: the system comprises a motion platform, an optical detection system, a motion control system and a calculation analysis system;
the optical detection system is arranged on the motion platform and can reciprocate on the motion platform along a first direction, and is used for detecting and collecting a target distance between out-of-focus points of an object to be detected and outputting the target distance to the calculation analysis system;
the motion control system is used for controlling the detection position of the optical detection system;
the calculation analysis system is used for determining repeated positioning accuracy of the measured object according to the target distance.
Optionally, in a possible embodiment, the optical detection system includes: fine tuning the screw;
the fine tuning screw is used for adjusting the position of the focus of the optical detection system.
Optionally, in a possible embodiment, the optical detection system includes: a spectral confocal probe;
the spectral confocal probe is used for detecting the target distance between the detected object and the focus, collecting the target distance and outputting the target distance to the calculation analysis system.
Optionally, in a possible embodiment, the object to be measured is a needle insertion mechanism, and the needle insertion mechanism includes: a reflector and a needle tip;
the reflecting plate is fixed with the relative position of the needle point, and is used for assisting the optical detection system to detect and collect the target distance of the needle point from the focus.
Optionally, in a possible embodiment, the needle insertion mechanism further includes: a driver;
the driver is used for driving the needle inserting mechanism to perform high-frequency micro-distance reciprocating motion so as to simulate the actual continuous testing process.
In addition, to achieve the above object, the present application also provides a duplicate positioning accuracy detection method applied to a duplicate positioning accuracy detection apparatus including: the system comprises a motion platform, an optical detection system, a motion control system and a calculation analysis system;
the repeated positioning precision detection method comprises the following steps:
moving the optical detection system to a preset target height through the motion platform;
moving the optical detection system to a preset target detection position through the motion control system;
continuously detecting target distances between the detected object and a focus of the optical detection system through the optical detection system, and outputting the target distances to the calculation analysis system through the optical detection system;
and determining the repeated positioning accuracy of the measured object according to the target distances through the calculation and analysis system.
Optionally, in a possible embodiment, the object to be measured is a needle insertion mechanism, and the needle insertion mechanism includes: a light reflecting plate; the optical detection system includes: a fine tuning screw and a spectral confocal probe;
before the step of detecting the target distance between the object to be detected and the focal point of the optical detection system a plurality of times by the optical detection system, the method further includes:
and adjusting the position of the focus of the spectral confocal probe through the fine adjustment screw rod so that the focus is positioned on the reflecting plate.
Optionally, in a possible embodiment, the needle insertion mechanism further includes: the relative positions of the reflector and the needle point are fixed;
after the step of adjusting the position of the focal point of the spectral confocal probe by the fine adjustment screw so that the focal point is located on the reflector, the method further includes:
the driver drives the needle inserting mechanism to perform high-frequency micro-distance reciprocating motion so as to simulate the actual continuous testing process;
the step of detecting a target distance between a detected object and a focal point of the optical detection system a plurality of times by the optical detection system includes:
and in the process of performing high-frequency micro-distance reciprocating motion on the needle insertion mechanism, detecting the target distance between the needle tip and the focus through the spectral confocal probe.
Optionally, in a possible embodiment, the step of determining, by the computing and analyzing system, the repeated positioning accuracy of the measured object according to each target distance includes:
generating a target distance chart according to a preset template by the calculation analysis system according to each target distance;
and obtaining the wave trough distances in the target distance chart, wherein the fluctuation range of the wave trough distances is the repeated positioning precision of the needle inserting mechanism.
The present application also provides a storage medium, which is a computer readable storage medium, and on which a computer program is stored, the computer program implementing the steps of the repetitive positioning accuracy detection method as described above when executed by a processor.
The application provides a repeated positioning accuracy detection device, a repeated positioning accuracy detection method and a storage medium, wherein the repeated positioning accuracy detection device comprises: the system comprises a motion platform, an optical detection system, a motion control system and a calculation analysis system; the optical detection system is arranged on the motion platform and can reciprocate on the motion platform along a first direction, and is used for detecting and collecting a target distance between out-of-focus points of an object to be detected and outputting the target distance to the calculation analysis system; the motion control system is used for controlling the detection position of the optical detection system; the calculation analysis system is used for determining repeated positioning accuracy of the measured object according to the target distance.
