CN117305971A - Straight-pull type silicon core drawing furnace - Google Patents
Straight-pull type silicon core drawing furnace Download PDFInfo
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- CN117305971A CN117305971A CN202311310068.5A CN202311310068A CN117305971A CN 117305971 A CN117305971 A CN 117305971A CN 202311310068 A CN202311310068 A CN 202311310068A CN 117305971 A CN117305971 A CN 117305971A
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 47
- 238000009434 installation Methods 0.000 claims abstract description 25
- 230000007246 mechanism Effects 0.000 claims abstract description 23
- 239000010453 quartz Substances 0.000 claims abstract description 21
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 21
- 238000001816 cooling Methods 0.000 claims abstract description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 17
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 17
- 235000017166 Bambusa arundinacea Nutrition 0.000 claims description 16
- 235000017491 Bambusa tulda Nutrition 0.000 claims description 16
- 241001330002 Bambuseae Species 0.000 claims description 16
- 235000015334 Phyllostachys viridis Nutrition 0.000 claims description 16
- 239000011425 bamboo Substances 0.000 claims description 16
- 229910052786 argon Inorganic materials 0.000 claims description 9
- 239000003638 chemical reducing agent Substances 0.000 claims description 4
- 230000033001 locomotion Effects 0.000 claims description 4
- 238000002955 isolation Methods 0.000 claims description 3
- 238000004804 winding Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 9
- 238000005520 cutting process Methods 0.000 abstract description 7
- 239000000463 material Substances 0.000 abstract description 7
- 238000004080 punching Methods 0.000 abstract description 4
- 238000004140 cleaning Methods 0.000 abstract description 3
- 238000000227 grinding Methods 0.000 abstract description 3
- 230000000694 effects Effects 0.000 abstract description 2
- 230000005611 electricity Effects 0.000 abstract description 2
- 230000002708 enhancing effect Effects 0.000 abstract 1
- 239000013078 crystal Substances 0.000 description 19
- 230000008569 process Effects 0.000 description 9
- 239000002994 raw material Substances 0.000 description 5
- 230000009471 action Effects 0.000 description 4
- 238000003466 welding Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000004321 preservation Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 description 1
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000009191 jumping Effects 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 230000009347 mechanical transmission Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000004857 zone melting Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a straight-pull type silicon core drawing furnace which mainly comprises a furnace cylinder and an auxiliary chamber furnace cylinder, wherein a furnace cover is arranged above the furnace cylinder, a main chamber is formed by the furnace cylinder and the auxiliary chamber furnace cylinder, a valve bin is arranged below the auxiliary chamber furnace cylinder, the auxiliary chamber furnace cylinder and the valve bin form an auxiliary chamber, the auxiliary chamber furnace cylinder are positioned above the main chamber, a quartz crucible is rotatably arranged at the center of the inside of the furnace cylinder, a heater is arranged on the inner wall of the furnace cylinder, a water cooling screen and a guide cylinder are arranged above the inside of the furnace cylinder, the water cooling screen and the guide cylinder are arranged below the furnace cylinder, and the water cooling screen and the guide cylinder are positioned above the quartz crucible. The invention has the advantages that: the invention adopts the Czochralski method and uses the multi-gear set mechanism, the inside of the multi-gear set mechanism is provided with at least forty weight installation gears, the steering directions are the same, at least forty silicon cores can be drawn at one time through a plurality of weight, 4 working procedures of sticking rods, cutting silicon cores, degumming and cleaning and cone grinding punching are removed, the expenditure cost of personnel, auxiliary materials, water, electricity and equipment is saved, and the effects of reducing the cost and enhancing the efficiency are achieved.
Description
Technical Field
The invention relates to the technical field of silicon core production, in particular to a straight-pull type silicon core drawing furnace.
Background
The silicon core is one of the indispensable raw materials in the production process of the polysilicon, and the cutting of the square silicon core comprises 5 working procedures of stick sticking, silicon core cutting, degumming and cleaning, cone grinding and punching, annealing and packaging, wherein each working procedure needs matched personnel and corresponding equipment and instruments, and a large-area factory building is needed.
In the stick sticking process, stick sticking glue and temperature need to be strictly controlled, otherwise, the risk of stick cutting occurs; the consumption of auxiliary materials in the cutting process is relatively large, broken wires and hidden cracks can occur in the cutting process, the yield of qualified silicon cores is affected, and meanwhile, the yield efficiency of the qualified silicon cores is affected; silicon core loss occurs in the stages of cone punching, annealing and packing.
At present, a zone melting method is also used for drawing silicon cores, but the quantity of the silicon cores which can be drawn by each furnace is limited, and in the drawing process, pulses generated by a stepping motor and an alternating current motor are used for influencing the drawing process of the silicon cores; the tungsten wire rope used for drawing the silicon core on the lifting head cannot reach the optimal state in rotation performance, damage moment and forward and reverse repeated twisting life, and the generation efficiency is affected.
Based on this, the application provides a straight-pull type silicon core drawing furnace, which can draw not less than 40 silicon cores at one time, and the used equipment runs stably, so that the influence on the silicon core drawing is small, and the problems can be solved.
Disclosure of Invention
(one) solving the technical problems
Aiming at the defects in the prior art, the invention provides a straight-pull type silicon core drawing furnace, which solves the problems mentioned in the background art and overcomes the defects in the prior art.
(II) technical scheme
In order to achieve the above purpose, the present application adopts the following technical scheme:
the utility model provides a straight-pull type silicon core drawing furnace, includes a stove section of thick bamboo and an auxiliary chamber stove section of thick bamboo, the bell is installed to the top of stove section of thick bamboo, and the main chamber is constituteed to the two, the valve storehouse is installed to the below of auxiliary chamber stove section of thick bamboo, and the two is constituteed the auxiliary chamber, and it is located main chamber top, the inside center department rotation of stove section of thick bamboo installs quartz crucible, and the heater is installed to the inner wall of stove section of thick bamboo, installs water-cooling screen and draft tube above the inside of stove section of thick bamboo, and the former is in last, the latter under, and all be located quartz crucible's top, reel device is installed in the top rotation of auxiliary chamber stove section of thick bamboo, and it twines flexible axle tungsten wire rope on the wheel, multi-gear group mechanism is installed to the movable end of flexible axle tungsten wire rope, and reciprocating motion about it, multi-gear group mechanism's below rotates and installs a plurality of crucible weights, a plurality of seed crystals are all installed to the below, and a plurality of rotation directions are the same, and are opposite with quartz rotation direction.
As a further description of the above technical solution:
argon pipes are arranged outside the main chamber and the auxiliary chamber, a main chamber vacuum pump is arranged outside the main chamber through a pipeline, and an auxiliary chamber vacuum pump is arranged outside the auxiliary chamber through a pipeline.
As a further description of the above technical solution:
two electrode holders are arranged below the furnace cylinder and are electrically connected with the anode and the cathode of the heater.
As a further description of the above technical solution:
the center below the furnace cylinder is provided with a rotary table, and the quartz crucible is arranged above the rotary table.
As a further description of the above technical solution:
the pull head lifting motor is arranged above the auxiliary chamber furnace cylinder, the output end of the pull head lifting motor is provided with a speed reducer, and the reel device is arranged at the output end of the speed reducer.
As a further description of the above technical solution:
the multi-gear set mechanism consists of a power gear, a plurality of heavy hammer installation gears and a direction-adjusting gear, wherein the heavy hammer installation gears and the direction-adjusting gear are round and are alternately arranged one by one, adjacent heavy hammer installation gears and direction-adjusting gears are meshed, head and tail parts are not meshed, and the power gear is meshed with the head heavy hammer installation gear.
As a further description of the above technical solution:
and an isolation valve is arranged in the valve bin.
