CN117626197A - New forms of energy battery coating film equipment - Google Patents

New forms of energy battery coating film equipment Download PDF

Info

Publication number
CN117626197A
CN117626197A CN202311620212.5A CN202311620212A CN117626197A CN 117626197 A CN117626197 A CN 117626197A CN 202311620212 A CN202311620212 A CN 202311620212A CN 117626197 A CN117626197 A CN 117626197A
Authority
CN
China
Prior art keywords
coating
target
extension rod
anode
backing plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202311620212.5A
Other languages
Chinese (zh)
Inventor
董亚静
王永泉
刘鑫光
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shandong Xinbaiyu Vacuum Technology Co ltd
Original Assignee
Shandong Xinbaiyu Vacuum Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shandong Xinbaiyu Vacuum Technology Co ltd filed Critical Shandong Xinbaiyu Vacuum Technology Co ltd
Priority to CN202311620212.5A priority Critical patent/CN117626197A/en
Publication of CN117626197A publication Critical patent/CN117626197A/en
Pending legal-status Critical Current

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Battery Electrode And Active Subsutance (AREA)

Abstract

The utility model relates to a vacuum coating technical field discloses a new energy battery coating equipment, it rotates to drive the backing plate through motor assembly, make four magnet synchronous rotation on the backing plate, and the fixed position of target this moment, make magnet at pivoted in-process, drive the magnetic field position and change, simultaneously, the backing plate also will drive the battery piece synchronous rotation on the support this moment, make the electric field between battery piece and the target change in position, thereby reach the change that changes E x B drift direction, increase electron motion's scope and direction, make multidirectional motion's single electron can strike the argon atom, improve Ar+ unit time's yield, and Ar+ direction of motion will also be influenced this moment, make Ar+ impact target's position more comprehensive.

Description

New forms of energy battery coating film equipment
Technical Field
The application relates to the technical field of vacuum coating, in particular to new energy battery coating equipment.
Background
In the production and manufacturing process of the new energy battery, coating treatment is needed, a protective layer is formed on the outer side of the battery piece, the effects of preventing oxidization, enhancing stability and improving battery efficiency are achieved, the existing coating equipment is mostly divided into dry type coating equipment and wet type coating equipment, wherein the dry type coating equipment is provided with magnetron sputtering vacuum coating equipment, and the novel energy battery has the advantages of being simple in equipment, easy to control, large in coating area, strong in adhesive force and the like.
The main principle of magnetron sputtering vacuum coating is that a battery piece to be coated is placed into an anode, a target material in the chamber is connected with a cathode, three magnets are additionally arranged behind the target material (relative to the battery piece), the magnets are linearly distributed in a S, N, S uniformly distributed mode, then the coating chamber is vacuumized and argon (Ar) gas is input, at the moment, hundreds of K direct current voltage is applied between the cathode and the anode, magnetron abnormal glow discharge is generated in the coating chamber, electrons collide with argon atoms in the process of flying to a substrate (the battery piece) under the action of an electric field E, the argon is ionized (Ar atoms are ionized into Ar+ ions and electrons under the action of high voltage), and incident ions (Ar+) bombard the target material under the action of the electric field, so that neutral atoms, molecules and secondary electrons on the surface of the target material are separated from the surface of the target material by enough kinetic energy, and a film is formed on the surface of the substrate.
The generated secondary electrons are subjected to the action of an electric field and a magnetic field to generate the drift of the direction indicated by E (electric field) x B (magnetic field), namely E x B drift, the motion track of the secondary electrons is similar to a cycloid, if the secondary electrons are in a ring-shaped magnetic field, the electrons do circular motion on the target surface in a similar cycloid form, the motion paths of the secondary electrons are long and are restrained in a plasma area close to the target surface, a large amount of Ar+ is ionized in the area to bombard the target material, so that the high deposition rate is realized, the energy consumption of the secondary electrons is reduced along with the increase of collision times, the secondary electrons are gradually far away from the target surface, and finally deposited on a substrate under the action of the electric field E.
The substrate and the target are parallel and opposite, so that the direction of an electric field is stable and unique, the direction of a magnetic field formed by the magnet is stable and unique, E multiplied by B of most electrons drifts, the direction is in a constant range, the collision range of moving electrons to argon is small, the generation amount of Ar+ in unit time is limited, meanwhile, the collision range of Ar+ to the target is limited, a part of the target is strongly collided, the collision of a part of the target is small, the molecular weight generated by the target is small, the amount of electrons moving to the substrate is correspondingly reduced, and the distribution condition uniformity of electrons is poor for the whole sheet-shaped substrate, so that the coating time needs to be prolonged, the substrate can obtain comprehensive coating, meanwhile, only one surface of the substrate faces the target, only one surface of the substrate can finish coating in primary coating, and the other surface needs to perform secondary coating, so that the whole coating of the substrate can be finished, and the coating efficiency of the battery sheet is seriously influenced.
Disclosure of Invention
The utility model provides a new energy battery coating equipment, possess magnet rotation and continuously change magnetic field position, positive pole frame synchronous rotation and rotation continuously change electric field position, the change of magnetic field and electric field causes electron atress direction change and carries out multidirectional multispeed motion, multidirectional multispeed motion's electron is to the impact ability reinforcing of argon atom, the argon gas flows the state change and increase contact electron probability under the drive of positive pole frame, positive pole frame rotation makes battery piece both sides homoenergetic obtain the advantage of even coating film, be used for solving current magnetron sputtering vacuum coating equipment and can only carry out the coating film to the one side of battery piece once, and the limited problem of electron impact argon atom ability.
In order to achieve the above purpose, the present application adopts the following technical scheme: the new energy battery coating equipment comprises a coating bin, wherein a motor assembly is arranged at the center of the bottom end of the coating bin, and a top cover is buckled at the top end opening of the coating bin and is used for forming a vacuum airtight environment of coating in the coating bin; a hollow cylindrical backboard is arranged at the center of the bottom end of the top cover, and a hollow cylindrical target material is sleeved on the outer side wall of the backboard; a round backing plate is arranged in the inner cavity of the coating bin, the bottom center of the backing plate is connected with the output end of the motor assembly and used for providing continuous low-speed rotation power for the backing plate, four magnets which are circumferentially and uniformly distributed at ninety degrees are arranged on the top end of the backing plate, and the magnets are positioned in the inner cavity of the backing plate and used for forming a magnetic field around a target; the backing plate is provided with four anode frames which are uniformly distributed in ninety degrees in the circumferential direction, the four anode frames surround the outer side of the target, the anode frames are connected with the anode, the back plate is connected with the cathode and used for forming an electric field between the anode frames and the target, the anode frames are provided with through storage grooves, and the storage grooves are internally sleeved with battery pieces.
Preferably, the middle part of the coating cabin is provided with an air inlet pipe and a vacuum pipe, and the air inlet pipe and the vacuum pipe are used for vacuumizing the coating cabin and inputting argon for ionization into the coating cabin.
Preferably, the magnets are close to the inner cavity wall of the back plate, and the magnetic poles of one ends of the adjacent two magnets, which are opposite to each other, facing the center of the back plate are opposite to each other, so that four groups of arc-shaped mixed magnetic fields are formed around the target.
Preferably, the sliding grooves are formed in the centers of the four side walls of the storage groove, and the four sides of the battery piece are respectively inserted into the four sliding grooves and used for limiting the position of the battery piece.
Preferably, the anode frame comprises a bracket and a sealing strip, wherein uniformly distributed buckling grooves are formed in one side, opposite to the sealing strip, of the bracket, buckling protrusions opposite to the buckling grooves are formed in one side, opposite to the sealing strip, of the sealing strip, and the buckling protrusions are buckled in the buckling grooves and used for taking and placing battery pieces in the opposite object grooves.
Preferably, the top center of the anode frame is provided with an extension rod I, the bottom center of the anode frame is provided with an extension rod II, and the extension rod II is sleeved in the base plate and used for following rotation when the base plate rotates.
Preferably, the bottom end of the top cover is provided with an annular ring groove, the extension rod I is inserted into the ring groove, and the diameter value of the extension rod I is the same as the width value of the ring groove and is used for being matched with the extension rod II to keep the anode frame in a stable state.
Preferably, an inner gear ring is arranged at the bottom end of the inner cavity of the coating bin, the top end of the inner gear ring is attached to the bottom end of the base plate, the extension rod II is movably sleeved in the base plate, the bottom end of the extension rod II penetrates through the base plate to the inner cavity of the inner gear ring, a gear is fixedly connected with the bottom end of the extension rod II and meshed with teeth on the inner side of the inner gear ring, and the gear is meshed with the inner gear ring to drive the anode frame to rotate when the anode frame synchronously rotates along with the base plate.
The application has the following beneficial effects:
the utility model provides a pair of new energy battery coating equipment drives the backing plate through motor element and rotates for four magnet synchronous rotation on the backing plate, and the fixed position of target this moment, make magnet at pivoted in-process, drive the magnetic field position and change, simultaneously, the backing plate also will drive the battery piece synchronous rotation on the support this moment, make the electric field between battery piece and the target take place the position change, thereby reach the change that changes E x B drift direction, increase electron motion's scope and direction, make the single electron of multidirectional motion can strike the argon atom, improve Ar+ unit time's formation volume, and Ar+ direction of motion will also be influenced this moment, make Ar+ impact target's position more comprehensive.
Meanwhile, when the bracket drives the battery piece to rotate by taking the center of the backing plate as the center of the circle, the gear is meshed with the annular gear, so that the battery piece on the bracket performs autorotation by taking the extension rod I as the center, one end of the battery piece gradually approaches to the target material in the autorotation process, one end of the battery piece gradually leaves the inclined state of the target material and two states parallel to the target material, when the target material is inclined, the electric field intensity of the part of the battery piece, which is close to the target material, is large, and the electric field intensity of the part of the battery piece, which is far away from the target material, is small (E=kQ/r 2 ) Then the electric field force of the part of the battery piece, which is close to the target material, is larger, the action force on electrons is larger, so that the movement state of the electrons is more intense, and the movement direction of the electrons is more disordered due to the more changeable direction of the electric field, so that the electrons collide with argon atoms more intense in unit time, more Ar+ is generated, the range is wider, and the capability of the Ar+ to strike the target material is further improved.
