CN116679128A - Impedance detection circuit and method of radio frequency power supply - Google Patents
Impedance detection circuit and method of radio frequency power supply Download PDFInfo
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- CN116679128A CN116679128A CN202310817161.9A CN202310817161A CN116679128A CN 116679128 A CN116679128 A CN 116679128A CN 202310817161 A CN202310817161 A CN 202310817161A CN 116679128 A CN116679128 A CN 116679128A
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- 238000001514 detection method Methods 0.000 title claims abstract description 21
- 238000000034 method Methods 0.000 title claims abstract description 18
- 238000005259 measurement Methods 0.000 claims abstract description 37
- 238000006243 chemical reaction Methods 0.000 claims abstract description 16
- 230000008878 coupling Effects 0.000 claims abstract description 14
- 238000010168 coupling process Methods 0.000 claims abstract description 14
- 238000005859 coupling reaction Methods 0.000 claims abstract description 14
- 238000002955 isolation Methods 0.000 claims abstract description 12
- 230000003321 amplification Effects 0.000 claims description 7
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 7
- 238000012544 monitoring process Methods 0.000 abstract description 2
- 239000003990 capacitor Substances 0.000 description 60
- 210000002381 plasma Anatomy 0.000 description 13
- 238000010586 diagram Methods 0.000 description 10
- 238000001914 filtration Methods 0.000 description 3
- 239000008358 core component Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/08—Measuring resistance by measuring both voltage and current
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/40—Testing power supplies
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02D—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN INFORMATION AND COMMUNICATION TECHNOLOGIES [ICT], I.E. INFORMATION AND COMMUNICATION TECHNOLOGIES AIMING AT THE REDUCTION OF THEIR OWN ENERGY USE
- Y02D30/00—Reducing energy consumption in communication networks
- Y02D30/70—Reducing energy consumption in communication networks in wireless communication networks
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Abstract
The invention discloses an impedance detection circuit and method of a radio frequency power supply, wherein the input end of a directional coupler in the circuit is connected with the output end of the radio frequency power supply, the output end of the directional coupler is connected with an impedance matcher, the output end of the impedance matcher is connected with a plasma load, and the coupling end and the isolation end of the directional coupler are respectively coupled with vector voltage signals; the first voltage measurement module is connected with the coupling end of the directional coupler; the second voltage measurement module is connected with the isolation end of the directional coupler; the analog-to-digital conversion module is connected with the first voltage measurement module and the second voltage measurement module; the processor is connected with the analog-to-digital conversion module, and analyzes and processes the converted first and second voltage digital signals to determine load impedance, radio frequency power supply output power and load power. The invention has simpler circuit structure and cost advantage, realizes the real-time monitoring of the plasma load change, and provides effective technical support for realizing more complex processes.
Description
Technical Field
The invention relates to the technical field of radio frequency, in particular to an impedance detection circuit and method of a radio frequency power supply.
Background
The RF power supply is a core component of the plasma processing and is a core device for igniting and maintaining the plasma discharge. With the gradual increase of the circuit integration level, a controllable high-precision radio frequency power supply is required to generate plasmas in different forms to meet the process requirements, and as the impedance of the plasmas is continuously changed, an impedance automatic matching device is required to be added to match the impedance of load changes with the radio frequency output impedance in order to enable the output power of the radio frequency power supply to be input into a plasma generator to the greatest extent, and some complex plasma processing processes have high requirements on the matching precision and speed, so that the load changes are required to be tracked in real time, and the output signals of the radio frequency power supply are required to be acquired rapidly and accurately to provide necessary data for impedance matching.
At present, two methods are mainly used for measuring the output signal of the radio frequency power supply, one is to measure the output power of the power supply by using a directional coupler as a sensor, but the existing method does not provide a method for measuring the load impedance, and the application scene requirement for detecting and analyzing the load change in real time cannot be met. The other is to collect the incident voltage wave signal and the reflected voltage wave signal coupled by the directional coupler, and to add and subtract the two signals on the circuit to obtain the change condition of the voltage and the current of the load, to realize the detection of the voltage and the current, so as to calculate the plasma load according to the real-time current and the voltage data.
Disclosure of Invention
In view of the above problems, an impedance detection circuit and an impedance detection method for a radio frequency power supply are provided, wherein the impedance detection method is used for calculating the load impedance according to the S parameter of a four-port directional coupler and two paths of coupling voltages, and the method can be used for rapidly and accurately calculating the load impedance so as to achieve the purpose of tracking the load change in real time. The embodiment of the invention is also provided so as to provide a simple and efficient impedance detection circuit.
The invention discloses a radio frequency power supply impedance detection circuit which is used for being connected with a radio frequency power supply.
The signal acquisition circuit includes: the device comprises a directional coupler, a first voltage measurement module, a second voltage measurement module and an analog-to-digital conversion module.
The input end of the directional coupler is connected with the output end of the radio frequency power supply, the output end of the directional coupler is connected with the input end of the impedance matcher, the output end of the impedance matcher is connected with the plasma load, and the coupling end and the isolation end of the directional coupler are respectively coupled with vector voltage signals.
The input end of the first voltage measurement module is connected with the coupling end of the directional coupler and is used for collecting a first vector voltage signal output by the coupling end.
The input end of the second voltage measurement module is connected with the isolation end of the directional coupler and is used for collecting second vector voltage signals output by the isolation end.
The input end of the analog-to-digital conversion module is connected with the output end of the first voltage measurement module and the output end of the second voltage measurement module, and the two groups of differential voltage analog signals, namely the first vector voltage signal and the second vector voltage signal, are respectively converted into a first voltage digital signal and a second voltage digital signal.
The input end of the processor is connected with the output end of the analog-to-digital conversion module, and the processor is used for analyzing and processing the converted first voltage digital signal and second voltage digital signal to determine the ion body load impedance, the radio frequency power supply output power and the load power.
The first voltage measuring module and the second voltage measuring module are identical in circuit structure and are collectively referred to as voltage measuring modules hereinafter.
The voltage measurement module includes: the circuit comprises a first low-pass filter circuit, a single-ended to differential circuit, a differential amplifying circuit and a second low-pass filter circuit.
The first low-pass filter circuit comprises a first low-pass filter and a first pi-type attenuator which are connected in series, and the first low-pass filter is used for carrying out filtering treatment on signals coupled out by the directional coupler; the first n-type attenuator is used for carrying out 20dB attenuation and impedance matching treatment on the signal.
The input end of the single-ended-to-differential circuit is connected with the output end of the first low-pass filter circuit and used for converting the front-stage single-ended voltage signal into a differential signal.
The input end of the differential amplifying circuit is connected with the output end of the single-ended differential circuit and is used for amplifying differential signals.
The input end of the second low-pass filter circuit is connected with the output end of the differential amplification circuit and is used for carrying out filter processing on the differential amplification signal.
The invention also discloses an impedance detection method of the radio frequency power supply, which comprises the following steps:
step 1, acquiring two groups of differential voltage analog signals of a radio frequency power supply through a directional coupler, a first voltage measurement module and a second voltage measurement module in a signal acquisition circuit.
And 2, an analog-to-digital conversion module in the signal acquisition circuit converts the two groups of differential voltage analog signals into two groups of corresponding voltage digital signals and provides the two groups of corresponding voltage digital signals for the processor.
And step 3, the processor combines the S parameter, the vector voltage data and the impedance matching network parameter of the frequency point of the output signal of the radio frequency power supply to calculate the impedance value of the plasma load, the output power of the radio frequency power supply and the receiving power of the load.
The invention has the following advantages:
the invention forms an impedance detection circuit of the radio frequency power supply through the directional coupler, the voltage measurement module, the analog-to-digital conversion module and the processor; compared with the method for calculating the voltage and the current of the load end by detecting the incident voltage wave signal and the reflected voltage wave signal coupled by the directional coupler so as to obtain the load impedance, the circuit structure is simpler, has no strict requirement on the directivity of the directional coupler, and has the advantage in cost; the impedance detection method provided by the invention can rapidly and accurately obtain the load impedance, the output power of the radio frequency power supply and the load receiving power, realizes the real-time monitoring of the load change of the plasma, and provides effective technical support for realizing more complex processes.
Drawings
FIG. 1 is a block diagram of a radio frequency power supply impedance detection circuit of an example of the invention;
FIG. 2 is a block diagram of a voltage measurement module according to an example of the invention;
FIG. 3 is a circuit diagram of a first low pass filter in an example of the invention;
fig. 4 is a circuit diagram of a first pi-type attenuator in an example of the present invention;
FIG. 5 is a circuit diagram of a single ended differential circuit in an example of the invention;
fig. 6 is a circuit diagram of a differential amplifying circuit in an example of the invention;
FIG. 7 is a circuit diagram of a second low pass filter in an example of the invention;
fig. 8 is a diagram of a four port directional coupler network port according to an example of the present invention.
Detailed Description
In order that the above-recited objects, features and advantages of the present invention will become more readily apparent, a more particular description of the invention will be rendered by reference to the appended drawings and appended detailed description.
Referring to fig. 1, a block diagram of a radio frequency power supply impedance detection circuit according to an embodiment of the invention is shown. The radio frequency power supply signal acquisition circuit is used for being connected with a radio frequency power supply and comprises a radio frequency power supply signal acquisition circuit, a processor, an impedance matcher and a plasma load.
The radio frequency power supply signal acquisition circuit comprises: the device comprises a directional coupler, a first voltage measurement module, a second voltage measurement module and an analog-to-digital conversion module.
The directional coupler is connected with the radio frequency power supply output end and the impedance matcher input end and is used for collecting radio frequency power supply output signals and outputting two paths of vector voltage signals at the coupling end and the isolation end of the directional coupler.
The input end of the first voltage measurement module is connected with the coupling end of the directional coupler and is used for collecting a first vector voltage signal output by the coupling end.
The input end of the second voltage measurement module is connected with the isolation end of the directional coupler and is used for collecting second vector voltage signals output by the isolation end.
The input end of the analog-to-digital conversion module is connected with the output end of the first voltage measurement module and the output end of the second voltage measurement module, and is used for converting analog voltage signals obtained by the two voltage measurement modules into digital voltage signals.
The input end of the processor is connected with the output end of the analog-to-digital conversion module and is used for processing the digital voltage signal and calculating the impedance of the plasma load, the output power of the radio frequency power supply and the load receiving power according to the impedance detection method.
The first voltage measuring module and the second voltage measuring module are identical in circuit structure, and the structure can be represented by fig. 2, and the structure is collectively referred to as a voltage measuring module.
The voltage measurement module includes: the device comprises a first low-pass filter circuit, a first pi-shaped attenuation circuit, a single-ended rotary differential circuit, a differential amplifying circuit and a second low-pass filter circuit.
The first low-pass filter circuit comprises a first low-pass filter and a first pi-shaped attenuation circuit which are connected in series, and the first low-pass filter is connected with the directional coupler as shown in fig. 3 and is used for filtering an input voltage signal.
The first pi-type attenuation circuit is shown in fig. 4, is connected with the first low-pass filter, is used for performing 20dB attenuation processing on the front-stage signal, and plays a role in impedance matching.
The single-ended to differential circuit is shown in fig. 5, and is connected to the first pi-type attenuation circuit, and is configured to convert the front-stage single-ended voltage signal into a differential signal.
The differential amplifying circuit is connected with the single-ended-to-differential circuit as shown in fig. 6, and is used for amplifying differential signals.
The second low-pass filter circuit is connected with the differential amplifying circuit as shown in fig. 7, and is used for filtering the differential amplifying signal.
A method for detecting impedance of a radio frequency power supply for a circuit as claimed in any one of claims 1 to 4, comprising the steps of:
step 1, acquiring two groups of differential voltage analog signals of a radio frequency power supply through a directional coupler, a first voltage measurement module and a second voltage measurement module in a signal acquisition circuit.
And 2, an analog-to-digital conversion module in the signal acquisition circuit converts the two groups of differential voltage analog signals into two groups of corresponding voltage digital signals and provides the two groups of corresponding voltage digital signals for the processor.
And step 3, the processor combines the S parameter, the vector voltage data and the impedance matching network parameter of the frequency point of the output signal of the radio frequency power supply to calculate the impedance value of the plasma load, the output power of the radio frequency power supply and the receiving power of the load.
Fig. 3-7 are schematic diagrams of the circuits of the various sub-modules in the voltage measuring module, and in order to more clearly illustrate the circuit principle of the voltage measuring module, the circuit of the voltage measuring module will be described by way of example with reference to fig. 3-7.
The first low-pass filter circuit comprises a first low-pass filter and a first n-type attenuator, and the first low-pass filter comprises a capacitor C1, a capacitor C2, a capacitor C3, an inductor L1 and an inductor L2; the directional coupler is characterized in that the coupling voltage output end of the directional coupler is connected with one end of a capacitor C1 and one end of an inductor L1, the other end of the capacitor C1 is grounded, the other end of the inductor L1 is connected with one end of a capacitor C2 and one end of an inductor L2, the other end of the capacitor C2 is grounded, the other end of the inductor L2 is connected with one end of a capacitor C3, and the other end of the capacitor C3 is grounded. The first low-pass filter is connected with the first pi-shaped attenuator, the first pi-shaped attenuator circuit plays roles of 20dB attenuation and impedance matching, the first pi-shaped attenuator circuit comprises a resistor R1, a resistor R2, a resistor R3, a resistor R4, a resistor R5 and a resistor R6, one ends of the resistor R1, the resistor R2, the resistor R3 and the resistor R4 are connected together, the other ends of the resistor R1, the resistor R2, the resistor R3 and the resistor R4 are grounded to form a parallel circuit, one non-grounded end of the parallel circuit is connected with one end of the resistor R5, the other end of the resistor R5 is connected with one end of the resistor R6 and the single-ended-to-differential circuit of the next stage, and the other end of the resistor R6 is grounded.
The single-ended differential circuit comprises a capacitor C4, a resistor R7, a resistor R8 and a resistor R9, wherein a transformer T1, a resistor R10, a resistor R11, a resistor R12, a resistor R13, a resistor R14, a resistor R15, a resistor R16, a capacitor C5 and a capacitor C6; one end of the capacitor C4 is connected with the first low-pass filter circuit of the front stage, the other end of the capacitor C is connected with one ends of the resistor R7 and the resistor R8, the other end of the resistor R7 is grounded, the other end of the resistor R8 is connected with one end of the resistor R9, and the other end of the resistor R9 is grounded; one end of the resistor R10 is grounded, the No. 1 pin of the transformer T1 is connected with one non-grounded end of the resistor R9 and the resistor R10, the No. 3 pin of the transformer T1 is connected with one end of the resistor R11 and one end of the resistor R12, the other ends of the resistor R11 and the resistor R12 are grounded, the No. 4 pin of the transformer T1 is connected with one end of the capacitor C6, the No. 6 pin of the transformer T1 is connected with one end of the capacitor C5, the No. 5 pin of the transformer T1 is connected with one end of the resistor R13, the other end of the resistor R13 is grounded, the other end of the capacitor C5 is connected with one end of the resistor R14, the other end of the capacitor C6 is connected with one end of the resistor R15, the other end of the resistor R15 is connected with one end of the resistor R16, and the other end of the resistor R16 is grounded.
The differential amplification module comprises a differential amplifier chip U1, a resistor R17, a resistor R18, a resistor R19, a resistor R20, a resistor R21, a resistor R22, a capacitor C16, a capacitor C17, a capacitor C7 and a capacitor C8; one end of a resistor R17 is connected with one end of a C5 in the front-stage circuit, the other end of the resistor R17 is connected with a No. 6 pin of the chip U1 and one end of a resistor R19 and a capacitor C7, the other ends of the resistor R19 and the capacitor C7 are connected with a No. 7 pin of the chip U1 and one end of a resistor R21, one end of the resistor R18 is connected with a No. 2 pin of the chip U1 and one end of a resistor R20 and one end of a capacitor C8, the other ends of the resistor R20 and the capacitor C8 are connected with a No. 1 pin of the chip U1 and one end of a resistor R22, a No. 3 pin, a No. 4 pin and a No. 9 pin of the chip U1 are connected with a driving power supply, a No. 5 pin of the chip U1 is connected with a capacitor C16, a capacitor C17 and a common mode voltage port of an analog-to-digital conversion chip, and the other ends of the capacitor C16 and the capacitor C17 are grounded, and the No. 8 pin, the No. 10 pin and No. 11 pin of the chip U1 are grounded.
The second low-pass filter circuit comprises a capacitor C9, a capacitor C10, a capacitor C11, a capacitor C12, a capacitor C13, a capacitor C14, a capacitor C15, a capacitor C18, an inductor L3, an inductor L4, an inductor L5, an inductor L6, a resistor R23 and a resistor R24, wherein one end of the capacitor C9 is connected with one end of a resistor R21 in the front-stage differential amplification module circuit and one end of the capacitor C10 and one end of the inductor L3, the other end of the capacitor C9 is connected with one end of a resistor R22 in the front-stage circuit and one end of the capacitor C11 and one end of the inductor L4, the other end of the capacitor C10 and the inductor L3 are connected with one end of the capacitor C12, the other end of the capacitor C13 and one end of the inductor L5 are connected with the other end of the capacitor C12 and one end of the capacitor C14 and one end of the inductor L6, one end of the other end of the capacitor C13 and one end of the capacitor C15 and one end of the resistor R23 are connected as signal output ends, the other end of the capacitor C14 and the other end of the capacitor R24 and one end of the capacitor C24 are connected with one end of the capacitor C18 and the other end of the capacitor C23 and the other end of the capacitor C18 as differential signal output ends of the differential signal, and the other end of the differential signal is connected with the other end of the capacitor and the capacitor C18 and the other end of the capacitor is connected to the other end of the capacitor and the capacitor is connected to ground.
The voltage measuring module is suitable for the first voltage measuring module and the second voltage measuring module, and the amplification gain in the differential amplifying circuit can be properly adjusted to achieve the optimal measuring effect due to certain difference between the amplitude ranges of the two paths of voltages.
To better illustrate the impedance detection method, the following is a calculation formula of the method:
the processor pre-stores S parameter data of the qualitative coupler at a specific frequency point of the radio frequency power supply, and sets an S parameter matrix of the directional coupler as follows:
the four-port directional coupler end is shown in fig. 8, wherein a 1 、a 2 、a 3 、a 4 Normalized incident waves of four ports, b 1 、b 2 、b 3 、b 4 Normalization of four ports respectivelyReflecting wave, normalized impedance is Z 0 . The port 1 of the directional coupler is connected with the output end of the radio frequency power supply, and the port 2 is connected with the load Z L Port 3 and port 4 are connected to the rf power signal measurement circuit.
Vector voltages of the coupling end and the isolation end of the directional coupler obtained by the radio frequency power supply signal measuring circuit are V respectively 3 And V 4 . Then it can be derived from b 3 And b 4 The values of (2) are:
the values of the normalized incident wave and the normalized reflected wave of the directional coupler port 2 can be calculated by combining the pre-stored S-parameter data and the measured two vector voltage values, thereby obtaining the load impedance Z L The reflection coefficient of (2) is:
from the reflection coefficient Γ L And characteristic impedance Z 0 The input impedance Z of the impedance matcher can be obtained in The method comprises the following steps:
depending on the configuration of the various impedance matchers and the specific device parameters, the impedance matcher may be configured by Z in Calculating to obtain the load impedance Z L 。
In addition, the load power P can be calculated according to the normalized reflected wave and the incident wave of the port 1 and the port 2 of the directional coupler L And RF power supply output power P out ：
Claims (5)
1. The impedance detection circuit of the radio frequency power supply is characterized by comprising a signal acquisition circuit, a processor, an impedance matcher and a plasma load;
the signal acquisition circuit includes: the device comprises a directional coupler, a first voltage measurement module, a second voltage measurement module and an analog-to-digital conversion module;
the input end of the directional coupler is connected with the output end of the radio frequency power supply, the output end of the directional coupler is connected with the input end of the impedance matcher, the output end of the impedance matcher is connected with the plasma load, and the coupling end and the isolation end of the directional coupler are respectively coupled with vector voltage signals;
the input end of the first voltage measurement module is connected with the coupling end of the directional coupler, and a first vector voltage signal output by the coupling end is collected;
the input end of the second voltage measurement module is connected with the isolation end of the directional coupler, and a second vector voltage signal output by the isolation end is collected;
the input end of the analog-to-digital conversion module is connected with the output end of the first voltage measurement module and the output end of the second voltage measurement module, and two groups of differential voltage analog signals, namely a first vector voltage signal and a second vector voltage signal, are respectively converted into a first voltage digital signal and a second voltage digital signal;
the input end of the processor is connected with the output end of the analog-to-digital conversion module, and the converted first voltage digital signal and second voltage digital signal are analyzed and processed to determine the ion body load impedance, the radio frequency power supply output power and the load power.
2. The impedance detection circuit of a radio frequency power supply of claim 1, wherein the first voltage measurement module comprises: the device comprises a first low-pass filter circuit, a single-ended to differential circuit, a differential amplifying circuit and a second low-pass filter circuit;
the input end of the single-ended rotary differential circuit is connected with the output end of the first low-pass filter circuit, and the front-stage single-ended voltage signal is converted into a differential signal;
the input end of the differential amplifying circuit is connected with the output end of the single-ended differential circuit, and differential signals are amplified;
the input end of the second low-pass filter circuit is connected with the output end of the differential amplification circuit, and the differential amplification signal is subjected to filter processing.
3. The impedance detection circuit of a radio frequency power supply according to claim 2, wherein the first low-pass filter circuit comprises a first low-pass filter and a first pi-type attenuator connected in series, the first low-pass filter filters the signal coupled out of the directional coupler, and the first pi-type attenuator attenuates and impedance matches the signal by 20 dB.
4. The impedance detection circuit of a radio frequency power supply of claim 3, wherein the first voltage measurement module and the second voltage measurement module are identical in circuit configuration.
5. A method for detecting impedance of a radio frequency power supply for a circuit as claimed in any one of claims 1 to 4, comprising the steps of:
step 1, acquiring two groups of differential voltage analog signals of a radio frequency power supply through a directional coupler, a first voltage measurement module and a second voltage measurement module in a signal acquisition circuit;
step 2, an analog-to-digital conversion module in the signal acquisition circuit converts two groups of differential voltage analog signals into two groups of corresponding voltage digital signals and provides the two groups of corresponding voltage digital signals for a processor;
and step 3, the processor combines the S parameter, the vector voltage data and the impedance matching network parameter of the frequency point of the output signal of the radio frequency power supply to calculate the impedance value of the plasma load, the output power of the radio frequency power supply and the receiving power of the load.
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| CN202310817161.9A CN116679128A (en) | 2023-07-04 | 2023-07-04 | Impedance detection circuit and method of radio frequency power supply |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117330799A (en) * | 2023-11-28 | 2024-01-02 | 深圳市鼎阳科技股份有限公司 | Impedance matching circuit, differential probe and oscilloscope |
| CN117353260A (en) * | 2023-11-02 | 2024-01-05 | 深圳市恒运昌真空技术有限公司 | Energy overshoot suppression circuit based on balanced power amplifier and control method thereof |
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2023
- 2023-07-04 CN CN202310817161.9A patent/CN116679128A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117353260A (en) * | 2023-11-02 | 2024-01-05 | 深圳市恒运昌真空技术有限公司 | Energy overshoot suppression circuit based on balanced power amplifier and control method thereof |
| CN117330799A (en) * | 2023-11-28 | 2024-01-02 | 深圳市鼎阳科技股份有限公司 | Impedance matching circuit, differential probe and oscilloscope |
| CN117330799B (en) * | 2023-11-28 | 2024-03-01 | 深圳市鼎阳科技股份有限公司 | Impedance matching circuit, differential probe and oscilloscope |
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