CN116806367A - 脱模膜 - Google Patents

脱模膜 Download PDF

Info

Publication number: CN116806367A
Authority: CN; China
Prior art keywords: release film; release; layer; resin; film
Prior art date: 2021-01-14
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

CN202180090710.6A

Other languages

English (en)

Chinese (zh)

Inventor

前岨晋一

冈田润

佐藤基

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Sumitomo Bakelite Co Ltd

Original Assignee

Sumitomo Bakelite Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2021-01-14

Filing date

2021-12-13

Publication date

2023-09-26

2021-12-13 Application filed by Sumitomo Bakelite Co Ltd filed Critical Sumitomo Bakelite Co Ltd

2021-12-13 Priority claimed from PCT/JP2021/045778 external-priority patent/WO2022153756A1/ja

2023-09-26 Publication of CN116806367A publication Critical patent/CN116806367A/zh

Status Pending legal-status Critical Current

Links

239000000463 material Substances 0.000 claims abstract description 134
229920005989 resin Polymers 0.000 claims abstract description 93
239000011347 resin Substances 0.000 claims abstract description 93
239000003822 epoxy resin Substances 0.000 claims abstract description 72
229920000647 polyepoxide Polymers 0.000 claims abstract description 72
229920000877 Melamine resin Polymers 0.000 claims abstract description 22
229920001225 polyester resin Polymers 0.000 claims abstract description 18
239000004645 polyester resin Substances 0.000 claims abstract description 18
229920005672 polyolefin resin Polymers 0.000 claims abstract description 18
229920006122 polyamide resin Polymers 0.000 claims abstract description 16
229920002050 silicone resin Polymers 0.000 claims abstract description 16
229920001568 phenolic resin Polymers 0.000 claims abstract description 9
YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims abstract description 6
239000011737 fluorine Substances 0.000 claims abstract description 6
229910052731 fluorine Inorganic materials 0.000 claims abstract description 6
239000005007 epoxy-phenolic resin Substances 0.000 claims abstract description 3
238000000034 method Methods 0.000 claims description 58
230000008859 change Effects 0.000 claims description 47
238000000465 moulding Methods 0.000 claims description 41
239000004065 semiconductor Substances 0.000 claims description 36
230000003746 surface roughness Effects 0.000 claims description 33
238000005259 measurement Methods 0.000 claims description 30
238000004458 analytical method Methods 0.000 claims description 18
239000004925 Acrylic resin Substances 0.000 claims description 11
229920000178 Acrylic resin Polymers 0.000 claims description 11
238000012360 testing method Methods 0.000 claims description 10
238000003860 storage Methods 0.000 claims description 7
239000004640 Melamine resin Substances 0.000 claims description 6
230000000630 rising effect Effects 0.000 claims description 5
230000008569 process Effects 0.000 claims description 4
KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 claims description 3
101150116295 CAT2 gene Proteins 0.000 claims description 2
101100326920 Caenorhabditis elegans ctl-1 gene Proteins 0.000 claims description 2
101100126846 Neurospora crassa (strain ATCC 24698 / 74-OR23-1A / CBS 708.71 / DSM 1257 / FGSC 987) katG gene Proteins 0.000 claims description 2
LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 abstract description 42
239000010408 film Substances 0.000 description 446
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FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 18
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125000003118 aryl group Chemical group 0.000 description 16
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BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 12
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238000002474 experimental method Methods 0.000 description 10
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125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 9
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DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 8
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238000005160 1H NMR spectroscopy Methods 0.000 description 6
QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 6
HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 6
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239000003086 colorant Substances 0.000 description 6
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239000004205 dimethyl polysiloxane Substances 0.000 description 6
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KBJFYLLAMSZSOG-UHFFFAOYSA-N n-(3-trimethoxysilylpropyl)aniline Chemical compound CO[Si](OC)(OC)CCCNC1=CC=CC=C1 KBJFYLLAMSZSOG-UHFFFAOYSA-N 0.000 description 6
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238000004611 spectroscopical analysis Methods 0.000 description 6
RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 5
UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 5
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238000004049 embossing Methods 0.000 description 5
239000007789 gas Substances 0.000 description 5
239000007788 liquid Substances 0.000 description 5
JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical compound NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 description 5
HMMGMWAXVFQUOA-UHFFFAOYSA-N octamethylcyclotetrasiloxane Chemical compound C[Si]1(C)O[Si](C)(C)O[Si](C)(C)O[Si](C)(C)O1 HMMGMWAXVFQUOA-UHFFFAOYSA-N 0.000 description 5
238000006116 polymerization reaction Methods 0.000 description 5
125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 4
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CDXFIRXEAJABAZ-UHFFFAOYSA-N 3,3,4,4,5,5,6,6,7,7,8,8,8-tridecafluorooctyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F CDXFIRXEAJABAZ-UHFFFAOYSA-N 0.000 description 3
QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
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WLGDAKIJYPIYLR-UHFFFAOYSA-N octane-1-sulfonic acid Chemical compound CCCCCCCCS(O)(=O)=O WLGDAKIJYPIYLR-UHFFFAOYSA-N 0.000 description 1
125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
125000001117 oleyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])/C([H])=C([H])\C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
235000005985 organic acids Nutrition 0.000 description 1
239000011368 organic material Substances 0.000 description 1
239000011146 organic particle Substances 0.000 description 1
239000011242 organic-inorganic particle Substances 0.000 description 1
235000006408 oxalic acid Nutrition 0.000 description 1
JMANVNJQNLATNU-UHFFFAOYSA-N oxalonitrile Chemical compound N#CC#N JMANVNJQNLATNU-UHFFFAOYSA-N 0.000 description 1
TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 1
125000000951 phenoxy group Chemical group [H]C1=C([H])C([H])=C(O*)C([H])=C1[H] 0.000 description 1
125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 description 1
150000004714 phosphonium salts Chemical class 0.000 description 1
229910052698 phosphorus Inorganic materials 0.000 description 1
239000011574 phosphorus Substances 0.000 description 1
230000000704 physical effect Effects 0.000 description 1
229920001084 poly(chloroprene) Polymers 0.000 description 1
229920002857 polybutadiene Polymers 0.000 description 1
229920001083 polybutene Polymers 0.000 description 1
125000003367 polycyclic group Chemical group 0.000 description 1
229920013716 polyethylene resin Polymers 0.000 description 1
229920001195 polyisoprene Polymers 0.000 description 1
229920000098 polyolefin Polymers 0.000 description 1
229920005990 polystyrene resin Polymers 0.000 description 1
238000003825 pressing Methods 0.000 description 1
238000007639 printing Methods 0.000 description 1
230000005855 radiation Effects 0.000 description 1
239000002683 reaction inhibitor Substances 0.000 description 1
238000005096 rolling process Methods 0.000 description 1
150000004760 silicates Chemical class 0.000 description 1
235000012239 silicon dioxide Nutrition 0.000 description 1
HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
235000010339 sodium tetraborate Nutrition 0.000 description 1
VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
LSNNMFCWUKXFEE-UHFFFAOYSA-L sulfite Chemical class [O-]S([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-L 0.000 description 1
150000003462 sulfoxides Chemical class 0.000 description 1
150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
239000000454 talc Substances 0.000 description 1
229910052623 talc Inorganic materials 0.000 description 1
238000009864 tensile test Methods 0.000 description 1
BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
238000001721 transfer moulding Methods 0.000 description 1
VLCLHFYFMCKBRP-UHFFFAOYSA-N tricalcium;diborate Chemical compound [Ca+2].[Ca+2].[Ca+2].[O-]B([O-])[O-].[O-]B([O-])[O-] VLCLHFYFMCKBRP-UHFFFAOYSA-N 0.000 description 1
ITMCEJHCFYSIIV-UHFFFAOYSA-N triflic acid Chemical compound OS(=O)(=O)C(F)(F)F ITMCEJHCFYSIIV-UHFFFAOYSA-N 0.000 description 1
BSVBQGMMJUBVOD-UHFFFAOYSA-N trisodium borate Chemical compound [Na+].[Na+].[Na+].[O-]B([O-])[O-] BSVBQGMMJUBVOD-UHFFFAOYSA-N 0.000 description 1
BIKXLKXABVUSMH-UHFFFAOYSA-N trizinc;diborate Chemical compound [Zn+2].[Zn+2].[Zn+2].[O-]B([O-])[O-].[O-]B([O-])[O-] BIKXLKXABVUSMH-UHFFFAOYSA-N 0.000 description 1
125000006839 xylylene group Chemical group 0.000 description 1
239000004711 α-olefin Substances 0.000 description 1

Landscapes

Laminated Bodies (AREA)
Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Moulds For Moulding Plastics Or The Like (AREA)

CN202180090710.6A 2021-01-14 2021-12-13 脱模膜 Pending CN116806367A (zh)

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JP2021-004017		2021-01-14
JP2021-004041		2021-01-14
JP2021090120A JP2022182520A (ja)	2021-05-28	2021-05-28	離型フィルム
JP2021-090120		2021-05-28
PCT/JP2021/045778 WO2022153756A1 (ja)	2021-01-14	2021-12-13	離型フィルム

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