CN116266062B - Temperature control equipment - Google Patents
Temperature control equipment Download PDFInfo
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- CN116266062B CN116266062B CN202111552553.4A CN202111552553A CN116266062B CN 116266062 B CN116266062 B CN 116266062B CN 202111552553 A CN202111552553 A CN 202111552553A CN 116266062 B CN116266062 B CN 116266062B
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- 239000007788 liquid Substances 0.000 claims abstract description 142
- 230000007246 mechanism Effects 0.000 claims abstract description 90
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 39
- 238000005057 refrigeration Methods 0.000 claims abstract description 34
- 230000001502 supplementing effect Effects 0.000 claims abstract description 19
- 238000001816 cooling Methods 0.000 claims abstract description 7
- 239000000110 cooling liquid Substances 0.000 claims description 22
- 238000005086 pumping Methods 0.000 claims description 2
- 239000012530 fluid Substances 0.000 description 16
- 238000001802 infusion Methods 0.000 description 10
- 238000005530 etching Methods 0.000 description 5
- 230000001276 controlling effect Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000013589 supplement Substances 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 241000282414 Homo sapiens Species 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/20—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
- Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Devices That Are Associated With Refrigeration Equipment (AREA)
Abstract
The invention discloses temperature control equipment, which aims at the problem of troublesome disassembly and assembly of the existing temperature control device and provides the following technical scheme that the temperature control equipment comprises a main support, a refrigeration cycle mechanism for cooling circulating liquid, a water circulation mechanism for conveying the circulating liquid and controlling the temperature of an external device, and an electric control mechanism for electrically controlling the refrigeration cycle mechanism and the water circulation mechanism, wherein the water circulation mechanism and the refrigeration cycle mechanism are connected through a connecting pipe and fixedly connected with the main support, the independent disassembly and assembly of the water circulation mechanism and the refrigeration cycle mechanism are convenient, the electric control mechanism is fixed at the top of the main support and electrically connected with the water circulation mechanism and the refrigeration cycle mechanism, the water circulation mechanism comprises a liquid supplementing box for exhausting and supplementing liquid, and a three-way valve, and the independent disassembly and assembly of the liquid supplementing box can be realized through controlling the three-way valve.
Description
Technical Field
The present invention relates to a temperature control apparatus, and more particularly, to a temperature control device.
Background
Since the birth of semiconductors, the production and the life of human beings are changed to a great extent, and the semiconductors are widely applied to the fields of communication, networks, automatic remote sensing and national defense science and technology besides the field of computing junctions. Among them, etching process is an important part of semiconductor processing, and etching (etching) is a technique of removing a material using a chemical reaction or physical impact. Etching technology can be divided into wet etching (wet etching) and dry etching (dry etching), and different etching processes have different requirements on temperature, so that higher requirements are put on temperature control equipment, the structure of the current temperature control equipment is complex, and the current temperature control equipment is inconvenient to disassemble during maintenance and is a big problem facing the current time.
Currently, chinese patent application No. 201110247640.9 discloses a temperature control device, which includes a refrigeration device, a circulating liquid loop unit, and a controller. The refrigeration device comprises an evaporation device and a condensation device. The circulating liquid loop unit comprises an electric three-way valve and a temperature sensor. The circulating liquid enters the evaporation device and the condensation device through the electric three-way valve. When the temperature sensor senses that the temperature of the circulating liquid is higher than a set value, the controller controls the electric three-way valve to increase the proportion of the circulating liquid flowing through the condensing device, and when the temperature of the circulating liquid is lower than the set value, the proportion of the circulating liquid flowing through the condensing device is reduced.
The temperature control device can realize temperature control and achieve the aim of saving energy, but the temperatures of the condensing device and the evaporating device are difficult to unify, the temperature of the circulating liquid after cooling and collecting can change due to temperature difference, the requirement of accurate temperature control is difficult to meet, and meanwhile, a plurality of pipelines are inserted between the refrigerating device and the circulating liquid loop unit, so that the structure is complex, and the circulating liquid cooling device is inconvenient to detach.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a temperature control device which has the advantage of convenient modularized disassembly and assembly.
In order to achieve the above purpose, the present invention provides the following technical solutions:
the temperature control equipment comprises a refrigeration cycle mechanism for cooling circulating liquid, a water circulation mechanism connected with the refrigeration cycle mechanism for conveying the circulating liquid and controlling the temperature of an external device, and an electric control mechanism for electrically controlling the refrigeration cycle mechanism and the water circulation mechanism;
the refrigeration cycle mechanism comprises an evaporator connected with cooling liquid, and the evaporator is provided with a connecting pipe connected with the water circulation mechanism;
the water circulation mechanism comprises a three-way valve communicated with the connecting pipe, a liquid pump communicated with the three-way valve, a heater communicated with the liquid pump, a liquid supplementing tank connected in parallel in the first circulation loop and used for exhausting and supplementing liquid, and the liquid supplementing tank is communicated with the three-way valve and communicated with the liquid pump.
By adopting the technical scheme, circulating liquid in the water circulation mechanism can flow through the external device to carry out temperature control on the external device, the electric control mechanism controls the refrigeration circulation system to cool the circulating liquid in the water circulation mechanism, the circulating liquid is cooled and reaches the set temperature, the electric control mechanism controls the heater in the water circulation mechanism to heat the circulating liquid, the temperature of the circulating liquid is increased and reaches the set temperature, the circulating liquid temperature is adjusted through the cooperation of the heater in the refrigeration circulation mechanism and the water circulation mechanism, the temperature control on the external device is further realized, the liquid pump can pressurize the circulating liquid, power is provided for water circulation, the heater is arranged at the downstream of the liquid pump, the circulating liquid is directly led to the external device after being heated, heat dissipation is reduced, the temperature of the circulating liquid in the first circulation loop is accurately regulated, the liquid supplementing box can supplement and replace the circulating liquid, gas in the circulating liquid can be discharged simultaneously, the gas is prevented from entering the liquid pump to lead to the liquid pump, the effect of the liquid supplementing box is realized, the circulating liquid box is only connected in parallel in the first circulation loop through the three-way valve, the adjustment of the circulating liquid temperature is realized, the temperature control mechanism is simple, the circulating liquid is convenient to install and detach and install the module is easy to install and detach and install, the module is easy to replace due to the fact that the whole module is easy to install and detach and install, the circulating mechanism is convenient to install and detach, the module is convenient to replace due to the whole module is easy to install and install.
Further, the refrigeration cycle mechanism further comprises a compressor, a condenser communicated with the compressor, a filter communicated with the condenser, a liquid viewing mirror communicated with the filter, and a pressure relief assembly connected with the liquid viewing mirror, wherein cooling liquid sequentially flows through the compressor, the condenser, the filter, the liquid viewing mirror, the pressure relief assembly and the evaporator to form a second circulation loop.
By adopting the technical scheme, the compressor can convert low-temperature and low-pressure gas into high-temperature and high-pressure gas, the low-temperature and low-pressure gas is converted into low-pressure liquid after passing through the condenser and the filter, and finally the low-temperature and low-pressure gas is converted into vaporization and heat absorption in the evaporator, wherein the filter can filter impurities in cooling liquid and powder scraps generated by the operation of the compressor, so that the pipeline is prevented from being blocked, the liquid in the pipeline is conveniently observed by the liquid mirror, and the idling of the compressor is prevented.
Further, the pressure relief assembly comprises a three-way pipe fitting communicated with the liquid viewing mirror, a first electronic expansion valve communicated with the three-way pipe fitting, and a second electronic expansion valve communicated with the three-way pipe fitting, wherein the first electronic expansion valve is communicated with the inlet end of the evaporator, and the second electronic expansion valve is communicated with the outlet end of the evaporator.
