CN111998775B - Device for high-precision real-time measurement of moving sliding table posture - Google Patents

Device for high-precision real-time measurement of moving sliding table posture Download PDF

Info

Publication number
CN111998775B
CN111998775B CN202010867319.XA CN202010867319A CN111998775B CN 111998775 B CN111998775 B CN 111998775B CN 202010867319 A CN202010867319 A CN 202010867319A CN 111998775 B CN111998775 B CN 111998775B
Authority
CN
China
Prior art keywords
straightness
laser
attitude
module
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202010867319.XA
Other languages
Chinese (zh)
Other versions
CN111998775A (en
Inventor
孙安斌
高廷
乔磊
王继虎
曹铁泽
马骊群
甘晓川
赵子越
邹志
范晶晶
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Changcheng Institute of Metrology and Measurement AVIC
Original Assignee
Beijing Changcheng Institute of Metrology and Measurement AVIC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Changcheng Institute of Metrology and Measurement AVIC filed Critical Beijing Changcheng Institute of Metrology and Measurement AVIC
Priority to CN202010867319.XA priority Critical patent/CN111998775B/en
Publication of CN111998775A publication Critical patent/CN111998775A/en
Application granted granted Critical
Publication of CN111998775B publication Critical patent/CN111998775B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C23/00—Combined instruments indicating more than one navigational value, e.g. for aircraft; Combined measuring devices for measuring two or more variables of movement, e.g. distance, speed or acceleration

Landscapes

  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention discloses a device for high-precision real-time measurement of the posture of a moving sliding table, and belongs to the field of metering and detection in the manufacturing industry. The invention mainly comprises a laser emission and attitude measurement module and a straightness and rotation attitude measurement module. The laser emission and attitude measurement module is used for realizing the attitude measurement of the straightness and rotation attitude measurement module; the straightness and rotation attitude measuring module is arranged on the moving sliding table and used for measuring the straightness and the rotation attitude of the straightness and rotation attitude measuring module and the installation position, and meanwhile, the laser ranging module is used for measuring the distance between the straightness and rotation attitude measuring module and the laser emitting and attitude measuring module, so that the straightness and the attitude at different positions can be conveniently recorded. The invention can realize the synchronous real-time high-precision measurement of the straightness, rotation, pitching and deflection attitude angles of the moving sliding table, and has the advantages of high precision, real time, low cost, high efficiency and space saving.

Description

Device for high-precision real-time measurement of moving sliding table posture
Technical Field
The invention belongs to the field of measurement and detection in the manufacturing industry, relates to a device for high-precision measurement of the attitude of a moving sliding table, and particularly relates to a device which is directly applied to real-time measurement and compensation of the straightness and the attitude of a one-dimensional moving sliding table.
Background
In the field of measurement and detection in the manufacturing industry, the most common scheme is to carry out high-precision aiming devices after a precision motion sliding table is matched with a length measuring assembly to realize the measurement of the geometric dimension of a measuring tool or a workpiece. Due to the development of aiming technologies such as images, photoelectricity and the like, more and more aiming devices adopt non-contact aiming and contact triggering measuring head schemes. After an advanced aiming device, particularly a non-contact aiming device is introduced, Abbe errors introduced by different axes of a measuring aiming point and a length measuring point restrict the improvement of precision, and even cause that the measuring errors of a metering detection device exceed the designed values99＝0.1μm+0.5×10-5L, the requirement of high-precision compensation cannot be met without Abbe error compensation. Under the condition of a given instrument structure, an Abbe error is reduced by adopting a compensation scheme, so that the technical indexes of the measuring equipment meet the requirements. Two compensation schemes are commonly used: the first one is to measure out the straightness and posture error of the moving sliding table by adopting a straightness and sliding table posture measuring instrument, obtain a compensation value to perform off-line compensation, and the second one is to directly embed the straightness and sliding table posture measuring instrument into equipment to perform real-time compensation. However, no matter what scheme is adopted, the measurement instrument is required to realize the measurement of the straightness and the posture of the moving sliding table.
Three instruments for measuring the straightness are available at present, one is a laser interference fit straightness measuring lens group scheme, the principle of the proposal is that the straightness is calculated by the ratio of the optical path difference and the fixed angle generated after two beams of light which are separated by a spectroscope return to the interferometer through a straightness reflecting mirror after the laser is emitted from an interferometer, typical representative products comprise XD-1 laser series products and straightness mirror assembly parts of American API precision instruments company, a Raney XL-80 laser interferometer and the straightness mirror assembly parts and the like, the scheme has the characteristics of high precision and real-time measurement, but the scheme can only be used by adopting an interference method in cooperation with a laser interferometer, light interruption is not allowed in measurement, the angle in light splitting determines the precision of measuring the straightness accuracy, the larger the angle is, the better the sensitivity is, but the longer the angle is, the shorter the measured distance is, therefore, the straightness accuracy is measured by a short-distance lens group (0.1-4.0 m) and a long-distance lens (1.0-30.0 m); the requirement for adjusting the light path when measuring the straightness is very strict, two separated light paths are ensured to be perpendicular to two mirror surfaces of the straightness reflector and light beam collimation is ensured, the straightness reflector group has a strict matching relation, and even if the transverse reflector and the longitudinal reflector are not allowed to be interchanged for use, the mirror group is complex and various, and great inconvenience is brought to daily detection and maintenance. The second is an optical collimation micrometering method, the micrometering telescope is used for establishing an axis reference, and the straightness measurement is realized by observing the position of the cross reticle of the differentiation board on the moving target holder. The third method is a scheme of matching laser with PSD, the method adopts laser as a linearity reference, utilizes PSD to sense position offset in real time, and has the characteristics of small and exquisite structure, simple operation, high measurement precision, real-time reading and low price, the GEPARD5 series of RAYTEC in Switzerland, the D630 series of easy lazer in America and the NXA series of Fixturlaser in Switzerland are products of the principle, but only linearity measurement can be carried out.
The method realizes the synchronous measurement of the space pose and the pose, but has high cost, the integral price is in the millions level, and in addition, the pose precision is 0.01 degrees, so that the method cannot be suitable for the high-precision straightness and pose measurement occasions. The other scheme is that a laser interferometer is matched with a PSD (position sensor detection, PSD for short) sensor for measurement, when incident light of the laser interferometer is emitted onto a convex lens through a spectroscope, if an axis has no angle change, the light is focused on a focus through the lens; if the axis has angle change, the light rays can obtain coordinate values in two directions on the side surface of the focal plane and the opposite PSD light target, so that the angle value is obtained by comparing the coordinate values with the focal length. The third is a collimation scheme, a cross-shaped differentiation plate in front of a light pipe barrel in a plane mirror placed on a measured surface is observed by using a collimation tube to realize collimation measurement, and a Taylor light pipe is a typical product based on the principle.
In order to solve the problems of high-precision, real-time, low-cost and high-efficiency measurement of the straightness and the rotating, pitching and yawing postures of the moving sliding table, a device for high-precision real-time measurement of the posture of the moving sliding table is needed.
Disclosure of Invention
The invention aims to provide a device for high-precision real-time measurement of the posture of a moving sliding table, which can realize synchronous real-time high-precision measurement of the straightness, rotation, pitching and yawing posture angles of the moving sliding table and has the advantages of high precision, real time, low cost and high efficiency.
The invention is realized by the following technical scheme:
the invention discloses a device for high-precision real-time measurement of the attitude of a moving sliding table, which mainly comprises two parts, namely a laser emission and attitude measurement module and a straightness and rotation attitude measurement module. The laser emission and attitude measurement module generates and emits two beams of parallel laser to the straightness and rotation attitude measurement module end, and receives the collimated laser reflected by the straightness and rotation attitude measurement module at the same time, so that the attitude measurement of the straightness and rotation attitude measurement module is realized; the straightness and rotation attitude measuring module is installed on the motion sliding table and used for receiving laser emission and the generation of the attitude measuring module and emitting two beams of parallel laser, the positions of the two beams of laser are sensed by the two straightness measuring PSD sensors, so that the measurement of the straightness and the rotation attitude of the straightness and rotation attitude measuring module and the installation position is realized, the measurement of the distance between the straightness and rotation attitude measuring module and the laser emission and attitude measuring module is realized by the laser ranging module, and the recording of the straightness and the attitude of different positions is facilitated.
The laser emission and attitude measurement module mainly comprises a laser, a laser collimating mirror mounting and adjusting seat, a coupling optical fiber, a three-dimensional transflective mirror mounting seat, a light homogenizing sheet, a collimation PSD sensor mounting seat, a distance measurement light reflecting sheet, an attitude measurement processing circuit, a storage battery, a wireless emission module, a light filter, a switch, a laser emission and attitude measurement module front cover plate, a laser emission and attitude measurement module bottom plate, a laser emission and attitude measurement module box body and a laser emission and attitude measurement module rear cover plate. The laser emission and attitude measurement module is used for generating and emitting two beams of parallel laser to the front end of the straightness and rotation attitude measurement module, and simultaneously receiving the collimated laser reflected by the straightness and rotation attitude measurement module, so that the attitude measurement of the straightness and rotation attitude measurement module is realized. The laser is used for emitting collimated laser, one path of the collimated laser is divided into two paths of laser after being shaped through the coupling optical fiber, the tail ends of the two paths of laser are respectively provided with the collimated laser, and a point light source emitted by the coupling optical fiber is changed into parallel light after passing through the laser collimating mirror; the laser collimating lens group is arranged on the laser collimating lens mounting and adjusting seat and is used for adjusting pitching deflection so as to be convenient for adjusting two beams of collimated laser into parallel light; a three-dimensional transreflective mirror is arranged in front of one laser collimating lens group, the three-dimensional transreflective mirror is mounted on a three-dimensional transreflective mirror mounting seat, a through hole is formed in the middle of the three-dimensional transreflective mirror mounting seat and used for transmitting light to a collimation PSD sensor, the collimation PSD sensor is a two-dimensional laser displacement sensor, and the postures of the installation positions of the straightness and rotation posture measuring modules are calculated by utilizing the distance measurement values between a laser emission and posture measuring module and the straightness and rotation posture measuring module and the two-dimensional change value of the laser in the collimation PSD sensor; in order to homogenize the laser intensity and improve the measurement accuracy, a light homogenizing sheet is arranged between the collimation PSD sensor and the three-dimensional transflective lens, the light homogenizing sheet is arranged on a collimation PSD sensor mounting seat, and the collimation PSD sensor mounting seat is also used for supporting the three-dimensional transflective lens mounting seat; after being processed by the attitude measurement processing circuit, the signal of the collimation PSD sensor is communicated with a human-computer interaction display device through a wireless transmitting module or a wired module, so that the real-time display of the measured value is realized; the storage battery is used for supplying power to the whole system, the collimation PSD sensor, the attitude measurement processing circuit, the storage battery and the wireless transmitting module are all fixedly arranged on a base plate of the laser transmitting and attitude measurement module, the base plate of the laser transmitting and attitude measurement module is arranged in a box body of the laser transmitting and attitude measurement module, and a front cover plate of the laser transmitting and attitude measurement module is used for light transmission and is provided with a filter lens for reducing stray light interference and preventing dust; and the rear cover plate of the laser emission and attitude measurement module is used for installing a switch and a charging communication interface.
The straightness and rotation attitude measuring module mainly comprises a straightness measuring PSD sensor, a straightness measuring PSD mounting seat, a semi-transparent semi-reflecting mirror, a straightness measuring PSD mounting seat connecting plate, a straightness and rotation attitude processing circuit, a laser ranging module, a wireless transmitting module, an optical filter, a storage battery, a straightness and rotation attitude measuring module mounting bottom plate, a straightness and rotation attitude measuring module front cover plate, a straightness and rotation attitude measuring module rear cover plate and a straightness and rotation attitude measuring module box body. The straightness and rotation attitude measuring module is mounted on the moving sliding table and used for receiving laser emission and the position of the attitude measuring module and emitting two beams of parallel laser, the positions of the two beams of laser are sensed by the two straightness measuring PSD sensors, so that the rotation attitude measurement of the straightness and rotation attitude measuring module is realized, and meanwhile, the distance measurement between the straightness and rotation attitude measuring module and the laser emission and attitude measuring module is realized by the laser ranging module, so that the recording of the straightness and the attitude at different positions is facilitated. The straightness measuring PSD sensor is arranged at the rear end of the straightness measuring PSD mounting seat and used for receiving laser generated by the laser emitting and posture measuring module, the straightness measuring PSD sensor is a two-dimensional sensor, the semi-transparent semi-reflecting mirror is arranged at the front end of the straightness measuring PSD mounting seat, the straightness measuring PSD sensor, the straightness measuring PSD mounting seat and the semi-transparent semi-reflecting mirror are fixedly connected and mounted through threads to form a straightness measuring unit, then a connecting plate of the straightness measuring PSD mounting seat is fixedly connected with a straightness and rotation posture measuring module mounting base plate through threads, two straightness measuring units are arranged on the straightness and rotation posture measuring module mounting base plate side by side, the straightness measuring PSD sensor on each straightness measuring unit generates displacement relative to a self coordinate system after receiving the laser generated and emitted by the laser emitting and posture measuring module, because the positions of the two straightness measuring units are fixed, and laser emitted by the laser emission and attitude measuring module is two beams of parallel laser, the measurement of the straightness and the rotation attitude of the straightness and rotation attitude measuring module and the installation sliding table can be realized by calibrating the position relation of the two straightness measuring PSD sensors in advance according to the equal distance between the two parallel lasers; after one path of laser generated and emitted by the laser emission and attitude measurement module passes through the semi-transparent semi-reflector, one part of the laser is transmitted and reaches the linearity measurement PSD sensor, while the other part of the laser is reflected by the plane and returns to the collimation PSD sensor of the laser emission and attitude measurement module; the straightness and rotation attitude processing circuit is used for processing data of the two straightness measurement PSD sensors in real time to realize calculation of the straightness and the rotation attitude; the laser ranging module is used for distance measurement, is used for reducing the system cost by adopting a time flight method, and is also used for realizing high-precision position measurement by utilizing the absolute high-precision ranging module; the wireless transmitting module is used for transmitting straightness and rotation attitude data, realizing communication with a human-computer interaction display device such as a computer and displaying a measurement structure in real time; the storage battery is used for supplying power to the straightness and rotation attitude measurement module; the straightness measuring PSD sensor, the straightness and rotation attitude processing circuit, the laser ranging module and the wireless transmitting module are fixedly arranged on a laser transmitting and attitude measuring module bottom plate, the straightness and rotation attitude measuring module bottom plate is arranged in a straightness and rotation attitude measuring module box body, and a front cover plate of the straightness and rotation attitude measuring module is used for light passing and is provided with a filter to reduce stray light interference and prevent dust; and the back cover plate of the straightness and rotation attitude measurement module is used for installing a switch and a charging communication interface.
Preferably, the laser adopts a visible laser, so that the adjustment during measurement is convenient.
Preferably, the laser adopts a scheme that a single laser is divided into two paths of light through a coupling optical fiber, so that the cost is reduced, and the laser is shaped.
Preferably, the storage battery adopts a rechargeable lithium battery scheme, so that the device for high-precision real-time measurement of the posture of the moving sliding table is convenient, fast and practical.
The invention discloses a working method of a device for measuring the posture of a moving sliding table in real time at high precision, which comprises the following steps:
the straightness and rotation attitude measuring module is arranged on the motion sliding table, the laser emission and attitude measuring module is arranged on a tripod or a fixed platform independent of the motion sliding table, switches of the straightness and rotation attitude measuring module and the laser emission and attitude measuring module are respectively opened, the positions of the straightness and rotation attitude measuring module are adjusted according to laser emitted by the laser emission and attitude measuring module until visible laser is shot at the middle position of each PSD, the attitude of the straightness and rotation attitude measuring module is adjusted until the PSD of the laser emission and attitude measuring module has a reading and is within a measuring range, the positions of the straightness and rotation attitude measuring module are adjusted until each PSD number is within the measuring range, the position value of the initial position is recorded, the motion sliding table is moved, and the offset, the rotation angle, the yaw angle and the pitch angle of the position after the motion sliding table is stopped can be output in real time, after each position measurement value is measured and recorded, the straightness accuracy is calculated according to the measured numerical value, and synchronous real-time high-precision measurement of the straightness accuracy, the rotation attitude angle, the pitching attitude angle and the deflection attitude angle of the moving sliding table is achieved.
Preferably, the straightness and rotation angle measuring method is as follows: the oxygen is a measurement coordinate system of the straightness measuring PSD sensor on the left side of the receiving surface opposite to the straightness measuring module and the rotation attitude measuring module, the o ' x ' y ' is a measurement coordinate system of the right straightness measuring PSD sensor, and the two straightness measuring PSDs are measuredThe position relation of the PSD sensors is obtained by linear motion calibration in advance, and the position relation [ x ] between the two PSD sensors in the coordinate system is obtained0,y0,α]For the convenience of calculation, a unified coordinate system needs to be established for calculation. Initial laser measurement point p1The coordinate in oxy is (x)1,y1) The straightness and rotation attitude measurement module measures a point p by laser after the displacement table moves for a certain distance2The coordinate in o ' x ' y ' is (x)2,y2) (ii) a Initial laser measurement Point p'1The coordinates within o 'x' y 'are (x'1,y′1) The straightness and rotation attitude measuring module measures a point p 'by laser after the displacement table moves for a certain distance'2The coordinates within o ' x ' y ' are (x ', y '). Because the positions of the two PSD sensors are fixed, the relation of the measurement coordinate systems of the two PSD sensors is fixed, and in order to facilitate calculation, measurement data in one PSD sensor coordinate system is converted into the other PSD sensor coordinate system, and then p 'is obtained according to the coordinate system conversion principle'1The coordinate in oxy is (x)0+x′1cosα-y′1sinα,y0+x′1sinα+y′1cosα)，p′2The coordinate in oxy is (x)0+x′2cosα-y′2sinα,y0+x′2sinα+y′2cos α), the rotation angle is:
Figure BDA0002645741630000051
p after the motion of the moving sliding table2Relative to p1Is (x) as a positional deviation amount2-x1,y2-y1) The straightness of any point at each position can be obtained by measuring a plurality of positions of the moving sliding table, calculating the offset of each position, adopting a least square method to realize the calculation of the straightness, and combining the rotation angle beta.
Preferably, the attitude angle measurement is realized by a collimation measurement principle, and the realization method comprises the following steps: the distance between the laser emission and attitude measurement module and the straightness and rotation attitude measurement module is measured by laser rangingMeasured as L1The optical path between the three-dimensional transflective lens mounting base and the collimation PSD sensor is L2，L1＞＞L2After the attitude measurement PSD sensor is adjusted, the y direction is the laser emission direction, the x direction is the normal direction of the laser, so as to establish a coordinate system ox 'y', and an initial laser measurement point p ″1The coordinate within ox "y" is (x ″)1,y″1) After the straightness and rotation attitude measurement module moves for a certain distance on the displacement platform, the laser measurement point p ″2p2The coordinate within ox "y" is (x ″)2,y″2) Angle of elevation
Figure BDA0002645741630000052
Yaw angle
Figure BDA0002645741630000053
Has the advantages that:
1. the invention discloses a device for high-precision real-time measurement of the posture of a moving sliding table, wherein a laser emission and posture measurement module establishes a measurement reference by emitting two beams of parallel laser, a linearity and rotation posture measurement module realizes the measurement of linearity and rotation angle by receiving the two beams of parallel laser emitted by the laser emission and posture measurement module, and the linearity and rotation angle of a measurement point are measured simultaneously, so that the linearity of any point in a laser receiving plane of the linearity and rotation posture measurement module and a corresponding plane of an installation sliding table connected with the laser receiving plane can be obtained, the defect that the existing linearity measurement instrument can only measure the linearity of the measurement point is overcome, and the compensation and the use of the measurement instrument are convenient.
2. The invention discloses a device for high-precision real-time measurement of the posture of a moving sliding table, wherein a semi-transparent semi-reflecting mirror is adopted on a straightness and rotating posture measuring module to reflect part of laser in a laser beam emitted by a laser emitting and posture measuring module, the laser emitting and posture measuring module realizes the measurement of the straightness and rotating posture measuring module and the pitching and deflection of the mounting sliding table connected with the straightness and rotating posture measuring module by receiving the reflected laser and matching the distance measured by a laser ranging module, and one set of device can realize the high-precision measurement of the straightness, the rotating angle, the pitching angle and the posture angle of the moving sliding table.
3. The invention discloses a device for high-precision real-time measurement of the attitude of a moving sliding table, wherein PSD sensors are adopted for laser position measurement, and the measurement precision of the straightness can be effectively improved through shaping of optical fibers and collimating lenses, filtering of light equalizing filters and homogenizing treatment of light equalizing lenses, wherein the measurement error of the straightness is +/-1 mu m/m, the rotation error is +/-1.5 '/m, and the measurement error of the deflection and the pitch angle is +/-0.5'/m.
4. According to the device for high-precision real-time measurement of the posture of the moving sliding table, disclosed by the invention, a laser adopted in the laser emission and posture measurement module can be a helium-neon laser and a semiconductor laser, and laser shunt shaping is realized through optical fibers, so that the cost is reduced and the space is saved.
Drawings
FIG. 1 is a block diagram of a high-precision real-time measurement device for the attitude of a moving slide table according to the present invention;
FIG. 2 is a block diagram of a laser emission and attitude measurement module of the present invention;
FIG. 3 is a block diagram of the straightness and rotation attitude measurement module of the present invention;
FIG. 4 is a schematic diagram of the straightness and rotation attitude measurement of the present invention;
fig. 5 is a diagram of a straightness and rotation posture measuring optical path according to the present invention.
Wherein: 1-laser emission and attitude measurement module, 2-straightness and rotation attitude measurement module, 3-optical filter, 4-laser emission and attitude measurement module front cover plate, 5-laser emission and attitude measurement module bottom plate, 6-wireless emission module, 7-three-dimensional transreflective mirror, 8-storage battery, 9-switch, 10-laser emission and attitude measurement module rear cover plate, 11-laser emission and attitude measurement module box body, 12-laser, 13-laser collimating mirror, 14-laser collimating mirror mounting adjustment seat, 15-light homogenizing plate, 16-collimation PSD sensor, 17-three-dimensional transreflective mirror mounting seat, 18-collimation PSD sensor mounting seat, 19-attitude measurement processing circuit, 20-distance measurement reflecting plate, 21-straightness and rotation attitude measurement module rear cover plate, 22-straightness and rotation attitude measurement module box body, 23-straightness and rotation attitude processing circuit, 24-straightness measuring PSD mounting base, 25-semi-transparent semi-reflecting mirror, 26-straightness and rotation attitude measuring module mounting bottom plate, 27-straightness and rotation attitude measuring module front cover plate, 28-laser ranging module, 29-straightness measuring PSD mounting base connecting plate and 30-straightness measuring PSD sensor.
Detailed Description
The invention is further illustrated below with reference to the figures and examples.
Referring to the attached drawing 1, the device for high-precision real-time measurement of the posture of a moving sliding table disclosed in this embodiment mainly comprises two parts, namely a laser emission and posture measurement module 1 and a straightness and rotation posture measurement module 2.
Referring to fig. 2, the laser emission and attitude measurement module 1 mainly comprises a laser 12, a laser collimating mirror 13, a laser collimating mirror mounting adjustment seat 14, a coupling optical fiber, a stereo transreflector 7, a stereo transreflector mounting seat 17, a light equalizing sheet 15, a collimation PSD sensor 16, a collimation PSD sensor mounting seat 18, a distance measurement reflector 20, an attitude measurement processing circuit 19, a storage battery 8, a wireless emission module 6, an optical filter 3, a switch 9, a laser emission and attitude measurement module front cover plate 4, a laser emission and attitude measurement module bottom plate 5, a laser emission and attitude measurement module box 11, and a laser emission and attitude measurement module rear cover plate 10. The laser emission and posture measurement module 1 is used for generating and emitting two beams of parallel laser to the front end of the straightness and rotation posture measurement module 2, and receiving the collimated laser reflected by the straightness and rotation posture measurement module 2 to realize the posture measurement of the straightness and rotation posture measurement module 2. The laser 12 is used for emitting collimated laser, one path of the collimated laser is divided into two paths of laser after being shaped by the coupling optical fiber, the tail ends of the two paths of laser are respectively provided with the collimated laser 13, and a point light source emitted by the coupling optical fiber is changed into parallel light after passing through the laser collimating mirror 13; the laser collimating lens 13 groups are all arranged on the laser collimating lens mounting and adjusting seat 14, and can perform pitching deflection adjustment, so that two beams of collimated laser can be conveniently adjusted into parallel light; a three-dimensional transreflective mirror 7 is designed in front of one laser collimating mirror 13 group, the three-dimensional transreflective mirror 7 is installed on a three-dimensional transreflective mirror installation seat 17, a through hole is formed in the middle of the three-dimensional transreflective mirror installation seat 17 and used for transmitting light to a collimation PSD sensor 16, the collimation PSD sensor 16 is a two-dimensional laser displacement sensor, and the straightness and the posture of the installation position of the rotation posture measurement module 2 can be calculated by utilizing the distance measurement value between a laser emission and posture measurement module 1 and a straightness and rotation posture measurement module 2 and the two-dimensional change value of the laser in the collimation PSD sensor 16; in order to homogenize the laser intensity and improve the measurement accuracy, a light homogenizing sheet 15 is arranged between a collimation PSD sensor 16 and a three-dimensional transflective lens 17, the light homogenizing sheet 15 is arranged on a collimation PSD sensor mounting seat 18, and the collimation PSD sensor mounting seat 18 is also used for supporting the three-dimensional transflective lens mounting seat 17; after being processed by the attitude measurement processing circuit 19, the signal of the collimation PSD sensor 16 is communicated with human-computer interaction display equipment such as a computer and the like through the wireless transmitting module 6 or a wired module, so that the real-time display of a measured value is realized; the storage battery 8 is used for supplying power to the whole system, the electronic device is fixedly arranged on a base plate 5 of the laser emission and attitude measurement module, the base plate 5 of the laser emission and attitude measurement module is arranged in a box body 11 of the laser emission and attitude measurement module, and a front cover plate 4 of the laser emission and attitude measurement module is used for passing light and is provided with a filter 3 to reduce stray light interference and prevent dust; the laser emission and attitude measurement module rear cover plate 10 is used for installing a switch and a charging communication interface.
Referring to fig. 3, the straightness and rotation posture measuring module 2 is composed of a straightness measuring PSD sensor 30, a straightness measuring PSD mounting base 24, a semi-permeable half mirror 25, a straightness measuring PSD mounting base connecting plate 29, a straightness and rotation posture processing circuit 23, a laser ranging module 28, a wireless transmitting module 6, a filter 3, a storage battery 8, a straightness and rotation posture measuring module mounting base plate 26, a straightness and rotation posture measuring module front cover plate 27, a straightness and rotation posture measuring module rear cover plate 21, and a straightness and rotation posture measuring module case 22. The straightness and rotation attitude measuring module 2 is mounted on the moving sliding table and used for receiving and emitting two beams of parallel laser generated by the laser emission and attitude measuring module 1, the positions of the two beams of laser are sensed by the two straightness measurement PSD sensors 30, so that the straightness and rotation attitude measuring module 2 and the mounting position are measured, and meanwhile, the distance measurement between the straightness and rotation attitude measuring module 2 and the laser emission and attitude measuring module 1 is realized through the laser ranging module 28, so that the straightness and attitude at different positions can be conveniently recorded. A straightness measuring PSD sensor 30 is arranged at the rear end of a straightness measuring PSD mounting seat 24 and used for receiving laser generated by a laser emission and posture measuring module 1, the straightness measuring PSD sensor 30 is a two-dimensional sensor, a semi-transparent semi-reflecting mirror 25 is arranged at the front end of the straightness measuring PSD mounting seat 24, the straightness measuring PSD sensor 30, the straightness measuring PSD mounting seat 24 and the semi-transparent semi-reflecting mirror 25 are fixedly connected through threads to form a straightness measuring unit, then a straightness measuring PSD mounting seat connecting plate 29 is fixedly connected with a straightness and rotation posture measuring module mounting base plate 26 through threads, two straightness measuring units are arranged on the straightness and rotation posture measuring module mounting base plate 26 side by side, the straightness measuring PSD sensor on each straightness measuring unit generates displacement relative to a self coordinate system after receiving the laser generated and emitted by the laser emission and posture measuring module 1, because the positions of the two straightness measuring units are fixed, and laser generated and emitted by the laser emission and attitude measuring module 1 is two beams of parallel laser, the measurement of the straightness and the rotation attitude of the straightness and rotation attitude measuring module 2 and the installation sliding table can be realized by calibrating the position relation of the two straightness measuring PSD sensors in advance according to the equal distance between the two parallel lasers; one path of laser generated and emitted from the laser emission and posture measurement module 1 passes through the semi-transparent semi-reflecting mirror 25, then part of the laser is transmitted to the linearity measurement PSD sensor 30, and the other part of the laser is reflected by a plane and returns to the collimation PSD sensor 16 of the laser emission and posture measurement module 1, according to the collimation principle, the distance value between the laser emission and posture measurement module 1 and the linearity and rotation posture measurement module 2 is known, and then the pitch and yaw postures of the linearity and rotation posture measurement module 2 and the sliding table mounted with the same can be measured by calculating the laser displacement after reflection; the straightness and rotation attitude processing circuit 23 is used for processing data of the two straightness measurement PSD sensors 30 in real time to realize calculation of straightness and rotation attitude; the laser ranging module 28 is used for distance measurement, and can reduce the system cost by adopting a time flight method and realize high-precision position measurement by utilizing an absolute high-precision ranging module; the wireless transmitting module 6 is used for transmitting straightness and rotation attitude data, realizing communication with a human-computer interaction display device such as a computer and displaying a measurement structure in real time; the storage battery 8 is used for supplying power to the straightness and rotation attitude measurement module 2; the main electronic device is fixedly arranged on a bottom plate 26 of the laser emission and posture measurement module, the bottom plate 26 of the straightness and rotation posture measurement module is arranged in a box body 22 of the straightness and rotation posture measurement module, and a front cover plate 27 of the straightness and rotation posture measurement module is used for transmitting light and is provided with a filter to reduce stray light interference and prevent dust; and the rear cover plate 21 of the straightness and rotation attitude measurement module is used for installing the switch 9 and a charging communication interface.
Referring to fig. 4, the straightness and rotation angle measuring method includes that, oxy is a measurement coordinate system of the straightness measuring PSD sensor 30 on the left side of the receiving surface facing the straightness and rotation attitude measuring module 2, o ' x ' y ' is a measurement coordinate system of the right-side straightness measuring PSD sensor 30, the position relationship of the two straightness measuring PSD sensors 30 is obtained through linear motion calibration in advance, and the position relationship between the two PSD sensors in the coordinate systems [ x ] is obtained0,y0,α]A unified coordinate system needs to be established for calculation for convenience; initial laser measurement point p1The coordinate in oxy is (x)1,y1) The laser measuring point p is measured after the straightness and rotation attitude measuring module 2 moves a certain distance on the displacement platform2The coordinate in o ' x ' y ' is (x)2,y2) (ii) a Initial laser measurement Point p'1The coordinates within o 'x' y 'are (x'1,y′1) The straightness and rotation attitude measuring module 2 measures a point p 'by laser after the displacement stage has moved a distance'2The coordinates within o ' x ' y ' are (x ', y '); because the positions of the two PSD sensors are fixed, the relation of the measuring coordinate systems of the two PSD sensors is fixed, in order to facilitate the calculation, the measuring data in one PSD sensor coordinate system is converted into the other PSD sensor coordinate system,p 'according to the principle of coordinate system conversion'1The coordinate in oxy is (x)0+x′1cosα-y′1sinα,y0+x′1sinα+y′1cosα)，p′2The coordinate in oxy is (x)0+x′2cosα-y′2sinα,y0+x′2sinα+y′2cos α), the rotation angle is:
Figure BDA0002645741630000091
p after the motion of the moving sliding table2Relative to p1Is (x) as a positional deviation amount2-x1,y2-y1) The straightness of any point at each position can be obtained by measuring a plurality of positions of the moving sliding table, calculating the offset of each position, adopting a least square method to realize the calculation of the straightness, and combining the rotation angle beta.
The attitude angle measurement is realized by a collimation measurement principle, and the realization method comprises the following steps: the distance between the laser emission and attitude measurement module 1 and the straightness and rotation attitude measurement module 2 is measured as L by the laser distance measuring instrument1The optical distance between the three-dimensional transflective lens mounting base 17 and the collimation PSD sensor 16 is L2，L1＞＞L2After the attitude measurement PSD sensor is adjusted, the y direction is the laser emission direction, the x direction is the normal direction of the laser, so as to establish a coordinate system ox 'y', and an initial laser measurement point p ″1The coordinate within ox "y" is (x ″)1,y″1) After the straightness and rotation attitude measuring module 2 moves for a certain distance on the displacement table, the laser measuring point p ″2p2The coordinate within ox "y" is (x ″)2,y″2) Angle of elevation
Figure BDA0002645741630000092
Yaw angle
Figure BDA0002645741630000093
The above detailed description is intended to illustrate the objects, aspects and advantages of the present invention, and it should be understood that the above detailed description is only exemplary of the present invention and is not intended to limit the scope of the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.

Claims (7)

1. The utility model provides a device for moving slip table gesture high accuracy real-time measurement which characterized in that: the device mainly comprises two parts, namely a laser emission and attitude measurement module (1) and a straightness and rotation attitude measurement module (2); the laser emission and posture measurement module (1) generates and emits two beams of parallel laser to the end of the straightness and rotation posture measurement module (2), and receives the collimated laser reflected by the straightness and rotation posture measurement module (2) at the same time, so that the posture measurement of the straightness and rotation posture measurement module (2) is realized; the straightness and rotation attitude measuring module (2) is arranged on the moving sliding table and used for receiving and emitting two beams of parallel laser generated by the laser emission and attitude measuring module (1), the positions of the two beams of laser are sensed by the two straightness measuring PSD sensors (30), so that the straightness and rotation attitude measuring module (2) and the rotation attitude measuring at the installation position are measured, and meanwhile, the distance between the straightness and rotation attitude measuring module (2) and the laser emission and attitude measuring module (1) is measured by the laser ranging module (28), so that the straightness and attitude at different positions can be conveniently recorded;
the laser emission and attitude measurement module (1) mainly comprises a laser (12), a laser collimating mirror (13) installation adjusting seat (14), a coupling optical fiber, a three-dimensional transreflector (7) installation seat (17), a light homogenizing sheet (15), a collimation PSD sensor (16) installation seat (18), a distance measurement light reflecting sheet (20), an attitude measurement processing circuit (19), a storage battery (8), a wireless emission module (6), a light filter (3), a switch (9), a laser emission and attitude measurement module front cover plate (4), a laser emission and attitude measurement module bottom plate (5), a laser emission and attitude measurement module box body (11) and a laser emission and attitude measurement module rear cover plate (10); the laser emission and posture measurement module (1) is used for generating and emitting two beams of parallel laser to the front end of the straightness and rotation posture measurement module, and receiving the collimated laser reflected by the straightness and rotation posture measurement module (2) at the same time, so that the posture measurement of the straightness and rotation posture measurement module (2) is realized; the laser (12) is used for emitting collimated laser, one path of the collimated laser is divided into two paths of laser after being shaped through the coupling optical fiber, the collimated laser (12) is installed at the tail ends of the two paths of laser, and a point light source emitted by the coupling optical fiber is changed into parallel light after passing through the laser collimating mirror (13); the laser collimating lens (13) group is arranged on the laser collimating lens mounting and adjusting seat (14) and is used for adjusting pitching deflection so as to conveniently adjust two beams of collimated laser into parallel light; a three-dimensional transreflective mirror (7) is arranged in front of one path of laser collimating mirror (13) group, the three-dimensional transreflective mirror (7) is installed on a three-dimensional transreflective mirror installation seat (17), a through hole is formed in the middle of the three-dimensional transreflective mirror installation seat (17) and used for transmitting light to a collimation PSD sensor (16), the collimation PSD sensor (16) is a two-dimensional laser displacement sensor, and the straightness and the posture of the installation position of the rotation posture measurement module (2) are calculated by utilizing the distance measurement value between a laser emission and posture measurement module (1) and a straightness and rotation posture measurement module (2) and the two-dimensional change value of the laser in the collimation PSD sensor (16); in order to homogenize laser intensity and improve measurement accuracy, a light homogenizing sheet (15) is arranged between a collimation PSD sensor (16) and a three-dimensional transflective lens (7), the light homogenizing sheet (15) is installed on a collimation PSD sensor installation seat (18), and the collimation PSD sensor installation seat (18) is also used for supporting a three-dimensional transflective lens installation seat (17); signals of the collimation PSD sensor (16) are processed by an attitude measurement processing circuit (19) and then are communicated with a man-machine interaction display device through a wireless transmitting module (6) or a wired module, so that real-time display of measured values is realized; the storage battery (8) is used for supplying power to the whole system, the collimation PSD sensor (16), the attitude measurement processing circuit (19), the storage battery (8) and the wireless transmitting module (6) are all fixedly arranged on a laser transmitting and attitude measurement module bottom plate (5), the laser transmitting and attitude measurement module bottom plate (5) is arranged in a laser transmitting and attitude measurement module box body (11), and a laser transmitting and attitude measurement module front cover plate (4) is used for transmitting light and is provided with a filter lens for reducing stray light interference and preventing dust; the laser emission and attitude measurement module rear cover plate (10) is used for installing a switch (9) and a charging communication interface;
the straightness and rotation attitude measurement module (2) mainly comprises a straightness measurement PSD sensor (30), a straightness measurement PSD mounting seat (24), a semi-permeable half-reflecting mirror (25), a straightness measurement PSD mounting seat connecting plate (29), a straightness and rotation attitude processing circuit (23), a laser ranging module (28), a wireless transmitting module (6), an optical filter (3), a storage battery (8), a straightness and rotation attitude measurement module mounting bottom plate (26), a straightness and rotation attitude measurement module front cover plate (27), a straightness and rotation attitude measurement module rear cover plate (21) and a straightness and rotation attitude measurement module box body (22); the straightness and rotation attitude measuring module (2) is arranged on the moving sliding table and used for receiving and transmitting two beams of parallel laser generated by the laser emission and attitude measuring module (1), the positions of the two beams of laser are sensed by the two straightness measuring PSD sensors (30), so that the rotation attitude measurement of the straightness and rotation attitude measuring module (2) is realized, and the distance measurement between the straightness and rotation attitude measuring module (2) and the laser emission and attitude measuring module (1) is realized by the laser ranging module (28), so that the straightness and attitude at different positions can be conveniently recorded; the straightness measuring PSD sensor (30) is arranged at the rear end of a straightness measuring PSD mounting seat (24) and used for receiving laser generated by a laser emission and posture measuring module (1), the straightness measuring PSD sensor (30) is a two-dimensional sensor, a semi-transparent semi-reflecting mirror (25) is arranged at the front end of the straightness measuring PSD mounting seat (24), the straightness measuring PSD sensor (30), the straightness measuring PSD mounting seat (24) and the semi-transparent mirror (25) are fixedly connected and installed through threads to form a straightness measuring unit, then the straightness measuring PSD mounting seat connecting plate (29) is fixedly connected with a straightness and rotation posture measuring module mounting base plate (26) through threads, two straightness measuring units are arranged on the straightness and rotation posture measuring module mounting base plate (26) side by side, and the straightness measuring PSD sensor (30) is arranged on each straightness measuring unit, after receiving laser generated and emitted by the laser emission and attitude measurement module (1), the laser generates displacement relative to a self coordinate system, and because the positions of the two straightness measurement units are fixed, and the laser generated and emitted by the laser emission and attitude measurement module (1) is two beams of parallel laser, the position relation of the two straightness measurement PSD sensors (30) is calibrated in advance according to the equal distance of the two parallel lasers, so that the measurement of the straightness and the rotation attitude of the straightness and rotation attitude measurement module (2) and the installation sliding table can be realized; after one path of laser generated and emitted from the laser emission and attitude measurement module (1) passes through the semi-transparent semi-reflecting mirror (25), one part of the laser penetrates and reaches the straightness measurement PSD sensor (30), and the other part of the laser returns to the collimation PSD sensor (16) of the laser emission and attitude measurement module (1) after plane reflection, according to the collimation principle, the distance value between the laser emission and attitude measurement module (1) and the straightness and rotation attitude measurement module (2) is known, and the measurement of the straightness and rotation attitude measurement module (2) and the pitching and yawing attitudes of the sliding table mounted on the module is realized by calculating the laser displacement after reflection; the straightness and rotation attitude processing circuit (23) is used for processing data of the two straightness measurement PSD sensors (30) in real time to realize calculation of the straightness and the rotation attitude; the laser ranging module (28) is used for distance measurement, not only for reducing the system cost by adopting a time flight method, but also for realizing high-precision position measurement by utilizing an absolute high-precision ranging module; the wireless transmitting module (6) is used for transmitting straightness and rotation attitude data, realizing communication with a human-computer interaction display device and displaying a measurement structure in real time; the storage battery (8) is used for supplying power to the straightness and rotation attitude measurement module (2); the device comprises a straightness measuring PSD sensor (30), a straightness and rotation attitude processing circuit (23), a laser ranging module (28) and a wireless transmitting module (6), wherein the straightness measuring PSD sensor, the straightness and rotation attitude processing circuit, the laser ranging module and the wireless transmitting module are fixedly arranged on a laser transmitting and attitude measuring module bottom plate (5), the straightness and rotation attitude measuring module bottom plate is arranged in a straightness and rotation attitude measuring module box body (22), and a straightness and rotation attitude measuring module front cover plate (27) is used for transmitting light and is provided with a filter lens to reduce stray light interference and prevent dust; and the straightness and rotation attitude measurement module rear cover plate (21) is used for installing the switch (9) and the charging communication interface.
2. The device for high-precision real-time measurement of the attitude of the moving slide table as claimed in claim 1, wherein: the working method is that,
the straightness and rotation attitude measuring module (2) is arranged on the motion sliding table, the laser emitting and attitude measuring module (1) is arranged on a tripod or a fixed platform independent of the motion sliding table, the straightness and rotation attitude measuring module (2) and a switch (9) of the laser emitting and attitude measuring module (1) are respectively opened, the position of the straightness and rotation attitude measuring module (2) is adjusted according to laser emitted by the laser emitting and attitude measuring module (1) until visible laser is shot at the middle position of each PSD, the posture of the straightness and rotation attitude measuring module (2) is adjusted until the PSD of the laser emitting and attitude measuring module (1) has a reading and is in a measuring range, the position of the straightness and rotation attitude measuring module (2) is adjusted until each PSD number is in the measuring range, and the position value of the initial position is recorded, and after measuring and recording the measured value of each position, calculating the straightness according to the measured value, namely realizing synchronous real-time high-precision measurement of the straightness, rotation, pitching and yawing attitude angles of the moving sliding table.
3. The device for high-precision real-time measurement of the attitude of the moving slide table as claimed in claim 1 or 2, wherein: the straightness and rotation angle measuring method comprises the following steps that oxy is a measuring coordinate system of a straightness measuring PSD sensor (30) on the left side of a receiving surface, which is just opposite to a straightness measuring attitude measuring module (2), o ' x ' y ' is a measuring coordinate system of a right straightness measuring PSD sensor (30), the position relation of the two straightness measuring PSD sensors (30) is obtained through linear motion calibration in advance, and the position relation [ x ] between the two PSD sensors in the coordinate systems is obtained0,y0,α]A unified coordinate system needs to be established for calculation for convenience; initial laser measurement point p1The coordinate in oxy is (x)1,y1) The straightness and rotation attitude measuring module (2) measures the point p by laser after the displacement table moves for a certain distance2The coordinate within o ' x ' y ' is (x)2,y2) (ii) a Initial laser measurement Point p'1The coordinates within o 'x' y 'are (x'1,y′1) The straightness and rotation attitude measurement module (2) measures a point p 'after the displacement table moves for a distance'2The coordinates within o ' x ' y ' are (x ', y '); because the positions of the two PSD sensors are fixed, the relation of the measurement coordinate systems of the two PSD sensors is fixed, and in order to facilitate calculation, measurement data in one PSD sensor coordinate system is converted into the other PSD sensor coordinate system, and then p 'is obtained according to the coordinate system conversion principle'1The coordinate in oxy is (x)0+x′1cosα-y′1sinα,y0+x′1sinα+y′1cosα)，p′2The coordinate in oxy is (x)0+x′2cosα-y′2sinα,y0+x′2sinα+y′2cos α), the rotation angle is:
Figure FDA0003530934040000031
Figure FDA0003530934040000041
p after the motion of the moving sliding table2Relative to p1Is (x) as a positional deviation amount2-x1,y2-y1) The straightness of any point at each position can be obtained by measuring a plurality of positions of the moving sliding table, calculating the offset of each position, adopting a least square method to realize the calculation of the straightness, and combining the rotation angle beta.
4. The device for high-precision real-time measurement of the attitude of the moving slide table as claimed in claim 1 or 2, wherein: the attitude angle measurement is realized by a collimation measurement principle, and the realization method comprises the following steps: the distance between the laser emission and attitude measurement module (1) and the straightness and rotation attitude measurement module (2) is measured to be L through a laser range finder1The optical path between the stereo transflective lens mounting base (17) and the collimation PSD sensor (16) is L2，L1>>L2Attitude measurement PSAfter the D sensor is adjusted, the y direction is the laser emission direction, the x direction is the normal direction of the laser, the coordinate system ox 'y' is established, and the initial laser measurement point p ″, is established1The coordinate within ox "y" is (x ″)1,y″1) The straightness and rotation attitude measuring module (2) measures a point p' after the displacement table moves for a certain distance by using laser2p2The coordinate within ox "y" is (x ″)2,y″2) Angle of elevation
Figure FDA0003530934040000043
Yaw angle
Figure FDA0003530934040000044
5. The device for high-precision real-time measurement of the attitude of the moving slide table as claimed in claim 1 or 2, wherein: the laser (12) adopts a visible laser (12) to facilitate the adjustment during the measurement.
6. The device for high-precision real-time measurement of the attitude of the moving slide table as claimed in claim 1 or 2, wherein: the laser (12) adopts a scheme that a single laser (12) is divided into two paths of light through a coupling optical fiber, so that the cost is reduced, and the laser is shaped.
7. The device for high-precision real-time measurement of the attitude of the moving slide table as claimed in claim 1 or 2, wherein: the storage battery (8) adopts a rechargeable lithium battery scheme, so that the device for high-precision real-time measurement of the posture of the moving sliding table is convenient, fast and practical.
CN202010867319.XA 2020-08-24 2020-08-24 Device for high-precision real-time measurement of moving sliding table posture Active CN111998775B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010867319.XA CN111998775B (en) 2020-08-24 2020-08-24 Device for high-precision real-time measurement of moving sliding table posture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010867319.XA CN111998775B (en) 2020-08-24 2020-08-24 Device for high-precision real-time measurement of moving sliding table posture

Publications (2)

Publication Number Publication Date
CN111998775A CN111998775A (en) 2020-11-27
CN111998775B true CN111998775B (en) 2022-06-07

Family

ID=73472109

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010867319.XA Active CN111998775B (en) 2020-08-24 2020-08-24 Device for high-precision real-time measurement of moving sliding table posture

Country Status (1)

Country Link
CN (1) CN111998775B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113310436B (en) * 2021-05-31 2023-03-28 辽宁元创石化技术有限公司 Laser detector for straightness of tower type container
CN113970299A (en) * 2021-10-14 2022-01-25 中国航空工业集团公司北京长城计量测试技术研究所 Device for vertically measuring outline of elongated piece with high precision

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4213428A1 (en) * 1991-04-26 1992-10-29 Nikon Corp DEVICE FOR LINEARITY MEASUREMENT
CN101750012A (en) * 2008-12-19 2010-06-23 中国科学院沈阳自动化研究所 Device for measuring six-dimensional position poses of object
CN103673933A (en) * 2013-11-29 2014-03-26 中国科学院上海光学精密机械研究所 Long rail straightness measuring device
JP2019200168A (en) * 2018-05-18 2019-11-21 新東エスプレシジョン株式会社 Straightness measuring device
CN110482351A (en) * 2019-08-05 2019-11-22 南京理工大学 One kind is with straightness of elevator guide rail detection system and method
CN110763141A (en) * 2019-08-29 2020-02-07 北京空间飞行器总体设计部 Precision verification method and system of high-precision six-degree-of-freedom measurement system

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107356236B (en) * 2017-07-31 2023-05-30 天津大学 Dynamic pose real-time measurement device and method
CN109443211A (en) * 2018-12-13 2019-03-08 中国航空工业集团公司北京长城计量测试技术研究所 A kind of spatial three-dimensional position measuring device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4213428A1 (en) * 1991-04-26 1992-10-29 Nikon Corp DEVICE FOR LINEARITY MEASUREMENT
CN101750012A (en) * 2008-12-19 2010-06-23 中国科学院沈阳自动化研究所 Device for measuring six-dimensional position poses of object
CN103673933A (en) * 2013-11-29 2014-03-26 中国科学院上海光学精密机械研究所 Long rail straightness measuring device
JP2019200168A (en) * 2018-05-18 2019-11-21 新東エスプレシジョン株式会社 Straightness measuring device
CN110482351A (en) * 2019-08-05 2019-11-22 南京理工大学 One kind is with straightness of elevator guide rail detection system and method
CN110763141A (en) * 2019-08-29 2020-02-07 北京空间飞行器总体设计部 Precision verification method and system of high-precision six-degree-of-freedom measurement system

Also Published As

Publication number Publication date
CN111998775A (en) 2020-11-27

Similar Documents

Publication Publication Date Title
CN106595480B (en) For measuring the laser measurement system and method for shaft six degree of freedom geometric error
US4884889A (en) Calibration system for coordinate measuring machine
CN2884141Y (en) Laser, six freedom simultaneous measuring apparatus
US4261107A (en) Coordinate locating device
CN111998775B (en) Device for high-precision real-time measurement of moving sliding table posture
CN110230999A (en) A kind of linear motion system five degree of freedom error synchronous measuring apparatus and method
CN110081823B (en) Five-degree-of-freedom geometric motion error measurement system of machine tool
CN210346614U (en) Calibration system for laser alignment receiving and transmitting integrated straightness accuracy measurement
CN116086361B (en) Straightness measuring device for large-stroke guide rail and error obtaining method
CN104913732A (en) Normal-tracking-type aspheric surface measuring method and system based on composite laser interference
CN211072866U (en) Take receiving and dispatching split type five degree of freedom measuring device of light path drift compensation
Saadat et al. Measurement systems for large aerospace components
CN104864822A (en) Method and system for normal tracking aspheric measurement based on laser interference
CN110455226B (en) Calibration system and method for laser collimation transceiving integrated straightness measurement
CN112596258A (en) Debugging method for two-dimensional turntable folded optical assembly
US8325333B2 (en) Geometric error measuring device
CN209706746U (en) A kind of lathe five degree of freedom geometric moving error measuring system
CN201885688U (en) Three-dimensional position tracking and measuring device
CN108731593B (en) Front and back binocular position and attitude optical measurement structure and method
CN211926795U (en) Novel three-dimensional dynamic high-precision photoelectric autocollimator
CN102589448A (en) High-precision six-freedom degree pose monitoring device
US20230384090A1 (en) High-precision dual-axis laser inclinometer based on wavefront homodyne interference and measuring method
CN111879496B (en) High-precision real-time resetting and measuring device for wind tunnel balance loading head
CN110666592A (en) Transmit-receive split type five-degree-of-freedom measuring device with optical path drift compensation and method
CN114234854B (en) Method and device for simultaneously measuring three-degree-of-freedom angles

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant