CN117168362B - Device and method for measuring verticality of triaxial motion platform - Google Patents
Device and method for measuring verticality of triaxial motion platform Download PDFInfo
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Abstract
The invention discloses a device and a method for measuring the verticality of a triaxial moving platform, wherein the device comprises a laser, 3 pentagonal beam splitting prisms, 5 pentagonal prisms, 4 straightness interference mirrors, 4 straightness reflection mirrors and 4 interference signal receivers, wherein laser beams emitted by the laser are divided into a 1 st path of light beams and a 2 nd path of light beams through a 1 st pentagonal beam splitting prism, and the 1 st path of light beams are measuredzTranslational shaftxStraightness in the direction; the 2 nd beam is divided into a 3 rd beam and a 4 th beam by a 2 nd pentagonal beam splitting prism, and the 3 rd beam is measuredzTranslational shaftyStraightness in the direction; the 4 th beam is divided into a 5 th beam and a 6 th beam by a 3 rd pentagonal beam splitting prism, and the 5 th beam is measuredyStraightness to a translational axis, 6 th path of light beam measurementxStraightness to a translation axis. The invention can realize the simultaneous measurement of the perpendicularity errors of three translation shafts with low cost.
Description
Technical Field
The invention belongs to the technical field of machine tool machining precision, and particularly relates to a device and a method for measuring verticality of a triaxial motion platform.
Background
The large-scale vertical processing machine tool has long travel and large span, can realize numerical control processing of complex curved surfaces, and is suitable for contour processing and hole making of medium and large-scale parts. However, due to the long travel, large span and high load factors, the main supporting parts are easy to wear, and the cross beam is easy to deform under the action of gravity, so that the position relation among all parts of the machine tool is changed, and the machining precision is seriously affected. The perpendicularity error of the machine tool is generally larger than the yaw error and the pitch error, and the influence on the space positioning error is also increased along with the increase of the travel of the moving axis, so that the machine tool is one of the most serious error sources affecting the machining precision.
In the past, a great deal of literature considers that the perpendicularity error of the triaxial motion platform is a static quantity irrelevant to the position of the translation axis, and the traditional method is to evaluate the perpendicularity error of the whole travel by carrying out local range measurement through tools such as a marble Dan Fangche and the like, so that the local measurement and simplified processing are beneficial to improving the error detection speed and the calculation efficiency. With the improvement of the requirement on the motion precision, a great deal of researches at present show that the perpendicularity of the triaxial motion platform can be changed along with the change of the relative position of the workbench and the guide rail in the operation process, and the requirement on the increasingly improved positioning precision can be met only by detecting and compensating the perpendicularity error of the platform in real time to obtain higher positioning precision.
The measurement of verticality is an important part of various geometric errors, the verticality of the triaxial motion platform is mainly introduced by three translational shafts, and for the three translational shafts, the inter-shaft errors, namely verticality errors, are three: zeta type toyxy、ξxzAnd xiyz. The traditional verticality measuring method is characterized in that the standard square and micrometer are adopted, the process is complicated, only offline measurement can be realized, the measuring precision is low, and the limit of a material measuring tool can be broken through by using a laser interference technology, so that full-range measurement is realized. The perpendicularity measurement of the conventional laser interferometer generally measures the straightness errors among axes of two-dimensional planes independently, then an optical angle square is utilized to determine the relationship among the straightness errors, and finally a measurement result of perpendicularity is obtained. Zeta type toyxy、ξxzAnd xiyzThe method needs to be measured independently, is complicated in operation, and has high cost for realizing online measurement.
Disclosure of Invention
The invention aims to provide a device and a method for measuring the verticality of a triaxial moving platform, which can realize the simultaneous measurement of the verticality errors of three translation shafts at low cost.
In order to achieve the above object, one aspect of the present invention provides a three-axis motion platform perpendicularity measuring apparatus, the three-axis motion platform comprisingxDirection(s),yDirection and sumzUpwards respectively havexTo a translational shaft,yTo the translational shaftzA translational axis, the device comprising: the system comprises a laser, a 1 st to 3 rd pentagonal beam splitting prism, a 1 st to 5 th pentagonal prism, a 1 st to 4 th straightness interference mirror, a 1 st to 4 th straightness reflection mirror and a 1 st to 4 th interference signal receiver;
the laser is used for emitting laser beams, and the laser beams emitted by the laser are divided into the following steps by a 1 st pentagonal prismxDirected 1 st path beam sumyThe 2 nd path of directed light beams, the 1 st path of light beams are sequentially refracted to the 1 st straightness interference mirror through the 1 st to 3 rd pentagonal prisms, the interference signals are returned to the 1 st interference signal receiver through the 1 st straightness interference mirror, and interference information is acquired through the 1 st interference signal receiver so as to measurezTranslational shaftxStraightness in the direction;
the 2 nd path of light beam is divided into a plurality of light beams by a 2 nd pentagonal beam splitting prismzDirected 3 rd beam sumyThe 4 th beam, the 3 rd beam is refracted to the 2 nd straightness interference mirror through the 4 th and 5 th prisms in turn, the interference signal is returned to the 2 nd interference signal receiver through the 2 nd straightness reflection mirror, and the interference information is acquired through the 2 nd interference signal receiver so as to measurezTranslational shaftyStraightness in the direction;
the 4 th beam is divided into a third beam by a fifth angle beam splitting prismyDirected 5 th beam sumxA 6 th beam, wherein the 5 th beam enters a 3 rd straightness interference mirror, and returns an interference signal to a 3 rd interference signal receiver through the 3 rd straightness interference mirror, and interference information is acquired through the 3 rd interference signal receiver to measureyThe 6 th path of light beam enters the 4 th straightness interference mirror towards the straightness of the translational axis, returns to the 4 th interference signal receiver through the 4 th straightness interference mirror, and acquires interference information through the 4 th interference signal receiver to measurexStraightness to a translation axis.
Preferably, the triaxial motion platform comprises a base and a support mounted on the basexTo the guide rail,yTo the guide rail,zAnd the laser is arranged on the base towards the guide rail, the 1 st pentagonal prism is horizontally arranged on the base, and the 2 nd pentagonal prism is vertically arranged on the base.
Preferably, the 3 rd pentagonal prism is horizontally arranged onyThe 3 rd straightness interference mirror and the 3 rd interference signal receiver are arranged on the translational axisyThe 3 rd straightness reflecting mirror is arranged on the translational shaftyToward the end of the rail;
the 4 th straightness interference mirror and the 4 th interference signal receiver are arranged onxOn the translational axis, the 4 th straightness reflecting mirror is arranged onxToward the end of the rail.
Preferably, the 1 st to 3 rd pentagonal prism edgesxIs vertically arranged and mutually perpendicular, and a 1 st straightness interference mirror and a 1 st interference signal receiver are fixed onzThe 1 st straightness reflector is arranged at the tail end of the guide railzTo the translational shaft;
the 4 th and 5 th pentagonal prism edgesyIs vertically arranged and mutually perpendicular, and a 2 nd straightness interference mirror and a 2 nd interference signal receiver are fixed onzThe 2 nd straightness reflecting mirror is arranged at the tail end of the guide railzToward the translational shaft.
Another aspect of the present invention provides a method for measuring verticality of a triaxial motion platform, using the above device to measure verticality error between triaxial, the method comprising:
step S1: adjusting the 1 st and 2 nd beams split by the 1 st pentagonal prism to be respectively matched withxTo the translational shaftyParallel collimation to a translation axis;
step S2: the first and second signals are measured by a 1 st to 4 th straightness interference mirrors, a 1 st to 4 th straightness reflection mirrors and a 1 st to 4 th interference signal receiver respectivelyzTranslational shaftxStraightness in the direction,zTranslational shaftyStraightness in the direction,yStraightness and straightness to a translational shaftxStraightness to the translational axis and fitting to obtainxInclination of the path of the translational axiskx、yInclination of the path of the translational axisky、zTranslational shaftxSlope to the light pathkz 1 、zTranslational shaftySlope to the light pathkz 2 ；
Step S3: the perpendicularity error between the three axes is calculated as follows:
ξxy=θ 3 -(ky-kx)；ξxz=(θ 4 +θ 5 +θ 6 )-kz 1 ；ξyz=(θ 2 +θ 7 +θ 8 )-kz 2 ，
wherein, xixyIs thatxTranslational axisyPerpendicularity error xi between translational axesxzIs thatxTranslational axiszPerpendicularity error xi between translational axesyzIs thatyTranslational axiszThe perpendicularity error between the translational axes,θ 3 is the error of the 3 rd pentagonal prism,θ 4 、θ 5 、θ 6 the errors of the 1 st to 3 rd pentagonal prisms respectively,θ 2 、θ 7 、θ 8 the errors of the 2 nd pentagonal spectroscope, the 4 th pentagonal prism and the 5 th pentagonal prism, respectively.
According to the device and the method for measuring the verticality of the triaxial moving platform, disclosed by the invention, the simultaneous measurement of the verticality errors of three translation shafts can be realized at low cost.
Drawings
Fig. 1 is a schematic view of an optical path of a device for measuring verticality of a triaxial moving platform according to an embodiment of the present invention.
Fig. 2 is a schematic diagram of a triaxial motion platform verticality measuring device according to an embodiment of the present invention, which is installed on a triaxial motion platform.
Detailed Description
In order to make the technical scheme of the present invention better understood by those skilled in the art, the following detailed description of the specific embodiments of the present invention will be given with reference to the accompanying drawings.
The embodiment of the invention provides a device for measuring the perpendicularity of a triaxial moving platform, and fig. 1 is a schematic diagram of an optical path of the device for measuring the perpendicularity of the triaxial moving platform according to one embodiment of the invention. As shown in fig. 1, the three-axis motion stage verticality measurement device according to the embodiment of the present invention includes a laser 1, 3 pentagonal spectroprisms (a 1 st pentagonal spectroprism 2, a 2 nd pentagonal spectroprism 3, a 3 rd pentagonal spectroprism 4), 5 pentagonal prisms (a 1 st pentagonal prism 5, a 2 nd pentagonal prism 6, a 3 rd pentagonal prism 7, a 4 th pentagonal prism 10, a 5 th pentagonal prism 11), 4 straightness interferometers (a 1 st straightness interferometry mirror, a 2 nd straightness interferometry mirror, a 3 rd straightness interferometry mirror, a 4 th straightness interferometry mirror), 4 interference signal receivers (a 1 st interference signal receiver, a 2 nd interference signal receiver, a 4 th interference signal receiver), and 4 straightness mirrors (a 1 st straightness mirror 9, a 2 nd straightness mirror 13, a 3 rd straightness mirror 15, and a 4 th straightness mirror 17). In the embodiment of fig. 1, 4 straightness interference mirrors and 4 interference signal receivers may be used together to form 4 interference modules (the 1 st straightness interference mirror and 1 st interference signal receiver form the 1 st interference module 8, the 2 nd straightness interference mirror and 2 nd interference signal receiver form the 2 nd interference module 12, the 3 rd straightness interference mirror and 3 rd interference signal receiver form the 3 rd interference module 14, and the 4 th straightness interference mirror and 4 th interference signal receiver form the 4 th interference module 16).
The laser is used for emitting laser beams, 3 pentagonal beam splitting prisms are used for splitting an incident beam into two paths of beams with perpendicular directions, 5 pentagonal beam splitting prisms are used for refracting the incident beam to a required direction, 4 straightness interference mirrors are used for generating interference signals according to optical path differences, 4 straightness reflection mirrors are used for returning the interference signals, and 4 interference signal receivers are used for receiving the returned interference signals and obtaining straightness according to the interference signals.
The 3 pentagonal prisms herein may be the same-structure pentagonal prisms. The pentagonal beam splitter prism is a pentagonal prism, and four faces are polished, wherein two faces are reflecting faces, and the other two faces are incident and emergent faces. The reflecting surface of the pentagonal beam-splitting prism is coated with a reflecting film and is coated with black paint for protection. The pentagonal prism can be used for light splitting by adding a wedge angle piece on the basis of the pentagonal prism and plating a reflecting film on the first reflecting surface. The pentagonal beam splitter prism can lead reflected light to be turned for 90 degrees without image plane rotation or specular reflection, the turning of 90 degrees can not be changed due to different prism positions, and the transmitted light still keeps a straight line direction, thus being very beneficial to assembly. However, when a general beam splitter prism is used for beam splitting, the accuracy of angles is greatly affected by assembly errors.
The 5 pentagonal prisms herein may be pentagonal prisms having the same structure. The pentagonal prism has the advantages that if the pentagonal prism is installed in a certain position and posture, the perpendicularity of the light path is not influenced, the whole light path is deflected by a common prism installation error, and if the common prism is used, the angles of all the prisms are required to be measured, so that the operation is complicated and the reliability is poor.
The three-axis motion platform is provided with an x-axis translational shaft, a y-axis translational shaft and a z-axis translational shaft in the x-direction, the y-direction and the z-direction respectively, and the three-axis motion platform verticality measuring device in the embodiment of the invention obtains verticality among three axes by measuring straightness in 4 directions, wherein the 4 directions are the z-axis x-direction (z-axis translational shaft x-direction), the z-axis y-direction (z-axis translational shaft y-direction), the x-axis (x-axis translational shaft) and the y-axis (y-axis translational shaft).
On the x-direction optical path of the z-axis, a 1 st penta beam splitting prism 2, a 1 st penta prism 5, a 2 nd penta prism 6, a 3 rd penta prism 7, a 1 st interference module 8 and a 1 st straightness reflecting mirror 9 are sequentially arranged behind the laser 1, the laser beam emitted by the laser 1 is divided into a 1 st path of light beam in the x-direction and a 2 nd path of light beam in the y-direction through the 1 st penta beam splitting prism 2, the 1 st path of light beam sequentially passes through the 1 st penta prism 5, the 2 nd penta prism 6 and the 3 rd penta prism 7, is refracted to the 1 st straightness interference mirror of the 1 st interference module 8 and enters the 1 st straightness reflecting mirror 9, the 1 st straightness reflecting mirror 9 returns an interference signal generated by the 1 st straightness interference mirror to a 1 st interference signal receiver of the 1 st interference module 8, and interference information is acquired through the 1 st interference signal receiver so as to measure the straightness in the x-direction of the z-direction axis.
On the z-axis y-direction light path, a fifth prism 3 and a fifth prism 3 are sequentially arranged behind the fifth prism 2A 4-pentagonal prism 10, a 5-pentagonal prism 11, a 2-nd interference module 12 and a 2-nd straightness reflecting mirror 13, wherein the 2 nd path of light beam split by the 1-th pentagonal beam splitting prism 2 is split into a 2 nd path of light beam through the 2-th pentagonal beam splitting prism 3zDirected 3 rd beam sumyThe directed 4 th light beam and the 3 rd light beam are sequentially refracted to the 2 nd straightness interference mirror of the 2 nd interference module 12 through the 4 th pentagonal prism 10 and the 5 th pentagonal prism 11 and enter the 2 nd straightness reflection mirror 13, the 2 nd straightness reflection mirror 13 returns an interference signal generated by the 2 nd straightness interference mirror to the 2 nd interference signal receiver of the 2 nd interference module 12, and interference information is acquired through the 2 nd interference signal receiver so as to measurezTranslational shaftyStraightness in the direction.
On the y-axis light path, a 3 th pentagonal light splitting prism 4, a 3 rd interference module 14 and a 3 rd straightness reflecting mirror 15 are sequentially arranged behind the 2 nd pentagonal light splitting prism 3, the 4 th light beam split by the 2 nd pentagonal light splitting prism 3 is divided into a 5 th light beam in the y direction and a 6 th light beam in the x direction through the 3 rd pentagonal light splitting prism 4, wherein the 5 th light beam enters the 3 rd straightness interference mirror of the 3 rd interference module 14 and enters the 3 rd straightness reflecting mirror 15, the 3 rd straightness reflecting mirror 15 returns an interference signal generated by the 3 rd straightness interference mirror to a 3 rd interference signal receiver of the 3 rd interference module 14, and interference information is acquired through the 3 rd interference signal receiver so as to measure straightness of a y-direction translation axis.
On the x-axis optical path, a 4 th interference module 16 and a 4 th straightness reflecting mirror 17 are sequentially arranged behind the 3 rd pentagonal light splitting prism 4, a 6 th light beam split by the 3 rd pentagonal light splitting prism 4 enters the 4 th straightness interference mirror of the 4 th interference module 16 and enters the 4 th straightness reflecting mirror 17, the 4 th straightness reflecting mirror 17 returns an interference signal generated by the 4 th straightness interference mirror to a 4 th interference signal receiver of the 4 th interference module 16, and interference information is acquired through the 4 th interference signal receiver so as to measure straightness of an x-direction translation axis.
The triaxial motion platform perpendicularity measuring device can integrate the triaxial perpendicularity error measuring light path into a coordinate motion system of a triaxial motion platform, and achieves online measurement of perpendicularity errors. Fig. 2 is a schematic diagram of a triaxial motion platform verticality measuring device according to an embodiment of the present invention, which is installed on a triaxial motion platform. The triaxial motion platform comprises a base and an x-direction guide rail, a y-direction guide rail and a z-direction guide rail which are arranged on the base, wherein the x-direction guide rail, the y-direction guide rail and the z-direction guide rail respectively enable an x-direction translation shaft 22, a y-direction translation shaft 21 and a z-direction translation shaft 23 to move along the x-direction, the y-direction and the z-direction. The specific installation mode and the working principle are described below.
(1) First, the laser 1 may be mounted on a base of a triaxial moving platform, and the 1 st pentagonal prism 2 is horizontally mounted on the base to divide a laser beamxDirection and directionyUpward, where adjustments are required to ensure that the laser beam is aligned withxyThe planes are parallel;
(2) Then, atyA fifth angle beam splitting prism 3 is vertically installed on the base in front of the directed laser beam for splitting the laser beam againyDirection and directionzTwo laser beams are emitted;
(3) Along withyIn the direction of the laser beam, inyA 3 rd pentagonal beam splitter prism 4 is horizontally installed on the translational shaft 21 to subdivide the laser beam intoxDirection and directionyThe 3 rd interference module 14 (the 3 rd straightness interference mirror and the 3 rd interference signal receiver) is arranged on the two laser beamsyThe 3 rd straightness reflecting mirror 15 is mounted on the translational shaft 21yEnd of guide railyStraightness measurement to a translation shaft;
(4) The 4 th interference module 16 (4 th straightness interference mirror and 4 th interference signal receiver) is followedxIs mounted to the laser beamxThe 4 th straightness reflecting mirror 17 is arranged on the translational shaft 22xThe end of the guide rail is realized byxStraightness measurement to a translation shaft;
(5) Since the laser beam has been previously combined withxyThe planes are adjusted to be parallel, sozStraightness to the translation axis can be based onxyPlane decomposition intoxDirection and directionyThe straightness of the direction can be obtained by a 1 st pentagonal beam splitting prism 2xDirected laser beam passing alongxThe 1 st to 3 rd pentagonal prisms vertically installed and perpendicular to each otherxRefractive index of directed laser lightzIn the direction, due to the characteristics of the pentagonal prism, it is ensured that the perpendicularity of the refractive optical path does not deviate greatly, and the 1 st interference module 8 (the 1 st1 st straightness interference mirror and 1 st interference signal receiver) are fixed onzThe 1 st straightness mirror 9 is mounted to the end of the guide railzOnto the translation shaft 23 to obtainzTranslational shaftxStraightness in the direction.
(6) Similarly, a beam can be obtained through the 2 nd pentagonal beam splitting prism 3zDirected laser beam, warp edgeyThe 4 th and 5 th prisms are vertically arranged and perpendicular to each other, and can obtainyIs refracted tozA directed laser beam, a 2 nd interference module 12 (a 2 nd straightness interference mirror and a 2 nd interference signal receiver) is fixed onzThe 2 nd straightness mirror 13 is mounted to the end of the guide railzOnto the translation shaft 23 to obtainzTranslational shaftyStraightness in the direction.
The embodiment of the invention also provides a method for measuring the verticality of the triaxial moving platform, which is used for measuring the verticality error between the triaxial by using the device for measuring the verticality of the triaxial moving platform, and comprises the steps S1-S3.
In step S1, the laser beam emitted by the laser 1 is adjusted to be parallel to the xy plane, so that the two paths of laser beams split by the 1 st pentagonal prism 2 are respectively collimated in parallel to the x-direction translational axis and the y-direction translational axis. The purpose of step S1 is to collimate the reference light path without changing the positional relationship between the other axial light paths and the reference light path during measurement.
In step S2, the first to fourth interference signals are measured by the 1 st to 4 th straightness interference mirrors, the 1 st to 4 th straightness reflection mirrors and the 1 st to 4 th interference signal receivers, respectivelyzTranslational shaftxStraightness of the direction is fitted to obtainzTranslational shaftxSlope to the light pathkz 1 The method comprises the steps of carrying out a first treatment on the surface of the Measurement ofzTranslational shaftyStraightness of the direction is fitted to obtainzTranslational shaftySlope to the light pathkz 2 The method comprises the steps of carrying out a first treatment on the surface of the Measurement ofyStraightness of the translational axis is fitted to obtainyInclination of the path of the translational axiskyMeasurement ofxStraightness of the translational axis is fitted to obtainxInclination of the path of the translational axiskx；
In step S3, the perpendicularity error between the three axes is calculated according to the following formula:
ξxy=θ 3 -(ky-kx)；ξxz=(θ 4 +θ 5 +θ 6 )-kz 1 ；ξyz=(θ 2 +θ 7 +θ 8 )-kz 2 ；
wherein, xixyIs thatxTranslational axisyPerpendicularity error xi between translational axesxzIs thatxTranslational axiszPerpendicularity error xi between translational axesyzIs thatyTranslational axiszThe perpendicularity error between the translational axes,θ 3 is the error of the 3 rd pentagonal prism,θ 4 、θ 5 、θ 6 the errors of the 1 st to 3 rd pentagonal prisms respectively,θ 2 、θ 7 、θ 8 the errors of the 2 nd pentagonal spectroscope, the 4 th pentagonal prism and the 5 th pentagonal prism, respectively.
The principle of the above formula calculation is explained as follows:
(1) First, since the perpendicularity optical path is composed of a plurality of pentagonal beam-splitting prisms and pentagonal prisms, an angle error of each prism needs to be introducedθThe transmitted light of the 1 st pentagonal prism 2 is a y-directional light path, the reflected light is an x-directional light path, the angular plane of the prism is on the xy plane, the front adjusting light path is parallel to the xy plane, so the error does not participate in the calculation of the verticality between the z axis and the xy plane, the front of the transmitted light is collimated with the y-directional translation axis, so the verticality error between the three axes is the error of the 1 st pentagonal prism 2θ 1 Irrespective of the fact that the first and second parts are.
(2) The inclination k of the light path is due to installation errors and other reasons, so that a certain included angle exists between the light path and the guide rail, the angle can be divided into a horizontal direction and a vertical direction, and straightness in the corresponding direction is measured and needs to be eliminated. Taking the xy plane as an example, when the platform moves along the x direction, the straightness interference mirror in the x direction reads the tiny displacement change generated in the y direction in the moving process of the platform, the displacement is possibly biased positive or biased negative or negligence positive or negligence negative, a group of data can be obtained after the measurement is finished, a straight line can be obtained by fitting the data according to the least square method, and the slope of the straight line is the slope of the light path.
(3) By using the formula, the angle error of each prism on the corresponding optical path is subtracted by the inclination of the optical path, so that the inter-triaxial perpendicularity error which eliminates the influence of the inclination of the optical path is obtained.
In summary, the device and the method for measuring the verticality of the triaxial moving platform according to the embodiments of the present invention measure the triaxial moving platform by using the distributed laser network, can realize the verticality measurement between the triaxial moving platform after adjusting the optical path once, and can combine the optical path with the moving platform according to the later design stage of the optical path layout without adjustment, so as to realize the online measurement, and can measure the verticality error at any position in the working space of the larger triaxial moving system, thereby providing a powerful guarantee for realizing real-time error compensation and being beneficial to the precision improvement of the triaxial moving system.
Moreover, compared with the prior art directly using a laser interferometer, the device and the method for measuring the verticality of the triaxial motion platform can realize high-precision measurement of the verticality between the triaxial motion platform at the minimum cost, can be built in a system of the triaxial motion platform, and realize online real-time measurement through simple operation.
The foregoing description of the preferred embodiments of the invention is not intended to limit the invention, but is intended to cover all modifications, equivalents, alternatives, and improvements within the spirit and principles of the invention.
Claims (2)
1. Triaxial motion platform straightness measuring device that hangs down, triaxial motion platform is atxDirection(s),yDirection and sumzUpwards respectively havexTo a translational shaft,yTo the translational shaftzA translational axis, characterized in that the device comprises: the system comprises a laser, a 1 st to 3 rd pentagonal beam splitting prism, a 1 st to 5 th pentagonal prism, a 1 st to 4 th straightness interference mirror, a 1 st to 4 th straightness reflection mirror and a 1 st to 4 th interference signal receiver;
the laser is used for emitting laser beams, and the laser beams emitted by the laser pass through the 1 st pentagon minuteThe light prism is divided intoxDirected 1 st path beam sumyThe 2 nd path of directed light beams, the 1 st path of light beams are sequentially refracted to the 1 st straightness interference mirror through the 1 st to 3 rd pentagonal prisms, the interference signals are returned to the 1 st interference signal receiver through the 1 st straightness interference mirror, and interference information is acquired through the 1 st interference signal receiver so as to measurezTranslational shaftxStraightness in the direction;
the 2 nd path of light beam is divided into a plurality of light beams by a 2 nd pentagonal beam splitting prismzDirected 3 rd beam sumyThe 4 th beam, the 3 rd beam is refracted to the 2 nd straightness interference mirror through the 4 th and 5 th prisms in turn, the interference signal is returned to the 2 nd interference signal receiver through the 2 nd straightness reflection mirror, and the interference information is acquired through the 2 nd interference signal receiver so as to measurezTranslational shaftyStraightness in the direction;
the 4 th beam is divided into a third beam by a fifth angle beam splitting prismyDirected 5 th beam sumxA 6 th beam, wherein the 5 th beam enters a 3 rd straightness interference mirror, and returns an interference signal to a 3 rd interference signal receiver through the 3 rd straightness interference mirror, and interference information is acquired through the 3 rd interference signal receiver to measureyThe 6 th path of light beam enters the 4 th straightness interference mirror towards the straightness of the translational axis, returns to the 4 th interference signal receiver through the 4 th straightness interference mirror, and acquires interference information through the 4 th interference signal receiver to measurexThe straightness of the translational shaft is towards,
the triaxial motion platform comprises a base and a triaxial motion platform arranged on the basexTo the guide rail,yTo the guide rail,zThe laser is arranged on the base, the 1 st pentagonal prism is horizontally arranged on the base, the 2 nd pentagonal prism is vertically arranged on the base,
the 3 rd pentagonal beam splitting prism is horizontally arranged onyThe 3 rd straightness interference mirror and the 3 rd interference signal receiver are arranged on the translational axisyThe 3 rd straightness reflecting mirror is arranged on the translational shaftyToward the end of the rail;
the 4 th straightness interference mirror and the 4 th interference signal receiver are arranged onxOn the translational axis, the 4 th straightness reflecting mirrorIs mounted onxToward the end of the guide rail,
the 1 st to 3 rd pentagonal prism edgesxIs vertically arranged and mutually perpendicular, and a 1 st straightness interference mirror and a 1 st interference signal receiver are fixed onzThe 1 st straightness reflector is arranged at the tail end of the guide railzTo the translational shaft;
the 4 th and 5 th pentagonal prism edgesyIs vertically arranged and mutually perpendicular, and a 2 nd straightness interference mirror and a 2 nd interference signal receiver are fixed onzThe 2 nd straightness reflecting mirror is arranged at the tail end of the guide railzToward the translational shaft.
2. A method for measuring verticality of a triaxial moving platform, characterized in that the device according to claim 1 is used for measuring verticality error between three axes, the method comprising:
step S1: adjusting the 1 st and 2 nd beams split by the 1 st pentagonal prism to be respectively matched withxTo the translational shaftyParallel collimation to a translation axis;
step S2: the first and second signals are measured by a 1 st to 4 th straightness interference mirrors, a 1 st to 4 th straightness reflection mirrors and a 1 st to 4 th interference signal receiver respectivelyzTranslational shaftxStraightness in the direction,zTranslational shaftyStraightness in the direction,yStraightness and straightness to a translational shaftxStraightness to the translational axis and fitting to obtainxInclination of the path of the translational axiskx、yInclination of the path of the translational axisky、zTranslational shaftxSlope to the light pathkz 1 、zTranslational shaftySlope to the light pathkz 2 ；
Step S3: the perpendicularity error between the three axes is calculated as follows:
ξxy=θ 3 -(ky-kx)；ξxz=(θ 4 +θ 5 +θ 6 )-kz 1 ；ξyz=(θ 2 +θ 7 +θ 8 )-kz 2 ，
wherein, xixyIs thatxTranslational axisyPerpendicularity error xi between translational axesxzIs thatxTranslational axiszPerpendicularity error xi between translational axesyzIs thatyTranslational axiszThe perpendicularity error between the translational axes,θ 3 is the error of the 3 rd pentagonal prism,θ 4 、θ 5 、θ 6 the errors of the 1 st to 3 rd pentagonal prisms respectively,θ 2 、θ 7 、θ 8 the errors of the 2 nd pentagonal spectroscope, the 4 th pentagonal prism and the 5 th pentagonal prism, respectively.
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