CN116357593A

CN116357593A - Multi-flow-port molecular pump with adjustable flow port

Info

Publication number: CN116357593A
Application number: CN202211518936.4A
Authority: CN
Inventors: 张�浩; 李兵; 李赏
Original assignee: Kyky Technology Co ltd
Current assignee: Kyky Technology Co ltd
Priority date: 2022-11-30
Filing date: 2022-11-30
Publication date: 2023-06-30

Abstract

The invention relates to a multi-flow-port molecular pump with an adjustable flow port, which comprises a base, a pump shell and a dragging stage part, wherein the pump shell is detachably connected or rotatably connected on the base; the dragging stage part is arranged in the pump shell, the dragging stage part comprises a dragging stage stator which is cylindrical, a plurality of first flow openings are axially arranged on the peripheral wall of the dragging stage stator at intervals, the first flow openings are distributed in a staggered mode in the circumferential direction of the dragging stage stator, a first communication opening is formed in the pump shell, the first communication opening is a strip-shaped opening which can cover all the first flow openings in the axial direction of the dragging stage stator, and the dragging stage stator is suitable for being communicated with any one of the first flow openings through rotating the pump shell. Through adopting above-mentioned design, in the use, can be according to the demand rotatory pump case of actual operating mode make the intercommunication mouth on it correspond with the target flow mouth, realize selecting the adjustment to the flow mouth of different positions and performance, the regulation mode is simple convenient, need not to reprocess the assembly in pump case and the pump, uses manpower and materials sparingly.

Description

Multi-flow-port molecular pump with adjustable flow port

Technical Field

The invention relates to the technical field of molecular pumps, in particular to a multi-flow-port molecular pump with an adjustable flow port.

Background

With the rapid development of molecular pumps in the industries of semiconductors, industrial coating and the like, the application of molecular pumps is becoming more and more common. The molecular pump is a vacuum pump which uses a rotor rotating at a high speed to transfer momentum to gas molecules to obtain directional speed, so that the gas molecules are compressed and driven to an exhaust port to be pumped out for a front stage. The specific working principle of the molecular pump is as follows: before use, vacuum is pumped, gas enters through the inlet of the molecular pump, moves under the drive of the movable sheet and the static sheet of the molecular pump, and finally is discharged through the front-stage opening. The molecular pump is provided with flow ports, and the flow ports arranged at different positions enable the pumping speed and the compression ratio of the vacuum pump to be different. At present, the multi-flow-port molecular pump is widely applied in the scientific research field and the mass spectrum field, and the flow port position requirements of the multi-flow-port molecular pump are different to a certain extent according to different working environments.

In the multi-flow-port molecular pump in the prior art, one set of pump shell can only correspond to one set of flow ports with performance, when the parts of the multi-flow-port molecular pump are processed, the positions of the flow ports are fixed, and the performance of each flow port of the multi-flow-port pump is determined. When adapting to different performance requirements, the original molecular pump needs to be disassembled, the shell and corresponding parts in the multi-flow port pump are reprocessed, and then the newly processed parts are assembled into a new pump. The above processing and assembling processes are repeated for each flow port adjustment, so that time is wasted, materials are wasted, and the repeated disassembly and assembly cause certain damage to the precise molecular pump.

Disclosure of Invention

Therefore, the technical problem to be solved by the invention is to overcome the defects that the molecular pump is damaged while time and materials are wasted because parts are disassembled and reprocessed when the position of the flow port of the multi-flow port molecular pump in the prior art is required to be adjusted, so that the multi-flow port molecular pump with the adjustable flow port is provided.

In order to solve the above problems, the present invention provides a multi-flow port molecular pump with an adjustable flow port, comprising:

a base;

a pump housing detachably connected or rotatably connected to the base, the pump housing having a rotation state rotatable with respect to the base and a fixed state held at a set position;

the dragging stage part is arranged in the pump shell and comprises a dragging stage stator which is cylindrical, a plurality of first flow openings are axially arranged on the peripheral wall of the dragging stage stator at intervals, the first flow openings are distributed in a staggered mode in the circumferential direction of the dragging stage stator, a first communication opening is formed in the pump shell and can cover strip-shaped openings of all the first flow openings in the axial direction of the dragging stage stator, and the dragging stage stator is suitable for being communicated with any one of the first flow openings by rotating the pump shell.

Optionally, the pump casing is detachably connected and fixed on the base, and is suitable for enabling the first communication port to be communicated with a preset first flow port by disassembling the pump casing and the base to rotate the pump casing;

the base is provided with a first connecting structure which is suitable for being connected with the pump shell, and the bottom of the pump shell is provided with a second connecting structure which is suitable for being detachably connected with the first connecting structure; the first connecting structures and/or the second connecting structures are arranged at intervals along the circumferential direction, and the interval angles of the first connecting structures and/or the second connecting structures in the circumferential direction are matched with the interval angles of the first flow openings in the circumferential direction.

Optionally, the first connecting structure includes at least two first screw holes symmetrically opened on the base;

the second connecting structure comprises a plurality of second screw holes which are formed at intervals along the circumferential direction of the bottom connecting end surface of the pump shell;

the first screw hole is a through stepped through hole, and the second screw hole is a threaded counter bore.

Optionally, the pump case includes casing and lower casing, lower casing detachable connection or swivelling joint are between base and last casing, drag in the level portion locates lower casing, first flow opening is seted up on lower casing, the multiport molecular pump still includes:

the blade stage part comprises multistage isolating rings which are arranged in the upper shell and are sequentially arranged along the axial direction of the upper shell, each isolating ring is provided with a second flow port, and the second flow ports on the isolating rings are distributed in a staggered manner in the circumferential direction;

the pump shell is provided with a second communication port, the second communication port is a strip-shaped opening which can cover the second flow ports on all the isolating rings in the axial direction of the pump shell, and the second communication port is communicated with the second flow port on any isolating ring by rotating the upper shell.

Optionally, the upper casing is detachably connected and fixed on the lower casing, and is suitable for rotating the upper casing by disassembling the upper casing and the lower casing, so that the second communication port can be communicated with a preset second flow port;

the bottom of the upper shell is provided with a third connecting structure suitable for being connected with the lower shell, the top of the lower shell is provided with a fourth connecting structure suitable for being detachably connected with the third connecting structure, the third connecting structure and/or the fourth connecting structure are a plurality of connecting structures arranged at intervals along the circumferential direction, and the interval angle of the first connecting structure and/or the second connecting structure in the circumferential direction is matched with the interval angle of the second flow openings in the circumferential direction.

Optionally, the third connecting structure includes a plurality of third screw holes that are arranged at intervals along the circumferential direction of the upper housing;

the fourth connecting structure comprises at least two fourth screw holes symmetrically formed on the upper connecting end surface of the lower shell;

the third screw hole is a through stepped through hole, and the fourth screw hole is a threaded counter bore.

Optionally, the plurality of first flow ports are uniformly spaced along the circumferential direction of the drag stage stator, the plurality of second connection structures are uniformly spaced at the top of the lower shell, and the spacing angle of the first flow ports is an integer multiple of the spacing angle of the second connection structures;

and/or, a plurality of second flow ports are uniformly arranged at intervals along the circumferential direction of the dragging stage stator, the number of fourth connecting structures is a plurality of, the fourth connecting structures are uniformly arranged at intervals at the top of the lower shell, and the interval angle of the second flow ports is an integer multiple of the interval angle of the fourth connecting structures.

Optionally, a first sealing structure for sealing a fit gap between the lower shell and the base is arranged between the lower shell and the base;

and/or a second sealing structure for sealing a fit gap between the upper shell and the lower shell is arranged between the upper shell and the lower shell.

Optionally, a plurality of screw holes adapted to be connected to the outlet end of the external air inlet device are provided on the outer wall of the lower casing located at the outer periphery of the first communication port and the upper casing located at the outer periphery of the second communication port at intervals.

And/or sealing grooves are respectively formed on the outer wall of the lower shell positioned at the periphery of the first communication port and the upper shell positioned at the periphery of the second communication port, and elastic sealing rings are respectively filled in the sealing grooves.

Optionally, the opening width of the plurality of first flow openings is larger than the opening width of the first communication holes;

and/or the opening width of the plurality of second flow openings is larger than the opening width of the second communication holes.

The invention has the following advantages:

1. according to the technical scheme, the plurality of first flow ports are formed in the dragging stage stator at intervals along the axial direction, the first communication ports are formed in the pump shell, when the pumping speed and the compression ratio of the vacuum pump are required to be adjusted, the first flow ports corresponding to the pumping speed and the compression ratio after adjustment are selected, the pump shell is rotated to enable the first communication ports to be communicated with the first flow ports, and then the pump shell is fixed on the base, so that on the basis of the same molecular pump, different flow ports are selected to adapt to actual working condition requirements, the pump shell can be rotated according to the requirements of the actual working conditions to enable the communication ports on the pump shell to correspond to the target flow ports, the selective adjustment of the flow ports at different positions and performances is achieved, the adjustment mode is simple and convenient, the pump shell and the inner stator of the pump do not need to be reprocessed and assembled, molecular pump damage caused by disassembly is avoided, and manpower and material resources are saved.

2. By utilizing the technical scheme of the invention, when the pump shell is required to be fixed on the base, the pump shell is rotated to enable the first communication port to be communicated with the first flow port with corresponding performance, the first screw hole is opposite to the second screw hole, the screw penetrates through the first screw hole and is fixed in the second screw hole, the stepped through hole limits the end cap of the screw, and the screw fixes the position of the pump shell, so that the pump shell can be disassembled and assembled immediately, and the positioning convenience of the pump shell is ensured.

3. According to the technical scheme, the second fluid ports are formed in the isolating rings which are sequentially arranged along the axial direction, the second communication ports are formed in the upper shell, when the pumping speed and the compression ratio of the vacuum pump are required to be adjusted, the second fluid ports corresponding to the pumping speed and the compression ratio after adjustment are selected, the upper shell is rotated to enable the second communication ports to be communicated with the second fluid ports, and then the upper shell is fixed on the lower shell, so that the multi-performance adjustment of the vacuum pump is realized, the fixed state of the upper shell is only required to be canceled for different performances, the second communication ports are rotated to be communicated with the corresponding second fluid ports for realizing the performances, the adjustment is convenient, the molecular pump is not required to be reprocessed and assembled, and the manpower and material resources are saved.

4. By utilizing the technical scheme of the invention, when the upper shell is required to be fixed on the lower shell, the upper shell is rotated to enable the second communication port to be communicated with the second flow port with corresponding performance, the third screw hole is opposite to the fourth screw hole, the screw penetrates through the third screw hole and is fixed in the fourth screw hole, the stepped through hole limits the end cap of the screw, and the screw fixes the position of the upper shell, so that the upper shell is disassembled and assembled immediately, and the positioning convenience of the upper shell is ensured.

5. By utilizing the technical scheme of the invention, the first sealing structure arranged between the lower shell and the base and the second sealing structure arranged between the upper shell and the lower shell improve the overall tightness of the molecular pump, and avoid the influence of air leakage on the normal operation of the molecular pump after vacuumizing.

6. By utilizing the technical scheme of the invention, the external air inlet device is arranged on the pump shell through the screw hole, and the elastic sealing ring improves the sealing of the joint of the external air inlet device and the molecular pump and improves the overall tightness of the molecular pump.

7. By utilizing the technical scheme of the invention, when the communication port rotates to be communicated with the flow port, the angle of the actual ventilation width of the flow port and the opening width of the communication port are required to be carefully adjusted before the pump shell is positioned, the opening width of the flow port is larger than the opening width of the communication port, the adjustment allowance of the positioning of the pump shell is increased, the positioning error of the pump shell is reduced, the maximum ventilation capacity of the flow port can still be ensured by fixing the position of the pump shell in partial deviation, and the ventilation efficiency is ensured.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.

FIG. 1 shows a schematic diagram of the overall structure of a molecular pump;

FIG. 2 shows a schematic structural diagram of the internal structure of a molecular pump;

FIG. 3 is a cross-sectional view showing the positional relationship among the first connection structure, the second connection structure, the third connection structure, and the fourth connection structure;

FIG. 4 shows a top view of a molecular pump;

fig. 5 shows a cross-sectional view of the lower housing and the base at the connection location.

Reference numerals illustrate: 1. a base; 2. a pump housing; 21. a lower housing; 211. a first communication port; 22. an upper housing; 221. a second communication port; 3. a drag stage; 31. a drag stage stator; 311. a first flow port; 4. a first connection structure; 5. a second connection structure; 6. a blade stage; 61. a spacer ring; 611. a second flow port; 7. a third connection structure; 8. a fourth connection structure; 9. and an elastic sealing ring.

Detailed Description

The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.

In addition, the technical features of the different embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.

As shown in fig. 1 to 5, the embodiment of the present application provides a multi-flow port molecular pump with an adjustable flow port, which includes a base 1, a pump housing 2, and a drag stage 3, wherein the pump housing 2 is detachably connected or rotatably connected to the base 1, and the pump housing 2 has a rotating state capable of rotating relative to the base 1 and a fixed state maintained at a set position; the drag stage part 3 is arranged in the pump shell 2, the drag stage part 3 comprises a drag stage stator 31 which is cylindrical, a plurality of first flow openings 311 are axially arranged on the peripheral wall of the drag stage stator 31 at intervals, the first flow openings 311 are distributed in a staggered manner in the circumferential direction of the drag stage stator 31, each first flow opening 311 has different performances, a first communication opening 211 is formed in the pump shell 2, the first communication opening 211 is a strip-shaped opening which can cover all the first flow openings 311 in the axial direction of the drag stage stator 31, and the pump shell 2 is suitable for being rotated to enable the first communication opening 211 to be communicated with any first flow opening 311.

The plurality of first flow ports 311 are formed in the dragging stage stator 31 at intervals along the axial direction, the first flow ports 211 are formed in the pump shell 2, when the pumping speed and the compression ratio of the vacuum pump are required to be adjusted, the first flow ports 311 corresponding to the pumping speed and the compression ratio after adjustment are selected, the pump shell 2 is rotated to enable the first flow ports 211 to be communicated with the first flow ports 311, then the pump shell 2 is fixed on the base 1, the purpose that on the basis of the same molecular pump, different flow ports are selected to adapt to actual working condition requirements is achieved, the pump shell 2 can be rotated according to the requirements of the actual working conditions to enable the flow ports on the pump shell 2 to correspond to target flow ports, the purpose that the flow ports at different positions and the performances are selected and adjusted is achieved, the adjusting mode is simple and convenient, the pump shell 2 and the pump inner stator are not required to be reprocessed and assembled, the damage of the molecular pump caused by disassembly is avoided, and manpower and material resources are saved.

Further, in one embodiment of the above-mentioned aspect, the pump casing 2 may be detachably connected by a connection structure such as a screw or a buckle, and when the position of the first flow port 311 that is turned on is desired to be adjusted, the pump casing 2 is detached from the base 1, so that the pump casing 2 is in a rotatable state relative to the base 1, and when the first flow port 211 on the pump casing 2 is adjusted to a position corresponding to the first flow port 311 that is the target, the pump casing 2 is fixed to the base 1, so that the pump casing 2 is stably maintained at the position. In another embodiment, the pump housing 2 is rotatably and hermetically connected to the base 1, the base 1 can be driven to rotate by a driving mechanism, a damping mechanism or a positioning mechanism is further arranged between the pump housing 2 and the base 1, and when the pump housing 2 rotates to a position where the first communication port 211 corresponds to the first flow port 311 of the target, the pump housing 2 is kept at the preset position by the damping mechanism or the positioning mechanism.

For cost reasons, in this embodiment, it is preferable that the pump housing 2 and the base 1 are connected by the first embodiment described above.

As shown in fig. 1, 2 and 3, the pump housing 2 is detachably connected to the base 1, and is adapted to enable the first communication port 211 to communicate with a preset first fluid port 311 by detaching the pump housing 2 and the base 1 to rotate the pump housing 2; the base 1 is provided with a first connecting structure 4 which is suitable for being connected with the pump shell 2, and the bottom of the pump shell 2 is provided with a second connecting structure 5 which is suitable for being detachably connected with the first connecting structure 4; the first connecting structures 4 and/or the second connecting structures 5 are arranged at intervals along the circumferential direction, and the interval angles of the first connecting structures 4 and/or the second connecting structures 5 in the circumferential direction are matched with the interval angles of the first flow ports 311 in the circumferential direction.

In the above-mentioned aspect, the first connection structure 4 and the second connection structure 5 may be screw connection structures or clip connection structures, and preferably, in order to ensure the connection stability of the base 1 and the pump housing 2, the first connection structure 4 and the second connection structure 5 are both screw connection structures.

As shown in fig. 3, the first connecting structure 4 includes at least two first screw holes symmetrically formed on the base 1; the second connecting structure 5 comprises a plurality of second screw holes which are arranged at intervals along the circumferential direction of the bottom connecting end surface of the pump shell 2; the first screw hole is a through stepped through hole and used for limiting an end cap of a screw to be installed, and the second screw hole is a threaded counter bore.

When the pump shell 2 needs to be fixed on the base 1, the first communication port 211 is communicated with the corresponding performance first flow port 311 by rotating the pump shell 2, the first screw hole is opposite to the second screw hole, the screw penetrates through the first screw hole and is fixed in the second screw hole, the end cap of the screw is limited by the step through hole, the position of the pump shell 2 is fixed by the screw, the purpose of disassembling and assembling the pump shell 2 is achieved, and the positioning convenience of the pump shell 2 is guaranteed.

As shown in fig. 1 and 2, the pump casing 2 includes an upper casing 22 and a lower casing 21, the lower casing 21 is detachably or rotatably connected between the base 1 and the upper casing 22, the drag stage 3 is disposed in the lower casing 21, the first flow port 311 is opened on the lower casing 21, the multi-flow port molecular pump further includes a vane stage 6, including multi-stage isolating rings 61 disposed in the upper casing 22 and sequentially arranged along an axial direction of the upper casing 22, each isolating ring 61 is opened with a second flow port 611, and the second flow ports 611 on the isolating rings 61 are distributed in a staggered manner in a circumferential direction; the pump casing 2 is provided with a second communication port 221, and the second communication port 221 is a strip-shaped opening capable of covering the second flow port 611 on all the isolating rings 61 in the axial direction of the pump casing 2, and is suitable for communicating the second communication port 221 with the second flow port 611 on any isolating ring 61 by rotating the upper casing 22.

The second fluid ports 611 are formed in the isolating rings 61 which are sequentially arranged along the axial direction, the second communication ports 221 are formed in the upper shell 22, when the pumping speed and the compression ratio of the vacuum pump are required to be adjusted, the second fluid ports 611 corresponding to the pumping speed and the compression ratio after adjustment are selected, the upper shell 22 is rotated to enable the second communication ports 221 to be communicated with the second fluid ports 611, and then the upper shell 22 is fixed on the lower shell 21, so that the multi-performance adjustment of the vacuum pump is realized, the fixed state of the upper shell 22 is only required to be canceled for different performances, the second communication ports 221 are required to be rotated to be communicated with the corresponding second fluid ports 611 for realizing the performances, the adjustment is convenient, the reprocessing assembly of the molecular pump is not required, and the manpower and material resources are saved.

Optionally, a standard flange is provided on the top wall of the upper housing 22, and the flange is an air outlet end of the molecular pump, and is connected to subsequent equipment, and the flange is plugged when the molecular pump is not in use, so that dust is prevented from entering the interior.

As shown in fig. 3, 4 and 5, the upper housing 22 is detachably connected to the lower housing 21, and is adapted to enable the second communication port 221 to communicate with a predetermined second flow port 611 by detaching the upper housing 22 and the lower housing 21 to rotate the upper housing 22; the bottom of the upper housing 22 is provided with a third connecting structure 7 adapted to be connected with the lower housing 21, the top of the lower housing 21 is provided with a fourth connecting structure 8 adapted to be detachably connected with the third connecting structure 7, the third connecting structure 7 and/or the fourth connecting structure 8 are a plurality of connecting structures arranged at intervals along the circumferential direction, and the interval angle of the first connecting structure 4 and/or the second connecting structure 5 in the circumferential direction is matched with the interval angle of the second flow ports 611 in the circumferential direction.

As shown in fig. 4 and 5, the third connecting structure 7 includes a plurality of third screw holes formed at intervals along the circumferential direction of the upper case 22; the fourth connecting structure 8 comprises at least two fourth screw holes symmetrically formed on the upper connecting end surface of the lower housing 21; the third screw hole is a through stepped through hole and used for limiting an end cap of a screw to be installed, and the fourth screw hole is a threaded counter bore.

Optionally, the second screw holes and the fourth screw holes are staggered, so that the lower shell 21 can be detachably connected with the base 1 and the upper shell 22 respectively, and the strength of the lower shell 21 is ensured.

When the upper shell 22 needs to be fixed on the lower shell 21, the upper shell 22 is rotated to enable the second communication port 221 to be communicated with the second flow port 611 with corresponding performance, the third screw hole is opposite to the fourth screw hole, the screw penetrates through the third screw hole and is fixed in the fourth screw hole, the stepped through hole limits the end cap of the screw, the screw fixes the position of the upper shell 22, and the positioning convenience of the upper shell 22 is guaranteed.

As shown in fig. 2, a plurality of first flow ports 311 are uniformly spaced along the circumferential direction of the drag stage stator 31, the number of second connection structures 5 is plural, a plurality of second connection structures 5 are uniformly spaced on the top of the lower housing 21, and the spacing angle of the first flow ports 311 is an integer multiple of the spacing angle of the second connection structures 5. For example, the spacing angle between two adjacent first flow openings 311 is 30 degrees, and the spacing angle of the second connection structure 5 may be 5 °, 6 °, 10 °, 15 °, 30 °, and so on.

Preferably, the interval angle of the first flow openings 311 is 1-3 times that of the second connection structure 5.

More preferably, the interval angle of the first flow openings 311 is the same as the interval angle of the second connection structure 5.

Optionally, the plurality of second flow ports 611 are uniformly spaced along the circumferential direction of the drag stage stator 31, the plurality of fourth connection structures 8 are uniformly spaced on the top of the lower housing 21, and the spacing angle of the second flow ports 611 is an integer multiple of the spacing angle of the fourth connection structures 8. For example, the spacing angle between two adjacent second flow openings 611 is 30 degrees, and the spacing angle of the fourth connection structure 8 may be 5 °, 6 °, 10 °, 15 °, 30 °, and so on.

Preferably, the interval angle of the second flow port 611 is 1-3 times that of the fourth connection structure 8.

More preferably, the second flow port 611 is spaced at the same angle as the fourth connection structure 8.

Optionally, the upper housing 22 and the lower housing 21 may be selectively rotated by 18 ° and integer multiple of 18 ° to perform angle adjustment, where the corresponding two circumferentially adjacent first flow openings 311 or two circumferentially adjacent second flow openings 611 are spaced by 18 ° to ensure that the screws are simultaneously connected between the first connection structure 4 and the second connection structure 5 or between the third connection structure 7 and the fourth connection structure 8, so as to ensure that a certain first flow opening 311 is in communication with the first communication opening 211 or a certain second flow opening 611 is in communication with the second communication opening 221.

Optionally, 8

second connection structures

5 and 8 fourth connection structures are respectively provided.

In this embodiment, a driving component composed of a turbine, a pump body and the like is arranged in the base 1, and a driving shaft of the driving component extends into the pump shell 2. The dragging stage stator 31 is fixedly arranged on the base 1, a dragging stage rotor is arranged in the dragging stage stator 31 and is suitable for being connected with a driving shaft, the isolating ring 61 is fixedly arranged above the dragging stage stator 31, the blade stage part further comprises moving sheets arranged on the driving shaft, a layer of static sheets are arranged between two adjacent layers of moving sheets, and the isolating ring 61 is fixedly used for installing the fixed static sheets.

In this solution, a first sealing structure for sealing a fit gap between the lower housing 21 and the base 1 is provided; a second sealing structure for sealing a fit clearance between the upper shell 22 and the lower shell 21 is arranged between the upper shell and the lower shell; the first sealing structure arranged between the lower shell 21 and the base 1 and the second sealing structure arranged between the upper shell 22 and the lower shell 21 improve the overall tightness of the molecular pump, and avoid the influence of air leakage on the normal operation of the molecular pump after vacuumizing.

As shown in fig. 1, a plurality of threaded counter bores suitable for being connected with the outlet end of the external air inlet device are arranged on the outer wall of the lower shell 21 positioned on the periphery of the first communication port 211 and the upper shell 22 positioned on the periphery of the second communication port 221 at intervals; when the molecular pump is in use, the threaded counter bore is connected with an external air inlet device, and when the molecular pump is in an idle state, the threaded counter bore is connected with a plugging component for plugging the first communication port 211 or the second communication port 221, so that dust is prevented from entering the interior.

Optionally, sealing grooves are formed on the outer wall of the lower casing 21 located at the periphery of the first communication port 211 and the upper casing 22 located at the periphery of the second communication port 221, and the sealing grooves are filled with elastic sealing rings 9 respectively; the external air inlet device is arranged on the pump shell 2 through the threaded counter bore, and the elastic sealing ring 9 improves the sealing of the joint of the external air inlet device and the molecular pump and improves the overall tightness of the molecular pump.

As shown in fig. 1 and 2, the opening width of the plurality of first flow openings 311 is larger than the opening width of the first communication holes; the opening width of the second flow openings 611 is larger than the opening width of the second communication holes; when the communication port rotates to be communicated with the flow port, in order to ensure that the actual ventilation width of the flow port is equal to the opening width of the communication port, the angle of the flow port and the opening width of the pump shell 2 need to be carefully adjusted before positioning, the opening width of the flow port is larger than the opening width of the communication port, the positioning adjustment allowance of the pump shell 2 is increased, the positioning error of the pump shell 2 is reduced, the maximum ventilation amount of the flow port can still be ensured due to the position fixing of the pump shell 2 in partial deviation, and ventilation efficiency is ensured.

It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While obvious variations or modifications are contemplated as falling within the scope of the present invention.

Claims

1. A multi-port molecular pump with an adjustable port, comprising:

a base (1);

a pump housing (2) detachably or rotatably connected to the base (1), the pump housing (2) having a rotation state rotatable with respect to the base (1) and a fixed state held at a set position;

drag the level portion (3), set up in pump case (2), drag the level portion (3) including dragging level stator (31) that are the tube-shape, drag and be equipped with a plurality of first mouth (311) along the axial spacing on the perisporium of level stator (31), a plurality of first mouth (311) dislocation distribution each other in the circumferencial direction of dragging level stator (31), first communication port (211) have been seted up on pump case (2), first communication port (211) are in dragging the bar opening that the axial direction of level stator (31) can cover all first mouths (311), are suitable for through rotatory pump case (2) make first communication port (211) and arbitrary first mouth (311) intercommunication.

2. The flow port adjustable multi-flow port molecular pump according to claim 1, wherein the pump housing (2) is detachably connected and fixed to the base (1), and is adapted to enable the first communication port (211) to be communicated with the preset first flow port (311) by detaching the pump housing (2) and the base (1) to rotate the pump housing (2);

the base (1) is provided with a first connecting structure (4) which is suitable for being connected with the pump shell (2), and the bottom of the pump shell (2) is provided with a second connecting structure (5) which is suitable for being detachably connected with the first connecting structure (4); the first connecting structures (4) and/or the second connecting structures (5) are arranged at intervals along the circumferential direction, and the interval angles of the first connecting structures (4) and/or the second connecting structures (5) in the circumferential direction are matched with the interval angles of the first flow openings (311) in the circumferential direction.

3. The flow port adjustable multi-flow port molecular pump according to claim 2, wherein the first connection structure (4) comprises at least two first screw holes symmetrically opened on the base (1);

the second connecting structure (5) comprises a plurality of second screw holes which are formed at intervals along the circumferential direction of the bottom connecting end surface of the pump shell (2);

4. A multi-port molecular pump with an adjustable flow port according to any one of claims 1-3, wherein the pump housing (2) comprises an upper housing (22) and a lower housing (21), the lower housing (21) is detachably or rotatably connected between the base (1) and the upper housing (22), the drag stage (3) is arranged in the lower housing (21), the first port (311) is arranged on the lower housing (21), the multi-port molecular pump further comprises:

the blade stage part (6) comprises a plurality of stages of isolating rings (61) which are arranged in the upper shell (22) and are sequentially arranged along the axial direction of the upper shell (22), each isolating ring (61) is provided with a second flow port (611), and the second flow ports (611) on a plurality of isolating rings (61) are distributed in a staggered manner in the circumferential direction;

the pump shell (2) is provided with a second communication port (221), the second communication port (221) is a strip-shaped opening which can cover second flow ports (611) on all isolating rings (61) in the axial direction of the pump shell (2), and the second communication port (221) is communicated with the second flow ports (611) on any isolating ring (61) by rotating the upper shell (22).

5. The flow port adjustable multi-flow port molecular pump according to claim 4, wherein the upper housing (22) is detachably connected and fixed to the lower housing (21), adapted to enable the second communication port (221) to communicate with the preset second flow port (611) by detaching the upper housing (22) and the lower housing (21) to enable rotation of the upper housing (22);

the bottom of the upper shell (22) is provided with a third connecting structure (7) which is suitable for being connected with the lower shell (21), the top of the lower shell (21) is provided with a fourth connecting structure (8) which is suitable for being detachably connected with the third connecting structure (7), the third connecting structure (7) and/or the fourth connecting structure (8) are a plurality of connecting structures which are arranged at intervals along the circumferential direction, and the interval angle of the first connecting structure (4) and/or the second connecting structure (5) in the circumferential direction is matched with the interval angle of the second flow openings (611) in the circumferential direction.

6. The flow port adjustable multi-flow port molecular pump according to claim 5, wherein the third connection structure (7) comprises a plurality of third screw holes which are arranged at intervals along the circumferential direction of the upper housing (22);

the fourth connecting structure (8) comprises at least two fourth screw holes symmetrically formed on the upper connecting end surface of the lower shell (21);

7. The multi-flow port molecular pump with adjustable flow ports according to claim 5, wherein a plurality of the first flow ports (311) are uniformly spaced along the circumferential direction of the drag stage stator (31), the second connection structures (5) are a plurality of, the second connection structures (5) are uniformly spaced on the top of the lower housing (21), and the spacing angle of the first flow ports (311) is an integer multiple of the spacing angle of the second connection structures (5);

and/or, a plurality of second flow openings (611) are uniformly arranged at intervals along the circumferential direction of the dragging stage stator (31), the number of fourth connecting structures (8) is multiple, the plurality of fourth connecting structures (8) are uniformly arranged at intervals at the top of the lower shell (21), and the interval angle of the second flow openings (611) is an integral multiple of the interval angle of the fourth connecting structures (8).

8. The flow port adjustable multi-flow port molecular pump according to claim 4, characterized in that a first sealing structure for sealing a fit gap between the lower housing (21) and the base (1) is provided;

and/or a second sealing structure for sealing a fit clearance between the upper shell (22) and the lower shell (21) is arranged between the upper shell and the lower shell.

9. The flow port-adjustable multi-flow port molecular pump according to claim 8, wherein a plurality of screw holes adapted to be connected with an outlet end of an external air inlet device are provided on an outer wall of a lower housing (21) located at the outer periphery of the first communication port (211) and on an upper housing (22) located at the outer periphery of the second communication port (221) at intervals;

and/or sealing grooves are respectively formed on the outer wall of the lower shell (21) positioned on the periphery of the first communication port (211) and the upper shell (22) positioned on the periphery of the second communication port (221), and elastic sealing rings (9) are respectively filled in the sealing grooves.

10. The multi-port molecular pump with adjustable flow port according to claim 4, wherein the opening width of the plurality of first flow ports (311) is larger than the opening width of the first communication holes;

and/or, the opening width of the plurality of second flow openings (611) is larger than the opening width of the second communication holes.