CN116067626A - Rapid calibration device and method for aspheric mirror detection optical axis - Google Patents
Rapid calibration device and method for aspheric mirror detection optical axis Download PDFInfo
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- CN116067626A CN116067626A CN202310136775.0A CN202310136775A CN116067626A CN 116067626 A CN116067626 A CN 116067626A CN 202310136775 A CN202310136775 A CN 202310136775A CN 116067626 A CN116067626 A CN 116067626A
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- 238000001514 detection method Methods 0.000 title claims abstract description 35
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- 241000282326 Felis catus Species 0.000 claims description 9
- 239000000725 suspension Substances 0.000 claims description 2
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- 238000004026 adhesive bonding Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0221—Testing optical properties by determining the optical axis or position of lenses
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods
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Abstract
The invention discloses a device and a method for rapidly calibrating an optical axis of an aspherical mirror, which solve the problem that an interferometer, a compensator and the aspherical mirror cannot be rapidly and coaxially calibrated in high precision during detection of the aspherical mirror, and specifically comprise the interferometer and the theodolite which are positioned at two sides of the aspherical mirror to be detected and have opposite action ends, and a fixed tool assembly, a compensator assembly, a facula analyzer and a plane reflector which are arranged between the interferometer and the theodolite; the fixed tooling assembly comprises a first lifting frame, a supporting rod, a first cantilever and a second cantilever; the supporting rod is horizontally arranged above the first lifting frame, and the length direction of the supporting rod is parallel to the optical axis of the interferometer; the first cantilever and the second cantilever are respectively and vertically connected to two ends of the supporting rod; the compensator component is arranged on one side of the supporting rod and used for compensating the light path; the light spot analyzer is arranged on the other end of the first cantilever or the other end of the second cantilever; the plane reflecting mirror is arranged on the first cantilever, the second cantilever, the compensator component or the aspherical mirror to be measured.
Description
Technical Field
The invention relates to a device and a method for calibrating an optical axis, in particular to a device and a method for rapidly calibrating an optical axis detected by an aspherical mirror.
Background
In the installation, debugging and detection stage of the aspherical mirror, the surface shape parameter of the aspherical mirror is an important index parameter for ensuring the image quality and the function of the system. The smaller the surface shape is, the better the imaging effect is, the closer the system function index is to the design index requirement, and the better the product quality is.
How to accurately and rapidly obtain the surface shape parameters of the aspherical mirror after processing and the surface shape parameters of the aspherical mirror after gluing are the concerns of the debugging personnel. The existing aspherical mirror is generally provided with a compensator during detection, but when the compensator cannot image an object at infinity, returned light spots cannot appear on the interferometer, so that in the adjustment detection stage, the interferometer, the compensator and the aspherical mirror have eighteen degrees of freedom, and three optical axes cannot be rapidly calibrated coaxially with high precision, so that adjustment detection of the aspherical mirror is time-consuming and laborious.
Disclosure of Invention
The invention aims to provide a device and a method for rapidly calibrating an optical axis of an aspherical mirror, which are used for solving the technical problems that the adjustment and detection of the aspherical mirror are time-consuming and labor-consuming because three optical axes cannot be rapidly calibrated coaxially due to eighteen degrees of freedom of an interferometer, a compensator and the aspherical mirror in the detection of the conventional aspherical mirror.
In order to achieve the above purpose, the present invention provides a rapid calibration device for an aspheric mirror detection optical axis, which is characterized in that: the device comprises an interferometer and a theodolite which are positioned at two sides of an aspherical mirror to be measured and the action ends of which are arranged oppositely, and a fixed tool assembly, a compensator assembly, a facula analyzer and a plane reflector which are arranged between the interferometer and the theodolite;
the fixed tool assembly comprises a first lifting frame, a supporting rod, a first cantilever and a second cantilever;
the supporting rod is horizontally arranged above the first lifting frame, and the length direction of the supporting rod is parallel to the optical axis of the interferometer; the first cantilever is arranged at one end of the supporting rod, which is close to the interferometer, and one end of the first cantilever is vertically connected with the supporting rod while the other end is suspended; the second cantilever is arranged at one end of the supporting rod, which is close to the theodolite, and one end of the second cantilever is vertically connected with the supporting rod while the other end is suspended;
the compensator component is arranged on one side of the supporting rod, is positioned between the interferometer and the aspherical mirror to be tested and is used for optical path compensation, so that light rays emitted by the interferometer can reach the aspherical mirror to be tested through the compensator component and return in the original path;
the other end of the second cantilever, the other end of the first cantilever and the compensator component are all positioned on the same side of the supporting rod;
the light spot analyzer is used for being arranged on the other end of the first cantilever or the other end of the second cantilever;
the plane reflecting mirror is used for being arranged on the first cantilever, the second cantilever, the compensator component or the aspherical mirror to be measured.
Further, in order to improve concentricity of the calibration optical axis, a first notch is arranged at the other end of the first cantilever and used for installing a light spot analyzer;
and a second notch is formed at the other end of the second cantilever and is used for installing a light spot analyzer.
Further, in order to facilitate the position adjustment of the spot analyzer, and simultaneously to make the rapid calibration device more widely used, the support rod comprises a guide rod, a first sliding block and a second sliding block;
the guide rod is provided with a guide groove along the length direction;
the first sliding block and the second sliding block are clamped in the guide groove;
the first cantilever is arranged on the first sliding block;
the second suspension is mounted on the second slider.
Further, to facilitate adjustment of the compensator, the compensator assembly includes a compensator and a first five-dimensional adjustment bracket;
the first five-dimensional adjusting frame is arranged on one side of the supporting rod and is positioned at the center of a connecting line of the interferometer and the theodolite;
the compensator is mounted on the first five-dimensional adjusting frame.
Further, the device also comprises a supporting tool;
the supporting tool comprises a second five-dimensional adjusting frame and a V-shaped block;
the second five-dimensional adjusting frame is arranged between the compensator component and the theodolite;
the V-shaped block is arranged on the second five-dimensional adjusting frame and is used for installing an aspherical mirror to be measured.
Further, at least one second lifting frame is also included;
the second crane is mounted below the interferometer.
Further, the device also comprises a horizontally arranged detection platform;
the first lifting frame, the first five-dimensional adjusting frame, the second lifting frame and the theodolite are all arranged on the detection platform.
Meanwhile, the invention also provides a rapid calibration method for the aspheric mirror detection optical axis, which is characterized in that: the method comprises the following steps:
and 7, adjusting the inclined posture of the aspherical mirror to be measured through a supporting tool, enabling the image reflected by the plane reflecting mirror to coincide with the cross center of the theodolite, enabling light rays emitted by the interferometer to sequentially pass through the compensator and the aspherical mirror to be measured, returning the light rays to the interferometer through the compensator, enabling light spots to be located at the cat eye center position of the interferometer, and completing coaxial calibration of the optical axis.
Further, in step 5: when the compensator component is installed, the distance between the compensator and the interferometer and the aspheric mirror to be measured are measured by the laser range finder, so that the two distances meet the preset value.
The invention has the beneficial effects that:
1. according to the invention, the fixed tool assembly is arranged between the interferometer and the theodolite, the space attitude of the interferometer can be transferred to the theodolite by observing the self-alignment image of the interferometer through the theodolite, the light path between the interferometer and the theodolite is divided into two sections by the compensator, the front-back concentricity of the light of the interferometer through the compensator is ensured by the light spot analyzer, the calibration of the detection optical axis of the aspherical mirror is carried out, and the light paths which are divided into sections are connected together rapidly, so that the coaxial calibration of eighteen degrees of freedom optical axes of the interferometer, the compensator and the aspherical mirror is carried out rapidly and effectively, and the assembly and adjustment time is greatly saved.
2. The invention utilizes the dynamic debugging of the spot analyzer, adopts an optical method to calibrate the optical axis in the whole process, and has the technical characteristics of simple assembly and debugging detection and high reliability.
3. The invention adopts the mode of the guide rod and the slide block to realize the adjustment of the distance between the first cantilever and the second cantilever, so that the position of the spot analyzer can be adjusted back and forth according to actual conditions during calibration, and the spot analyzer has wide application range.
Drawings
FIG. 1 is a schematic diagram of the structure of steps 1 to 2 in the device and method for rapidly calibrating the optical axis of aspherical mirror detection according to the present invention;
FIG. 2 is a schematic structural diagram of step 4 in the device and method for rapidly calibrating an optical axis of aspherical mirror detection according to the present invention;
FIG. 3 is a schematic structural diagram of step 5 in the apparatus and method for rapidly calibrating an optical axis of aspherical mirror detection according to the present invention;
FIG. 4 is a schematic diagram showing the structure of steps 6 to 7 in the device and method for rapidly calibrating the optical axis of aspherical mirror detection according to the present invention;
fig. 5 is a schematic view of the structure of the support bar according to the present invention.
Reference numerals:
1-interferometer, 11-second lifting frame; 2-theodolite; 3-fixed tool components, 31-first lifting frames, 32-supporting rods, 321-guide rods, 322-first sliding blocks, 323-second sliding blocks, 33-first cantilevers, 331-first gaps, 332-first limiting plates, 34-second cantilevers, 341-second gaps and 342-second limiting plates; 4-compensator assembly, 41-compensator, 42-first five-dimensional tuning frame; 5-a light spot analyzer; 6-plane mirrors; 7-an aspherical mirror to be measured; 8-supporting a tool, 81-a second five-dimensional adjusting frame and 82-V-shaped blocks; 9-a detection platform; 10-standard spherical lens and 12-mandrel.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to fall within the scope of the invention.
A rapid calibration device for an aspheric mirror detection optical axis is used for detecting surface shape parameters of an aspheric mirror 7 to be detected. Referring to fig. 1-5, the rapid calibration device comprises an interferometer 1 and a theodolite 2 which are positioned at two sides of an aspherical mirror 7 to be measured and the action ends of which are arranged oppositely, and a fixed tool assembly 3, a compensator assembly 4, a facula analyzer 5, a plane mirror 6, a supporting tool 8 and a detection platform 9 which are arranged between the interferometer 1 and the theodolite 2;
at least one second lifting frame 11 is arranged below the interferometer 1, and the interferometer 1 can be provided with a standard plane lens and a standard spherical lens 10;
the fixed tooling assembly 3 comprises a first lifting frame 31, a supporting rod 32, a first cantilever 33 and a second cantilever 34;
the supporting rod 32 is horizontally arranged above the first lifting frame 31, and the length direction of the supporting rod 32 is parallel to the optical axis of the interferometer 1; the support bar 32 comprises a guide rod 321, a first slider 322 and a second slider 323; the guide groove on the guide rod 321 is arranged along the length direction; the first slider 322 and the second slider 323 are clamped in the guide groove;
the first cantilever 33 is provided at one end of the support bar 32 near the interferometer 1, and the first cantilever 33 is perpendicular to the support bar 32; one end of the first cantilever 33 is arranged on the first sliding block 322, and the other end is suspended; the other end of the first cantilever 33 is provided with a first notch 331; the second cantilever 34 is arranged at one end of the supporting rod 32 close to the theodolite 2, the second cantilever 34 is vertical to the supporting rod 32, one end of the second cantilever 34 is arranged on the second sliding block 323, and the other end of the second cantilever is suspended; a second notch 341 is arranged at the other end of the second cantilever 34; the first notch 331 and the second notch 341 are used for installing the spot analyzer 5; the compensator component 4 is arranged on one side of the supporting rod 32 and is positioned between the interferometer 1 and the aspherical mirror 7 to be measured and used for optical path compensation, so that light rays emitted by the interferometer 1 can reach the aspherical mirror 7 to be measured through the compensator component 4 and return in an original path; specifically, the compensator assembly 4 includes a compensator 41 and a first five-dimensional adjustment frame 42; the first five-dimensional adjusting frame 42 is arranged on one side of the supporting rod 32 and is positioned at the center of a connecting line of the interferometer 1 and the theodolite 2; the compensator 41 is mounted on a first five-dimensional adjustment frame 42. The other end of the second cantilever 34, the other end of the first cantilever 33, and the compensator assembly 4 are all located on the same side of the support rod (32). The spot analyzer 5 is mounted on the other end of the first cantilever 33 or the other end of the second cantilever 34; the planar mirror 6 is adapted to be mounted on the first cantilever 33/the second cantilever 34/the compensator assembly 4/the aspherical mirror 7 to be measured.
The support tool 8 comprises a second five-dimensional adjusting frame 81 and a V-shaped block 82; the second five-dimensional adjusting frame 81 is arranged between the compensator component 4 and the theodolite 2; the V-shaped block 82 is mounted on the second five-dimensional adjusting frame 81, and the V-shaped block 82 is used for mounting the aspherical mirror 7 to be measured.
The first lifting frame 31, the first five-dimensional adjusting frame 42, the second five-dimensional adjusting frame 81, the second lifting frame 11 and the theodolite 2 are all arranged on the detection platform 9.
The rapid calibration device can utilize the theodolite 2 and the facula analyzer 5 to monitor the optical axis center in real time, can visually realize dynamic adjustment, greatly shortens the adjustment time, improves the adjustment efficiency and has higher precision.
The specific calibration method comprises the following steps:
if the image reflected by the plane mirror 6 is located at the center of the cross of the theodolite 2, executing step 6;
if the image reflected by the plane mirror 6 deviates from the cross center of the theodolite 2, the inclined posture of the compensator 41 is adjusted again through the first five-dimensional adjusting frame 42 until the image reflected by the plane mirror 6 is positioned at the cross center of the theodolite 2, and then the step 6 is executed;
and 7, adjusting the inclined posture of the aspherical mirror 7 to be tested through the supporting tool 8, enabling the image reflected by the plane reflecting mirror 6 to coincide with the cross center of the theodolite 2, enabling light rays emitted by the interferometer 1 to sequentially pass through the compensator 41 and the aspherical mirror 7 to be tested, returning the light rays to the interferometer 1 through the compensator 41, enabling light spots to be located at the cat eye center position of the interferometer 1, and completing coaxial calibration of the optical axis.
The quick calibration device provided by the invention can also be used for bare mirror framing detection, if the bare mirror framing detection is performed, the mandrel 12 is required to be installed for the aspheric mirror 7 to be detected, and then the plane reflecting mirror 6 is installed on the end face of the mandrel 12, which is close to one end of the theodolite 2.
The foregoing is merely illustrative of specific embodiments of the present invention, and the scope of the present invention is not limited thereto, but any changes or substitutions within the technical scope of the present invention should be covered by the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (9)
1. The utility model provides a quick calibration device of aspheric mirror detection optical axis which characterized in that: the device comprises an interferometer (1) and a theodolite (2) which are positioned at two sides of an aspherical mirror (7) to be measured and the action ends of which are arranged oppositely, and a fixed tool assembly (3), a compensator assembly (4), a facula analyzer (5) and a plane reflector (6) which are arranged between the interferometer (1) and the theodolite (2);
the fixed tool assembly (3) comprises a first lifting frame (31), a supporting rod (32), a first cantilever (33) and a second cantilever (34);
the supporting rod (32) is horizontally arranged above the first lifting frame (31), and the length direction of the supporting rod (32) is parallel to the optical axis of the interferometer (1); the first cantilever (33) is arranged at one end of the supporting rod (32) close to the interferometer (1), one end of the first cantilever (33) is vertically connected with the supporting rod (32), and the other end of the first cantilever is suspended; the second cantilever (34) is arranged at one end of the supporting rod (32) close to the theodolite (2), one end of the second cantilever (34) is vertically connected with the supporting rod (32), and the other end of the second cantilever is suspended;
the compensator component (4) is arranged on one side of the supporting rod (32) and is positioned between the interferometer (1) and the aspherical mirror (7) to be tested and used for optical path compensation, so that light rays emitted by the interferometer (1) can reach the aspherical mirror (7) to be tested through the compensator component (4) and return in the original path;
the other end of the second cantilever (34), the other end of the first cantilever (33) and the compensator component (4) are all positioned on the same side of the supporting rod (32);
the light spot analyzer (5) is used for being arranged on the other end of the first cantilever (33) or the other end of the second cantilever (34);
the plane reflecting mirror (6) is used for being arranged on the first cantilever (33), the second cantilever (34), the compensator component (4) or the aspherical mirror (7) to be measured.
2. The device for rapidly calibrating an optical axis of aspherical mirror inspection according to claim 1, wherein: a first notch (331) is formed at the other end of the first cantilever (33) and is used for installing a light spot analyzer (5);
the other end of the second cantilever (34) is provided with a second notch (341) for installing the light spot analyzer (5).
3. The device for rapidly calibrating an optical axis for aspheric mirror detection according to claim 1 or 2, wherein: the support rod (32) comprises a guide rod (321), a first sliding block (322) and a second sliding block (323);
the guide rod (321) is provided with a guide groove along the length direction;
the first sliding block (322) and the second sliding block (323) are clamped in the guide groove;
the first cantilever (33) is arranged on the first sliding block (322);
the second suspension (34) is mounted on a second slider (323).
4. A rapid calibration device for an aspherical mirror detection optical axis according to claim 3, wherein: the compensator assembly (4) comprises a compensator (41) and a first five-dimensional adjustment frame (42);
the first five-dimensional adjusting frame (42) is arranged on one side of the supporting rod (32) and is positioned at the center of a connecting line of the interferometer (1) and the theodolite (2);
the compensator (41) is mounted on a first five-dimensional adjustment frame (42).
5. The device for rapidly calibrating an optical axis for aspheric mirror detection according to claim 4, wherein: the device also comprises a supporting tool (8);
the supporting tool (8) comprises a second five-dimensional adjusting frame (81) and a V-shaped block (82);
the second five-dimensional adjusting frame (81) is arranged between the compensator component (4) and the theodolite (2);
the V-shaped block (82) is arranged on the second five-dimensional adjusting frame (81), and the V-shaped block (82) is used for installing an aspherical mirror (7) to be measured.
6. The device for rapidly calibrating an optical axis for aspheric mirror detection according to claim 5, wherein: also comprises at least one second lifting frame (11);
the second lifting frame (11) is arranged below the interferometer (1).
7. The device for rapidly calibrating an optical axis for aspheric mirror detection of claim 6, wherein: the device also comprises a horizontally arranged detection platform (9);
the first lifting frame (31), the first five-dimensional adjusting frame (42), the second five-dimensional adjusting frame (81), the second lifting frame (11) and the theodolite (2) are all arranged on the detection platform (9).
8. The rapid calibration method for the aspheric mirror detection optical axis is characterized by comprising the following steps of:
step 1, installing a standard plane lens on an interferometer (1), adjusting the interferometer (1) to enable a light spot of the standard plane lens to be located at the center of a cat eye of the interferometer (1), adjusting a theodolite (2) to be at the ground level, then performing self-alignment on the standard plane lens, transferring the posture of the interferometer (1) onto the theodolite (2), and removing the standard plane lens;
step 2, arranging a first lifting frame (31) and a supporting rod (32) between an interferometer (1) and a theodolite (2), mounting a first cantilever (33) on the supporting rod (32), mounting a plane reflecting mirror (6) on the back of the first cantilever (33), adjusting the position and the posture of the first cantilever (33) so that an image reflected by the plane reflecting mirror (6) falls at the cross center of the theodolite (2), and removing the plane reflecting mirror (6); the back is the side opposite to the theodolite (2);
step 3, mounting a second cantilever (34) on the support rod (32), mounting a plane reflecting mirror (6) on the back of the second cantilever (34), and adjusting the position and the posture of the second cantilever (34) to enable an image reflected by the plane reflecting mirror (6) to fall on the cross center of the theodolite (2), and removing the plane reflecting mirror (6);
step 4, installing a standard spherical lens (10) on the interferometer (1), adjusting the interferometer (1) to enable a light spot of the standard spherical lens (10) to be located at the center of a cat eye of the interferometer (1), installing a light spot analyzer (5) on the first cantilever (33), enabling a light sensitive surface of the light spot analyzer (5) to be opposite to a focus of the standard spherical lens (10), and removing the light spot analyzer (5) after recording the center of the focus;
step 5, installing the compensator component (4) on one side of the supporting rod (32), installing the plane reflecting mirror (6) on the end surface of the compensator (41) opposite to the theodolite (2), installing the light spot analyzer (5) on the second cantilever (34), enabling the light sensitive surface of the light spot analyzer (5) to be opposite to the focus of the standard spherical lens (10), and adjusting the compensator (41) until the focus position measured by the light spot analyzer (5) again is the same as the focus position recorded in the step 4, and simultaneously meeting the condition that the image reflected by the plane reflecting mirror (6) is positioned at the cross center of the theodolite (2);
step 6, removing the plane reflecting mirror (6), removing the light spot analyzer (5), the first lifting frame (31) and the supporting rod (32), installing the supporting tool (8), installing the aspheric mirror (7) to be tested on the supporting tool (8), and installing the plane reflecting mirror (6) on the back of the aspheric mirror (7) to be tested;
and 7, adjusting the inclined posture of the aspherical mirror (7) to be measured through a supporting tool (8), enabling an image reflected by the plane reflecting mirror (6) to coincide with the cross center of the theodolite (2), enabling light rays emitted by the interferometer (1) to sequentially pass through the compensator (41) and the aspherical mirror (7) to be measured, returning the light rays to the interferometer (1) through the compensator (41), and enabling light spots to be located at the center position of a cat eye of the interferometer (1) to complete coaxial calibration of an optical axis.
9. The method for rapid calibration of an aspherical mirror detection optical axis of claim 8, wherein in step 5: when the compensator component (4) is installed, the distance between the compensator (41) and the interferometer (1) and the aspheric mirror (7) to be measured are measured by adopting the laser range finder, so that the two distances meet the preset value.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310136775.0A CN116067626A (en) | 2023-02-20 | 2023-02-20 | Rapid calibration device and method for aspheric mirror detection optical axis |
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| CN202310136775.0A CN116067626A (en) | 2023-02-20 | 2023-02-20 | Rapid calibration device and method for aspheric mirror detection optical axis |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116539283A (en) * | 2023-07-06 | 2023-08-04 | 长春通视光电技术股份有限公司 | Double-reflecting-surface composite mirror optical axis deviation detection system and detection method |
-
2023
- 2023-02-20 CN CN202310136775.0A patent/CN116067626A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116539283A (en) * | 2023-07-06 | 2023-08-04 | 长春通视光电技术股份有限公司 | Double-reflecting-surface composite mirror optical axis deviation detection system and detection method |
| CN116539283B (en) * | 2023-07-06 | 2023-09-12 | 长春通视光电技术股份有限公司 | Double-reflecting-surface composite mirror optical axis deviation detection system and detection method |
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