CN115988952A - Long-distance superconducting quantum bit coupling structure and superconducting quantum chip - Google Patents
Long-distance superconducting quantum bit coupling structure and superconducting quantum chip Download PDFInfo
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- 230000008878 coupling Effects 0.000 title claims abstract description 148
- 238000010168 coupling process Methods 0.000 title claims abstract description 148
- 238000005859 coupling reaction Methods 0.000 title claims abstract description 148
- 239000002096 quantum dot Substances 0.000 title claims abstract description 110
- 239000002184 metal Substances 0.000 claims abstract description 390
- 229910052751 metal Inorganic materials 0.000 claims abstract description 390
- 239000003990 capacitor Substances 0.000 claims description 15
- 238000000034 method Methods 0.000 abstract description 39
- 238000005516 engineering process Methods 0.000 abstract description 5
- 238000005530 etching Methods 0.000 description 111
- 230000008569 process Effects 0.000 description 37
- 238000013461 design Methods 0.000 description 21
- 239000006185 dispersion Substances 0.000 description 12
- 241000238366 Cephalopoda Species 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000012937 correction Methods 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000012827 research and development Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
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Abstract
The utility model provides a long-range superconductive quantum bit coupling structure and superconductive quantum chip relates to quantum computing technology field, concretely relates to superconductive quantum chip technology field. The method comprises the following steps: the superconducting qubit unit comprises a first metal plate and four second metal plates, the four second metal plates form coupling ports coupled with the qubits, the structural sizes of the coupling ports are the same, and the coupling ports in the openings oppositely arranged in the two superconducting qubit units are mutually connected; the third metal polar plate comprises a first metal strip and a second metal strip, the first metal strip and the second metal strip are arranged in a T shape, the first metal strip is perpendicular to the metal strip connecting the two coupling ports, and the second metal strip is arranged in parallel with the metal strip connecting the two coupling ports; the geometric center interval of the two first metal plates is within a value range of positive and negative deviation from a first preset value by taking 3202um as a center.
Description
Technical Field
The present disclosure relates to the field of quantum computing technologies, and in particular, to a long-distance superconducting quantum bit coupling structure and a superconducting quantum chip.
Background
The superconducting qubit is a core element in a superconducting quantum chip, and to implement a dual-bit quantum gate, two qubits are generally coupled, a frequency-tunable coupler can be placed between the two qubits, and by adjusting the frequency of the coupler, the equivalent coupling strength between the two qubits can be turned on and off, and this coupling architecture can be a "qubit-coupler-qubit (QCQ)", which is referred to as a QCQ structure for short.
Currently, the QCQ structural layout requires a designer to carefully debug the spacing between two qubits and to implement the extension of the qubits by etching a complete coupler to realize the QCQ module.
Disclosure of Invention
The present disclosure provides a remote superconducting quantum bit coupling structure and a superconducting quantum chip.
According to a first aspect of the present disclosure, there is provided a long-range superconducting qubit coupling structure comprising:
the superconducting qubit units are symmetrically arranged, each superconducting qubit unit comprises a first metal polar plate and four second metal polar plates, each first metal polar plate is arranged in an X shape, and the first metal polar plates form openings facing four directions; the four second metal plates are respectively positioned in four openings in different directions, each second metal plate forms a coupling port coupled with the qubit represented by the first metal plate, the four second metal plates form coupling ports coupled with the qubit, the four second metal plates have the same structural size, and the coupling ports in the openings oppositely arranged in the two superconducting qubit units are mutually connected;
the third metal plate comprises a first metal strip and a second metal strip, the first metal strip and the second metal strip are arranged in a T shape, the third metal plate and a metal plate formed by two mutually connected coupling ports form a capacitor layout structure of the coupler, the first metal strip is perpendicular to the metal strip connected with the two coupling ports, and the second metal strip is arranged in parallel with the metal strip connected with the two coupling ports;
the geometric center interval of the first metal plate in the two superconducting qubit units is within a first value range, and the first value range is as follows: the value range of the positive and negative deviation from the first preset value by taking 3202um as the center.
According to a second aspect of the present disclosure there is provided a superconducting quantum chip comprising a remote superconducting qubit coupling structure according to the first aspect.
The technology disclosed by the invention solves the problem that the expansion efficiency of a QCQ module for quantum bit is relatively low in the related technology, so that the QCQ module can be used as an independent module to realize quantum bit expansion relatively efficiently, and can realize super-long-distance coupling with the length of more than 3 mm.
It should be understood that the statements in this section do not necessarily identify key or critical features of the embodiments of the present disclosure, nor do they limit the scope of the present disclosure. Other features of the present disclosure will become apparent from the following description.
Drawings
The drawings are included to provide a better understanding of the present solution and are not to be construed as limiting the present disclosure. Wherein:
FIG. 1 is a perspective configuration of a superconducting quantum chip;
FIG. 2 is an overall configuration of a superconducting quantum chip;
FIG. 3 is a schematic structural diagram of a remote superconducting qubit coupling structure in accordance with a first embodiment of the present disclosure;
fig. 4 is a schematic structural diagram of a superconducting quantum chip according to an example of the present embodiment;
fig. 5 is a schematic structural diagram of a coupler metal plate according to an example of the present embodiment;
fig. 6 is a schematic structural diagram of a coupling portion between metal plates of a coupler according to an example of the present embodiment;
FIG. 7 is a schematic structural diagram of an exemplary qubit metal plate in accordance with the present embodiments;
FIG. 8 is a schematic structural diagram of a coupling port metal plate according to an example of the present embodiment;
FIG. 9 is a graph of performance simulation of an exemplary fixed QCQ structure layout in this embodiment.
Detailed Description
Exemplary embodiments of the present disclosure are described below with reference to the accompanying drawings, in which various details of embodiments of the present disclosure are included to assist understanding, and which are to be considered as merely exemplary. Accordingly, those of ordinary skill in the art will recognize that various changes and modifications of the embodiments described herein can be made without departing from the scope and spirit of the present disclosure. Also, descriptions of well-known functions and constructions are omitted in the following description for clarity and conciseness.
First embodiment
First, describing the spatial configuration of the superconducting quantum chip, as shown in fig. 1, the superconducting quantum chip includes a substrate 101 and a superconducting metal plate 102, which are respectively mainly divided into two layers, a base layer and a superconducting metal layer, where the base layer (corresponding to the substrate) is generally made of silicon or sapphire material. The thickness of the superconducting metal layer (corresponding to the superconducting metal plate) is very thin compared to the base layer, and can be regarded as a two-dimensional plane. By etching the superconducting metal layer, various element structures can be formed. Therefore, chip layouts using specific substrate materials, i.e., top-down views of chip structures, are often of interest.
Due to the progress of the process, different chip configurations such as Flip-chip bonding (Flip-chip) and through silicon via (tsv) are developed in the industry, the superconducting quantum chip can adopt a Flip-chip bonding configuration, the overall configuration of the superconducting quantum chip is shown in fig. 2, the superconducting quantum chip comprises an upper sub-chip and a lower sub-chip, the configurations of the upper sub-chip and the lower sub-chip are both shown in fig. 1, the base layer is 400 micrometers (um), and the metal layer is 0.1um. The chip comprises a chip body, a lower metal layer and an upper metal layer, wherein one sub chip is turned over integrally, the distance between the two sub chips is 10 mu m, the two sub chips are connected through indium columns (indium metal material columnar structures) to play a role of communicating the electric potentials of the upper metal layer and the lower metal layer, the lower metal layer is used for etching to form core devices such as quantum bits, and the upper metal layer is generally used for etching to form signal transmission lines such as control lines and reading lines.
A remote superconducting qubit coupling structure may be included on an underlying metal layer of a chip structure, as shown in fig. 3, the present disclosure provides a remote superconducting qubit coupling structure comprising:
the superconducting qubit units are symmetrically arranged, each superconducting qubit unit comprises a first metal polar plate 3011 and four second metal polar plates 3012, the first metal polar plates are arranged in an X shape, and the first metal polar plates form openings facing four directions; the four second metal plates are respectively positioned in four openings in different directions, each second metal plate forms a coupling port coupled with the qubit represented by the first metal plate, the four second metal plates form coupling ports coupled with the qubit, the structural sizes of the coupling ports coupled with the qubit are the same, and the coupling ports in the openings oppositely arranged in the two superconducting qubit units are mutually connected;
a third metal plate 302, where the third metal plate includes a first metal strip 3021 and a second metal strip 3022, the first metal strip and the second metal strip are arranged in a "T" shape, the third metal plate and a metal plate 303 formed by two coupling ports connected to each other form a capacitor layout structure of the coupler, the first metal strip is perpendicular to the metal strip connecting the two coupling ports, and the second metal strip is arranged in parallel with the metal strip connecting the two coupling ports;
the geometric center interval of the first metal plate in the two superconducting qubit units is within a first value range, and the first value range is as follows: the positive and negative values of 3202um as the center deviate from the value range of the first preset value.
In this embodiment, a long-distance superconducting qubit coupling structure relates to the technical field of quantum computing, in particular to the technical field of superconducting quantum chips, and can be widely applied to the design scenario of the superconducting quantum chips.
With the development of the performance and scale of superconducting quantum chips in recent years, an urgent need arises to realize long-distance coupling between qubits. The long-range coupling architecture has four significant advantages: 1) A wide space is provided for the distribution and wiring of other important devices, so that the scale of quantum bits in a chip can be greatly improved; 2) Crosstalk among quantum bits is remarkably reduced, and the performance of a quantum chip is improved; 3) The correlation errors between adjacent quantum bits are obviously inhibited, and more effective quantum error correction is facilitated; 4) The quantum error correction performance can be obviously improved by increasing the quantum bit scale. Therefore, how to design a superconducting qubit coupling structure (such as QCQ structure) to simultaneously realize long-distance coupling and two basic requirements on performance and layout is a significant issue.
In a scene where a distance between the superconducting qubits is greater than 2mm, the coupling structure may be referred to as a long-distance coupling of the superconducting qubits, and the superconducting qubit coupling structure provided in this embodiment may implement the long-distance superconducting qubit coupling.
The remote superconducting qubit coupling structure includes a capacitor layout structure formed by etching metal plates on a superconducting metal layer, as shown in fig. 3, where a gray portion includes the superconducting metal layer and a white portion represents an etched-out region on the superconducting metal layer. Accordingly, each metal plate and the grounding metal plate 304 may be formed on the superconducting metal layer, the inner superconducting metal being the isolated metal plate, and the outer superconducting metal being the grounding metal plate.
Capacitances can be formed between the metal plates and between the metal plates and the grounding metal plate, so that each metal plate can represent a capacitor of one element, and the capacitor layout structure is formed by etching the capacitors of all the elements on the superconducting metal layer.
The remote superconducting qubit coupling structure may include two superconducting qubit units, which may include a first metal plate 3011 and four second metal plates 3012 etched on a superconducting metal layer, and the two superconducting qubit units are symmetrically arranged with a horizontal axis and a vertical axis.
The first metal plate 3011 is arranged in an "X" shape, and the first metal plate forms openings facing four directions, and optionally, the opening angle of the opening is 90 degrees, so as to fix the structure of the "X" metal plate. As shown in fig. 3, four second metal plates 3012 are respectively located in four openings with different directions, and the first metal plate may represent a qubit capacitor.
Each second metal plate forms a coupling port for coupling with a qubit represented by the first metal plate, and the coupling ports in oppositely disposed openings in the two superconducting qubit units are interconnected.
As shown in fig. 3, the remote superconducting qubit coupling structure may further include a third metal plate 302, where the third metal plate and a metal plate 303 formed by two coupling ports connected to each other form a capacitor layout structure of a coupler for coupling two qubits represented by two X "type metal plates.
The third metal plate may include a first metal strip 3021 and a second metal strip 3022, which are disposed in a "T" shape, the first metal strip being perpendicular to the metal strip connecting the two coupling ports, and the second metal strip being disposed in parallel with the metal strip connecting the two coupling ports, as shown in fig. 3.
As shown in fig. 3, the coupling port etched in the opening of the left "X" type metal plate facing the right end and the coupling port etched in the opening of the right "X" type metal plate facing the left end are connected to each other, two coupling ports connected to each other may be etched on one metal plate 303, and the metal plate 303 formed by the two coupling ports connected to each other is coupled to the third metal plate 302 to form a capacitor layout structure of the coupler.
The structure size of the coupling port formed by the four second metal plates and coupled with the qubit is the same, so that the coupling port can be expanded into a complete coupler from any four directions, such as the coupling ports in the openings which are oppositely connected with each other, so that the expansion of the QCQ module can be realized, the expansion of the qubit can be realized more efficiently as an independent module, and the quantum chip designed based on the superconducting qubit coupling structure can be expected to realize larger scale and improve the scale of the qubit in the quantum chip. As shown in fig. 4, which shows a capacitor layout of 3*3 checkerboard-shaped superconducting quantum chip structure obtained by expanding a QCQ module, a superconducting quantum interferometer (SQUID) device is further added to form a core device portion of the superconducting quantum chip layout, where a dark gray area represents each metal plate etched on the superconducting metal layer, a gray area represents a grounded metal plate, and a white area represents an etched-out area, where an etching gap exists between each metal plate (including a third metal plate) and the grounded metal plate, and since the etching gap between the third metal plate and the grounded metal plate is relatively small compared to the etching gaps between other metal plates and the grounded metal plate, for example, the etching gap is only 5um, the etching gap is limited by the scale of the drawing, which is not shown in the figure.
It should be noted that, in practical applications, due to etching errors, the four second metal plates may form a slightly different structural size of the coupling port coupled to the qubit, and this case may also be regarded as the same structural size of the coupling port.
In addition, the first metal plate in the two superconducting qubit units, that is, the geometric center interval between the two qubits, is within a first value range: the positive and negative values of 3202um as the center deviate from the value range of the first preset value. The first preset value can be an etching error, and is determined by etching processes, wherein the etching processes are different, the etching errors can be different, and the corresponding first preset values can also be different.
Under the condition that the geometric center interval between two qubits is within the value range of positive and negative deviation from the etching error by taking 3202um as the center, the superconducting qubit coupling structure can achieve similar performance, namely the performance difference is not too large. The QCQ structure requires the capability of realizing the disconnection of coupling between qubits and providing stronger coupling strength when the coupling is opened.
For example, if the etching error is 1%, the first preset value is 32um, and the first value range is 3170um to 3234um. In an alternative embodiment, the geometric centers of the first metal plates in the two superconducting qubit cells are spaced apart by 3202um.
Due to the structure of the qubit, the structure of the coupler (including the metal plate and the third metal plate which are formed by the two coupling ports connected with each other), and the structure of the third metal plate (including the first metal strip and the second metal strip), the center distance of the qubit can be as long as 3202um, so that the ultra-long distance coupling between the two qubits is realized.
And moreover, a QCQ structural layout with a fixed distance between two quantum bits can be provided, so that a fixed QCQ structural layout is provided to meet the performance requirement, so that a designer does not need to debug the distance between the two quantum bits, the design flow of the QCQ structural layout is simplified, the design efficiency of the superconducting quantum chip is greatly improved, and the design method has important guiding significance and value for the research and development of the superconducting quantum chip.
Optionally, the total length of the metal plate formed by the two coupled ports connected to each other is within a twelfth value range, where the twelfth value range is: the plus or minus value of the reference value deviates from the twelfth preset value by taking 3172um as the center.
The twelfth preset value can be an etching error, and is determined by the etching process, the etching process is different, the etching error can be different, and the corresponding twelfth preset value can also be different. For example, if the etching error is 1%, the twelfth preset value is 31.72um, and the twelfth value range is 3140.28um to 3203.72um. In an alternative embodiment, the total length of the metal plate 303 formed by the two coupled ports connected to each other is 3172um, as shown in fig. 5.
The total length of the metal plate formed by the two coupling ports connected with each other can be the length of the coupler, i.e. the overall size of the coupler can be characterized. Therefore, a QCQ structural layout with the whole size of the coupler fixed can be provided, so that a fixed QCQ structural layout is provided, the performance requirement is met, the whole size of the coupler does not need to be debugged by a designer, and the design flow of the QCQ structural layout is simplified.
Optionally, the width of the first metal strip is within a second value range, where the second value range is: the length of the first metal strip is within a third value range, and the third value range is as follows: the plus or minus deviation from the value range of the third preset value by taking 77.5um as the center.
The second preset value can be an etching error, and is determined by etching processes, the etching processes are different, the etching errors can be different, and the corresponding second preset values can also be different. For example, if the etching error is 1%, the second preset value is 0.15um, and the second value range is 14.85 um-15.15 um. In an alternative embodiment, the width of the first metal strip is 15um, as shown in fig. 6.
The third preset value can be an etching error, and is determined by etching processes, the etching processes are different, the etching errors can be different, and the corresponding third preset values can also be different. For example, if the etching error is 1%, the third preset value is 0.775um, and the third value range is 76.725um to 78.275um. In an alternative embodiment, the first metal strip has a length of 77.5um, as shown in fig. 6.
Therefore, a QCQ structural layout with a fixed first metal strip structure size can be provided, so that a fixed QCQ structural layout is provided to meet the performance requirement, a designer does not need to debug the structural size of the first metal strip, and the design flow of the QCQ structural layout is simplified.
Optionally, the width of the second metal strip is within a fourth value range, where the fourth value range is: the positive and negative deviation of the 120um as the center is within a value range of a fourth preset value, the length of the second metal strip is within a fifth value range, and the fifth value range is as follows: and the value range of positive and negative deviation from a fifth preset value by taking 2200um as the center.
The fourth preset value can be an etching error, and the fourth preset value can be determined by etching processes, and the etching errors can be different according to different etching processes, and correspondingly, the fourth preset value can also be different. For example, if the etching error is 1%, the fourth preset value is 1.2um, and the fourth value range is 118.8um to 121.2um. In an alternative embodiment, the width of the second metal strip is 120um, as shown in fig. 5.
The fifth preset value can be an etching error, and is determined by etching processes, wherein the etching processes are different, the etching errors can be different, and the corresponding fifth preset values can also be different. For example, if the etching error is 1%, the fifth preset value is 22um, and the fifth value range is 2178um to 2222um. In an alternative embodiment, the second metal strip is 2200um in length, as shown in fig. 5.
Therefore, a QCQ structural layout with a fixed second metal strip structure size can be provided, so that a fixed QCQ structural layout is provided to meet the performance requirement, a designer does not need to debug the structure size of the second metal strip, and the design flow of the QCQ structural layout is simplified.
Optionally, an interval between the metal strip connecting the two coupling ports and the first metal strip is within a sixth value range, where the sixth value range is: and the positive and negative deviation of the value range of the sixth preset value by taking 20um as the center.
The sixth preset value can be an etching error, and is determined by the etching process, the etching process is different, the etching error can be different, and the corresponding sixth preset value can also be different. For example, if the etching error is 1%, the sixth preset value is 0.2um, and the sixth value range is 19.8um to 20.2um. In an alternative embodiment, the spacing between the metal strip connecting the two coupled ports and the first metal strip is 20um, as shown in fig. 6.
Therefore, a QCQ structural layout for fixedly connecting the spacing size between the metal strips of the two coupling ports and the first metal strip can be provided, so that a fixed QCQ structural layout is provided, the performance requirement is expected to be met, a designer does not need to debug the spacing between the metal strips of the two coupling ports and the first metal strip, and the design flow of the QCQ structural layout is simplified.
Optionally, the first metal plate includes a third metal strip and a fourth metal strip that are arranged in a crossed manner, widths of the third metal strip and the fourth metal strip are all within a seventh value range, lengths of the third metal strip and the fourth metal strip are all within an eighth value range, and the seventh value range is: the value range of the positive and negative deviation from the seventh preset value by taking 10um as the center is as follows: and the positive and negative deviation of the 310um as the center is within the value range of the eighth preset value.
As shown in fig. 7, the first metal plate includes a third metal strip 701 and a fourth metal strip 702 arranged in a crossing manner.
The seventh preset value can be an etching error, and the etching error can be different according to different etching processes and different corresponding seventh preset values. For example, if the etching error is 1%, the seventh preset value is 0.1um, and the seventh value range is 9.9um to 10.1um. In an alternative embodiment, the third metal strip and the fourth metal strip have the same width of 10um, as shown in fig. 7.
The eighth preset value may be an etching error, and is determined by an etching process, where the etching process is different, the etching error may be different, and the corresponding eighth preset value may also be different. For example, if the etching error is 1%, the eighth preset value is 3.1um, and the eighth value range is 306.9 um-313.1 um. In an alternative embodiment, the third and fourth metal strips are the same length, 310um, as shown in fig. 7.
Therefore, a QCQ structural layout with a fixed structure size of the qubit can be provided, so that a fixed QCQ structural layout is provided to meet the performance requirement, a designer does not need to debug the structure size of the qubit, and the design flow of the QCQ structural layout is simplified.
Optionally, the second metal plate includes a fifth metal strip, a sixth metal strip and a seventh metal strip, where the fifth metal strip, the sixth metal strip and the seventh metal strip are connected in an arrow shape, the fifth metal strip and the seventh metal strip are vertically disposed, and the sixth metal strip is located between the fifth metal strip and the seventh metal strip;
wherein, the coupling ports of the two superconducting qubit units which are connected with each other are connected through the sixth metal strip.
In this embodiment, as shown in fig. 8, the second metal plate includes a fifth metal strip 801, a sixth metal strip 802, and a seventh metal strip 803, the fifth metal strip, the sixth metal strip, and the seventh metal strip are connected in an arrow shape, that is, the second metal plate is in a single-arrow shape, the fifth metal strip and the seventh metal strip are vertically disposed, the sixth metal strip is located between the fifth metal strip and the seventh metal strip, and the single-arrow shaped metal plate is a capacitor representing the coupling port.
The metal strip connecting the two coupling ports may be a sixth metal strip, or may be another metal strip used for connecting the two sixth metal strips, which may be referred to as a connecting metal strip, for example.
As shown in fig. 8, the coupling ports of the two superconducting qubit units connected to each other are connected by a sixth metal strip 802, which forms a double-arrow-shaped metal plate, and the double-arrow-shaped metal plate and the third metal plate represent the capacitor of the coupler.
In this manner, a QCQ structure layout for a fixed coupled port and coupler structure may be provided.
Optionally, the widths of the fifth metal strip and the seventh metal strip are both within a ninth value range, where the ninth value range is: the positive and negative deviation of 40um as the center is within the value range of the ninth preset value, the lengths of the fifth metal strip and the seventh metal strip are within the tenth value range, and the tenth value range is as follows: plus or minus deviates from the value range of the tenth preset value by taking 73um as the center.
The ninth preset value can be an etching error, and is determined by etching processes, wherein the etching processes are different, the etching errors can be different, and the corresponding ninth preset value can also be different. For example, if the etching error is 1%, the ninth preset value is 0.4um, and the ninth value range is 39.6-40.4 um. In an alternative embodiment, the widths of the fifth and seventh metal strips are the same, 40um, as shown in fig. 8.
The tenth preset value can be an etching error, and is determined by etching processes, wherein the etching processes are different, the etching errors can be different, and the corresponding tenth preset values can also be different. For example, if the etching error is 1%, the tenth preset value is 0.73um, and the tenth value range is 72.27um to 73.73um. In an alternative embodiment, the length of the fifth metal strip is the same as the length of the seventh metal strip, which is 73um, as shown in fig. 8.
Optionally, the width of the sixth metal strip is within an eleventh value range, where the eleventh value range is: and the value range of the plus-minus deviation from the eleventh preset value by taking 5um as the center.
The eleventh preset value can be an etching error, and is determined by etching processes, wherein the etching processes are different, the etching errors can be different, and the corresponding eleventh preset values can also be different. For example, if the etching error is 1%, the eleventh preset value is 0.05um, and the eleventh value range is 4.95um to 5.05um. In an alternative embodiment, the width of the sixth metal strip is 5um, as shown in fig. 8.
Therefore, a QCQ structural layout with a fixed coupling port structure size can be provided, so that a QCQ structural layout is fixed to meet the performance requirement, a designer is not required to debug the coupling port structure size, and the design flow of the QCQ structural layout is simplified.
Optionally, as shown in fig. 3, a grounded metal plate 304 is further disposed on the superconducting metal layer on which the two superconducting qubit units and the third metal plate are disposed, the grounded metal plate surrounds each metal plate etched on the superconducting metal layer, a gap between the first metal plate and the grounded metal plate is within a thirteenth value range, and the thirteenth value range is: and the value range of the positive and negative deviation from the thirteenth preset value by taking 15um as the center.
The thirteenth preset value can be an etching error, and the etching error can be different according to the etching process, and the corresponding thirteenth preset value can also be different. For example, if the etching error is 1%, the thirteenth preset value is 0.15um, and the thirteenth value range is 14.85 um-15.15 um. In an alternative embodiment, the gap between the first metal plate and the ground metal plate is 15um, as shown in fig. 7.
Therefore, a QCQ structure layout for fixing the size of a gap between a metal pole plate with a quantum bit and a grounding metal plate can be provided, so that a fixed QCQ structure layout is provided to meet the performance requirement, a designer is not required to debug the etching gap between the metal pole plate with the quantum bit and the grounding metal plate, and the design flow of the QCQ structure layout is simplified.
Optionally, the fifth metal strip and the seventh metal strip are respectively in a fourteenth value range in the width direction with a gap between the grounding metal plates, and the fourteenth value range is: plus or minus deviates from the value range of the fourteenth preset value by taking 10um as the center.
The fourteenth preset value can be an etching error, and is determined by etching processes, wherein the etching processes are different, the etching errors can be different, and the corresponding fourteenth preset value can also be different. For example, if the etching error is 1%, the fourteenth preset value is 0.1um, and the fourteenth value range is 9.9um to 10.1um. In an alternative embodiment, the width direction of the fifth metal strip and the seventh metal strip is the same as the gap between the grounding metal plates, and both the gaps are 10um, as shown in fig. 8.
In addition, the gap between the fifth metal strip and the first metal plate in the length direction of the seventh metal strip can be calculated according to the distance between the qubits and the length of the coupler, so that the gap between the fifth metal strip and the first metal plate in the length direction of the seventh metal strip can be fixed according to the distance between the qubits and the length of the coupler.
Optionally, a gap between the sixth metal strip and the ground metal plate in the width direction is within a fifteenth value range, where the fifteenth value range is: the value range of the positive and negative deviation from a fifteenth preset value by taking 10um as the center, the gap between the sixth metal strip and the grounding metal plate in the length direction is in a sixteenth value range, and the sixteenth value range is as follows: the positive and negative deviation of the value range from the sixteenth preset value by taking 40um as the center.
The fifteenth preset value can be an etching error, and is determined by etching processes, wherein the etching processes are different, the etching error can be different, and the corresponding fifteenth preset value can also be different. For example, if the etching error is 1%, the fifteenth preset value is 0.1um, and the fifteenth value range is 9.9um to 10.1um. In an alternative embodiment, the gap between the sixth metal strip and the grounding metal plate in the width direction is 10um, as shown in fig. 8.
The sixteenth preset value can be an etching error, and is determined by the etching process, the etching process is different, the etching error can be different, and the corresponding sixteenth preset value can also be different. For example, if the etching error is 1%, the sixteenth preset value is 0.4um, and the sixteenth value ranges from 39.6um to 40.4um. In an alternative embodiment, the gap between the sixth metal strip and the grounding metal plate in the length direction is 40um, as shown in fig. 8.
Therefore, a QCQ structural layout for fixing the size of a gap between a metal pole plate of a coupling port and a grounding metal plate can be provided, so that a fixed QCQ structural layout is provided to meet the performance requirement, a designer does not need to debug the etching gap between the metal pole plate of the coupling port and the grounding metal plate, and the design flow of the QCQ structural layout is simplified.
Optionally, a gap between the metal strip connecting the two coupling ports and the grounding metal plate is within a seventeenth value range, where the seventeenth value range is: the value range of the seventeenth preset value is deviated in positive and negative directions by taking 40um as a center.
The seventeenth preset value can be an etching error, and is determined by etching processes, wherein the etching processes are different, the etching errors can be different, and the seventeenth preset value can also be different correspondingly. For example, if the etching error is 1%, the seventeenth preset value is 0.4um, and the seventeenth value ranges from 39.6um to 40.4um. In an alternative embodiment, the gap between the metal strip connecting the two coupled ports and the grounded metal plate is 40um, as shown in fig. 6.
Therefore, a QCQ structure layout for fixedly connecting the gap size between the metal strip of the two coupling ports and the grounding metal plate can be provided, so that a fixed QCQ structure layout is provided to meet the performance requirement, a designer is not required to debug the etching gap between the metal strip of the two coupling ports and the grounding metal plate, and the design flow of the QCQ structure layout is simplified.
Optionally, a gap between the first metal strip and the grounding metal plate is within an eighteenth value range, where the eighteenth value range is: and the value range of the eighteenth preset value is deviated in positive and negative directions by taking 5um as a center.
The eighteenth preset value can be an etching error, and is determined by etching processes, wherein the etching processes are different, the etching errors can be different, and the corresponding eighteenth preset value can also be different. For example, if the etching error is 1%, the eighteenth preset value is 0.05um, and the eighteenth value range is 4.95um to 5.05um. In an alternative embodiment, the gap between the first metal strip and the ground plate is at 5um, as shown in fig. 6.
Therefore, a QCQ structure layout for fixing the size of a gap between the first metal strip and the grounding metal plate can be provided, so that a fixed QCQ structure layout is provided, the performance requirement is expected to be met, a designer does not need to debug the etching gap between the first metal strip and the grounding metal plate, and the design flow of the QCQ structure layout is simplified.
Optionally, a gap between the second metal strip and the ground metal plate is in a nineteenth value range, where the nineteenth value range is: and the value range of the nineteenth preset value is deviated in positive and negative directions by taking 5um as a center.
The nineteenth preset value can be an etching error, and is determined by etching processes, the etching processes are different, the etching errors can be different, and correspondingly, the nineteenth preset value can also be different. For example, if the etching error is 1%, the nineteenth preset value is 0.05um, and the nineteenth value range is 4.95um to 5.05um. In an alternative embodiment, the gap between the second metal strip and the grounding metal plate is 5um, as shown in fig. 6.
Therefore, a QCQ structure layout for fixing the size of a gap between the second metal strip and the grounding metal plate can be provided, so that a fixed QCQ structure layout is provided to meet the performance requirement, a designer does not need to debug the etching gap between the second metal strip and the grounding metal plate, and the design flow of the QCQ structure layout is simplified.
Optionally, the long-distance superconducting qubit coupling structure further comprises: two first superconducting quantum interferometers, a second superconducting quantum interferometer;
wherein one of the first superconducting quantum interferometers is connected between one of the first metal plates and the ground metal plate, and the second superconducting interferometer is disposed between a metal strip connecting two coupling ports and the first metal strip.
The remote superconducting qubit coupling structure can comprise a superconducting quantum interferometer (SQUID) besides a capacitor structure layout, and is formed by connecting two Josephson junctions in parallel, so that the intrinsic frequency of an element can be regulated and controlled.
After the capacitor structure layout in the superconducting qubit coupling structure is determined, the SQUID of the qubit, namely the first superconducting quantum interferometer, can be arranged at any position according to specific design requirements, but the SQUID of the qubit must be met and connected between the first metal plate and the grounding metal plate. And the SQUID of the coupler, i.e. the second superconducting quantum interferometer, may be arranged between the metal strip connecting the two coupled ports and the first metal strip.
As shown in fig. 3, SQUID position distribution of the qubits and the coupler is shown, where the black double "X" -shaped structure is the SQUID, SQUID305 is the first superconducting quantum interferometer, and SQUID306 is the second superconducting quantum interferometer.
Therefore, the SQUID design in the long-distance superconducting qubit coupling structure can be realized.
It can be seen from the QCQ structure layout shown in fig. 3 that ultra-long-distance coupling as long as 3202um can be achieved between qubits. The following analyzes and demonstrates the performance of the fixed QCQ structural layout of a specific example of this embodiment from two aspects of scalability and coupling strength.
In this example, in the QCQ structural layout, the geometric center interval of the first metal plate in two superconducting qubit units is 3202um, the opening angle of the opening of the first metal plate is 90 degrees, the width of the first metal strip is 15um, the length of the first metal strip is 77.5um, the width of the second metal strip is 120um, the width of the second metal strip is 2200um, the interval between the metal strip connecting the two coupling ports and the first metal strip is 20um, the width of the third metal strip is the same as that of the fourth metal strip, 10um, the length of the third metal strip is the same as that of the fourth metal strip, 310um, the width of the fifth metal strip is the same as that of the seventh metal strip, 40um, and the length of the fifth metal strip is the same as that of the seventh metal strip, be 73um, the width of sixth metal strip is 5um, the total length of the metal polar plate that two coupling ports of interconnect constitute is 3172um, clearance between first metal polar plate and the ground connection metal sheet is 15um, it is the same with the clearance between the ground connection metal sheet respectively on fifth metal strip and the seventh metal strip width direction, be 10um, clearance between the sixth metal strip width direction and the ground connection metal sheet is 10um, clearance between the sixth metal strip length direction and the ground connection metal sheet is 40um, the clearance between the metal strip of connecting two coupling ports and the ground connection metal sheet is 40um, the clearance between first metal strip and the ground connection metal sheet is 5um, the clearance between second metal strip and the ground connection metal sheet is 5um.
1) Extensibility
The arrow coupling port of the coupler is the same as the structure size of six independent single-arrow coupling ports, so that the single-arrow coupling ports can be expanded into a complete coupler from any four directions, namely, up, down, left and right, and the expansion of the QCQ module can be realized.
2) Strength of coupling
By adjusting the coupler frequency, it is possible to achieve a turn-off of the coupling and provide a strong coupling strength when the coupling is on.
A brief introduction is given to one of the prerequisite limitations of coupling regulation, namely the limit of chromatic dispersion coupling. The tunable coupler architecture requires that the dispersion coupling between the qubit and the coupler must be satisfied, i.e. the coupling strength g of the qubit and the coupler qc Much smaller than the difference in frequency | ω c -ω q |(ω c Is the coupler frequency, omega q At qubit frequency). The dispersion ratio β is defined as shown in the following formula (1):
then, β > 1 must be satisfied, and without loss of generality, a lower limit β of the dispersion ratio is usually taken S When beta > beta S Then, both are considered to satisfy the dispersion coupling. Due to component frequencyRate window satisfies omega c ＞ω q Thus when ω is c The smaller the dispersion ratio, the closer the dispersion ratio is to the lower limit β s 。
As an example, take the lower limit of the dispersion ratio to be β s =8, and the fixed qubit frequency is 6.5GHz (gigahertz). And performing detailed simulation verification on the structural layout by adopting electromagnetic simulation software. The resulting performance curve is shown in fig. 9, where the horizontal axis is the coupler frequency, the left vertical axis is the equivalent coupling strength between qubits, and the right vertical axis is the dispersion coupling ratio between qubits and the coupler. The solid line is the curve of the equivalent coupling strength with the frequency of the coupler, and the dotted line is the curve of the dispersion coupling ratio with the frequency of the coupler (beta) 1 And beta 2 The dispersion coupling ratios of the left and right qubits and the coupler are identical to each other, and represent beta 1 Curve of (d) and representation of beta 2 The curves of the two lines coincide), the point x is a special frequency point and comprises a coupling closing point and an opening point, and the dotted line is an auxiliary identification line corresponding to the special frequency point.
As can be clearly seen from the figure, the QCQ structural layout can meet the requirements of realizing the coupling disconnection (namely the equivalent coupling strength is 0) when the coupler frequency is about 12.6GHz, and the lower limit beta of the dispersion ratio s At =8, a strong coupling strength of 14.4 megahertz (MHz) is achieved.
Therefore, the QCQ structural layout has excellent expandability and strong coupling performance, the gating speed of the double-bit quantum gate can be increased, the faster and higher-fidelity quantum bit gate is expected to be realized, and the performance of a quantum chip is improved. Therefore, the superconducting quantum chip designed based on the QCQ structural layout can realize stronger performance and larger scale, and has important guiding significance and value for the research and development of the superconducting quantum chip.
In addition, by fixing the structural size of the QCQ module, the design of one superconducting quantum chip can be efficiently realized only by performing batch modular expansion according to specific requirements.
Second embodiment
This embodiment provides a superconducting quantum chip, which includes the remote superconducting qubit coupling structure described in the first embodiment, and can achieve the same beneficial effects, and for avoiding repetition, details are not repeated here.
Optionally, the superconducting qubit chip includes at least three superconducting qubit units distributed in an array, and two adjacent superconducting qubit units in the at least three superconducting qubit units form the long-distance superconducting qubit coupling structure, that is, the superconducting qubit chip may include a plurality of long-distance superconducting qubit coupling structures. Therefore, the scalable performance of the superconducting quantum bit coupling structure can be utilized to perform batch modular expansion, and the design of one superconducting quantum chip can be efficiently realized.
In the technical scheme of the disclosure, the collection, storage, use, processing, transmission, provision, disclosure and other processing of the personal information of the related user are all in accordance with the regulations of related laws and regulations and do not violate the good customs of the public order.
The above detailed description should not be construed as limiting the scope of the disclosure. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions may be made in accordance with design requirements and other factors. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present disclosure should be included in the scope of protection of the present disclosure.
Claims (18)
1. A long-range superconducting qubit coupling structure, comprising:
the superconducting qubit units are symmetrically arranged, each superconducting qubit unit comprises a first metal polar plate and four second metal polar plates, each first metal polar plate is arranged in an X shape, and the first metal polar plates form openings facing four directions; the four second metal plates are respectively positioned in four openings in different directions, each second metal plate forms a coupling port coupled with the qubit represented by the first metal plate, the four second metal plates form coupling ports coupled with the qubit, the structural sizes of the coupling ports coupled with the qubit are the same, and the coupling ports in the openings oppositely arranged in the two superconducting qubit units are mutually connected;
the third metal plate comprises a first metal strip and a second metal strip, the first metal strip and the second metal strip are arranged in a T shape, the third metal plate and a metal plate formed by two mutually connected coupling ports form a capacitor layout structure of the coupler, the first metal strip is perpendicular to the metal strip connected with the two coupling ports, and the second metal strip is arranged in parallel with the metal strip connected with the two coupling ports;
the geometric center interval of the first metal plate in the two superconducting qubit units is within a first value range, and the first value range is as follows: the positive and negative values of 3202um as the center deviate from the value range of the first preset value.
