CN109306514B

CN109306514B - Material feeding device and crystal growth system

Info

Publication number: CN109306514B
Application number: CN201710624492.5A
Authority: CN
Inventors: 付泽华; 周锐; 张永辉; 李侨; 赵会刚
Original assignee: Longi Green Energy Technology Co Ltd
Current assignee: Longi Green Energy Technology Co Ltd
Priority date: 2017-07-27
Filing date: 2017-07-27
Publication date: 2021-06-08
Anticipated expiration: 2037-07-27
Also published as: CN109306514A

Abstract

The invention discloses a material supply device which is used for supplying materials to a crucible in a furnace body, and comprises a storage mechanism, a feeding mechanism and a feeding passage, wherein the storage mechanism comprises a charging barrel and a material control body, the charging barrel is used for accommodating the materials and is provided with a discharging port, the material control body is arranged on the charging barrel and can move relative to the discharging port of the charging barrel, the materials accommodated in the charging barrel leave the charging barrel from a gap between the discharging port of the charging barrel and the material control body, the feeding mechanism is provided with a feeding passage for inputting the materials into the furnace body from the outside of the furnace body, the feeding passage is positioned in the furnace body and is opposite to the crucible, the feeding passage is butted with the feeding passage, and the materials are guided into the feeding passage through the feeding passage and are input into the crucible. The invention discloses a crystal growth system, which comprises a furnace body, a crucible arranged in the furnace body and used for containing materials, and the material supply device. The invention improves the production efficiency of the silicon single crystal rod and simultaneously improves the stability and safety of external feeding.

Description

Material feeding device and crystal growth system

Technical Field

The invention belongs to the technical field of single crystal growth, relates to auxiliary equipment for single crystal growth, in particular to a material supply device, and further relates to a crystal growth system with the material supply device.

Background

Polycrystalline silicon is a major raw material for producing solar photovoltaic products and semiconductor products. The Czochralski (Cz) method is one of the most commonly used methods for producing single crystal silicon, in which a high purity solid polycrystalline silicon raw material is melted in a crucible in a crystal forming furnace (single crystal furnace) to form a melt, a seed crystal is lowered to be brought into contact with the melt in the rotating crucible, and then the seed crystal is slowly pulled out, and the melt is solidified around the seed crystal to form a single crystal silicon rod.

After the traditional Cz single crystal furnace finishes the crystal pulling production of raw materials in one furnace, a plurality of complex early-stage preparation works for the production of a new furnace are needed, and the early-stage preparation works comprise the working procedures of furnace shutdown cooling, furnace body cleaning, material preparation, charging, vacuumizing, leakage detection, material melting and the like. These earlier processes are time-consuming and labor-consuming, which severely restrict the production efficiency of czochralski silicon. In addition, the volume of the filled polycrystalline silicon material (mostly massive material) is reduced after melting, so that the utilization rate of the crucible is reduced. In order to improve the utilization rate of the crucible and increase the total feeding amount, the crucible needs to be repeatedly fed for many times. This is also one of the effective measures to reduce the crystal pulling cost. At present, a mainstream feeding device for growing the czochralski silicon is a built-in feeder of a subsidiary chamber. Because the single feeding amount of the feeder is small (generally not more than 30kg), repeated feeding is needed for many times, the manual operation is complicated and the efficiency is low; and the vacuum pumping treatment is carried out after each charging, the isolation and purification of the auxiliary chamber must be frequently carried out, the time waste is serious, and the risk of material pollution is increased.

In order to meet the requirement of increasing the overall charge and to remedy the technical drawbacks of the built-in feeders, there are patents disclosing external feeding devices for feeding polycrystalline silicon material to a single crystal furnace. The patent application with application publication number CN1153230A provides a solid material feeding system for stove, and this feeding system's conveying pipe can change the radial position of conveying pipe export for the crucible top selectively, avoids splashing, improves the utilization ratio of heat energy, but feeding system structure is complicated, and complicated operating device has the risk of material jam to the location of conveying pipe export is difficult to accurate control. The patent with the publication number of CN102312285B provides an external continuous feeding mechanism for a single crystal furnace, which comprises a feeding inner tube and a feeding outer tube, wherein polycrystalline silicon materials are conveyed from the feeding inner tube to the feeding outer tube, so that the inner diameter of the feeding inner tube is limited, and the feeding mechanism is not suitable for block materials with larger grain diameter; in addition, the overall height of the feeding mechanism is high, feeding operation is not facilitated, and potential safety hazards in operation are increased. The patent application with application publication number CN106400105A discloses that the technical defects of the external feeding device are similar to those of patent CN102312285B, and the feeding amount and feeding speed of the polysilicon material are difficult to control effectively.

Therefore, in order to increase the total feeding amount and reduce the crystal pulling cost, the external feeding device of the single crystal furnace is used as a main auxiliary tool for increasing the total feeding amount, and the optimization and the improvement of the external feeding device are particularly important.

Disclosure of Invention

The invention provides a material supply device externally connected with a single crystal furnace, aiming at the technical defects of the existing feeding device outside the single crystal furnace. The material supply device can be accurately butted with a single crystal furnace, the polycrystalline silicon material feeding speed and the feeding amount are effectively controlled, the overall height of the material supply device can be reduced, the material feeding operation is easy, the safety and the convenience of the material feeding operation are improved, operators are saved, the material feeding time is shortened, and the manufacturing cost is reduced.

The invention also provides a crystal growth system with the material supply device.

One scheme adopted by the invention is as follows: the feeding mechanism is provided with a feeding passage which is used for inputting materials from the outside of the furnace body to the inside of the furnace body and is opposite to the crucible, the feeding passage is butted with the feeding passage, and the materials are guided into the feeding passage through the feeding passage and are input into the crucible through the feeding passage.

As one of the preferable embodiments of the technical scheme of the invention, the material control body is suspended at the discharge port of the charging barrel and can be attached to and far away from the discharge port of the charging barrel; the shape of the material control body is matched with that of the discharge hole of the charging barrel, and the size of the bottom surface of the material control body is not smaller than that of the discharge hole of the charging barrel.

In a preferred embodiment of the present invention, the material control body is connected to a traction rope, and the traction rope passes through the cylinder and is connected to a traction power part installed outside the cylinder.

In a preferred embodiment of the technical solution of the present invention, the material controlling body is a cone or a circular truncated cone, the discharge port of the charging barrel is cylindrical, and the diameter of the bottom surface of the cone or the circular truncated cone is not smaller than the diameter of the discharge port of the charging barrel.

Furthermore, a guide cylinder is arranged in the furnace body and is arranged above the crucible, and the feeding passage is arranged on the inner side or the outer side of the guide cylinder or is inserted into the guide cylinder and extends to the upper part of the crucible.

In a preferred embodiment of the present invention, the feeding passage is provided inside the guide cylinder, and the feeding passage is held on the surface of the guide cylinder by a feeding fixing block.

As one of the preferable embodiments of the technical solution of the present invention, the feeding path includes a feeding inlet located at the upstream and a feeding outlet located at the downstream, a feeding funnel is disposed at the feeding inlet of the feeding path, the feeding path is butted with the feeding funnel, and the feeding outlet of the feeding path is close to the crucible.

Further, the furnace body is provided with an opening, the feeding passage is communicated with the furnace body through the opening, the feeding passage comprises an upstream end and a downstream end which are opposite, the upstream end is positioned outside the furnace body and is provided with an isolation valve, the downstream end extends or withdraws inside the furnace body, and the isolation valve enables the feeding passage and the furnace body to be kept in an airtight state.

As one of the preferable embodiments of the technical solution of the present invention, the feeding mechanism is installed outside the furnace body and is butted with an opening of the furnace body, and a portion of the feeding path outside the furnace body is received in the feeding mechanism.

As one of the preferable embodiments of the technical scheme of the invention, a corrugated pipe is arranged outside the opening of the furnace body, and the feeding mechanism is butted with the opening of the furnace body through the corrugated pipe.

Further, the feeding mechanism has a feeding lifting device for effecting extension or retraction of the feeding pathway relative to the feeding pathway.

As one of the preferable embodiments of the technical scheme of the invention, a feeding passage fixing sleeve is arranged outside the feeding passage, the feeding passage fixing sleeve is connected with the feeding lifting device, and the feeding passage fixing sleeve move along with the feeding lifting device.

Further, the material supply device further comprises a material guide mechanism, wherein the material guide mechanism is arranged between the material storage mechanism and the feeding mechanism and used for guiding the material in the material storage mechanism into a feeding passage of the feeding mechanism in an airtight state.

As one of the preferable embodiments of the technical solution of the present invention, the material guiding mechanism includes a material guiding passage, the material guiding passage is an obliquely arranged tubular passage, and the material in the material guiding passage moves to the feeding mechanism by the self-weight of the material.

As one of the preferable embodiments of the technical solution of the present invention, the material guiding mechanism further includes a material guiding cylinder, the material guiding cylinder is installed below the material guiding cylinder, at least a discharge port of the material guiding cylinder extends into the material guiding cylinder, and the material guiding passage is communicated with the material guiding cylinder and located at the downstream of the material guiding cylinder.

In a preferred embodiment of the present invention, a plurality of vent holes are formed at a connection portion between the charging barrel and the guide barrel.

Further, the material supply device further comprises a docking mechanism, wherein the docking mechanism is arranged between the material guide passage and the feeding mechanism and used for guiding the material in the material guide passage into the feeding passage of the feeding mechanism in an airtight state.

As one of the preferable embodiments of the technical solution of the present invention, the docking mechanism includes a docking guide tube and a docking corrugated tube, which are connected in sequence and are communicated with each other, the docking guide tube is located at the upstream of the docking corrugated tube, the upstream end of the docking guide tube is docked with the guide passage, and the downstream end of the docking corrugated tube is connected with the isolation valve at the upstream end of the feeding passage.

As one of the preferable embodiments of the technical solution of the present invention, a butt joint blanking pipe is arranged inside the butt joint material guiding pipe and the butt joint corrugated pipe, an upstream end of the butt joint blanking pipe is in butt joint with the material guiding passage, and a downstream end of the butt joint blanking pipe can be communicated with the feeding passage through the isolation valve.

As one of the preferable embodiments of the technical solution of the present invention, the docking mechanism further includes a docking limiting device, and the docking limiting device is installed outside the docking guide tube and the docking corrugated tube, and is used for limiting the amount of telescopic deformation of the docking corrugated tube.

Further, the material feeding device further comprises a movable lifting platform, and the movable lifting platform is at least used for bearing the material storage mechanism and changing the position of the material storage mechanism relative to the furnace body.

The other technical scheme adopted by the invention is as follows: a crystal growth system, comprising: a furnace body; the crucible is arranged in the furnace body and is used for containing materials; and the material supply device conveys a controllable amount of material to the crucible.

Compared with the existing feeding device, the material feeding device has at least the following beneficial effects.

The material supply device comprises a material storage mechanism, a material guide passage, a butt joint mechanism, a feeding mechanism and a feeding passage which is arranged above a crucible in advance. The feeding mechanism and the butt joint mechanism are fixedly arranged outside the furnace body and are in butt joint with the material guide passage. The material storage mechanism and the material guide passage are arranged on the movable lifting platform, and can be butted with a plurality of feeding mechanisms on the furnace bodies. The storage mechanism quantitatively conveys external materials to the material guide passage through the material control body. The material guide passage, the butt joint discharging pipe in the butt joint mechanism, the feeding passage of the feeding mechanism and the feeding passage arranged above the crucible in advance form an external material conveying passage, and external materials in the material storage mechanism are conveyed into the crucible in the furnace body. In addition, an isolation valve is arranged at the upstream end of the feeding mechanism to protect the atmosphere in the furnace body from being influenced. The invention can realize the conveying of external materials into the crucible without stopping the furnace, and the auxiliary chamber of the furnace body does not need to be isolated and purified, thereby greatly improving the production efficiency, shortening the charging proportion time, simultaneously improving the utilization rate of the quartz glass crucible and reducing the cost of the charging link.

Moreover, the feeding passage is fixed on the guide cylinder in advance, so that the length of the feeding passage is shortened, the stroke of the feeding passage is shortened, the height of the feeding mechanism outside the furnace cover is reduced, and the gravity center position of the feeding mechanism is lowered. Therefore, the feeding mechanism and the material guiding mechanism are conveniently butted at a lower station, and the stability and the safety of the operation of the material supply device are improved. In addition, compared with a material supply device without a preset feeding passage, the device can feed external materials into the quartz glass crucible without waiting for the pulling device to drive the single crystal silicon rod to move upwards to a higher position, so that the waiting time is obviously shortened, and the production efficiency of the single crystal silicon rod is improved.

In a word, the material supply device meets the requirement of large feeding amount, and the single feeding amount can reach more than 150 kg; meanwhile, the defect of the built-in feeder of the auxiliary chamber is overcome, feeding is completed at one time, isolation and purification times can be reduced to the maximum extent on the premise of meeting the requirement of large feeding amount, and environmental pollution in the furnace caused by repeated isolation is avoided. The purification and feeding processes of the material supply device and the cooling process of the single crystal silicon rod can be performed in parallel, and the time consumption in the feeding process is obviously reduced.

Drawings

FIG. 1 is a schematic view of a material supply apparatus according to the present invention;

FIG. 2 is a schematic diagram of a state in which a material control body of the storing mechanism of the material supplying device is in a material flow limiting discharging barrel;

FIG. 3 is a schematic diagram of a state in which a material control body of the storing mechanism of the material supplying device is in a state of allowing the material to flow out of a material discharging barrel;

FIG. 4 is a schematic view showing the installation relationship of the docking mechanism and the feeding mechanism of the material supplying apparatus according to the present invention;

FIG. 5 is a schematic view showing a state of a material feeding path of the material feeding apparatus according to the present invention;

FIG. 6 is a schematic view of a charging path of the material supplying apparatus of the present invention installed inside a guide shell;

FIG. 7 is a schematic view of the feed path of the material supplying apparatus of the present invention disposed outside the guide shell.

Description of reference numerals:

1. a material storage mechanism; 101. a charging barrel; 102. a charging barrel cover; 103. a material control lifting device; 1031. a traction power part; 1032. a traction rope; 1033. controlling the material body; 104. a material guide cylinder; 105. a vent hole; 1051. evacuating ports; 1052. detecting a leakage opening; 1053. an argon flowing port;

2. a material guide passage; 21. a material guiding and feeding pipe; 22. a material guiding and conveying pipe; 23. a material guiding and discharging pipe;

3. a docking mechanism; 31. butting the corrugated pipes; 32. butting a limiting device; 33. butting a blanking pipe; 34. butting the first flange; 35. butting a material guide pipe; 36. butting the second flange;

4. a feeding mechanism; 41. a feeding hopper; 42. a feeding passage fixing sleeve; 43. a feeding path; 44. a feed bellows; 45. a feeding lifting device; 451. a hand wheel; 452. a feeding lifting frame; 453. a feeding lifting screw rod; 454. feeding and lifting the guide rail; 455. a slider;

5. a feeding passage; 51. a feeding part; 52. a feeding and discharging part; 53. a feeding hopper; 54. feeding fixed blocks;

6. moving the lifting platform; 61. a lifting drive part; 62. moving the lifting frame; 63. moving the support frame; 631. a lifting screw rod; 632. a guide polish rod; 64. a horizontal fine adjustment mechanism;

7. a furnace body; 71. a furnace cover; 72. a furnace barrel;

8. a pulling device; 9. a single crystal silicon rod; 10. a draft tube; 11. a crucible; 12. a heater; 13. an isolation valve; 14. a base.

Detailed Description

The invention is described in detail below with reference to the figures and specific embodiments. For the description of the directions in the description, "up and down" means that the up and down directions shown in fig. 1 are taken as references. The term "inside and outside" means the position of the internal and external space of the furnace body as a reference. However, the present invention is not to be construed as being limited to the manner in which it is described in this direction.

Example 1

The material supply device described in this embodiment is used for feeding external materials from the outside of the furnace body 7 into the crucible 11 provided inside the furnace body 7. In the present embodiment, the furnace body 7 is a single crystal furnace that can pull up the single crystal silicon rod 9 from the crucible 11 by the Cz method, unless otherwise specified. This single crystal furnace has an elongated cylindrical sub-chamber of a small diameter in which a single crystal silicon rod 11 is cooled, and a pulling device 8 for pulling up the single crystal silicon rod 11 is installed in the sub-chamber.

The single crystal furnace also comprises a furnace cover 71 and a furnace cylinder 72 which are arranged below the auxiliary chamber. The furnace lid 71 is connected to and disposed below the sub-chamber, and generally has a certain curvature. Part of the structure of the material supply apparatus, such as the feeding mechanism 4, described in this embodiment is fixed to the cover 71. Whereas the subchamber is generally disposed at the center of the hood 71 and is relatively fixed in position, the feeding mechanism 4 is preferably installed at a side of the hood 71. In order to feed the external material into the furnace body 7 through the feeding mechanism 4, more precisely, the material falls into the crucible 11 inside the furnace body 7, an opening is opened at a suitable position on the side of the furnace cover 71, and the feeding path 43 of the feeding mechanism 4 can extend into the furnace body 7. As for the number of openings provided in the lid 71, it is preferable that at least one opening is provided in the lid 71.

In order to mount the feeding mechanism 4 relatively firmly on the lid 71, as shown in fig. 1, a base 14 is mounted at the opening, and the feeding mechanism 4 is mounted on the base 14. Since the interior of the furnace body 7 needs to maintain a special atmosphere, inert gas such as argon is generally introduced into the interior of the furnace body 7, and in order to not destroy the atmosphere inside the furnace body 7, it is necessary to prevent air from entering the furnace body 7 to cause pollution to the furnace body 7, and an isolation valve 43 is further installed at the opening. The isolation valve 43 is provided to control the opening and closing of the opening and to block the atmosphere inside the furnace body 4 from the outside. In view of the fact that the crucible 11 is used for melting materials and needs a high temperature, the base 14 near the opening usually contains a rubber gasket, and in order to prevent the gasket from being easily aged by heat and not having a high sealing performance meeting requirements, the base 14 is preferably communicated with a water circulation system to achieve the effect of cooling the same.

The furnace tube 72 is arranged below the furnace cover 71, the part above the working surface is a cylinder with a larger diameter, the crucible 11, the heater 12 for heating the crucible 11 to melt the material in the crucible 11 and the guide cylinder 10 above the crucible 11 are arranged in the furnace tube 72. In the present embodiment, the crucible 11 is generally referred to as a quartz glass crucible for containing an external material, and the external material is melted in the crucible 11 as a liquid material.

As shown in fig. 1, the main body of the material supply device comprises a storage mechanism 1, a material guide passage 2, a docking mechanism 3, a feeding mechanism 4 and a feeding passage 5 pre-embedded inside a furnace body 7. As a further preference of the material supply device, the material supply device may further comprise a mobile lifting platform 6.

The material storage mechanism 1 and the material guide passage 2 are arranged on the movable lifting platform 6 and are close to or far from the furnace body 7 along with the movable lifting platform 6 so as to change the position relative to the furnace body 7. The butt joint mechanism 3 and the feeding mechanism 4 are fixedly arranged outside the furnace body 4, specifically, the feeding mechanism 4 is fixedly arranged on a base 14 outside the opening, and the butt joint mechanism 3 is positioned above the feeding mechanism 4 and is in butt joint to form a passage for conveying materials. The feeding passage 43 of the feeding mechanism 4 can extend into the furnace body 7 through the opening and is butted with the feeding passage 5. From the functional realization that each main part constitutes above-mentioned, material storage mechanism 1 can store the material to with the material with controllable mode ration to the material passageway 2 transport external material. The material guide passage 2 is used for containing quantitative materials input by the material storage mechanism 1, is in butt joint with the butt joint mechanism 3 and conveys the materials to the butt joint mechanism 3. The butt joint mechanism 3 conveys the materials to the feeding mechanism 4, and the feeding mechanism 4 is used for conveying the materials to the interior of the furnace body 7. The feeding passage 5 is arranged inside the furnace body 7, is butted with the feeding passage 43 of the feeding mechanism 4 and further conveys the materials into the crucible 11, and the feeding operation is completed.

Material storage mechanism

The main structure of the storing mechanism 1 is a charging barrel 101. The cartridge 101 can temporarily contain the material during the time the material is conveyed, and the cartridge 101 may be divided into a cylindrical main body portion and a cone portion located below the main body portion. Of course, the cartridge 101 may be designed in other shapes depending on the application. The discharge port of the charging barrel 101 is opened at the lower end of the cone portion, and the feeding port thereof is opposite to the discharge port thereof and is disposed at the upper end of the main body portion. The cartridge 101 has a cartridge cover 102 fitted thereto, and the cartridge cover 102 is provided at the upper end of the main body. In order to facilitate the filling of the material into the cartridge 101, the cartridge cover 63 is preferably arranged in a quick-release manner, and the sealing of the cartridge 101 can be quickly realized, so that the material in the cartridge 101 is prevented from being polluted by the surrounding environment. The cartridge cover 102 can maintain an airtight state with respect to the external atmosphere when the material is transferred to the guide cylinder 104 below the cartridge 101.

The cartridge 101 and the cartridge lid 102 may both be made of stainless steel metal. To avoid introducing metal impurities into the material in the barrel 101, liners are provided on the inner surfaces of both the barrel 101 and the barrel cover 102 to block the material from contacting the surfaces of the barrel 101 and the barrel cover 102.

The cartridge 101 may be provided with an evacuation port 1051, and as shown in fig. 1, the evacuation port 1051 may be provided at a suitable position on the main body of the cartridge 101 near the cartridge cover 102. The evacuation port 1051 communicates with an evacuation device (not shown), and a vacuum valve is usually installed on an evacuation line connected to the evacuation port 1051 to control the degree of vacuum inside the cartridge 101. The purpose of evacuating the charging barrel 101 is to maintain the stock mechanism 1 at a certain vacuum degree and prevent air from entering the furnace body 7 and damaging the atmosphere inside the furnace body 7.

The material falls naturally by gravity inside the barrel 101. In order to achieve a quantitative discharge of the material from the outlet of the cartridge, a control body 1033 is arranged at the outlet of the cartridge. The geometric shape of the material control body 1033 is matched with the discharge hole of the charging barrel. As a preferred embodiment, the material control body 1033 is in the form of a geometric cone, such as a cone or a circular truncated cone, the material outlet of the charging barrel is preferably in a tubular (cylindrical) structure, the cross section of the material outlet of the charging barrel is circular, and the edge of the material outlet of the charging barrel can be tightly attached to the surface of the material control body 1033. Through the cooperation of accuse material body 1033 and feed cylinder discharge gate, can realize the control of load. In order to achieve a tight abutment of the material control body 1033 with the discharge opening of the cartridge, it is easy to understand that the diameter of the bottom surface of the material control body 1033 is not smaller than the diameter of the discharge opening of the cartridge. So set up, when accuse material body 1033 docks with the feed cylinder discharge gate, the material just can not be discharged from feed cylinder 101.

As a preferred embodiment, the up and down movement of the material control body 1033 is controlled by a traction power part 1031, and the traction power part 1031 may be understood as a traction motor. The traction power part 1031 is connected to the material control body 1033 through a traction rope 1032, the traction rope 1032 is led out from the traction power part 1031 and extends into the interior of the charging barrel 101, and the traction power part 1031 can be installed on the charging barrel cover 102 or installed outside the charging barrel 101. The working principle of the material control body 1033 can be described as follows: the traction power part 1031 acts on the material control body 1033 through a traction rope 1032 to enable the material control body 1033 to be lifted or dropped relative to the material outlet of the charging barrel; if the material control body 1033 moves downwards and is far away from the discharge hole of the charging barrel, the discharge hole of the charging barrel is opened, and the material in the charging barrel 101 falls into the guide cylinder 104; the material control body 1033 is lifted upwards and close to the discharge port of the charging barrel, the bottom surface of the material control body 1033 is attached to the discharge port of the charging barrel, and the discharge port of the charging barrel is closed.

The material control cone 1033 functions not only as described above, but also functions to divert and buffer material. When the charging barrel 101 discharges materials, the material control body 1033 is suspended below the discharge port of the charging barrel, and in view of the conical structure of the material control body 1033, most of the materials are firstly contacted with the material control body 1033, and the original vertical falling direction is changed, so that the materials are dispersed along the circumferential direction of the guide cylinder 104, and the materials are prevented from forming conical accumulation at the discharge port of the guide cylinder 104. This also facilitates the discharge of material from the guide cylinder 104 into the guide passage 2.

The material storing mechanism 1 adopting the material control body 1033 has wider applicability to materials. That is, the storing mechanism 1 can be applied to large lump materials, small lump materials, regular granular materials or powder materials. Meanwhile, the material storage mechanism 1 also eliminates the defect of limitation of applicable materials of other material control and feeding devices, such as a spiral feeding device.

Material guiding mechanism

The material guiding passage is used in a broad sense and functions to convey the material discharged from the material storing mechanism 1 to the downstream docking mechanism 3. As for the shape and structure of the material guiding passage, corresponding changes can be made, i.e. this function can be achieved in many ways, such as by the material weight, or by the material conveying belt, or by the material conveying plate. The present embodiment does not limit the functional implementation of the material guiding passage, and the following description of the material guiding passage is only a specific preferred embodiment.

In this section, the material guiding mechanism includes a material guiding cylinder 104 and a material guiding passage 2 which are communicated with each other. As shown in fig. 1 to 3, the guide cylinder 104 is disposed below the charging cylinder 101. The guide cylinder 104 has a similar or identical geometric shape to the charging cylinder 101, and preferably, the guide cylinder 104 may be divided into a cylindrical main body and a conical part below the main body. Referring to the internal arrangement of the material guide cylinder 101, a lining is disposed on the inner surface of the material guide cylinder 104, and preferably, the lining may be disposed on the inner surface of the material guide cylinder 104 by bonding.

In a preferred embodiment, the diameter of the main body of the guiding cylinder 104 is smaller than the diameter of the main body, the discharge port of the charging cylinder extends into the guiding cylinder 104, the upper edge of the guiding cylinder 104 is connected with the conical part of the charging cylinder 101, and the discharge port of the guiding cylinder 104 is communicated with the guiding passage 2. Preferably, the upper edge of the guide cylinder 104 is welded to the tapered portion of the cylinder 101. The material control body 1033 is suspended inside the material guide cylinder 104, and the material control body 1033 can move in a region between the inside of the material guide cylinder 104 and the discharge port of the material guide cylinder, and preferably, the material control body 1033 can move along the central line of the material guide cylinder 101.

As shown in fig. 1 to 3, a plurality of vent holes 105 are formed at or near the joint between the charging barrel 101 and the guide barrel 104. The vents 105 function differently, for example, the vent holes 105 include at least an evacuation port 1051, an argon flow port 1053, and a leak detection port 1052. Preferably, at the same time, at least one evacuation opening 1051 may be opened on the main body portion of the cartridge 101 close to the cartridge cover 102. The evacuation port 1051 of the charging barrel 101 and the evacuation port 1051 of the material guiding barrel 104 are connected in series and communicated with a vacuum pumping system, so that the material supplying device described in this embodiment can maintain a certain vacuum degree when supplying materials to the furnace body 7. The argon flow port 1053 is communicated with an argon gas supply system, and argon gas is filled into the material supply device through the argon flow port 1053 to ensure that the atmosphere inside the furnace body 7 is the same as that in the material supply device. As will be readily appreciated, leak detection port 1052 is used to detect the hermeticity of the interface between the components of the material supply apparatus.

As shown in fig. 1, the material guiding passage 2 is a tubular passage having a main body portion communicating with the passage and inclined. The materials move to the butt joint mechanism 3 in the material guide passage 2 through the self weight of the materials. Specifically, the material guiding path 2 includes a material guiding inlet pipe 21, a material guiding delivery pipe 22 and a material guiding outlet pipe 23 which are communicated with each other. The material guiding and feeding pipe 21 is located at the upstream end of the material guiding path 2 and is butted with the discharge hole of the material guiding barrel 104. Preferably, the material guiding and feeding pipe 21 is vertically butted with the discharge port of the material guiding barrel 104, that is, the material barrel 101 is collinear with the material guiding barrel 104 below, and the central line of the material guiding and feeding pipe 21 is collinear. The material guiding and transporting pipe 22 is a main body part of the material guiding passage 2 and is located between the material feeding pipe 21 and the material guiding and discharging pipe 23. The material guiding and conveying pipe 22 is obliquely arranged, and materials move to the material guiding and discharging pipe 23 in the material guiding and conveying pipe 22 through the self weight of the materials. The material guiding and discharging pipe 23 is located at the downstream end of the material guiding passage 2 and is butted with the butting mechanism 3.

As shown in FIG. 1, the material guide pipe 22 is inclined, and the material naturally slides down in the material guide pipe 22 by gravity. As for the guide passage 2, particularly, the inclination angle of the guide delivery pipe 22 needs to be selected within a suitable range. If the inclination angle of the material guiding and conveying pipe 22 is large, the material obtains a large sliding speed in the material guiding and conveying pipe 22, and the material will certainly impact the downstream docking mechanism 3; if the angle of inclination of the material guiding pipe 22 is small, the material will slip down the material guiding pipe 22 at a low speed, which may prolong the feeding time to complete the feeding operation. Therefore, the choice of the angle of inclination of the guide conveyor 22 is a matter of general consideration, and the angle of inclination shown in FIG. 1 is merely illustrative of an embodiment and does not represent a practical limitation on the angle of inclination.

The material guiding passage 2 may be made of a metal material such as stainless steel, and an inner liner may be preferably provided on an inner surface thereof, and preferably, the inner liner may be provided on the inner surface of the material guiding passage 2 by means of bonding. As a protection for the material guiding passage 2, a protective casing made of a metal material may be provided on the outer surface thereof.

Docking mechanism

The butt joint mechanism 3 is arranged at the downstream of the material guide passage 2 and is used for receiving the materials input by the material guide passage 2 and transmitting the materials to the feeding mechanism 4 communicated with the furnace body. The butt joint mechanism 3 is arranged above the feeding mechanism 4 and is fixedly arranged outside the furnace body 7, and the positions of the butt joint mechanism 3 and the feeding mechanism 4 are not changed relative to the furnace body 7. An isolation valve 13 is arranged at the joint of the docking mechanism 3 and the feeding mechanism 4, or the isolation valve 13 is arranged between the docking mechanism 3 and the feeding mechanism 4. The isolation valve 13 is used for keeping the feeding mechanism 4 and the furnace body 7 which are communicated in an airtight state. The isolation valve 13 is opened, the insides of the docking mechanism 3 and the feeding mechanism 4 are the same, and the material from the material guide passage 2 can enter the feeding mechanism 4 through the docking mechanism 3.

Regarding the structural arrangement of the docking mechanism 3, as shown in fig. 4, as a preferred embodiment, the docking mechanism 3 includes a docking guide tube 35 and a docking bellows 31 which are connected and communicated in sequence. The butt joint material guiding pipe 35 is located at the upstream of the butt joint mechanism 3, and the butt joint material guiding pipe 35 is used for containing the materials in the material guiding and discharging pipe 23. The docking guide pipe 35 is connected to the upstream end of the docking bellows 31 by a docking second flange 36. The downstream end of the abutment bellows 31 is connected to the isolation valve 13 by an abutment first flange 34. A docking baiting tube 33 is fixedly arranged in the inner space of the docking mechanism 3. The upstream end of the butt joint blanking pipe 33 is preferably funnel-shaped and is positioned inside the butt joint material guiding pipe 35, so that the material in the material guiding and discharging pipe 23 can be better contained; the rest of the butt joint discharging pipe 33 except for the upstream end in the shape of a funnel is in a tubular structure, the downstream end of the butt joint discharging pipe 33 is positioned in the inner space of the butt joint corrugated pipe 31, and the downstream end of the butt joint discharging pipe 33 can be butted with the feeding mechanism 4 through the isolation valve 13 to convey materials to the feeding mechanism 4.

As shown in fig. 4, the docking mechanism 3 further includes a docking limiting device 32. The docking limiting device 32 is installed outside the docking guide tube 35 and the docking corrugated tube 31, and is used for limiting the amount of expansion and contraction of the docking corrugated tube 31. When the docking mechanism 3 is docked with the material guiding passage 2 and materials are conveyed into the docking mechanism 3, the docking mechanism 3 is extruded by the material guiding passage 2, so that the docking mechanism 3 is deformed to a certain extent, accordingly, the docking corrugated pipe 31 is compressed, and the docking discharging pipe 33 inside the docking mechanism 3 also moves towards the direction close to the feeding mechanism 4. However, the compression deformation of the abutting corrugated tube 31 is limited, and the outer edge of the abutting second flange 36 at the joint of the abutting guide tube 35 and the abutting corrugated tube 31 contacts the lower end of the abutting limiting device 32, so as to prevent the abutting corrugated tube 31 from further compressing. When the external pressure is removed, usually after the charging operation is completed, the docking bellows 31 recovers its shape and extends, and the docking discharge pipe 33 inside the docking mechanism 3 moves away from the feeding mechanism 4. The outer edge of the abutment second flange 36 will contact the upper end of the abutment stop 32, thereby preventing further stretching of the abutment bellows 31. It can be seen that the arrangement of the docking limiting device 32 can well protect the docking mechanism 3 and the feeding mechanism 4 downstream thereof.

Regarding the structure of the docking limiting device 32, the present embodiment does not give detailed structural limitation, but its function is to limit the amount of expansion and contraction of the docking bellows 31, so as to protect the docking mechanism 3 and the feeding mechanism 4 downstream thereof. Any structure of the docking limiting device 32 that can achieve this function can be considered as a specific embodiment of this embodiment, and can be taught from the functional description of this embodiment, and further structural optimization can be made.

Feeding mechanism

The feeding mechanism 4 is butted with an opening on the furnace cover 71 and is fixedly arranged on the base 14 for conveying the materials of the butting mechanism 3 to the interior of the furnace body 7. The feeding mechanism 4 includes a feeding bellows 44, and a feeding path 43 installed at the feeding bellows 44. A feed bellows 44 is butted against the opening, and its downstream end is fixedly provided on the base 14 and its downstream end is connected below a feed lifting device 45.

The feeding passage 43 is used for feeding external materials into the furnace body 7 and is butted with the feeding passage 5 in the furnace body 7. A feed path fixing sleeve 42 is provided outside the feed path 43, and the feed path fixing sleeve 42 extends in the axial direction of the feed path 43 and is fixedly installed inside the feed bellows 44. The feed path fixing sleeve 42 is preferably a tubular structure member and is provided on the outer surface of the feed path 43, and the feed path fixing sleeve 42 is fixedly provided on the inner surface of the feed bellows 44. So set up, feeding path fixed sleeve 42 can both play the guard action to feeding path 43, play the effect of guide to the removal of feeding path 43 again simultaneously.

A feed hopper 41 is provided at the upstream end of the feed path 43. When the butt joint discharging pipe 33 moves towards the direction close to the furnace body 7, the butt joint discharging pipe 33 can be in butt joint with the feeding hopper 41, and materials are conveyed to the feeding hopper 41. In order to avoid the overflow of the materials at the feeding funnel 41, the inner diameter of the feeding funnel 41 is not smaller than the inner diameter of the butted feeding pipe 33. Meanwhile, the feeding funnel 41 has certain blocking and buffering effects on the materials falling from the butted discharging pipes 33, changes the movement path of the materials, and prevents the materials from flying out of the area where the feeding funnel 41 is located. Generally, the feeding passage 43 is made of quartz or other high temperature ceramic material.

The butt joint of the downstream end of the feeding passage 43 and the feeding passage 5 is realized by a feeding lifting device 45, and the feeding lifting device 45 can realize the synchronous change of the positions of the feeding corrugated pipe 44 and the feeding passage 43 relative to the furnace body 7. The feeding lifting device 45 may be of an existing device or structure, and preferably, as shown in fig. 4, includes a slider 455, a feeding lifting driving part 451, a feeding lifting frame 452, and a feeding lifting screw 453 and a feeding lifting rail 454 mounted on the feeding lifting frame 452. The feeding lift 452 is fixedly disposed on the base 14. The sliding block 455 is respectively sleeved on the feeding lifting screw 453 and the feeding lifting guide rail 454, and the sliding block 455 can move up and down under the action of the feeding lifting driving part 451. At the same time, the movement of the sliding block 455 can drive the expansion and contraction of the feeding bellows 44 and the position of the feeding path 43 relative to the furnace body 7. The upstream end of the feeding bellows 44 is fixedly disposed on the lower surface of the slider 455, and the slider 455 is internally provided with a cavity in which the feeding hopper 41 is received, or the cavity is penetrated by the butt feeding pipe 33. The feeding lifting driving part 451 may be a motor or a hand wheel as shown in fig. 4, and the feeding lifting driving part 451 acts on the feeding lifting screw 453 to drive the slider 455 connected to the feeding bellows 44 to move.

When materials need to be added into the crucible 11 in the furnace body 7, the feed lifting driving part 451 drives the sliding block 455 to move towards the direction close to the furnace body 7, meanwhile, the feed corrugated pipe 44 is compressed, and the compression of the feed corrugated pipe 44 drives the feed passage 4 in the feed corrugated pipe to be close to the crucible 11 in the furnace body 7 and complete butt joint with the feed passage 5. It should be noted that, since the isolation valve 13 is installed at the upper end of the feeding mechanism 4, the feeding bellows 44 and the feeding path 4 inside thereof are communicated with the inside of the furnace body 7, and a part of the feeding path 4 can be retained inside the furnace body 7, after the charging operation is completed, the feeding path 4 does not necessarily need to be lifted to the outside of the furnace body 7. In this way, it is possible to shorten both the required length of the feeding path 4 and the required stroke thereof.

Feeding passage

The feeding passage 5 is pre-embedded in the furnace body 7 and is used for containing the materials conveyed by the feeding passage 43 and feeding the materials into the crucible 11. Three preferred embodiments are given in this section with respect to the mounting position of the charging channel 5 inside the furnace body 7.

In one embodiment, as shown in fig. 1 and 5, the charging path 5 is installed inside the guide shell 10. As can be seen from fig. 5, the feed channel 5 is arranged in the region between the single crystal silicon rod 9 and the guide shell 10. Generally, the draft tube 10 is an annular structure having an inner and outer shroud. The inner side of the guide shell 10, namely the feeding channel 5, is arranged on the inner side of the inner screen.

In a second preferred embodiment of the feeding path 5, as shown in fig. 6, the feeding path 5 is inserted into the guide shell 10 and penetrates through the side wall of the guide shell 10, and extends to the upper side of the crucible 11, i.e. the feeding path 5 is arranged between the inner shield and the outer shield. Or, the feeding passage 5 is embedded in the guide shell 10 and extends to the upper side of the crucible 11 along the extension direction of the guide shell 10. As will be readily understood, this alternate mounting requires that the guide shell 10 be pre-provided with a through hole for allowing the insertion of the feeding passage 5, the through hole extending from the upper edge of the guide shell 10 to the lower edge of the guide shell 10, and the feeding passage 5 being inserted and fixed in the through hole.

Fig. 7 shows a third preferred installation of the dosing channel 5. As shown in FIG. 7, the charging path 5 is provided outside the guide shell 10, and the material in the charging path 5 falls into the crucible 11 through the region between the outside of the guide shell 10 and the inside of the sidewall of the crucible 11.

Specifically, the charging path 5 includes a charging portion 51 and a discharging portion 52. The feeding part 51 is positioned at the upper end of the feeding passage 5 and is butted with the feeding passage 43 to receive the materials in the feeding passage 43. The butt joint of the feeding path 5 and the feeding path 43 is shown in fig. 5. The charging and discharging portion 52 extends along the longitudinal direction of the charging path 5 and extends above the crucible 11. Generally, the feeding passage 5 is made of quartz material or other high temperature resistant ceramic material.

The feeding port of the feeding portion 51 has a feeding funnel 53, and the feeding path 43 may extend to the inside of the feeding funnel 53 so that the material is entirely dropped into the feeding funnel 53. The feeding passage 5 is fixed on the surface of the guide shell 10 through a feeding fixing block 54 and extends towards the bottom of the guide shell 10. Specifically, the feeding fixing block 54 is disposed at the base of the feeding funnel 53 and fixed to the top of the guide cylinder 10. The material falls into the crucible 11 through the feeding and discharging portion 52, and in order to reduce the momentum of the material and prevent the molten material in the crucible 11 from splashing, the feeding and discharging portion 52 is designed with a certain angle, that is, at least the upper half of the feeding and discharging portion 52 is bent to form an included angle towards the long axis direction of the feeding passage 5. The corner design of the feeding and discharging part 52 firstly changes the material moving direction in the feeding passage 5 and firstly avoids the material from interfering the single crystal silicon rod 9 above the liquid level of the molten silicon. Meanwhile, the extension position of the charging and discharging part 52 is preferably set so as not to affect the growth and cooling of the single crystal silicon rod 9.

The material supply device is provided with a feeding passage 5 in advance in a furnace body 7. When materials are conveyed to the furnace bodies 7 with the same specification, the stroke of the feeding passage 4 can be shortened by adopting the material supply device, namely, the materials can be conveyed to the feeding passage 5 by using the shorter feeding passage 4. The advantages of the material supply device are obvious, at least the longitudinal length of the feed bellows 44 can be shortened, which also means that the overall weight of the feed mechanism 4 arranged on the furnace cover 71 can be reduced, and the center of gravity of the feed mechanism 4 is lowered, thereby facilitating the butt joint with the movable material guiding passage 2, and more importantly, the safety and reliability of the material feeding operation are improved.

Mobile platform

In this embodiment, as shown in fig. 1, the material supplying apparatus may further include a moving elevating platform 6. The movable lifting platform 6 is used for carrying the storage mechanism 1 and the material guiding passage 2, and is opposite to the furnace body 7, so that the storage mechanism 1 and the material guiding passage 2 move towards and away from the furnace body 7.

In order to relatively safely and firmly arrange the material storing mechanism 1 and the material guiding passage 2 on the movable lifting platform 6, a proper supporting frame or a fixing frame is arranged on the movable lifting platform 6. Specifically, the movable elevating platform 6 includes a movable elevating frame 62, a movable supporting frame 63, and a movable elevating driving part 61. The material storing mechanism 1 and the material guiding passage 2 are arranged on the movable lifting frame 62, and the movable lifting frame 62 is lifted relative to the movable supporting frame 63 under the action of the movable lifting driving part 61. The mobile support 63 is placed on the work surface and has a lifting screw 631 and a guide rod 632 acting on the mobile crane 62. The movable lifting driving part 61 is generally mounted on the movable supporting frame 63, and preferably, the movable lifting driving part 61 is a lifting motor. The movable lifting driving part 61 acts on the lifting screw rod 631, and the lifting screw rod 631 lifts the movable lifting frame 62 along the guide polished rod 632, so that the positions of the material storage mechanism 1 and the material guide passage 2 relative to the furnace body 7 can be adjusted.

It is easy to understand that a plurality of wheels are installed at the base of the movable support frame 63, so as to flexibly change the positions of the storage mechanism 1 and the material guiding passage 2 relative to the furnace body 7, and at the same time, the possibility is provided for a plurality of furnace bodies to share one set of the storage mechanism 1, the material guiding passage 2 and the movable lifting platform 6, namely, the external materials can be supplied to the plurality of furnace bodies 7 in batches.

In addition, the mobile lifting platform 6 also comprises a horizontal fine adjustment mechanism 64. The horizontal fine adjustment mechanism 64 can adjust the relative distance to each other with a small margin when the material guiding passage 2 and the docking mechanism 3 are docked. In the present embodiment, the horizontal fine adjustment mechanism 64 has a handle for the operator to operate, and the handle is rotated to drive the material guiding path 2 and the material storing mechanism 1 to generate small-amplitude displacement. Therefore, the horizontal fine adjustment mechanism 64 can change the positions of the material guide passage 2 and the material storage mechanism 1 in the horizontal direction, so that the material guide passage 2 is located at a proper position and is convenient to be in sealed butt joint with the butt joint mechanism 3, meanwhile, the extrusion and collision between the material guide passage 2 and the butt joint mechanism 3 are reduced as much as possible, and the safety and convenience of butt joint operation are improved.

Other modifications

The specific configuration of the present invention is not limited to the above-described embodiment and modification examples, and various modifications may be made without departing from the scope of the present invention.

One of the key measures for the material supply device to achieve its function is the feeding passage 5 fixed on the surface of the draft tube 10, and the structure of the main body components outside the furnace body 7, such as the feeding mechanism 4, the guiding passage 2, the storing mechanism 1, etc., can be optimized and improved differently from the present embodiment. In another embodiment, the storing mechanism 1 may not include the material controlling body 1033, or may avoid other precise material controlling methods, for example, the charging barrel 101 may be provided with a mechanism for controlling the amount of the falling material. This makes it possible to reduce at least the height of the magazine 1.

A doping device is installed at a proper position of the material guiding passage 2, and the doping device can place the dopant in the material guiding passage 2 in a reasonable manner, and the dopant is conveyed to the interior of the furnace body 7 along with the external material. In addition, the structure and function of the material guiding passage 2 can also be realized by other modes, for example, a conveying belt, a vibrator and other devices are adopted to convey materials to the docking mechanism 3, and meanwhile, the accurate control of the blanking amount can also be realized.

An intelligent control system is arranged on the movable lifting platform 6, and through the intelligent control system, the self-adaptive butt joint of the material guide passage 2 and the butt joint mechanism 3 can be realized, the remote control can be realized, and an enlightening idea is provided for the intelligent charging of the single crystal furnace.

The material supply device can also be applied to different internal structures of the furnace body 7, in particular to crucibles 11 with different structures. The crucible 11 shown in FIG. 5 is generally referred to as a normal crucible, and with the normal crucible shown in FIG. 5, the single crystal silicon rod 9 can be charged by the material supply means only when it is lifted to the proper position A by the pulling means 8, and continuous pulling in the true sense is not achieved. If the common crucible is replaced by a double crucible, or a quartz glass crucible with a weir structure, and the material supply device is modified appropriately, for example, the arrangement position or structure of the feeding passage 5 is adjusted, it also falls within the protection scope of the present invention.

Example 2

This embodiment provides a crystal growth system comprising at least a furnace body 7, and a crucible 11 installed inside the furnace body 7. The crucible 11 is used for containing the external material as described above, and the external material is melted into a liquid state in the crucible 11. In particular, such a crystal growth system also comprises the above-mentioned material supply device, which, as a whole, delivers a controlled amount of external material to the crucible 11.

Claims

1. Material supply device, characterized in that the device is used for supplying materials into a crucible (11) inside a furnace body (7), the device comprises a storage mechanism (1), a feeding mechanism (4) and a feeding passage (5), the storage mechanism (1) comprises a material barrel (101) and a material control body (1033), the material barrel (101) is used for containing materials and is provided with a discharge hole, the material control body (1033) is arranged on the material barrel (101) and can move relative to the discharge hole of the material barrel (101), the materials contained in the material barrel (101) leave the material barrel (101) from the gap between the discharge hole of the material barrel (101) and the material control body (1033), the feeding mechanism (4) is provided with a feeding passage (43) for inputting the materials from the outside of the furnace body (7) to the inside of the furnace body (7), the feeding passage (5) is arranged inside the furnace body (7) and is opposite to the crucible (11), the feeding passage (43) is butted with the feeding passage (5), and materials are guided into the feeding passage (5) through the feeding passage (43) and are input into the crucible (11) through the feeding passage (5);

the material control body (1033) is suspended at the discharge port of the charging barrel (101) and can be jointed with and far away from the discharge port of the charging barrel (101); the material control body (1033) is matched with the discharge hole of the charging barrel (101) in shape, and the size of the bottom surface of the material control body (1033) is not smaller than that of the discharge hole of the charging barrel (101);

the material control body (1033) is connected with a traction rope (1032), and the traction rope (1032) penetrates through the material barrel (101) and is connected with a traction power part (1031) installed outside the material barrel (101);

the material control body (1033) is a cone or a circular truncated cone, the discharge hole of the charging barrel (101) is cylindrical, and the diameter of the bottom surface of the cone or the circular truncated cone is not smaller than that of the discharge hole of the charging barrel (101);

the device is characterized by further comprising a material guide mechanism, wherein the material guide mechanism is arranged between the material storage mechanism (1) and the feeding mechanism (4) and used for guiding materials in the material storage mechanism (1) into a feeding passage (43) of the feeding mechanism in an airtight state, the material guide mechanism comprises a material guide passage (2), the material guide passage (2) is a tubular passage which is obliquely arranged, and the materials in the material guide passage (2) move to the feeding mechanism (4) through the dead weight of the materials; the device is characterized by further comprising a butt joint mechanism (3), wherein the butt joint mechanism (3) is arranged between the guide passage (2) and the feeding mechanism (4) and used for guiding the materials in the guide passage (2) into a feeding passage (43) of the feeding mechanism (4) in an airtight state;

the butt joint mechanism (3) comprises a butt joint material guide pipe (35) and a butt joint corrugated pipe (31) which are sequentially connected and communicated, the butt joint material guide pipe (35) is positioned at the upstream of the butt joint corrugated pipe (31), the upstream end of the butt joint material guide pipe (35) is in butt joint with the material guide passage (2), and the downstream end of the butt joint corrugated pipe (31) is connected with an isolation valve (13) at the upstream end of the material feeding passage (43);

the butt joint material guide pipe (35) and the butt joint corrugated pipe (31) are internally provided with a butt joint material discharge pipe (33), the upstream end of the butt joint material discharge pipe (33) is in butt joint with the material guide passage (2), and the downstream end of the butt joint material discharge pipe (33) can pass through the isolating valve (13) to be communicated with the feeding passage (43).

2. The material supply device according to claim 1, wherein the furnace body (7) is further provided with a guide cylinder (10) inside, the guide cylinder (10) is installed above the crucible (11), and the feeding passage (5) is arranged inside or outside the guide cylinder (10) or inserted into the guide cylinder (10) and extends above the crucible (11).

3. The material supply device according to claim 2, characterized in that the feeding path (5) is arranged inside the guide shell (10), the feeding path (5) being held on the surface of the guide shell (10) by a feeding block (54).

4. The material supply device according to claim 2 or 3, characterized in that the feeding path (5) comprises a feeding inlet upstream and a feeding outlet downstream thereof, a feeding funnel (53) is arranged at the feeding inlet of the feeding path (5), the feeding path (43) is in butt joint with the feeding funnel (53), and the feeding outlet of the feeding path (5) is close to the crucible (11).

5. The material supply apparatus according to claim 1, wherein the furnace body (7) has an opening thereon, the feed passage (43) communicates with the furnace body (7) through the opening, the feed passage (43) includes opposite upstream and downstream ends, the upstream end is located outside the furnace body (7) and provided with an isolation valve (13), the downstream end extends or retracts inside the furnace body (7), and the isolation valve (13) maintains the feed passage (43) and the furnace body (7) in an airtight state.

6. The material supply apparatus according to claim 5, wherein the feeding mechanism (4) is installed outside the furnace body (7) and is butted against an opening of the furnace body (7), and a portion of the feeding path (43) outside the furnace body (7) is received in the feeding mechanism (4).

7. The material supply device according to claim 6, characterized in that a bellows is arranged outside the opening of the furnace body (7), and the feeding mechanism (4) is butted with the opening of the furnace body (7) through the bellows.

8. The material supply device according to claim 7, characterized in that the feeding mechanism (4) has a feeding lifting device (45), the feeding lifting device (45) being used for effecting an extension or retraction of the feeding path (43) relative to the charging path (5).

9. The material supply device as claimed in claim 8, wherein a feeding path fixing sleeve (42) is arranged outside the feeding path (43), the feeding path fixing sleeve (42) is connected with the feeding lifting device (45), and the feeding path (43) and the feeding path fixing sleeve (42) move along with the feeding lifting device (45).

10. The material supply device according to claim 1, wherein the material guiding mechanism further comprises a material guiding cylinder (104), the material guiding cylinder (104) is installed below the material barrel (101) and at least the discharge port of the material barrel (101) extends into the interior of the material guiding cylinder (104), and the material guiding passage (2) is communicated with the material guiding cylinder (104) and is located at the downstream of the material guiding cylinder (104).

11. The material supply device according to claim 10, wherein a plurality of vent holes (105) are formed at the connection between the charging barrel (101) and the guiding barrel (104).

12. The material supply device according to claim 1, wherein the docking mechanism (3) further comprises a docking limiting device (32), and the docking limiting device (32) is mounted outside the docking guide pipe (35) and the docking corrugated pipe (31) and used for limiting the telescopic deformation of the docking corrugated pipe (31).

13. The material supply device according to claim 1, further comprising a mobile lifting platform (6), characterized in that the mobile lifting platform (6) is at least used for carrying the magazine mechanism (1) and changing the position of the magazine mechanism (1) relative to the furnace body (7).

14. A crystal growth system, comprising:

a furnace body (7);

the crucible (11), the said crucible (11) is set up in the furnace body (7), is used for containing the supplies; and

the material supply device as claimed in any of claims 1 to 13, which delivers a controlled amount of material to the crucible (11).