CN117329836A - Online automatic anaerobic furnace - Google Patents

Online automatic anaerobic furnace Download PDF

Info

Publication number
CN117329836A
CN117329836A CN202311439487.9A CN202311439487A CN117329836A CN 117329836 A CN117329836 A CN 117329836A CN 202311439487 A CN202311439487 A CN 202311439487A CN 117329836 A CN117329836 A CN 117329836A
Authority
CN
China
Prior art keywords
box
conveying
material box
transfer
baking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202311439487.9A
Other languages
Chinese (zh)
Inventor
赵华卫
王志超
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hubei Xinhai Industrial Intelligent Equipment Co ltd
Original Assignee
Hubei Xinhai Industrial Intelligent Equipment Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hubei Xinhai Industrial Intelligent Equipment Co ltd filed Critical Hubei Xinhai Industrial Intelligent Equipment Co ltd
Priority to CN202311439487.9A priority Critical patent/CN117329836A/en
Publication of CN117329836A publication Critical patent/CN117329836A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/04—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity adapted for treating the charge in vacuum or special atmosphere
    • F27B9/045—Furnaces with controlled atmosphere
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/02—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity of multiple-track type; of multiple-chamber type; Combinations of furnaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/14—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
    • F27B9/20—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace
    • F27B9/24—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor
    • F27B9/243—Endless-strand conveyor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
    • F27B9/3077—Arrangements for treating electronic components, e.g. semiconductors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
    • F27B9/38—Arrangements of devices for charging
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
    • F27B9/40—Arrangements of controlling or monitoring devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/561—Batch processing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/02—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity of multiple-track type; of multiple-chamber type; Combinations of furnaces
    • F27B2009/026—Two or more conveyors, e.g. mounted successively

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Tunnel Furnaces (AREA)

Abstract

The invention discloses an online automatic anaerobic furnace, which relates to the technical field of semiconductor integrated circuit production, and comprises the following components: the frame is provided with a baking box, the interior of the baking box is communicated with a protective gas source, and two ends of the baking box are provided with sealing doors capable of lifting; the conveying mechanism is arranged on the frame and penetrates through the baking box, and a material box with chips is arranged on the conveying mechanism; the material box conveying mechanism is arranged below the conveying mechanism and is used for conveying empty material boxes; the material box lifting mechanism is arranged at one end of the frame and used for lifting the empty material box to the height of the conveying mechanism; the chip feeding mechanism is arranged at one side of the material box lifting mechanism and used for conveying chips into the empty material box lifted by the material box lifting mechanism; the material box transferring mechanism is used for transferring the material box filled with the chip onto the conveying mechanism; and the control system is electrically connected with each mechanism respectively. The invention realizes the pipelining operation, thereby improving the curing efficiency of the chip after the I C integrated circuit is plated with silver paste, and further improving the production efficiency of the chip.

Description

Online automatic anaerobic furnace
Technical Field
The invention relates to the technical field of semiconductor integrated circuit production, in particular to an online automatic anaerobic furnace.
Background
At present, in the chip production process, the I C integrated circuit needs high-temperature anaerobic curing after silver paste is spotted, but the current high-temperature anaerobic curing mode adopts a baking oven to bake, all the chips needing curing are manually placed in the baking oven to be baked, so that silver paste is cured, before the chips are placed in the baking oven, the single chips are required to be orderly placed in the corresponding material boxes in advance by the manual work, then the material boxes and the chips are placed in the baking oven together, the chips are taken out from the baking oven by the manual work after baking is finished, and the whole process needs manual participation, so that the production efficiency of the chips is lower.
Therefore, how to provide an on-line automatic anaerobic oven capable of improving the baking efficiency of chips is a problem to be solved by those skilled in the art.
Disclosure of Invention
In view of the above, the invention provides an on-line automatic anaerobic furnace, which realizes that chips after silver paste is dispensed are automatically loaded into an empty material box and are automatically conveyed in a baking box to be baked and solidified, so that the solidification efficiency of the chips after silver paste is dispensed of an Integrated Circuit (IC) is improved, and the production efficiency of the chips is further improved.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
the invention provides an online automatic anaerobic furnace, which comprises:
the baking oven is arranged on the rack, the interior of the baking oven is communicated with a protective gas source, and lifting sealing doors are arranged at two ends of the baking oven along the length of the rack;
the conveying mechanism is arranged on the rack, penetrates through the baking box, is provided with a material box with chips, and is used for conveying the material box with chips into the baking box for baking, and conveying the material box with chips after baking and curing of the baking box out of the baking box;
the material box conveying mechanism is arranged below the conveying mechanism and is used for conveying empty material boxes;
the material box lifting mechanism is arranged at one end of the frame and used for lifting the empty material box conveyed by the material box conveying mechanism to the height of the conveying mechanism;
the chip feeding mechanism is arranged at one side of the material box lifting mechanism and used for conveying chips into the empty material box lifted by the material box lifting mechanism;
the material box transferring mechanism is arranged between the conveying mechanism and the material box lifting mechanism and is used for transferring the material box provided with the chip on the material box lifting mechanism to the conveying mechanism;
and the control system is electrically connected with the conveying mechanism, the material box lifting mechanism, the chip feeding mechanism and the material box transferring mechanism respectively.
According to the online automatic anaerobic furnace provided by the invention, the online automatic anaerobic furnace further comprises a transition box and a cooling box, wherein the transition box is arranged at one end of the baking box, which is close to the material box lifting mechanism, the cooling box is arranged at the other end of the baking box, the transition box, the baking box and the cooling box are mutually communicated, the conveying mechanism sequentially penetrates through the transition box, the baking box and the cooling box, both ends of the transition box and both ends of the cooling box are also provided with lifting sealing doors, and the interiors of the transition box and the cooling box are also communicated with a protective gas source.
According to the online automatic anaerobic furnace provided by the invention, the condenser is arranged in the cooling box and is communicated with an external water source.
According to the online automatic anaerobic furnace provided by the invention, the conveying mechanism comprises two conveying motors and two conveying chains, the two conveying chains are mutually spaced, the conveying motor is in transmission connection with one conveying chain, a plurality of clips are connected between the two conveying chains, the clips are arranged at intervals along the conveying direction of the conveying chains, the clips are used for clamping the material boxes filled with chips, and the conveying motor is electrically connected with the control system.
According to the online automatic anaerobic furnace provided by the invention, the material box conveying mechanism comprises a conveying belt, a conveying motor and a transferring assembly, wherein the conveying motor is in transmission connection with the conveying belt, the transferring assembly is arranged on a frame above the tail end of the conveying belt, the transferring assembly is used for transferring an empty material box on the conveying belt to the material box lifting mechanism, and the conveying motor is electrically connected with the control system.
According to the online automatic anaerobic furnace provided by the invention, the transfer assembly comprises the transfer cylinder and the transfer clamp, the fixed end of the transfer cylinder is fixed on the frame, the transfer clamp is fixed at the telescopic end of the transfer cylinder, and the transfer clamp is used for transferring the empty material box on the conveying belt to the material box lifting mechanism.
According to the online automatic anaerobic furnace provided by the invention, the conveyor belt is provided with a plurality of stop blocks at intervals along the length direction.
According to the online automatic anaerobic furnace provided by the invention, the material box lifting mechanism comprises the vertical guide rail, the lifting motor and the supporting plate, wherein the supporting plate is slidably arranged on the vertical guide rail, the lifting motor is fixed at the bottom of the vertical guide rail, the lifting motor is used for driving the supporting plate to lift along the vertical guide rail, the supporting plate is used for supporting and lifting the empty material box transferred from the conveying belt by the transfer clamp, and the lifting motor is electrically connected with the control system.
According to the online automatic anaerobic furnace provided by the invention, the chip feeding mechanism comprises the slideway and the chip pushing cylinder, the slideway is arranged on the frame, the fixed end of the chip pushing cylinder is fixed on the frame, and the free end of the chip pushing cylinder is used for pushing the chip on the slideway into the empty material box on the supporting plate.
According to the online automatic anaerobic furnace provided by the invention, the material box transferring mechanism comprises a transferring air cylinder and a transferring material clamp, wherein the fixed end of the transferring air cylinder is fixed on the frame above the conveying mechanism, the transferring material clamp is fixed at the free end of the transferring air cylinder, the transferring material clamp is used for transferring the material box filled with chips on the supporting plate to the material clamp on the conveying chain, and the transferring air cylinder is electrically connected with the control system.
Compared with the prior art, the invention discloses an online automatic anaerobic furnace, which can load chips into empty material boxes through the cooperation of a chip feeding mechanism and a material box lifting mechanism, further fill each empty material box with the chips required to be solidified with silver paste, transfer the material box filled with the chips from the material box lifting mechanism to a conveying mechanism through a material box transferring mechanism, convey the material box filled with the chips into a baking box for baking under the conveying of the conveying mechanism, convey and discharge the material box by the conveying mechanism after baking, and introduce protective gas into the baking box to form an anaerobic environment in the baking box so as to prevent the oxygen from oxidizing the silver paste on the chips and influencing the production quality of the chips; the whole process realizes the pipelining operation, so as to improve the curing efficiency of the chip after the I C integrated circuit is plated with silver paste, and further improve the production efficiency of the chip.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only embodiments of the present invention, and that other drawings can be obtained according to the provided drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of an on-line automatic anaerobic furnace according to the present invention;
FIG. 2 is a right side view of the in-line automated anaerobic oven provided by the present invention;
FIG. 3 is a cross-sectional view of the in-line automated anaerobic furnace of FIG. 2 taken along the direction A-A provided by the present invention;
FIG. 4 is a schematic diagram of a conveying mechanism according to the present invention;
FIG. 5 is a schematic view of a transfer assembly according to the present invention;
FIG. 6 is a schematic view of a transfer assembly according to another embodiment of the present invention;
fig. 7 is a schematic diagram of a connection structure between a conveyor belt and a conveyor motor provided by the invention;
fig. 8 is a schematic structural view of a connection structure of a conveyor belt and a conveyor motor provided by the invention under another view angle;
FIG. 9 is a schematic view of a cartridge lifting mechanism according to the present invention;
fig. 10 is a schematic structural diagram of a chip feeding mechanism provided by the invention;
FIG. 11 is a schematic structural diagram of a chip feeding mechanism according to the present invention under another view angle;
fig. 12 is a schematic structural view of a cartridge transferring mechanism provided by the present invention.
In the figure: 1 is a frame; 2 is a conveying mechanism; 21 is a conveyor chain; 3 is a material box conveying mechanism; 31 is a conveyor belt; 32 is a conveying motor; 33 is a transfer assembly; 331 is a transfer cylinder; 3311 is a first transfer cylinder; 3312 is a second transfer cylinder; 332 is a transfer clip; 4 is a material box lifting mechanism; 41 is a vertical guide rail; 42 is a lift motor; 43 is a support plate; 5 is a chip feeding mechanism; 51 is a slideway; 52 is a chip pushing cylinder; 6 is a material box transferring mechanism; reference numeral 61 denotes a transfer cylinder; 611 is a first transfer cylinder; 612 is a second transfer cylinder; 62 is a transfer nip; 7 is a baking oven; 8 is a pipe interface; 9 is baking equipment; 10 is a cartridge containing a chip; 11 is an empty material box; 12 is a transition box; 13 is a cooling box; 14 is a condenser pipeline; 15 is a material clamp; 16 is a stop.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-3, an embodiment of the present invention discloses an on-line automatic anaerobic furnace, comprising: the device comprises a frame 1, a conveying mechanism 2, a material box conveying mechanism 3, a material box lifting mechanism 4, a chip feeding mechanism 5, a material box transferring mechanism 6 and a control system.
The side wall of the frame 1 is provided with a panel so that the frame 1 forms a box-type structure, the frame 1 is provided with a baking box 7, the interior of the baking box 7 is communicated with a protective gas source, and both ends of the baking box 7 along the length of the frame 1 are provided with sealing doors capable of lifting; the protection gas is preferably nitrogen gas, the pipe joint 8 used for communicating with a nitrogen gas source is arranged at the top of the baking box 7, the liftable sealing door is a pneumatic door, the pneumatic door is connected with the control system, the lifting of the pneumatic door is controlled by the control system, after the pneumatic door descends, a relatively sealed space is formed in the baking box 7, the baking box 7 is filled with nitrogen gas as the protection gas, so that a space close to an anaerobic environment is formed in the baking box 7, a plurality of baking devices 9 are arranged in the baking box 7, and the baking device is used for baking and solidifying chips after I C integrated circuits are subjected to silver paste deposition.
The conveying mechanism 2 is arranged on the frame 1, the conveying mechanism 2 penetrates through the baking box 7, a material box 10 with chips is arranged on the conveying mechanism 2, and the conveying mechanism 2 is used for conveying the material box 10 with chips into the baking box 7 for baking and conveying the material box 10 with chips, baked and solidified by the baking box 7, out of the baking box 7; the conveying mechanism 2 is used for conveying the material box 10 filled with chips on the rack 1 and baking the chips in the material box in the baking box 7, and the conveying mechanism 2 realizes automatic feeding and discharging of the material box 10 filled with chips at the station of the baking box 7, so that the problem that the chips to be baked need to be manually placed into the baking box 7 or taken out from the baking box 7 in the prior art is solved.
The magazine conveying mechanism 3 is arranged below the conveying mechanism 2 and is used for conveying empty magazines 11; meanwhile, the material box conveying mechanism 3 is also an automatic conveying line, so that some empty material boxes 11 can be temporarily stored, meanwhile, the empty material boxes 11 can be conveyed, and materials can be conveyed for a chip baking process.
The material box lifting mechanism 4 is arranged at one end of the frame 1 and is used for lifting the empty material box 11 conveyed by the material box conveying mechanism 3 to the height of the conveying mechanism 2; the material box lifting mechanism 4 is used for lifting the empty material box 11 on the material box conveying mechanism 3 to a chip feeding station, so that chips to be solidified by silver paste can be conveniently filled into the empty material box 11 at the chip feeding station, and the chip feeding station is a joint part of the conveying mechanism 2 and the material box lifting mechanism 4.
The chip feeding mechanism 5 is arranged at one side of the material box lifting mechanism 4 and is used for conveying chips into the empty material box 11 lifted by the material box lifting mechanism 4; in the lifting process of the material box lifting mechanism 4, the chip feeding mechanism 5 is utilized to convey chips into the empty material box 11.
The material box transferring mechanism 6 is arranged between the conveying mechanism 2 and the material box lifting mechanism 4 and is used for transferring the material box 10 with the chip on the material box lifting mechanism 4 onto the conveying mechanism 2; after each empty material box 11 is filled with chips to be solidified by silver paste, the material box 10 with the chips on the material box lifting mechanism 4 is transferred to the conveying mechanism 2, and the material box 10 with the chips is conveyed into the baking box 7 for baking and solidification under the action of the conveying mechanism 2.
The control system is electrically connected with the conveying mechanism 2, the material box conveying mechanism 3, the material box lifting mechanism 4, the chip feeding mechanism 5 and the material box transferring mechanism 6 respectively. Through the arrangement of the control system, the actions of all the mechanisms can be controlled, and all the mechanisms work together, so that the production of the whole production line is coherent.
The chip can be loaded into the empty material boxes 11 through the cooperation of the chip loading mechanism 5 and the material box lifting mechanism 4, and then each empty material box 11 is filled with the chip with silver paste to be solidified, the material box 10 loaded with the chip is transported to the conveying mechanism 2 from the material box lifting mechanism 4 through the material box transporting mechanism 6, the material box 10 loaded with the chip is conveyed into the baking box 7 for baking under the conveying of the conveying mechanism 2, the conveying mechanism 2 conveys and feeds the material after the baking is finished, and the baking box 7 is filled with protective gas so as to form an anaerobic environment in the baking box 7 and prevent the silver paste on the chip from being oxidized by oxygen, thereby influencing the production quality of the chip; the whole process realizes the pipelining operation, so as to improve the curing efficiency of the chip after the I C integrated circuit is plated with silver paste, and further improve the production efficiency of the chip.
According to the online automatic anaerobic furnace provided by the invention, the online automatic anaerobic furnace further comprises a transition box 12 and a cooling box 13, wherein the transition box 12 is arranged at one end of the baking box 7 close to the material box lifting mechanism 4, the cooling box 13 is arranged at the other end of the baking box 7, the transition box 12, the baking box 7 and the cooling box 13 are mutually communicated, the conveying mechanism 2 sequentially penetrates through the transition box 12, the baking box 7 and the cooling box 13, both ends of the transition box 12 and the cooling box 13 are also provided with lifting sealing doors, and the interiors of the transition box 12 and the cooling box 13 are also communicated with a protective gas source. The top of transition case 12 and cooling tank 13 all is provided with the pipe interface 8 that is used for with nitrogen gas source intercommunication, through the setting of transition case 12 and cooling tank 13, is filled with nitrogen gas as the guard gas to transition case 12 and cooling tank 13 in the same for nitrogen gas in transition case 12 and the cooling tank 13 has the effect of blockking to the nitrogen gas in the stoving case 7, and then can prevent the too fast overflow stoving case 7 of nitrogen gas in the stoving case 7, guarantees the anaerobic environment in the stoving case 7.
According to the online automatic anaerobic furnace provided by the invention, a condenser is arranged in the cooling box 13 and is communicated with an external water source. The condenser and the external water source are communicated through the condenser pipeline 14, and the condenser is arranged in the cooling box 13, so that the cartridge 10 with the chip after high-temperature baking can be cooled, and the chip in the cartridge can be cooled, so that the solidification effect of silver paste on the chip is ensured.
Referring to fig. 4, according to the on-line automatic anaerobic furnace provided by the present invention, the conveying mechanism 2 includes a conveying motor (not shown in the figure) and conveying chains 21, the conveying chains 21 are provided with two conveying chains 21, the two conveying chains 21 are spaced from each other, the conveying motor is in transmission connection with one of the conveying chains 21, a plurality of clips 15 are connected between the two conveying chains 21, the plurality of clips 15 are arranged at intervals along the conveying direction of the conveying chain 21, the clips 15 are used for clamping the cartridges 10 with chips, and the conveying motor is electrically connected with the control system. Through adopting the structural arrangement of two conveying chains 21, one is used as an active conveying chain, the other is used as an auxiliary conveying chain, and the two conveying chains 21 are connected through a material clamp 15, so that the two conveying chains 21 can synchronously move, meanwhile, a sealing door which can be lifted conveniently stretches in the middle of the two conveying chains 21, so that the gap between the baking oven 7 and the outside is reduced, the tightness of the baking oven 7 is improved, and the formation of an anaerobic environment in the baking oven 7 is facilitated; the material clamp 15 is used for clamping and fixing the material box 10 filled with chips.
Referring to fig. 5-8, according to the on-line automatic anaerobic furnace provided by the invention, a material box conveying mechanism 3 comprises a conveying belt 31, a conveying motor 32 and a transferring assembly 33, wherein the conveying motor 32 is in transmission connection with the conveying belt 31, the transferring assembly 33 is arranged on a frame 1 above the tail end of the conveying belt 31, the transferring assembly 33 is used for transferring an empty material box 11 on the conveying belt 31 on a material box lifting mechanism 4, and the conveying motor 32 is electrically connected with a control system. The conveyer belt 31 is preferably the PVC belt, and a plurality of empty magazine 11 can be placed to conveyer belt 31, takes out the chip in the magazine after the cooling of cooler bin 13, then with empty magazine 11 reflow to conveyer belt 31 on, the circulation utilization of empty magazine 11 of being convenient for, a plurality of empty magazine 11 spaced place on conveyer belt 31 is convenient for transfer unit 33 carries out single transfer to empty magazine 11 on the conveyer belt 31, avoids transfer unit 33 to get the material in-process to empty magazine 11, adjacent empty magazine 11 influence each other.
Referring to fig. 5 and 6, according to the in-line automatic anaerobic furnace provided by the present invention, the transfer assembly 33 includes a transfer cylinder 331 and a transfer clamp 332, the fixed end of the transfer cylinder 331 is fixed on the frame 1, the transfer clamp 332 is fixed on the telescopic end of the transfer cylinder 331, and the transfer clamp 332 is used for transferring the empty cartridge 11 on the conveyor belt 31 onto the cartridge lifting mechanism 4. In this embodiment, the transfer cylinder 331 includes a first transfer cylinder 3311 and a second transfer cylinder 3312, where the fixed end of the first transfer cylinder 3311 is fixed on the frame 1, the fixed end of the second transfer cylinder 3312 is fixed on the telescopic end of the first transfer cylinder 3311, the first transfer cylinder 3312 is used to provide lateral movement to drive the second transfer cylinder 3312 to do lateral movement, the telescopic end of the second transfer cylinder 3312 is connected to the transfer clamp 332, the transfer clamp 332 adopts a pneumatic finger, the second transfer cylinder 3312 is used to provide vertical movement to drive the transfer clamp 332 to do vertical movement, and then the empty magazine 11 on the conveyor belt 31 is clamped and transferred to the magazine lifting mechanism 4 through the cooperation of the first transfer cylinder 3311, the second transfer cylinder 3312 and the pneumatic finger 3312. In other embodiments, a mechanical arm structure may be used, as long as the empty magazine 11 on the conveyor belt 31 can be clamped and transferred to the magazine lifting mechanism 4.
Referring to fig. 8, according to the in-line automatic anaerobic furnace provided by the present invention, a plurality of stoppers 16 are provided on a conveyor belt 31 at intervals along the length direction thereof. The dog 16 and conveyer belt 31 integrated into one piece, the conveyer belt 31 can adopt the structure of PVC belt band rib promptly, through the setting of dog 16, is used for placing empty magazine 11 between the adjacent dog 16, can realize the fixed to empty magazine 11, can make simultaneously between the adjacent empty magazine 11 to have certain clearance, is convenient for transfer clamp 332 and snatchs and shift empty magazine 11 singly, prevents that adjacent empty magazine 11 from utilizing transfer clamp 332 to snatch the in-process and produce the influence. Preferably, baffles are provided on both sides of the conveyor belt 31, which are arranged to block the empty magazine 11 on both sides of the conveyor belt 31.
Referring to fig. 9, according to the on-line automatic anaerobic furnace provided by the present invention, the cartridge lifting mechanism 4 includes a vertical guide rail 41, a lifting motor 42 and a support plate 43, the support plate 43 is slidably disposed on the vertical guide rail 41, the lifting motor 42 is fixed at the bottom of the vertical guide rail 41, the lifting motor 42 is used for driving the support plate 43 to lift along the vertical guide rail 41, the support plate 43 is used for supporting and lifting the empty cartridges 11 transferred from the conveyor belt 31 by the transfer clips 332, and the lifting motor 42 is electrically connected with the control system. Specifically, the vertical guide rail 41 can adopt the structure of frame and lead screw, and the lead screw setting is in the inside of frame, backup pad 43 and lead screw thread fit, and the frame has the effect of spacing direction to the motion of backup pad 43 simultaneously, promotes motor 42 and screw connection, and empty magazine 11 is located backup pad 43, under the drive of promotion motor 42, and backup pad 43 can go up and down along the frame on the lead screw, and then realizes the promotion to empty magazine 11.
Referring to fig. 10 and 11, according to the on-line automatic anaerobic furnace provided by the invention, a chip feeding mechanism 5 comprises a slideway 51 and a chip pushing cylinder 52, wherein the slideway 51 is arranged on a frame 1, the fixed end of the chip pushing cylinder 52 is fixed on the frame 1, and the free end of the chip pushing cylinder 52 is used for pushing chips on the slideway 51 into an empty material box 11 on a supporting plate 43. In the present embodiment, by stacking together chips to be filled in one empty magazine 11, the height of the support plate 43 is raised to a level with the slide 51, and the stacked chips are pushed together into the empty magazine 11 by the chip pushing cylinder 52; the chips can also be pushed into the empty magazine 11 individually, specifically, the height of the supporting plate 43 is lifted to a position flush with the slide way 51, a chip is placed on the slide way 51, the chip is pushed into the empty magazine 11 by the chip pushing cylinder 52, then the lifting motor 42 is used for controlling the supporting plate 43 to descend by the height of the chip, then the chip is placed on the slide way 51, the chip pushing cylinder 52 is used for pushing the chip into the magazine filled with the chip, and so on, the empty magazine 11 is filled with the chip, then the supporting plate 43 is lifted to a position flush with the slide way 51 by the lifting motor 42, and the magazine 10 filled with the chip is transported into the material clips 15 on the conveying chain 21 by the magazine transporting mechanism 6.
Referring to fig. 12, according to the on-line automatic anaerobic furnace provided by the invention, the material box transferring mechanism 6 comprises a transferring air cylinder 61 and a transferring material clamp 62, the fixed end of the transferring air cylinder 61 is fixed on the frame 1 above the conveying mechanism 2, the transferring material clamp 62 is fixed on the free end of the transferring air cylinder 61, the transferring material clamp 62 is used for transferring the material box 10 with chips on the supporting plate 43 to the material clamp 15 on the conveying chain 21, and the transferring air cylinder 61 is electrically connected with the control system. In this embodiment, the transferring cylinder 61 includes a first transferring cylinder 611 and a second transferring cylinder 612, and the transferring gripper 62 also adopts a pneumatic finger structure, specifically, the first transferring cylinder 611 is disposed along the conveying direction of the conveying chain 21, the fixed end of the second transferring cylinder 612 is fixed at the telescopic end of the first transferring cylinder 611, and the transferring gripper 62 is fixed at the telescopic end of the second transferring cylinder 612, and by the mutual cooperation of the first transferring cylinder 611, the second transferring cylinder 612 and the transferring gripper 62, the chip-loaded magazine 10 on the supporting plate 43 is clamped and transferred onto the gripper 15 on the conveying chain 21; the first transfer cylinder 611 may be a rodless cylinder, and in other embodiments, the magazine transfer mechanism 6 may be a mechanical arm, so long as the clamping and transferring of the chip-loaded magazine 10 on the support plate 43 to the clips on the conveyor chain 21 can be achieved.
In the present specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different point from other embodiments, and identical and similar parts between the embodiments are all enough to refer to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant points refer to the description of the method section.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (10)

1. An on-line automatic anaerobic oven comprising:
the baking oven is arranged on the rack, the interior of the baking oven is communicated with a protective gas source, and lifting sealing doors are arranged at two ends of the baking oven along the length of the rack;
the conveying mechanism is arranged on the rack, penetrates through the baking box, is provided with a material box with chips, and is used for conveying the material box with chips into the baking box for baking, and conveying the material box with chips after baking and curing of the baking box out of the baking box;
the material box conveying mechanism is arranged below the conveying mechanism and is used for conveying empty material boxes;
the material box lifting mechanism is arranged at one end of the frame and used for lifting the empty material box conveyed by the material box conveying mechanism to the height of the conveying mechanism;
the chip feeding mechanism is arranged at one side of the material box lifting mechanism and used for conveying chips into the empty material box lifted by the material box lifting mechanism;
the material box transferring mechanism is arranged between the conveying mechanism and the material box lifting mechanism and is used for transferring the material box provided with the chip on the material box lifting mechanism to the conveying mechanism;
and the control system is electrically connected with the conveying mechanism, the material box lifting mechanism, the chip feeding mechanism and the material box transferring mechanism respectively.
2. The on-line automatic anaerobic furnace according to claim 1, further comprising a transition box and a cooling box, wherein the transition box is arranged at one end of the baking box close to the material box lifting mechanism, the cooling box is arranged at the other end of the baking box, the transition box, the baking box and the cooling box are mutually communicated, the conveying mechanism sequentially penetrates through the transition box, the baking box and the cooling box, sealing doors capable of being lifted are arranged at two ends of the transition box and the cooling box, and the transition box and the cooling box are communicated with a protective gas source.
3. The on-line automatic anaerobic furnace according to claim 2, wherein a condenser is arranged in the cooling tank, and the condenser is communicated with an external water source.
4. The on-line automatic anaerobic furnace according to claim 1, wherein the conveying mechanism comprises two conveying motors and conveying chains, the two conveying chains are spaced from each other, the conveying motor is in transmission connection with one of the conveying chains, a plurality of clips are connected between the two conveying chains, the clips are arranged at intervals along the conveying direction of the conveying chains, the clips are used for being clamped with the cartridges filled with chips, and the conveying motors are electrically connected with the control system.
5. The on-line automatic anaerobic furnace according to claim 4, wherein the magazine transport mechanism comprises a conveyor belt, a conveyor motor and a transfer assembly, the conveyor motor is in driving connection with the conveyor belt, the transfer assembly is arranged on a frame above the end of the conveyor belt, the transfer assembly is used for transferring empty magazines on the conveyor belt to the magazine lifting mechanism, and the conveyor motor is electrically connected with the control system.
6. The in-line automatic anaerobic furnace according to claim 5, wherein the transfer assembly comprises a transfer cylinder and a transfer clip, the fixed end of the transfer cylinder is fixed on the frame, the transfer clip is fixed on the telescopic end of the transfer cylinder, and the transfer clip is used for transferring empty cartridges on the conveyor belt onto the cartridge lifting mechanism.
7. The in-line automatic anaerobic furnace according to claim 5, wherein the conveyor belt is provided with a plurality of stoppers at intervals along the length direction thereof.
8. The on-line automatic anaerobic furnace according to claim 6, wherein the magazine lifting mechanism comprises a vertical guide rail, a lifting motor and a support plate, the support plate is slidably arranged on the vertical guide rail, the lifting motor is fixed at the bottom of the vertical guide rail, the lifting motor is used for driving the support plate to lift along the vertical guide rail, the support plate is used for supporting and lifting the empty magazine transferred from the conveyor belt by the transfer clip, and the lifting motor is electrically connected with the control system.
9. The on-line automatic anaerobic furnace according to claim 8, wherein the chip feeding mechanism comprises a slide and a chip pushing cylinder, the slide is arranged on the frame, a fixed end of the chip pushing cylinder is fixed on the frame, and a free end of the chip pushing cylinder is used for pushing chips on the slide into an empty material box on the supporting plate.
10. The on-line automatic anaerobic furnace according to claim 9, wherein the magazine transfer mechanism comprises a transfer cylinder and a transfer magazine, the fixed end of the transfer cylinder is fixed on the frame above the transfer mechanism, the transfer magazine is fixed at the free end of the transfer cylinder, the transfer magazine is used for transferring the magazines with chips on the support plate to the magazine on the transfer chain, and the transfer cylinder is electrically connected with the control system.
CN202311439487.9A 2023-11-01 2023-11-01 Online automatic anaerobic furnace Pending CN117329836A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202311439487.9A CN117329836A (en) 2023-11-01 2023-11-01 Online automatic anaerobic furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202311439487.9A CN117329836A (en) 2023-11-01 2023-11-01 Online automatic anaerobic furnace

Publications (1)

Publication Number Publication Date
CN117329836A true CN117329836A (en) 2024-01-02

Family

ID=89295503

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202311439487.9A Pending CN117329836A (en) 2023-11-01 2023-11-01 Online automatic anaerobic furnace

Country Status (1)

Country Link
CN (1) CN117329836A (en)

Similar Documents

Publication Publication Date Title
CN208086750U (en) Full-automatic fold send plate all-in-one machine
CN212668243U (en) Feeding and conveying device for plate edge sealing production line
CN216470440U (en) Double-tray circulating feeding and storing device
CN208135419U (en) A kind of board separator manipulator handling equipment
CN112357502A (en) Double-layer backflow type feeding device and using method thereof
CN221259467U (en) Online automatic anaerobic furnace
CN117329836A (en) Online automatic anaerobic furnace
KR100259148B1 (en) Circulating type parts supplying apparatus
US4972936A (en) Conveying system
CN218878641U (en) Hydraulic valve block feeding and conveying device
KR20150014677A (en) System for Unloading PCB with Buffer Member
CN217626404U (en) Fork mechanism and pile up neatly machine people
CN217147279U (en) Automatic conveying and warehousing line for glass processing
CN207209398U (en) A kind of automatic flap device of new-energy automobile power battery cover plate
CN114955429B (en) Overhead production line material conveying equipment
CN116465179A (en) Full-automatic lithium battery vacuum drying line
CN215100420U (en) Reversing mechanism
CN107045998B (en) Automatic plate feeding machine for lead frame
CN110980236B (en) Automatic loading and unloading box device
CN210393020U (en) Semiconductor flitch loading and unloading transfer station
CN110155762B (en) Semiconductor material plate loading and unloading transfer station
CN211254235U (en) Automatic circuit board stacking and feeding equipment
CN210425775U (en) Automatic vacuum drying production line for batteries
CN207061338U (en) The automatically casin bunching device of injection machine
CN219669389U (en) DBC base plate conveying production line

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination