CN115654022A - Air floatation platform - Google Patents

Abstract

The invention provides a heavy-load air floating platform, and relates to the technical field of precision motion platforms. Wherein, this air supporting platform includes base and displacement mechanism, and displacement mechanism includes guide rail and air supporting slip table, and the guide rail setting is on the base, and on the guide rail was located to air supporting slip table slip cap, and be equipped with the second aperture flow controller on a pair of curb plate of air supporting slip table, a pair of curb plate all offered the second venthole of second aperture flow controller on the side of guide rail, and a pair of curb plate still has all offered bar recess, recess and second venthole intercommunication on the side of guide rail. The groove communicated with the second air outlet hole is formed in the surface of the side plate, so that the area of the air film is increased, and the load capacity of the platform is improved.

Description

Air floatation platform

Technical Field

The invention relates to the technical field of precision motion platforms, in particular to a heavy-load air floating platform.

Background

In the electronic product manufacturing industry, the size of products is smaller and smaller, and the precision requirement of the products is higher and higher. Therefore, for the development of advanced electronic manufacturing equipment, a high-precision and high-stability motion platform is of decisive significance.

Traditional mechanical guide rail mainly comprises track and slider two parts, is equipped with the ball in the slider as the rolling element, and what the motion process relied on is rolling friction of rolling element between guide rail and slider, consequently makes equipment easily appear generating heat and wearing and tearing in the use, and easily produces hysteresis, and then influences positioning accuracy. Different from the traditional mechanical guide rail, the air-floating positioning platform adopts the air-floating supporting technology, avoids the contact between moving parts, not only fully meets the use requirements of users on high geometric precision, high positioning precision and high stability, but also reduces the energy consumption of the platform in the use process.

In the existing air-floating platform, an air-floating hole adopts a small-hole throttling structure, the small-hole throttling structure has large gas diffusion loss, the area of a formed gas film is small, the load capacity is poor, and the self-excitation phenomenon of an air hammer is easy to occur.

Disclosure of Invention

In order to solve the technical problems, the invention provides the air floating platform, and the grooves communicated with the second air outlet holes are formed in the surfaces of the side plates, so that the area of an air film is increased, and the load capacity of the platform is improved. The technical scheme is as follows:

the invention particularly provides an air floating platform which comprises a base and a displacement mechanism, wherein the displacement mechanism comprises a guide rail and an air floating sliding table, the guide rail is arranged on the base, the air floating sliding table is sleeved on the guide rail in a sliding mode, a pair of side plates of the air floating sliding table are provided with second small-hole throttles, the side surfaces, facing the guide rail, of the pair of side plates are provided with second air outlet holes of the second small-hole throttles, the side surfaces, facing the guide rail, of the pair of side plates are also provided with strip-shaped grooves, and the grooves are communicated with the second air outlet holes.

Further, the width and the depth of the groove are smaller than the radius of the second air outlet hole, and the length of the groove is larger than the diameter of the second air outlet hole.

Further, the axial cross-sectional shape of the groove is a minor arc.

Furthermore, the second venthole is provided with a plurality of, and is a plurality of the recess communicates a plurality of respectively in the second venthole, the recess is followed the air supporting slip table direction of motion sets up to a plurality of parallel rows.

Furthermore, a plurality of grooves in each row are respectively communicated to form a plurality of parallel long grooves with the same number as the rows.

Furthermore, the air floatation sliding table also comprises a bottom plate, and the pair of side plates are respectively connected to two ends of the bottom plate; the bottom plate is provided with a first small hole restrictor, and the surface of the bottom plate facing the base is provided with a first air outlet of the first small hole restrictor; the bottom plate is provided with an air exhaust hole, and the surface of the bottom plate facing the base is provided with an air inlet communicated with the air exhaust hole; a plurality of the first air outlet is evenly arranged at the outer side of the plurality of the air inlet holes.

Further, the air supporting slip table still including slide set up in the roof of guide rail top surface, the both ends of roof are fixed connection two respectively the curb plate, the roof the curb plate with the bottom plate fixed connection in proper order, and jointly slide cup joint in on the guide rail.

Furthermore, elastic blocks are arranged at two end parts of the guide rail and are positioned on the motion path of the air floatation sliding table; or the two end faces of the air floatation sliding table are fixedly connected with the elastic block, the two end parts of the guide rail are fixedly connected with the baffle plate, and the baffle plate is positioned on the motion path of the elastic block.

Further, the displacement mechanisms are arranged into two groups, namely a first direction displacement mechanism and a second direction displacement mechanism, the first direction displacement mechanism is arranged on the base, and the second direction displacement mechanism is fixedly connected to the top plate of the first direction displacement mechanism.

Further, the base is marble or granite.

The invention has the beneficial effects that:

firstly, the invention provides an air floating platform, a section of groove is arranged to be matched with a small hole throttler, the groove shares part of depressurization to gas, on one hand, the occurrence of self-excitation of an air hammer is reduced, on the other hand, the gas pressure is convenient to increase, and therefore the air floating platform can obtain higher bearing capacity and rigidity.

Secondly, on one hand, compared with the small-hole throttling hole, the groove is narrow in width and long in length, so that the loss of gas caused by diffusion flow is greatly reduced; on the other hand, the groove also increases the air supply area, so that the area of a bearing air film formed between the air floating sliding table and the guide rail is larger and more stable, and the bearing capacity and the rigidity of the air floating platform are improved.

Finally, the groove and the small hole restrictor are used in a matched mode, so that the machining precision and the machining size of the small hole restrictor and the groove can be properly widened, the machining difficulty and the manufacturing cost of the small hole restrictor and the groove are reduced, and the blocking risk of the small hole restrictor and the groove is also reduced.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments of the present invention will be briefly described below.

FIG. 1 is a schematic diagram of the displacement mechanism in one embodiment;

FIG. 2 is a top view of FIG. 1;

FIG. 3 is a front view of FIG. 1;

FIG. 4 is a schematic view of a side panel in one embodiment;

FIG. 5 is a front view of FIG. 4;

FIG. 6 is a schematic diagram of the structure of the base plate in one embodiment;

fig. 7 is a schematic view of the overall structure of one embodiment.

The same reference numbers will be used throughout the drawings to refer to identical or similar parts or elements.

1. A base; 2. a displacement mechanism; 21. a first direction displacement mechanism; 22. a second direction displacement mechanism; 3. an air floatation sliding table; 31. a side plate; 311. a second air outlet; 312. a groove; 313. a second air pipe joint; 32. a base plate; 321. an air inlet; 322. an air exhaust hole; 323. a first air outlet hole; 324. a first gas pipe joint; 33. a top plate; 4. a guide rail.

Detailed Description

To make the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention will be described in detail with reference to the accompanying drawings. Examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar parts throughout the several views or parts having the same or similar functions. The embodiments described below with reference to the drawings are illustrative only and should not be construed as limiting the invention.

In the description herein, the appearances of the phrases "embodiment one," "this embodiment," "in one embodiment," and the like in this specification are not necessarily all referring to the same embodiment or example. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example; furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

In the description of the present specification, the terms "connected," "mounted," "fixed," "disposed," "having," and the like are used in a broad sense, and for example, "connected" may be a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.

In the description of the present specification, relational terms such as "first" and "second", and the like, may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrases "comprising one of 8230; \8230;" 8230; "does not exclude the presence of additional like elements in a process, method, article, or apparatus that comprises the element.

In one embodiment, as shown in fig. 1, 4 and 7, an air floating platform comprises a base 1 and a displacement mechanism 2, wherein the displacement mechanism 2 comprises a guide rail 4 and an air floating sliding table 3. The guide rail 4 sets up on base 1, and air supporting slip table 3 slip cap is located on guide rail 4, and is equipped with the second aperture flow controller on a pair of curb plate 31 of air supporting slip table 3, and a pair of curb plate 31 all sets up the second venthole 311 of second aperture flow controller on the side towards guide rail 4. The side surfaces of the pair of side plates 31 facing the guide rail 4 are also provided with strip-shaped grooves 312, and the grooves 312 are communicated with the second air outlet holes 311.

The displacement mechanism 2 further comprises a linear driving component, and the linear driving component drives the air floatation sliding table 3 to slide. The air-floating sliding table 3 generates vertical supporting force through air floating action, and realizes non-contact sliding on the guide rail 4 under the driving of the linear driving piece. The groove 312 and the second air outlet 311 are matched with each other to share air pressure together, and throttling is performed twice, so that a more stable air film with a larger area is formed between the air-floating sliding table 3 and the guide rail 4, and the bearing capacity and the rigidity of the air-floating platform are improved. Wherein, guide rail 4 is the marble material, and air supporting slip table 3 is 7075 aluminum alloy material, and in other embodiments, guide rail 4 and air supporting slip table 3 also can set up to other materials according to the actual demand.

In the above embodiment, as shown in fig. 4 and 5, the left and right end surfaces of the side plate 31 are provided with the second air pipe joints 313, the side surface of the side plate 31 close to the guide rail 4 is provided with the second air outlet holes 311 of the second small-hole throttling device, and the air outlet direction of the second air outlet holes 311 faces the side wall of the guide rail 4. The side plate 31 has a second air passage formed therein, and the second air pipe joint 313 is communicated with the second air passage. The second air flow channel is communicated with a second small hole restrictor which is connected with a second air outlet 311. After the air source is connected to the second air pipe joint 313, the air flow can be introduced into the second air flow channel, and the air flow can be stably provided for the second small hole restrictor and the side plate 31 through the second small hole restrictor and the second air outlet hole 311. So that an air film can be formed between the side plate 31 and the guide rail 4 to realize non-contact sliding.

In one embodiment, as shown in fig. 4, the second airflow channel is communicated with a plurality of second small-hole throttles, and a plurality of second air outlets 311 of the plurality of second small-hole throttles can provide an air film with a larger pressure, so that non-contact sliding is realized, the bearing capacity of the air-floating sliding table 3 is further improved, and the occurrence of locking phenomenon is avoided. In one embodiment, the number of the second outlet holes 311 is eight, four second outlet holes 311 are arranged in a row, and the eight second outlet holes 311 are arranged in parallel and opposite to each other with the same distance therebetween. Thereby the air film that forms between air supporting slip table 3 and guide rail 4 is more even for the slip of air supporting slip table 3 is more steady.

In one embodiment, as shown in fig. 5, eight sections of grooves 312 are formed corresponding to the eight second air outlet holes 311, and the grooves 312 are formed along the moving direction of the air slide table 3. The eight sections of grooves 312 are correspondingly divided into two rows, the two rows of grooves 312 are arranged in parallel, and each row of grooves 312 are respectively positioned on the same straight line. Further, the width and depth of the groove 312 are smaller than the radius of the second outlet hole 311, and the length of the groove 312 is larger than the diameter of the second outlet hole 311. Due to the existence of high-pressure gas, the orifice restrictor is easy to generate air hammer vibration, the design of the groove 312 can share the pressure of part of the gas, the occurrence of the self-excitation phenomenon of the air hammer is reduced, the pressure is further increased conveniently, and the bearing capacity of the air floating platform is improved. The gas flowing out from the second gas outlet 311 of the small-hole restrictor generally diffuses and has a large loss, and other gas outlets such as square and round gas outlets greatly cause the loss of the gas, so that the bearing capacity of the air floatation platform is reduced, while the groove 312 has a narrow width and a long length, so that the gas flowing through the groove 312 has viscosity, the diffusion flow of the gas is small, and the gas loss is also reduced. Meanwhile, the slender groove 312 is matched with the second air outlet hole 311, so that the air supply area is increased, the air floating sliding table 3 and the guide rail 4 are formed, and the bearing capacity and the rigidity of the air floating platform are further improved.

In one embodiment, the axial cross section of the groove 312 may be configured in any shape, which can achieve the effects of sharing the air pressure and increasing the air supply area. Preferably, the axial cross section of the groove 312 is provided as an arc, and the arc surface facilitates the flow of the gas, thereby reducing the loss of the gas. More preferably, the axial cross section of the groove 312 is configured as a minor arc, two tangent lines at the end of the minor arc intersect at the convex side of the arc, and the other ends of the two tangent lines do not intersect. That is, the air flow is introduced into the groove 312 and is dispersed towards two sides along two sides of the groove 312, so that the air supply area is further increased, the air pressure is reduced, the occurrence of air hammer is reduced, and the rigidity of the air floating platform is increased.

In one embodiment, the four sections of grooves 312 in each row are respectively communicated to form two long grooves, so that the gas viscosity is further enhanced, the diffusion and flow of the gas are further reduced, the gas loss is reduced, the air pressure strength is improved, and the bearing capacity and the rigidity of the air floating platform are also significantly improved.

In one embodiment, as shown in fig. 1 to 3, the air slide table 3 further includes a bottom plate 32, the bottom plate 32 is slidably connected to the bottom surface of the guide rail 4, the side plates 31 are slidably connected to two side surfaces of the guide rail 4, and the two side plates 31 are fixedly connected to two sides of the bottom plate 32. Other parts can be connected to the upper end faces of the two side plates 31, so that the other parts can be driven to move with high precision and high stability.

Specifically, as shown in fig. 6, a first small-hole restrictor is arranged on the bottom plate 32, a first air outlet 323 of the first small-hole restrictor is arranged at the bottom of the bottom plate 32, the first air outlet 323 is communicated with an air source, and the air source provides air flow for the first air outlet 323, so that an air film is formed between the bottom surface of the bottom plate 32 and the base 1, a vertical supporting force is provided for the air-float sliding table 3, and non-contact sliding is realized. Specifically, four corners of the lower surface of the bottom plate 32 are respectively provided with a first air outlet 323, four side walls of the bottom plate 32 are provided with first air pipe joints 324, a first air flow passage is formed inside the bottom plate 32, the first air pipe joints 324 are communicated with the first air outlet 323 through the first air flow passage, and after an air source is connected to the first air pipe joints 324, the air flow can be introduced into the first air flow passage, and can be stably supplied to the first small hole restrictor through the first small hole restrictor and the first air outlet 323, and the air flow can be stably supplied to the bottom plate 32. Thereby forming an air film between the bottom plate 32 and the base 1, providing a vertical supporting force for the air-float sliding table 3, and realizing non-contact sliding.

In one embodiment, as shown in fig. 6, the bottom plate 32 has a suction hole 322 on a side surface thereof, an air inlet 321 on a bottom surface thereof, and a third air flow channel inside the bottom plate 32. The intake hole 321 and the suction hole 322 communicate with each other through a third air flow path. The air suction device is connected to the suction hole 322, and air can be sucked from the air inlet hole 321 through the third air flow channel, so that negative pressure is formed between the bottom plate 32 and the base 1, the negative pressure can provide a preload amount, an attractive force is provided between the bottom plate 32 and the base 1, namely, a constant preload force in the vertical direction is provided between the bottom plate 32 and the base 1, the air floatation sliding table 3 can be stably positioned on the guide rail 4, and is still in a gapless state when the air floatation platform is stressed in work, and the rigidity and the precision of the air floatation platform are further improved.

In other embodiments, the plurality of air inlet holes 321 are arranged in two parallel rows perpendicular to the moving direction of the air slide table 3, and each row is 4, so that the air inlet holes 321 perpendicular to the moving direction of the air slide table 3 can better resist instability caused by the movement of the air slide table 3, and thus the constant preload force between the bottom plate 32 and the base 1 in the perpendicular direction is more stable.

In other embodiments, the plurality of first air outlet holes 323 are uniformly formed outside the plurality of air inlet holes 321, and this structure enables the bottom plate 32 to form an air film between the base 1 and the bottom plate with a larger area, thereby ensuring that the air-floating sliding platform 3 receives a stable vertical supporting force and realizes non-contact sliding. Meanwhile, the air inlet holes 321 in the middle of the bottom plate 32 form an air inlet area to form negative pressure, so that the rigidity and the precision of the air floating platform are further improved. The inner and outer structures of the first air outlet 323 and the air inlet 321 ensure that the air-float sliding table 3 can stably and precisely slide on the guide rail 4 without contact.

In one embodiment, as shown in fig. 1-3, the air slide 3 further comprises a top plate 33, and the top plate 33 is slidably connected to the top surface of the guide rail 4. Roof 33 both ends are fixed connection curb plate 31 respectively, and the type structure that returns that roof 33, two curb plates 31 and bottom plate 32 enclose slides and cup joints on guide rail 4, and the wholeness is stronger, and the structure is more stable. The top plate 33 is provided with a through vent hole, so that air blown out from the pair of side plates 31 can be smoothly discharged, the top plate 33 can move under the driving of the side plates 31 and the bottom plate 32, and the influence of extra positive/negative pressure generated between the top plate 33 and the guide rail on the stable sliding of the guide rail 4 is avoided. The top surface of the top plate 33 can be connected with other components, and the connecting surface is larger relative to the end surface of the side plate 31, so that the other components can be driven to move more stably.

In one embodiment, a pair of parallel guide rails 4 are oppositely arranged above the base 1, and the guide rails 4 are used for matching the side plates 31 to form the air bearing films. In other embodiments, the guide rail 4 may be formed by forming a groove on the base 1, so that the combination of the guide rail 4 and the base 1 can be more stable to adapt to the high-load and high-speed moving load.

In one embodiment, the linear drive assembly includes a linear motor. The stator and the grating ruler of the linear motor are both arranged on the base 1 and are positioned between the pair of guide rails 4, and the rotor and the reading head of the linear motor are both arranged at the bottom of the top plate 33. The ruler pasting strip of the grating ruler is made of marble. The active cell of linear electric motor can drive air supporting slip table 3 and follow guide rail 4 round trip movement in the stroke, and reading head and grating chi can directly obtain the displacement, realize accurate control. The stator and the grating ruler of the linear motor are installed on the base 1, so that the fixing is firm, and the space utilization rate is high.

In another embodiment, the displacement mechanisms 2 are provided in two sets, the first direction displacement mechanism 21 and the second direction displacement mechanism 22, respectively. The first direction displacement mechanism 21 is fixedly connected to the base 1, and the second direction displacement mechanism 22 is fixedly connected to the top plate 33 of the first direction displacement mechanism 21, so as to complete the transmission of the motion in the first direction to the top plate 33 in the second direction, so that the top plate 33 in the second direction has the motion function with two degrees of freedom in the first direction and the second direction. The top plate 33 of the second directional displacement mechanism 22 is used to connect other components, so that the other components can be displaced along the first direction and the second direction by the first directional displacement mechanism 21 and the second directional displacement mechanism 22. The guide rail 4, the air slide table 3, and the linear drive assembly in the foregoing embodiment may be applied to the first-direction displacement mechanism 21 and the second-direction displacement mechanism 22 in the present embodiment.

In one embodiment, the displacement mechanism 2 comprises collision prevention parts which are fixed at both ends of the guide rail 4, and the collision prevention blocks are located on the moving path of the air slide 3. The anti-collision component is used for limiting the forming range of the air floatation sliding table 3 and plays a role in limiting and preventing collision. In this case, the impact prevention member may be an elastic block such as rubber. In other embodiments, two end faces of the air-floating sliding table 3 are fixedly connected with an elastic block, two end faces of the guide rail 4 are fixedly connected with a baffle, and the baffle is located on a movement path of the elastic block. At this time, the elastic member is an elastic block and a baffle.

In one embodiment, the base 1 is made of marble or granite. The marble platform as the base 1 supports the whole air floating platform, the cost is lower, and the hardness of the marble is enough. The granite texture is hard and dense, acid and alkali resistance, and is firm and strong, and when the air floatation platform is applied to a corrosive environment, the granite is more suitable to be used as the base 1 of the air floatation platform.

The foregoing description of the embodiments is provided to enable one of ordinary skill in the art to understand and apply the techniques herein, and it is to be understood that various modifications may be readily made to the embodiments, and that the general principles defined herein may be applied to other embodiments without the use of inventive faculty. Therefore, the present disclosure is not limited to the above embodiments, and modifications to the following cases should be included within the scope of the present disclosure: (1) the technical effect of the new technical scheme is not beyond the technical effect of the invention; (2) equivalent replacement of part of the characteristics of the technical scheme of the invention by adopting the known technology produces the same technical effect as the technical effect of the invention; (3) the technical scheme of the invention is used as a basis for expansion, and the essential contents of the expanded technical scheme do not exceed the technical scheme of the invention; (4) the equivalent transformation made by the contents of the specification and the attached drawings of the invention can be directly or indirectly applied to other related technical fields.

Claims (10)

1. An air-floating platform, which comprises a base and a displacement mechanism, wherein the displacement mechanism comprises a guide rail and an air-floating sliding table, the guide rail is arranged on the base, the air-floating sliding table is sleeved on the guide rail in a sliding manner, a pair of side plates of the air-floating sliding table are provided with second small-hole throttlers, and the side surfaces of the pair of side plates facing the guide rail are both provided with second air outlets of the second small-hole throttlers,

and the side surfaces of the side plates facing the guide rail are provided with strip-shaped grooves, and the grooves are communicated with the second air outlet holes.

2. The air bearing platform of claim 1, wherein the groove has a width and a depth that are less than a radius of the second air outlet aperture, and wherein the length of the groove is greater than a diameter of the second air outlet aperture.

3. The air bearing platform as claimed in claim 2, wherein the grooves have a minor arc in axial cross-sectional shape.

4. The air-floating platform as claimed in claim 3, wherein a plurality of second air outlet holes are provided, a plurality of grooves are respectively communicated with one of the second air outlet holes, and the grooves are arranged in a plurality of parallel rows along the moving direction of the air-floating sliding table.

5. The air bearing platform as claimed in claim 4, wherein the plurality of grooves in each row are interconnected to form a plurality of parallel elongated grooves having the same number of rows.

6. The air-bearing platform as claimed in any one of claims 1 to 5,

the air floatation sliding table further comprises a bottom plate, and the pair of side plates are connected to two ends of the bottom plate respectively;

the bottom plate is provided with a first small hole restrictor, and the surface of the bottom plate facing the base is provided with a first air outlet of the first small hole restrictor;

the bottom plate is provided with an air exhaust hole, and the surface of the bottom plate facing the base is provided with an air inlet communicated with the air exhaust hole;

the first air outlet holes are uniformly formed in the outer sides of the air inlet holes.

7. The air-floating platform as claimed in claim 6, wherein the air-floating sliding table further comprises a top plate slidably disposed on the top surface of the guide rail, two ends of the top plate are respectively and fixedly connected to the two side plates, and the top plate, the side plates and the bottom plate are sequentially and fixedly connected to each other and jointly slidably sleeved on the guide rail.

8. The air-floating platform as claimed in claim 7, wherein the two ends of the guide rail are provided with elastic blocks, and the elastic blocks are located on the motion path of the air-floating sliding table; or the two end faces of the air floatation sliding table are fixedly connected with the elastic block, the two end parts of the guide rail are fixedly connected with the baffle plate, and the baffle plate is positioned on the motion path of the elastic block.

9. The air bearing platform of claim 7, wherein the displacement mechanisms are provided in two sets, a first directional displacement mechanism and a second directional displacement mechanism, the first directional displacement mechanism being provided on the base and the second directional displacement mechanism being fixedly attached to the top plate of the first directional displacement mechanism.

10. The air floating platform as in any one of claims 1-5 and 7-9, wherein said base is of marble or granite material.

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