By adopting the technical scheme, the first electronic expansion valve and the second electronic expansion valve can be matched to release pressure of the cooling liquid in the refrigeration cycle mechanism, so that insufficient heat exchange caused by overlarge pressure when the cooling liquid passes through the evaporator is avoided.
Further, an outlet end of the compressor is connected with a hot gas bypass valve for controlling temperature, and the hot gas bypass valve is connected with an inlet end of the evaporator.
By adopting the technical scheme, the hot gas bypass valve can control the quantity of the refrigerant entering the evaporator, so as to achieve the aim of temperature control.
Further, the inlet end of the compressor is provided with a low-pressure detector, and the outlet end of the compressor is provided with a high-pressure detector.
By adopting the technical scheme, the low-pressure detector and the high-pressure detector can detect the pressure value before and after the cooling liquid enters and exits the compressor, so that the pressure value change before and after the cooling liquid enters and exits the compressor can be detected conveniently.
Further, a first pipeline is arranged between the three-way valve and the liquid pump, the first pipeline is communicated with a liquid discharge pipeline, and the liquid discharge pipeline is provided with a control valve.
By adopting the technical scheme, the liquid discharge pipeline can discharge the circulating liquid in the first circulating loop, so that the circulating liquid is conveniently discharged, and the control valve plays a role in controlling the discharging of the circulating liquid.
Further, be equipped with the pressure release pipeline on the heater, pressure release pipeline intercommunication the fluid-discharge line, be equipped with the relief valve on the pressure release pipeline.
By adopting the technical scheme, after the circulating liquid is pressurized by the liquid pump, the pressure of the circulating liquid can be regulated by the pressure relief pipeline, the circulating liquid is decompressed, and the phenomenon that the circulating liquid is insufficient in heating and cannot be accurately regulated due to the fact that the circulating liquid flows through the heater when the pressure is overlarge is avoided.
Further, a first temperature detector is arranged on the connecting pipe.
By adopting the technical scheme, the first temperature detector can detect the temperature of the circulating liquid after cooling, and is convenient for monitoring the circulating liquid to reduce the temperature to the set temperature.
Further, the outlet end of the heater is provided with a pumping pressure detector and a second temperature detector according to circulating liquid flow.
By adopting the technical scheme, the pump pressure detector can detect the pressure value of the circulating liquid after being pressurized, and the second temperature detector can detect whether the circulating liquid reaches the set temperature after being heated by the heater.
Further, the evaporator is provided with a circulating liquid inlet, and a flowmeter is arranged at the circulating liquid inlet of the evaporator.
By adopting the technical scheme, the flow meter can detect the flow of the circulating liquid at the liquid inlet of the circulating liquid.
In summary, the invention has the following beneficial effects:
1. the circulating liquid in the water circulation mechanism can flow through an external device to control the temperature of the external device, the refrigeration circulation mechanism can cool the circulating liquid in the water circulation mechanism to be cooled to a set temperature, the heater in the water circulation mechanism can heat the circulating liquid to be heated to the set temperature, the electric control mechanism can control the refrigeration circulation mechanism to be matched with the water circulation mechanism to adjust the temperature of the circulating liquid, the three modules of the water circulation mechanism, the refrigeration circulation mechanism and the electric control mechanism are relatively independent, the water circulation mechanism and the refrigeration circulation mechanism can realize the functions only by connecting the two modules through one connecting pipe, the structure is simple, the disassembly and the assembly are convenient, and the problem that time and labor are wasted during disassembly and assembly caused by excessive pipelines is solved;
2. the liquid supplementing box in the water circulation mechanism can supplement and exhaust circulating liquid, so that the liquid pump can be protected from idling caused by gas entering the liquid pump, the liquid supplementing box is connected in the first circulation loop in parallel through the three-way valve, the connecting pipeline is few, the structure is simple, the whole replacement and disassembly of the liquid supplementing box are convenient, and the modularized assembly is convenient;
3. the circulating liquid flows through the liquid pump and the heater in sequence, the heater is positioned at the downstream of the liquid pump, the circulating liquid is directly led to an external device after being heated, heat dissipation is reduced, and the temperature of the circulating liquid can be accurately regulated.
Drawings
FIG. 1 is a schematic diagram of the structure of the invention;
FIG. 2 is a schematic view of a refrigeration cycle mechanism according to the present invention;
FIG. 3 is a schematic view of the structure of the water circulation mechanism of the invention;
FIG. 4 is a schematic diagram of the invention;
fig. 5 is a schematic diagram of the operation of the invention.
In the figure: 1. a refrigeration cycle mechanism; 11. a first bracket; 12. a compressor; 121. a low voltage detector; 122. a high voltage detector; 13. a condenser; 14. a filter; 15. a liquid viewing mirror; 16. a pressure relief assembly; 161. a three-way pipe fitting; 162. a first electronic expansion valve; 163. a second electronic expansion valve; 17. an evaporator; 171. a cooling liquid inlet; 172. a circulating liquid inlet; 173. a cooling liquid outlet; 174. a circulating liquid outlet; 18. a second circulation loop; 181. a first thin tube; 182. a second thin tube; 183. a coarse pipe; 19. a hot gas bypass valve; 2. a water circulation mechanism; 21. a second bracket; 22. a three-way valve; 23. a liquid pump; 24. a heater; 25. a fluid supplementing box; 251. an exhaust passage; 252. a fluid supplementing port; 26. a first circulation loop; 261. a first pipe; 262. a second pipe; 263. a third conduit; 3. an electric control mechanism; 4. a connecting pipe; 41. a first temperature detector; 5. a main support; 6. a pump pressure detector; 7. a second temperature detector; 81. a liquid discharge pipe; 82. a control valve; 91. a pressure relief conduit; 92. and a pressure release valve.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings and examples.
The present embodiment is only for explanation of the present invention and is not to be construed as limiting the present invention, and modifications to the present embodiment, which may not creatively contribute to the present invention as required by those skilled in the art after reading the present specification, are all protected by patent laws within the scope of claims of the present invention.
The utility model provides a control by temperature change equipment, as shown in fig. 1, can conveniently carry out the modularization dismouting and realize accurate accuse temperature, including total support 5, be used for carrying out refrigerated refrigeration cycle mechanism 1 to the circulating fluid, be used for carrying and carry out the water circulation mechanism 2 of accuse temperature to external device, be used for carrying out electric control's to refrigeration cycle mechanism 1 and water circulation mechanism 2 automatically controlled mechanism 3, wherein, water circulation mechanism 2 and refrigeration cycle mechanism 1 pass through connecting pipe 4 and with total support 5 fixed connection, automatically controlled mechanism 3 is fixed at the top of total support 5 and passes through electric connection with water circulation mechanism 2 and refrigeration cycle mechanism 1.
Specifically, as shown in fig. 2, the refrigeration cycle mechanism 1 includes a first bracket 11, a compressor 12, a condenser 13, a filter 14, a liquid-viewing mirror 15, a pressure relief assembly 16, and an evaporator 17, the cooling liquid sequentially flows through the compressor 12, the condenser 13, the filter 14, the liquid-viewing mirror 15, the pressure relief assembly 16, and the evaporator 17 to form a second circulation loop 18 (see fig. 4), wherein the compressor 12 is fixedly connected to the first bracket 11, a high-pressure detector 122 is disposed at an outlet end of the compressor 12 for detecting a pressure value of the cooling liquid, an outlet end of the compressor 12 is connected to a first fine pipe 181, the first fine pipe 181 is connected to an inlet end of the condenser 13, the condenser 13 is fixedly connected to the first bracket 11, an outlet end of the condenser 13 is connected to a second fine pipe 182, the second fine pipe 182 is provided with the filter 14 and the liquid-viewing mirror 15, another end of the second fine pipe 182 is connected to the second circulation loop 16, the first fine pipe 181 and the second fine pipe 182 can increase a flow rate of the cooling liquid in the first hot gas pipe, increase a pressure of the cooling liquid, the pressure of the cooling liquid is further includes a bypass valve 19, and the bypass valve 19 is connected to the inlet end of the bypass valve 19 in parallel to the first fine pipe 19.
As shown in fig. 2, the pressure relief assembly 16 includes a three-way pipe 161, a first electronic expansion valve 162 connected to the three-way pipe 161, and a second electronic expansion valve 163 connected to the three-way pipe 161, wherein a second thin pipe 182 is connected to an inlet of the three-way pipe 161, an outlet of the three-way pipe 161 is connected to an inlet of the first electronic expansion valve 162, another outlet of the three-way pipe 161 is connected to an inlet of the second electronic expansion valve 163, the evaporator 17 is fixedly connected to the first bracket 11, an inlet of the evaporator 17 is provided with a cooling liquid inlet 171 and a circulating liquid inlet 172, an outlet of the evaporator 17 is provided with a cooling liquid outlet 173 and a circulating liquid outlet 174, an outlet of the first electronic expansion valve 162 is connected to the cooling liquid inlet 171 of the evaporator 17, the cooling liquid outlet 173 of the evaporator 17 is provided with a thick pipe 183, an outlet of the second electronic expansion valve 163 is connected in parallel to the thick pipe 183, a part of the cooling liquid is shunted to the thick pipe 183 through the second electronic expansion valve 163, the evaporator 17 is played a role, the evaporator 17 is connected to the pressure relief valve, the circulating liquid inlet of the evaporator 17 is provided with a pressure-reducing mechanism 12, the circulating liquid inlet of the evaporator 17 is connected to the pressure-detecting mechanism 12, and the pressure of the circulating liquid inlet of the compressor is connected to the pressure-reducing mechanism (1, the pressure-reducing mechanism is connected to the pressure-reducing valve 12) in the cooling liquid inlet of the compressor 12 by the pressure-1, and the pressure-reducing mechanism is connected to the pressure-reducing device (the pressure-reducing device) through the pressure-reducing valve) and the pressure-reducing valve 12, and the pressure-reducing valve is connected to the pressure-reducing valve 12, and the pressure-reducing valve.
As shown in fig. 3, the water circulation mechanism 2 comprises a second bracket 21, a three-way valve 22, a liquid pump 23, a heater 24 and a liquid supplementing tank 25, wherein circulating liquid sequentially flows through the three-way valve 22, the liquid pump 23 and the heater 24 through the evaporator 17 (see fig. 2), flows through an external device after being heated by the heater 24 and is subjected to temperature control, then flows to the evaporator 17 from the external device to form a first circulation loop 26 (see fig. 4), wherein an outlet end of the connecting pipe 4 is connected with an inlet end of the three-way valve 22, a first temperature detector 41 is arranged on an outlet end of the connecting pipe 4, a first pipeline 261 is arranged at an outlet end of the three-way valve 22, an outlet end of the first pipeline 261 is connected with an inlet end of the liquid pump 23, the liquid pump 23 is fixedly connected with the second bracket 21, an outlet end of the liquid pump 23 is provided with a second pipeline 262, an outlet end of the second pipeline 262 is connected with an inlet end of the heater 24, the heater 24 is fixedly connected with the second bracket 21, an outlet end of the heater 24 is provided with a third pipeline 263, and is led to the external device and is led to the evaporator 17 through the external device to form a circulation, and meanwhile, the outlet end of the heater 24 is provided with the third pipeline 263 is led to the external device to the evaporator 17 to form a circulation, and the temperature is detected by the temperature detector 7 is arranged at the outlet end of the heater 24 is provided with the second pipeline 7, and the temperature detector 7 is fixedly connected to the circulation device. The first pipe 261 is provided with a drain pipe 81, the drain pipe 81 is provided with a control valve 82, and part of circulating liquid in the first pipe 261 can flow to the outside from the drain pipe 81 by opening the control valve 82, so that the discharge of the circulating liquid is controlled. In addition, install pressure release pipeline 91 on the heater 24, pressure release pipeline 91 connects in parallel on fluid-discharge pipeline 81, be equipped with relief valve 92 on the pressure release pipeline 91, when the circulation hydraulic pressure that flows through the heater 24 is too big, put through fluid-discharge pipeline 81 and the circulation liquid inlet 172 (see fig. 2) of evaporimeter 17, pressure release pipeline 91 can adjust the pressure of circulation liquid, pressure release is carried out to the circulation liquid, the phenomenon that the heating that the circulation liquid caused when the pressure is too big when flowing through the heater 24 is insufficient, unable accurate temperature regulation has been avoided, the circulation liquid that will flow through pressure release pipeline 91 forms the circulation with the circulation of discharging to evaporimeter 17 simultaneously, avoid extravagant.
As shown in fig. 3, the fluid infusion tank 25 is connected in parallel in the first circulation loop 26 (see fig. 4) to ensure that the fluid infusion tank 25 can be assembled and disassembled independently without affecting the normal operation of the water circulation mechanism 2, wherein the other outlet end of the three-way valve 22 is communicated with the fluid inlet end of the fluid infusion tank 25, the fluid outlet end of the fluid infusion tank 25 is connected in parallel on the first pipeline 261, the fluid infusion tank 25 is a square water tank, the side wall of the fluid infusion tank 25 is provided with an exhaust channel 251 to facilitate the gas in the circulating fluid to be exhausted, the tail end of the exhaust channel is provided with an exhaust port, and the fluid infusion tank 25 is provided with a fluid infusion port 252 to facilitate the fluid infusion of the fluid infusion tank 25.
The working process and principle of the embodiment are as follows:
when the invention is used, as shown in fig. 5, the electric control mechanism 3 controls the liquid pump 23 in the water circulation mechanism 2 to operate, the three-way valve 22 is rotated to enable the circulating liquid to flow to the liquid supplementing box 25, gas in the circulating liquid is discharged or the circulating liquid is supplemented, when the temperature of the circulating liquid is higher than the set temperature, the circulating liquid flows through the evaporator 17, the electric control mechanism 3 controls the refrigeration circulation mechanism 1 to cool the circulating liquid in the water circulation mechanism 2 to the set temperature, if the temperature is too low after cooling, the electric control mechanism 3 controls the heater 24 to heat the circulating liquid to the set temperature, when the temperature of the circulating liquid is lower than the set temperature, the electric control mechanism 3 controls the refrigeration circulation system to stop refrigerating, the heater 24 heats the circulating liquid to the set temperature, and when the circulating liquid is replaced, the electric control mechanism 3, the refrigeration mechanism and the water circulation mechanism 2 can be independently disassembled and replaced, and simultaneously, the liquid supplementing box 25 in the water circulation mechanism 2 can also be independently disassembled and assembled, and disassembled, and the problem of complicated connection and disassembly of pipelines is solved.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above examples, and all technical solutions belonging to the concept of the present invention belong to the protection scope of the present invention. It should be noted that modifications and adaptations to the present invention may occur to one skilled in the art without departing from the principles of the present invention and are intended to be within the scope of the present invention.
Claims (5)
1. A temperature control device, characterized in that: comprises a refrigeration cycle mechanism (1) for cooling circulating liquid, a water circulation mechanism (2) connected with the refrigeration cycle mechanism (1) for conveying the circulating liquid and controlling the temperature of an external device, and an electric control mechanism (3) for electrically controlling the refrigeration cycle mechanism (1) and the water circulation mechanism (2);
the refrigeration cycle mechanism (1) comprises an evaporator (17) connected with cooling liquid, and the evaporator (17) is provided with a connecting pipe (4) connected with the water circulation mechanism (2);
the water circulation mechanism (2) comprises a three-way valve (22) communicated with the connecting pipe (4), a liquid pump (23) communicated with the three-way valve (22), a heater (24) communicated with the liquid pump (23), a circulating liquid sequentially flows through the evaporator (17), the three-way valve (22), the liquid pump (23) and the heater (24) to form a first circulation loop (26), and further comprises a liquid supplementing box (25) which is connected in parallel in the first circulation loop (26) and is used for exhausting and supplementing liquid, wherein the liquid supplementing box (25) is communicated with the three-way valve (22) and is communicated with the liquid pump (23);
the refrigeration cycle mechanism (1) further comprises a compressor (12), a condenser (13) communicated with the compressor (12), a filter (14) communicated with the condenser (13), a liquid-viewing mirror (15) communicated with the filter (14), and a pressure relief component (16) connected with the liquid-viewing mirror (15), wherein cooling liquid sequentially flows through the compressor (12), the condenser (13), the filter (14), the liquid-viewing mirror (15), the pressure relief component (16) and the evaporator (17) to form a second circulation loop (18);
the pressure relief assembly (16) comprises a three-way pipe fitting (161) communicated with the liquid-viewing mirror (15), a first electronic expansion valve (162) communicated with the three-way pipe fitting (161) and a second electronic expansion valve (163) communicated with the three-way pipe fitting (161), wherein the first electronic expansion valve (162) is communicated with the inlet end of the evaporator (17), and the second electronic expansion valve (163) is communicated with the outlet end of the evaporator (17);
the outlet end of the compressor (12) is connected with a hot gas bypass valve (19) for controlling temperature, and the hot gas bypass valve (19) is connected with the inlet end of the evaporator (17);
a first pipeline (261) is arranged between the three-way valve (22) and the liquid pump (23), the first pipeline (261) is communicated with a liquid discharge pipeline (81), and a control valve (82) is arranged on the liquid discharge pipeline (81);
the heater (24) is provided with a pressure relief pipeline (91), the pressure relief pipeline (91) is communicated with the liquid discharge pipeline (81), and the pressure relief pipeline (91) is provided with a pressure relief valve (92).
2. A temperature control device according to claim 1, wherein: the inlet end of the compressor (12) is provided with a low-pressure detector (121), and the outlet end of the compressor (12) is provided with a high-pressure detector (122).
3. A temperature control device according to claim 1, wherein: the connecting pipe (4) is provided with a first temperature detector (41).
4. A temperature control device according to claim 1, wherein: the outlet end of the heater (24) is provided with a pumping pressure detector (6) and a second temperature detector (7) according to circulating liquid flow.
5. A temperature control device according to claim 1, wherein: the evaporator (17) is provided with a circulating liquid inlet (172), and a flowmeter is arranged at the circulating liquid inlet (172) of the evaporator (17).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111552553.4A CN116266062B (en) | 2021-12-17 | 2021-12-17 | Temperature control equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111552553.4A CN116266062B (en) | 2021-12-17 | 2021-12-17 | Temperature control equipment |
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| CN116266062A CN116266062A (en) | 2023-06-20 |
| CN116266062B true CN116266062B (en) | 2023-12-26 |
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| CN202111552553.4A Active CN116266062B (en) | 2021-12-17 | 2021-12-17 | Temperature control equipment |
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| CN112230692A (en) * | 2020-10-27 | 2021-01-15 | 浙江大学 | Multi-path temperature control system |
| CN214751552U (en) * | 2021-01-29 | 2021-11-16 | 安徽翔弘仪器科技有限公司 | Dynamic temperature control equipment |
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