CN1160851C - Support structure for piezoelectric resonator, electronic device, ladder filter and communication apparatus - Google Patents
Support structure for piezoelectric resonator, electronic device, ladder filter and communication apparatus Download PDFInfo
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- CN1160851C CN1160851C CNB001203347A CN00120334A CN1160851C CN 1160851 C CN1160851 C CN 1160851C CN B001203347 A CNB001203347 A CN B001203347A CN 00120334 A CN00120334 A CN 00120334A CN 1160851 C CN1160851 C CN 1160851C
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- electric resonator
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- 238000004891 communication Methods 0.000 title claims description 23
- 239000000758 substrate Substances 0.000 claims abstract description 50
- 239000000463 material Substances 0.000 claims description 46
- 229920005989 resin Polymers 0.000 claims description 27
- 239000011347 resin Substances 0.000 claims description 27
- 238000009413 insulation Methods 0.000 claims description 17
- 239000002184 metal Substances 0.000 claims description 14
- 229910052751 metal Inorganic materials 0.000 claims description 14
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 abstract description 6
- 239000003822 epoxy resin Substances 0.000 abstract description 4
- 229920000647 polyepoxide Polymers 0.000 abstract description 4
- 229910052759 nickel Inorganic materials 0.000 abstract description 3
- 239000000945 filler Substances 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 12
- 238000000354 decomposition reaction Methods 0.000 description 10
- 238000009434 installation Methods 0.000 description 6
- 230000006835 compression Effects 0.000 description 5
- 238000007906 compression Methods 0.000 description 5
- 230000005684 electric field Effects 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/178—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of a laminated structure of multiple piezoelectric layers with inner electrodes
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0504—Holders; Supports for bulk acoustic wave devices
- H03H9/0514—Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/58—Multiple crystal filters
- H03H9/60—Electric coupling means therefor
- H03H9/605—Electric coupling means therefor consisting of a ladder configuration
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
A piezoelectric device includes a substrate. The substrate is provided with pattern electrodes located on a major surface thereof. Intermediate portions of external electrodes of a piezoelectric resonator are supported by a supporting member at land electrodes provided at ends of the pattern electrodes. The supporting member includes a plurality of substantially cylindrical units made of nickel. A filler made of an epoxy resin is formed around the substantially cylindrical units.
Description
Technical field
The present invention relates to a kind of supporting structure that is used for piezo-electric resonator, also relate to electronic installation, ladder-type filter and communication equipment.Especially, the present invention relates to a kind of supporting structure that is used for piezo-electric resonator, wherein, this use piezo-electric resonator that for example length is vibrated or expansion is vibrated is supported on the approximate centre of piezo-electric resonator by support member.The invention still further relates to a kind of electronic installation such as ceramic filter, discriminator or ceramic resonator, the communication equipment that also relates to ladder-type filter and comprise this supporting structure.
Background technology
The present inventor has developed a kind of structure, wherein will be arranged on and have layer structure by the support member that electroconductive resin is made, and the piezo-electric resonator that uses the length vibration is along its mid portion longitudinally, and by this support member with the piezo-electric resonator support and be connected electrically to substrate.
The inventor has also developed another structure, wherein will be arranged on piezo-electric resonator with layer structure by the support member that insulating resin is made along its mid portion longitudinally, and is connected electrically to substrate by wiring or other suitable connector.
In order to obtain the fabulous resonance characteristic in the piezo-electric resonator, use a kind of low elasticity that has, flexible support member is arranged, make thus because the vibration of piezo-electric resonator minimizes the influence of deviation.On the other hand, the material that needs to have high breaking resistance is used for support member, because it must have sufficiently high intensity, so that impact resistance (owing to dropping or the condition around other).
But usually, the elasticity of material is high more, and then the intensity of material is big more.That is, do not have a kind of material to have high breaking resistance and low elasticity simultaneously, and that this point is the support member of piezo-electric resonator is needed.Holding strength and resonance characteristic for piezo-electric resonator are difficult to compatible.For example, when by welding or other suitable method piezo-electric resonator being fixed to on-chip weld zone, the bond strength between piezo-electric resonator and the substrate is very high, simultaneously, the deviation that is caused by the vibration of piezo-electric resonator significantly reduces, and thus, resonance characteristic is worsened.On the other hand, when supporting piezo-electric resonator by substrate by soft relatively resin component element (such as urethane resin), because urethane resin has low breaking resistance, so can't guarantee to have enough opposings by dropping or the intensity of the impact that other condition causes.
Summary of the invention
In order to overcome the problems referred to above, a preferred embodiment of the present invention provides a kind of supporting structure that is used for piezo-electric resonator, and it has the impact strength of height, wherein, obtains fabulous resonance characteristic.
In addition, preferred embodiment of the present invention provides a kind of electronic installation, ladder-type filter and communication equipment, and each all uses this piezo-electric resonator that is used for, and has the height impact strength, and wherein obtains the supporting structure of fabulous resonance characteristic.
According to a preferred embodiment of the present invention, a kind of supporting structure that is used for piezo-electric resonator preferably comprises piezo-electric resonator, substrate and is used for piezo-electric resonator is supported in the substrate of the approximate center of its first type surface.Piezo-electric resonator is along the direction vibration that is arranged essentially parallel to first type surface.Support member is made with second kind of material with relatively low breaking resistance and low elasticity by having higher relatively breaking resistance and elastomeric first kind of material.Interface between first and second kinds of materials is provided with to such an extent that be substantially perpendicular to the first type surface of piezo-electric resonator.
Piezo-electric resonator can use length vibration, and the interface between the material can be provided with to such an extent that be substantially perpendicular to the surface of substrate.
Supporting structure can comprise at least one cylindrical unit basically, and the first type surface that it is substantially perpendicular to piezo-electric resonator extends, and also has an obturator, be arranged on cylindrical unit basically around.Basically cylindrical unit has the breaking resistance higher than the breaking resistance of obturator, and obturator has than the lower elasticity of elasticity of cylindrical unit basically.
In supporting structure according to the piezo-electric resonator of preferred embodiment of the present invention, piezo-electric resonator can have and comprises along the vertical stacked piezoelectric layer of the first type surface of piezo-electric resonator and the layer structure of electrode, and can be along the vibration of length longitudinally of the first type surface of piezo-electric resonator.
In supporting structure according to the piezo-electric resonator of preferred embodiment of the present invention, the exposure that insulation film can be arranged on one of the first type surface of piezo-electric resonator and side surface has the part of electrode, and two outer electrodes can be positioned on one of the first type surface of piezo-electric resonator and side surface, it comprises the surface of insulation film, thus, electrode is connected in two outer electrodes one.
Material with higher relatively breaking resistance and elastomeric cylindrical unit basically can be by making from resin, metal and the material that resin constituted selects a group that is covered with metal, and the material with obturator of relatively low breaking resistance and low elasticity can be made by insulating resin.
In supporting structure, be provided with the weld zone electrode to such an extent that protrude, and piezo-electric resonator be bearing on the weld zone by support member from the surface of substrate according to the piezo-electric resonator of preferred embodiment of the present invention.
In supporting structure according to the piezo-electric resonator of preferred embodiment of the present invention, two outer electrodes can be arranged on in the side surface of piezo-electric resonator, each of two outer electrodes can be connected electrically to the weld zone by support member.
According to another preferred embodiment of the present invention, electronic installation preferably comprises the supporting structure according to the piezo-electric resonator of the preferred embodiment of above-mentioned supporting structure.
Preferred embodiment according to another preferred provides a kind of ladder-type filter, wherein by the supporting structure of use according to the piezo-electric resonator of the supporting structure of above-mentioned preferred embodiment, is provided with a plurality of piezo-electric resonators on substrate.
According to preferred embodiment in addition of the present invention, communication equipment preferably comprises according to one in the supporting structure of the piezo-electric resonator of above-mentioned preferred embodiment and ladder-type filter.
The breaking resistance compatibility flexible that a problem that needs in the prior art to solve is a support member with it.
Be used for that piezo-electric resonator is supported in on-chip support member (wherein piezo-electric resonator uses length vibration or expansion vibration), needing the direction of breaking resistance along piezo-electric resonator and substrate disengaging, is effective on the surface (Z-direction) of edge perpendicular to substrate promptly.Do not need breaking resistance along the direction (X-Y direction) that is parallel to the surface of substrate.Because piezo-electric resonator is along the vibration of X-Y direction, the elasticity of support member need be low along those directions, and inessential along the elasticity of Z direction.
Consider above-mentioned situation, according to the support member of preferred embodiment of the present invention provide according to its direction with arrange different elasticity and breaking resistance.In supporting structure according to the piezo-electric resonator of preferred embodiment of the present invention, support member comprises the element such as cylindrical unit basically, it has higher relatively breaking resistance and elasticity, also has the another one element such as having relatively low breaking resistance and flexible obturator.To be provided with to such an extent that be substantially perpendicular to substrate such as the element of cylindrical unit basically, support member has high breaking resistance along the Z direction thus, has low elasticity along the X-Y direction.
Piezo-electric resonator simultaneously, provides the tension force that the connection between substrate and the piezo-electric resonator is broken along the vibration of X-Y direction along the Z direction.
In support member according to the piezo-electric resonator of preferred embodiment of the present invention, utilization is along the advantage of the X-Y direction low elasticity of support member, guaranteed fabulous resonance characteristic, and, by high breaking resistance, reached opposing owing to drop the very high intensity of the bump that causes with other condition along the Z direction.
Description of drawings
From with reference to the accompanying drawings, to the description of preferred embodiment of the present invention, various characteristics of the present invention, feature, element and advantage all are obvious.
Fig. 1 is the perspective view according to the piezo-electric device of first preferred embodiment of the present invention;
Fig. 2 is the decomposition diagram of piezo-electric device shown in Figure 1;
Fig. 3 is the perspective view of the piezo-electric resonator that uses in the piezo-electric device shown in Figure 1;
Fig. 4 is the perspective view of the piezo-electric device of second preferred embodiment of the present invention;
Fig. 5 is the decomposition diagram of piezo-electric device shown in Figure 4;
Fig. 6 is the end view according to the piezo-electric device of the 3rd preferred embodiment of the present invention;
Fig. 7 is the decomposition diagram of piezo-electric device shown in Figure 6;
Fig. 8 is the explanation of the piezo-electric device of the 4th preferred embodiment of the present invention;
Fig. 9 is the processing that forms the support member of piezo-electric device shown in Figure 8;
Figure 10 is the decomposition diagram according to the piezo-electric device of the 5th preferred embodiment of the present invention;
Figure 11 is the plane graph according to an example of the ladder-type filter of preferred embodiment of the present invention;
Figure 12 is the decomposition diagram of ladder-type filter shown in Figure 11;
Figure 13 is the diagrammatic sketch of ladder-type filter shown in Figure 11; With
Figure 14 is the block diagram according to an example of the double-superheterodyne reception machine of preferred embodiment of the present invention.
Embodiment
Fig. 1 is the perspective view according to the piezo-electric device of first preferred embodiment of the present invention.Fig. 2 is its decomposition diagram.Fig. 3 is the perspective view of the piezo-electric resonator that comprises in the piezo-electric device shown in Fig. 1 and 2.
Piezo-electric device shown in Figure 1 preferably comprises the substrate 12 by for example glass epoxy resin middle level.Substrate 12 preferably is provided with two electrode pattern 14a and 14b, is positioned on the first type surface of substrate 12, and the slit is arranged between them.Pattern electrode 14a is the configuration of L shaped shape basically, and has an end to extend towards the center of substrate 12.Pattern electrode 14b also is L shaped shape configuration basically, and has an end to extend towards the center of substrate 12. Weld zone 16a and 16b have been determined in the end of pattern electrode 14a and 14b, and they protrude 0.1mm from the surface of substrate 12.
The weld zone 16a of pattern electrode 14a and 14b and 16b pass through the support member 40 of piezo-electric resonator 20 pars intermedia office longitudinally to its support.
With reference to Fig. 3, piezo-electric resonator 20 preferably comprises the basic element of character 22 of substantial rectangular, and it for example is, length is 4mm, and width is about 0.5mm, the about 4mm of thickness.The basic element of character 22 is made by the piezoelectric ceramic that for example comprises with 20 piezoelectric layers 24 of stepped construction arrangement.Piezoelectric layer 24 preferably has uniform size.Each piezoelectric layer edge and its relative direction polarization of fabulous direction along the vertical adjacent piezoelectric layer 24 of the basic element of character 22.Each piezoelectric layer 24 vertically held that is arranged on the basic element of character 22 does not polarize.
The basic element of character 22 is provided with the internal electrode 26 between 20 piezoelectric layers 24.Internal electrode 26 is perpendicular to the longitudinal extension of the basic element of character 22, and vertically being separated from each other along the basic element of character 22.Be provided with internal electrode 26 to such an extent that cover the whole first type surface of each piezoelectric layer 24.Internal electrode 26 is exposed to the first type surface and the side surface of the basic element of character 22.
The end of each internal electrode alternately (first replaces internal electrode) 26 is covered by insulation film 28 in the position of the cross side of a first type surface of the basic element of character 22.Outer electrode 32 striden across be arranged on first insulation film 28 on the internal electrode 26 alternately, be arranged on the first type surface of the basic element of character 22.Outer electrode 34 striden across be arranged on second insulation film on the internal electrode 26 alternately, be arranged on the first type surface of the basic element of character 22, and be connected to first alternately on the internal electrode 26.
In piezo-electric resonator shown in Figure 3 20, outer electrode 32 and 34 is used as the I/O electrode.By signal being imported outer electrode 32 and 34, between the internal electrode of adjacent layer, applied electric field, thus, except the piezoelectric layer 24 at vertical end place of the basic element of character 22, piezoelectric excitation each piezoelectric layer 24.In this case, provide the electric field relative with adjacent electric field for adjacent piezoelectric layer 24 with each piezoelectric layer of the basic element of character 22 of relative direction polarization, thus as a unit, piezoelectric layer 24 is along identical direction expansion or compression.Promptly, by being connected to the internal electrode of outer electrode 32 and 34, for each piezoelectric layer 24 provides the electric field that vertically replaces along the basic element of character 22, drive each piezoelectric layer 24 expansions or contraction thus, thus, produce basic length vibration in piezo-electric resonator 20, its node is at the mid portion of the basic element of character 22.
With reference to Fig. 2, support member 40 preferably comprises a plurality of cylindrical unit of being made by for example nickel basically 42, and it is the cylinder form basically of the about 0.005mm of diameter.Obturator 44 be arranged on cylindrical unit 42 basically around.In this preferred embodiment of the present invention, obturator 44 is preferably made by for example epoxy resin, and length is about 1mm, the about 0.5mm of width, the about 0.05mm of thickness.A plurality of cylindrical unit basically 42 are provided with and stride across the slit of approaching 0.025mm mutually, pass through obturator 44 along thickness direction.
Piezo-electric resonator 20 is supported in the weld zone 16a of pattern electrode 14a and 14b and the mid portion longitudinally of the outer electrode 32 on the 16b and 34 by support member 40.The outer electrode 32 and 34 of piezo-electric resonator 20 is connected electrically to weld zone 16a and the 16b of pattern electrode 14a and 14b respectively by the cylindrical unit basically 42 of support member 40.
Table
Table 1 shows the elasticity and the breaking resistance of the element needs that comprise in the piezo-electric device 10 shown in Fig. 1 and 2.In order to obtain fabulous resonance characteristic, keep enough intensity simultaneously, support member preferably is not more than about 49 * 10 along the elasticity of X-Y direction
9N/m
2, and its breaking resistance along the Z direction preferably is not less than about 0.069 * 10
9N/m
2, wherein in table 1, find in various preferred embodiments of the present invention, all to be possible.
In the piezo-electric device shown in Fig. 1 and 2, piezo-electric resonator 20 is by being supported on the substrate 12 having relatively low flexible support member on the direction of vibration of piezo-electric resonator 20, wherein this piezo-electric resonator 20 uses the length vibration, and has higher relatively breaking resistance in the direction that piezo-electric resonator 20 is peeled off, thus, reach fabulous resonance characteristic, and increase opposing greatly owing to drop the intensity of the impact that causes with other condition.
Piezo-electric device 10 shown in Fig. 1 and 2 comprises support member 40, and it has cylindrical unit 42 basically, is made by the nickel of conduction, has the obturator of being made by insulating epoxy.Support member 40 also is used for respectively outer electrode 32 and 34 with piezo-electric resonator 20 and is connected electrically to the pattern electrode 14a that is arranged on the substrate 12 and weld zone 16a and the 16b of 14b.Have basically cylindrical unit 42 and conduct electricity along the Z direction, insulate along the X-Y direction with the support member 40 that strides across the certain interval setting mutually.As this new structure and the result of configuration, reduced the distance between the weld zone greatly, and do not caused and the problem such as short circuit allow the size of piezo-electric device 10 to reduce greatly thus.
In the piezo-electric device shown in Fig. 1 and 2 10, the weld zone 16a of pattern electrode 14a and 14b and 16b are provided with to such an extent that protrude from the surface of substrate 10.Because this configuration, guaranteeing between piezo-electric resonator 20 ends and substrate 12 has enough slits, even, produce fabulous resonance characteristic thus so that when installing piezo-electric resonator 20 to such an extent that slightly inclination is arranged, also do not suppress or obstruct the vibration of piezo-electric resonator 20.
Fig. 4 is the perspective view according to the piezo-electric device of second preferred embodiment of the present invention, and Fig. 5 is its decomposition diagram.In the piezo-electric device shown in the Figure 4 and 5 10, pattern electrode 14a and 14b are provided with and stride across beguine between them according to the bigger slit that is provided with between the pattern electrode 14a of the piezo-electric device 10 shown in Fig. 1 and 2 of first preferred embodiment and the 14b.
In the piezo-electric device shown in the Figure 4 and 5 10, piezo-electric resonator 20 preferably comprises first internal electrode that replaces 26, its end is covered by insulation film 28 in a side of the basic element of character 22, also have other alternately internal electrode (second replaces internal electrode) 26, its end is covered by the other side of insulation film 30 at the basic element of character 22.Alternately form outer electrode 32 on the insulation film 28 of the basic element of character 22 sides of internal electrode 26 being arranged on first.On second insulation film 30 that replaces on the internal electrode 26 of the other side that is arranged on the basic element of character 22, form outer electrode 34.
Piezo-electric resonator 20 is supported on the surface of substrate 12 by support member 40, this support member 40 is positioned at the mid portion of the first type surface of piezo-electric resonator 20, is not provided with outer electrode 32 and 34.
By line 36 and 38, the outer electrode 32 and 34 of piezo-electric resonator 20 is connected electrically to pattern electrode 14a and 14b.But, can also other suitable connection.
Piezo-electric device 10 according to second preferred embodiment shown in Figure 4 and 5, according to the identical mode of piezo-electric device 10 according to first preferred embodiment shown in Figure 1, support member has low elasticity along the X-Y direction, has breaking resistance along the Z direction, thus, the vibration of piezo-electric resonator 20 is not suppressed or obstructs, and produces fabulous resonance characteristic thus, and has guaranteed the impact that enough opposings cause owing to the condition of dropping or other is suitable.
Fig. 6 is the end view of the 3rd preferred embodiment according to the present invention.Fig. 7 is the decomposition diagram of piezo-electric device.Piezo-electric device 10 shown in Fig. 6 and 7 is different from the piezo-electric device 10 according to first preferred embodiment shown in Figure 1, that is, the piezo-electric device 10 shown in Fig. 6 and 7 comprises a piezo-electric resonator 10, and it is configured with the vibration of expansion vibration mode.Piezo-electric resonator 20 comprises the piezoelectric layer 24 of square plate shape basically.Two outer electrodes 32 and 34 are divided into two electrodes of part therebetween by an electrode that will be arranged on the first type surface, and are positioned on the first type surface of piezoelectric layer 24.Another one outer electrode 35 is positioned on the another one first type surface of piezoelectric layer 24.Piezoelectric layer 24 polarizes along thickness direction.As by shown in the arrow among Fig. 6, piezoelectric layer 24 is along the mutual reverse polarization of thickness direction: be provided with along a direction in the part that is provided with outer electrode 32 in the part of outer electrode 34 along another direction.Piezo-electric resonator 20 is supported on the weld zone 16a and 16b of pattern electrode 14a and 14b by support member 40, the weld zone is roughly at the center of the piezoelectric layer 24 of piezo-electric resonator 20.
By the cylindrical unit basically 42 of support member 40, respectively the outer electrode 32 and 34 of piezo-electric resonator 20 is connected electrically to weld zone 16a and the 16b of pattern electrode 14a and 14b.
In the piezo-electric device shown in Fig. 6 and 7 10, the direction of the vibration of the piezo-electric resonator 22 of use expansion vibration is arranged essentially parallel to the surface of substrate 12, thus, produce fabulous resonance characteristic and enough holding strengths, its method is identical with the mode of the operation of the piezo-electric resonator that vibrates according to the use length of above-mentioned preferred embodiment.
Fig. 8 is the explanation according to the piezo-electric device of the 4th preferred embodiment of the present invention.Piezo-electric device shown in Fig. 8 is different from the piezo-electric device 10 according to first preferred embodiment shown in Fig. 1 and 2, wherein, the piezo-electric device of the 4th preferred embodiment shown in Figure 8 comprises support member 40, and wherein, cylindrical unit 42 constitutes the shape of the ball of vertical compression basically.This support member 40 can make in the following method and form.That is, an amount of circular resin particle (being used as cylindrical unit 42 basically) is mixed, and be dispersed in the resin, to form obturator 44.As shown in Figure 9, the resin that mixes is arranged on the weld zone 16a (16b) of the pattern electrode 14a (14b) on the substrate 12, piezo-electric resonator 20 is arranged on the resin bed of mixing, and compresses, heat, solidify so element of assembling, thus formation support member 40 as shown in Figure 8.By compression when solidifying, comprise the support member 40 of cylindrical unit 42 and obturator 44 basically with formation, increase greatly along the breaking resistance of compression direction, and reduce greatly along the elasticity that is substantially perpendicular to compression direction.
In piezo-electric device as shown in Figure 8, support member 40 has low elasticity along the X-Y direction, has high breaking resistance along the Z direction, thus, the vibration of piezo-electric resonator 20 is not suppressed, produce thus fabulous resonance characteristic and enough opposing owing to drop or other condition causes the intensity of impact.
The described cylindrical unit basically 42 that is formed from a resin can be used for the piezo-electric device 10 of basis second preferred embodiment as shown in Figure 4, and wherein, cylindrical unit 42 does not need electrically conductive basically.Basically cylindrical unit 42 can be by using metal or being covered with the material of resin of metal and electrically conductive, thus it can be used for as shown in figs. 1 and 6 according to of the present invention first and the piezo-electric device 10 of the 3rd preferred embodiment.
Figure 10 is the decomposition diagram according to the piezo-electric device 10 of the 5th preferred embodiment of the present invention.The place according to the piezo-electric device of first preferred embodiment that piezo-electric device 10 shown in Figure 10 is different from as illustrated in fig. 1 and 2 is, piezo-electric device as shown in figure 10 comprises support member 40, it has the tabular unit 42 that a plurality of edges are substantially perpendicular to the longitudinal extension of piezo-electric resonator 20, and support member 40 is divided into two parts that correspond respectively to weld zone 16a and 16b and outer electrode 32 and 34.
When piezo-electric resonator 20 when directions X vibrates, such as under according to the situation of the piezo-electric device 10 of the 5th preferred embodiment (support member has shape as shown in figure 10), the elasticity of the directions X of support member 40 is only important.In piezo-electric device 10 as shown in figure 10, by support member 40 piezo-electric resonator 20 is supported on the substrate 12, wherein support member 40 has relatively low elasticity along the direction of vibration of the piezo-electric resonator 20 that uses the length vibration, the direction that breaks away from along piezo-electric resonator 20 has higher relatively breaking resistance, produce fabulous resonance characteristic and opposing thus owing to drop or the high strength of the bump that other condition causes.
Figure 11 is the plane graph according to the ladder-type filter 50 of another preferred embodiment of the present invention, and Figure 12 is its decomposition diagram.Ladder-type filter 50 shown in Figure 11 and 12 preferably has four pattern electrode 14a, 14b, 14c and 14d, and they are provided with to such an extent that stride across gap on the first type surface of substrate 12.Pattern electrode 14a is provided with 8 weld zone 16a to 16h to 14d, and they are provided with to such an extent that be parallel to each other basically.Weld zone 16a is positioned at the end of pattern electrode 14a.Weld zone 16d and 16e are positioned at the end of pattern electrode 14c. Weld zone 16f and 16g are positioned at the end of pattern electrode 14d.Weld zone 16h is positioned at the other end of pattern electrode 14b.
8 weld zone 16a on the substrate 12 are supported in 4 piezo-electric resonator 20a1,20b1,20b2 and 20a2 the core of each piezo-electric resonator by 4 support member 40 to 1 6h.The outer electrode of each piezo-electric resonator is by the cylindrical unit basically 42 of support member 40, by this way, be connected electrically to the weld zone: the outer electrode 32 to 34 of piezo-electric resonator 20a1 is connected respectively to weld zone 16a and 16b, the outer electrode 32 of piezo-electric resonator 20b1 is connected respectively to weld zone 16c and 16d, and the outer electrode 32 and 34 of piezo-electric resonator 20b2 is connected respectively to weld zone 16g and 16h.Figure 13 is the diagrammatic sketch of the circuit of the ladder-type filter 50 that is provided with like this.
Figure 14 is the block diagram according to the double-superheterodyne reception machine of other preferred embodiment of the present invention.Double-superheterodyne reception machine 100 as shown in figure 14 comprises antenna 102.Antenna 102 is connected to the input of input circuit 104.The impedance matching that input circuit 104 is carried out between antenna 102 and the high-frequency amplifier 106 will be described below.Input circuit 104 comprises tuning circuit or band pass filter, is used to select the electric wave that provides.
The output of input circuit 104 is connected to the input of high-frequency amplifier 106.The low-down electric wave of high-frequency amplifier 106 low noise amplifying powers, and improve sensitivity, and it has improved the selectivity of picture frequency.The output of high-frequency amplifier 106 is connected to the input of first frequency mixer 108.First frequency mixer 108 mixes ripple and the local oscillator wave that provides, and produces first intermediate wave (towards their sums or poor).The another one input of first frequency mixer 108 is connected to the output of first local oscillator 110.First local oscillator, 110 outputs, first local oscillator wave is used to produce first intermediate wave.The output of first frequency mixer 108 is connected to the input of first band pass filter 112.First band pass filter 112 sends first intermediate wave.The output of first band pass filter 112 is connected to the input of second frequency mixer 114.Second frequency mixer 114 mixes first intermediate wave and second local oscillator wave, and produces second intermediate wave (their sums or poor).The another one input of second frequency mixer 114 is connected to the output of second local oscillator 116.Second local oscillator, 116 outputs, second local oscillator wave is used to produce second intermediate wave.The output of second frequency mixer 114 is connected to the input of second band pass filter 118.Second band pass filter 118 sends second intermediate wave.The output of second band pass filter 118 is connected to the input of intermediate frequency amplifier 120.Intermediate frequency amplifier 120 amplifies second intermediate wave.The output of intermediate frequency amplifier 120 is connected to the input of wave detector 122.Wave detector 122 obtains signal wave from second intermediate wave.The output of wave detector 122 is connected to the input of low frequency amplifier 124.Low frequency amplifier 124 is amplified to a value with signal wave, can drive a loud speaker in this value.The output of low frequency amplifier 124 is connected to loud speaker 126.
According to this preferred embodiment of the present invention, in double-superheterodyne reception machine 100, the piezo-electric resonator according to above-mentioned preferred embodiment can be used as wave detector 122.
The ladder-type filter of above-mentioned preferred embodiment can be used as first band pass filter 112 or second band pass filter.
According to preferred embodiment of the present invention, in single superheterodyne receiver, above-mentioned piezo-electric resonator can be used as wave detector, and above-mentioned ladder-type filter can be used as band pass filter.
Though as mentioned above, laminated piezoelectric resonator or tabular piezo-electric resonator are used for each of piezo-electric device 10 or ladder-type filter 50,, according to the present invention, use the piezo-electric resonator of vibration mode can also have different configurations.
Though in piezo-electric device 10 or ladder-type filter 50, support member has above-mentioned configuration and shape, the material of support member and shape can be according to the present invention be made amendment in mode preferably.For example, cylindrical unit can have other shape and size basically, such as rectangular cells basically, and triangular element basically, the substantial rectangular unit also has other suitable shape and size.
According to the present invention, the supporting structure that is used for piezo-electric resonator is provided, wherein, reached the fabulous resonance characteristic and the high intensity of opposing impact.
In supporting structure according to piezo-electric resonator of the present invention, be provided with the weld zone to such an extent that protrude from the surface of substrate, piezo-electric resonator is supported on the weld zone by support member, thus, when having slightly when obliquely piezo-electric resonator being installed, can between the end of piezo-electric resonator and substrate surface, guarantee enough distances, avoid inhibition and obstruction thus, also produce fabulous resonance characteristic simultaneously the vibration of piezo-electric resonator.
According to the present invention, can obtain using electronic installation, ladder-type filter and the communication equipment of the supporting structure of piezo-electric resonator.
Should be understood that foregoing description only is used to illustrate the present invention.In the case of without departing from the present invention, those of ordinary skill in the art can find out various substitutions and modifications.Accordingly, the present invention has all this replacement, modifications and variations in appended claim scope.
Claims (38)
1. one kind is used for piezo-electric resonator is supported in on-chip support member, it is characterized in that described support member comprises:
First parts are by having high breaking resistance and elastomeric first kind of material made; With
Second parts are made by second kind of material with low breaking resistance and low elasticity; Wherein
Interface between described first and second kinds of materials is provided with perpendicular to the first type surface of described piezo-electric resonator, and described first parts are perpendicular to the first type surface of described piezo-electric resonator.
2. support member as claimed in claim 1, it is characterized in that also comprising at least one cylindrical unit of extending perpendicular to the first type surface of piezo-electric resonator and be arranged on described at least one cylindrical unit around obturator.
3. support member as claimed in claim 2 is characterized in that the breaking resistance of at least one cylindrical unit is higher than the breaking resistance of obturator, and the elasticity of described obturator is lower than the elasticity of described at least one cylindrical unit.
4. support member as claimed in claim 1 is characterized in that also comprising a plurality of cylindrical unit of extending perpendicular to the first type surface of piezo-electric resonator, and is arranged on the obturator around described a plurality of cylindrical unit.
5. support member as claimed in claim 4 it is characterized in that the breaking resistance of a plurality of cylindrical unit is higher than obturator, and the elasticity of obturator is lower than the elasticity of described a plurality of cylindrical unit.
6. support member as claimed in claim 2, it is characterized in that having high breaking resistance and elastomeric first kind of material and having at least one cylindrical unit one is by from by resin, metal be covered with the group that the resin of metal constitutes and select, and has a kind of in second kind of material of low breaking resistance and low elasticity and the obturator and is made by insulating resin.
7. electronic component is characterized in that comprising:
Piezo-electric resonator;
Substrate; With
Support member is held in it on substrate in the center of the first type surface of piezo-electric resonator;
Wherein, described piezo-electric resonator is along the direction vibration that is parallel to described first type surface, described support member comprises the second kind of material that has high breaking resistance and elastomeric first kind of material and have low breaking resistance and low elasticity, interface between described first and second kinds of materials is perpendicular to the first type surface of described piezo-electric resonator, and the support member of described first kind of material is perpendicular to the first type surface of described piezo-electric resonator.
8. electronic component as claimed in claim 7 is characterized in that piezo-electric resonator with length vibration mode vibration, and the interface between first and second kinds of materials is perpendicular to the surface of substrate.
9. electronic component as claimed in claim 7, it is characterized in that support member comprises the cylindrical unit that at least one extends perpendicular to the first type surface of piezo-electric resonator, and be arranged on obturator around described at least one cylindrical unit, the breaking resistance of described at least one cylindrical unit is higher than the breaking resistance of described obturator, and the elasticity of described obturator is lower than the elasticity of described at least one cylindrical unit.
10. electronic component as claimed in claim 7 is characterized in that piezo-electric resonator has to comprise along the vertical stacked piezoelectric layer of the first type surface of described piezo-electric resonator and the layer structure of electrode, and vertically vibrating with the length vibration mode along described first type surface.
11. electronic component as claimed in claim 10, it is characterized in that on the part of the described electrode of exposure of one of the described first type surface of piezo-electric resonator and side surface, having insulation film, and two outer electrodes are positioned on the described first type surface and described side surface that comprises the described insulation film that piezo-electric resonator has been installed on it, thus, described electrode is connected to one of described two outer electrodes.
12. electronic component as claimed in claim 7, it is characterized in that having one of high breaking resistance and elastomeric first kind of material and at least one cylindrical unit by from by resin, metal be covered with the material of selecting the group that the resin of metal constitutes and make, have one of second kind of material of low breaking resistance and low elasticity and obturator and make by insulating resin.
13. electronic component as claimed in claim 7 is characterized in that, the weld zone is set protrudes with surface from substrate, and piezo-electric resonator by described weld zone by the support member support.
14. electronic component as claimed in claim 13 is characterized in that two outer electrodes are positioned on one of side surface of piezo-electric resonator, each of two outer electrodes all is connected electrically on the weld zone by described support member.
15. a ladder-type filter is characterized in that comprising:
Piezo-electric resonator;
Substrate; With
Support member is held in it on described substrate at the center of the first type surface of piezo-electric resonator;
Wherein, described piezo-electric resonator is along the direction vibration that is parallel to first type surface, support member comprises the second kind of material that has high breaking resistance and elastomeric first kind of material and have low breaking resistance and low elasticity, and the interface between described first and second kinds of materials is perpendicular to the first type surface of piezo-electric resonator, and the support member of described first kind of material is perpendicular to the first type surface of described piezo-electric resonator.
16. ladder-type filter as claimed in claim 15 is characterized in that piezo-electric resonator with length vibration mode vibration, and the interface between first and second kinds of materials is perpendicular to the surface of substrate.
17. ladder-type filter as claimed in claim 15, it is characterized in that support member comprises at least one cylindrical unit of extending perpendicular to the first type surface of piezo-electric resonator and is arranged on obturator around described at least one cylindrical unit, the breaking resistance of described at least one cylindrical unit is higher than the breaking resistance of described obturator, and the elasticity of described obturator is lower than the elasticity of described at least one cylindrical unit.
18. ladder-type filter as claimed in claim 15 is characterized in that piezo-electric resonator has to comprise along the vertical stacked piezoelectric layer of piezo-electric resonator first type surface and the layer structure of electrode, and vertically vibrating with the length vibration mode along described first type surface.
19. ladder-type filter as claimed in claim 18, it is characterized in that on the part of the described electrode of exposure of one of the described first type surface of piezo-electric resonator and side surface, having insulation film, and two outer electrodes are positioned at and comprise on one of described first type surface that described insulation film is arranged on it and described side surface, and described thus electrode is connected on one of described two outer electrodes.
20. ladder-type filter as claimed in claim 15, it is characterized in that having high breaking resistance and elastomeric cylindrical unit by from by resin, metal be covered with the material of selecting the group that the resin of metal constitutes and make, second kind of material and obturator with low breaking resistance and low elasticity are made by insulating resin.
21. ladder-type filter as claimed in claim 15 is characterized in that being provided with the weld zone and protrudes with the surface from substrate, and piezo-electric resonator by support member by the weld zone support.
22. ladder-type filter as claimed in claim 21 is characterized in that two outer electrodes are positioned on one of side surface of piezo-electric resonator, and each of two outer electrodes all is connected electrically to one of weld zone by described support member.
23. a communication equipment is characterized in that comprising:
Piezo-electric resonator;
Substrate; With
Support member is held in it on substrate at the center of the first type surface of piezo-electric resonator;
Wherein, piezo-electric resonator is along the direction vibration that is parallel to first type surface, described support member comprises and has high breaking resistance and elastomeric first kind of material, and second kind of material with low breaking resistance and low elasticity, and the interface between described first and second kinds of materials is perpendicular to the first type surface of piezo-electric resonator, and the support member of described first kind of material is perpendicular to the first type surface of described piezo-electric resonator.
24. communication equipment as claimed in claim 23 it is characterized in that piezo-electric resonator with the vibration of length vibration mode, and the interface between described first and second kinds of materials is perpendicular to the surface of substrate.
25. communication equipment as claimed in claim 23, it is characterized in that support member comprises at least one cylindrical unit of extending perpendicular to the first type surface of piezo-electric resonator and is arranged on obturator around described at least one cylindrical unit, the breaking resistance of described at least one cylindrical unit is higher than the breaking resistance of described obturator, and the elasticity of described obturator is lower than the flexible elasticity of described at least one cylindrical unit.
26. communication equipment as claimed in claim 23 is characterized in that piezo-electric resonator has to comprise along the vertical stacked piezoelectric layer of the first type surface of piezo-electric resonator and the layer structure of electrode, and vertically vibrating with the length vibration mode along described first type surface.
27. communication equipment as claimed in claim 26, it is characterized in that on the part of the described electrode of exposure of one of the described first type surface of piezo-electric resonator and side surface, having insulation film, two outer electrodes are positioned on of the surface that comprising of the described first type surface of described piezo-electric resonator and described side surface insulation film arranged on it, and described thus electrode is connected in described two outer electrodes on one.
28. communication equipment as claimed in claim 23, it is characterized in that having high breaking resistance and elastomeric first kind of material and at least one cylindrical unit by a kind of the making of selecting from the group that is made of resin, metal and the resin that applied by metal, the obturator with low breaking resistance and low elasticity is made by insulating resin.
29. communication equipment as claimed in claim 23 is characterized in that being provided with the weld zone and protrudes with the surface from substrate, and piezo-electric resonator by support member by the weld zone support.
30. communication equipment as claimed in claim 29 is characterized in that two outer electrodes are positioned on one of side surface of piezo-electric resonator, and each of two outer electrodes all is connected to a weld zone by described support member.
31. a communication equipment is characterized in that comprising:
Substrate;
By being arranged on the ladder-type filter that described on-chip a plurality of piezo-electric resonators are determined;
Support member is held in it on described substrate at the center of the first type surface of described piezo-electric resonator;
Wherein, described piezo-electric resonator is along the direction vibration that is parallel to described first type surface, described support member comprises the second kind of material that has high breaking resistance and elastomeric first kind of material and have low breaking resistance and low elasticity, and the interface between described first and second kinds of materials is perpendicular to the first type surface of described piezo-electric resonator, and the support member of described first kind of material is perpendicular to the first type surface of described piezo-electric resonator.
32. communication equipment as claimed in claim 31 is characterized in that piezo-electric resonator with length vibration mode vibration, the interface between first and second kinds of materials is perpendicular to a surface of substrate.
33. communication equipment as claimed in claim 31, it is characterized in that support member comprises at least one cylindrical unit of extending perpendicular to the first type surface of piezo-electric resonator and is arranged on obturator around described at least one cylindrical unit, the breaking resistance of described at least one cylindrical unit is higher than the breaking resistance of described obturator, and the elasticity of described obturator is lower than the flexible elasticity of described at least one cylindrical unit.
34. communication equipment as claimed in claim 31 is characterized in that piezo-electric resonator has along the vertical stacked piezoelectric layer of the first type surface of piezo-electric resonator and the layer structure of electrode, and vertically vibrating with the length vibration mode along described first type surface.
35. communication equipment as claimed in claim 34, it is characterized in that on the part of the described electrode of exposure of one of the described first type surface of piezo-electric resonator and side surface, having insulation film, and two outer electrodes are positioned on of the surface that comprising of the described first type surface of described piezo-electric resonator and described side surface insulation film arranged on it, and described thus electrode is connected to one of described two outer electrodes.
36. communication equipment as claimed in claim 31, it is characterized in that having high breaking resistance and elastomeric at least one cylindrical unit by from by resin, metal be covered with the material of selecting the group that the resin of metal constitutes and make, second kind of material and obturator with low breaking resistance and low elasticity are made by insulating resin.
37. communication equipment as claimed in claim 31 is characterized in that being provided with the weld zone and protrudes with the surface from substrate, and piezo-electric resonator by support member by the weld zone support.
38. communication equipment as claimed in claim 37 it is characterized in that two outer electrodes are positioned on one of side surface of piezo-electric resonator, and two outer electrodes all is connected to one of described weld zone by described support member.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP190328/1999 | 1999-07-05 | ||
| JP19032899A JP3468163B2 (en) | 1999-07-05 | 1999-07-05 | Support structure for piezoelectric resonator, electronic component, ladder filter, and communication device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1279535A CN1279535A (en) | 2001-01-10 |
| CN1160851C true CN1160851C (en) | 2004-08-04 |
Family
ID=16256369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB001203347A Expired - Fee Related CN1160851C (en) | 1999-07-05 | 2000-07-05 | Support structure for piezoelectric resonator, electronic device, ladder filter and communication apparatus |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP1067684A3 (en) |
| JP (1) | JP3468163B2 (en) |
| KR (1) | KR20010021054A (en) |
| CN (1) | CN1160851C (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100473871B1 (en) * | 2000-11-13 | 2005-03-08 | 주식회사 엠에스솔루션 | Thin film resonator |
| WO2007088696A1 (en) * | 2006-01-31 | 2007-08-09 | Murata Manufacturing Co., Ltd. | Piezoelectric oscillator |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2562661Y2 (en) * | 1992-10-13 | 1998-02-16 | 株式会社村田製作所 | Mounting structure of piezoelectric element |
| WO1997008760A1 (en) * | 1995-08-25 | 1997-03-06 | Mitsui Chemicals, Inc. | Piezoelectric oscillator component, structure for supporting piezoelectric oscillator and method of mounting piezoelectric oscillator |
| JP3378163B2 (en) * | 1996-08-05 | 2003-02-17 | 株式会社村田製作所 | Piezo components |
| JPH10107579A (en) * | 1996-08-06 | 1998-04-24 | Murata Mfg Co Ltd | Piezoelectric component |
| JP3085233B2 (en) * | 1997-02-26 | 2000-09-04 | 株式会社村田製作所 | Piezoelectric transformer |
| JPH1131856A (en) * | 1997-07-10 | 1999-02-02 | Mitsui Chem Inc | Supproting structure of piezoelectric substrate for piezoelectric transformer, and the piezoelectric transformer provided with it |
| JPH11112267A (en) * | 1997-09-30 | 1999-04-23 | Mitsui Chem Inc | Mount structure for piezoelectric vibrator and mount method for the piezoelectric vibrator |
| US6114800A (en) * | 1997-10-01 | 2000-09-05 | Murata Manufacturing Co., Ltd | Piezoelectric component |
| KR19990031153A (en) * | 1997-10-09 | 1999-05-06 | 이형도 | Piezoelectric transformer mounting device |
-
1999
- 1999-07-05 JP JP19032899A patent/JP3468163B2/en not_active Expired - Fee Related
-
2000
- 2000-07-03 EP EP00114233A patent/EP1067684A3/en not_active Withdrawn
- 2000-07-05 KR KR1020000038267A patent/KR20010021054A/en not_active Application Discontinuation
- 2000-07-05 CN CNB001203347A patent/CN1160851C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1279535A (en) | 2001-01-10 |
| JP3468163B2 (en) | 2003-11-17 |
| KR20010021054A (en) | 2001-03-15 |
| JP2001024464A (en) | 2001-01-26 |
| EP1067684A2 (en) | 2001-01-10 |
| EP1067684A3 (en) | 2001-09-19 |
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