CN110346929A - A kind of super large angle stroke tilting mirror based on series connection enlarger - Google Patents
A kind of super large angle stroke tilting mirror based on series connection enlarger Download PDFInfo
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- CN110346929A CN110346929A CN201910738025.4A CN201910738025A CN110346929A CN 110346929 A CN110346929 A CN 110346929A CN 201910738025 A CN201910738025 A CN 201910738025A CN 110346929 A CN110346929 A CN 110346929A
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- China
- Prior art keywords
- enlarger
- series connection
- driving unit
- tilting mirror
- mirror
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
The invention discloses a kind of super large angle stroke tilting mirrors based on series connection enlarger, and the tilting mirror is by mirror surface, microscope base, connector, connect enlarger driving unit and pedestal composition.Connecting enlarger driving unit can will be more than the displacement equations decades of times of piezoelectric ceramic actuator or magnetostriction materials driver.Multi-way control signals can synchronize or respectively drive driver, and control mirror surface deflects output beam according to target direction, and this tilting mirror can realize the light beam deflection of high-precision, big angle stroke (1 ° of >).
Description
Technical field
The present invention relates to the technical field of adaptive optics tilting mirror, especially a kind of super large based on series connection enlarger
Angle stroke tilting mirror.
Background technique
The advantages that piezoelectric ceramics tilting mirror is by its high-precision, high resolution and fast-response, is widely used in astronomical prestige
The application fields such as remote mirror, laser beam control.However, traditional tilting mirror path increment based on piezoelectric ceramics only has some tens of pm,
Thus, smaller by the inclination pitch-angle stroke of Piezoelectric Ceramic, generally only 5 μ rad are hereinafter, can only be inclined for lesser light beam
Shifting amount is controlled.But practical optical axis control amount demand is often larger, such as: large telescope observation system, due to systematic optical axis
The influence of error and atmospheric turbulance factor, it is even higher that optical axis total drift amount commonly reaches μ rad up to a hundred, therefore, common realization
Method is to correct tilting mirror grading control using multiple optical axises, forms rough tracking, the links such as essence tracking, on the one hand this way increases
The complexity of system is added, simultaneously as introducing multi-disc mirror, the efficiency of light energy utilization and system use for also reducing system can
By property.
Certainly, there is also the biggish tilting mirrors of stroke, such as the big stroke tilting mirror based on voice coil motor, although this inclination
Mirror can provide the optical axis control of higher row journey, but this tilting mirror generally requires and carries out interior closed-loop control, and interior closed loop itself
It is easy to be influenced by environmental factor, such as the interior closed loop based on current vortex is easy by outside electromagnetic interference, and capacitive interior closed loop is then
It is easy influenced by ambient temperature.
Summary of the invention
The object of the present invention is to provide a kind of big angle stroke tilting mirror regarding to the issue above, the present invention utilizes N number of flexibility
Stroke, is only had the driving unit of the displacement equations decades of times of the driver of some tens of pm, solved by displacement amplifying mechanism series connection
The lesser problem of associated ramp pitch-angle stroke.
The purpose of the invention will be achieved through the following technical solutions: it is a kind of based on series connection enlarger super large angle row
Journey tilting mirror, the tilting mirror is by mirror surface 1, microscope base 2, flexible head 3, connect enlarger driving unit 4 and the composition of substrate 5；
The assembling mode of the tilting mirror is: mirror surface 1 and microscope base 2 are glued, and 3 one end screw of microscope base 2 and 4 flexible head is connect；Each
The other end of flexible head 3 is connect with each 4 screw of series connection enlarger driving unit, each series connection enlarger driving unit 4
The other end connect with base screw；Wherein 4 series connection enlarger driving units 4 and Orthogonal Symmetric are fixed on substrate 5, should
The working principle of tilting mirror is to control signal to respectively drive each high-speed driver 401 connected in enlarger driving unit 4,
The displacement of high-speed driver 401 generates straight-line displacement after being concatenated displacement amplifying mechanism amplification, is turned straight-line displacement by flexible head 3
It is changed to yaw motion, finally makes 1 run-off the straight campaign of mirror surface, to achieve the purpose that control incident beam beat direction.
Wherein, the series connection enlarger driving unit 4 is connected in series using N number of bridge type flexible displacement amplifying mechanism,
Bridge-type displacement amplifying mechanism and 401 both ends of high-speed driver are cementing, and the displacement equations ratio of bridge-type displacement amplifying mechanism is answered with rigidity
It is adjusted according to actual demand.
Wherein, placing can be used piezoelectric material or magnetic with the high-speed driver for connecting enlarger driving unit 4
Cause telescopic material.
The principle of the invention lies in: a kind of super large angle stroke tilting mirror based on series connection enlarger, the tilting mirror include
One mirror surface, a microscope base, four converters and four series connection enlarger driving units and a pedestal composition；Institute
The substrate that pedestal is entire tilting mirror is stated, the reaction force of series connection enlarger driving unit is subjected in tilting mirror work,
It is made of one piece of preferable metal plate of rigidity；Four orthogonal fixations of series connection enlarger driving unit on a metal plate, each string
Join the stroke of enlarger driving unit up to 1mm or more；It is respectively and fixedly provided with flexible head on each series connection enlarger driving unit,
The straight-line displacement for enlarger driving unit of connecting can be converted to deflection angle by flexible head；Four flexible heads are fixed with microscope base, work
Microscope base directly bears the driving force of driving unit during work, and microscope base should use the biggish material of specific stiffness, the poor mirror of rigidity
Seat meeting stress deformation causes mirror shape to be deteriorated, and preponderance can lead to the reduction of tilting mirror resonance frequency because load is larger；Reflection
Mirror surface is cementing on microscope base, and mirror surface is the working face of entire tilting mirror, basic load of the mirror surface as tilting mirror, just
Degree and weight also Ying Shizhong.
Further, the series connection enlarger driving unit is composed in series by a bridge-type enlarger of N (N >=2)；Individually
The stroke of piezoelectric ceramic actuator can be amplified 7~10 times by bridge-type enlarger, therefore enlarger driving unit of connecting can incite somebody to action
The displacement equations decades of times of piezoelectric ceramic actuator；The rigidity of bridge-type enlarger is inversely proportional with amplification factor, and designer answers root
According to the moderate bridge-type enlarger of actual demand selection amplification factor, as shown in Fig. 2, bridge-type enlarger uses triangle amplification
Principle, mechanism structure is compact higher resonant frequency and good dynamic characteristic, is widely used as precision actuation in recent years
Amplifier mechanism in system.
Further, related compliant mechanism or gimbal structure can be used in the converter, due to inclination pitch-angle stroke compared with
Greatly, it should be ensured that dependency structure has enough work deflection angles, and associated drives unit is avoided to damage.
Control signal is exported to be amplified to high-voltage amplifier, and piezoelectric ceramic actuator generates position after obtaining enough voltage
It moves, is concatenated enlarger for displacement equations decades of times, straight-line displacement caused by driving unit passes through converter again makes microscope base
Deflection is generated with mirror surface.
The inclination pitch-angle stroke that the present invention solves dependent piezoelectric ceramic driving in such a way that enlarger is concatenated is small
Problem.
The advantages of the present invention over the prior art are that:
(1), related big angle stroke tilting mirror is voice coil motor driving, and this kind of tilting mirror can not be electromagnetically shielded poor ring
It works under border, the present invention is compared with there is better environmental suitability.
(2), piezoelectric ceramic actuator can work independently in the present invention, therefore have better angular resolution compared with similar tilting mirror
Power.
Just attached drawing in conjunction with the embodiments below, the embodiment of the present invention is described in further detail, so that of the invention
Technical solution is more readily understood, grasps.
Detailed description of the invention
Fig. 1 is big angle stroke tilting mirror structural schematic diagram；
Fig. 2 is bridge-type enlarger schematic diagram；
Fig. 3 is series connection enlarger distribution schematic diagram；
Fig. 4 series connection enlarger structural scheme of mechanism；
In figure: 1 is mirror surface, and 2 be microscope base, and 3 be flexible head, and 4 be series connection enlarger driving unit, and 401 be high speed
Driver, 5 be substrate.
Specific embodiment
Label and specific embodiment further illustrate the present invention with reference to the accompanying drawing.
A kind of super large angle stroke tilting mirror based on series connection enlarger of the present embodiment, as shown in Figure 1 to 4.
All components of the present embodiment are as shown in Figure 1.Mirror surface 1 is cementing on microscope base 2, microscope base 2 and 4 flexible head 3
It is fixedly connected, the flexible head 3 in this example is big flexibility dumbbell shape flexible hinge.Flexible head 3 is fixed on series connection enlarger and drives
On moving cell 4,44 omnidirectional distributions of series connection enlarger driving unit are on substrate 5.
The working principle of the tilting mirror is: control signal is exported to high-voltage amplifier, high-voltage amplifier driving series connection amplification
Mechanism driving unit 4 does straight-line displacement, and straight-line displacement is converted to deflection angle by flexible head 3, and mirror surface 1 follows flexible head 3 to generate partially
Transhipment is dynamic.
The series connection enlarger driving unit 4 is made of 3 bridge-type enlargers.It can in the bridge-type enlarger
Place high-speed driver 401.High-speed driver 401 is piezoelectric ceramics or magnetostriction materials.
The present invention with series connection enlarger driving unit solve conventional piezoelectric ceramics or magnetostriction materials driving incline
The small problem of oblique pitch-angle stroke, also solves the problem that voice coil motor drive incline mirror environment adapts to difference.
Still there are many embodiment, all technical solutions using equivalence replacement mode, in protection of the invention by the present invention
Within the scope of.
Claims (3)
1. a kind of super large angle stroke tilting mirror based on series voltage ceramics, it is characterised in that: the tilting mirror is by mirror surface
(1), microscope base (2), flexible head (3), connects enlarger driving unit (4) and substrate (5) forms；The assembling mode of the tilting mirror
Be: mirror surface (1) and microscope base (2) are glued, and microscope base (2) is connect with 4 flexible head (3) one end screws；Each flexible head (3)
The other end is connect with each series connection enlarger driving unit (4) screw, each the another of enlarger driving unit (4) that connect
End is connect with base screw；Wherein 4 series connection enlarger driving units (4) and Orthogonal Symmetric are fixed on substrate (5), this inclines
The working principle of oblique mirror is to control signal to respectively drive each high-speed driver connected in enlarger driving unit (4)
(401), high-speed driver (401) displacement generates straight-line displacement after being concatenated displacement amplifying mechanism amplification, will by flexible head (3)
Straight-line displacement is converted to yaw motion, finally makes mirror surface (1) run-off the straight campaign, to reach control incident beam beat
The purpose in direction.
2. super large angle stroke tilting mirror according to claim 1, it is characterised in that: the series connection enlarger drives single
First (4) are connected in series using N number of bridge type flexible displacement amplifying mechanism, bridge-type displacement amplifying mechanism and high-speed driver (401) two
Hold cementing, displacement equations ratio and the rigidity of bridge-type displacement amplifying mechanism should be adjusted according to actual demand.
3. super large angle stroke tilting mirror according to claim 2, it is characterised in that: place and driven with the enlarger of connecting
Piezoelectric material or magnetostriction materials can be used in the high-speed driver of moving cell (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910738025.4A CN110346929A (en) | 2019-08-12 | 2019-08-12 | A kind of super large angle stroke tilting mirror based on series connection enlarger |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910738025.4A CN110346929A (en) | 2019-08-12 | 2019-08-12 | A kind of super large angle stroke tilting mirror based on series connection enlarger |
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| Publication Number | Publication Date |
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| CN110346929A true CN110346929A (en) | 2019-10-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910738025.4A Pending CN110346929A (en) | 2019-08-12 | 2019-08-12 | A kind of super large angle stroke tilting mirror based on series connection enlarger |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113777775A (en) * | 2021-08-24 | 2021-12-10 | 西安交通大学 | High-reliability piezoelectric directional adjusting mechanism and implementation method thereof |
| CN114967115A (en) * | 2022-04-27 | 2022-08-30 | 中国科学院西安光学精密机械研究所 | Large-stroke phase-shifting scanning device based on voice coil motor drive |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012210092A (en) * | 2011-03-30 | 2012-10-25 | Fujifilm Corp | Piezoelectric actuator, capacity-variable capacitor and light deflection element |
| CN104793333A (en) * | 2015-04-29 | 2015-07-22 | 中国科学院光电技术研究所 | Large stroke high-speed multi-stage drive inclined mirror |
| CN106788271A (en) * | 2016-11-22 | 2017-05-31 | 哈尔滨工业大学 | Two grades of bridge amplifiers of hybrid hinge formula that a kind of rigidity is strengthened |
-
2019
- 2019-08-12 CN CN201910738025.4A patent/CN110346929A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012210092A (en) * | 2011-03-30 | 2012-10-25 | Fujifilm Corp | Piezoelectric actuator, capacity-variable capacitor and light deflection element |
| CN104793333A (en) * | 2015-04-29 | 2015-07-22 | 中国科学院光电技术研究所 | Large stroke high-speed multi-stage drive inclined mirror |
| CN106788271A (en) * | 2016-11-22 | 2017-05-31 | 哈尔滨工业大学 | Two grades of bridge amplifiers of hybrid hinge formula that a kind of rigidity is strengthened |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113777775A (en) * | 2021-08-24 | 2021-12-10 | 西安交通大学 | High-reliability piezoelectric directional adjusting mechanism and implementation method thereof |
| CN113777775B (en) * | 2021-08-24 | 2022-06-21 | 西安交通大学 | High-reliability piezoelectric pointing adjusting mechanism and implementation method thereof |
| CN114967115A (en) * | 2022-04-27 | 2022-08-30 | 中国科学院西安光学精密机械研究所 | Large-stroke phase-shifting scanning device based on voice coil motor drive |
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