Meanwhile, the battery piece rotates, so that two faces of the battery piece can be opposite to the target material in the rotating process, the two faces of the battery piece can be subjected to film plating processing, the film plating processing efficiency of the battery piece is improved, the two ends of the battery piece are always in the circulating motion of being close to the target material, far away from the target material and being close to the target material in the rotating process, namely, all parts on two sides of the battery piece can move in a high-strength electric field and a low-strength electric field, and when the battery piece is close to the target material, electrons in the electric field are automatically captured, the battery piece is not passively waited for being subjected to film plating by electrons, and the film plating on two sides of the battery piece is more uniform and efficient.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the disclosure and together with the description, serve to explain the principles of the disclosure.
The present application will be more clearly understood from the following detailed description with reference to the accompanying drawings, in which:
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic diagram showing the distribution of the internal structure of the present invention;
FIG. 3 is a schematic diagram of a coating cabin structure according to the present invention;
FIG. 4 is a schematic diagram showing the distribution of the top cover structure of the present invention;
FIG. 5 is a schematic view showing the structural distribution of magnets and anode frames according to the present invention;
FIG. 6 is a schematic view of the structure of an anode frame according to the present invention;
FIG. 7 is a schematic diagram showing the electric field distribution in the initial state of the present invention;
FIG. 8 is a schematic diagram showing the distribution of magnetic fields in an initial state of the present invention;
FIG. 9 is a schematic diagram of the electronic motion trace in the initial state of the present invention;
FIG. 10 is a diagram showing the distribution of electric fields in a rotated state according to the present invention;
FIG. 11 is a diagram showing the distribution of magnetic fields in a rotated state according to the present invention;
fig. 12 is a schematic view of an electronic motion trace in a rotating state according to the present invention.
Reference numerals:
1. a coating bin; 2. a motor assembly; 3. an inner gear ring; 4. an air inlet pipe; 5. a vacuum tube; 6. a top cover; 7. a ring groove; 8. a back plate; 9. a target material; 10. a backing plate; 11. a magnet; 12. a bracket; 13. a sliding groove; 14. a buckling groove; 15. an extension rod I; 16. an extension rod II; 17. a gear; 18. a closure strip; 19. a snap-fit protrusion; 20. and a battery piece.
Detailed Description
The following description of the embodiments of the present application will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all, of the embodiments of the present application. All other embodiments, which can be made by one of ordinary skill in the art based on the embodiments herein without making any inventive effort, are intended to be within the scope of the present application.
Example 1
Referring to fig. 1 to 3, a new energy battery coating device includes a coating chamber 1, where the coating chamber 1 is cylindrical, and is used to provide a space for placing an anode frame, a target 9 and a magnet 11, and provide a closed environment for vacuum coating, the bottom center of the coating chamber 1 is fixedly connected with a motor assembly 2, the output end of the motor assembly 2 is extended into the bottom center of the inner cavity of the coating chamber 1, the middle of the coating chamber 1 is fixedly connected with an air inlet pipe 4 and a vacuum pipe 5, the existing vacuum pump discharges the gas in the coating chamber 1 through the vacuum pipe 5, and a vacuum environment is formed in the coating chamber 1, and quantitative argon is input into the coating chamber 1 through the air inlet pipe 4 at this time for subsequent glow discharge and generation of ar+ ions.
Referring to fig. 1 to 2 and 4, the top end of the film plating bin 1 is buckled with a top cover 6, the bottom end center of the top cover 6 is fixedly connected with a back plate 8, the back plate 8 is hollow cylindrical, a target 9 is fixedly sleeved on the outer side wall of the back plate 8, the target 9 is hollow cylindrical, the back plate 8 is connected with a negative electrode, the cylindrical target 9 can cover surrounding anode frames by three hundred sixty degrees, ar+ moving in multiple directions can always strike on the target 9, a large number of neutral atoms, molecules and secondary electrons are provided, and an annular ring groove 7 is formed in the bottom end of the top cover 6.
Referring to fig. 2, fig. 4 to fig. 5, and fig. 7 to fig. 9, a circular backing plate 10 is placed in the inner cavity of the film plating bin 1, the bottom center of the backing plate 10 is fixedly connected with the output end of the motor assembly 2, the rotation speed provided by the motor assembly 2 is not more than thirty rotations per minute, the motor assembly 2 can drive the backing plate 10 to rotate according to actual requirements, four magnets 11 uniformly distributed in ninety degrees circumferentially are fixedly connected to the top end of the backing plate 10, the magnets 11 are located in the inner cavity of the backing plate 8, the magnets 11 are close to the inner cavity wall of the backing plate 8, one ends of the adjacent two magnets 11, which are opposite to one another, of the magnetic poles of the adjacent two magnets 11 are opposite to one another, so that four groups of arc-shaped mixed magnetic fields can be formed around the target 9, when the motor assembly 2 drives the backing plate 10 to rotate, the four magnets 11 on the backing plate 10 rotate synchronously, and at the moment, the position of the target 9 is fixed, so that the positions of the magnets 11 drive the magnetic fields change in the rotating process, the acting directions of electrons, the directions of the electrons change from fixed spirals to a multidirectional spiral state, and the electron directions of the electrons change from the fixed spiral directions to the directions of electrons, and the directions of electrons, which collide with atomic effects in unit time.
Referring to fig. 2, 5 and 7-9, four anode frames uniformly distributed in ninety degrees in the circumferential direction are arranged on the backing plate 10, the anode frames are connected with the anode, the four anode frames surround the outer side of the target 9, and the four anode frames are arranged opposite to the four magnets 11, so that an electric field is formed between the anode frames and the target 9, the electric field is matched with a magnetic field, the movement direction of electrons is influenced, a penetrating object placing groove is formed in the anode frames, sliding grooves 13 are formed in the centers of four side walls of the object placing groove, battery pieces 20 are fixedly sleeved in the object placing groove, and four sides of the battery pieces 20 are respectively inserted into the four sliding grooves 13, so that the battery pieces 20 can face the target 9, and particles sputtered on the target 9 can be plated on one surface of the battery pieces 20, which faces the target 9.
Referring to fig. 5 to 6, the anode frame includes a support 12 and a sealing strip 18, a side of the support 12 facing the sealing strip 18 is provided with uniformly distributed buckling grooves 14, a side of the sealing strip 18 facing the support 12 is provided with buckling protrusions 19 opposite to the buckling grooves 14, and the buckling protrusions 19 are buckled in the buckling grooves 14, so that an operator can insert the battery pieces 20 into the storage grooves or take out the battery pieces 20 from the storage grooves by removing the sealing strip 18.
Referring to fig. 2, 5 to 6 and 7 to 9, an extension rod i 15 is fixedly connected to the center of the top end of the anode frame, the extension rod i 15 is inserted into the ring groove 7, the diameter value of the extension rod i 15 is the same as the width value of the ring groove 7, an extension rod ii 16 is fixedly connected to the center of the bottom end of the anode frame, the extension rod ii 16 is sleeved in the backing plate 10, when the backing plate 10 drives the magnet 11 to rotate, the battery piece 20 on the anode frame can be driven to synchronously rotate, the electric field between the battery piece 20 and the target 9 is changed, so that the change of the e×b drift direction is achieved, the range and direction of electron movement are increased, single electron capable of multi-directional movement is caused to strike argon atoms, the generation amount of Ar+ in unit time is increased, the movement direction of Ar+ is influenced, and the position of Ar+ striking the target is more comprehensive.
Example two
Referring to fig. 2 to 3, and fig. 10 to 12, based on the first embodiment, an inner ring gear 3 is fixedly connected to the bottom end of an inner cavity of a coating bin 1, the inner ring gear 3 is located below a base plate 10, the top end of the inner ring gear 3 is attached to the bottom end of the base plate 10, an extension rod ii 16 is movably sleeved in the base plate 10, the bottom end of the extension rod ii 16 passes through the base plate 10 to the inner cavity of the inner ring gear 3, a gear 17 is fixedly connected to the bottom end of the extension rod ii 16, and the gear 17 is meshed with teeth on the inner side of the inner ring gear 3.
Referring to fig. 10 to 12, when the bracket 12 drives the battery piece 20 to rotate around the center of the backing plate 10, the gear 17 will engage with the ring gear 3, so that the battery piece 20 on the bracket 12 rotates around the extension rod i 15, and in the process of rotating, one end of the battery piece 20 gradually approaches the target 9, one end gradually approaches the target 9, and the other end is parallel to the target 9, when the target 9 is in the inclined state, the electric field intensity of the part of the battery piece 20 close to the target 9 is high, and the electric field intensity of the part of the battery piece 20 far from the target 9 is small (e=kq/r) 2 ) Then the electric field force of the portion of the battery piece 20, which is close to the target 9, is larger, the action force on the electrons is larger, so that the movement state of the electrons is more intense, and the movement direction of the electrons is more disordered due to the more changeable direction of the electric field, so that the electrons collide with argon atoms more intense in unit time, more Ar+ is generated, the range is wider, and the capability of the Ar+ to strike the target is further improved.
Referring to fig. 10 to 12, simultaneously, the rotation of the battery piece 20 makes two surfaces of the battery piece 20 opposite to the target 9 in the rotation process, so that the two surfaces of the battery piece 20 can be subjected to film plating processing, film plating processing efficiency of the battery piece is improved, in the rotation process of the battery piece 20, two ends of the battery piece 20 are always in the circulating motion of being close to the target 9-away from the target 9-being close to the target 9, that is, all parts on two sides of the battery piece 20 can move in a high-intensity electric field and a low-intensity electric field, and when the battery piece 20 is close to the target 9, electrons in the electric field are automatically captured, the battery piece 20 is not passively waited for being plated, so that film plating on two sides of the battery piece 20 is more uniform and more efficient, in the process, the battery piece 20 drives argon in the film plating bin 1 to change the flowing state, so that the running speed of the argon is accelerated, and the collision probability of the argon atoms and electrons is greatly improved in unit time.

Claims (8)

1. The new energy battery coating equipment is characterized by comprising a coating bin (1), wherein a motor assembly (2) is arranged at the center of the bottom end of the coating bin (1), and a top cover (6) is buckled at the top end opening of the coating bin (1) and is used for forming a vacuum sealing environment of coating in the coating bin (1);
a hollow cylindrical backboard (8) is arranged at the center of the bottom end of the top cover (6), and a hollow cylindrical target (9) is sleeved on the outer side wall of the backboard (8);
a circular base plate (10) is arranged in the inner cavity of the coating bin (1), the bottom center of the base plate (10) is connected with the output end of the motor assembly (2) and used for providing continuous low-speed rotation power for the base plate (10), four magnets (11) uniformly distributed in ninety degrees in the circumferential direction are arranged on the top end of the base plate (10), and the magnets (11) are positioned in the inner cavity of the back plate (8) and used for forming a magnetic field around the target (9);
four anode frames which are uniformly distributed in the ninety-degree circumferential direction are arranged on the backing plate (10), the four anode frames surround the outer side of the target (9), the anode frames are connected with the anode, the back plate (8) is connected with the cathode, an electric field is formed between the anode frames and the target (9), a penetrating storage groove is formed in the anode frames, and a battery piece (20) is sleeved in the storage groove.
2. The new energy battery coating equipment according to claim 1, wherein the middle part of the coating cabin (1) is provided with an air inlet pipe (4) and a vacuum pipe (5) for vacuumizing the inside of the coating cabin (1) and inputting argon for ionization into the coating cabin (1).
3. The new energy battery coating equipment according to claim 1, wherein the magnets (11) are close to the inner cavity wall of the back plate (8), and one ends of the adjacent two magnets (11) opposite to the center of the back plate (8) are opposite in magnetic pole, so that four groups of arc-shaped mixed magnetic fields are formed around the target (9).
4. The new energy battery coating equipment according to claim 1, wherein sliding grooves (13) are formed in the centers of four side walls of the storage groove, and four sides of the battery piece (20) are respectively inserted into the four sliding grooves (13) and used for limiting the position of the battery piece (20).
5. The new energy battery coating equipment according to claim 4, wherein the anode frame comprises a bracket (12) and a sealing strip (18), uniformly distributed buckling grooves (14) are formed in one side, opposite to the sealing strip (18), of the bracket (12), buckling protrusions (19) opposite to the buckling grooves (14) are formed in one side, opposite to the bracket (12), of the sealing strip (18), and the buckling protrusions (19) are buckled in the buckling grooves (14) and are used for taking and placing battery pieces (20) in opposite object grooves.
6. The new energy battery coating equipment according to claim 5, wherein an extension rod I (15) is arranged at the center of the top end of the anode frame, an extension rod II (16) is arranged at the center of the bottom end of the anode frame, and the extension rod II (16) is sleeved in the base plate (10) and used for following rotation when the base plate (10) rotates.
7. The new energy battery coating equipment according to claim 6, wherein an annular ring groove (7) is formed in the bottom end of the top cover (6), the extension rod I (15) is inserted into the ring groove (7), and the diameter value of the extension rod I (15) is the same as the width value of the ring groove (7) and is used for keeping the anode frame in a stable state in cooperation with the extension rod II (16).
8. The new energy battery coating equipment according to claim 6, wherein an inner ring gear (3) is arranged at the bottom end of the inner cavity of the coating bin (1), the top end of the inner ring gear (3) is attached to the bottom end of the backing plate (10), the extension rod II (16) is movably sleeved in the backing plate (10), the bottom end of the extension rod II (16) penetrates through the backing plate (10) to the inner cavity of the inner ring gear (3), a gear (17) is fixedly connected to the bottom end of the extension rod II (16), the gear (17) is meshed with teeth on the inner side of the inner ring gear (3), and when the anode frame synchronously rotates along with the backing plate (10), the gear (17) is meshed with the inner ring gear (3) to drive the anode frame to rotate.
CN202311620212.5A 2023-11-30 2023-11-30 New forms of energy battery coating film equipment Pending CN117626197A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202311620212.5A CN117626197A (en) 2023-11-30 2023-11-30 New forms of energy battery coating film equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202311620212.5A CN117626197A (en) 2023-11-30 2023-11-30 New forms of energy battery coating film equipment

Publications (1)

Publication Number Publication Date
CN117626197A true CN117626197A (en) 2024-03-01

Family

ID=90033435

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202311620212.5A Pending CN117626197A (en) 2023-11-30 2023-11-30 New forms of energy battery coating film equipment

Country Status (1)

Country Link
CN (1) CN117626197A (en)

Similar Documents

Publication Publication Date Title
CN109778136A (en) The method that diamond-like coating is prepared using hot electron plasma technology
CN110106481B (en) Coating device and physical vapor deposition equipment
CN101285172A (en) Rotary magnetron sputtering target
CN101285171A (en) Rotary cylindrical magnetron sputtering target
CN110592547A (en) Controllable magnetron sputtering coating device of directionality
CN101638774A (en) Rotatable sample position of magnetron sputtering device
KR20130112057A (en) Magnetron source, magnetron sputtering device and magnetron sputtering method
CN208791734U (en) A kind of coating machine that gas arc plasma irrigation source is set
CN117626197A (en) New forms of energy battery coating film equipment
CN216738498U (en) Stable coating device that just ionization rate is high
CN102064076B (en) Eccentricity-variable magnetron
CN202643826U (en) Unbalanced magnetron sputtering coating equipment for closed magnetic field
CN109576652A (en) A kind of electric arc ion plating device
CN115786861A (en) Rotary correction baffle mechanism and magnetron sputtering coating equipment
CN102074446A (en) Magnetron with adjustable compound trace
US20230032184A1 (en) Electromagnetic separation type coating device and method
CN210215522U (en) Equipment for evaporating and plating terbium or dysprosium on surface of magnetic material
CN209307480U (en) A kind of hobboing cutter surface recombination coating apparatus that ionization level is high
CN207760414U (en) A kind of coating machine of setting solid arc plasma irrigation source
CN215404482U (en) Magnetron sputtering ring device and magnetron sputtering reactor
CN101988188B (en) Magnetic control device for sputtering
CN111809157A (en) Semiconductor process equipment and magnetron mechanism thereof
CN205710902U (en) Enhancement mode magnetron sputtering coil film coating equipment
CN114990511B (en) Coating method of small-size magnetic material workpiece and vacuum coating monomer machine
CN2099135U (en) Plasma film coating machine for columnar target

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination