CN116300050A - Ultra-high precision tilting mirror with stable optical path - Google Patents
Ultra-high precision tilting mirror with stable optical path Download PDFInfo
- Publication number
- CN116300050A CN116300050A CN202310114280.8A CN202310114280A CN116300050A CN 116300050 A CN116300050 A CN 116300050A CN 202310114280 A CN202310114280 A CN 202310114280A CN 116300050 A CN116300050 A CN 116300050A
- Authority
- CN
- China
- Prior art keywords
- optical path
- mirror
- tilting mirror
- driver
- zero
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 63
- 238000006073 displacement reaction Methods 0.000 claims abstract description 33
- 239000000758 substrate Substances 0.000 claims abstract description 10
- 230000000087 stabilizing effect Effects 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 7
- 229920000049 Carbon (fiber) Polymers 0.000 claims description 4
- 239000004917 carbon fiber Substances 0.000 claims description 4
- 230000000694 effects Effects 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 7
- 238000005259 measurement Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/181—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/198—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for adjusting the mirror relative to its support
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Abstract
The invention discloses an ultra-high precision tilting mirror with a stable optical path, which consists of a stable optical path mirror surface (1), a zero expansion supporting component (2), a zero expansion displacement driver (3) and a substrate (4). The rotation center of the zero expansion supporting component (2) is positioned at the light-stabilizing path mirror surface (1), and the linear expansion coefficients of all parts of the ultra-high precision tilting mirror with the light-stabilizing path in the direction of the light-receiving surface are close to zero, so that the change of the light path when the tilting mirror surface deflects is greatly reduced, and the tilting mirror has higher angle deflection execution precision compared with the traditional high precision tilting mirror.
Description
Technical Field
The invention relates to the technical field of ultra-high precision tilting mirrors, in particular to an ultra-high precision tilting mirror with stable optical path.
Background
The mirror surface of the high-speed tilting mirror can complete fast and high-precision tilting motion, and has wide application in various fields. However, in order to pursue excellent dynamic characteristics, the conventional tilting mirror often has a mirror rotation center at the centroid of the mirror assembly, and the optical path is changed due to the inconsistency between the rotation center and the mirror. As shown in fig. 1, in the optical path design, the deflection center of the mirror surface is located on the reflection surface, and when the rotation center is located at the back of the mirror surface, the reflection area can move forward ζ when the mirror surface deflects θ, and the optical path can change due to the forward movement ζ. In addition, the thermal expansion effect is not considered in the component design of the conventional tilting mirror, and in the working environment with large temperature fluctuation, the distance from the mirror surface to the constraint position of the tilting mirror is changed, which also causes the optical path to be changed.
In some ultra-high precision beam pointing applications, such as gravitational wave measurement, the amount of optical path change in the optical path is required to be below nanometers, which places high demands on the stable optical path characteristics of the tilting mirror.
Disclosure of Invention
The invention aims to solve the technical problems that: an ultra-high precision tilting mirror with stable optical path is provided for ultra-high precision beam pointing application. The inclined mirror can make the optical path change amount in the optical path below nanometer through controlling the deflection center of the mirror surface and the thermal design of the components.
The invention adopts the technical scheme that: the utility model provides an ultra-high accuracy tilting mirror of steady optical path, by steady optical path mirror 1, zero inflation supporting component 2, zero inflation displacement driver 3 and basement 4 are constituteed, the optical mirror surface region of steady optical path mirror 1 is located the center concave surface, steady optical path mirror 1 sets up and has still set up the location area of zero inflation supporting component 2, tilting mirror's rotation center is the flexible hinge department of zero inflation supporting component 2, the degree of depth position of accessible control mirror 101 is in the rotation center of control tilting mirror, when tilting mirror's rotation center is located optical mirror surface region department, reach the effect of eliminating the optical path error.
Further, the zero expansion supporting component 2 is composed of a flexible supporting component 201 and a first temperature compensating block 202, the flexible supporting component 201 can complete deflection movement in two orthogonal directions, the rotation center of the deflection movement is located at the notch of the flexible supporting component, the first temperature compensating block 202 is made of materials opposite to the material of the flexible supporting component 201, carbon fibers with customized thermal expansion coefficients are used for customizing the thermal expansion coefficients, the flexible supporting component 201 and the first temperature compensating block 202 are connected together to form the zero expansion supporting component 2, and the thermal expansion coefficient of the zero expansion supporting component 2 in the direction of a light facing surface is as small as possible.
Further, the zero expansion driver 3 is composed of a displacement driver 301 and a second temperature compensation block 302, wherein the displacement driver 301 is a conventional driver of the tilting mirror: the thermal expansion coefficient of the second temperature compensation block 302 is selected from materials opposite to that of the displacement actuator 301, such as carbon fibers with customized thermal expansion coefficients, and the displacement actuator 301 and the second temperature compensation block 302 are connected together to form the zero expansion displacement actuator 2, and the thermal expansion coefficient of the zero expansion displacement actuator 2 in the displacement direction is as small as possible.
Further, the temperature expansion coefficient of the substrate 4 in the direction of the light-facing surface is adapted to the inclined mirror constraint component, so that the displacement of the temperature difference to the stable optical path mirror surface is reduced as much as possible.
The principle of the invention is as follows: an ultra-high precision tilting mirror with stable optical path is composed of a stable optical path mirror surface, a zero expansion supporting component, a zero expansion displacement driver and a substrate.
a. The rotation center is kept on the mirror surface by sinking the reflecting surface of the tilting mirror and moving the supporting component upwards, so that the optical path error caused by the tilting mirror in operation can be reduced by setting the optical path stabilizing mirror surface;
b. the temperature expansion coefficient of the inclined mirror on the light-facing surface is reduced by arranging the temperature compensation block on the support component and the displacement driver, so that the change of the optical path difference of the inclined mirror caused by temperature environment change is reduced;
compared with the prior art, the invention has the following advantages:
(1) The invention adopts the mode of stabilizing the optical path mirror surface, eliminates the optical path error caused by the operation of the inclined mirror, and improves the precision in the optical path of the inclined mirror;
(2) The invention reduces the influence of temperature change on the optical path difference of the inclined mirror by arranging the zero expansion supporting component and the zero expansion driver.
Drawings
FIG. 1 is a schematic diagram of an optical path error and a stable optical path tilting mirror caused by a conventional tilting mirror operation, wherein FIG. 1 (a) is a schematic diagram of an optical path error caused by a conventional tilting mirror operation, and FIG. 1 (b) is a schematic diagram of a stable optical path tilting mirror operation;
FIG. 2 is a schematic diagram of a stable optical path tilting mirror component, wherein 1 is a stable optical path mirror surface, 2 is a zero expansion support assembly, 3 is a zero expansion driver, and 4 is a substrate;
FIG. 3 is a schematic view of an optical path-stabilizing mirror, wherein 1 is an optical path-stabilizing mirror, 101 is a mirror reflection area, and 102 is a support component positioning area;
FIG. 4 is a schematic diagram of a zero expansion support assembly, wherein 2 is a zero expansion support assembly, 201 is a flexible support, and 202 is a temperature compensation block I;
FIG. 5 is a schematic diagram of a zero expansion actuator, wherein 3 is a zero expansion displacement actuator, 301 is a displacement actuator, and 302 is a temperature compensation block two;
fig. 6 is a schematic diagram of an assembled structure of an ultra-high precision tilting mirror with a stable optical path, wherein 1 is a mirror surface with a stable optical path, 101 is a mirror surface reflection area, 102 is a positioning area of a supporting component, 2 is a zero expansion supporting component, 3 is a zero expansion driver, and 4 is a substrate.
Detailed Description
The invention is further described below with reference to the drawings and detailed description.
As shown in fig. 2, the ultra-high precision tilting mirror with stable optical path consists of a stable optical path mirror surface 1, a zero expansion supporting component 2, a zero expansion displacement driver 3 and a substrate 4.
As shown in fig. 3, the optical mirror surface area of the optical path stabilizing mirror surface 1 is located at the central concave surface, the optical path stabilizing mirror surface is further provided with a positioning area of the zero expansion supporting component 2, the depth of the positioning area can be controlled to control the rotation center of the tilting mirror, the rotation center of the tilting mirror is the deformation position of the zero expansion supporting component 2, and when the rotation center is located at the optical mirror surface area, the effect of eliminating optical path errors is achieved.
As shown in fig. 4, the zero expansion support assembly 2 is composed of a flexible support 201 and a first temperature compensation block 202. The flexible support 201 can perform two orthogonal deflection movements, the center of rotation of which is located at the cutout of the flexible support. The first temperature compensation block 202 has a thermal expansion coefficient which is the same as that of the flexible support 201, the flexible support 201 and the first temperature compensation block 202 are connected together to form the zero expansion support assembly 2, and the thermal expansion coefficient of the zero expansion support assembly 2 in the direction of the light-receiving surface is 0.
As shown in fig. 5, the zero expansion displacement driver 3 is composed of a displacement driver 301 and a temperature compensation block two 302. The displacement driver 301 is a conventional driver for tilting mirrors: the thermal expansion coefficient of the second temperature compensation block 302 is the material opposite to that of the displacement driver 301, the displacement driver 301 and the second temperature compensation block 302 are connected together to form a zero expansion displacement driver 3, and the thermal expansion coefficient of the zero expansion displacement driver 3 in the displacement direction is 0.
As shown in fig. 6, the temperature expansion coefficient of the substrate 4 in the direction of the light-receiving surface is adapted to the inclined mirror constraint component, so that the displacement of the temperature difference to the stable optical path mirror surface is reduced as much as possible. Wherein the substrate 4 and the zero expansion supporting component 2 are glued, and the zero expansion supporting component 2 and the stable optical path mirror surface 1 are glued, so as to achieve the purpose of eliminating the connection stress. After assembly, the flexible support 201 should coincide with the specular reflection area 101.
Claims (4)
1. An ultra-high precision tilting mirror with stable optical path is characterized in that: the optical path stabilizing mirror surface comprises an optical path stabilizing mirror surface (1), a zero expansion supporting component (2), a zero expansion displacement driver (3) and a substrate (4), wherein an optical mirror surface area of the optical path stabilizing mirror surface (1) is positioned at a central concave surface, the optical path stabilizing mirror surface (1) is provided with a positioning area of the zero expansion supporting component (2), the rotation center of the tilting mirror is the flexible hinge of the zero expansion supporting component (2), the depth position of the mirror surface (101) is controlled to be at the rotation center of the tilting mirror, and when the rotation center of the tilting mirror is positioned at the optical mirror surface area, the effect of eliminating optical path errors is achieved.
2. The stabilized optical path ultra-high precision tilting mirror of claim 1 wherein: the zero expansion support assembly (2) consists of a flexible support (201) and a first temperature compensation block (202), the flexible support (201) can complete deflection movement in two orthogonal directions, the rotation center of the deflection movement is located at a notch of the flexible support, the first temperature compensation block (202) is made of materials with opposite thermal expansion coefficients, the flexible support (201) is made of carbon fibers with opposite thermal expansion coefficients, the flexible support (201) and the first temperature compensation block (202) are connected together to form the zero expansion support assembly (2), and the thermal expansion coefficients of the zero expansion support assembly (2) in the direction of a light facing surface are as small as possible.
3. The stabilized optical path ultra-high precision tilting mirror of claim 1 wherein: the zero expansion driver (3) consists of a displacement driver (301) and a second temperature compensation block (302), wherein the displacement driver (301) is a conventional driver of the tilting mirror: the piezoelectric ceramic driver or the voice coil motor driver, the thermal expansion coefficient of the second temperature compensation block (302) is selected from materials with opposite materials of the displacement driver (301), such as carbon fibers with customized thermal expansion coefficients, the displacement driver (301) and the second temperature compensation block (302) are connected together to form a zero expansion displacement driver (3), and the thermal expansion coefficient of the zero expansion displacement driver (3) in the displacement direction is as small as possible.
4. The stabilized optical path ultra-high precision tilting mirror of claim 1 wherein: the temperature expansion coefficient of the substrate (4) in the direction of the light-facing surface is matched with the inclined mirror constraint component, so that the displacement of the temperature difference to the stable optical path mirror surface is reduced as much as possible.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310114280.8A CN116300050A (en) | 2023-02-15 | 2023-02-15 | Ultra-high precision tilting mirror with stable optical path |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310114280.8A CN116300050A (en) | 2023-02-15 | 2023-02-15 | Ultra-high precision tilting mirror with stable optical path |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116300050A true CN116300050A (en) | 2023-06-23 |
Family
ID=86827862
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310114280.8A Pending CN116300050A (en) | 2023-02-15 | 2023-02-15 | Ultra-high precision tilting mirror with stable optical path |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116300050A (en) |
-
2023
- 2023-02-15 CN CN202310114280.8A patent/CN116300050A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7009752B1 (en) | Actively-supported multi-degree of freedom steerable mirror apparatus and method | |
| US6170367B1 (en) | Single-point flexure toric contact lens forming machine and method | |
| CN100376361C (en) | Small two-dimensional de-coupling platforms | |
| Sweeney et al. | Design considerations for fast-steering mirrors (FSMs) | |
| US11342864B2 (en) | Three-degrees-of-freedom angle adjustment device driven by piezoelectric ceramics and adjusting method thereof | |
| CN105403999B (en) | Two-dimensional rapid control reflector and its control system based on PSD feedbacks | |
| CN101488371A (en) | Precise positioning platform with six freedom of motion | |
| JP3972001B2 (en) | Ultra-precision positioning system | |
| US4875764A (en) | Assembly for correction of distortions of a mirror | |
| JPH0760191B2 (en) | Precision positioning device | |
| GB2176336A (en) | Ring laser gyro path-length control | |
| US20200240778A1 (en) | Motion measurement method and motion measurement system | |
| US20140061420A1 (en) | Slit Diaphragm Flexure | |
| CN109239908A (en) | The support device of autocollimator under a kind of extreme temperature environment | |
| CN110065926B (en) | Two-degree-of-freedom scott-russell flexible micro-nano positioning platform | |
| CN116300050A (en) | Ultra-high precision tilting mirror with stable optical path | |
| JP2000338430A (en) | Mirror tilting mechanism | |
| US20040149067A1 (en) | Ultra-precision feeding apparatus | |
| CN110346929A (en) | A kind of super large angle stroke tilting mirror based on series connection enlarger | |
| JPH032810A (en) | High range and resolution defining mount and positioning device | |
| US5101301A (en) | High-accuracy traveling table apparatus | |
| CN110361827B (en) | Control method for reducing coupling of X axis and Y axis in two-axis quick reflector | |
| JPH07178689A (en) | Getting-out-of position measuring method for robot arm, and getting-out-of position correcting method and system for this robot arm | |
| CN114578504A (en) | Reaction force-free quick reflecting mirror based on flexible support | |
| US11598953B2 (en) | Devices for thermally actuating deformable mirror, and associated manufacturing methods |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |