CN117206668A - Multi-wavelength coaxial laser scanning system - Google Patents
Multi-wavelength coaxial laser scanning system Download PDFInfo
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- CN117206668A CN117206668A CN202211095528.2A CN202211095528A CN117206668A CN 117206668 A CN117206668 A CN 117206668A CN 202211095528 A CN202211095528 A CN 202211095528A CN 117206668 A CN117206668 A CN 117206668A
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- 239000007787 solid Substances 0.000 claims abstract description 32
- 239000000463 material Substances 0.000 claims abstract description 10
- 239000002184 metal Substances 0.000 claims description 8
- 239000013078 crystal Substances 0.000 claims description 3
- 239000000835 fiber Substances 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 3
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 abstract description 7
- 230000003287 optical effect Effects 0.000 abstract description 7
- 239000007769 metal material Substances 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 2
- 229910052755 nonmetal Inorganic materials 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
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Abstract
A multi-wavelength coaxial laser scanning system is characterized in that two lasers respectively output a solid laser beam with a first wavelength and an annular laser beam with a second wavelength, wherein the solid laser beam is perpendicular to the solid laser beam, and two laser pulses are overlapped in time through a TTL signal generator; a first 45-degree reflecting mirror, a second 45-degree reflecting mirror and a hollow 45-degree reflecting mirror which are sequentially arranged along the light path direction of the solid laser beam, and a third 45-degree reflecting mirror and a fourth 45-degree reflecting mirror which are sequentially arranged along the light path direction of the annular laser beam; the solid laser beam passes through the central hole of the hollow 45-degree reflecting mirror along a straight line, and meanwhile, the annular laser beam is reflected by the hollow 45-degree reflecting mirror, and the annular laser beam is combined with the solid laser beam to form a coaxial laser beam after the optical path is turned by 90 degrees; the laser processing device comprises a reciprocating oscillating mirror, and the reciprocating oscillating mirror reflects the coaxial laser after beam combination to the surface of a flat plate to be processed for laser processing. The application can clean the material mixed with the metal material and the nonmetal material in the laser cleaning processing, and has good cleaning effect.
Description
Technical Field
The application relates to a laser scanning processing system based on a reciprocating oscillating mirror, in particular to a laser scanning processing system based on the fact that the reciprocating oscillating mirror reflects two coaxial laser beams with different types and different wavelengths.
Background
Laser scanning processing is a common laser processing method based on the reciprocating oscillating mirror, however, in practical application, the laser absorptivity of processing objects of different materials to different wavelengths is different, for example: the non-metallic material has high laser absorptivity for 10.6 μm wavelength, the metallic material has high laser absorptivity for 1.06 μm wavelength, and for some special materials or applications, such as laser cleaning field, the object to be cleaned is a paint containing rust, which contains both metallic and non-metallic substances, and further such as a certain workpiece to be cleaned, part of the area is metallic and part of the area is non-metallic, then the laser system is required to output two laser beams with different wavelengths during cleaning, or the two laser beams can be switched at any time.
In order to solve the technical problems, the application provides a laser scanning processing system capable of outputting two lasers with different wavelengths, which not only can coaxially output the lasers with the two wavelengths, but also can coaxially output the laser with one wavelength as a round point and the laser with the other wavelength as a ring, thus being very suitable for the field of laser cleaning.
