CN116197945A - Horizontal multi-joint robot - Google Patents

Horizontal multi-joint robot Download PDF

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Publication number
CN116197945A
CN116197945A CN202211502546.8A CN202211502546A CN116197945A CN 116197945 A CN116197945 A CN 116197945A CN 202211502546 A CN202211502546 A CN 202211502546A CN 116197945 A CN116197945 A CN 116197945A
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CN
China
Prior art keywords
arm
end side
hand
joint
base end
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202211502546.8A
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Chinese (zh)
Inventor
杉山浩彦
栗林保
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Instruments Corp
Original Assignee
Nidec Sankyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidec Sankyo Corp filed Critical Nidec Sankyo Corp
Publication of CN116197945A publication Critical patent/CN116197945A/en
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0075—Means for protecting the manipulator from its environment or vice versa
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0075—Means for protecting the manipulator from its environment or vice versa
    • B25J19/0083—Means for protecting the manipulator from its environment or vice versa using gaiters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A horizontal multi-joint robot in which an arm moves in a horizontal direction and in which penetration of liquid from a joint into the interior of the horizontal multi-joint robot is suppressed. The horizontal articulated robot is provided with a first arm (7) and a second arm (8) which is arranged on the upper side of the first arm (7) and is rotatably connected with the first arm. The first arm section is provided with an annular bearing pressing member (26) which forms part of the outer peripheral side section of the first arm section in a joint section (11) which is a connecting section between the first arm section and the second arm section, and the second arm section is provided with an arm section main body (29) which forms the outer peripheral side section of the second arm section in the joint section (11). The arm body is provided with a cylindrical cover part (29 a) which covers the upper part of the bearing pressing member (26) from the radial outside of the joint part (11) over the whole circumference, and the lower end of the cylindrical cover part (29 a) is arranged at a position lower than the upper end of the bearing pressing member (26).

Description

Horizontal multi-joint robot
Technical Field
The present invention relates to a horizontal multi-joint robot in which an arm moves in a horizontal direction.
Background
Conventionally, a horizontal articulated robot for conveying an object to be conveyed such as a glass substrate or a semiconductor wafer is known (for example, refer to patent document 1). The horizontal multi-joint robot described in patent document 1 includes: a hand for loading the object to be transported; an arm rotatably connecting a hand to a front end side; and a main body portion rotatably connecting the base end sides of the arms. The arm is constituted by a first arm portion and a second arm portion rotatably connected to each other.
In the horizontal articulated robot described in patent document 1, the base end side of the first arm is rotatably connected to the main body. The base end side of the second arm portion is rotatably connected to the tip end side of the first arm portion. The hand is rotatably connected to the distal end side of the second arm portion. The first arm is disposed above the main body, the second arm is disposed above the first arm, and the hand is disposed above the second arm. The joint portion is formed by a connecting portion between the body portion and the first arm portion, a connecting portion between the first arm portion and the second arm portion, and a connecting portion between the second arm portion and the hand.
Prior art literature
Patent literature
Patent document 1: japanese patent application laid-open No. 2019-118962
Disclosure of Invention
In the horizontal multi-joint robot described in patent document 1, for example, when a semiconductor wafer after a predetermined process is performed using a liquid is carried, the liquid remaining on the semiconductor wafer may fall from the semiconductor wafer, and may enter the inside of the horizontal multi-joint robot from a joint portion. In addition, if the liquid enters the inside of the horizontal multi-joint robot from the joint portion, corrosion may occur in the inside of the horizontal multi-joint robot.
Accordingly, an object of the present invention is to provide a horizontal multi-joint robot in which an arm moves in a horizontal direction and liquid infiltration from a joint into the horizontal multi-joint robot can be suppressed.
In order to solve the above-described problems, the horizontal articulated robot according to the present invention is a horizontal articulated robot having an arm that moves in a horizontal direction, and is characterized by comprising a support portion and a supported portion that is disposed on an upper side of the support portion and is rotatably connected to the support portion, wherein the support portion comprises an annular support-side member that forms at least a part of an outer peripheral portion of the support portion in a joint portion that is a connecting portion between the support portion and the supported portion, wherein the supported portion comprises a supported-side member that forms at least a part of an outer peripheral portion of the supported portion in the joint portion, wherein the supported-side member comprises a tubular covering portion that covers at least an upper portion of the support-side member over an entire circumference from a radially outer side of the joint portion, and wherein a lower end of the tubular covering portion is disposed at a position lower than an upper end of the support-side member.
In the horizontal multi-joint robot according to the present invention, the support portion includes a ring-shaped support side member that forms at least a part of an outer peripheral side portion of the support portion in a joint portion that is a connection portion between the support portion and the supported portion, and the supported portion disposed on an upper side of the support portion includes a supported side member that forms at least a part of an outer peripheral side portion of the supported portion in the joint portion. In the present invention, the supported-side member includes a tubular covering portion that covers at least an upper portion of the supported-side member over the entire circumference from the radially outer side of the joint portion, and a lower end of the tubular covering portion is disposed below an upper end of the supported-side member. Therefore, in the present invention, in the joint portion, if the liquid passing through the lower side of the cylindrical cover portion does not pass through the upper side of the support side member, the liquid does not penetrate from the joint portion into the interior of the horizontal multi-joint robot. Therefore, in the present invention, for example, it is possible to suppress the penetration of the liquid falling from the object to be transported into the interior of the horizontal multi-joint robot from the joint portion.
In the present invention, for example, the horizontal articulated robot includes a hand as a supported portion for loading an object to be transported, and the arm includes a distal end side arm portion as a supporting portion, and the distal end side arm portion is rotatably connected to the hand at a distal end side.
In the present invention, for example, a horizontal articulated robot includes a hand for loading an object to be transported, and an arm includes: a distal arm portion as a supported portion, the distal arm portion being rotatably connected to a hand at a distal end side thereof; and a base end side arm portion as a support portion, the base end side arm portion being rotatably connected to a base end side of the tip end side arm portion on the tip end side.
In the present invention, for example, the horizontal articulated robot includes a main body portion as a support portion, the main body portion being rotatably connected to a base end side of an arm, the arm having a base end side arm portion as a supported portion, the base end side of the base end side arm portion being rotatably connected to the main body portion.
In the present invention, it is preferable that the horizontal articulated robot includes a hand that mounts the object to be transported and is rotatably connected to the distal end side of the arm, and that the hand includes: an end face abutting member which is disposed on the front end side of the hand and has an abutting face that abuts against an end face of the conveyance object; a pressing member that presses the conveyance object toward the contact surface; a moving mechanism which is disposed inside the base end side of the hand and moves the pressing member; and a cover that covers the moving mechanism from above, the base end of the pressing member being connected to the moving mechanism, the cover covering the base end side portion of the pressing member from above. With this configuration, for example, the liquid falling from the conveyance object can be prevented from adhering to the base end side portion of the pressing member by the cover. Therefore, for example, the cover can prevent the liquid falling from the object to be conveyed from penetrating into the base end side of the hand.
In the present invention, it is preferable that the horizontal articulated robot includes a hand that mounts the object to be transported and is rotatably connected to the distal end side of the arm, and that the hand includes: an end face abutting member which is disposed on the front end side of the hand and has an abutting face that abuts against an end face of the conveyance object; a pressing member that presses the conveyance object toward the contact surface; a moving mechanism which is disposed inside the base end side of the hand and moves the pressing member; and a cover that covers the moving mechanism from above, the moving mechanism including: a sliding shaft having a base end of the pressing member fixed to a front end thereof; and a shaft holding member that holds the sliding shaft so as to be slidable, wherein a through hole through which the sliding shaft is inserted is formed in the shaft holding member, the sliding shaft is linearly slidable with respect to the shaft holding member, and a flange portion that extends radially outward of the sliding shaft is formed on a tip end side of the sliding shaft. With this configuration, for example, the flange portion can prevent the liquid falling from the object from penetrating into the inside of the base end side of the hand through the through hole of the shaft holding member.
Effects of the invention
As described above, in the horizontal multi-joint robot of the present invention, infiltration of liquid from the joint portion into the horizontal multi-joint robot can be suppressed.
Drawings
Fig. 1 is a plan view of a horizontal multi-joint robot according to an embodiment of the present invention.
Fig. 2 is a side view of the horizontal multi-joint robot shown in fig. 1.
Fig. 3 is a plan view of the arm and hand in the extended state of the arm shown in fig. 1.
Fig. 4 is a cross-sectional view of the E-E section of fig. 3.
Fig. 5 is an enlarged view of the portion F in fig. 4.
Fig. 6 is an enlarged view of the G portion of fig. 4.
Fig. 7 is an enlarged view of the H portion of fig. 4.
Fig. 8 is a cross-sectional view of the section J-J of fig. 3.
Detailed Description
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
(outline Structure of horizontal Multi-joint robot)
Fig. 1 is a plan view of a horizontal multi-joint robot 1 according to an embodiment of the present invention. Fig. 2 is a side view of the horizontal multi-joint robot 1 shown in fig. 1.
The horizontal multi-joint robot 1 (hereinafter referred to as "robot 1") according to the present embodiment is an industrial robot for transporting a semiconductor wafer 2 (hereinafter referred to as "wafer 2") as a transport object. The wafer 2 is formed in a disk shape. In the present embodiment, a predetermined process using a liquid is performed on the wafer 2, and the robot 1 conveys the processed wafer 2.
The robot 1 includes: a hand 3 for loading the wafer 2; an arm 4 rotatably connected to the hand 3 at the front end side; and a main body portion 5 rotatably connected to the base end side of the arm 4.
The robot 1 further includes a horizontal movement mechanism (not shown) for linearly moving the main body 5 in the horizontal direction. The robot 1 of the present embodiment includes two hands 3 and two arms 4, and one hand 3 is rotatably connected to each of the two arms 4. The base end sides of the two arms 4 are rotatably connected to the main body 5.
The arm 4 is constituted by two arm sections, a first arm section 7 and a second arm section 8, which are rotatably connected to each other. The arm 4 acts in the horizontal direction. Specifically, the arm 4 performs a telescopic operation in the horizontal direction. The first arm 7 and the second arm 8 are formed in a hollow shape. The base end side of the first arm portion 7 is rotatably connected to the main body portion 5. A base end side of the second arm portion 8 is rotatably connected to a front end side of the first arm portion 7. A hand 3 is rotatably connected to the distal end side of the second arm portion 8. The second arm 8 of the present embodiment is a distal arm, and the first arm 7 is a proximal arm.
The first arm 7 rotates in the axial direction which is a rotation in the up-down direction with respect to the main body 5. The second arm 8 rotates in the axial direction which rotates in the up-down direction with respect to the first arm 7. The hand 3 rotates in the axial direction in which the second arm 8 rotates in the up-down direction. The first arm 7 is disposed above the main body 5, and the second arm 8 is disposed above the first arm 7. The hand 3 is disposed above the second arm 8. The joint portion 10 is a connection portion between the first arm portion 7 and the main body portion 5. The joint portion of the first arm portion 7 and the second arm portion 8 becomes the joint portion 11. The connection portion between the second arm portion 8 and the hand 3 becomes the joint portion 12.
In the present embodiment, in the relationship between the hand 3 and the second arm portion 8, the second arm portion 8 becomes a supporting portion, and the hand 3 becomes a supported portion which is disposed on the upper side of the second arm portion 8 as a supporting portion and is rotatably connected to the second arm portion 8. In the relationship between the first arm 7 and the second arm 8, the first arm 7 serves as a support portion, and the second arm 8 serves as a supported portion which is disposed above the first arm 7 serving as a support portion and is rotatably connected to the first arm 7. In the relationship between the main body 5 and the first arm 7, the main body 5 is a support portion, and the first arm 7 is a supported portion that is disposed above the main body 5 as a support portion and is rotatable on the main body 5.
(Main body, arm and hand Structure)
Fig. 3 is a plan view of the hand 3 and the arm 4 in the state where the arm 4 shown in fig. 1 is extended. Fig. 4 is a cross-sectional view of the E-E section of fig. 3. Fig. 5 is an enlarged view of the portion F in fig. 4. Fig. 6 is an enlarged view of the G portion of fig. 4. Fig. 7 is an enlarged view of the H portion of fig. 4.
The main body 5 has a hollow casing 14. A hollow rotation shaft 15 rotatable with respect to the housing 14 in an axial direction that is rotatable in the up-down direction is disposed inside the housing 14. The main body 5 further includes: a disk-shaped cover 16 fixed to an upper end portion of the housing 14 so as to close an opening formed in the upper end of the housing 14; and a cylindrical fixing member 17 fixed to the housing 14 or the cover 16. The outer shape of the cover 16 is larger than the outer shape of the housing 14. A pulley 18 is fixed to the fixing member 17.
The rotation shaft 15 is formed in a substantially cylindrical shape having an axial direction in the up-down direction. The fixing member 17 is formed in a substantially cylindrical shape having an axial direction in the up-down direction. The rotation shaft 15 is disposed on the inner peripheral side of the fixing member 17. A through hole in which a part of the fixing member 17 is disposed is formed in the center portion of the cover 16, and the fixing member 17 is fixed to the center portion of the cover 16. The upper end of the fixing member 17 is disposed above the upper surface of the cover 16, and the lower end of the fixing member 17 is disposed below the upper surface of the cover 16.
The upper end of the rotation shaft 15 is disposed above the upper surface of the cover 16. A base end side of the first arm 7 is fixed to an upper end of the rotation shaft 15. A motor (not shown) for rotating the rotation shaft 15 relative to the housing 14 is disposed inside the housing 14. The motor is connected to a rotation shaft 15 via, for example, a pulley, a belt, and a reduction gear.
The first arm 7 includes an arm body 21 formed in a slender hollow box shape and two flat covers 22 and 23 (see fig. 4). The upper surface of the arm body 21 is open except for the front end portion of the arm body 21. The lower surface of the arm body 21 is open except for the base end portion of the arm body 21. The cover 22 is fixed to the upper surface side of the arm body 21 so as to close the opening formed in the upper surface of the arm body 21. The cover 23 is fixed to the lower surface side of the arm body 21 so as to close the opening formed in the lower surface of the arm body 21.
A through hole penetrating in the up-down direction is formed in the lower surface of the base end side of the arm body 21.
A through hole penetrating in the up-down direction is formed in the upper surface of the distal end side of the arm body 21. The first arm 7 includes: a fixing member 24 fixed to the base end portion of the arm main body 21; and a hollow fixed shaft 25 and a bearing pressing member 26 fixed to the distal end portion of the arm body 21.
A pulley 27 is fixed to the fixed shaft 25.
The second arm 8 includes an arm body 29 formed in a slender hollow box shape and two flat covers 30 and 31 (see fig. 4). The upper surface of the arm body 29 is open except for the front end portion of the arm body 29. The lower surface of the arm body 29 is open except for the base end portion of the arm body 29. The cover 30 is fixed to the upper surface side of the arm body 29 so as to close the opening formed in the upper surface of the arm body 29. The cover 31 is fixed to the lower surface side of the arm body 29 so as to close the opening formed in the lower surface of the arm body 29.
A through hole penetrating in the up-down direction is formed in the lower surface of the base end side of the arm body 29.
A through hole penetrating in the up-down direction is formed in the upper surface of the distal end side of the arm body 29. The second arm 8 includes: a cylindrical fixing member 32 fixed to the base end portion of the arm body 29; and a cylindrical fixing member 34 fixed to the front end portion of the arm body 29. A pulley 33 is fixed to the fixing member 32.
The hand 3 includes: a wafer loading section 36 for loading the wafer 2; a hand base 37 constituting a base end portion of the hand 3; and a fixing member 38 fixed to the hand base 37. A pulley 39 is fixed to the fixing member 38. The wafer loading section 36 is formed in a substantially Y-shaped flat plate shape. The wafer loading section 36 is fixed to the front end portion of the hand base 37. The hand base 37 is formed in a hollow shape. A more specific structure of the hand 3 will be described later.
(Structure of Joint)
As shown in fig. 5, the upper end 17a of the fixing member 17, which is a portion disposed above the upper surface of the cover 16, is constituted by a large diameter portion 17b, a middle diameter portion 17c having a smaller outer diameter than the large diameter portion 17b, and a small diameter portion 17d having a smaller outer diameter than the middle diameter portion 17 c. The large diameter portion 17b, the middle diameter portion 17c, and the small diameter portion 17d are arranged in this order from the lower side. The lower surface of the large diameter portion 17b is in contact with the upper surface of the cover 16. A sealing member such as an O-ring for preventing liquid from penetrating into the inner peripheral side of the large diameter portion 17b is disposed between the lower surface of the large diameter portion 17b and the upper surface of the cover 16.
In the joint portion 10, as described above, the rotation shaft 15 is disposed on the inner peripheral side of the fixing member 17. The upper end 17a of the fixing member 17 forms a part of the outer peripheral surface of the body 5 in the joint 10. Specifically, the upper end 17a forms an upper end of the outer peripheral surface of the body 5 in the joint 10. The fixing member 17 of the present embodiment is an annular support-side member constituting a part of the outer peripheral side portion of the body portion 5 in the joint portion 10.
The rotation shaft 15 is rotatably supported by the fixing member 17 via a bearing 42. The pulley 18 is fixed to the upper end portion of the small diameter portion 17d of the fixing member 17. The upper end portion 17a of the rotation shaft 15 and the upper end portion 17a of the fixing member 17 are inserted into through holes formed in the lower surface of the base end side of the arm body 21. The upper end portion of the rotation shaft 15 and the small diameter portion 17d are disposed inside the base end side of the arm body 21. The pulley 18 and the bearing 42 are also disposed inside the base end side of the arm body 21.
The fixing member 24 is fixed to the base end portion of the arm body 21 inside the base end portion of the arm body 21. The fixing member 24 is fixed to the upper end of the rotation shaft 15, and is rotatably supported by the fixing member 17 through a bearing 42. Accordingly, the arm body 21 can rotate with respect to the fixing member 17. That is, the first arm 7 is rotatable with respect to the fixing member 17 and the housing 14.
The base end side portion of the arm body 21 constitutes an outer peripheral side portion of the first arm 7 in the joint portion 10. The lower surface of the arm body 21 is disposed below the upper end of the intermediate diameter portion 17c of the fixing member 17. A cylindrical cover portion 21a is formed at the base end portion of the arm body 21, and the cylindrical cover portion 21a covers (surrounds) the upper end portion of the intermediate diameter portion 17c and the small diameter portion 17d over the entire circumference from the radially outer side of the joint portion 10. That is, the arm body 21 includes a tubular covering portion 21a, and the tubular covering portion 21a covers the upper portion of the fixing member 17 from the radially outer side of the joint portion 10 over the entire circumference. The arm body 21 of the present embodiment is a supported-side member constituting an outer peripheral side portion of the first arm 7 in the joint portion 10.
The lower surface of the cylindrical cover portion 21a constitutes a part of the lower surface of the arm body 21. The lower surface of the cylindrical cover portion 21a is disposed below the upper end of the intermediate diameter portion 17 c. That is, the lower surface of the cylindrical cover portion 21a is disposed below the upper surface of the small diameter portion 17d, and the lower end of the cylindrical cover portion 21a is disposed below the upper end of the fixing member 17.
In the joint 11, the fixed shaft 25 is disposed inside the distal end side of the arm body 21. The fixed shaft 25 is formed in an elongated cylindrical shape in which the vertical direction is the axial direction. A lower end portion of the fixed shaft 25 is fixed to the arm body 21. A pulley 27 is fixed to the upper end of the fixed shaft 25. The pulley 27 is disposed inside the base end side of the arm body 29. The bearing pressing member 26 is formed in an annular shape. The bearing pressing member 26 is formed in a flat cylindrical shape having a short length in the up-down direction.
The bearing pressing member 26 is fixed to the upper surface side of the front end portion of the arm body 21. The upper end of the bearing pressing member 26 is disposed above the upper surface of the arm body 21 and the upper surface of the cover 22. The bearing pressing member 26 forms a part of the outer peripheral surface of the first arm 7 in the joint 11. Specifically, the bearing pressing member 26 forms an upper end portion of the outer peripheral surface of the first arm 7 in the joint portion 11. The bearing pressing member 26 functions to press a bearing 45 described later from above. The bearing pressing member 26 of the present embodiment is an annular support-side member constituting a part of the outer peripheral side portion of the first arm portion 7 in the joint portion 11.
The fixing member 32 is fixed to the lower surface of the base end side of the arm body 29. The outer peripheral surface of the upper end portion of the fixing member 32 is in contact with the inner peripheral surface of a through hole formed in the lower surface of the base end portion of the arm body 29. The pulley 33 is fixed to the lower end of the fixed member 32. The fixing member 32 is inserted into the inner peripheral side of the bearing pressing member 26, and the lower end portion of the fixing member 32 and the pulley 33 are disposed inside the front end side of the arm body 21. A belt, not shown, is stretched over the pulleys 33 and 18.
The fixed shaft 25 is disposed on the inner peripheral side of the fixed member 32 and the pulley 33. The fixed member 32 and the pulley 33 are rotatably supported on the fixed shaft 25 through bearings 44. The fixing member 32 and the pulley 33 are rotatably supported by the distal end portion of the arm body 21 and the bearing pressing member 26 via a bearing 45. Accordingly, the fixing member 32 can rotate with respect to the arm main body 21 and the fixed shaft 25. That is, the second arm portion 8 is rotatable with respect to the first arm portion 7.
The base end side portion of the arm body 29 constitutes an outer peripheral side portion of the second arm 8 in the joint portion 11. A recess 29b in which an upper end portion of the bearing pressing member 26 is disposed is formed in a lower surface of a base end portion of the arm body 29. The concave portion 29b is formed in an annular shape recessed toward the upper side. The lower surface of the arm body 29 is disposed below the upper end of the bearing pressing member 26. The arm body 29 of the present embodiment is a supported-side member constituting the outer peripheral side portion of the second arm 8 in the joint portion 11.
The outer portion of the recess 29b in the radial direction of the joint portion 11 is a cylindrical cover portion 29a, and the cylindrical cover portion 29a covers the upper end portion of the bearing pressing member 26 from the radial outer side of the joint portion 11 over the entire circumference. That is, a cylindrical cover portion 29a is formed at the base end portion of the arm body 29, and the cylindrical cover portion 29a covers the upper end portion of the bearing pressing member 26 over the entire circumference from the radially outer side of the joint portion 11, and the arm body 29 includes a cylindrical cover portion 29a, and the cylindrical cover portion 29a covers the upper portion of the bearing pressing member 26 over the entire circumference from the radially outer side of the joint portion 11. As described above, the lower surface of the arm body 29 is disposed below the upper end of the bearing pressing member 26, and the lower end of the cylindrical cover portion 29a is disposed below the upper end of the bearing pressing member 26.
In the joint portion 12, a cylindrical hollow shaft portion 29c protruding upward from the lower end side of the arm body 29 is formed inside the arm body 29. The fixing member 34 is formed in a circular ring shape. The fixing member 34 is formed in a flat cylindrical shape having a short length in the up-down direction. The fixing member 34 is fixed to the upper surface side of the front end portion of the arm body 29. The upper end of the fixing member 34 is disposed above the upper surface of the arm body 29 and the upper surface of the cover 30. The fixing member 34 forms a part of the outer peripheral surface of the second arm 8 in the joint portion 12. Specifically, the fixing member 34 forms an upper end portion of the outer peripheral surface of the second arm portion 8 in the joint portion 12. The fixing member 34 of the present embodiment is an annular support-side member that forms a part of the outer peripheral side portion of the second arm portion 8 in the joint portion 12.
The fixing member 38 is formed in a flanged cylindrical shape having a flange portion 38 b. The fixing member 38 is fixed to the lower surface of the hand base 37. A pulley 39 is fixed to the lower end of the fixed member 38. The upper end portion of the pulley 39 and the lower end portion of the fixing member 38 are inserted into the inner peripheral side of the fixing member 34. The lower end portion of the pulley 39 is disposed inside the front end side of the arm body 29. A belt, not shown, is stretched over the pulleys 39 and 27. The hollow shaft portion 29c is disposed on the inner peripheral side of the pulley 39. The fixing member 38 and the pulley 39 are rotatably supported by the hollow shaft portion 29c via a bearing 47. Accordingly, the fixing member 38 and the pulley 39 can rotate relative to the arm body 29. That is, the hand 3 can rotate with respect to the second arm portion 8.
The flange portion 38b of the fixing member 38 is formed in an annular shape that expands radially outward of the joint portion 12. The flange portion 38b is formed at a lower side portion of the fixing member 38. The fixing member 38 forms a part of the outer peripheral surface of the hand 3 in the joint portion 12. Specifically, the fixing member 38 forms a lower end portion of the outer peripheral surface of the hand 3 in the joint portion 12. A recess 38c in which the upper end of the fixing member 34 is disposed is formed in the lower surface of the flange 38 b. The recess 38c is formed in an annular shape recessed toward the upper side. The lower surface of the flange 38b is disposed below the upper end of the fixing member 34. The fixing member 38 of the present embodiment is a supported member constituting a part of the outer peripheral side portion of the hand 3 in the joint portion 12.
The outer portion of the recess 38c in the radial direction of the joint portion 12 is a cylindrical cover portion 38a, and the cylindrical cover portion 38a covers the upper end portion of the fixing member 34 from the radial outer side of the joint portion 12 over the entire circumference. That is, the fixing member 38 is formed with a cylindrical cover portion 38a, and the cylindrical cover portion 38a covers the upper end portion of the fixing member 34 from the radially outer side of the joint portion 12 over the entire circumference, and the fixing member 38 is provided with a cylindrical cover portion 38a, and the cylindrical cover portion 38a covers the upper portion of the fixing member 34 from the radially outer side of the joint portion 12 over the entire circumference. As described above, the lower surface of the flange portion 38b is disposed below the upper end of the fixing member 34, and the lower end of the cylindrical cover portion 38a is disposed below the upper end of the fixing member 34.
(Structure of hand)
Fig. 8 is a cross-sectional view of the section J-J of fig. 3.
The hand 3 includes, in addition to the wafer loading unit 36, the hand base 37, and the fixing member 38: two end face abutment members 48 having abutment faces with the end faces of the wafer 2; two wafer mounting members 49 for mounting the wafers 2; a pressing member 50 that presses the wafer 2 toward the contact surface of the end surface contact member 48; and a moving mechanism 51 that moves the pressing member 50. The hand base 37 includes a hand base main body 53 and a cover 54 fixed to the upper surface of the hand base main body 53.
The end surface abutment members 48 are disposed at two positions of the front end portion of the wafer loading portion 36 having a substantially Y-shape. That is, the end face abutment member 48 is disposed on the front end side of the hand 3. The wafer mounting member 49 is disposed on the base end side of the wafer mounting portion 36. The wafer 2 is mounted on both end face abutment members 48 and both wafer mounting members 49.
The pressing member 50 includes: two rollers 56 in contact with the end face of the wafer 2; a roller holding member 57 that rotatably holds the two rollers 56; and a base material 58 to which the roller holding member 57 is fixed. The rollers 56 are mounted at two positions of the front end portion of the roller holding member 57 having a substantially Y shape. The base material 58 is formed in a rectangular flat plate shape elongated in the vertical direction as the thickness direction. The base material 58 constitutes a base end side portion of the pressing member 50. The roller holding member 57 is fixed to a tip portion which is one end portion of the base material 58 in the longitudinal direction.
The moving mechanism 51 is disposed inside the hand base 37. That is, the moving mechanism 51 is disposed inside the base end side of the hand 3. Specifically, a concave portion recessed downward from the upper surface of the hand base body 53 is formed in the hand base body 53, and the movement mechanism 51 is disposed in the concave portion. The moving mechanism 51 includes: a cylinder 60 as a driving source; a sliding shaft 61 that slides in the horizontal direction by the power of the cylinder 60; and a shaft holding member 62 that slidably holds the slide shaft 61.
The cylinder 60 is fixed to the hand base main body 53. The slide shaft 61 is formed in an elongated cylindrical shape. One end of the sliding shaft 61 in the axial direction of the sliding shaft 61, that is, a base end of the sliding shaft 61 is mounted on a rod of the cylinder 60. A base end of the base material 58 is fixed to the other end of the slide shaft 61 in the axial direction of the slide shaft 61, that is, the tip end of the slide shaft 61. That is, the base end of the pressing member 50 is fixed to the tip end of the slide shaft 61. The base end of the pressing member 50 is connected to a moving mechanism 51.
A flange portion 61a that expands radially outward of the slide shaft 61 is formed on the front end side of the slide shaft 61. In the present embodiment, the tip end portion of the slide shaft 61 is a flange portion 61a. The flange portion 61a is formed in an annular shape. The flange portion 61a has a larger outer shape than the outer shape of the base material 58 when viewed in the axial direction of the slide shaft 61.
The shaft holding member 62 is formed in a rectangular parallelepiped block shape. The shaft holding member 62 is fixed to the hand base main body 53. The shaft holding member 62 is formed with a through hole 62a through which the slide shaft 61 is inserted. The slide shaft 61 is linearly slidable with respect to the shaft holding member 62. The air cylinder 60 moves the slide shaft 61 and the pressing member 50 between a wafer holding position (see fig. 1 and 3) where the two rollers 56 contact the end surface of the wafer 2 and a retracted position where the two rollers 56 retract so as to be away from the end surface of the wafer 2.
The cover 54 fixed to the upper surface of the hand base main body 53 covers the moving mechanism 51 from above. In addition, the cover 54 covers the base end side portion of the pressing member 50 from the upper side. Specifically, the cover 54 covers a majority of the base material 58 when the pressing member 50 is disposed at the retracted position from above, and covers a base end side portion of the base material 58 when the pressing member 50 is disposed at the wafer holding position from above. Even in a state where the pressing member 50 is disposed at the wafer holding position, the tip of the slide shaft 61 is disposed below the cover 54, and the flange 61a is covered from above by the cover 54.
(main effects of the present embodiment)
As described above, in the present embodiment, the main body 5 includes the annular fixing member 17 constituting a part of the outer peripheral side portion of the main body 5 in the joint 10, and the first arm 7 disposed on the upper side of the main body 5 includes the arm main body 21 constituting the outer peripheral side portion of the first arm 7 in the joint 10. In the present embodiment, the arm body 21 includes a tubular covering portion 21a, and the tubular covering portion 21a covers the upper portion of the fixing member 17 from the radially outer side of the joint portion 10 over the entire circumference, and the lower end of the tubular covering portion 21a is disposed below the upper end of the fixing member 17. Therefore, in the present embodiment, in the joint portion 10, if the liquid passing through the lower side of the cylindrical cover portion 21a does not pass through the upper side of the fixing member 17, the liquid does not penetrate from the joint portion 10 into the interior of the main body portion 5. Therefore, in the present embodiment, for example, the liquid falling from the wafer 2 can be prevented from penetrating into the body 5 from the joint 10.
In the present embodiment, the first arm 7 includes an annular bearing pressing member 26, and the bearing pressing member 26 forms a part of the outer peripheral side portion of the first arm 7 in the joint 11, and the second arm 8 disposed on the upper side of the first arm 7 includes an arm body 29, and the arm body 29 forms the outer peripheral side portion of the second arm 8 in the joint 11. In the present embodiment, the arm body 29 includes a cylindrical cover portion 29a, and the cylindrical cover portion 29a covers the upper portion of the bearing pressing member 26 from the radially outer side of the joint portion 11 over the entire circumference, and the lower end of the cylindrical cover portion 29a is disposed below the upper end of the bearing pressing member 26. Therefore, in the present embodiment, in the joint portion 11, if the liquid passing through the lower side of the cylindrical cover portion 29a does not pass through the upper side of the bearing pressing member 26, the liquid does not penetrate from the joint portion 11 into the first arm portion 7. Therefore, in the present embodiment, for example, the liquid falling from the wafer 2 is prevented from penetrating into the first arm 7 from the joint 11.
In the present embodiment, the second arm 8 includes an annular fixing member 34 constituting a part of the outer peripheral side portion of the second arm 8 in the joint 12, and the hand 3 disposed on the upper side of the second arm 8 includes a fixing member 38 constituting a part of the outer peripheral side portion of the hand 3 in the joint 12. In the present embodiment, the fixing member 38 includes a tubular covering portion 38a, and the tubular covering portion 38a covers the upper portion of the fixing member 34 from the radially outer side of the joint portion 12 over the entire circumference, and the lower end of the tubular covering portion 38a is disposed below the upper end of the fixing member 34. Therefore, in the present embodiment, in the joint portion 12, if the liquid passing through the lower side of the cylindrical cover portion 38a does not pass through the upper side of the fixing member 38, the liquid does not penetrate from the joint portion 12 into the second arm portion 8. Therefore, in the present embodiment, for example, the liquid falling from the wafer 2 is prevented from penetrating into the second arm 8 from the joint 12.
In the present embodiment, the base end side portion of the pressing member 50, the base end of which is connected to the movement mechanism 51, is covered with the cover 54 from the upper side, and the cover 54 covers the movement mechanism 51 disposed inside the hand base 37 from the upper side. Specifically, at least the base end side portion of the base material 58 is covered with the cover 54 from the upper side. Therefore, in the present embodiment, for example, the liquid falling from the wafer 2 is less likely to adhere to at least the base end side portion of the base material 58. Therefore, in the present embodiment, for example, the liquid falling from the wafer 2 can be prevented from penetrating into the hand base 37 by the cover 54.
In the present embodiment, the slide shaft 61, to the base end of which the pressing member 50 is fixed at the tip, is slidably held by the shaft holding member 62, and the shaft holding member 62 is formed with a through hole 62a through which the slide shaft 61 is inserted, but a flange portion 61a that extends radially outward of the slide shaft 61 is formed on the tip side of the slide shaft 61. Therefore, in the present embodiment, for example, the flange portion 61a prevents the liquid falling from the wafer 2 from penetrating into the hand base 37 through the through hole 62a of the shaft holding member 62.
(other embodiments)
The above-described embodiments are examples of preferred embodiments of the present invention, but the present invention is not limited thereto, and various modifications and changes can be made without changing the gist of the present invention.
In the above embodiment, the flange portion 61a formed on the front end side of the slide shaft 61 may not be the front end portion of the slide shaft 61. That is, the flange portion 61a may be formed between the base end of the base material 58 and the shaft holding member 62 in the axial direction of the slide shaft 61. In the above embodiment, the arm 4 may be constituted by three or more arm portions rotatably connected to each other. In the above embodiment, the number of hands 3 and arms 4 of the robot 1 may be one. In the above embodiment, the robot 1 may be configured to convey objects other than the wafer 2. In the above embodiment, the robot 1 is a robot for transporting an object to be transported, but the robot to which the present invention is applied may be a robot for other purposes.
Symbol description
1. Robot (horizontal multi-joint robot)
2. Wafer (semiconductor wafer, object to be transported)
3. Hand (supported part)
4. Arm
5. Main body (support)
7. First arm (support, supported, base side arm)
8. Second arm (support, supported, front arm)
10 to 12 joint parts
17. Fixing part (support side part)
21. Arm body (supported side parts)
21a cylindrical cover part
26. Bearing pressing part (support side part)
29. Arm body (supported side parts)
29a cylindrical cover part
34. Fixing part (support side part)
38. Fixing part (supported side part)
38a cylindrical cover part
48. End face abutting member
50. Pressing member
51. Moving mechanism
54. Cover for vehicle
61. Sliding shaft
61a flange portion
62. Shaft holding member
62a.

Claims (6)

1. A horizontal multi-joint robot, wherein an arm moves in a horizontal direction,
comprises a support part and a supported part, wherein the supported part is arranged on the upper side of the support part and is rotatably connected with the support part,
the support section includes an annular support side member that constitutes at least a part of an outer peripheral side portion of the support section in a joint section that is a connection portion between the support section and the supported section,
the supported portion includes a supported-side member that constitutes at least a part of an outer peripheral portion of the supported portion in the joint portion,
the supported side member includes a tubular covering portion that covers at least an upper portion of the supporting side member from a radially outer side of the joint portion over an entire circumference,
the lower end of the cylindrical cover portion is disposed below the upper end of the support-side member.
2. The horizontal multi-joint robot of claim 1, wherein,
a hand as the supported portion, the hand loading the object to be conveyed,
the arm includes a distal arm portion as the support portion, and the distal arm portion is rotatably connected to the hand at a distal end side.
3. The horizontal multi-joint robot of claim 1, wherein,
the hand for loading the object to be conveyed is provided,
the arm is provided with: a distal arm portion serving as the supported portion, the distal arm portion being rotatably connected to the hand at a distal end side thereof; and a base end side arm portion as the support portion, the base end side arm portion being rotatably connected to a base end side of the tip end side arm portion on a tip end side.
4. The horizontal multi-joint robot of claim 1, wherein,
comprising a main body part as the support part, the main body part being rotatably connected to the base end side of the arm,
the arm includes a base end side arm portion as the supported portion, and the base end side of the base end side arm portion is rotatably connected to the main body portion.
5. The horizontal multi-joint robot according to any one of claim 1 to 4, wherein,
comprising a hand which carries a transport object and is rotatably connected to the front end side of the arm,
the hand is provided with: an end face abutting member which is disposed on the front end side of the hand and has an abutting face that abuts against the end face of the conveyance object; a pressing member that presses the conveyance object toward the contact surface; a moving mechanism that is disposed inside the base end side of the hand and moves the pressing member; and a cover that covers the moving mechanism from the upper side,
the base end of the pressing component is connected with the moving mechanism,
the cover covers a base end side portion of the pressing member from an upper side.
6. The horizontal multi-joint robot according to any one of claim 1 to 4, wherein,
comprising a hand which carries a transport object and is rotatably connected to the front end side of the arm,
the hand is provided with: an end face abutting member which is disposed on the front end side of the hand and has an abutting face that abuts against the end face of the conveyance object; a pressing member that presses the conveyance object toward the contact surface; a moving mechanism that is disposed inside the base end side of the hand and moves the pressing member; and a cover that covers the moving mechanism from the upper side,
the moving mechanism includes: a sliding shaft having a base end of the pressing member fixed to a front end thereof; and a shaft holding member that holds the slide shaft so as to be slidable,
the shaft holding member is formed with a through hole through which the sliding shaft is inserted,
the slide shaft is linearly slidable with respect to the shaft holding member,
a flange portion extending radially outward of the sliding shaft is formed on a front end side of the sliding shaft.
CN202211502546.8A 2021-11-30 2022-11-28 Horizontal multi-joint robot Pending CN116197945A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021194877A JP2023081151A (en) 2021-11-30 2021-11-30 Horizontally articulated robot
JP2021-194877 2021-11-30

Publications (1)

Publication Number Publication Date
CN116197945A true CN116197945A (en) 2023-06-02

Family

ID=86516221

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202211502546.8A Pending CN116197945A (en) 2021-11-30 2022-11-28 Horizontal multi-joint robot

Country Status (3)

Country Link
JP (1) JP2023081151A (en)
KR (1) KR20230081635A (en)
CN (1) CN116197945A (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7032927B2 (en) 2017-12-28 2022-03-09 日本電産サンキョー株式会社 Industrial robot

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JP2023081151A (en) 2023-06-09
KR20230081635A (en) 2023-06-07

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