CN1160567C - Array-type flexible electric eddy sensor - Google Patents
Array-type flexible electric eddy sensor Download PDFInfo
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- CN1160567C CN1160567C CNB011401036A CN01140103A CN1160567C CN 1160567 C CN1160567 C CN 1160567C CN B011401036 A CNB011401036 A CN B011401036A CN 01140103 A CN01140103 A CN 01140103A CN 1160567 C CN1160567 C CN 1160567C
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- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
- G01N27/82—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws
- G01N27/90—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws using eddy currents
- G01N27/9006—Details, e.g. in the structure or functioning of sensors
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Abstract
The present invention relates to an array type flexible current vortex sensor which belongs to the technical field of sensors. The array type flexible current vortex sensor comprises sensitive coil arrays, a leading-out cable, a multiway gating switch and a Clapp oscillating circuit, wherein the sensitive coil arrays distributed in a certain mode are made on a film base through a flexible printed circuit board technique; the leading-out cable comprises leading-out signal wires connected with sensitive coils, and ground wires; the Clapp oscillating circuit is connected with the signal wires and the ground wires by the multiway gating switch. The present invention has the advantages of fine and thin structure, little probability of deformation, good temperature performance and good conformance, the base is in a flexible state, and the array type flexible current vortex sensor is especially suitable for the gap measurement between metal curved surfaces and non-metal curved surfaces.
Description
Technical field
The invention belongs to sensor technical field, particularly the structural design of current vortex sensor.
Background technology
The current vortex detection technique is a kind of detection technique of harmless, noncontacting measurement.Advantages such as current vortex sensor has simple in structure, and is highly sensitive, and the measure linear scope is big, is not subjected to the influence of media such as greasy dirt, and antijamming capability is strong, at machinery, electric power, oil, chemical industry, weaving, aviation, industrial sectors such as atomic energy are widely used.For example, be used for Displacement Measurement, size, thickness, vibration, rotating speed, pressure, conductivity, parameter and metal parts defects detection such as temperature.
Traditional current vortex sensor sensitive element is the coil that turns to enameled wire.The coil dimension temperature influence is very big, and therefore, its temperature performance is relatively poor.Simultaneously, the coil parameter of coiling differs greatly, unsuitable arrayed applications or batch process.Because the limitation of manufacture craft, this kind loop construction size are big, easy deformation, temperature performance is poor, consistance is poor, and are not suitable for the measurement of curved surface occasion, also are not suitable for the quick measurement occasion in the large tracts of land scope.Some researchs are also arranged, utilize printed circuit board technology that sensor coil is processed in circuit board top, perhaps with fine processes such as photoetching, the little coil of processing on silicon base.These current vortex sensor substrates are rigid state, can only be applied in the plane surveying occasion.
Traditional current vortex sensor frequency modulation type circuit generally adopts a carat bold and vigorous circuit.As shown in Figure 1, this circuit is made up of triode, resistance, electric capacity, sensor coil.Triode is the core parts of oscillatory circuit, four resistance R b1, Rb2, Rc, Re decision triode dc point, capacitor C b, C1, C2 and triode three extremely link to each other, and and capacitor C 3 and sensor coil together, form Colpitts oscillation circuit.The shortcoming of this circuit is hour to be difficult to starting of oscillation in the sensor coil quality factor.
Summary of the invention
The objective of the invention is to propose a kind of array-type flexible electric eddy sensor for overcoming the weak point of prior art.Have that structure is slim, not yielding, temperature performance good, high conformity, and substrate is flexible state, is particularly suitable for the clearance measurement between metal curved surface and nonmetal curved surface.
A kind of array-type flexible electric eddy sensor that the present invention proposes, it is characterized in that, comprise the sensor coil array of on film substrate, making of flexible printed circuit board technology (FPCB) by the certain way distribution, the outgoing cable of drawing signal wire and ground wire composition that links to each other with each sensor coil, multi-channel gating switch, and by multi-channel gating switch and said signal wire link to each other with ground wire the carat bold and vigorous oscillatory circuit; Said each sensor coil respectively has signal wire, two lead-in wires of ground wire; The ground wire and the signal wire of each sensor coil pool together, and form and draw the solid matter cable, and the other end of this cable is provided with the plug that links to each other with multi-channel gating switch; Said oscillatory circuit is on the basis of tradition carat bold and vigorous circuit, is provided with one and the inductance L of sensor coil parallel connection again.
The present invention carries out selection and design according to measuring condition and requirement, and said film substrate can adopt the flexible material that is fit to FPCB technology, as Kapton, and mylar etc.
The distribution mode of coil array, shape also can design arbitrarily.Said sensor coil can be made into individual layer or bilayer even multilayer, and the sensor coil shape can be circular, square or other shape.Each coil battle array respectively has two lead-in wires: signal wire, ground wire.The ground wire and the signal wire of each sensor coil pool together, and form and draw the solid matter cable, and the ground wire of each coil also can be parallel to together.The other end of cable is made FPC (Flexible Printed Circuit) plug, links to each other with multi-channel gating switch.
Said oscillatory circuit is on the basis of tradition carat bold and vigorous circuit, is provided with one and the inductance L of sensor coil parallel connection again.The inductance value of this inductance L is greater than more than 10 times of inductance value of sensor coil, and resistance value is less than the resistance value of coil.Circuit after the improvement is more suitable for the sensor coil of little quality factor.
Array-type sensor working method of the present invention and principle are described as follows in conjunction with shown in Figure 2:
The sensor coil array is attached to nonmetal curved surface (comprising the plane) 2, and, makes and pass to sinusoidal alternating current I in the coil 1 by oscillatory circuit
1Electric current I
1To produce a sine alternating magnetic field H
1, be in this alternating magnetic field H
1In metal curved surface surface 2 will induce current vortex I
2, I
2Also produce alternating magnetic field H
2, H
2Direction and H
1Direction opposite.Because magnetic field H
2Retroaction, the inductance and the resistance parameter of coil change, thereby the output frequency of oscillatory circuit is changed.Fix other parameter, make the circuit output frequency only relevant with the gap x between metal curved surface, like this, just can determine that coil follows the gap between metal curved surface according to the frequency values of exporting with coil.During real work,, sensor coil is carried out quick scan round, measure the distance of each coil to metal curved surface by multi-channel gating switch.Because the distribution mode of these coils is known, therefore, measurement result is carried out data processing, just can obtain metal curved surface with the gap between nonmetal curved surface.
Characteristics of the present invention:
1, among the present invention, the base material of sensor coil array and outgoing cable thereof is a flexible state, and therefore, sensor coil can be attached to the nonmetallic surface of arbitrary shape and measure.And traditional current vortex sensor can't be installed on the curved surface and measures.
2, can carry out the interior quick measurement of large tracts of land scope.Owing to adopted FPCB technology, sensor coil array can be distributed in the very big areal extent (1000mm * 500mm even bigger), thereby realized the measurement of large tracts of land scope.And other technology as fine processes such as photoetching, just can't be made the flexible sensor array of large tracts of land scope, therefore also is difficult to the measurement that realizes that the large tracts of land scope is interior.If utilize single-sensor to carry out the measurement of large tracts of land scope, then need to utilize mechanical hook-up control sensor or measured target to move by rule, this must influence the speed and the precision of measurement.And in the present invention, utilize multi-channel gating switch, sensor array is realized quick scan round.Scan a passage and only need 20 milliseconds.
3, ultra-thin.The I of the thickness of sensor coil array and outgoing cable thereof is accomplished 0.11mm, is fit to be installed in the narrow space and measures.
4, solid matter cable.The lead-in wire of sensor coil array and public ground wire pool together, and form the long cable of solid matter, make structure compact more.Owing to adopt the measuring method of scan round, any time, having only in the cable has the signal transmission in one the tunnel, and therefore, cable institute transmission signals does not disturb mutually.
5, follow-on circuit.Flexible coil among the present invention, inductance value is less and resistance value is relatively large, and therefore, the quality factor of coil is less.At these characteristics of sensor, traditional bold and vigorous circuit of carat is improved, improved the quality factor of circuit.Simultaneously, the circuit after the improvement has improved the consistance between each passage of sensor coil array.
6, the relative traditional electrical eddy current sensor of the present invention can be applicable to more measurement occasions, as measure fast in measurement of curved surface, the large tracts of land scope, measurement in the small space etc.Base material is as adopting the polymeric material polyimide, and then this sensor array can also be applied in high temperature (300-400 ℃), radiation etc. and measure occasion.
7, the present invention has adopted the flexible printed circuit board processing technology, and the coil inductance parameter is temperature influence not, so system has good temperature performance.This processing technology has also improved the consistance between the coil greatly, makes the present invention be more suitable in batch process.
The present invention can reach excellent performance index.
Resolution: 1 μ m
Sensitivity: 100Hz/ μ m
Measuring accuracy: ± 1%FS
Temperature is floated :-84Hz/ ℃
Measurement range: 0-5mm or higher.
Description of drawings
Fig. 1 is the schematic diagram of the bold and vigorous oscillatory circuit of carat of traditional current vortex sensor
Fig. 2 is working method of the present invention and principle schematic.
Fig. 3 is several sensor coil example structure synoptic diagram of the present invention.
Fig. 4 is array-type flexible electric eddy sensor embodiment 1 structural representation of the present invention.
Fig. 5 is that the modified carat of the embodiment of the invention 1 and embodiment 2 sprinkles circuit figure.
Fig. 6 is array-type flexible electric eddy sensor embodiment 2 structural representations of the present invention.
Embodiment
Several sensor coil example structure of the present invention's design as shown in Figure 3, this sensor coil adopts FPCB technology to make on the flexible material film substrate that is fit to this technology, wherein: coil 11 is an individual layer spiral circle coil among Fig. 3 (a), its front extension line 113 is a signal wire, (the reverse side line dots the reverse side extension line, down together) 112 is ground wire, and the pros and cons coiling is communicated with by central via hole 111; Coil 12 is the double-layer spiral circular coil among Fig. 3 (b), and its front extension line 123 is a signal wire, and reverse side extension line 122 is a ground wire, and the pros and cons coiling is communicated with by central via hole 121; Coil 13 is an individual layer spiral side coil among Fig. 3 (c), and its front extension line 133 is a signal wire, and reverse side extension line 132 is a ground wire, and the pros and cons coiling is communicated with by central via hole 131; Coil 14 is double-deck side's coil among Fig. 3 (d).Its front extension line 143 is a signal wire, and reverse side extension line 142 is a ground wire, and the pros and cons coiling is communicated with by central via hole 141.
Array-type flexible electric eddy sensor embodiment 1 structure of the present invention's design as shown in Figure 4, among the figure, sensor array flexible substrates 3 adopts Kapton, it is shaped as three transverse arms and arm is erected in its central authorities that are connected as a body, on three transverse arms of film substrate 3, produce three groups of double-deck responsive side's coils 1 of totally 12 length of side 10mm with FPCB technology.Each hub of a spool distance is 62.5mm in every group.Group distance is 280mm.The lead-in wire of each sensor coil and common ground are compiled on the perpendicular arm of the central authorities that are produced on film 3 together, form the wide cable 4 of 10mm.Cable 4 ends are made the FPC plug, sprinkle circuit by multi-channel gating switch and modified carat and link to each other, as shown in Figure 5, this circuit is mainly formed tradition carat bold and vigorous circuit by triode, resistance, electric capacity, sensor coil, on this basis, be provided with one and the inductance L of sensor coil parallel connection again.The inductance L value is 22 μ H in this circuit.Sensor coil array and outgoing cable overall dimensions thereof are 1000mm * 250mm.
Utilize the array-type flexible electric eddy sensor of present embodiment can measure long pipe diameter parameter.During use, this sensor sensitive coil array is attached on the non-metallic rods of external diameter 79.6mm, and sends in the steel pipe, this non-metallic rods and tested steel pipe (the about 85mm of internal diameter, long 2.5m) axis is overlapped substantially by mechanical hook-up.No. 12 sensors are carried out scan round, obtain the output frequency of this No. 12 sensor, and, convert output frequency the gap of coil to inner wall of metal tube according to the data of prior demarcation.Because 4 coils of every group are arranged symmetrically on the non-metallic rods, therefore, these three groups of data are simply handled, and can obtain the internal diameter of steel pipe in these three positions.Turn steel pipe, can record the inner diameter values of three positions of the steel pipe other end.
Array-type flexible electric eddy sensor embodiment 2 structures of the present invention's design as shown in Figure 6, among the figure: sensor array flexible substrates 3 adopts mylar to make, its shape such as same the circle fan, at diameter in this covering of the fan substrate is the individual layer circular coil 1 of evenly producing 6 diameter 15mm on the circumference of 240mm with FPCB technology, simultaneously, at this round coil of also making an identical parameters in the heart.Lead-in wire of these 7 coils (solid line) and common ground (dotted line) pool together, and it is wide to form 8mm, the cable 3 that 450mm is long, and cable 3 is produced in the elongated fan handle substrate 3.The other end of cable is made the FPC plug, and by multi-channel gating switch, links to each other with follow-on carat of bold and vigorous circuit, as Fig. 5.Sensor coil array and outgoing cable overall dimensions thereof are 750mm * 300mm.
Under some rugged surroundings, need the situation of a monitoring big metal flat (circle) and a nonmetal interplanar minim gap (0-2mm), can utilize present embodiment to solve.During measurement, this sensor array is attached on the nonmetal plane,, can records the distance of each sensor, and by data processing, determine that metal flat follows nonmetal interplanar gap relation to metal flat by scan round to sensor array.
Claims (3)
1, a kind of array-type flexible electric eddy sensor, it is characterized in that, comprise the sensor coil array of on film substrate, making of flexible printed circuit board technology by the certain way distribution, the outgoing cable of drawing signal wire and ground wire composition that links to each other with each sensor coil, multi-channel gating switch, and by multi-channel gating switch and said signal wire link to each other with ground wire the carat bold and vigorous oscillatory circuit; Said each sensor coil respectively has signal wire, two lead-in wires of ground wire; The ground wire and the signal wire of each sensor coil pool together, and form and draw the solid matter cable, and the other end of this cable is provided with the plug that links to each other with multi-channel gating switch; Said oscillatory circuit is on the basis of tradition carat bold and vigorous circuit, is provided with one and the inductance L of sensor coil parallel connection again.
2, array-type flexible electric eddy sensor as claimed in claim 1 is characterized in that, said film substrate adopts Kapton, the flexible material of the suitable flexible printed circuit board technology of mylar one class.
3, array-type flexible electric eddy sensor as claimed in claim 1 is characterized in that, said sensor coil is a kind of of individual layer, bilayer or multilayer, and this coil shape is circular, square.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB011401036A CN1160567C (en) | 2001-11-23 | 2001-11-23 | Array-type flexible electric eddy sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB011401036A CN1160567C (en) | 2001-11-23 | 2001-11-23 | Array-type flexible electric eddy sensor |
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| CN1356546A CN1356546A (en) | 2002-07-03 |
| CN1160567C true CN1160567C (en) | 2004-08-04 |
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| CNB011401036A Expired - Fee Related CN1160567C (en) | 2001-11-23 | 2001-11-23 | Array-type flexible electric eddy sensor |
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| CN108759877A (en) * | 2018-04-04 | 2018-11-06 | 上海兰宝传感科技股份有限公司 | Current vortex sensor |
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