As a further description of the above technical solution:
the inside of the auxiliary chamber furnace cylinder is provided with a coil wheel and a gear driving motor, the coil wheel and the gear driving motor are collinear, the former is arranged at the upper part and the latter is arranged at the lower part, the output end of the gear driving motor is arranged together with a power gear, and an electric wire on the gear driving motor is wound outside the coil wheel.
(III) beneficial effects
Due to the adoption of the technical scheme, the beneficial effects of the application are as follows:
1. the straight-pulling type silicon core drawing furnace adopts a straight-pulling method, a multi-gear set mechanism is used, at least forty weight installation gears are installed in the multi-gear set mechanism, the directions of the gears are the same, at least forty silicon cores can be drawn at one time through a plurality of weight, the processes of sticking a rod, cutting the silicon cores, degumming, cleaning, grinding cone punching and 4 processes are removed, the expenditure cost of personnel, auxiliary materials, water, electricity and equipment is saved, and the effects of reducing the cost and increasing the efficiency are achieved.
2. The straight-pull type silicon core drawing furnace uses a servo motor as a power source, can output constant power, can not affect the drawing of a silicon core, and a traction rope below a lifting head is a tungsten wire flexible shaft which is formed by winding a plurality of layers of tungsten wires in a layered manner, each layer is wound into a spiral spring shape and is formed by nesting a plurality of tungsten wires with the same diameter, so that the straight-pull type silicon core drawing furnace is used for spatial transmission which requires relative movement during working, and can be bent relative to a rigid shaft, so that mechanical transmission is simple and reliable.
Drawings
FIG. 1 is a schematic cross-sectional view of the overall structure of the present invention;
FIG. 2 is a schematic diagram of the structural arrangement of the multi-gear mechanism of the present invention;
FIG. 3 is a schematic diagram showing the installation state of the weight according to the present invention;
FIG. 4 is a schematic diagram of the weight layout of the present invention.
In the figure: 1-furnace cylinder, 2-furnace cover, 3-pull head motor, 4-reel device, 5-auxiliary chamber furnace cylinder, 6-valve bin, 7-flexible shaft tungsten wire rope, 8-coil wheel, 9-solidified felt, 10-multi-gear set mechanism, 11-heavy hammer, 12-seed crystal, 13-isolating valve, 14-furnace table window, 15-heater, 16-electrode base, 17-quartz crucible, 18-main chamber vacuum pump, 19-auxiliary chamber vacuum pump, 20-power gear, 21-heavy hammer installation gear, 22-steering gear, 23-tungsten wire rope, 24-shaft sleeve, 25-turntable, 26-argon pipe, 27-gear driving motor, 28-water cooling screen and 29-guide cylinder.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-3, a straight-pull type silicon core drawing furnace comprises a furnace cylinder 1, a furnace cover 2 is arranged on the furnace cylinder, a furnace body is formed by the furnace cover 2, an auxiliary chamber furnace cylinder 5 is arranged above the furnace cover 2, a valve cabin 6 is arranged between the furnace cover 2 and the furnace cover, an isolation valve 13 is arranged in the valve cabin 6, a main chamber vacuum pump 18 is arranged outside the furnace cylinder 1, an auxiliary chamber vacuum pump 19 is arranged outside the auxiliary chamber furnace cylinder 5, the furnace cylinder 1 and the auxiliary chamber furnace cylinder 5 can be vacuumized through the two vacuum pumps, an argon pipe 26 is arranged outside the furnace cylinder 1 and the auxiliary chamber furnace cylinder 5, argon gas can be filled into the furnace cylinder 1 and the auxiliary chamber furnace cylinder 5 for pressurizing, a heater 15 is arranged on the inner wall of the furnace cylinder 1, a quartz crucible 17 is rotatably arranged in the center of the inner part of the furnace cylinder 1 for charging, under the action of the heater 15, raw materials can be melted, the multi-gear set mechanism 10 capable of vertically reciprocating is arranged in the auxiliary chamber furnace 5, a plurality of weight installation gears 21 are rotatably arranged in the multi-gear set mechanism, weights 11 are arranged below the weight installation gears 21, seed crystals 12 are arranged below the weights 11, the rotation directions of the weight installation gears 21 are the same and opposite to the rotation directions of the quartz crucible 17, the seed crystals 12 extend into the quartz crucible 17, the melt gradually crystallizes on the seed crystals along with the uniform rising of the multi-gear set mechanism 10 and is converted into a solid phase, the silicon core meeting the requirements is pulled along with the slow pulling of the seed crystals, the seed crystals 12 and the quartz crucible 17 reversely rotate, the growth speed of the silicon core can be improved, and part of convection can be counteracted.
In the embodiment of the application:
referring to fig. 1, a turntable 25 is installed under the furnace drum 1, and a quartz crucible 17 is installed thereon and can rotate together with the turntable 25, wherein the turntable 25 can use a servo motor as a power source to ensure stable rotation.
In the embodiment of the application:
referring to fig. 1, two electrode bases 16 are installed below the furnace barrel 1 and connected with the heater 15, and can supply power to the heater 15, and the electric heating mode is convenient for controlling the temperature, the heater 15 surrounds the periphery of the quartz crucible 17, so that the quartz crucible 17 can be ensured to be heated uniformly, the raw materials are ensured to be melted uniformly, a water cooling screen 28 and a guide barrel 29 are installed inside the furnace barrel 1, the guide barrel 29 is positioned above the quartz crucible 17, the water cooling screen 28 is positioned above the guide barrel 29, the guide barrel 29 plays a role in preserving heat for high-temperature silicon melt, energy is saved, the blocking effect of the guide barrel 29 can prevent the heater 15 from radiating heat of single crystals, the temperature gradient required by the growth of the single crystals is ensured, and the crystallization rate of the single crystals is stabilized. Meanwhile, the flow direction of the protective gas in the furnace can be ensured by the guide cylinder 29, the gas flow speed on the surface of the liquid surface is accelerated, volatile impurities are taken away, the water cooling screen 28 can well absorb radiant heat, the heating intensity of the furnace wall can be reduced, the furnace body is prevented from being damaged, and the pulling speed can be improved to a certain extent.
In the embodiment of the application:
referring to fig. 1, a pull head motor 3 is installed above a secondary chamber furnace 5, the output end of the pull head motor is decelerated through a decelerator, torque is increased, a reel device 4 is connected after the pull head motor is decelerated through the decelerator, a flexible shaft tungsten wire rope 7 is wound on the reel device 4, a multi-gear set mechanism 10 is installed at the outer end of the flexible shaft tungsten wire rope 7, up-and-down movement of the multi-gear set mechanism 10 can be achieved by winding the flexible shaft tungsten wire rope 7, and the flexible shaft tungsten wire rope 7 is stable in transmission and is less affected by the environment.
In the embodiment of the application:
referring to fig. 1, a coil wheel 8 and a gear driving motor 27 are installed in the auxiliary chamber furnace 5, wires on the gear driving motor 27 are wound on the coil wheel 8, and an output end of the gear driving motor 27 is connected with a power gear 20 in the multi-gear set mechanism 10 to power the multi-gear set mechanism 10, so that the rotation of the weight installation gear 21 is realized.
In the embodiment of the application:
referring to fig. 2, the multi-gear set mechanism 10 includes a power gear 20, a plurality of weight installation gears 21 and a direction adjusting gear 22, the plurality of weight installation gears 21 and the direction adjusting gear 22 are alternately arranged one by one, and are round, adjacent two are meshed, and the head and tail weight installation gears 21 are not meshed, the power gear 20 is meshed with the first weight installation gear 21 therein, the weight installation gear 21 and the direction adjusting gear 22 can be driven to rotate by rotating the power gear 20, the direction adjusting gear 22 is used for changing the rotation direction of the weight installation gear 21 meshed therewith, thereby ensuring that the rotation directions of the plurality of weight installation gears 21 are the same, the rotation speed of the plurality of weight installation gears 21 can be the same by adjusting the number of teeth of each component, the multi-gear set mechanism 10 has simple structure and compact arrangement, and the installation number of the weights 11 can be added at will as required, and is not less than 40.
In the embodiment of the application:
referring to fig. 1, a curing felt 9 is installed below the multi-gear set mechanism 10, the curing felt 9 is a material with functions of heat preservation, heat insulation and the like, and when a silicon core is drawn at a high temperature, the curing felt 9 can well insulate heat, so that the rotating gear is well insulated, and damage to the gear at a high temperature is avoided.
In the embodiment of the application:
referring to fig. 1, a hearth window 14 is installed at one side of the outside of the furnace cover 2, so that a worker can check the melting condition of the raw material therefrom.
In the embodiment of the application:
referring to fig. 1 and 3, a plurality of shaft sleeves 24 are installed below the multi-gear mechanism 10, penetrate through the solidified felt 9, a tungsten wire rope 23 is installed above the heavy hammer 11, and the shaft sleeves 24 are sleeved outside the tungsten wire rope 23 to protect and limit the tungsten wire rope 23 and prevent the tungsten wire rope from jumping.
The working principle of the application is as follows:
1. charging: after the furnace bottom is cleaned by dust collection, a graphite gasket is placed on the electrode base 16, a round felt, a carbon felt, a heat preservation cylinder, a heater, a pot support, a carbon-carbon pot top, a quartz crucible 17 (loading), a guide cylinder and other thermal field components and heat preservation materials are placed, and the furnace cover 2 and the furnace cylinder 1 are rotated to be in place and lowered to be closed.
2. Leak detection: and after the vacuum leak detection passes, a valve on the argon pipe 26 is opened to enter air, and after a certain pressure is reached, the heater 15 is opened and closed.
3. Melting material: after the switch of the heater 15 is turned on, the material is melted, and the silicon material is melted to be melted completely, so that the condition in the furnace is closely concerned.
4. Feeding: charging again by using a feeder, wherein the feeder enters the auxiliary chamber furnace cylinder 5, the valve bin 6 and the furnace cylinder 1 are closed, then the auxiliary chamber vacuum pump 19 is started to vacuumize, and the bottom opening of the heater 15 is opened for charging; after all the feeding is completed and the auxiliary chamber is cleaned, a heavy hammer 11 and a seed crystal 12 are installed; the auxiliary chamber and the valve housing 6 are rotated and lowered to connect with the main chamber.
5. Adjusting the furnace pressure: after the vacuum button is opened to set a certain pressure value, the fixed flow is set to feed argon into the furnace.
6. A certain rotation speed is set for the seed crystal 12 and the quartz crucible 17, the pot position is adjusted to a certain position,
7. after the seed crystal 12 is adjusted to a certain position, the seed crystal 12 is preheated.
8. After the preheating is completed, the power is regulated to stabilize the temperature, and when the temperature reaches the welding temperature, the seed crystal 12 is lowered to the welding position.
9. Starting neck guiding: after confirming that the welding is good and the temperature of the neck is reached, the neck state is checked through the welding window or the furnace table window 14, and the button is clicked to draw the silicon core.
10. When the seeding length reaches the system requirement length, the process of shouldering is carried out, the diameter of the crystal is gradually increased, the actual diameter of the crystal is measured by a diameter measuring instrument on an observation window, the reading value of a camera is compared, the deviation is corrected in time, the shape of the surface of the silicon core is noted, and the smooth and bright surface is maintained.
11. And (3) separating the silicon core: after the silicon core grows to the required length, the silicon core is lifted by the lifting head and separated from the liquid level of the raw material.
12. The main heating power and the auxiliary heating power are zeroed, and the heater 15 switch is turned off.
13. After given crystal liter and crystal rotation, closing argon, closing a main chamber valve, and after waiting for a period of time, closing a vacuum pump.
14. Opening an argon switch, opening a V1 valve, pressurizing and maintaining the pressure for several hours, and taking out the drawn silicon core.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (8)
1. A straight-pull type silicon core drawing furnace is characterized in that: including stove section of thick bamboo (1) and auxiliary chamber stove section of thick bamboo (5), bell (2) are installed to the top of stove section of thick bamboo (1), and the main chamber is constituteed to the two, valve storehouse (6) are installed to the below of auxiliary chamber stove section of thick bamboo (5), and the auxiliary chamber is constituteed to the two, and it is located the main chamber top, quartz crucible (17) are installed in the rotation of the inside center department of stove section of thick bamboo (1), heater (15) are installed to the inner wall of stove section of thick bamboo (1), water-cooling screen (28) and draft tube (29) are installed to the inside top of stove section of thick bamboo (1), and the former is in last, the latter under, and all be located the top of quartz crucible (17), reel device (4) are installed in the top rotation of auxiliary chamber stove section of thick bamboo (5), and the winding has flexible axle tungsten wire rope (7) on its wheel, flexible axle tungsten wire rope (7) movable end is installed multi-gear train mechanism (10), and its up-down reciprocating motion, the below of multi-gear train mechanism (10) rotates and installs a plurality of weights (11), a plurality of weights (12) are installed down, and the direction of rotation of a plurality of weights (11) is the same with quartz crucible rotation direction.
2. A czochralski silicon core drawing furnace as defined in claim 1, wherein: argon pipes (26) are arranged outside the main chamber and the auxiliary chamber, a main chamber vacuum pump (18) is arranged outside the main chamber through a pipeline, and an auxiliary chamber vacuum pump (19) is arranged outside the auxiliary chamber through a pipeline.
3. A czochralski silicon core drawing furnace as defined in claim 1, wherein: two electrode holders (16) are arranged below the furnace cylinder (1) and are electrically connected with the anode and the cathode of the heater (15).
4. A czochralski silicon core drawing furnace as defined in claim 1, wherein: a turntable (25) is arranged in the center of the lower part of the furnace cylinder (1), and the quartz crucible (17) is arranged above the turntable (25).
5. A czochralski silicon core drawing furnace as defined in claim 1, wherein: a pull head motor (3) is arranged above the auxiliary chamber furnace cylinder (5), a speed reducer is arranged at the output end of the pull head motor, and the reel device (4) is arranged at the output end of the speed reducer.
6. A czochralski silicon core drawing furnace as defined in claim 1, wherein: the multi-gear set mechanism (10) consists of a power gear (20), a plurality of heavy hammer installation gears (21) and a direction-adjusting gear (22), wherein the heavy hammer installation gears (21) and the direction-adjusting gear (22) are round in surrounding mode and are alternately arranged one by one, adjacent heavy hammer installation gears and direction-adjusting gear (22) are meshed, head and tail are not meshed, and the power gear (20) is meshed with the head heavy hammer installation gear (21).
7. A czochralski silicon core drawing furnace as defined in claim 1, wherein: an isolation valve (13) is arranged in the valve bin (6).
8. A czochralski silicon core drawing furnace as defined in claim 1, wherein: the inside of the auxiliary chamber furnace cylinder (5) is provided with a coil wheel (8) and a gear driving motor (27), the coil wheel and the gear driving motor are collinear, the former is arranged at the top and the bottom, the output end of the gear driving motor (27) is arranged together with a power gear (20), and an electric wire on the gear driving motor (27) is wound outside the coil wheel (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311310068.5A CN117305971A (en) | 2023-10-11 | 2023-10-11 | Straight-pull type silicon core drawing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311310068.5A CN117305971A (en) | 2023-10-11 | 2023-10-11 | Straight-pull type silicon core drawing furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117305971A true CN117305971A (en) | 2023-12-29 |
Family
ID=89284709
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311310068.5A Pending CN117305971A (en) | 2023-10-11 | 2023-10-11 | Straight-pull type silicon core drawing furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117305971A (en) |
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2023
- 2023-10-11 CN CN202311310068.5A patent/CN117305971A/en active Pending
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