CN116676673B - Crystal growth device - Google Patents
Crystal growth device Download PDFInfo
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- CN116676673B CN116676673B CN202310966514.1A CN202310966514A CN116676673B CN 116676673 B CN116676673 B CN 116676673B CN 202310966514 A CN202310966514 A CN 202310966514A CN 116676673 B CN116676673 B CN 116676673B
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- 239000013078 crystal Substances 0.000 title claims abstract description 80
- 239000011229 interlayer Substances 0.000 claims abstract description 41
- 238000001816 cooling Methods 0.000 claims abstract description 36
- 230000007246 mechanism Effects 0.000 claims abstract description 36
- 238000004321 preservation Methods 0.000 claims description 11
- 229910000831 Steel Inorganic materials 0.000 claims description 6
- 239000010959 steel Substances 0.000 claims description 6
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 230000033001 locomotion Effects 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 53
- 238000007789 sealing Methods 0.000 description 15
- 238000003466 welding Methods 0.000 description 12
- 230000003028 elevating effect Effects 0.000 description 8
- 230000001276 controlling effect Effects 0.000 description 6
- 238000009413 insulation Methods 0.000 description 6
- 239000000498 cooling water Substances 0.000 description 5
- 239000010410 layer Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 230000009347 mechanical transmission Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The application relates to a crystal growth device, which relates to the technical field of devices used for crystal growth, and comprises a crystal furnace and a lifting mechanism, wherein the lifting mechanism can drive the crystal furnace to lift, the crystal furnace comprises a first furnace body, a second furnace body, a furnace cover and a bottom furnace door, the furnace cover is positioned above the first furnace body and connected with the first furnace body, the second furnace body is positioned below the first furnace body and connected with the first furnace body, the bottom furnace door is positioned below the second furnace body and connected with the second furnace body, a first water-cooling interlayer is arranged on the first furnace body, a second water-cooling interlayer is arranged on the second furnace body, a third water-cooling interlayer is arranged on the furnace cover, and a fourth water-cooling interlayer is arranged on the bottom furnace door. The application can control the temperature of the water-cooling interlayer in a layering way so as to ensure the temperature gradient in the crystal furnace.
Description
Technical Field
The application relates to the technical field of devices for crystal growth, in particular to a crystal growth device.
Background
In a crystal growing apparatus, a crystal furnace is often required, in order to provide a favorable environment for crystal growth, the crystal furnace is often provided with a temperature gradient in the height direction, a temperature field component is installed in the crystal furnace, a crucible is installed in the temperature field component, the crucible is a container required for crystal growth, the crucible is fixed in the crystal furnace through a crucible shaft, and when the size of crystals grown in the crucible is larger, for example, the crystal diameter is larger than 200mm, a crystal furnace with a larger size is required.
For the crystal furnace with the crystal diameter larger than 200mm growing inside, the crystal furnace generally comprises a furnace cover and a furnace body with a sealed lower end, the furnace cover is in sealing connection with the furnace body at the opening end of the furnace body, the furnace cover and the furnace body are generally detachably connected, the furnace body is generally cylindrical in appearance and is formed by welding and splicing a plurality of plates, the welding positions of the furnace body are more, the welding seam is generally longer, the furnace body generally comprises a water cooling interlayer, a water inlet pipe and a water outlet pipe for cooling water, and the temperature in the furnace body can be regulated by regulating and controlling the temperature of the water cooling interlayer.
Aiming at the related technology, as the water inlet pipe and the water outlet pipe in the water-cooling interlayer are generally distributed at different height positions and the height difference between the water inlet pipe and the water outlet pipe is large, the condition of uneven temperature distribution of cooling water in the water-cooling interlayer is easy to cause, the temperature of the water-cooling interlayer at different depth positions is difficult to control, and the problem that the temperature gradient in the crystal furnace is not beneficial to ensuring exists.
Disclosure of Invention
The application aims to provide a crystal growth device which can control the temperature of a water-cooling interlayer in a layering manner so as to ensure the temperature gradient in a crystal furnace.
The crystal growth device provided by the application adopts the following technical scheme:
the crystal growing device comprises a crystal furnace and a lifting mechanism, wherein the lifting mechanism can drive the crystal furnace to lift, the crystal furnace comprises a first furnace body, a second furnace body, a furnace cover and a bottom furnace door, the furnace cover is positioned above the first furnace body and connected with the first furnace body, the second furnace body is positioned below the first furnace body and connected with the first furnace body, the bottom furnace door is positioned below the second furnace body and connected with the second furnace body, a first water-cooling interlayer is arranged on the first furnace body, a second water-cooling interlayer is arranged on the second furnace body, a third water-cooling interlayer is arranged on the furnace cover, and a fourth water-cooling interlayer is arranged on the bottom furnace door.
Through adopting above-mentioned technical scheme, can be through adding the cooling water or the coolant liquid of different temperatures respectively in the water-cooling intermediate layer that is located bell, first furnace body, second furnace body and bottom furnace gate and control the temperature of water-cooling intermediate layer of different high positions department to make the interior temperature gradient of crystal furnace, cut apart into four parts with great crystal furnace simultaneously and can reduce the manufacturing degree of difficulty, be convenient for utilize a monoblock material processing to be each part of crystal furnace, reduce the quantity of welding seam and solder joint, improve the structural strength of every part of crystal furnace, and the probability that the water-cooling intermediate layer takes place to block up also can be reduced to the shorter water-cooling intermediate layer.
Optionally, one end of the lifting mechanism is fixedly connected with the furnace cover and/or the first furnace body, and the lifting mechanism can drive the furnace cover and/or the first furnace body to lift.
Through adopting above-mentioned technical scheme, can drive bell and first furnace body through elevating system and go up and down, be convenient for steadily install bell and first furnace body, when needs wash crystal furnace, can utilize elevating system to hoist bell and first furnace body, reduce the washing degree of difficulty.
Optionally, elevating system includes a plurality of guide posts, fixedly connected with a plurality of first lantern rings on the bell lateral wall, fixedly connected with a plurality of second lantern rings on the lateral wall of first furnace body, first lantern ring with the second lantern ring of connecting all overlaps in outside the guide post and with the guide post can dismantle and be connected.
Through adopting above-mentioned technical scheme, direction stationarity when elevating system lifts or drops bell or first furnace body can be strengthened to the guide post, thereby avoid appearing rocking when lifting or drop bell or first furnace body and be unfavorable for the equipment of crystal furnace, simultaneously when extreme conditions such as disconnection between elevating system and bell or the first furnace body appear, owing to there is frictional resistance between first connection sleeve ring and the guide post and the frictional resistance between second connection sleeve ring and the guide post, can make bell or first furnace body slowly fall down, reduce the damage of bell or first furnace body self, also reduce the impact of whereabouts bell and first furnace body to second furnace body and bottom bell simultaneously.
Optionally, the elevating system still includes first driving piece, traction element and vice guide post, traction element one end with bell or first furnace body fixed connection, the other end with first driving piece is connected, it is connected with the fixed pulley to rotate on the vice guide post, traction element walk around the fixed pulley and with the fixed pulley lateral wall hugs closely.
Through adopting above-mentioned technical scheme, can provide the pulling force of bell or first furnace body through the traction element transmission, also can change the direction of pulling force through the traction element, be convenient for arrange first driving piece in suitable position, simultaneously through adopting the fixed pulley, can reduce the wearing and tearing of traction element in the motion process, improve the life of traction element.
Optionally, fixedly connected with goes up stopper and lower stopper on the auxiliary guide post, elevating system still includes first locating part, the traction element keep away from the one end of bell with the one end fixed connection of first locating part, the other end of first locating part with first driving piece is connected and can by first driving piece drive produces the displacement, first locating part can go up the stopper to down the region between the stopper goes up and down.
Through adopting above-mentioned technical scheme, can limit the displacement scope of bell or first furnace body of traction element other end through the displacement scope of restriction first locating part for the lift space of bell or first furnace body is in controllable scope, thereby avoid the bell or first furnace body to take place to collide with and cause the damage.
Optionally, the upper limiter and the lower limiter are both fixedly connected with an alarm, and the alarm can send out an alarm when the first limiter contacts the upper limiter or the lower limiter.
By adopting the technical scheme, an operator can be reminded that the furnace cover or the first furnace body reaches the upper limit or the lower limit.
Optionally, the crystal growth apparatus further includes a lifting mechanism, where the lifting mechanism is located below the bottom furnace door, and the lifting mechanism includes a second driving member and a lifting platform, where the second driving member is connected with the lifting platform.
Through adopting above-mentioned technical scheme, can control the lift of lift platform through lifting mechanism, install crystal growth's container and go into like crucible etc. on the lift platform, lift platform can drive the crucible and go up and down.
Optionally, the bottom furnace door is provided with a through hole penetrating through the bottom furnace door, and the through hole is communicated with the space in the furnace and the external space of the crystal furnace;
the lifting mechanism further comprises a heat preservation shell, one end of the heat preservation shell is arranged around the through hole and fixedly connected with the bottom furnace door, the other end of the heat preservation shell is fixedly connected with the lifting platform, and the heat preservation shell can stretch and retract along the movement direction of the lifting platform.
Through adopting above-mentioned technical scheme, can be through the inside component that needs to be driven the lift of through-hole installation in crystal furnace, like crucible etc. the heat preservation shell can reduce the quantity that the heat passes through the through-hole and dissipates, improves crystal furnace's heat preservation performance.
Optionally, the bottom surface of the bottom furnace door is fixedly connected with a plurality of guide rods, and the guide rods penetrate through the lifting platform.
Through adopting above-mentioned technical scheme, can play the effect of direction to lifting platform takes place to rock at the lift in-process, improves lifting platform motion's stationarity.
Optionally, a second limiting part is connected to the guide rod, the second limiting part can slide on the guide rod along the axial direction of the guide rod and can be fixed at any height position of the guide rod, and the second limiting part is located between the lifting platform and the bottom furnace door.
Through adopting above-mentioned technical scheme, the lifting height of lifting platform can be limited to the second locating part, and the second locating part can be through changing the upper limit position of lifting platform of self high position regulation.
In summary, the present application includes at least one of the following beneficial technical effects:
1. the crystal furnace is divided into four parts, namely a furnace cover, a first furnace body, a second furnace body and a bottom furnace door, and water-cooling interlayers are respectively arranged in the four mutually independent parts, so that the temperature gradient in the crystal furnace can be regulated and controlled by respectively controlling the temperatures of the water-cooling interlayers positioned at different height positions;
2. the lifting mode of the lifting mechanism and the guide post are adopted, so that the lifting of the furnace cover and the first furnace body is stable, the furnace cover or the first furnace body can be prevented from slowly falling down when extreme conditions such as disconnection and the like occur between the lifting mechanism and the furnace cover or the first furnace body, the damage of the furnace cover or the first furnace body is reduced, and the impact of the falling furnace cover and the first furnace body on the second furnace body and the bottom furnace cover is reduced;
3. the upper limiter and the lower limiter are fixedly arranged on the auxiliary guide column, the upper limiter and the lower limiter are matched with each other by the aid of the limiting pieces, the furnace cover or the first furnace body is connected with the limiting pieces through the traction pieces, and the lifting range of the limiting pieces is limited by the upper limiter and the lower limiter, so that the furnace cover and the first furnace body can only move in the position range limited by the upper limiter and the lower limiter.
Drawings
FIG. 1 is a schematic view showing the overall structure of embodiment 1 of the present application;
FIG. 2 is an enlarged schematic view of a portion A of FIG. 1;
FIG. 3 is a schematic overall structure of embodiment 1 of the present application;
FIG. 4 is a schematic cross-sectional view of embodiment 1 of the present application;
FIG. 5 is a partially enlarged schematic illustration of portion B of FIG. 4;
FIG. 6 is an enlarged schematic view of a portion C of FIG. 4;
FIG. 7 is a partially enlarged schematic illustration of portion D of FIG. 4;
FIG. 8 is a schematic cross-sectional view of the lifting mechanism in embodiment 1 of the present application;
fig. 9 is a schematic cross-sectional structure of the lifting mechanism in embodiment 2 of the present application.
In the figure, 1, a crystal furnace; 11. a first furnace body; 111. a first water-cooled interlayer; 112. a second connection collar; 113. a first ring groove; 114. a first seal ring; 115. a first water inlet pipe; 116. a first water outlet pipe; 12. a second furnace body; 121. a second water-cooling interlayer; 122. a second ring groove; 123. a second seal ring; 124. a second water inlet pipe; 125. a second water outlet pipe; 126. a vacuum tube; 13. a furnace cover; 131. a third water-cooling interlayer; 132. a first connection collar; 133. a third water inlet pipe; 134. a third water outlet pipe; 14. a bottom oven door; 141. a fourth water-cooling interlayer; 142. a through hole; 143. a guide rod; 144. a second limiting piece; 145. a third ring groove; 146. a third seal ring; 147. a fourth water inlet pipe; 148. a fourth water outlet pipe; 15. a mounting base; 151. a mounting hole; 16. locking; 161. a first lifting lug; 1611. a first groove; 162. the second lifting lug; 1621. a rotating shaft; 1622. a fastening bolt; 1623. a second groove; 17. an electromagnetic flow valve; 2. a lifting mechanism; 21. a guide post; 211. a second rotating shaft; 212. a guide wheel; 22. a first driving member; 221. a rotating wheel; 23. a traction member; 24. an auxiliary guide post; 241. a fixed pulley; 242. an upper stopper; 243. a lower stopper; 244. an alarm; 245. a first rotating shaft; 25. a first limiting member; 26. a wire rope; 3. a lifting mechanism; 31. a second driving member; 32. lifting the platform; 321. a stepped hole; 33. a thermal insulation shell; 34. a planar bearing; 35. a support frame; 351. a third driving member; 4. a crucible shaft; 5. and a crucible.
Detailed Description
The present application will be described in further detail with reference to fig. 1 to 9.
Example 1
Referring to fig. 1, the crystal growth device comprises a crystal furnace 1 and a lifting mechanism 2, wherein the lifting mechanism 2 can drive the crystal furnace 1 to lift, the crystal furnace 1 comprises a first furnace body 11, a second furnace body 12 and a furnace cover 13, the first furnace body 11 and the second furnace body 12 can be cylindrical barrels, the diameters of the outer side walls of the first furnace body 11 and the second furnace body 12 can be the same, the outer side wall of the furnace cover 13 can be cylindrical, the diameter of the outer side wall of the furnace cover 13 can be consistent with the diameter of the outer side wall of the first furnace body 11, the top end face of the second furnace body 12 is abutted with the bottom end face of the first furnace body 11, the furnace cover 13, the first furnace body 11 and the second furnace body 12 can be sequentially and coaxially stacked in the vertical direction, a mounting seat 15 is arranged below the second furnace body 12, the mounting seat 15 is of a hollow structure with an opening at the bottom, and the lower end face of the second furnace body 12 is fixedly connected with the top end face of the mounting seat 15 through welding.
Referring to fig. 1 and 2, the furnace cover 13 and the first furnace body 11 may be detachably connected through six latches 16 uniformly distributed along the circumferential direction at the joint of the furnace cover 13 and the first furnace body 11, each latch 16 includes a first lifting lug 161 and a second lifting lug 162, the first lifting lug 161 is fixed at the bottom area of the outer sidewall of the furnace cover 13 by welding, the second lifting lug 162 is fixed at the top area of the outer sidewall of the first furnace body 11 corresponding to the first lifting lug 161 by welding, the first lifting lug 161 and the second lifting lug 162 are installed in parallel, the bottom surface of the first lifting lug 161 is spaced 5-7mm from the top surface of the second lifting lug 162, a second groove 1623 is provided at one end of the second lifting lug 162 far away from the first furnace body 11, a rotating shaft 1621 is rotatably connected to the second lifting lug 162 by a hinge, the connecting end of the rotating shaft 1621 and the second lifting lug 162 is located in the second groove 1623, the lock catch 16 further comprises a fastening bolt 1622, the rotating shaft 1621 is matched with the fastening bolt 1622 through threaded connection, a first groove 1611 is formed in one side, far away from the first furnace body 11, of the first lifting lug 161, the outer diameter of the fastening bolt 1622 is smaller than the width of the first groove 1611, when the furnace cover 13 and the first furnace body 11 are required to be locked by the lock catch 16, the fastening bolt 1622 is connected with the rotating shaft 1621 through threads, the rotating shaft 1621 is rotated into the first groove 1611, the fastening bolt 1622 is screwed until the bottom surface of a nut of the fastening bolt 1622 is tightly attached to the top surface of the first lifting lug 161, the first furnace body 11 and the second furnace body 12 can be detachably connected through six lock catches 16 which are uniformly distributed along the circumferential direction and are positioned at the abutting positions of the first furnace body 11 and the second furnace body 12, and the connecting mode is the same as that of the furnace cover 13 and the first furnace body 11.
Referring to fig. 1 to 3, the lifting mechanism 2 includes a plurality of guide posts 21, the number of the guide posts 21 can be two, the two guide posts 21 can be respectively arranged at two sides of the crystal furnace 1 by taking a central shaft of the crystal furnace 1 as a symmetry axis and are fixed on the mounting seat 15 through welding, organic oil is uniformly smeared on the outer side wall of each guide post 21, a plurality of first connecting lantern rings 132 are fixedly connected to the outer side wall of the furnace cover 13 through welding, the number of the first connecting lantern rings 132 can be two, the two first connecting lantern rings 132 are symmetrically distributed at two sides of the furnace cover 13 by taking the central shaft of the furnace cover 13 as a symmetry axis, the two first connecting lantern rings 132 can be quickly detached and locked 16, a plurality of second connecting lantern rings 112 are fixedly connected to the outer side wall of the first furnace body 11 through welding, the number of the second connecting lantern rings 112 can be two, the central shaft of the first furnace body 11 is symmetrically distributed at two sides of the first furnace body 11, the two second connecting lantern rings 112 can be quickly locked and locked, the first connecting lantern rings 132 and the second connecting lantern rings 132 are fixedly connected to the first furnace body 112 and the first furnace body 13 and the second furnace body 112 by adjusting the positions of the corresponding first connecting lantern rings 112 and the first furnace body 13 and the second connecting lantern rings 112.
Referring to fig. 1 to 3, the elevating mechanism 2 further includes a first driving member 22, a traction member 23, an auxiliary guide post 24, and a first limiting member 25, the auxiliary guide post 24 may be vertically installed, the number of the auxiliary guide posts 24 may be two, the first limiting member 25 may be placed in parallel with the auxiliary guide post 24, the number of the first limiting member 25 may be two, the two auxiliary guide posts 24 may be respectively placed at both sides of the crystal furnace 1, a first rotating shaft 245 is welded at a top area of the auxiliary guide post 24, a central axis of the first rotating shaft 245 is horizontal, an outer side wall of the first rotating shaft 245 is rotatably connected with a fixed pulley 241 through a bearing, a top area of the guide post 21 is welded with a second rotating shaft 211, a central axis of the second rotating shaft 211 is horizontal, an outer side wall of the second rotating shaft 211 is rotatably connected with a guide wheel 212 through a bearing, both the fixed pulley 241 and the guide wheel 212 may be toothed discs, the first driving member 22 may be a motor, and the number of the first driving member 22 may be two, two first driving members 22 are respectively arranged at two sides of the crystal furnace 1, the output shaft of each first driving member 22 is fixedly connected with a rotating wheel 221 through a spline, the side wall of each rotating wheel 221 is fixedly connected with steel wire ropes 26 through bolts, each steel wire rope 26 can drive the rotating wheel 221 to rotate through the first driving member 22 so as to be wound on the side surface of the rotating wheel 221 or be released from the rotating wheel 221, the other end of each steel wire rope 26 is fixedly connected with one end of one first limiting member 25 through a bolt, the other end of each first limiting member 25 is fixedly connected with one end of one traction member 23 through a bolt, the number of the traction members 23 can be two and are respectively arranged on guide posts 21 at two sides of the crystal furnace 1, the chains can reduce vibration during mechanical transmission, the stability of mechanical transmission is improved, the traction pieces 23 on each side sequentially bypass the side surfaces of the fixed pulley 241 and the guide wheel 212 and are clung to the side walls of the fixed pulley 241 and the guide wheel 212, one end of one traction piece 23, which is far away from the first limiting piece 25, is fixedly connected with the furnace cover 13 through bolts, and one end of the other traction piece 23, which is far away from the first limiting piece 25, is fixedly connected with the first furnace body 11 through bolts.
Referring to fig. 1 to 3, an upper stopper 242 and a lower stopper 243 are fixedly welded to the outer sidewall of each sub-guide column 24 along the length direction of the sub-guide column 24, a first stopper 25 on one side is positioned between the upper stopper 242 and the lower stopper 243 on the same side, an alarm 244 is fixedly connected to each upper stopper 242 and each lower stopper 243 through bolts, and the alarm 244 can give an alarm when the first stopper 25 contacts the upper stopper 242 or the lower stopper 243.
Referring to fig. 4 and 5, a bottom furnace door 14 is installed in a mounting seat 15, the bottom furnace door 14 is fixedly connected with the mounting seat 15 through bolts on the inner top surface of the mounting seat 15, a first water-cooling interlayer 111 is arranged on a first furnace body 11, a third water-cooling interlayer 131 is arranged on a furnace cover 13, a first annular groove 113 is arranged on the end surface of the first furnace body 11, which is abutted to the furnace cover 13, a first sealing ring 114 is embedded in the first annular groove 113, and the height of the first sealing ring 114 is larger than the depth of the first annular groove 113.
Referring to fig. 4 and 6, a second water-cooling interlayer 121 is formed on the second furnace body 12, a second ring groove 122 is formed on an end surface of the second furnace body 12 abutting against the first furnace body 11, a second sealing ring 123 is embedded in the second ring groove 122, and the height of the second sealing ring 123 is greater than the depth of the second ring groove 122.
Referring to fig. 4 and 7, a fourth water cooling interlayer 141 is formed on the bottom door 14, a third ring groove 145 is formed on the end surface of the bottom door 14 abutting against the mounting seat 15, a third sealing ring 146 is embedded in the third ring groove 145, and the height of the third sealing ring 146 is greater than the depth of the third ring groove 145.
Referring to fig. 4, a first water inlet pipe 115 and a first water outlet pipe 116 are welded on a side wall of the first furnace body 11, the first water inlet pipe 115 and the first water outlet pipe 116 are respectively located at two sides of the first furnace body 11, the height position of the first water outlet pipe 116 is higher than that of the first water inlet pipe 115, and the first water inlet pipe 115 and the first water outlet pipe 116 are both communicated with the first water cooling interlayer 111 and an external space.
Referring to fig. 4, a second water inlet pipe 124 and a second water outlet pipe 125 are welded on the side wall of the second furnace body 12, the second water inlet pipe 124 and the second water outlet pipe 125 are respectively located at two sides of the second furnace body 12, the height position of the second water outlet pipe 125 is higher than that of the second water inlet pipe 124, the second water inlet pipe 124 and the second water outlet pipe 125 are both communicated with the second water cooling interlayer 121 and the external space, a vacuum pipe 126 is welded on the second furnace body 12, and the vacuum pipe 126 can be communicated with the internal space and the external space of the crystal furnace 1.
Referring to fig. 4, a third water inlet pipe 133 and a third water outlet pipe 134 are welded on the furnace cover 13, the third water inlet pipe 133 and the third water outlet pipe 134 are respectively positioned at two sides of the furnace cover 13, the third water outlet pipe 134 is positioned at the top surface of the furnace cover 13, the third water inlet pipe 133 is positioned at the side wall of the furnace cover 13, and the third water inlet pipe 133 and the third water outlet pipe 134 are both communicated with the third water-cooling interlayer 131 and the external space.
Referring to fig. 4, a fourth water inlet pipe 147 and a fourth water outlet pipe 148 are welded on the bottom oven door 14, the fourth water inlet pipe 147 and the fourth water outlet pipe 148 are respectively positioned at two sides of the bottom surface of the bottom oven door 14, and the fourth water inlet pipe 147 and the fourth water outlet pipe 148 are respectively communicated with the fourth water-cooling interlayer 141 and the external space.
Referring to fig. 4, the electromagnetic flow valves 17 are installed in the first water inlet pipe 115, the second water inlet pipe 124, the third water inlet pipe 133 and the fourth water inlet pipe 147, and the flow rate of the cooling water in the first water-cooled interlayer 111, the second water-cooled interlayer 121, the third water-cooled interlayer 131 and the fourth water-cooled interlayer 141 is controlled by adjusting the flow rate allowed to pass through the electromagnetic flow valves 17, so that the temperature of the cooling water in the first water-cooled interlayer 111, the second water-cooled interlayer 121, the third water-cooled interlayer 131 and the fourth water-cooled interlayer 141 is conveniently adjusted, and a temperature difference is facilitated.
Referring to fig. 8, the middle part of the top surface of the mounting seat 15 is provided with a mounting hole 151 penetrating through the mounting seat 15, the bottom furnace door 14 can block the mounting hole 151, the bottom furnace door 14 is provided with a through hole 142 penetrating through the bottom furnace door 14, the through hole 142 is coaxial with the mounting hole 151, the through hole 142 is communicated with the space in the furnace of the crystal furnace 1 and the external space, the crystal growth device further comprises a lifting mechanism 3, the lifting mechanism 3 is positioned below the bottom furnace door 14, the lifting mechanism 3 comprises a second driving piece 31, a lifting platform 32 and a heat insulation shell 33, the second driving piece 31 can be a screw motor, a sliding block of the second driving piece 31 is fixedly connected with the lifting platform 32 through welding, so that the second driving piece 31 can drive the lifting platform 32 to lift, one end of the heat insulation shell 33 is jointed with the bottom furnace door 14 through glue in the surrounding area of the through hole 142, the other end of the heat insulation shell 33 is jointed with the lifting platform 32 through the glue, the heat insulation shell 33 can stretch along the moving direction of the lifting platform 32, and the heat insulation shell 33 can adopt a corrugated pipe.
Referring to fig. 8, the bottom surface of the bottom oven door 14 is welded with a plurality of guide rods 143, the number of the guide rods 143 may be four, the guide rods 143 may be screws, each guide rod 143 penetrates through the lifting platform 32, and the lifting platform 32 can axially displace relative to the guide rods 143 along the axial direction of the guide rods 143. The crucible shaft 4 can sequentially pass through the through hole 142, the mounting hole 151 and the heat preservation shell 33, one end of the crucible shaft 4 is fixedly connected with the lifting platform 32 through welding, and the other end of the crucible shaft is positioned in the crystal furnace 1. Each guide rod 143 is connected with a second limiting member 144, the second limiting members 144 can slide on the guide rods 143 along the axial direction of the guide rods 143 and can be fixed at any height position of the guide rods 143, the second limiting members 144 are located between the lifting platform 32 and the bottom furnace door 14, the second limiting members 144 can be locknuts, and threads of the second limiting members 144 can be matched with threads of the screw rods.
The implementation principle of the embodiment of the application is as follows: when the furnace is charged, the first connecting sleeve ring 132 and the second connecting sleeve ring 112 are loosened, the first furnace body 11 and the furnace cover 13 are sequentially lowered by the lifting mechanism 2 and locked by the lock catch 16, the bottom furnace door 14 is lifted by the lifting mechanism 3 and fixed on the mounting seat 15 by bolts, and under the action of gravity, the first sealing ring 114, the second sealing ring 123 and the third sealing ring 146 are extruded and fill gaps among abutting surfaces where the first sealing ring 114, the second sealing ring 123 and the third sealing ring 146 are positioned, so that the sealing effect is realized; after the charging is completed, the position of the second limiting piece 144 is adjusted upwards, so that the bottom surface of the second limiting piece 144 is not abutted with the lifting platform 32 any more, the lifting platform 32 can drive the crucible shaft 4 to lift in the crystal furnace 1, and the upper limit position of the lifting platform 32 is the bottom surface position of the second limiting piece 144; during disassembly, the lock catch 16, the first connecting lantern ring 132 and the second connecting lantern ring 112 are disassembled firstly when negative pressure is generated in the crystal furnace 1, the first driving piece 22 for controlling the lifting of the furnace cover 13 drives the furnace cover 13 to lift upwards, the operation of the first driving piece 22 for controlling the lifting of the furnace cover 13 is stopped after the required height is reached, the first connecting lantern ring 132 is locked, the furnace cover 13 is fixedly connected with the guide post 21, the first driving piece 22 for controlling the lifting of the first furnace body 11 is operated to drive the first furnace body 11 to lift upwards until the distance between the upper surface of the first sealing ring 114 and the lower end surface of the furnace cover 13 is 1-2mm, the operation of the first driving piece 22 for controlling the lifting of the first furnace body 11 is stopped, the second connecting lantern ring 112 is fixedly connected with the guide post 21, at this time, the components in the crystal furnace 1 can be taken out for cleaning, the inner wall of the crystal furnace 1 is cleaned, the second limiting piece 144 can be screwed down firstly when the furnace door 14 is required to be cleaned, the top surface of the second limiting piece 144 is enabled to be connected with the lifting platform 14 through the lifting platform 32, and the lifting platform 32 is installed, and the bottom of the lifting platform 32 is removed through the lifting platform 32, and the lifting platform 32 is installed, and the lifting platform 32 is used for cleaning the bottom 32 is completely through the lifting platform 32.
Example 2
Referring to fig. 9, the crystal growth apparatus according to this embodiment differs from that according to embodiment 1 in that: the top surface of lifting platform 32 corresponds to the region that can install crucible axle 4 and has seted up the shoulder hole 321 that runs through lifting platform 32, the upper portion aperture of shoulder hole 321 is greater than the lower part aperture, install plane bearing 34 through interference fit in shoulder hole 321 department, crucible axle 4 can pass plane bearing 34's hole and with plane bearing 34's hole pore wall interference fit, be connected with support frame 35 through bolt fixedly on lifting platform 32's the bottom surface, be connected with third driving piece 351 through bolt fixedly on the support frame 35, third driving piece 351 can be the motor, the output shaft of third driving piece 351 passes through shaft coupling fixed connection with crucible axle 4.
The implementation principle of the embodiment of the application is as follows: the third driving member 351 is activated to drive the crucible shaft 4 to rotate, thereby driving the element of the crucible shaft 4 mounted at one end of the crystal furnace 1 to rotate.
The embodiments of the present application are all preferred embodiments of the present application, and are not intended to limit the scope of the present application, wherein like reference numerals are used to refer to like elements throughout. Therefore: all equivalent changes in structure, shape and principle of the application should be covered in the scope of protection of the application.
Claims (8)
1. The crystal growth device comprises a crystal furnace (1) and a lifting mechanism (2), wherein the lifting mechanism (2) can drive the crystal furnace (1) to lift, and is characterized in that the crystal furnace (1) comprises a first furnace body (11), a second furnace body (12), a furnace cover (13) and a bottom furnace door (14), the furnace cover (13) is positioned above the first furnace body (11) and is connected with the first furnace body (11), the second furnace body (12) is positioned below the first furnace body (11) and is connected with the first furnace body (11), the bottom furnace door (14) is positioned below the second furnace body (12) and is connected with the second furnace body (12), a first water-cooling interlayer (111) is arranged on the first furnace body (11), a second water-cooling interlayer (121) is arranged on the second furnace body (12), a third water-cooling interlayer (131) is arranged on the furnace cover (13), and a fourth water-cooling interlayer (141) is arranged on the bottom furnace door (14);
one end of the lifting mechanism (2) is fixedly connected with the furnace cover (13) and the first furnace body (11), and the lifting mechanism (2) can drive the furnace cover (13) and the first furnace body (11) to lift;
the lifting mechanism (2) comprises a guide column (21), a first driving piece (22), a traction piece (23) and a secondary guide column (24); the number of the guide posts (21) is two, and the two guide posts (21) are respectively arranged at two sides of the crystal furnace (1) by taking the central axis of the crystal furnace (1) as a symmetry axis; the auxiliary guide posts (24) are vertically arranged, the number of the auxiliary guide posts is two, the two auxiliary guide posts (24) are respectively arranged at two sides of the crystal furnace (1), fixed pulleys (241) are arranged on the auxiliary guide posts (24), guide wheels (212) are arranged on the guide posts (21), and the fixed pulleys (241) and the guide wheels (212) are both tooth plates;
the number of the first driving pieces (22) is two, the two first driving pieces (22) are respectively arranged at two sides of the crystal furnace (1), a rotating wheel (221) is fixedly connected to an output shaft of the first driving piece (22), a steel wire rope (26) is fixedly connected to the rotating wheel (221), and the steel wire rope (26) can be wound on the rotating wheel (221); the steel wire rope (26) is fixedly connected with the traction piece (23);
the traction piece (23) is a chain which can be matched with the fixed pulley (241) and the guide wheel (212); the traction piece (23) sequentially bypasses the fixed pulley (241) and the guide wheel (212) and is fixedly connected with the furnace cover (13) and the first furnace body (11).
2. A crystal growth apparatus according to claim 1, wherein a first connecting collar (132) is fixedly connected to the outer side wall of the furnace cover (13), a second connecting collar (112) is fixedly connected to the outer side wall of the first furnace body (11), and the first connecting collar (132) and the second connecting collar (112) are both sleeved outside the guide post (21) and detachably connected to the guide post (21).
3. A crystal growth apparatus according to claim 1, wherein the auxiliary guiding column (24) is fixedly connected with an upper limiter (242) and a lower limiter (243), the lifting mechanism (2) further comprises a first limiter (25), one end of the traction member (23) away from the furnace cover (13) is fixedly connected with one end of the first limiter (25), the other end of the first limiter (25) is connected with the first driving member (22) and can be driven by the first driving member (22) to generate displacement, and the first limiter (25) can lift from the upper limiter (242) to the region between the lower limiters (243).
4. A crystal growth apparatus according to claim 3, wherein an alarm (244) is fixedly connected to both the upper stopper (242) and the lower stopper (243), and the alarm (244) is capable of giving an alarm when the first stopper (25) contacts the upper stopper (242) or the lower stopper (243).
5. A crystal growth apparatus according to claim 1, further comprising a lifting mechanism (3), the lifting mechanism (3) being located below the bottom oven door (14), the lifting mechanism (3) comprising a second drive member (31) and a lifting platform (32), the second drive member (31) being connected to the lifting platform (32).
6. The crystal growing apparatus according to claim 5, wherein the bottom oven door (14) has a through hole (142) penetrating the bottom oven door (14), the through hole (142) communicating an in-furnace space of the crystal oven (1) with an external space;
the lifting mechanism (3) further comprises a heat preservation shell (33), one end of the heat preservation shell (33) is arranged around the through hole (142) and fixedly connected with the bottom furnace door (14), the other end of the heat preservation shell is fixedly connected with the lifting platform (32), and the heat preservation shell (33) can stretch and retract along the movement direction of the lifting platform (32).
7. A crystal growth apparatus according to claim 6, wherein the bottom surface of the bottom oven door (14) is fixedly connected with a plurality of guide rods (143), and a plurality of guide rods (143) penetrate the lifting platform (32).
8. The crystal growing apparatus according to claim 7, wherein a second limiting member (144) is connected to the guide rod (143), the second limiting member (144) is capable of sliding on the guide rod (143) along an axial direction of the guide rod (143) and being fixed at any height position of the guide rod (143), and the second limiting member (144) is located between the lifting platform (32) and the bottom furnace door (14).
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