Disclosure of Invention
The application provides a multi-wavelength coaxial laser scanning system, which comprises a laser generator, a laser beam combining device and a laser processing device, wherein the laser generator comprises a first laser (1), a second laser (2) and a TTL signal generator (14), the first laser (1) outputs a solid laser beam (12) with a first wavelength, the second laser (2) outputs an annular laser beam (13) with a second wavelength, the light emitting directions of the first laser (1) and the second laser (2) are mutually perpendicular, the first wavelength is not equal to the second wavelength, and the TTL signal generator (14) simultaneously controls the first laser (1) and the second laser (2) by outputting TTL signals so that laser pulses emitted by the two lasers overlap in time; the laser beam combining device comprises a first 45-degree reflecting mirror (3), a second 45-degree reflecting mirror (4) and a hollow 45-degree reflecting mirror (9) which are sequentially arranged along the light path direction of the solid laser beam (12), and a third 45-degree reflecting mirror (5) and a fourth 45-degree reflecting mirror (6) which are sequentially arranged along the light path direction of the annular laser beam (13), wherein a round hole is formed in the center position of the hollow 45-degree reflecting mirror (9), and a high-reflection film is plated on one side of the annular laser beam (13) facing at least; the solid laser beam (12) passes through the central hole of the hollow 45-degree reflecting mirror (9) along a straight line, meanwhile, the annular laser beam (13) is reflected by the hollow 45-degree reflecting mirror (9), and the light path is bent at 90 degrees and then is combined with the solid laser beam (12) to form a coaxial laser beam; the laser processing device comprises reciprocating oscillating mirrors (10, 14), and the reciprocating oscillating mirrors (10) reflect coaxial laser beams after beam combination to the surface of a flat plate (11) to be processed, so as to perform laser processing.
In one embodiment, at least one light facing side of the reciprocating oscillating mirror (10) is plated with a metal film capable of reflecting the first wavelength laser light and the second wavelength laser light simultaneously, meanwhile, a first focusing lens (7) is arranged between the second 45-degree reflecting mirror (4) and the hollow 45-degree reflecting mirror (9), and a second focusing lens (8) is arranged between the fourth 45-degree reflecting mirror (6) and the hollow 45-degree reflecting mirror (9).
In another embodiment, the reciprocating oscillating mirror (14) is an off-axis parabolic mirror with both reflection and focusing functions.
Preferably, the first 45 ° mirror surface and the second 45 ° mirror surface are coated with a high-reflection film or a metal film capable of reflecting the first wavelength laser light, and the third 45 ° mirror surface and the fourth 45 ° mirror surface are coated with a high-reflection film or a metal film capable of reflecting the second wavelength laser light.
Preferably, the axis of the circular hole is 45 degrees to the surface of the hollow 45-degree reflecting mirror (9), and the diameter of the circular hole is larger than the diameter of the solid laser beam (12) and smaller than the inner ring diameter of the annular laser beam (13).
Preferably, the first wavelength is 10.6 μm, the second wavelength is 1.06 μm, or the first wavelength is 1.06 μm, the second wavelength is 10.6 μm, the material of the focusing lens (7, 8) is correspondingly selected to be ZnSe and Ge capable of transmitting laser light with a wavelength of 10.6 μm, and quartz capable of transmitting laser light with a wavelength of 1.06 μm.
Preferably, the first laser (1) is CO 2 The second laser (2) is a solid laser or a fiber laser output by Nd-YAG crystals.
The working principle of the laser scanning system is as follows: the laser processing method comprises the steps that a first laser (1) outputs a solid laser beam (12) with a first wavelength, a second laser (2) outputs an annular laser beam (13) with a second wavelength, the two wavelength laser beams are mutually perpendicular when light is emitted, a TTL signal generator (14) outputs TTL signals to control the two wavelength laser beams to overlap in time, then the first wavelength solid laser beam (12) passes through a central circular hole of a hollow 45-degree reflecting mirror (9) and is incident on a reciprocating oscillating mirror (10) after being reflected by two 45-degree reflecting mirrors (3, 4), and meanwhile, the second wavelength annular laser beam (13) is reflected by the two 45-degree reflecting mirrors (5, 6) and the hollow 45-degree reflecting mirror (9), is combined with the solid laser beam (12) and is coaxial, is incident on the reciprocating oscillating mirror (10) in a ring mode, and is reflected on a workpiece 11 to be processed through the reciprocating oscillating mirrors (10, 14), and laser processing is completed.
In the two laser beam light path paths, two focusing lenses (7, 8) are respectively arranged between the latter 45-degree reflecting mirror and the hollow 45-degree reflecting mirror, at least one light-incident side of the reciprocating oscillating mirror (10) is plated with a metal film capable of reflecting laser beams with two wavelengths at the same time, and the focusing lenses (7, 8) can adjust the focuses of the two laser beams to be on the surface of a workpiece (11) to be processed; instead of two focusing lenses (7, 8), the oscillating mirror (10) may be an off-axis parabolic mirror with both reflection and focusing functions.
The multi-wavelength coaxial laser scanning system provided by the application can be suitable for materials to be cleaned, which are mixed with metal materials and nonmetal materials in laser cleaning processing, the cleaning effect is obviously improved, and the application range of the laser system is enlarged.
Drawings
Figure 1 is a first embodiment of a multi-wavelength coaxial laser scanning system provided by the present application,
figure 2 is a schematic view of the structure of a hollow 45 deg. mirror,
figure 3 is a plot of the spots of two laser beams of different wavelengths after focusing on a reciprocating oscillating mirror,
figure 4 is a schematic diagram of TTL control signals and two lasers after being controlled,
fig. 5 is a second embodiment of the multi-wavelength coaxial laser scanning system provided by the present application.
DETAILED DESCRIPTION OF EMBODIMENT (S) OF INVENTION
Referring to fig. 1-4, a first embodiment of a multi-wavelength coaxial laser scanning system provided by the present application includes a laser generator, a laser beam combining device and a laser processing device. The laser generator comprises a first laser 1, a second laser 2 and a TTL signal generator 14, wherein the first laser 1 outputs a solid laser beam 12 with the wavelength of 10.6 mu m, the second laser 2 outputs an annular laser beam 13 with the wavelength of 1.06 mu m, the light emergent directions of the first laser 1 and the second laser 2 are mutually perpendicular, and the TTL signal generator 14 simultaneously controls the first laser 1 and the second laser 2 by outputting TTL signals so that laser pulses emitted by the two lasers overlap in time; the laser beam combining device comprises a first 45-degree reflecting mirror 3, a second 45-degree reflecting mirror 4, a first focusing lens 7, a hollow 45-degree reflecting mirror 9, a third 45-degree reflecting mirror 5, a fourth 45-degree reflecting mirror 6 and a second focusing lens 8, wherein the first 45-degree reflecting mirror 3, the second 45-degree reflecting mirror 4, the first focusing lens 7 and the hollow 45-degree reflecting mirror 9 are sequentially arranged along the light path direction of a solid laser beam 12, and the third 45-degree reflecting mirror 5, the fourth 45-degree reflecting mirror 6 and the second focusing lens 8 are sequentially arranged along the light path direction of an annular laser beam 13, wherein a round hole is formed in the center position of the hollow 45-degree reflecting mirror 9, and a high-reflection film is plated on one side facing at least to the annular laser beam 13; the laser processing device comprises a reciprocating oscillating galvanometer 10, and the reciprocating oscillating galvanometer 10 reflects coaxial laser beams after beam combination to the surface of a flat plate 11 to be processed, so as to perform laser processing.