Compared with the technical means that the repeated precision can only be controlled by relying on screw rod precision and assembly precision in the prior art, the repeated positioning precision detection device is provided with a motion platform, an optical detection system, a motion control system and a calculation analysis system, the detection height of the optical detection system can be controlled by the test equipment through the motion platform, then the target distance of the detected object in repeated test can be detected by detecting the target distance between the detected object and the focus through the optical detection system, and then the repeated positioning precision of the detected object can be calculated by analyzing each target distance through the calculation analysis system.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the application and together with the description, serve to explain the principles of the application.
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are required to be used in the description of the embodiments or the prior art will be briefly described below, and it will be obvious to those skilled in the art that other drawings can be obtained from these drawings without inventive effort.
FIG. 1 is a schematic view of a needle insertion mechanism;
FIG. 2 is a schematic structural diagram of an embodiment of a repeated positioning accuracy detecting device according to the present application;
FIG. 3 is a schematic structural diagram of a repeated positioning accuracy detecting device in a device hardware operating environment according to an embodiment of the present application;
fig. 4 is a flowchart of a first embodiment of a method for detecting repeated positioning accuracy.
Reference numerals illustrate:
the realization, functional characteristics and advantages of the present application will be further described with reference to the embodiments, referring to the attached drawings.
Detailed Description
It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the present application.
In the testing of semiconductors and LEDs, it is often necessary to use probes to apply voltages to the PADs (PADs) of the core particles to detect the core particle performance; the mechanism that clamps the probe on the probe station and controls the movement of its tip is called a needle mount. The existing needle inserting mechanism which converts rotary motion into linear motion by a motor driving synchronous belt transmission screw rod is applied to a wafer factory to perform high-frequency micro-motion needle inserting action. The repeated positioning precision of the existing needle inserting mechanism mainly depends on the screw rod precision and the assembly precision, and the precision cannot be effectively and intuitively detected before use. In addition, because the use condition is that high-frequency reciprocating motion is carried out in a fixed height interval (the stroke is usually within hundreds of micrometers), the abrasion of the ball inside the screw rod is increased, the service life of the screw rod is shortened sharply, and meanwhile, the service life of the screw rod cannot be predicted accurately. Referring to fig. 1, fig. 1 is a schematic structural diagram of a needle insertion mechanism, as shown in fig. 1, the needle insertion mechanism includes a needle tip, a screw rod, a motor, a synchronous pulley and a synchronous belt, the motor drives the synchronous pulley to make the screw rod perform linear motion through rotation motion transmitted by the synchronous belt, so that a unit to be tested welding Point (PAD) and a probe are contacted and electrified for testing. During the continuous test, the needle tip can perform reciprocating motion with small stroke (hundreds of micrometers) and high frequency.
In view of the foregoing, the present application provides a repeated positioning accuracy detection apparatus, a method, and a storage medium, where the repeated positioning accuracy detection apparatus includes: the system comprises a motion platform, an optical detection system, a motion control system and a calculation analysis system; the optical detection system is arranged on the motion platform and can reciprocate on the motion platform along a first direction, and is used for detecting and collecting a target distance between out-of-focus points of an object to be detected and outputting the target distance to the calculation analysis system; the motion control system is used for controlling the detection position of the optical detection system; the calculation analysis system is used for determining repeated positioning accuracy of the measured object according to the target distance.
Compared with the technical means that the repeated precision can only be controlled by relying on screw rod precision and assembly precision in the prior art, the repeated positioning precision detection device is provided with a motion platform, an optical detection system, a motion control system and a calculation analysis system, the detection height of the optical detection system can be controlled by the test equipment through the motion platform, then the target distance of the detected object in repeated test can be detected by detecting the target distance between the detected object and the focus through the optical detection system, and then the repeated positioning precision of the detected object can be calculated by analyzing each target distance through the calculation analysis system.
The following description of the embodiments of the present application will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all, of the embodiments of the present application. All other embodiments, which can be made by one of ordinary skill in the art based on the embodiments herein without making any inventive effort, are intended to be within the scope of the present application.
In a first embodiment of the repeated positioning accuracy detecting apparatus of the present application, the repeated positioning accuracy detecting apparatus includes: the system comprises a motion platform, an optical detection system, a motion control system and a calculation analysis system;
the optical detection system is arranged on the motion platform and can reciprocate on the motion platform along a first direction, and is used for detecting and collecting a target distance between out-of-focus points of an object to be detected and outputting the target distance to the calculation analysis system;
the motion control system is used for controlling the detection position of the optical detection system;
the calculation analysis system is used for determining repeated positioning accuracy of the measured object according to the target distance.
In this embodiment, the repeated positioning accuracy detecting device includes a motion platform, an optical detecting system, a motion control system and a calculation and analysis system, where the optical detecting system is disposed on the motion platform, and the motion platform is used to control the optical detecting system to move in the Z-axis direction, i.e. the first direction, so as to control the detection height of the optical detecting system, the motion control system is used to control the detection positions of the optical detecting system, the accuracy of different positions on the detected object is detected, the optical detecting system is used to detect the distance between the object and the focus of the optical detecting system, and the detected target distance is transmitted to the calculation and analysis system, and the calculation and analysis system is used to analyze the detected target distance to obtain the repeated positioning accuracy.
Further, in one possible embodiment, the optical detection system includes: fine tuning the screw;
the fine tuning screw is used for adjusting the position of the focus of the optical detection system.
In this embodiment, the motion platform can only roughly control the height of the optical detection system, and the fine adjustment screw can more precisely control the focal position of the optical detection system, so that the focal point is at the position that the technician wants to detect.
Further, in one possible embodiment, the optical detection system includes: a spectral confocal probe;
the spectral confocal probe is used for detecting the target distance between the detected object and the focus, collecting the target distance and outputting the target distance to the calculation analysis system.
A spectral confocal probe is a device for measuring a distance by the principle of optical dispersion. The white light LED light source is utilized to emit light, and a point light source is formed after the light passes through the optical fiber coupler. After focusing, the collimating and dispersing objective lens generates spectral dispersion, and forms continuous monochromatic light intersection point on the optical axis. The distance from each monochromatic light intersection point to the measured object is different. When the measured object is positioned in a certain position in the measuring range, only light with a certain wavelength is focused on the side surface of the measured object, so that the confocal condition is met, and the light can be reflected from the surface of the measured object back to the optical fiber coupler and enter the spectrometer. Light with other wavelengths is in a defocused state on the surface of the measured object, and the distribution of the reflected light at the light source is far greater than the diameter of the fiber core, so that most of light cannot enter the spectrometer. And decoding by a spectrometer to obtain a wavelength value at the position with the maximum light intensity, thereby measuring a distance value corresponding to the target.
In this embodiment, the detection device used in the optical detection system is a spectral confocal probe, through which a target distance between the object to be detected and the focal point can be detected, and the target distance is output to the calculation analysis system.
Further, in a possible embodiment, the object to be measured is a needle insertion mechanism, the needle insertion mechanism includes: the light reflecting plate, the needle point and the driver;
the reflecting plate is fixed at the relative position of the needle point and is used for assisting the optical detection system in detecting and collecting the target distance of the needle point from the focus;
the driver is used for driving the needle inserting mechanism to perform high-frequency micro-distance reciprocating motion so as to simulate the actual continuous testing process.
In this embodiment, the object to be measured is a needle insertion mechanism, and the needle insertion mechanism includes a reflecting plate, a needle tip, and a driver. The driver can drive the needle inserting mechanism to perform high-frequency micro-distance reciprocating motion so as to simulate the reciprocating motion of the needle inserting mechanism in the actual use process when the tested welding spot is tested. The main purpose of the reflector is to reflect light to help measure the distance of a target object. The light reflection plate is placed at a specific position of the target object, and can reflect light back to the spectrum confocal probe, so that distance information of the target object is measured. The relative positions of the reflector and the needle tip are fixed, and thus, the target distance between the needle tip and the focal point can be reflected by measuring the target distance between the reflector and the focal point.
As an example, please refer to fig. 2, fig. 2 is a schematic structural diagram related to an embodiment of the repeated positioning accuracy detection device of the present application, as shown in fig. 2, the repeated positioning accuracy detection device may further include a bottom plate 9 and a cushion block 14, the support 8 is fixed on the bottom plate, the optical detection system includes a micro-adjustment screw 10, a motor 1, an optical fiber 2, a cross roller sliding table 3, a synchronous belt 4, a screw rod 5, a probe fixture 6 and a spectral confocal probe 7, the cushion block is used for adjusting the height of the needle insertion mechanism 11, the measured needle insertion mechanism includes a reflector 12 and a needle tip 13, the computer is in communication connection with the spectral confocal probe, when the needle insertion mechanism is detected, a technician needs to manually lock the needle insertion mechanism on the cushion block, then electrifies the needle insertion mechanism, the motor, the spectral confocal probe and the computer, and then adjusts the focal position of the spectral confocal probe through the support and the micro-adjustment screw, so that the focal point is located on the reflector, that real-time reading of the spectral probe can be observed in corresponding software in the computer, then the needle insertion mechanism is driven by a driver to perform high-speed simulation in the Z-axis direction, the needle insertion mechanism includes a reflector 12 and a needle tip 13, the data can be collected in a repeated positioning accuracy, and the data can be repeated in a certain range of the repeated positioning accuracy, and the data can be collected after the repeated measurement process is repeated.
In another example, the driver may be used to drive the needle insertion mechanism to perform a large stroke of reciprocating motion, monitor the motion process, continuously monitor the target distance until a large change in the target distance is detected, that is, when the repeated positioning accuracy is greatly changed, that is, the screw rod representing the needle insertion mechanism is worn, and by detecting the number of times of motion of the needle insertion mechanism before the screw rod is worn, the maximum number of times of motion of the needle insertion mechanism can be obtained, so that a safe number of times of motion can be set, the safe number of times of motion can be set according to the product of the maximum number of times of motion and the safety coefficient, and after the safe number of times of motion is set, a technician can replace the screw rod movement section after the safe number of times of motion is reached, thereby avoiding a certain section of the screw rod from being damaged by the high-frequency micro-distance reciprocating motion, and indirectly prolonging the service life of the needle insertion mechanism.
Referring to fig. 3, fig. 3 is a schematic structural diagram of a repeated positioning accuracy detecting device in a device hardware operating environment according to an embodiment of the present application.
It should be noted that, the terminal device according to the embodiment of the present invention may be a device for detecting repeated positioning accuracy.
As shown in fig. 3, the duplicate positioning accuracy detection apparatus may further include: a processor 1001, such as a CPU, memory 1005, and a communication bus 1002. Wherein a communication bus 1002 is used to enable connected communication between the processor 1001 and a memory 1005. The memory 1005 may be a high-speed RAM memory or a stable memory (non-volatile memory), such as a disk memory. The memory 1005 may also optionally be a storage device separate from the processor 1001 described above.
Optionally, the duplicate positioning accuracy detection device may also include a user interface 1003, a network interface 1004, and the like. The user interface may comprise a Display, an input sub-module such as a Keyboard (Keyboard), and optionally may comprise a standard wired interface, a wireless interface. The network interface may optionally include a standard wired interface, a wireless interface (e.g., WIFI interface).
It will be appreciated by those skilled in the art that the duplicate positioning accuracy detection apparatus structure shown in fig. 3 does not constitute a limitation of the duplicate positioning accuracy detection apparatus, and may include more or fewer components than shown, or may combine certain components, or may be arranged in different components.
As shown in fig. 3, an operating system, a network communication module, a user interface module, and a computer program may be included in the memory 1005, which is a type of computer-readable storage medium. The operating system is a program that manages and controls the hardware and software resources of the duplicate positioning accuracy detection device, supporting the execution of computer programs and other software and/or programs. The network communication module is used to implement communication between components in the memory 1005 and other hardware and software in the duplicate positioning accuracy detection device.
In the duplicate positioning accuracy detection apparatus shown in fig. 1, a processor 1001 is configured to execute a computer program stored in a memory 1005, and to perform the following operations:
moving the optical detection system to a preset target height through the motion platform;
moving the optical detection system to a preset target detection position through the motion control system;
continuously detecting target distances between the detected object and a focus of the optical detection system through the optical detection system, and outputting the target distances to the calculation analysis system through the optical detection system;
and determining the repeated positioning accuracy of the measured object according to the target distances through the calculation and analysis system.
Further, the processor 1001 may call a computer program stored in the memory 1005, and further perform the following operations:
and adjusting the position of the focus of the spectral confocal probe through the fine adjustment screw rod so that the focus is positioned on the reflecting plate.
Further, the processor 1001 may call a computer program stored in the memory 1005, and further perform the following operations:
the driver drives the needle inserting mechanism to perform high-frequency micro-distance reciprocating motion so as to simulate the actual continuous testing process;
further, the processor 1001 may call a computer program stored in the memory 1005, and further perform the following operations:
and in the process of performing high-frequency micro-distance reciprocating motion on the needle insertion mechanism, detecting the target distance between the needle tip and the focus through the spectral confocal probe.
Further, the processor 1001 may call a computer program stored in the memory 1005, and further perform the following operations:
generating a target distance chart according to a preset template by the calculation analysis system according to each target distance;
and obtaining the wave trough distances in the target distance chart, wherein the fluctuation range of the wave trough distances is the repeated positioning precision of the needle inserting mechanism.
Based on the above-described structure, various embodiments of a duplicate positioning accuracy detection method are presented.
In a first embodiment of the repeated positioning accuracy detection method of the present application, please refer to fig. 4, fig. 4 is a flowchart illustrating a first embodiment of the repeated positioning accuracy detection method of the present application.
The embodiments of the present invention provide embodiments of a method of duplicate positioning accuracy detection, it being noted that although a logical sequence is shown in the flowchart, in some cases the steps shown or described may be performed in a different order than that shown or described herein. In this embodiment, the execution body of the duplicate positioning accuracy detection method is a duplicate positioning accuracy detection apparatus, and for convenience of description, the execution body is omitted from description of each embodiment. In the present embodiment, the duplicate positioning accuracy detection method is applied to a duplicate positioning accuracy detection apparatus including: the system comprises a motion platform, an optical detection system, a motion control system and a calculation analysis system; the repeated positioning precision detection method comprises the following steps:
step S10, the optical detection system is moved to a preset target height through the motion platform;
in this embodiment, the motion platform may control the detection height of the optical detection system to adapt to the height of the object to be detected.
Step S20, the optical detection system is moved to a preset target detection position through the motion control system;
in this embodiment, the motion control system may control the detection position of the optical detection system so that the optical detection system detects the specified position of the object to be detected.
Step S30, continuously detecting target distances between the detected object and a focus of the optical detection system through the optical detection system, and outputting the target distances to the calculation analysis system through the optical detection system;
in this embodiment, the optical detection system can continuously detect the target distance between the object to be detected and the focal point of the optical detection system, and output the target distance to the calculation analysis system through the optical detection system, so that the calculation analysis system can analyze the repeated detection accuracy of the object to be detected.
And step S40, determining the repeated positioning accuracy of the measured object according to each target distance by the calculation and analysis system.
In this embodiment, the calculation and analysis system may count the distances of the targets, and analyze the repeated positioning accuracy of the measured object.
Further, in a possible embodiment, the object to be measured is a needle insertion mechanism, and the needle insertion mechanism includes: a light reflecting plate; the optical detection system includes: a fine tuning screw and a spectral confocal probe;
in the step S30, before the step of detecting the target distance between the object to be detected and the focal point of the optical detection system by the optical detection system a plurality of times, the method further includes:
and a step a, adjusting the position of the focus of the spectral confocal probe through the fine adjustment screw rod so that the focus is positioned on the reflector.
In this embodiment, the detection device used in the optical detection system is a spectral confocal probe, through which a target distance between the object to be detected and the focal point can be detected, and the target distance is output to the calculation analysis system. The motion platform can only roughly control the height of the optical detection system, and the fine adjustment screw can more accurately control the focus position of the optical detection system, so that the focus is positioned at a position which a technician wants to detect.
Further, in one possible embodiment, the needle insertion mechanism further comprises: the relative positions of the reflector and the needle point are fixed;
after the step a of adjusting the position of the focal point of the spectral confocal probe by the fine adjustment screw so that the focal point is located on the reflector, the method further includes:
step b, driving the needle inserting mechanism to perform high-frequency micro-distance reciprocating motion through the driver so as to simulate the actual continuous testing process;
in the step S30, the step of detecting, by the optical detection system, the target distance between the object to be detected and the focal point of the optical detection system a plurality of times includes:
step S301, detecting a target distance between the needle tip and the focus through the spectral confocal probe in the process of high-frequency micro-distance reciprocating motion of the needle insertion mechanism.
In this embodiment, the driver may drive the needle insertion mechanism to perform high-frequency micro-pitch reciprocating motion, so as to simulate the reciprocating motion performed by the needle insertion mechanism when testing the tested solder joint in the actual use process. The main purpose of the reflector is to reflect light to help measure the distance of a target object. The light reflection plate is placed at a specific position of the target object, and can reflect light back to the spectrum confocal probe, so that distance information of the target object is measured. The relative positions of the reflector and the needle tip are fixed, and thus, the target distance between the needle tip and the focal point can be reflected by measuring the target distance between the reflector and the focal point.
Further, in a possible embodiment, the step S40 of determining, by the computing and analyzing system, the repeated positioning accuracy of the measured object according to each target distance includes:
step S401, generating a target distance chart according to a preset template by the calculation analysis system according to each target distance;
step S402, obtaining each trough distance in the target distance chart, where the fluctuation range of each trough distance is the repeated positioning precision of the needle insertion mechanism.
In this embodiment, the computer may generate a target distance chart according to the collected target distances and a preset template, where the distance change of the needle tip from the focal point in the moving process may be reflected in the chart, and the range fluctuation of each trough may reflect the repeated positioning accuracy of the needle insertion mechanism.
Specifically, as an example, when the needle inserting mechanism is detected, a technician needs to manually lock the needle inserting mechanism on the cushion block, then electrifies the needle inserting mechanism, the motor, the spectral confocal probe and the computer, adjusts the focal position of the spectral confocal probe through the bracket and the fine tuning screw rod to enable the focal point to be positioned on the reflecting plate, namely, real-time reading of the spectral confocal probe can be observed in corresponding software in the computer, then the needle inserting mechanism is driven by the driver to carry out high-frequency micro-distance reciprocating motion in the Z-axis direction, an actual continuous test process is simulated, the distance between the reflecting plate of the needle inserting mechanism and the focal point of the probe in the motion process is detected through the spectral confocal probe, reciprocating motion is repeatedly carried out, and data are collected, after a certain amount of data is collected, the computer can automatically draw a line graph of the target distance according to the collected data, the fluctuation range of the minimum value (namely, the trough of the data) of each distance can be observed in the line graph, and the repeated positioning accuracy of the needle inserting mechanism can be reflected according to the fluctuation range.
In another example, the driver may be used to drive the needle insertion mechanism to perform a large stroke of reciprocating motion, monitor the belt movement process, continuously monitor the target distance until a large change in the target distance is detected, that is, when the repeated positioning accuracy is greatly changed, that is, the screw rod representing the needle insertion mechanism is worn, and by detecting the number of times of movement of the needle insertion mechanism before the screw rod is worn, the maximum number of times of movement of the needle insertion mechanism can be obtained, so that a safe number of times of movement can be set, the safe number of times of movement can be set according to the product of the maximum number of times of movement and the safety coefficient, and after the safe number of times of movement is set, a technician can replace the screw rod movement section after the safe number of times of movement is reached, thereby avoiding a certain section of the screw rod from being damaged by the high-frequency micro-distance reciprocating motion, and indirectly prolonging the service life of the needle insertion mechanism.
The specific implementation manner of the repeated positioning accuracy detection device is basically the same as the above embodiments of the repeated positioning accuracy detection method, and is not repeated here.
Furthermore, the present application proposes a storage medium, which is a computer-readable storage medium, on which a computer program is stored, which computer program, when being executed by a processor, implements the steps of the method for detecting positioning accuracy of repetition of the present application as described above.
The specific embodiments of the storage medium in the present application are substantially the same as the embodiments of the above repeated positioning accuracy detection method, and are not described herein.
It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.
The foregoing embodiment numbers of the present application are merely for describing, and do not represent advantages or disadvantages of the embodiments.
From the above description of the embodiments, it will be clear to those skilled in the art that the above-described embodiment method may be implemented by means of software plus a necessary general hardware platform, but of course may also be implemented by means of hardware, but in many cases the former is a preferred embodiment. Based on such understanding, the technical solution of the present application may be embodied essentially or in a part contributing to the prior art in the form of a software product stored in a storage medium (such as ROM/RAM, magnetic disk, optical disk), comprising several instructions for causing a terminal device (which may be a mobile phone, a computer, a server, an air conditioner, or a network device, etc.) to perform the method described in the embodiments of the present application.
The foregoing description is only of the preferred embodiments of the present application, and is not intended to limit the scope of the claims, and all equivalent structures or equivalent processes using the descriptions and drawings of the present application, or direct or indirect application in other related technical fields are included in the scope of the claims of the present application.
Claims (10)
1. A repeated positioning accuracy detecting apparatus, characterized in that the repeated positioning accuracy detecting apparatus comprises: the system comprises a motion platform, an optical detection system, a motion control system and a calculation analysis system;
the optical detection system is arranged on the motion platform and can reciprocate on the motion platform along a first direction, and is used for detecting and collecting a target distance between out-of-focus points of an object to be detected and outputting the target distance to the calculation analysis system;
the motion control system is used for controlling the detection position of the optical detection system;
the calculation analysis system is used for determining repeated positioning accuracy of the measured object according to the target distance.
2. The repetitive positioning accuracy detecting apparatus according to claim 1, wherein the optical detecting system includes: fine tuning the screw;
the fine tuning screw is used for adjusting the position of the focus of the optical detection system.
3. The repetitive positioning accuracy detecting apparatus according to claim 2, wherein the optical detecting system includes: a spectral confocal probe;
the spectral confocal probe is used for detecting the target distance between the detected object and the focus, collecting the target distance and outputting the target distance to the calculation analysis system.
4. The repetitive positioning accuracy detecting apparatus according to claim 3, wherein the object to be detected is a needle insertion mechanism, the needle insertion mechanism comprising: a reflector and a needle tip;
the reflecting plate is fixed with the relative position of the needle point, and is used for assisting the optical detection system to detect and collect the target distance of the needle point from the focus.
5. The repetitive positioning accuracy detecting device according to claim 4, wherein the needle insertion mechanism further comprises: a driver;
the driver is used for driving the needle inserting mechanism to perform high-frequency micro-distance reciprocating motion so as to simulate the actual continuous testing process.
6. A repeated positioning accuracy detection method, characterized in that the repeated positioning accuracy detection method is applied to a repeated positioning accuracy detection apparatus comprising: the system comprises a motion platform, an optical detection system, a motion control system and a calculation analysis system;
the repeated positioning precision detection method comprises the following steps:
moving the optical detection system to a preset target height through the motion platform;
moving the optical detection system to a preset target detection position through the motion control system;
continuously detecting target distances between the detected object and a focus of the optical detection system through the optical detection system, and outputting the target distances to the calculation analysis system through the optical detection system;
and determining the repeated positioning accuracy of the measured object according to the target distances through the calculation and analysis system.
7. The repetitive positioning accuracy detecting method according to claim 6, wherein the object to be detected is a needle insertion mechanism, the needle insertion mechanism comprising: a light reflecting plate; the optical detection system includes: a fine tuning screw and a spectral confocal probe;
before the step of detecting the target distance between the object to be detected and the focal point of the optical detection system a plurality of times by the optical detection system, the method further includes:
and adjusting the position of the focus of the spectral confocal probe through the fine adjustment screw rod so that the focus is positioned on the reflecting plate.
8. The repetitive positioning accuracy detecting method according to claim 7, wherein the needle insertion mechanism further comprises: the relative positions of the reflector and the needle point are fixed;
after the step of adjusting the position of the focal point of the spectral confocal probe by the fine adjustment screw so that the focal point is located on the reflector, the method further includes:
the driver drives the needle inserting mechanism to perform high-frequency micro-distance reciprocating motion so as to simulate the actual continuous testing process;
the step of detecting a target distance between a detected object and a focal point of the optical detection system a plurality of times by the optical detection system includes:
and in the process of performing high-frequency micro-distance reciprocating motion on the needle insertion mechanism, detecting the target distance between the needle tip and the focus through the spectral confocal probe.
9. The repetitive positioning accuracy detecting method according to claim 8, wherein the step of determining the repetitive positioning accuracy of the object to be measured from each of the target distances by the calculation and analysis system includes:
generating a target distance chart according to a preset template by the calculation analysis system according to each target distance;
and obtaining the wave trough distances in the target distance chart, wherein the fluctuation range of the wave trough distances is the repeated positioning precision of the needle inserting mechanism.
10. A storage medium, characterized in that the storage medium is a computer-readable storage medium, on which a computer program is stored, which computer program, when being executed by a processor, realizes the steps of the repetitive positioning accuracy detection method according to any one of claims 6 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410161600.XA CN117711968B (en) | 2024-02-05 | Repeated positioning precision detection device, method and storage medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410161600.XA CN117711968B (en) | 2024-02-05 | Repeated positioning precision detection device, method and storage medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN117711968A true CN117711968A (en) | 2024-03-15 |
| CN117711968B CN117711968B (en) | 2024-05-17 |
Family
ID=
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080137100A1 (en) * | 2005-01-14 | 2008-06-12 | Essilor International (Compagnie Generale D' Optique | Optical Probe and Device and Method Making Use Thereof |
| JP2010121960A (en) * | 2008-11-17 | 2010-06-03 | Nikon Corp | Measuring device and method of measuring subject |
| US20170299630A1 (en) * | 2016-04-19 | 2017-10-19 | Mitsubishi Electric Corporation | Device and method for inspecting position of probe, and semiconductor evaluation apparatus |
| US9983145B1 (en) * | 2017-07-12 | 2018-05-29 | Glttek Co., Ltd | Test probe card detection method and system thereof |
| US20180239331A1 (en) * | 2017-02-23 | 2018-08-23 | GM Global Technology Operations LLC | System and method for object distance detection and positioning |
| US20210096175A1 (en) * | 2019-09-30 | 2021-04-01 | Formfactor Beaverton, Inc. | Methods for maintaining gap spacing between an optical probe of a probe system and an optical device of a device under test, and probe systems that perform the methods |
| US20230019239A1 (en) * | 2020-09-16 | 2023-01-19 | Shenyang Institute Of Automation, Chinese Academy Of Sciences | Integrated dual-probe rapid in-situ switching measurement method and device of atomic force microscope |
| CN116990559A (en) * | 2023-08-02 | 2023-11-03 | 深圳市芯都半导体有限公司 | Probe station auxiliary equipment for detecting semiconductor chip wafer and detection method |
| CN117410195A (en) * | 2023-09-27 | 2024-01-16 | 杭州长川科技股份有限公司 | Wafer needle insertion precision verification method and device, electronic equipment and probe station |
| CN117471392A (en) * | 2023-12-27 | 2024-01-30 | 矽电半导体设备(深圳)股份有限公司 | Method and system for detecting probe tip, electronic equipment and storage medium |
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080137100A1 (en) * | 2005-01-14 | 2008-06-12 | Essilor International (Compagnie Generale D' Optique | Optical Probe and Device and Method Making Use Thereof |
| JP2010121960A (en) * | 2008-11-17 | 2010-06-03 | Nikon Corp | Measuring device and method of measuring subject |
| US20170299630A1 (en) * | 2016-04-19 | 2017-10-19 | Mitsubishi Electric Corporation | Device and method for inspecting position of probe, and semiconductor evaluation apparatus |
| US20180239331A1 (en) * | 2017-02-23 | 2018-08-23 | GM Global Technology Operations LLC | System and method for object distance detection and positioning |
| US9983145B1 (en) * | 2017-07-12 | 2018-05-29 | Glttek Co., Ltd | Test probe card detection method and system thereof |
| US20210096175A1 (en) * | 2019-09-30 | 2021-04-01 | Formfactor Beaverton, Inc. | Methods for maintaining gap spacing between an optical probe of a probe system and an optical device of a device under test, and probe systems that perform the methods |
| US20230019239A1 (en) * | 2020-09-16 | 2023-01-19 | Shenyang Institute Of Automation, Chinese Academy Of Sciences | Integrated dual-probe rapid in-situ switching measurement method and device of atomic force microscope |
| CN116990559A (en) * | 2023-08-02 | 2023-11-03 | 深圳市芯都半导体有限公司 | Probe station auxiliary equipment for detecting semiconductor chip wafer and detection method |
| CN117410195A (en) * | 2023-09-27 | 2024-01-16 | 杭州长川科技股份有限公司 | Wafer needle insertion precision verification method and device, electronic equipment and probe station |
| CN117471392A (en) * | 2023-12-27 | 2024-01-30 | 矽电半导体设备(深圳)股份有限公司 | Method and system for detecting probe tip, electronic equipment and storage medium |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102004113B (en) | X-ray analysis apparatus and x-ray analysis method | |
| JP4938782B2 (en) | Method and apparatus utilizing optical criteria | |
| JP3700848B2 (en) | Micro light source position measuring device | |
| JP2007517408A5 (en) | ||
| US9593939B1 (en) | Glue thickness inspection (GTI) | |
| KR20100018515A (en) | Solid immersion lens holder | |
| US7663390B2 (en) | Inspection apparatus and method | |
| KR20100028538A (en) | Observing device and method | |
| CN117711968B (en) | Repeated positioning precision detection device, method and storage medium | |
| US7235807B2 (en) | Near field analysis apparatus having irradiation-side guide light and light-collection-side guide light | |
| CN111198192B (en) | Detection device and detection method | |
| CN117711968A (en) | Repeated positioning precision detection device, method and storage medium | |
| JP3210227B2 (en) | Laser ablation analyzer | |
| JP3180198B2 (en) | Work bump inspection method and apparatus | |
| CN115468662A (en) | Measuring device and method based on photon number resolution detector | |
| CN114324302A (en) | Automatic positioning method and system for laser focusing position | |
| US20200300622A1 (en) | Automatic laser distance calibration kit for wireless charging test system | |
| CN116105781A (en) | Optical calibration device and method for calibrating coordinate system where optical platform is located | |
| CN114414212A (en) | Portable laser beam quality beta factor testing arrangement | |
| JP2006259326A (en) | Infrared microscope | |
| CN216247130U (en) | Detection equipment | |
| KR102092463B1 (en) | Specimen Inspection Device and Specimen Inspection Method | |
| CN113720264B (en) | Focusing measurement method and device for camera of sclerometer | |
| CN214264312U (en) | Laser marking device | |
| CN213516286U (en) | Leveling device for optical lens modulation transfer function detection equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant |