CN117108633B

CN117108633B - Air floating table

Info

Publication number: CN117108633B
Application number: CN202311373827.2A
Authority: CN
Inventors: 梁冰; 袁嘉欣
Original assignee: Shanghai Yinguan Semiconductor Technology Co Ltd
Current assignee: Shanghai Yinguan Semiconductor Technology Co Ltd
Priority date: 2023-10-23
Filing date: 2023-10-23
Publication date: 2024-01-02
Anticipated expiration: 2043-10-23
Also published as: CN117108633A

Abstract

The invention provides an air floating platform which comprises a guide structure, a moving structure and a plurality of horizontal air floating components. At least part of the guiding structure extends in a first direction; the guide structure penetrates through the moving structure, and the moving structure can move relative to the guide structure; the plurality of horizontal air floatation assemblies are respectively arranged at two sides of the guide structure, air floatation guide surfaces are formed at the two horizontal sides of the guide structure, and the air outlet parts of the air floatation pads of the horizontal air floatation assemblies are arranged towards the air floatation guide surfaces. The horizontal air floatation assembly comprises a swinging component, one end of the swinging component is connected with the moving structure, and the other end of the swinging component is connected with the air floatation pad; the swinging component comprises a connecting structure at least partially extending along the preset direction, one end of the swinging component is connected with the other end of the swinging component through the connecting structure and can swing around the connecting structure, the swinging component has rigidity in the vertical direction, and the rigidity is smaller than the rigidity of an air film generated by the air cushion. By adopting the technical scheme provided by the invention, the technical problem that the degree of freedom of the air floatation pad in the prior art is overlarge can be solved.

Description

Air floating table

Technical Field

The invention relates to the technical field of air floatation tables, in particular to an air floatation table.

Background

At present, in the process of manufacturing or checking the high-precision instrument, because the motion precision of the workbench directly affects the resolution of the high-precision instrument, in order to ensure the high precision of manufacturing or checking, an air floatation workbench is generally adopted for operation. The working principle of the air-floating workbench is that an air-floating pad connected with the movable platform is used for spraying air to the guide rail so as to enable the movable structure to be in a floating state. In the prior art, a fixed installation mode is generally adopted for installing the air bearing pad and the mobile station, but the installation part machining precision and the assembly precision of the air bearing pad are required to be very high by the fixed installation mode. Therefore, in the prior art, installation methods such as ball hinge installation and the like are also presented.

However, the mounting methods such as ball-and-socket mounting can reduce the machining accuracy and the assembly accuracy of the mounting parts of the air bearing pad to some extent, and can make the air bearing pad more flexibly adjustable than the fixed mounting methods. However, due to the connection characteristic of the spherical hinge, the rotation rigidity of the connection between the air bearing pad and the mobile station is too low or even nearly zero, so that the degree of freedom of the air bearing pad is too high, the air bearing pad is unstable in working state, the overall motion stability of the air bearing workbench can be affected, and the vibration around the vertical direction is particularly obvious during horizontal motion.

Disclosure of Invention

The invention mainly aims to provide an air floating table so as to solve the technical problems that the degree of freedom of an air floating pad in the prior art is overlarge and shaking is easy to occur in the vertical direction.

In order to achieve the above object, according to one aspect of the present invention, there is provided an air bearing table comprising:

the device comprises a guide structure, a moving structure and a plurality of horizontal air floatation assemblies, wherein at least part of the guide structure extends along a first direction, and the first direction is a horizontal direction; the guide structure is arranged in the moving structure in a penetrating way, and the moving structure can move relative to the guide structure along the first direction; the plurality of horizontal air floatation assemblies are respectively arranged at the two horizontal sides of the guide structure along the first direction, a plurality of air floatation guide surfaces are formed at the two horizontal sides of the guide structure, and the air outlet parts of the air floatation pads of the horizontal air floatation assemblies are all arranged towards the air floatation guide surfaces;

the horizontal air floatation assembly further comprises a swinging component, one end of the swinging component is connected with the moving structure, and the other end of the swinging component is connected with the air floatation pad; the swinging component comprises a connecting structure at least partially extending along the preset direction, one end of the swinging component is connected with the other end of the swinging component through the connecting structure and can swing around the connecting structure, the swinging component has rigidity in the vertical direction, and the rigidity of the swinging component in the vertical direction is smaller than the rigidity of an air film generated by the air floating pad.

Further, the connecting structure comprises at least two connecting parts extending along a preset direction;

the extending directions of the at least two connecting portions are arranged at a preset angle with the first direction on the vertical plane, and the at least two connecting portions are arranged in a mirror symmetry mode with the first direction as a center.

Further, the swinging member extends in a direction perpendicular to the air bearing guide surface, and the at least two connecting portions include:

the extending direction of the first connecting part and the first direction form a first preset angle on a vertical plane;

the second connecting part and the first connecting part are arranged in a mirror symmetry mode by taking the first direction as a center, and the second connecting part and the first connecting part are arranged at intervals along the extending direction of the swinging part.

Further, the first preset angle is alpha, and alpha is more than or equal to 10 degrees and less than or equal to 45 degrees.

Further, the swinging component comprises a first mounting end and a second mounting end, and the first mounting end and the second mounting end are respectively connected with the moving structure and the air flotation pad;

the swinging component further comprises a first intermediate structure, the first intermediate structure is arranged between the first installation end and the second installation end, the first intermediate structure, the first installation end and the second installation end are arranged at intervals, the first connecting portion is arranged between the first intermediate structure and the first installation end and is connected with the first intermediate structure and the first installation end, and the second connecting portion is arranged between the first intermediate structure and the second installation end and is connected with the first intermediate structure and the second installation end.

Further, the connecting structure further comprises a third connecting portion, the third connecting portion is arranged at intervals with the first connecting portion and the second connecting portion along the extending direction of the swinging component, and the extending direction of the third connecting portion is parallel to or coincides with the first direction.

Further, the swinging member includes:

the first installation end and the second installation end are respectively connected with the moving structure and the air flotation pad;

the swinging component further comprises a first intermediate structure and a second intermediate structure, wherein the first installation end, the first intermediate structure, the second intermediate structure and the second installation end are sequentially arranged at intervals along the extending direction of the swinging component, and a first connection part, a third connection part and a second connection part are respectively arranged between the first intermediate structure and the second intermediate structure, between the first installation end and the first intermediate structure and between the second installation end and the second intermediate structure.

Further, the air supporting table still includes the brace table, and guide structure erects on the brace table, and the bottom of moving structure sets up on the mesa of brace table, and moving structure still includes:

the vertical air floatation assembly is arranged at the bottom of the moving structure, and the air outlet part of the vertical air floatation assembly is arranged towards the table top of the supporting table.

Further, the horizontal air floatation assembly further comprises a mounting structure, the swinging component is connected with at least part of the moving structure through the mounting structure, and the rigidity of the mounting structure in all directions is larger than that of the swinging component in all directions.

Further, the mounting structure is provided with a containing groove, the containing groove is matched with at least part of the size of the swinging component, and at least part of the swinging component is fixedly mounted in the containing groove;

the installation structure further comprises a locking channel and a locking piece, the locking channel penetrates through the installation structure and is connected with the accommodating groove, and the locking piece is arranged in the locking channel and is fixedly connected with the swinging part at least partially at the accommodating groove.

Further, the moving structure comprises a fixed structure and a moving seat body, the moving seat body is erected on at least part of the guide structure, the fixed structure is arranged on the side wall of the moving seat body, the fixed structure is provided with a fixed channel, and the extending direction of the fixed channel is perpendicular to the extending direction of the air floatation guide surface;

the installation structure is arranged in the fixed channel in a penetrating mode along the extending direction of the fixed channel, and the distance between the air outlet part of the air cushion and the air guide surface is changed by adjusting the position of the installation structure in the fixed channel.

Further, the guide structure is provided with a first guide surface and a second guide surface which are oppositely arranged; the four horizontal air floatation assemblies are arranged, two of the four horizontal air floatation assemblies are arranged corresponding to the first guide surface, and the other two air floatation tables of the four horizontal air floatation assemblies are arranged corresponding to the second guide surface.

By adopting the technical scheme, the swinging component is arranged on the horizontal air floatation component, and the connecting structure extending along the preset direction is arranged on the swinging component, so that the air floatation pad can swing around the connecting structure under the action of the connecting structure, the air floatation pad can have the degree of freedom in the specific direction, and the technical problem of overlarge degree of freedom of the air floatation pad in the prior art can be solved.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention. In the drawings:

FIG. 1 shows a schematic view of the overall structure of an air bearing table provided according to an embodiment of the present invention;

FIG. 2 shows a schematic top view of an air bearing table according to an embodiment of the present invention;

FIG. 3 shows a schematic view of a horizontal air bearing assembly according to an embodiment of the present invention when mated with a fixed structure;

FIG. 4 shows a schematic cross-sectional structure of a horizontal air floatation assembly provided in accordance with an embodiment of the present invention;

FIG. 5 shows a schematic structural view of a horizontal air bearing assembly provided in accordance with an embodiment of the present invention;

fig. 6 shows a schematic structural view of a swing member provided with a first connection portion and a second connection portion according to an embodiment of the present invention;

fig. 7 is a schematic diagram showing a front view of a swing member provided with a first connecting portion and a second connecting portion according to an embodiment of the present invention;

fig. 8 is a schematic structural view showing a swing member provided with a first connection portion, a second connection portion, and a third connection portion according to an embodiment of the present invention;

fig. 9 is a schematic front view showing a swing member provided with a first connecting portion, a second connecting portion and a third connecting portion according to an embodiment of the present invention.

Wherein the above figures include the following reference numerals:

10. a guide structure; 11. a first guide surface; 12. a second guide surface;

20. a moving structure; 21. a vertical air floatation assembly; 22. a fixed structure; 23. moving the seat body;

30. a horizontal air floatation assembly; 31. an air bearing pad; 32. a swinging member; 321. a connection structure; 3211. a first connection portion; 3212. a second connecting portion; 3213. a third connecting portion; 322. a first mounting end; 323. a second mounting end; 324. a first intermediate structure; 325. a second intermediate structure; 33. a mounting structure; 331. a receiving groove; 332. a locking channel; 333. a locking member;

40. a support table; 41. a table top.

Detailed Description

It should be noted that, in the case of no conflict, the embodiments and features in the embodiments may be combined with each other. The invention will be described in detail below with reference to the drawings in connection with embodiments.

Referring to fig. 1 to 9, in an embodiment of the present invention, an air bearing table is provided, and the air bearing table includes a guiding structure 10, a moving structure 20 and a plurality of horizontal air bearing assemblies 30. At least part of the guiding structure 10 extends in a first direction, the first direction being a horizontal direction; the guide structure 10 is arranged in the moving structure 20 in a penetrating way, and the moving structure 20 can move relative to the guide structure 10 along a first direction; the plurality of horizontal air floatation assemblies 30 are respectively arranged on the two horizontal sides of the guide structure 10 along the first direction, the two horizontal sides of the guide structure 10 form a plurality of air floatation guide surfaces, and the air outlet parts of the air floatation pads 31 of the horizontal air floatation assemblies 30 are respectively arranged towards the air floatation guide surfaces. Wherein, the horizontal air floatation assembly 30 further comprises a swinging component 32, one end of the swinging component 32 is connected with the moving structure 20, and the other end of the swinging component 32 is connected with the air floatation pad 31; the swinging member 32 includes a connection structure 321 extending at least partially in a preset direction, one end of the swinging member 32 is connected with the other end of the swinging member 32 through the connection structure 321, and can swing around the connection structure 321, the swinging member 32 has rigidity in a around vertical direction, and the rigidity of the swinging member 32 around the vertical direction is smaller than the rigidity of the air film generated by the air bearing pad 31. The swing member 32 in this embodiment is made of a flexible material. The horizontal direction X is a first direction, the horizontal direction Y is perpendicular to the direction X, and the Z direction is a vertical direction.

By adopting the arrangement, through arranging the connecting structure 321 to connect one end of the swinging component 32 with the other end of the swinging component 32, under the action of the connecting structure 321, the air cushion 31 connected to the other end of the swinging component 32 can obtain decoupling in a specific degree of freedom so that the air cushion 31 swings around the connecting structure 321, and by adopting the way of arranging the connecting structure 321, the air cushion 31 can have no rigidity only in the preset direction around the connecting structure 321 and has certain rigidity in other directions, so that the technical problem of overlarge degree of freedom of the air cushion in the prior art can be solved.

Specifically, any one of the plurality of horizontal air floatation assemblies 30 is provided with a connecting structure 321, and the extending direction of the connecting structure 321 is not the vertical direction, so that under the combined action of the connecting structures 321 of the plurality of horizontal air floatation assemblies 30, the moving structure 20 can be ensured to obtain a higher mode in the direction around the vertical direction, and deflection of the moving structure 20, especially shake in the vertical direction, can be avoided. Because the rigidity of the swinging component 32 is smaller than that of the air film generated by the air cushion 31, when each horizontal air cushion component 30 moves along with the moving structure 20, the horizontal air cushion component 30 can obtain a certain self-adaption degree, so that the self-adaption degree of the air cushion 31 can be ensured, and the situation that the air cushion 31 rubs or collides with the guide structure 10 due to the processing precision problem of the guide structure 10 is avoided. Therefore, such an arrangement can not only provide a specific degree of freedom for the horizontal air bearing assembly 30, but also make the movement of the moving structure 20 more stable.

It should be noted that, because the volume of the horizontal air-floating assembly 30 is generally smaller, in order to ensure the self-adaptive swing of the air-floating pad 31, the connection structure 321 in this embodiment may adopt a configuration of a hinge rib structure; and when the volume of the horizontal air floatation assembly 30 is larger, the connection structure 321 can also be configured by adopting a connection block and other structures to further improve the rigidity of the horizontal air floatation assembly 30 in the vertical direction under the condition of ensuring that the air floatation pad 31 can swing.

In this embodiment, the connection structure 321 includes at least two connection portions extending along a predetermined direction. The extending directions of the at least two connecting portions are arranged at a preset angle with the first direction on the vertical plane, and the at least two connecting portions are arranged in a mirror symmetry mode with the first direction as a center. With such an arrangement, since the at least two connection portions are arranged in mirror symmetry with the first direction as the center, the air bearing pad 31 can be swung in two directions, so that the air bearing pad 31 can obtain more degrees of freedom in specific directions, and the self-adaptability of the air bearing pad 31 can be effectively improved.

Specifically, the swinging member 32 extends in the direction perpendicular to the air bearing rail surface, i.e., in the Y direction, and at least two connecting portions include a first connecting portion 3211 and a second connecting portion 3212. The extending direction of the first connecting portion 3211 forms a first predetermined angle with the first direction on a vertical plane. The second connection portions 3212 and the first connection portions 3211 are arranged in mirror symmetry with respect to the first direction as a center, and the second connection portions 3212 and the first connection portions 3211 are arranged at intervals along the extending direction of the swinging member 32. With such a configuration, the second connection portion 3212 and the first connection portion 3211 are disposed at intervals and are mirror-symmetrical with respect to the first direction, so that the second connection portion 3212 and the first connection portion 3211 can be prevented from interfering with each other while the air bearing pad 31 is rotated in more directions, thereby preventing the air bearing pad 31 from being affected by the swing motion.

It should be noted that, in this embodiment, the rigidity of the first connecting portion 3211 and the second connecting portion 3212 may be obtained by adjusting the design parameters (such as the diameter, the hinge rib thickness, etc.) of the first connecting portion 3211 and the second connecting portion 3212, so as to adapt to the use requirements of different actual working conditions.

In this embodiment, the first preset angle is α, 10+.α.ltoreq.45 °. With such an arrangement, when the angle α is too large or too small, the rigidity of the second connection portion 3212 and the first connection portion 3211 to rotate in the around-vertical direction is affected; the rigidity of the second connecting portion 3212 and the rigidity of the first connecting portion 3211 can be controlled within a reasonable range through the angle arrangement, so that the rigidity in the vertical direction is guaranteed to be higher, the rigidity in the vertical direction is guaranteed to be smaller than the rigidity of the air film, and the degree of freedom of the second connecting portion 3212 and the first connecting portion 3211 in the specific direction is better provided. Preferably, as shown in fig. 7, the bold arrow direction is a first direction, the dotted line direction is the extending direction of the first connecting portion 3211 and the second connecting portion 3212, α=45°, and the extending direction of the second connecting portion 3212 is perpendicular to the extending direction of the first connecting portion 3211, so that the swinging member 32 has high rigidity in both the vertical direction and the first direction, and the moving structure 20 is more stable when moving along the first direction.

Specifically, the swing member 32 includes a first mounting end 322 and a second mounting end 323, and the first mounting end 322 and the second mounting end 323 are respectively connected with the moving structure 20 and the air bearing 31. The swinging component 32 further includes a first intermediate structure 324, where the first intermediate structure 324 is disposed between the first mounting end 322 and the second mounting end 323, the first intermediate structure 324 and the first mounting end 322 and the second mounting end 323 are disposed at intervals, the first connecting portion 3211 is disposed between the first intermediate structure 324 and the first mounting end 322 and connects the first intermediate structure 324 and the first mounting end 322, and the second connecting portion 3212 is disposed between the first intermediate structure 324 and the second mounting end 323 and connects the first intermediate structure 324 and the second mounting end 323. With such an arrangement, the first intermediate structure 324 can enhance the rigidity of the horizontal air floating assembly 30 to a certain extent, and the first intermediate structure 324 can also facilitate the installation of the second connecting portion 3212 and the first connecting portion 3211, and avoid the interaction between the second connecting portion 3212 and the first connecting portion 3211 through the first intermediate structure 324.

In this embodiment, the connection structure 321 further includes a third connection portion 3213, where the third connection portion 3213 is disposed at intervals along the extending direction of the swinging member 32 with the first connection portion 3211 and the second connection portion 3212, and the extending direction of the third connection portion 3213 is parallel or coincident with the first direction. As shown in fig. 9, the bold arrow direction in the drawing is the first direction, the dotted line direction is the extending direction of the first connecting portion 3211, the second connecting portion 3212, and the third connecting portion 3213, and with such an arrangement, the arrangement of the third connecting portion 3213 can provide higher rigidity for the horizontal air floating assembly 30 in the moving direction of the moving structure 20, and provide a degree of freedom around the horizontal direction through the third connecting portion 3213, so as to further improve the self-adaptability of the air floating pad 31.

Specifically, the swing member 32 further includes a first intermediate structure 324 and a second intermediate structure 325, and the first mounting end 322, the first intermediate structure 324, the second intermediate structure 325, and the second mounting end 323 are sequentially spaced apart along the extending direction of the swing member 32. A first connection portion 3211, a third connection portion 3213, and a second connection portion 3212 are provided between the first intermediate structure 324 and the second intermediate structure 325, between the first mounting end 322 and the first intermediate structure 324, and between the second mounting end 323 and the second intermediate structure 325, respectively. With such a configuration, the second connection portion 3212, the first connection portion 3211 and the third connection portion 3213 are separated by the second intermediate structure 325 and the first intermediate structure 324, so that interference among the second connection portion 3212, the first connection portion 3211 and the third connection portion 3213 can be further avoided, and stability of the horizontal air floating assembly 30 is further improved.

Specifically, as shown in fig. 8, the first connection portion 3211 is provided between the first intermediate structure 324 and the second intermediate structure 325, and connects the first intermediate structure 324 and the second intermediate structure 325; the second connection portion 3212 is disposed between the second intermediate structure 325 and the second mounting end 323, and connects the second intermediate structure 325 and the second mounting end 323; the third connection portion 3213 is disposed between the first mounting end 322 and the first intermediate structure 324, and connects the first mounting end 322 and the first intermediate structure 324. The positions of the first connecting portion 3211, the second connecting portion 3212, and the third connecting portion 3213 may be changed, and are not shown here.

In this embodiment, the air bearing table further includes a supporting table 40, the guiding structure 10 is erected on the supporting table 40, and the bottom of the moving structure 20 is disposed on a table top 41 of the supporting table 40. The moving structure 20 further includes a vertical air-floating assembly 21, the vertical air-floating assembly 21 is disposed at the bottom of the moving structure 20, and an air outlet of the vertical air-floating assembly 21 is disposed towards the table top 41 of the supporting table 40. By adopting the arrangement, the vertical air floatation assembly 21 arranged at the bottom of the moving structure 20 is in the form of an air floatation assembly with vacuum preloading, so that under the action of positive and negative pressure of the vertical air floatation assembly 21, the vertical air floatation assembly 21 can limit the movement of the moving structure 20 in the vertical direction and the rotation of the moving structure 20 around the horizontal direction, thereby further improving the stability of the moving structure 20 during movement.

It should be noted that, by the design of the vertical air floating assembly 21, the rotation of the moving structure 20 around the horizontal direction, that is, around the X-direction and the Y-direction, is limited. The horizontal air bearing assembly 30 need only have a high stiffness in the direction about the vertical to further enhance the stability of movement of the moving structure 20 in the first direction.

Specifically, the horizontal air bearing assembly 30 further includes a mounting structure 33, and the swing member 32 is connected to at least a portion of the moving structure 20 through the mounting structure 33, and the rigidity of the mounting structure 33 in each direction is greater than the rigidity of the swing member 32 in each direction. With such arrangement, the installation of the swing member 32 and the moving structure 20 can be facilitated by the installation structure 33, and the greater rigidity of the installation structure 33 can ensure that the horizontal air floating assembly 30 swings only at the swing member 32 close to the air floating pad 31, so that the stability of the air floating platform is further improved.

In the present embodiment, the mounting structure 33 has a receiving groove 331, the receiving groove 331 is adapted to the size of at least part of the swinging member 32, and at least part of the swinging member 32 is fixedly mounted in the receiving groove 331. The mounting structure 33 further includes a locking channel 332 and a locking member 333, where the locking channel 332 penetrates the mounting structure 33 and is connected to the accommodating groove 331, and the locking member 333 is disposed in the locking channel 332 and is fixedly connected to the swinging member 32 at least partially at the accommodating groove 331. In particular, retaining member 333 may be a locking screw structure. With such an arrangement, when the locker 333 passes through the locking passage 332 and simultaneously passes through the mounting structure 33 and the receiving groove 331, the locker 333 can be engaged with at least a portion of the swing member 32 disposed in the receiving groove 331, thereby locking the swing member 32 and the mounting structure 33; and under the locking action of the locking member 333, at least part of the swinging member 32 can be prevented from rotating relative to the accommodating groove 331, so that the stability of the horizontal air floatation assembly 30 can be further improved. Preferably, the axes of the accommodating groove 331, the locking member 333 and the swinging member 32 are coincident, so that the gravity center of the swinging member 32 does not change during swinging, and the stability of the horizontal air floatation assembly 30 and the moving structure 20 during movement is further improved.

Specifically, the moving structure 20 includes a fixed structure 22 and a moving seat body 23, the moving seat body 23 is erected on at least a portion of the guiding structure 10, the fixed structure 22 is disposed on a side wall of the moving seat body 23, the fixed structure 22 has a fixed channel, and an extending direction of the fixed channel is perpendicular to an extending direction of the air-floating guide surface. The mounting structure 33 is adjustably positioned in the fixed passage along the extending direction of the fixed passage, so that the distance between the air outlet portion of the air cushion 31 and the air guide surface can be changed by adjusting the position of the mounting structure 33 in the fixed passage. With such arrangement, since the extending direction of the fixed channel is perpendicular to the extending direction of the air-floating guide surface, the position of the air outlet portion of the air-floating cushion 31 relative to the air-floating guide surface can be changed by matching the mounting structure 33 with the position of the fixed channel, so that the air film gap generated by the air-floating cushion 31 can be adjusted to better meet the actual working requirement or offset the assembly error.

It should be noted that, in this embodiment, the fixing channel and the mounting structure 33 may be engaged by using a threaded engagement manner, so that the mounting structure 33 can have more adjustable positions relative to the fixing channel by using the characteristic of the threads. Further, in order to secure stability after adjustment of the mounting structure 33, a lock nut may be provided on a side of the mounting structure 33 remote from the swing member 32 to lock the mounting structure 33 after the adjustment of the mounting structure 33 is completed.

In the present embodiment, the guide structure 10 has a first guide surface 11 and a second guide surface 12 that are disposed opposite to each other; the number of the horizontal air floatation assemblies 30 is four, two horizontal air floatation assemblies 30 in the four horizontal air floatation assemblies 30 are arranged corresponding to the first guide surface 11, and the other two air floatation tables in the four horizontal air floatation assemblies 30 are arranged corresponding to the second guide surface 12. With such a configuration, the four sets of horizontal air floating assemblies 30 can be respectively matched with the first guide surface 11 and the second guide surface 12, so as to avoid the movement of the moving structure 20 in the direction perpendicular to the moving direction, and also can form a certain limitation on the rotation of the moving structure 20 around the vertical direction, thereby enabling the movement of the moving structure 20 to be more stable.

The overall effect of the solution of the invention is further explained in connection with the above description: for the single horizontal air floatation assembly 30, the connecting structure 321 in the swinging component 32 provides swinging capability in a specific direction (the rigidity in the extending direction of the connecting structure 321 is zero, the rigidity in other directions is not zero), and the swinging component 32 has certain deformation capability in all directions through the combination of the connecting parts in the connecting structure 321, so that the defect of poor self-adaption capability of fixed connection adjustment is avoided.

Because the rigidity of the swinging component 32 in all directions is not zero, in the integral structure of the air bearing table, the plurality of horizontal air bearing components 30 with rigidity in the vertical direction are arranged, so that the stability of the moving structure 20 in the vertical direction can be effectively improved, meanwhile, the rigidity of the swinging component 32 in the vertical direction is smaller than the air film rigidity, the self-adaptive capacity of the horizontal air bearing components 30 can be preferentially started without changing the air bearing clearance of the air bearing cushion 31, the stability of the integral equipment is improved, and the defect of poor connection stability of the spherical hinge is avoided.

Therefore, the scheme of the invention solves the respective defects of the fixed connection and the spherical hinge connection of the air floatation assembly, so that the air floatation pad 31 has the degree of freedom in a specific direction, and further the technical problem that the air floatation pad in the prior art has overlarge degree of freedom and is easy to shake particularly in the vertical direction can be solved.

It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments in accordance with the present application. As used herein, the singular is also intended to include the plural unless the context clearly indicates otherwise, and furthermore, it is to be understood that the terms "comprises" and/or "comprising" when used in this specification are taken to specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof.

The relative arrangement of the components and steps, numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present application unless it is specifically stated otherwise. Meanwhile, it should be understood that the sizes of the respective parts shown in the drawings are not drawn in actual scale for convenience of description. Techniques, methods, and apparatus known to one of ordinary skill in the relevant art may not be discussed in detail, but should be considered part of the specification where appropriate. In all examples shown and discussed herein, any specific values should be construed as merely illustrative, and not a limitation. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further discussion thereof is necessary in subsequent figures.

In the description of the present application, it should be understood that, where azimuth terms such as "front, rear, upper, lower, left, right", "transverse, vertical, horizontal", and "top, bottom", etc., indicate azimuth or positional relationships generally based on those shown in the drawings, only for convenience of description and simplification of the description, these azimuth terms do not indicate and imply that the apparatus or elements referred to must have a specific azimuth or be constructed and operated in a specific azimuth, and thus should not be construed as limiting the scope of protection of the present application; the orientation word "inner and outer" refers to inner and outer relative to the contour of the respective component itself.

Spatially relative terms, such as "above … …," "above … …," "upper surface at … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial location relative to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "above" or "over" other devices or structures would then be oriented "below" or "beneath" the other devices or structures. Thus, the exemplary term "above … …" may include both orientations of "above … …" and "below … …". The device may also be positioned in other different ways (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

In addition, the terms "first", "second", etc. are used to define the components, and are merely for convenience of distinguishing the corresponding components, and unless otherwise stated, the terms have no special meaning, and thus should not be construed as limiting the scope of the present application.

The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. An air bearing table, comprising:

the device comprises a guide structure (10), a moving structure (20) and a plurality of horizontal air floatation assemblies (30), wherein at least part of the guide structure (10) extends along a first direction, and the first direction is a horizontal direction; the guide structure (10) is arranged in the moving structure (20) in a penetrating manner, and the moving structure (20) can move relative to the guide structure (10) along the first direction; the plurality of horizontal air floatation assemblies (30) are respectively arranged on the horizontal two sides of the guide structure (10) along the first direction, a plurality of air floatation guide surfaces are formed on the horizontal two sides of the guide structure (10), and air outlet parts of air floatation pads (31) of the horizontal air floatation assemblies (30) are all arranged towards the air floatation guide surfaces;

the horizontal air floatation assembly (30) further comprises a swinging component (32), one end of the swinging component (32) is connected with the moving structure (20), and the other end of the swinging component (32) is connected with the air floatation pad (31); the swing part (32) comprises a connecting structure (321) which at least partially extends along a preset direction, one end of the swing part (32) is connected with the other end of the swing part (32) through the connecting structure (321), the swing part (32) can swing around the connecting structure (321) mutually, the swing part (32) has rigidity around the vertical direction, and the rigidity around the vertical direction of the swing part (32) is smaller than the rigidity of an air film generated by the air cushion (31).

2. An air bearing table according to claim 1, wherein the connection structure (321) comprises at least two connection portions extending in a predetermined direction;

the extending directions of the at least two connecting portions and the first direction are arranged at a preset angle on a vertical plane, and the at least two connecting portions are arranged in a mirror symmetry mode with the first direction as a center.

3. An air bearing table according to claim 2, wherein the swinging member (32) extends in a direction perpendicular to the air bearing guide surface, at least two of the connection portions comprising:

a first connection portion (3211), wherein an extending direction of the first connection portion (3211) and the first direction form a first preset angle on a vertical plane;

and a second connection portion (3212), wherein the second connection portion (3212) and the first connection portion (3211) are arranged in mirror symmetry with respect to the first direction as a center, and the second connection portion (3212) and the first connection portion (3211) are arranged at intervals along the extending direction of the swinging member (32).

4. An air bearing table according to claim 3, wherein the first predetermined angle is α,10 ° or more α or less 45 °.

5. An air bearing table according to claim 3, characterized in that the swinging member (32) comprises a first mounting end (322) and a second mounting end (323), the first mounting end (322) and the second mounting end (323) being connected with the moving structure (20) and an air bearing pad (31), respectively;

wherein, swing part (32) still includes first intermediate structure (324), first intermediate structure (324) set up first intermediate structure (322) with between second installation end (323), first intermediate structure (324) with first installation end (322) and second installation end (323) all interval setting, first connecting portion (3211) set up first intermediate structure (324) with between first installation end (322), and connect first intermediate structure (324) with first installation end (322), second connecting portion (3212) set up first intermediate structure (324) with between second installation end (323), and connect first intermediate structure (324) with second installation end (323).

6. An air bearing table according to claim 3, wherein,

the connecting structure (321) further comprises a third connecting portion (3213), the third connecting portion (3213) is respectively arranged with the first connecting portion (3211) and the second connecting portion (3212) at intervals along the extending direction of the swinging component (32), and the extending direction of the third connecting portion (3213) is parallel to or coincides with the first direction.

7. An air bearing table according to claim 6, wherein the swinging member (32) comprises:

a first mounting end (322) and a second mounting end (323), wherein the first mounting end (322) and the second mounting end (323) are respectively connected with the moving structure (20) and the air floatation pad (31);

the swinging component (32) further comprises a first middle structure (324) and a second middle structure (325), wherein a first installation end (322), the first middle structure (324), the second middle structure (325) and the second installation end (323) are sequentially arranged at intervals along the extending direction of the swinging component (32), the first middle structure (324) and the second middle structure (325), the first installation end (322) and the first middle structure (324), the second installation end (323) and the second middle structure (325) are respectively provided with a first connection portion (3211), a third connection portion (3213) and a second connection portion (3212).

8. The air bearing table according to claim 1, further comprising a support table (40), the guiding structure (10) being erected on the support table (40), the bottom of the moving structure (20) being arranged on a table top (41) of the support table (40), the moving structure (20) further comprising:

the vertical air floatation assembly (21) is arranged at the bottom of the moving structure (20), and an air outlet part of the vertical air floatation assembly (21) is arranged towards a table top (41) of the supporting table (40).

9. An air bearing table according to claim 1, wherein the horizontal air bearing assembly (30) further comprises a mounting structure (33), the swinging member (32) being connected to at least part of the moving structure (20) by the mounting structure (33), the mounting structure (33) having a stiffness in each direction that is greater than the stiffness of the swinging member (32).

10. The air bearing table according to claim 9, wherein,

the mounting structure (33) is provided with a containing groove (331), the containing groove (331) is matched with the size of at least part of the swinging component (32), and at least part of the swinging component (32) is fixedly mounted in the containing groove (331);

the mounting structure (33) further comprises a locking channel (332) and a locking piece (333), the locking channel (332) penetrates through the mounting structure (33) and is connected with the accommodating groove (331), and the locking piece (333) is arranged in the locking channel (332) and is fixedly connected with the swinging component (32) at least partially at the accommodating groove (331).

11. An air bearing table according to claim 9, characterized in that the moving structure (20) comprises a fixed structure (22) and a moving seat (23), the moving seat (23) being erected on at least part of the guiding structure (10), the fixed structure (22) being arranged on a side wall of the moving seat (23), the fixed structure (22) having a fixed channel, the direction of extension of the fixed channel being perpendicular to the direction of extension of the air bearing guide surface;

the installation structure (33) is arranged in the fixed channel in a penetrating mode in a position adjustable mode along the extending direction of the fixed channel, and the distance between the air outlet part of the air floatation pad (31) and the air floatation guide surface is changed and adjusted by adjusting the position of the installation structure (33) in the fixed channel.

12. An air bearing table according to any one of claims 1 to 11, wherein the guide structure (10) has oppositely disposed first (11) and second (12) guide surfaces; the number of the horizontal air floatation assemblies (30) is four, two horizontal air floatation assemblies (30) in the four horizontal air floatation assemblies (30) are arranged corresponding to the first guide surface (11), and the other two air floatation tables in the four horizontal air floatation assemblies (30) are arranged corresponding to the second guide surface (12).