Referring to fig. 1, after being reflected by the first 45 ° reflecting mirror 3, the solid laser beam 12 with the wavelength of 10.6 μm turns 90 ° on the optical path, then is reflected by the second 45 ° reflecting mirror 4, the optical path is parallel to the solid laser beam 12 during output, and after being focused by the first focusing lens 7, the solid laser beam passes through the central circular hole of the hollow 45 ° reflecting mirror 9 and then enters the reciprocating oscillating mirror 10 in the form of a circular point; meanwhile, after the annular laser beam 13 with the wavelength of 1.06 mu m is reflected by the third 45 DEG reflecting mirror 5, the optical path turns 90 DEG, then is reflected by the fourth 45 DEG reflecting mirror 6, the optical path is parallel to the annular laser beam 13 during output, and then is focused by the second focusing lens 8 and reflected by the hollow 45 DEG reflecting mirror 9, and the optical path turns 90 DEG and enters the reciprocating oscillating mirror 10 in an annular shape. The two laser beams are still coaxial, and focused at a point,
referring to fig. 2, the axis of the central circular hole of the hollow 45 ° reflecting mirror 9 forms 45 ° with the surface of the reflecting mirror 9, the diameter of the central hole is larger than the diameter of the solid laser beam 12 and smaller than the diameter of the inner ring of the annular laser beam 12, and at least the light-facing side is coated with a 45 ° high reflection film of 1.06 μm wavelength laser. The hollow 45-degree reflecting mirror 9 is arranged at the intersection of the solid beam 13 and the annular beam 12, and is obliquely arranged at 45 degrees, two mutually perpendicular laser beams are coaxial through the hollow 45-degree reflecting mirror 9, and the laser spots incident on the reciprocating oscillating mirror 10 are shown in fig. 3, wherein the solid laser beam 12 is focused at a center to form a point, the annular beam 13 is focused into a ring, and the ring is around the focusing point of the solid beam 12.
Two coaxial laser beams are irradiated onto the reciprocating oscillating mirror 10, at least the light facing side of the reciprocating oscillating mirror 10 is plated with a metal film which can simultaneously realize the simultaneous 90 DEG reflection of the laser with the wavelength of 10.6 mu m and the laser with the wavelength of 1.06 mu m, and the reciprocating oscillating mirror 10 is controlled to reciprocate, so that the coaxial solid beam 13 and the annular beam 12 are driven to reciprocate together to finish laser processing.
The first laser 1 is CO 2 The second laser 2 is a solid laser or a fiber laser output by Nd-YAG crystals.
Referring to FIG. 4, a schematic diagram of a 1.06 μm wavelength laser and a 10.6 μm wavelength laser synchronized by using a TTL signal generator 14 is shown. The TTL signal generator 14 sends out a TTL signal 15 and simultaneously controls CO 2 The lasers 1 and 2 output pulse laser, so that the laser pulse 16 output by the laser 2 overlaps with the laser pulse 17 output by the CO2 laser 1 in time, and the two laser beams are prevented from overlapping in time.
The first focusing lens 7 may be made of a material transparent to laser light with a wavelength of 10.6 μm such as ZnSe and Ge, and the second focusing lens 8 may be made of a material transparent to laser light with a wavelength of 1.06 μm such as quartz.
Fig. 5 shows a second embodiment of a multi-wavelength coaxial laser scanning system according to the present application, and compared with the first embodiment, the technical solution eliminates the lens 7 and the lens 8, and replaces the galvanometer 10 with the off-axis parabolic mirror 14 having both reflection and focusing functions, so that the optical path system can be simplified.
The application can also exchange the laser systems with two different wavelengths to form a focusing dot with the center of laser with the wavelength of 1.06 mu m, and a focusing ring with the edge of laser with the wavelength of 10.6 mu m surrounds the focusing dot of the laser with the wavelength of 1.06 mu m.
The output wavelength of the two types of lasers can be changed at will, and only the corresponding lens and the coating film are required to be changed, so that the coaxial light beam output of the application is realized.
The foregoing has shown and described the basic principles and main features of the present application and the advantages of the present application. It would be appreciated by those skilled in the art that changes may be made in these embodiments without departing from the principles and spirit of the application, the scope of which is defined in the claims and their equivalents.
Claims (7)
1. The utility model provides a coaxial laser scanning system of multi-wavelength, includes laser generator, laser beam combining device and laser beam processing device, its characterized in that: the laser generator comprises a first laser (1), a second laser (2) and a TTL signal generator (14), wherein the first laser (1) outputs a solid laser beam (12) with a first wavelength, the second laser (2) outputs an annular laser beam (13) with a second wavelength, the light emitting directions of the first laser (1) and the second laser (2) are mutually perpendicular, the first wavelength is not equal to the second wavelength, and the TTL signal generator (14) simultaneously controls the first laser (1) and the second laser (2) by outputting TTL signals so that laser pulses emitted by the two lasers overlap in time; the laser beam combining device comprises a first 45-degree reflecting mirror (3), a second 45-degree reflecting mirror (4) and a hollow 45-degree reflecting mirror (9) which are sequentially arranged along the light path direction of the solid laser beam (12), and a third 45-degree reflecting mirror (5) and a fourth 45-degree reflecting mirror (6) which are sequentially arranged along the light path direction of the annular laser beam (13), wherein a round hole is formed in the center position of the hollow 45-degree reflecting mirror (9), and a 45-degree high-reflection film is plated on one side of the annular laser beam (13) facing at least; the solid laser beam (12) passes through the central hole of the hollow 45-degree reflecting mirror (9) along a straight line, meanwhile, the annular laser beam (13) is reflected by the hollow 45-degree reflecting mirror (9), and the light path is bent at 90 degrees and then is combined with the solid laser beam (12) to form a coaxial laser beam; the laser processing device comprises reciprocating oscillating mirrors (10, 14), and the reciprocating oscillating mirrors (10) reflect coaxial laser beams after beam combination to the surface of a flat plate (11) to be processed, so as to perform laser processing.
2. The multi-wavelength coaxial laser scanning system according to claim 1, wherein at least a light-facing side of the reciprocating oscillating mirror (10) is coated with a metal film capable of reflecting the first wavelength laser light and the second wavelength laser light simultaneously, and a first focusing lens (7) is disposed between the second 45 ° mirror (4) and the hollow 45 ° mirror (9), and a second focusing lens (8) is disposed between the fourth 45 ° mirror (6) and the hollow 45 ° mirror (9).
3. The multi-wavelength on-axis laser scanning system as claimed in claim 1, wherein the reciprocating oscillating mirror (14) is an off-axis parabolic mirror with both reflection and focusing functions.
4. A multi-wavelength coaxial laser scanning system according to claim 2 or 3, characterized in that: the surfaces of the first 45-degree reflecting mirror and the second 45-degree reflecting mirror are plated with high-reflection films or metal films capable of reflecting the laser of the first wavelength, and the surfaces of the third 45-degree reflecting mirror and the fourth 45-degree reflecting mirror are plated with high-reflection films or metal films capable of reflecting the laser of the second wavelength.
5. A multi-wavelength coaxial laser scanning system according to any of claims 1-3, the axis of the circular hole being 45 ° to the surface of the hollow 45 ° mirror (9), the diameter of the circular hole being larger than the diameter of the solid laser beam (12) and smaller than the inner ring diameter of the annular laser beam (13).
6. The multi-wavelength coaxial laser scanning system according to claim 1 or 2, wherein: the first wavelength is 10.6 μm, the second wavelength is 1.06 μm, or the first wavelength is 1.06 μm, the second wavelength is 10.6 μm, the materials of the focusing lenses (7, 8) are respectively selected to be ZnSe and Ge capable of transmitting laser light with the wavelength of 10.6 μm and quartz capable of transmitting laser light with the wavelength of 1.06 μm.
7. A multi-wavelength coaxial laser scanning system according to any of claims 1-3, wherein: the first laser (1) is CO 2 The second laser (2) is a solid laser or a fiber laser output by Nd-YAG crystals.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211095528.2A CN117206668A (en) | 2022-09-17 | 2022-09-17 | Multi-wavelength coaxial laser scanning system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211095528.2A CN117206668A (en) | 2022-09-17 | 2022-09-17 | Multi-wavelength coaxial laser scanning system |
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| Publication Number | Publication Date |
|---|---|
| CN117206668A true CN117206668A (en) | 2023-12-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211095528.2A Pending CN117206668A (en) | 2022-09-17 | 2022-09-17 | Multi-wavelength coaxial laser scanning system |
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| CN (1) | CN117206668A (en) |
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- 2022-09-17 CN CN202211095528.2A patent/CN117206668A/en active Pending
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