2. The remote superconducting qubit coupling structure of claim 1, wherein the width of the first metal strip is in a second range of values: the plus-minus deviation of the first metal strip from the value range of the first preset value by taking the first metal strip as the center is within a third value range, wherein the third value range is as follows: the positive and negative deviation of the center of 77.5um from the value range of the third preset value.
3. The remote superconducting qubit coupling structure of claim 1, wherein the width of the second metal strip is in a fourth range of values: the positive and negative deviation of the 120um as the center is within a value range of a fourth preset value, the length of the second metal strip is within a fifth value range, and the fifth value range is as follows: and the value range of positive and negative deviation from a fifth preset value by taking 2200um as the center.
4. The remote superconducting qubit coupling structure of claim 1, wherein a spacing between a metal strip connecting the two coupling ports and the first metal strip is in a sixth range of values, the sixth range of values being: and the positive and negative deviation of the value range of the sixth preset value by taking 20um as the center.
5. The remote superconducting qubit coupling structure of claim 1, wherein the first metal plate comprises third and fourth metal strips arranged in a crossing manner, widths of the third and fourth metal strips are within a seventh range, lengths of the third and fourth metal strips are within an eighth range, and the seventh range is: and the value range of the positive and negative deviation from a seventh preset value by taking 10um as a center is as follows: and the positive and negative deviation of the 310um as the center is within the value range of the eighth preset value.
6. The distant superconducting qubit coupling structure of claim 5, wherein the second metal plate comprises a fifth metal strip, a sixth metal strip, and a seventh metal strip, wherein the fifth metal strip, the sixth metal strip, and the seventh metal strip are connected in an arrow shape, and the fifth metal strip and the seventh metal strip are vertically disposed, and the sixth metal strip is located between the fifth metal strip and the seventh metal strip;
wherein, the coupling ports of the two superconducting qubit units which are connected with each other are connected through the sixth metal strip.
7. The remote superconducting qubit coupling structure of claim 6, wherein the widths of the fifth and seventh metal strips are both in a ninth range, the ninth range being: the positive and negative deviation of 40um as the center is within the value range of the ninth preset value, the lengths of the fifth metal strip and the seventh metal strip are within the tenth value range, and the tenth value range is as follows: the positive and negative values of the 73um are deviated from the value range of the tenth preset value.
8. The remote superconducting qubit coupling structure of claim 6, wherein a width of the sixth metal strip is in an eleventh range of values: and the value range of the plus-minus deviation from the eleventh preset value by taking 5um as the center.
9. The remote superconducting qubit coupling structure of claim 1, wherein a total length of the metal plate formed by the two coupled ports connected to each other is within a twelfth range of values: the plus or minus value of the reference value deviates from the twelfth preset value by taking 3172um as the center.
10. The remote superconducting qubit coupling structure of claim 6, wherein a grounded metal plate is further disposed on a superconducting metal layer on which the two superconducting qubit units and the third metal plate are disposed, the grounded metal plate surrounding each metal plate etched on the superconducting metal layer, a gap between the first metal plate and the grounded metal plate is within a thirteenth range, and the thirteenth range is: and the value range of the positive and negative deviation from the thirteenth preset value by taking 15um as the center.
11. The long-distance superconducting qubit coupling structure of claim 10, wherein gaps between the fifth and seventh metal strips and the ground metal plate in a width direction of the fifth and seventh metal strips are in a fourteenth range of values: the value range of the positive and negative deviation from the fourteenth preset value by taking 10um as the center.
12. The distant superconducting qubit coupling structure of claim 10, wherein a gap between the sixth metal strip and the grounded metal plate in a width direction is in a fifteenth range of values: the value range of the positive and negative deviation from a fifteenth preset value by taking 10um as the center, the gap between the sixth metal strip and the grounding metal plate in the length direction is in a sixteenth value range, and the sixteenth value range is as follows: plus or minus deviates from the value range of the sixteenth preset value by taking 40um as the center.
13. The remote superconducting qubit coupling structure of claim 10, wherein a gap between the metal strip connecting the two coupling ports and the ground metal plate is in a seventeenth range of values: the value range of the seventeenth preset value is deviated from the positive value and the negative value by taking 40um as the center.
14. The remote superconducting qubit coupling structure of claim 10, wherein a gap between the first metal strip and the grounded metal plate is within an eighteenth range of values: and the value range of the eighteenth preset value is deviated in positive and negative directions by taking 5um as a center.
15. The remote superconducting qubit coupling structure of claim 10, wherein a gap between the second metal strip and the ground metal plate is in a nineteenth range of values: and the value range of the nineteenth preset value is deviated in positive and negative directions by taking 5um as a center.
16. The remote superconducting qubit coupling structure of claim 10, further comprising: two first superconducting quantum interferometers and a second superconducting quantum interferometer;
the first superconducting quantum interferometer is connected between the first metal polar plate and the grounding metal plate, and the second superconducting interferometer is arranged between a metal strip connecting two coupling ports and the first metal strip.
17. A superconducting quantum chip comprising a remote superconducting qubit coupling structure according to any of claims 1 to 16.
18. The superconducting quantum chip of claim 17, wherein the superconducting quantum chip comprises at least three superconducting qubit units distributed in an array, adjacent two of the at least three superconducting qubit units forming the remote superconducting qubit coupling structure.
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