CN116180003A - Processing method of macro-micro integrated durable hydrophilic multistage composite groove - Google Patents

Processing method of macro-micro integrated durable hydrophilic multistage composite groove Download PDF

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Publication number
CN116180003A
CN116180003A CN202310149557.0A CN202310149557A CN116180003A CN 116180003 A CN116180003 A CN 116180003A CN 202310149557 A CN202310149557 A CN 202310149557A CN 116180003 A CN116180003 A CN 116180003A
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Prior art keywords
groove
macro
laser
durable hydrophilic
processing
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Inventor
娄德元
李珩
陈鹏健
江宏亮
杨东超
卢更新
梁恩康
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Hubei University of Technology
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Hubei University of Technology
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/028—Physical treatment to alter the texture of the substrate surface, e.g. grinding, polishing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/362—Laser etching
    • B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10—Glass or silica
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Abstract

The invention discloses a processing method of a macro-micro integrated durable hydrophilic multistage composite groove, which comprises the following steps: s1, preparing a runner matrix with an open groove structure by adopting a mechanical forming or laser grooving process, and removing dust in the groove and on the surface of the groove; s2, covering the flow passage substrate with a film material; s3, covering the transparent target material on an open groove structure of the covering film material by adopting a compacting or vacuumizing method; s4, adopting a laser transmission transparent target material to perform texture deposition on the surface of the groove structure to form a durable transition layer, and further forming a durable hydrophilic composite groove with a multilevel structure; s5, post-processing: and (3) placing the deposition combination obtained in the step (S4) in an atmosphere box for baking, wherein the purpose is to improve the bonding strength of the deposition particles and the open grooves and improve the wettability. The multistage composite groove structure prepared by the laser texture deposition process can improve the durability of liquid infiltration and the wicking transport energy, and improve the heat and mass transfer efficiency of the groove device.

Description

Processing method of macro-micro integrated durable hydrophilic multistage composite groove
Technical Field
The invention relates to the technical field of microelectronic heat dissipation, in particular to a processing method of a macro-micro integrated durable hydrophilic multistage composite groove.
Background
The micro heat pipe has high heat transfer efficiency and quick thermal response, and is becoming an ideal heat dissipation component in the fields of microelectronics, chemical industry and the like. The micro heat pipe is generally composed of an evaporation section, a heat insulation section and a condensation section, wherein the condensation section has important influence on the heat transfer performance. The condensing heat transfer is mainly applied to a refrigerating system, belongs to an important component in the heat exchange process, and is essentially that gas is liquefied on the condensing wall surface, so that heat is quickly transferred to the vicinity of a substrate and is taken away by circulating water. At present, the condensation heat transfer is widely applied to the fields of power generation, sea water desalination, chemical industry and the like, and has very broad application prospect. Therefore, if the efficiency of condensing heat transfer can be improved, the problems of energy consumption, environmental pollution and the like are improved greatly. In order to improve the durability of the groove and enable the micro heat pipe to be recycled, the invention adopts a laser texture deposition process to deposit transparent target particles on the surface of the groove to form a durable transition layer. The pulse laser deposition technology requires a paraxial donor, a vacuum environment, a deposition thickness of nanometer, a surface of nanometer structure, and laser and particle beam reflection. And the laser texture deposition is carried out by taking a light-transmitting material as a donor, so that transmission is carried out, a vacuum environment is not needed, and a cross-scale integrated designable structure from macroscopic scale to nanometer scale can be constructed on the surface. The pulse laser deposition is to ablate a target material to sputter a large number of complex micro-nano particles to form plasma, the plasma reaches a substrate after being directionally expanded in vacuum or background gas to form a product on the substrate, and the existence of the particles sputtered in the explosion process caused by laser greatly reduces the quality of a film, so that the deposition surface is uneven. Under the condition of micro-heat pipe high-temperature liquid circulation, the transparent target material on the groove is more firmly deposited, the transportation performance is better, and the durability of the use is better.
Disclosure of Invention
In recent years, with higher integration of electronic devices, the smaller the volume becomes, and thus, a heat dissipation problem of high heat flux density is caused. The cooling technology of electronic devices has become a key to the development of microelectronic technology, and the requirements of the cooling technology include compactness, reliability, flexibility, high heat dissipation efficiency and the like, which provide new challenges for the application of modern heat transfer technology in the field of electronic cooling. The micro heat pipe mainly comprises a pipe shell, a working medium and a liquid absorption core, and is widely applied to the field of microelectronic heat dissipation. Currently, the microelectronics industry is moving toward lighter and thinner, and conventional wicks have failed to meet their size requirements. Therefore, the invention provides a method for preparing the macro-micro integrated material surface composite groove structure.
The technical scheme adopted for solving the technical problems is as follows:
a processing method of a macro-micro integrated durable hydrophilic multistage composite groove comprises the following steps:
s1, preparing a runner matrix with an open groove structure by adopting a mechanical forming or laser grooving process, and removing dust in the groove and on the surface of the groove to meet the requirement of binding force;
s2, covering a flow channel substrate with a film material (a carbon material film, a diamond powder thin layer stacked film, graphene, a graphene oxide film, a carbon nano tube film and the like);
s3, covering the transparent target material on an open groove structure of the covering film material by adopting a compacting or vacuumizing method;
s4, adopting a laser transmission transparent target material to perform laser texture deposition on the surface of the groove structure to form a durable transition layer, and further forming a deposition combination of durable hydrophilic composite grooves with multi-stage structures;
s5, post-processing: and (3) placing the deposition combination obtained in the step S4 in vacuum at 50-500 ℃ for 2-48 hours, wherein the aim is to improve the bonding strength of the deposition particles and the open grooves and further improve the durability.
Preferably, in the processing method of the macro-micro integrated durable hydrophilic multistage composite groove, the runner matrix is Al, cu, mg, ag high-heat-conductivity alloy or a compound such as SiC and AlN or a ceramic plate.
Preferably, the processing method of the macro-micro integrated durable hydrophilic multistage composite groove is characterized in that the cross section of the groove structure is a geometric groove with the depth of 1-2 mm.
Preferably, in the processing method of the macro-micro integrated durable hydrophilic multistage composite groove, the transparent target material contains SiO2, al2O3 or other materials, and can transmit more than 93% of laser energy.
Preferably, the processing method of the macro-micro integrated durable hydrophilic multistage composite groove adopts a laser transmission transparent target material to form a 'well' -shaped pattern on the surface of the groove structure.
Preferably, in the processing method of the macro-micro integrated durable hydrophilic multistage composite groove, the composite groove is a macro-micro integrated groove, the geometric groove provides main wicking capability, and the transparent target micro-nano particles deposited on the surface of the groove can improve the wicking capability of the groove and absorb water against gravity.
Preferably, in the processing method of the macro-micro integrated durable hydrophilic multi-stage composite groove, the step S3 can use vacuum, air, ar or N 2 An atmosphere.
Preferably, in the processing method of the macro-micro integrated durable hydrophilic multistage composite groove, dust in the groove and dust on the surface are removed by a dust collector in the S1 so as to meet the requirement of binding force.
Preferably, in the above processing method of the macro-micro integrated durable hydrophilic multi-level composite groove, in S1, the laser grooving process is as follows: the method adopts a short pulse laser with the wavelength of 1064nm, the laser pulse is 1 ms-1 fs, the repetition frequency is 1 Khz-10 Ghz, and the single pulse energy is 1 mu J-100 mJ to notch the substrate.
Preferably, in the processing method of the macro-micro integrated durable hydrophilic multi-level composite groove, in the step S3, a laser texture deposition process is as follows: a short pulse laser is adopted, the wavelength of the laser is 1064nm, the laser pulse is 1 ms-1 fs, the repetition frequency is 1 Khz-10 Ghz, and the single pulse energy is 1 mu J-100 mJ, so that a durable transition layer is deposited on the groove structure.
Preferably, the processing method of the macro-micro integrated durable hydrophilic multistage composite groove comprises the following steps of: and (3) placing the deposition combination obtained in the step (S3) in a vacuum oven and baking for 24 hours at the temperature of 80 ℃ so as to improve the bonding strength of the deposition particles and the open grooves and further improve the durability.
The processing method of the macro-micro integrated durable hydrophilic multistage composite groove is used for preparing a condensation section of the micro heat pipe so as to improve the wicking capability and durability of the micro heat pipe.
The beneficial effects of the invention are as follows: the method is used in the heat dissipation of the micro heat pipe, has the defects of high pollution, large thermal resistance and long processing period for the common chemical etching of the wettability surface, and can process macro and micro integrated grooves on the metal plate by adopting a chemical-free laser texture deposition process. Meanwhile, under the conditions of long-term high temperature and liquid circulation, the wettability can be weakened, the wicking capability of the groove can be reduced, and the wicking capability and durability of the groove can be improved by adopting a multistage composite groove structure of a laser texture deposition process.
Drawings
FIG. 1 is a schematic structural view of a durable hydrophilic multi-stage composite groove of the present invention;
FIG. 2 is a schematic diagram of a laser texturing deposition process according to the present invention.
In the figure: 1. the structure comprises a runner matrix, 2, a groove structure, 3, a durable transition layer, 4, a base material, 5, a target material, 6, laser, 7 and a texture direction.
Detailed Description
In order to simplify the disclosure of the present application, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present application, including methods of manufacture, material selection, and processes.
The invention is further described below with reference to the accompanying drawings.
Example 1
Referring to fig. 1-2, a processing method of a macro-micro integrated durable hydrophilic multi-level composite groove is disclosed, which adopts a laser texture deposition process for processing, and comprises the following steps:
s1, preparing a runner substrate 1 with an open groove structure 2 by adopting a mechanical forming process or a laser grooving process, and removing dust in the groove and on the surface by adopting a dust collector to meet the requirement of binding force;
wherein: the runner matrix is Al, cu, mg, siC equal-height heat conduction metal or ceramic plate, the cross section of the groove structure 2 is a geometric groove, and preferably an inverted triangle groove;
s2, covering a flow channel substrate with a film material (a carbon material film, a diamond powder thin layer stacked film, graphene, a graphene oxide film, a carbon nano tube film and the like);
s3, covering the transparent target 5 on the open groove structure 2 covered with the film material by adopting a compacting or vacuumizing method, and providing different atmospheres (vacuum, air, ar, N) 2 ) The deposition effect of laser texture deposition is improved;
wherein: the laser texturing deposition process is a physical deposition process in which, first, a transparent target 5 (SiO 2 、Al 2 O 3 Etc.), the low-frequency pulse laser 6 is focused on the outer surface of the transparent target 5, the laser texture is performed on the transparent target 5 through program control, and the laser 6 transmits the transparent target 5 to make the transparent target 5 sputter particles to deposit a layer of particle coating film on the substrate. Unlike pulse laser deposition, the pulse laser deposition ablates the target 5 to sputter a large amount of complex micro-nano particles to form plasma, the plasma reaches the substrate after being directionally expanded in vacuum or background gas to form a product on the substrate, and the existence of the particles sputtered in the explosion process caused by the laser 6 greatly reduces the quality of the film, so that the deposition surface is not causedAnd (5) uniformity. The laser texture deposition process uses the laser texture process, so that the deposition process is more controllable and stable, and the combination of particles and the substrate is more uniform. Transparent target 5 (SiO) 2 ，Al 2 O 3 And the like) has the characteristics of relatively stable chemical properties, relatively high fire resistance, high temperature resistance, small thermal expansion coefficient, high insulation, corrosion resistance and the like, can protect the multistage composite groove structure from corrosion under the severe conditions of high temperature and liquid circulation, and improves the transportation durability. According to the invention, a transparent target 5 durable coating is deposited on the inner surface of the fine groove, a pulse laser deposition technology is adopted to sputter the target 5 to deposit the surface of the substrate 4, the particles of the target 5 are difficult to deposit on the inner wall of the fine groove, and the bonding force of the deposited particles is low. The invention adopts the laser texture deposition process, the laser texture pattern is controlled by a program, the transparent target material 5 can be well deposited on the inner surface of the tiny groove, and the bonding force between the target material 5 particles and the base material 4 can be well controlled by controlling the enabling interval of the laser texture by the program;
s4, transmitting the transparent target 5 by adopting laser 6, and performing texture deposition on the surface of the groove structure 2 along the texture direction 7 to form a durable transition layer 3; forming a durable hydrophilic composite groove with a multilevel structure;
wherein: the durable hydrophilic groove of the multistage composite groove is formed by micro-nano level target 5 particles and geometric grooves on an aluminum alloy runner substrate, the depth of the geometric groove structure is 1-2 mm, the size of the geometric groove structure is mainly controlled by the power of laser 6 processing, the geometric groove provides main wicking capability, and micro-nano level transparent target 5 particles embedded on the runner substrate can assist in improving the wicking capability, so that the multistage composite structure has excellent reverse gravity wicking capability; meanwhile, the transparent target 5 particles can also protect the wicking capability of the geometric grooves, so that the transportation durability is improved;
s5, post-processing: and (3) placing the deposition combination obtained in the step (S4) in a vacuum oven and baking for 24 hours at the temperature of 80 ℃ to improve the bonding strength of the deposition particles and the open grooves and further improve the durability.
Example 2
The processing method of the macro-micro integrated durable hydrophilic multistage composite groove can be used in the heat dissipation process of a micro heat pipe, and comprises the following specific steps:
(1) Forming a runner base 1 with an open channel structure 2:
and (3) placing the substrate in deionized water and absolute ethyl alcohol, cleaning by using an ultrasonic cleaner, and naturally airing the substrate after cleaning to obtain a clean substrate sample. A short pulse laser is adopted, the wavelength of the laser is 1064nm, the laser pulse is 1 ms-1 fs, the weight frequency is 1 Khz-10 Ghz, the single pulse energy is 1 mu J-100 mJ, the substrate is grooved, and the dust collector is used for removing the substrate powder brought by processing in the groove and on the surface;
(2) The film material is covered on the runner matrix covered with the film material (carbon material film, diamond powder thin layer stacked film, graphene oxide film, carbon nanotube film and the like);
(3) Technical preparation work before the laser texture deposition process:
the transparent target 5 is tightly pressed on the transparent target 5 to cover the open groove 2 or the transparent target 5 is tightly contacted with the base material by adopting a vacuumizing method, different atmospheres (vacuum, air, ar, N2) can be provided in the laser texture deposition process, the deposition effect of the laser texture deposition is improved, the whole block is covered during deposition, and the environment is changeable (vacuum, air, ar, O) 2 Etc.), the interface contact is varied (a gap of 300-10 μm can be formed, or negative pressure compaction can be formed), and SiO-containing material capable of partially transmitting laser light 6 can be used 2 ，Al 2 O 3 Waiting for medium participation;
(4) The durable transition layer 3 is prepared, and meanwhile, durable hydrophilic composite grooves with multi-stage structures are formed:
a short pulse laser is adopted, the wavelength of the laser is 1064nm, the laser pulse is 1 ms-1 fs, the repetition frequency is 1 Khz-10 Ghz, the single pulse energy is 1 mu J-100 mJ, and the thickness of the laser texture deposited durable transition layer 3 on the open groove structure is less than or equal to 2mm; the durable hydrophilic composite groove with the multi-stage structure is formed by two parts, namely a geometric deep groove structure with the diameter of 1-2 mm, so that main conveying capacity is provided, micro-nano transparent target 5 particles with smaller size are inlaid on a runner matrix, the conveying capacity is supplemented, and the two parts mutually assist to greatly improve wicking capacity and even show excellent reverse gravity water absorption performance;
(5) Post-treatment: and (3) placing the deposition combination obtained in the step (4) in a vacuum oven and baking for 24 hours at the temperature of 80 ℃ so as to improve the bonding strength of the deposition particles and the open grooves and further improve the durability.
Overall, the advantages of the invention are as follows:
1. the processing method of the macro-micro integrated durable hydrophilic multistage composite groove adopts the laser grooving process to prepare the runner matrix 1 with the groove structure 2, adopts the laser texture deposition process to deposit the durable transition layer on the open groove structure 2, and simultaneously forms the multistage structured composite groove.
2. The invention adopts the durable multi-stage structure composite groove, and prepares the multi-stage composite structure with the micro-nano structure in the process of laser texture deposition, and the wicking transportation capability of the micro-heat pipe is improved due to the capillary action of the micro-nano structure on the groove, so that the heat dissipation capability of the heat pipe is improved, and the durable transition layer can enable the micro-heat pipe to be reused, and the durability of the micro-heat pipe is improved.
Of course, the above embodiments are only preferred embodiments of the present invention, and the scope of the present invention is not limited thereto, so that all equivalent modifications made in the principles of the present invention are included in the scope of the present invention.

Claims (10)

1. A processing method of a macro-micro integrated durable hydrophilic multistage composite groove is characterized by comprising the following steps of: the method comprises the following steps:
s1, preparing a runner matrix with an open groove structure by adopting a mechanical forming or laser grooving process, and removing dust in the groove and on the surface of the groove to meet the requirement of binding force;
s2, covering the flow passage substrate with a film material;
s3, covering the transparent target material on an open groove structure of the covering film material by adopting a compacting or vacuumizing method;
s4, adopting a laser to transmit a transparent target material, performing laser texture deposition on the surface of the groove structure to form a transition layer, and removing the target material to form a deposition combination body with a multistage structure and a durable hydrophilic composite groove;
s5, post-processing: and (3) placing the deposition combination obtained in the step S4 in vacuum at 50-500 ℃ for 2-48 hours, wherein the aim is to improve the bonding strength of the deposition particles and the open grooves and further improve the durability.
2. The method for processing the macro-micro integrated durable hydrophilic multi-stage composite groove according to claim 1, wherein the method comprises the following steps: the runner matrix is Al, cu, mg, ag high-heat-conductivity alloy or SiC, alN compound or ceramic plate.
3. The method for processing the macro-micro integrated durable hydrophilic multi-stage composite groove according to claim 1, wherein the method comprises the following steps: the cross section of the groove structure is a geometric groove with the depth of 1-2 mm.
4. The method for processing the macro-micro integrated durable hydrophilic multi-stage composite groove according to claim 1, wherein the method comprises the following steps: the transparent target material is a composite material which can transmit more than 93% of laser.
5. The method for processing the macro-micro integrated durable hydrophilic multi-stage composite groove according to claim 1, wherein the method comprises the following steps: and a laser-transmitting transparent target material is adopted to form a pattern on the surface of the groove structure.
6. A method of processing a macro-micro integrated durable hydrophilic multi-stage composite groove according to claim 3, wherein: the composite groove is a macro-micro integrated groove, the geometric groove provides main wicking capability, and transparent target micro-nano particles deposited on the surface of the groove improve the wicking capability of the groove and absorb water against gravity.
7. The method for processing the macro-micro integrated durable hydrophilic multi-stage composite groove according to claim 1, wherein the method comprises the following steps: vacuum, air, ar or N can be used in S3 2 An atmosphere.
8. The method for processing the macro-micro integrated durable hydrophilic multi-stage composite groove according to claim 1, wherein the method comprises the following steps: and in the step S1, the dust in the groove and on the surface is removed by adopting post-treatment so as to meet the requirement of binding force.
9. The method for processing the macro-micro integrated durable hydrophilic multi-stage composite groove according to claim 1, wherein the method comprises the following steps: in the step S4, the laser texture deposition process comprises the following steps: short pulse laser with wavelength of 700-3000nm, laser pulse of 1 ms-1 fs, repetition frequency of 0.01 Khz-10 Ghz and single pulse energy of 0.01 muJ-100 mJ.
10. A method of processing a macro-micro integrated durable hydrophilic multi-stage composite groove according to any of claims 1-9 for preparing the condensing section of a micro heat pipe to enhance its wicking and durability.
CN202310149557.0A 2023-02-21 2023-02-21 Processing method of macro-micro integrated durable hydrophilic multistage composite groove Pending CN116180003A (en)

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CN202310149557.0A CN116180003A (en) 2023-02-21 2023-02-21 Processing method of macro-micro integrated durable hydrophilic multistage composite groove

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Application Number Priority Date Filing Date Title
CN202310149557.0A CN116180003A (en) 2023-02-21 2023-02-21 Processing method of macro-micro integrated durable hydrophilic multistage composite groove

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CN116180003A true CN116180003A (en) 2023-05-30

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