CN115963870B - Double-mode composite low-pressure ultra-precise temperature control device - Google Patents
Double-mode composite low-pressure ultra-precise temperature control device Download PDFInfo
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- CN115963870B CN115963870B CN202211218933.9A CN202211218933A CN115963870B CN 115963870 B CN115963870 B CN 115963870B CN 202211218933 A CN202211218933 A CN 202211218933A CN 115963870 B CN115963870 B CN 115963870B
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Abstract
The dual-mode composite low-pressure ultra-precise temperature control device belongs to the technical field of micro-environment temperature control equipment, and comprises a sealing box and a core heating component arranged on the inner side of the sealing box; the outer side of the sealing box is provided with a vacuumizing device, and the vacuumizing device stabilizes the pressure intensity in the sealing box in a low-pressure state; a plurality of groups of radiation convection dual-mode composite temperature control mechanisms are arranged on the inner side wall of the sealing box, and the radiation convection dual-mode composite temperature control mechanisms regulate and control the temperature of the inner side of the sealing box; the inner side of the sealing box is provided with a monitoring component for monitoring the environment inside the sealing box; and a controller is arranged outside the sealing box, acquires a measurement result of the monitoring component, and controls the radiation convection dual-mode composite temperature control mechanism to adjust the temperature inside the sealing box based on the measurement result. The composite control of the environmental temperature inside the sealing box is realized through the vacuumizing device and the radiation convection dual-mode composite temperature control mechanism.
Description
Technical Field
The invention belongs to the technical field of micro-environment temperature control equipment, and particularly relates to a dual-mode composite low-pressure ultra-precise temperature control device.
Background
The measuring precision of the micro-nano coordinate machine reaches the nanometer level, the positioning precision and the alignment precision of the step-and-scan photoetching machine reach the nanometer level, and the high positioning precision and the high movement precision come from the laser interference measuring frame inside the micro-nano coordinate machine. In the operation process of the instrument equipment, environmental parameters such as temperature, humidity, pressure, cleanliness and the like can fluctuate, and if the environmental parameters cannot be controlled, the accuracy of the laser interferometry frame can be obviously reduced, and even the measurement frame can be caused to malfunction. This presents new challenges to environmental parameter control techniques. Ultra-precise environmental control becomes a key technology of ultra-precise machining equipment and measuring instruments.
In the prior art, the patent document with the application number of 201810171584.7 discloses a temperature control mode of normal pressure heat radiation: the coarse temperature control clamping cylinder is used for carrying out radiation coupling temperature control on the precise internal control Wen Tongre, and the precise internal temperature control cylinder is used for controlling the internal temperature in a heat radiation mode. In theory, the method can realize high-precision temperature control by a thermal radiation temperature control mode, but the influence of natural convection of air molecules under normal pressure on the temperature is quite considerable, in fact, the temperature control mode of the roughly controlled Wen Gatong temperature precise inner temperature control cylinder is a radiation convection composite temperature control mode, the temperature control power of the two modes is not decoupled, and the characteristics of high thermal radiation temperature control precision and high thermal convection temperature control speed are not exerted. The molecular measuring machine developed by NIST adopts a vacuum radiation temperature control scheme to inhibit natural convection of air, a copper shell coated by a resistance heating wire coats a measuring core, and the surfaces of the shell and the measuring core are plated with matte gold to maintain the stability of radiation coupling between the two (1.Kramar J,Jun J,Penzes W,et al.THE MOLECULAR MEASURING MACHINE.2008;2.USDepartment of Commerce,NIST.Nanometer Resolution Metrology with the NIST Molecular Measuring Machine.Measurement Science&Technology). The scheme can realize temperature control precision of magnitude better than +/-0.001 ℃, but the response time of the scheme is as long as days or even months, and the requirement of ultra-precise machining and manufacturing on efficiency is difficult to meet.
The patent document with application number 202110647110.7 discloses a radiation low-pressure environment simulation cabin, which adopts a temperature control mode of low-pressure radiation, and uses air with good temperature control to uniformly control the temperature of a low-pressure cabin wall: and under the low pressure condition, the interference of natural convection to the temperature control process is reduced. However, the radiation and convection temperature control power of the method are related to the air temperature, the heat radiation power is fixed after the air temperature is determined, the actual temperature control effect is realized by heat convection, and the advantages of high-precision heat radiation temperature control and rapid heat convection temperature control cannot be exerted.
In summary, in the face of the increasingly high requirements of ultra-precise instruments and equipment and large ultra-precise manufacturing equipment on micro-environment parameter control, the precision achieved by the traditional normal pressure environmental control mode cannot meet the requirements; the environmental control response time of the high-precision vacuum environmental control mode limits the application scene. Furthermore, the traditional single temperature control mode has low precision and long adjustment time; the composite temperature control mode does not decouple each temperature control power, and cannot exert the advantages of the temperature control precision and efficiency of the composite temperature control mode. None of the above techniques meets the requirements of precision and efficiency of ultra-precision machining equipment and measuring instruments.
Disclosure of Invention
(one) solving the technical problems
Aiming at the defects of the prior art, the invention provides the dual-mode composite low-pressure ultra-precise temperature control device, wherein the interior of the device is in a low-pressure state, and the composite control of the environmental temperature inside the sealing box is realized by combining the radiation convection dual-mode composite temperature control mechanism.
(II) technical scheme
In order to achieve the above purpose, the embodiment of the application provides a dual-mode composite low-pressure ultra-precise temperature control device, which comprises a sealing box and a core heating component arranged on the inner side of the sealing box; the outer side of the sealing box is provided with a vacuumizing device for reducing the pressure inside the sealing box to normal pressure; the inner side wall of the sealing box is provided with a plurality of groups of radiation convection dual-mode composite temperature control mechanisms for controlling the inner side temperature of the sealing box, each radiation convection dual-mode composite temperature control mechanism comprises a heat insulation frame, and a plurality of mounting ports are formed in an array on the inner side of the heat insulation frame; the radiation plates and the convection assemblies are respectively arranged in different mounting openings, and each convection assembly comprises a convection heat exchanger detachably connected to the mounting opening and a convection fan arranged on one side of the convection heat exchanger; the convection heat exchanger comprises a mounting frame detachably connected to the mounting port; a plurality of water-cooling pipelines are formed at intervals on the inner side of the mounting frame, a convection medium outflow pipe is arranged at the upper end of the mounting frame, and a convection medium inflow pipe is arranged at the lower end of the mounting frame; the convection medium inflow pipe and the convection medium outflow pipe are respectively communicated with the water cooling pipeline; the radiation plates and the convection assemblies are arranged at intervals in a staggered manner; a monitoring assembly for monitoring the environment inside the sealed box is arranged inside the sealed box; the outside of the sealing box is provided with a controller, the controller is communicated with the monitoring assembly, and the radiation convection dual-mode composite temperature control mechanism is controlled to adjust the temperature of the inner side of the sealing box based on the measurement result of the monitoring assembly.
A dehumidifying mechanism and a filtering and purifying mechanism are arranged on the inner side of the sealing box; the dehumidifying mechanism comprises a dehumidifier and a dehumidifying drainage pipeline which are arranged on the inner side of the sealing box, one end of the dehumidifying drainage pipeline is connected with the dehumidifier, and the other end of the dehumidifying drainage pipeline is connected with the outside of the sealing box; the filtering and purifying mechanism comprises a filtering and purifying host machine and a dust discharge pipeline which are arranged on the inner side of the sealing box, one end of the dust discharge pipeline is connected with the filtering and purifying host machine, and the other end of the dust discharge pipeline is connected with the outside of the sealing box.
The vacuumizing device comprises a vacuum pump set and a vacuumizing pipeline, wherein the vacuum pump set and the vacuumizing pipeline are arranged on the outer side of the sealing box, one end of the vacuumizing pipeline is connected with the vacuum pump set, and the other end of the vacuumizing pipeline is connected with the sealing box.
The monitoring assembly includes a temperature sensor, a humidity sensor, a pressure sensor, and an environmental cleanliness sensor.
And the outside of the sealing box is wrapped with an insulating layer.
(III) beneficial effects
The invention provides a dual-mode composite low-pressure ultra-precise temperature control device, which is used for reducing the pressure in a sealed box to normal pressure through a vacuum pumping device positioned outside the sealed box, and realizing composite control on the environmental temperature inside the sealed box by a radiation convection dual-mode composite temperature control mechanism inside the sealed box.
The invention adopts low-pressure temperature control, and gives consideration to the control precision and efficiency of the internal micro-environment temperature. The device is provided with a vacuumizing device, and can reduce the pressure in the sealing box below normal pressure. The interference of natural convection in low-pressure temperature control is effectively suppressed, and compared with the normal pressure state, the temperature control precision can be obviously improved; the temperature control efficiency is still very good compared with the vacuum temperature control. The problem that the control accuracy and the efficiency of the internal micro-environment temperature are difficult to consider in the existing instrument equipment is solved.
The invention adopts a temperature control method combining two heat transfer modes, thereby improving the temperature control precision and efficiency. The radiation convection dual-mode composite temperature control mechanism is arranged in the sealing box of the device for dual-mode temperature control. When the air conditioner is in use, the convection heat exchanger controls the temperature of air flowing through the air conditioner, and the convection fan enables the air to flow through the convection heat exchanger and sends the temperature-controlled air to a temperature-controlled area. The radiation plate controls the temperature of the radiation plate in an electric temperature control mode, so that the radiation temperature control power of the radiation plate is controlled. The radiation convection dual-mode composite temperature control mechanism adopts an alternate and repeated mode to ensure the uniformity of a temperature field in a controlled area, thereby improving the composite temperature control effect. Solves the problem that the single temperature control mode of the existing instrument equipment is difficult to consider the temperature control precision and the efficiency.
The invention adopts reasonable measures for decoupling temperature control power and ensures the temperature control precision and efficiency of a composite temperature control mode. The radiation power on the radiation plate in the sealing box of the device is controlled by the radiation plate, the convection power in the convection assembly is controlled by the convection assembly, and the temperature control of the radiation plate and the convection assembly are mutually independent. The radiation plate and the convection assembly are isolated by the heat insulation frame, so that the crosstalk of the temperature between the radiation plate and the convection assembly on the radiation convection dual-mode composite temperature control mechanism can be avoided, the problem that the radiation and convection composite temperature control power is difficult to decouple is solved, the good effect that the advantages of different temperature control modes are complementary in a core temperature control area is realized, and the problem that the temperature control power of different temperature control modes is difficult to decouple and interfere with each other in the composite temperature control mode of the traditional instrument equipment is solved, so that the temperature control precision and efficiency of the composite temperature control mode are difficult to effectively exert is solved.
Drawings
FIG. 1 is a schematic diagram of the overall structure of a dual-mode composite low-pressure ultra-precise temperature control device of the present invention;
FIG. 2 is a schematic diagram of a dual mode composite low pressure ultra-precise temperature control device with protruding radiation convection dual mode composite temperature control mechanism according to the present invention;
FIG. 3 is a front view of a protruding convection assembly in a protruding radiation convection dual-mode composite temperature control mechanism in a dual-mode composite low-pressure ultra-precise temperature control device of the present invention;
FIG. 4 is a side view of a protruding convection assembly in a protruding radiation convection dual-mode composite temperature control mechanism in a dual-mode composite low-pressure ultra-precise temperature control device of the present invention;
part number description in the drawings: 100 sealing boxes, 110 controllers, 120 heat preservation layers, 200 core heating components, 300 vacuumizing devices, 400 radiation convection double-mode composite temperature control mechanisms, 410 heat insulation frames, 420 radiation plates, 430 convection assemblies, 431 convection heat exchangers, 431a mounting frames, 431b water-cooling pipelines, 431c convection medium outflow pipes, 431d convection medium inflow pipes, 432 convection fans, 500 monitoring assemblies, 600 dehumidification mechanisms and 700 filtering and purifying mechanisms.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
Examples
The invention provides a dual-mode composite low-pressure ultra-precise temperature control device, which is shown in fig. 1-4, and comprises a sealing box 100 and a core heating component 200 arranged on the inner side of the sealing box 100. The core heating component 200 is an area and a component with high requirements on environmental parameters in ultra-precise measurement and processing and manufacturing equipment in the sealing box 100, and the heating seriously affects the operation of instruments and equipment, so that the temperature of the core heating component 200 can be stably controlled by the scheme. It will be appreciated that the enclosure 100 is relatively sealed, with wiring holes, or other mounting holes, for connection of the device to the core heating component 200, being left therein, and with sealing structures provided at the wiring holes or mounting holes.
Specifically, a vacuum-pumping device 300 is disposed at the outer side of the sealing box 100, and the vacuum-pumping device 300 reduces the pressure inside the sealing box 100 to normal pressure; a plurality of groups of radiation convection double-mode composite temperature control mechanisms 400 are arranged on the inner side wall of the sealing box 100, each radiation convection double-mode composite temperature control mechanism 400 comprises a heat insulation frame 410, and a plurality of mounting ports are formed in an array on the inner side of the heat insulation frame 410; a radiation plate 420 and a convection assembly 430 are respectively arranged in different mounting openings 411, and the convection assembly 430 comprises a convection heat exchanger 431 detachably connected to the mounting opening and a convection fan 432 arranged at one side of the convection heat exchanger 431; the convection heat exchanger 431 includes a mounting bracket 431a detachably connected to the mounting port; a plurality of water-cooling pipelines 431b are formed at intervals inside the mounting frame 431a, a convection medium outflow pipe 431c is arranged at the upper end of the mounting frame 431a, and a convection medium inflow pipe 431d is arranged at the lower end of the mounting frame 431a; the convection medium inflow pipe 431d and the convection medium outflow pipe 431c are respectively communicated with the water cooling pipe 431 b. It can be understood that a circulating cooling medium temperature control device connected with the convection medium inflow pipe 431d and the convection medium outflow pipe 431c is arranged outside the seal box 100, and the circulating cooling medium temperature control device and the convection heat exchanger 431 form a stable closed loop reflux structure; the radiation plates 420 and the convection assemblies 430 are arranged at intervals in a staggered way, heat insulation is carried out between the radiation plates 420 and the convection assemblies 430 through the heat insulation frame 410, temperature crosstalk between the radiation plates 420 and the convection assemblies 430 is avoided, and the independence of temperature control of the radiation plates 420 and the convection assemblies 430 on the radiation convection dual-mode composite temperature control mechanism 400 is maintained; the radiation convection dual-mode composite temperature control mechanism 400 regulates and controls the temperature inside the seal box 100. A monitoring assembly 500 for monitoring the environment inside the sealed box 100 is arranged inside the sealed box 100; a controller 110 is arranged outside the sealing box 100, and the controller 110 obtains a detection result of the monitoring assembly 500 and controls the radiation convection dual-mode composite temperature control mechanism 400 to adjust the temperature inside the sealing box 100 based on the measurement result.
The radiation plate 420 controls its temperature in an electric temperature control manner, and participates in the control of the microenvironment in the sealed box 100 in a heat radiation manner, the convective heat exchanger 431 controls the temperature by using a circulating cooling medium, and the circulating cooling medium with adjustable temperature enters the water cooling pipeline 431b from the convective medium inflow pipe 431d and finally flows out from the convective medium outflow pipe 431 c. In this process, when the convection fan 432 is operated, air is temperature-controlled through the convection heat exchanger 431, and the air participates in the control of the microenvironment in the sealed box 100 in a convection manner. The radiation temperature control power and the convection temperature control power of the radiation convection dual-mode composite temperature control mechanism 400 can be mutually coupled by dividing the radiation temperature control power and the convection temperature control power through the heat insulation frame 410, so that advantages of different temperature control modes can be complemented in the temperature control of the area where the core component 200 is located, the problem that the different temperature control powers are difficult to decouple and mutually interfere in the traditional instrument equipment composite temperature control mode is solved, and the temperature control precision and efficiency of the composite temperature control mode are ensured.
The inside of the sealing case 100 is provided with a dehumidifying mechanism 600 and a filtering and purifying mechanism 700; the air inside the cabinet can be further filtered and purified by the dehumidifying mechanism 600 and the filtering and purifying mechanism 700. In ultra-precise environmental control, the temperature, the humidity and the pressure are mutually coupled, and the fluctuation of the humidity and the pressure directly affects the stability of the temperature. Cleanliness is an important influencing factor of pressure, and the number of suspended particles in the air directly influences the pressure which can be achieved.
The dehumidifying mechanism 600 comprises a dehumidifying main machine and a dehumidifying drain pipe, wherein the dehumidifying main machine is positioned inside the sealing case 100, one end of the dehumidifying drain pipe is connected with the dehumidifying main machine, and the other end of the dehumidifying drain pipe is connected with the dehumidifying main machine and the outside of the sealing case 100. The dehumidifying mechanism 600 adopts a semiconductor refrigeration dehumidifying mode, air in the sealing box 100 is sucked into a dehumidifying host machine under the action of a fan, water vapor in the air is condensed into water, the water vapor is discharged through a dehumidifying drainage pipeline, and the dehumidified air is sent back into the sealing box 100 after being electrically heated and temperature-controlled.
The filtering and purifying mechanism 700 comprises a filtering and purifying host and a dust discharging pipeline, wherein the filtering and purifying host is positioned in the sealing box 100, one end of the dust discharging pipeline is connected with the filtering and purifying host, and the other end of the dust discharging pipeline is connected with the outside of the sealing box 100. The filtering and purifying host adopts a dust removing mode of active and passive combination, and collected dust can be discharged outside the sealing box 100 through a dust discharge pipeline.
The dehumidifying drain pipe and the dust drain pipe of the dehumidifying mechanism 600 and the filtering and purifying mechanism 700 have special sealing structures, and the operation of the dehumidifying mechanism 600 and the filtering and purifying mechanism 700 does not affect the low pressure state in the sealing case 100.
The vacuumizing device 300 comprises a vacuum pump set and a vacuumizing pipeline, wherein the vacuum pump set and the vacuumizing pipeline are arranged on the outer side of the sealing box 100, one end section of the vacuumizing pipeline is connected with the vacuum pump set, and the other end of the vacuumizing pipeline is connected with the sealing box 100. The vacuum pump group consists of a plurality of vacuum pumps of different types and related accessories, and the corresponding vacuum pumps are started and stopped according to the pressure in the sealing box 100. The vacuum pumping device 300 stabilizes the pressure in the sealing box 100 at low pressure, and the heat radiation temperature control of the radiation plate 420 and the convection temperature control of the convection assembly 430 form a composite temperature control mode, so that the temperature control of the area where the core heating component 200 is located is realized through the composite temperature control mode. Under the condition of low pressure, the density of air molecules in the sealed box is reduced, the temperature control effect of heat convection is obviously weakened, and the specific gravity of the corresponding heat radiation temperature control is increased. Compared with a thermal convection mode, the thermal radiation temperature control mode can achieve higher temperature control precision. Therefore, higher temperature control accuracy can be achieved in the seal box 100 in the low pressure state.
The monitoring assembly 500 includes a temperature sensor, a humidity sensor, a pressure sensor, and an environmental cleanliness sensor. The monitoring assembly 500 sends the measured results of the environmental parameters and the parameters of the circulating cooling medium to the controller 110, and the controller 110 controls the radiation plate 420, the convection assembly 430, the dehumidifying mechanism 600 and the filtering and purifying mechanism 700, so that the high-efficiency control of the environmental temperature inside the sealing box 100 and the temperature of the core heating component 200 is realized.
The heat preservation layer 120 is wrapped on the outer side of the sealing box 100, and the heat preservation layer 120 can attenuate the interference of temperature fluctuation outside the sealing box 100 to the micro environment inside the sealing box 100, so that the temperature stability of the inner side of the sealing box 100 is further improved.
The invention provides a dual-mode composite low-voltage ultra-precise temperature control device, which comprises a sealing box 100, wherein a radiation convection dual-mode composite temperature control mechanism 400 is arranged at the inner side of the sealing box 100, and radiation convection dual-mode composite temperature control is carried out on the environmental temperature in the sealing box 100 through the radiation convection dual-mode composite temperature control mechanism 400.
Specifically, the radiation plate 420 controls the temperature thereof in a manner of electric temperature control, controls the microenvironment inside the sealing box 100 in a manner of heat radiation, and the convection assembly 430 is arranged to transport air at the convection heat exchanger 431 to the area where the core heating component 200 is located through the convection fan 432, so as to realize high-precision temperature control on the area where the core heating component 200 is located. Solves the problem that the single temperature control mode of the existing instrument equipment is difficult to improve the temperature control precision and efficiency at the same time.
The invention adopts low-pressure temperature control, and gives consideration to the control precision and efficiency of the internal micro-environment temperature. The device is provided with a vacuum pumping device 300, and can reduce the pressure in the sealing box 100 below the normal pressure. The interference of natural convection in low-pressure temperature control is effectively suppressed, and compared with the normal pressure state, the temperature control precision can be obviously improved; the temperature control efficiency is still very good compared with the vacuum temperature control. The problem that the control accuracy and the efficiency of the internal micro-environment temperature are difficult to consider in the existing instrument equipment is solved. The invention adopts reasonable measures for decoupling temperature control power and ensures the temperature control precision and efficiency of a composite temperature control mode. The radiation power on the radiation plate 420 in the sealing box of the device is controlled by the radiation plate 420, the convection power in the convection assembly 430 is controlled by the convection assembly 430, the temperature control of the radiation plate 420 and the convection assembly 430 are mutually independent, and the radiation plate 420 and the convection assembly 430 are isolated by the heat insulation frame 410 between the radiation plate 420 and the convection assembly 430, so that the crosstalk of the temperature between the radiation plate 420 and the convection assembly 430 on the radiation convection dual-mode composite temperature control mechanism 400 can be avoided, the problem that the radiation and convection temperature control power is difficult to decouple is solved, the advantage complementation of different temperature control modes in a core temperature control area is realized, and the problem that the single temperature control power of the composite temperature control mode of the traditional instrument equipment is difficult to decouple and interfere with each other to influence the temperature control precision and efficiency of the composite temperature control mode is solved.
In the description of the present invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," "outer," "front," "rear," and the like indicate an azimuth or a positional relationship based on that shown in the drawings, and are merely for convenience of description and to simplify the description, but do not indicate or imply that the apparatus or elements to be referred to must have a specific azimuth, be configured and operated in a specific azimuth, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, unless explicitly stated and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, integrally connected, mechanically connected, electrically connected, directly connected, indirectly connected through an intermediary, or communicating between the two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art. Embodiments of the invention and features of the embodiments may be combined with each other without conflict.
Claims (5)
1. A double-mode composite low-pressure ultra-precise temperature control device is characterized in that: comprises a sealing box (100) and a core heating component (200) arranged on the inner side of the sealing box (100); a vacuum pumping device (300) for reducing the pressure inside the sealed box (100) to normal pressure is arranged at the outer side of the sealed box (100); a plurality of groups of radiation convection dual-mode composite temperature control mechanisms (400) for regulating and controlling the temperature of the inner side of the sealing box (100) are arranged on the inner side wall of the sealing box (100), the radiation convection dual-mode composite temperature control mechanisms (400) comprise heat insulation frames (410), and a plurality of mounting ports (411) are formed in an array on the inner side of the heat insulation frames (410); a radiation plate (420) and a convection assembly (430) are respectively arranged in different mounting ports (411), and the convection assembly (430) comprises a convection heat exchanger (431) detachably connected to the mounting ports (411) and a convection fan (432) arranged on one side of the convection heat exchanger (431); -the convective heat exchanger (431) comprises a mounting bracket (431 a) detachably connected at the mounting opening (411); a plurality of water cooling pipelines (431 b) are formed at intervals on the inner side of the mounting frame (431 a), a convection medium outflow pipe (431 c) is arranged at the upper end of the mounting frame (431 a), and a convection medium inflow pipe (431 d) is arranged at the lower end of the mounting frame (431 a); the convection medium inflow pipe (431 d) and the convection medium outflow pipe (431 c) are respectively communicated with the water cooling pipeline (431 b); the radiation plates (420) and the convection assemblies (430) are arranged in a staggered mode at intervals; a monitoring assembly (500) for monitoring the environment inside the sealed box (100) is arranged inside the sealed box (100); the device is characterized in that a controller (110) is arranged on the outer side of the sealing box (100), the controller (110) is communicated with the monitoring assembly (500), and the radiation convection dual-mode composite temperature control mechanism (400) is controlled to adjust the temperature of the inner side of the sealing box (100) based on the measurement result of the monitoring assembly (500).
2. The dual-mode composite low-pressure ultra-precise temperature control device according to claim 1, wherein: a dehumidifying mechanism (600) and a filtering and purifying mechanism (700) are arranged on the inner side of the sealing box (100); the dehumidifying mechanism (600) comprises a dehumidifier and a dehumidifying drainage pipeline which are arranged on the inner side of the sealing box (100), one end of the dehumidifying drainage pipeline is connected with the dehumidifier, and the other end of the dehumidifying drainage pipeline is connected with the outside of the sealing box (100); the filtering and purifying mechanism (700) comprises a filtering and purifying host machine and a dust discharging pipeline, wherein the filtering and purifying host machine and the dust discharging pipeline are arranged on the inner side of the sealing box (100), one end of the dust discharging pipeline is connected with the filtering and purifying host machine, and the other end of the dust discharging pipeline is connected with the outside of the sealing box (100).
3. The dual-mode composite low-pressure ultra-precise temperature control device according to claim 1, wherein: the vacuumizing device (300) comprises a vacuum pump set and a vacuumizing pipeline, wherein the vacuum pump set and the vacuumizing pipeline are arranged on the outer side of the sealing box (100), one end of the vacuumizing pipeline is connected with the vacuum pump set, and the other end of the vacuumizing pipeline is connected with the sealing box (100).
4. The dual-mode composite low-pressure ultra-precise temperature control device according to claim 1, wherein: the monitoring assembly (500) includes a temperature sensor, a humidity sensor, a pressure sensor, and an environmental cleanliness sensor.
5. The dual-mode composite low-pressure ultra-precise temperature control device according to claim 1, wherein: an insulating layer (120) is wrapped on the outer side of the sealing box (100).
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| CN202211218933.9A CN115963870B (en) | 2022-10-07 | 2022-10-07 | Double-mode composite low-pressure ultra-precise temperature control device |
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| CN202211218933.9A CN115963870B (en) | 2022-10-07 | 2022-10-07 | Double-mode composite low-pressure ultra-precise temperature control device |
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| CN115963870A CN115963870A (en) | 2023-04-14 |
| CN115963870B true CN115963870B (en) | 2024-03-22 |
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| CN1306613A (en) * | 1998-05-12 | 2001-08-01 | 阿美里根公司 | Thermoelectric heat exchanger |
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