CN116313710A - Focusing control method and device, scanning electron microscope and storage medium - Google Patents
Focusing control method and device, scanning electron microscope and storage medium Download PDFInfo
- Publication number
- CN116313710A CN116313710A CN202310318162.9A CN202310318162A CN116313710A CN 116313710 A CN116313710 A CN 116313710A CN 202310318162 A CN202310318162 A CN 202310318162A CN 116313710 A CN116313710 A CN 116313710A
- Authority
- CN
- China
- Prior art keywords
- sub
- region
- focusing
- interest
- area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 54
- 201000009310 astigmatism Diseases 0.000 claims abstract description 55
- 238000004590 computer program Methods 0.000 claims description 10
- 238000010894 electron beam technology Methods 0.000 claims description 7
- 229910000831 Steel Inorganic materials 0.000 claims description 5
- 239000010959 steel Substances 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000004422 calculation algorithm Methods 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 235000019800 disodium phosphate Nutrition 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/21—Means for adjusting the focus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
The embodiment of the application provides a focusing control method, which comprises the following steps: dividing the selected region of interest into at least two sub-regions based on the characteristic information of the surface of the sample to be measured; respectively configuring a corresponding focusing and astigmatic adjusting mode for each sub-area; and shooting the whole region of interest line by line based on the focusing and astigmatism adjusting modes to obtain corresponding images. The embodiment of the application also provides a device for realizing the method, a scanning electron microscope and a storage medium.
Description
Technical Field
The present disclosure relates to the field of electron microscope technologies, and in particular, to a focus control method and apparatus, a scanning electron microscope, and a storage medium.
Background
Most of field emission scanning electron microscopes in the market at present have large-area automatic shooting functions, and when a good scanning electron microscope shoots a large-area sample, focusing, astigmatic and other picture adjustment operations need to be automatically carried out, so that clear images can be expected to be obtained in the shot large-area.
However, currently large area automated shooting can only select a single focus and astigmatism adjustment mode. The single focusing and astigmatic mode is determined according to different types of samples, and for a large-area sample, all samples which cannot be taken care of by the mode often have partial areas which cannot be clearly debugged, the pictures are blurred, and only manual re-shooting work can be carried out subsequently.
Disclosure of Invention
In view of this, it is desirable to provide a focus control method, apparatus, scanning electron microscope, and storage medium that enable a clear image of the entire area to be obtained at the time of scanning imaging of a large area, reducing the re-shooting work.
The technical scheme of the embodiment of the application is realized as follows:
the embodiment of the application provides a focusing control method, which comprises the following steps:
dividing the selected region of interest into at least two sub-regions based on the characteristic information of the surface of the sample to be measured;
respectively configuring a corresponding focusing and astigmatic adjusting mode for each sub-area;
and shooting the whole region of interest line by line based on the focusing and astigmatism adjusting modes to obtain corresponding images.
In this embodiment, the characteristic information of the surface of the sample to be measured includes, but is not limited to, one or more of the following:
height of the steel plate;
a height difference between adjacent regions;
roughness of the surface;
the number of sample features contained;
the extent of electron beam irradiation that can be tolerated.
In this embodiment of the present application, the dividing the selected region of interest into at least two sub-regions based on the characteristic information of the surface of the sample to be measured includes:
analyzing the characteristic information of the surface of the selected region of interest;
dividing partial areas of the feature information in the region of interest, which all meet the same threshold value, into the same subarea; wherein,,
the subareas are as follows: a continuous portion of the region of interest.
In this embodiment of the present application, the manner of respectively configuring the corresponding focusing and astigmatism adjustment for each sub-area includes:
determining characteristic information of each sub-region;
and respectively configuring a corresponding focusing mode and an astigmatic mode for each sub-area based on the characteristic information.
In the embodiment of the application, the focusing mode includes, but is not limited to, one or more of the following:
manually focusing the I Focus by a pile point interpolation method;
autofocus AF;
the means of adjusting astigmatism include, but are not limited to, one or more of the following:
manually adjusting astigmatism I stigXY by a pile point interpolation method;
and automatically adjusting astigmatism ASC.
In this embodiment of the present application, in a case where the region of interest is divided into two sub-regions, i.e., a first sub-region and a second sub-region, the capturing the whole region of interest line by line based on the focusing and astigmatism adjusting manner includes:
shooting the interested region row by row from a preset first row, and calling a focusing mode and an astigmatic mode corresponding to the first sub-region to shoot under the condition that the shot region is determined to be the first sub-region; and under the condition that the shot area is determined to be a second sub-area, calling a focusing mode corresponding to the second sub-area and a mode of adjusting astigmatism to shoot.
The embodiment of the application also provides a focusing control device, which is applied to a scanning electron microscope and comprises:
the region dividing unit is used for dividing the selected region of interest into at least two sub-regions based on the characteristic information of the surface of the sample to be detected;
a configuration unit for configuring a corresponding focusing and astigmatic adjustment mode for each sub-area respectively;
and the image acquisition unit is used for shooting the whole region of interest line by line based on the focusing and astigmatism adjusting modes to obtain corresponding images.
The embodiment of the application also provides a scanning electron microscope, which comprises:
a first processor for dividing the selected region of interest into at least two sub-regions based on the characteristic information of the surface of the sample to be measured; respectively configuring a corresponding focusing and astigmatic adjusting mode for each sub-area;
and the image processor is used for shooting the whole region of interest line by line based on the focusing and astigmatism adjusting modes to obtain corresponding images.
The embodiment of the application also provides a scanning electron microscope, which comprises: a first processor and a first memory for storing a computer program capable of running on the processor,
wherein the first processor is configured to execute the steps of the above method when running the computer program.
The present application also provides a storage medium having stored thereon a computer program which, when executed by a processor, implements the steps of the above method.
The focusing control method, the focusing control device, the scanning electron microscope and the storage medium divide the selected region of interest into at least two sub-regions based on the characteristic information of the surface of the sample to be detected; respectively configuring a corresponding focusing and astigmatic adjusting mode for each sub-area; and shooting the whole region of interest line by line based on the focusing and astigmatism adjusting modes to obtain corresponding images. According to the method and the device for detecting the image of the object, the selected region of interest is divided into the plurality of sub-regions based on the characteristic information of the surface of the object to be detected, and the corresponding focusing and astigmatism adjusting modes are respectively configured for each sub-region, so that shooting requirements of different characteristic regions can be met when the large-area region is scanned and imaged, the whole region can obtain a focused clear image, and the work of re-shooting in the later period is reduced.
Drawings
FIG. 1 is a schematic diagram of a focus control method according to an embodiment of the present application;
fig. 2 is a schematic diagram of overlapping and splicing 4*4 pictures according to an embodiment of the present application;
FIG. 3 is a schematic view of a region of interest division structure according to an embodiment of the present application;
FIG. 4 is a schematic structural diagram of a focus control device according to an embodiment of the present application;
fig. 5 is a schematic structural diagram of a scanning electron microscope according to an embodiment of the present application.
Detailed Description
The present application is described below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be noted that, for convenience of description, only the portions related to the present invention are shown in the drawings. It should be noted that, in the case of no conflict, the embodiments and features in the embodiments may be combined with each other. The present application will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
Example 1
An embodiment of the present application provides a focus control method, as shown in fig. 1, including:
step 101: dividing the selected region of interest into at least two sub-regions based on the characteristic information of the surface of the sample to be measured;
step 102: respectively configuring a corresponding focusing and astigmatic adjusting mode for each sub-area;
step 103: and shooting the whole region of interest line by line based on the focusing and astigmatism adjusting modes to obtain corresponding images.
In practical application, the embodiment of the application can select a region of interest (ROI) on a sample based on the analysis requirement of the sample, and the region can also be called a large-area region, namely a region needing to be integrally photographed and observed.
It is known that large-area region automatic shooting is to automatically scan and image the whole region of interest (ROI) in a large region with extremely high resolution (small region and high pixel resolution) to obtain an ultra-high resolution panoramic mosaic of the whole region of interest (ROI). The panorama jigsaw is formed by splicing a plurality of pictures with small areas and high pixel resolution, the size of an overlapped area between the pictures can be set when shooting (the overlapped area comprises an X direction and a Y direction, the overlapped area is 15% by default, namely 15% of the area of the picture, such as the picture with the pixel size of 8192X 8192 and the pixel size of 4nm, the width of the overlapped area is 1228.8 pixels, the length unit is converted into 4.9152 um), and then splicing and stitching are carried out based on the characteristics in the overlapped area between each picture. (fig. 2 is a schematic diagram of 4*4 picture overlapping and splicing).
In this embodiment, the characteristic information of the surface of the sample to be measured includes, but is not limited to, one or more of the following:
height of the steel plate;
a height difference between adjacent regions;
roughness of the surface;
the number of sample features contained;
the extent of electron beam irradiation that can be tolerated.
In this embodiment of the present application, the dividing the selected region of interest into at least two sub-regions based on the characteristic information of the surface of the sample to be measured includes:
analyzing the characteristic information of the surface of the selected region of interest;
dividing partial areas of the feature information in the region of interest, which all meet the same threshold value, into the same subarea; wherein,,
the subareas are as follows: a continuous portion of the region of interest.
In practical application, as shown in fig. 3, the selected area (1) in the embodiment of the application is an interested area, and as can be seen from fig. 3, the area comprises three sub-areas with different characteristic information, and the height difference exists between the surface height fluctuation (larger roughness) of the sample in the sub-area (2) square frame and the sample in the adjacent peripheral area; samples in the square frames of the subareas (3) are relatively flat (with small roughness and relatively smooth), but the height difference exists between the whole samples and the samples in the peripheral adjacent areas. Therefore, the embodiment of the present application may divide the region of interest (1) into three sub-regions, respectively: the subarea (2), the subarea (3) and the rest partial areas of the subarea (2) and the subarea (3) are removed from the interested area (1).
In this embodiment of the present application, the manner of respectively configuring the corresponding focusing and astigmatism adjustment for each sub-area includes:
determining characteristic information of each sub-region;
and respectively configuring a corresponding focusing mode and an astigmatic mode for each sub-area based on the characteristic information.
Here, corresponding to the three sub-areas shown in fig. 3, the focusing mode which can be selectively configured for the sub-area (2) is IFocus, and the astigmatic mode is I StigXY; the focusing mode of the sub-area (3) is I Focus, and the astigmatic mode is I stigXY; the focusing mode of the selected configuration for the partial region of the region of interest (1) except the subarea (2) and the rest of the subarea (3) is AF, and the astigmatic mode is ASC.
In the embodiment of the application, the focusing mode includes, but is not limited to, one or more of the following:
manually focusing the I Focus by a pile point interpolation method;
autofocus AF;
the means of adjusting astigmatism include, but are not limited to, one or more of the following:
manually adjusting astigmatism I stigXY by a pile point interpolation method;
and automatically adjusting astigmatism ASC.
In the embodiment of the application, the manual focusing of the stake point interpolation method is that an operator needs to insert 4*4 (the number can be increased or decreased according to the size of the ROI) manually focused points in the region of interest (ROI), and the corresponding focusing and astigmatism values are applied to each picture after calculation by an algorithm, so that the focusing operation is not needed for shooting each picture in the follow-up shooting process; the method is suitable for samples with few sample characteristics and/or a small height difference and/or intolerance to electron beam irradiation.
The pile point interpolation method manually adjusts astigmatism I stigXY, an operator is required to insert points with the astigmatism adjusted manually into a region of interest (ROI), and corresponding focusing and astigmatism values are applied to each picture after algorithm calculation; the method is suitable for samples with few sample characteristics and/or a small height difference and/or intolerance to electron beam irradiation.
The automatic focusing AF automatically identifies the characteristics according to the image characteristics acquired in real time, a clear focusing point is found, and an operator can set focusing once for every 5 images (the focusing times can be adjusted according to shooting effects); the method is suitable for samples with multiple characteristics and flat surfaces.
The automatic astigmatism adjusting ASC automatically identifies the characteristics according to the image characteristics acquired in real time, a clear astigmatism adjusting value is found, and an operator can set astigmatism adjusting once for every 5 images (the astigmatism adjusting times can be adjusted according to shooting effects); the method is suitable for samples with multiple characteristics and flat surfaces.
In this embodiment of the present application, in a case where the region of interest is divided into two sub-regions, i.e., a first sub-region and a second sub-region, the capturing the whole region of interest line by line based on the focusing and astigmatism adjusting manner includes:
shooting the interested region row by row from a preset first row, and calling a focusing mode and an astigmatic mode corresponding to the first sub-region to shoot under the condition that the shot region is determined to be the first sub-region; and under the condition that the shot area is determined to be a second sub-area, calling a focusing mode corresponding to the second sub-area and a mode of adjusting astigmatism to shoot.
When the embodiment of the application is actually applied, after the storage path of the sample image is determined, automatic large-area shooting operation can be started, the interested area is shot line by line, the shot area is identified in the shooting process, and if the shot area is a first subarea, a focusing mode corresponding to the first subarea and a mode for adjusting astigmatism are automatically invoked to shoot; if the shot area is a second sub-area, automatically calling a focusing mode corresponding to the second sub-area and a mode of adjusting astigmatism to shoot, and finally obtaining a sample image of the whole region of interest.
According to the method and the device for detecting the image of the object, the selected region of interest is divided into the plurality of sub-regions based on the characteristic information of the surface of the object to be detected, and the corresponding focusing and astigmatism adjusting modes are respectively configured for each sub-region, so that shooting requirements of different characteristic regions can be met when the large-area region is scanned and imaged, the whole region can obtain a focused clear image, and the work of re-shooting in the later period is reduced.
Example two
In order to implement the method of the embodiment of the present application, the embodiment of the present application further provides a focus control device, as shown in fig. 4, where the device is applied to a scanning electron microscope, and includes:
a region dividing unit 401, configured to divide the selected region of interest into at least two sub-regions based on the characteristic information of the surface of the sample to be measured;
a configuration unit 402, configured to configure a corresponding focusing and astigmatism adjusting manner for each sub-area, respectively;
an image acquisition unit 403, configured to take a line-by-line photograph of the whole region of interest based on the focusing and astigmatism-adjusting manner, and obtain a corresponding image.
In this embodiment, the characteristic information of the surface of the sample to be measured includes, but is not limited to, one or more of the following:
height of the steel plate;
a height difference between adjacent regions;
roughness of the surface;
the number of sample features contained;
the extent of electron beam irradiation that can be tolerated.
In this embodiment of the present application, the area dividing unit 401 divides the selected region of interest into at least two sub-areas based on the characteristic information of the surface of the sample to be measured, including:
analyzing the characteristic information of the surface of the selected region of interest;
dividing partial areas of the feature information in the region of interest, which all meet the same threshold value, into the same subarea; wherein,,
the subareas are as follows: a continuous portion of the region of interest.
In this embodiment, the configuration unit 402 configures, for each sub-area, a corresponding focusing and astigmatism adjusting manner, including:
determining characteristic information of each sub-region;
and respectively configuring a corresponding focusing mode and an astigmatic mode for each sub-area based on the characteristic information.
In the embodiment of the application, the focusing mode includes, but is not limited to, one or more of the following:
manually focusing the I Focus by a pile point interpolation method;
autofocus AF;
the means of adjusting astigmatism include, but are not limited to, one or more of the following:
manually adjusting astigmatism I stigXY by a pile point interpolation method;
and automatically adjusting astigmatism ASC.
In this embodiment, in the case where the region of interest is divided into two sub-regions, i.e., a first sub-region and a second sub-region, the image obtaining unit 403 performs line-by-line capturing on the whole region of interest based on the focusing and astigmatism adjusting manner, including:
shooting the interested region row by row from a preset first row, and calling a focusing mode and an astigmatic mode corresponding to the first sub-region to shoot under the condition that the shot region is determined to be the first sub-region; and under the condition that the shot area is determined to be a second sub-area, calling a focusing mode corresponding to the second sub-area and a mode of adjusting astigmatism to shoot.
In practical application, the area dividing unit 401 and the configuration unit 402 may be implemented by a processor in the focus control device; the image acquisition unit 403 may be implemented by an imaging device in a focus control apparatus.
Example III
In order to implement the method of the embodiment of the present application, based on the hardware implementation of the program module, and in order to implement the method of the embodiment of the present application, the embodiment of the present application further provides a scanning electron microscope, as shown in fig. 5, the scanning electron microscope 500 includes:
an image processor 501 capable of performing operations such as acquisition and/or processing of a sample image;
the first processor 502 is connected with the image processor 501 to realize information interaction with the image processor and/or other modules in the scanning electron microscope, and is used for executing the method provided by one or more technical schemes of the scanning electron microscope when running a computer program;
a first memory 503, said computer program being stored on said first memory 503.
Specifically, the first processor 502 is configured to divide the selected region of interest into at least two sub-regions based on the characteristic information of the surface of the sample to be measured; respectively configuring a corresponding focusing and astigmatic adjusting mode for each sub-area;
the image processor 501 is configured to take a line-by-line photograph of the whole region of interest based on the focusing and astigmatism-adjusting manner, and obtain a corresponding image.
In this embodiment, the characteristic information of the surface of the sample to be measured includes, but is not limited to, one or more of the following:
height of the steel plate;
a height difference between adjacent regions;
roughness of the surface;
the number of sample features contained;
the extent of electron beam irradiation that can be tolerated.
In this embodiment, the first processor 502 divides the selected region of interest into at least two sub-regions based on the characteristic information of the surface of the sample to be measured, including:
analyzing the characteristic information of the surface of the selected region of interest;
dividing partial areas of the feature information in the region of interest, which all meet the same threshold value, into the same subarea; wherein,,
the subareas are as follows: a continuous portion of the region of interest.
In this embodiment, the first processor 502 configures, for each sub-area, a corresponding focusing and astigmatism adjusting manner, including:
determining characteristic information of each sub-region;
and respectively configuring a corresponding focusing mode and an astigmatic mode for each sub-area based on the characteristic information.
In the embodiment of the application, the focusing mode includes, but is not limited to, one or more of the following:
manually focusing the I Focus by a pile point interpolation method;
autofocus AF;
the means of adjusting astigmatism include, but are not limited to, one or more of the following:
manually adjusting astigmatism I stigXY by a pile point interpolation method;
and automatically adjusting astigmatism ASC.
In this embodiment, in the case where the region of interest is divided into two sub-regions, i.e., a first sub-region and a second sub-region, the image processor 501 performs line-by-line shooting on the whole region of interest based on the focusing and astigmatism adjusting manner, including:
shooting the interested region row by row from a preset first row, and calling a focusing mode and an astigmatic mode corresponding to the first sub-region to shoot under the condition that the shot region is determined to be the first sub-region; and under the condition that the shot area is determined to be a second sub-area, calling a focusing mode corresponding to the second sub-area and a mode of adjusting astigmatism to shoot.
It should be noted that: the specific processing procedures of the image processor 501 and the first processor 502 may be understood by referring to the above method, and will not be described herein.
Of course, in practice, the various components in the scanning electron microscope 500 are coupled together by a bus system 504. It is to be appreciated that bus system 504 is employed to enable connected communications between these components. The bus system 504 includes a power bus, a control bus, and a status signal bus in addition to the data bus. But for clarity of illustration, the various buses are labeled as bus system 504 in fig. 5.
The first memory 503 in the present embodiment is used to store various types of data to support the operation of the scanning electron microscope 500. Examples of such data include: any computer program for operating on a scanning electron microscope 500.
The method disclosed in the embodiments of the present application may be applied to the first processor 502 or implemented by the first processor 502. The first processor 502 may be an integrated circuit chip with signal processing capabilities. In implementation, the steps of the method may be implemented by integrated logic of hardware in the first processor 502 or instructions in software form. The first processor 502 described above may be a general purpose processor, a digital signal processor (DSP, digital Signal Processor), or other programmable logic device, discrete gate or transistor logic device, discrete hardware components, or the like. The first processor 502 may implement or perform the methods, steps, and logic blocks disclosed in embodiments of the present application. The general purpose processor may be a microprocessor or any conventional processor or the like. The steps of the method disclosed in the embodiments of the present application may be directly embodied in a hardware decoding processor or implemented by a combination of hardware and software modules in the decoding processor. The software module may be located in a storage medium located in the first memory 503, said first processor 502 reading the information in the first memory 503, in combination with its hardware performing the steps of the method described above.
In an exemplary embodiment, the scanning electron microscope 500 may be implemented by one or more application specific integrated circuits (ASIC, application Specific Integrated Circuit), DSPs, programmable logic devices (PLD, programmable Logic Device), complex programmable logic devices (CPLD, complex Programmable Logic Device), field-programmable gate arrays (FPGA, field-Programmable Gate Array), general purpose processors, controllers, microcontrollers (MCU, micro Controller Unit), microprocessors (Microprocessor), or other electronic components for performing the aforementioned methods.
In an exemplary embodiment, the present application further provides a storage medium, i.e. a computer storage medium, in particular a computer readable storage medium, for example comprising a first memory 503 storing a computer program executable by the first processor 502 of the scanning electron microscope 500 for performing the steps of the scanning electron microscope method described above. The computer readable storage medium may be FRAM, ROM, PROM, EPROM, EEPROM, flash Memory, magnetic surface Memory, optical disk, or CD-ROM.
It should be noted that: "first," "second," etc. are used to distinguish similar objects and not necessarily to describe a particular order or sequence.
In addition, the embodiments described in the present application may be arbitrarily combined without any collision.
The foregoing description is only of the preferred embodiments of the present application and is not intended to limit the scope of the present application.
Claims (10)
1. A focus control method, the method comprising:
dividing the selected region of interest into at least two sub-regions based on the characteristic information of the surface of the sample to be measured;
respectively configuring a corresponding focusing and astigmatic adjusting mode for each sub-area;
and shooting the whole region of interest line by line based on the focusing and astigmatism adjusting modes to obtain corresponding images.
2. The method of claim 1, wherein the characteristic information of the surface of the sample to be measured includes, but is not limited to, one or more of the following:
height of the steel plate;
a height difference between adjacent regions;
roughness of the surface;
the number of sample features contained;
the extent of electron beam irradiation that can be tolerated.
3. The method according to claim 1 or 2, wherein the dividing the selected region of interest into at least two sub-regions based on the characteristic information of the surface of the sample to be measured comprises:
analyzing the characteristic information of the surface of the selected region of interest;
dividing partial areas of the feature information in the region of interest, which all meet the same threshold value, into the same subarea; wherein,,
the subareas are as follows: a continuous portion of the region of interest.
4. The method according to claim 1, wherein said configuring the respective focusing and astigmatism adjusting means for each sub-area comprises:
determining characteristic information of each sub-region;
and respectively configuring a corresponding focusing mode and an astigmatic mode for each sub-area based on the characteristic information.
5. The method of claim 1, wherein the focusing means includes, but is not limited to, one or more of the following:
manually focusing IFocus by a pile point interpolation method;
autofocus AF;
the means of adjusting astigmatism include, but are not limited to, one or more of the following:
manually adjusting astigmatism I stigXY by a pile point interpolation method;
and automatically adjusting astigmatism ASC.
6. The method according to claim 1, wherein, in case the region of interest is divided into two sub-regions, a first sub-region and a second sub-region, the capturing the entire region of interest line by line based on the focusing and astigmatism adjusting manner comprises:
shooting the interested region row by row from a preset first row, and calling a focusing mode and an astigmatic mode corresponding to the first sub-region to shoot under the condition that the shot region is determined to be the first sub-region; and under the condition that the shot area is determined to be a second sub-area, calling a focusing mode corresponding to the second sub-area and a mode of adjusting astigmatism to shoot.
7. A focus control device, characterized in that the device is applied to a scanning electron microscope, comprising:
the region dividing unit is used for dividing the selected region of interest into at least two sub-regions based on the characteristic information of the surface of the sample to be detected;
a configuration unit for configuring a corresponding focusing and astigmatic adjustment mode for each sub-area respectively;
and the image acquisition unit is used for shooting the whole region of interest line by line based on the focusing and astigmatism adjusting modes to obtain corresponding images.
8. A scanning electron microscope, comprising:
a first processor for dividing the selected region of interest into at least two sub-regions based on the characteristic information of the surface of the sample to be measured; respectively configuring a corresponding focusing and astigmatic adjusting mode for each sub-area;
and the image processor is used for shooting the whole region of interest line by line based on the focusing and astigmatism adjusting modes to obtain corresponding images.
9. A scanning electron microscope, comprising: a first processor and a first memory for storing a computer program capable of running on the processor,
wherein the first processor is adapted to perform the steps of the method of any of claims 1 to 6 when the computer program is run.
10. A storage medium having stored thereon a computer program, which when executed by a processor performs the steps of the method according to any of claims 1 to 6.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310318162.9A CN116313710A (en) | 2023-03-28 | 2023-03-28 | Focusing control method and device, scanning electron microscope and storage medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310318162.9A CN116313710A (en) | 2023-03-28 | 2023-03-28 | Focusing control method and device, scanning electron microscope and storage medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116313710A true CN116313710A (en) | 2023-06-23 |
Family
ID=86795826
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310318162.9A Pending CN116313710A (en) | 2023-03-28 | 2023-03-28 | Focusing control method and device, scanning electron microscope and storage medium |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116313710A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117665032A (en) * | 2024-02-01 | 2024-03-08 | 国仪量子技术(合肥)股份有限公司 | Scanning method, scanning device, scanning system, storage medium and electronic equipment |
-
2023
- 2023-03-28 CN CN202310318162.9A patent/CN116313710A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117665032A (en) * | 2024-02-01 | 2024-03-08 | 国仪量子技术(合肥)股份有限公司 | Scanning method, scanning device, scanning system, storage medium and electronic equipment |
| CN117665032B (en) * | 2024-02-01 | 2024-05-14 | 国仪量子技术(合肥)股份有限公司 | Scanning method, scanning device, scanning system, storage medium and electronic equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9596407B2 (en) | Imaging device, with blur enhancement | |
| JP5006062B2 (en) | Virtual slide creation device, virtual slide creation method, and virtual slide creation program | |
| CN112415733B (en) | Method, system, device and medium for controlling microscope to shoot sample image | |
| US8340512B2 (en) | Auto focus technique in an image capture device | |
| US20150241686A1 (en) | Imaging device, microscope system, and imaging method | |
| CN112505910B (en) | Method, system, apparatus and medium for taking image of specimen with microscope | |
| JP2016125913A (en) | Image acquisition device and control method of image acquisition device | |
| CN116313710A (en) | Focusing control method and device, scanning electron microscope and storage medium | |
| US7969475B2 (en) | Low memory auto-focus and exposure system for large multi-frame image acquisition | |
| KR102495627B1 (en) | Image stitching in the presence of a full-field reference image | |
| JP3794744B2 (en) | Focusing surface detection method, image input / output device, and optical microscope | |
| JP6742863B2 (en) | Microscope image processing apparatus, method and program | |
| CN110992408B (en) | Digital section processing method and system based on pathological microscope | |
| JP2008098836A (en) | Imaging apparatus and imaging method | |
| RU2647645C1 (en) | Method of eliminating seams when creating panoramic images from video stream of frames in real-time | |
| US11256078B2 (en) | Continuous scanning for localization microscopy | |
| CN111010556B (en) | Method and device for projection bi-directional defocus compensation and readable storage medium | |
| CN115734086A (en) | Image processing method, device and system based on off-screen shooting and storage medium | |
| US20200311893A1 (en) | Image processing apparatus with images having different in-focus positions, image pickup apparatus, image processing method, and computer readable storage medium | |
| JP2016201600A (en) | Image processing apparatus, imaging device, image processing method, image processing program, and storage medium | |
| JPH0670212A (en) | Image processor | |
| KR102674601B1 (en) | Image stitching in the presence of a full field of view reference image | |
| CN114697566B (en) | Zoom lens dark angle compensation method and device, electronic equipment and storage medium | |
| JPH11225291A (en) | Image reader | |
| JP6833772B2 (en) | Image processing equipment, imaging equipment, image processing methods and programs |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |