CN115562388B - Multi-mode composite and active gas bath ultra-precise temperature control device - Google Patents
Multi-mode composite and active gas bath ultra-precise temperature control device Download PDFInfo
- Publication number
- CN115562388B CN115562388B CN202211218943.2A CN202211218943A CN115562388B CN 115562388 B CN115562388 B CN 115562388B CN 202211218943 A CN202211218943 A CN 202211218943A CN 115562388 B CN115562388 B CN 115562388B
- Authority
- CN
- China
- Prior art keywords
- sealing box
- temperature control
- convection
- air
- bath
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000002131 composite material Substances 0.000 title claims abstract description 64
- 238000007789 sealing Methods 0.000 claims abstract description 95
- 230000005855 radiation Effects 0.000 claims abstract description 81
- 230000007246 mechanism Effects 0.000 claims abstract description 51
- 238000001816 cooling Methods 0.000 claims abstract description 47
- 238000010438 heat treatment Methods 0.000 claims abstract description 44
- 238000012544 monitoring process Methods 0.000 claims abstract description 26
- 230000007613 environmental effect Effects 0.000 claims abstract description 19
- 238000005259 measurement Methods 0.000 claims abstract description 10
- 239000002826 coolant Substances 0.000 claims description 34
- 238000001914 filtration Methods 0.000 claims description 18
- 230000003068 static effect Effects 0.000 claims description 15
- 239000000428 dust Substances 0.000 claims description 13
- 238000009413 insulation Methods 0.000 claims description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- 230000000712 assembly Effects 0.000 claims description 9
- 238000000429 assembly Methods 0.000 claims description 9
- 238000007599 discharging Methods 0.000 claims description 7
- 230000003749 cleanliness Effects 0.000 claims description 5
- 230000001276 controlling effect Effects 0.000 claims description 5
- 230000001105 regulatory effect Effects 0.000 claims description 5
- 150000001875 compounds Chemical class 0.000 claims description 4
- 230000000694 effects Effects 0.000 description 11
- 238000000034 method Methods 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000004321 preservation Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 238000003754 machining Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007791 dehumidification Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000004556 laser interferometry Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 230000000191 radiation effect Effects 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/20—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Control Of Temperature (AREA)
Abstract
The multimode composite and active gas bath ultra-precise temperature control device belongs to the technical field of micro-environment temperature control equipment, and comprises a sealing box and a core heating component arranged on the inner side of the sealing box; an air bath component is arranged on the inner side of the sealing box and positioned on the upper side of the core heating component, and the air bath component carries out air bath on the area where the core heating component is positioned; a plurality of groups of radiation convection dual-mode composite temperature control mechanisms are arranged on the inner side wall of the sealing box, and the radiation convection dual-mode composite temperature control mechanisms regulate and control the temperature of the inner side of the sealing box; the inner side of the sealing box is provided with a monitoring component for monitoring the environment inside the sealing box; and a controller is arranged outside the sealing box, acquires a measurement result of the monitoring component, and controls the cooling component, the air bath component and the radiation convection dual-mode composite temperature control mechanism to adjust the temperature inside the sealing box based on the measurement result. The composite control of the environmental temperature inside the sealing box is realized through the air bath component, the radiation convection dual-mode composite temperature control mechanism and the cooling component.
Description
Technical Field
The invention belongs to the technical field of micro-environment temperature control equipment, and particularly relates to a multimode compound and active gas bath ultra-precise temperature control device.
Background
With the continuous improvement of ultra-precise machining and measuring level, disturbance of environmental parameters such as temperature, humidity, pressure, cleanliness and the like becomes a key factor for restricting the improvement of precision and performance of ultra-precise machining equipment and measuring instruments. Ultra-precise manufacturing equipment such as ultra-precise instruments such as micro-nano coordinate machines and photoetching machines, and the like, has extremely high technical density and complexity, and each key index reaches the limit of the prior art capability, and represents the highest level of current measurement and processing and manufacturing. The measuring precision of the micro-nano coordinate machine reaches the nanometer level, the positioning precision and the alignment precision of the step-and-scan photoetching machine reach the nanometer level, and the high positioning precision and the high movement precision come from the laser interference measuring frame inside the micro-nano coordinate machine. In the operation process of the instrument equipment, environmental parameters such as temperature, humidity, pressure, cleanliness and the like can fluctuate, and if the environmental parameters cannot be controlled, the accuracy of the laser interferometry frame can be obviously reduced, and even the measurement frame can be caused to malfunction. This presents new challenges to environmental parameter control techniques. Ultra-precise environmental control is a key technology of such equipment.
The traditional temperature control mode only considers the dominant heat transfer mode. When the temperature of the circulating water is controlled, only the effect of heat conduction is considered (Zhao Yiwen. Research on immersion liquid high-precision temperature control technology based on active disturbance rejection control. University of science and technology, 2107.); the temperature control of the gas bath is performed by considering only the thermal convection (Zhao Jiangjun. Model and algorithm for the internal gas temperature control of lithography, university of science and technology, 2107.). The single temperature control mode is more and more difficult to meet the requirements of occasions such as industrial production, and the ignored heat transfer mode becomes an important factor for limiting the temperature control precision.
In the prior art, patent document with the application number 201810171584.7 discloses a temperature control mode of normal pressure heat radiation: the coarse temperature control clamping cylinder is used for carrying out radiation coupling temperature control on the precise inner temperature control Wen Tongre, and the precise inner temperature control cylinder is used for controlling the inner temperature in a heat radiation mode. In theory, the method increases the thermal inertia of the temperature control system through a multistage heat radiation coupling temperature control mode, and the inner space of the precise inner temperature control cylinder has good temperature stability. But the natural convection effect under normal pressure is more rapid than thermal radiation to complete the heat exchange between the coarse temperature control clamping cylinder and the precise inner temperature control cylinder. Therefore, the actual temperature control process is the result of the combined action of heat radiation and heat convection, and the characteristic of high heat radiation temperature control precision is not exerted. The vacuum radiation temperature control scheme adopted by the NIST developed molecular measuring machine inhibits natural convection of air, a copper shell coated by a resistance heating wire coats a measuring core, matte gold is plated on the surfaces of the shell and the measuring core so as to keep the radiation coupling stability (1.Kramar J,Jun J,Penzes W,et al.THE MOLECULAR MEASURING MACHINE.2008;2.USDepartment of Commerce,NIST.Nanometer Resolution Metrology with the NIST Molecular Measuring Machine.Measurement Science&Technology.). between the shell and the measuring core, the scheme can realize temperature control precision which is superior to the magnitude of +/-0.001 ℃, but the response time of the scheme is as long as days or even months, and the requirement of ultra-precise machining manufacturing on efficiency is difficult to meet.
In summary, the requirements of ultra-precise instruments and large ultra-precise manufacturing equipment on micro-environment parameter control are increasingly higher, and the traditional single temperature control mode has low precision and long adjustment time; the composite temperature control mode does not decouple each temperature control power, and cannot exert the advantages of the temperature control precision and efficiency of the composite temperature control mode. None of the above techniques meets the requirements of precision and efficiency of ultra-precision machining equipment and measuring instruments.
Disclosure of Invention
(One) solving the technical problems
Aiming at the defects of the prior art, the invention provides the multimode composite and active gas bath ultra-precise temperature control device, which can realize the rapid cooling of a core heating component through a cooling component and realize the composite control of the environmental temperature inside a sealing box through a gas bath component and a radiation convection double-mode composite temperature control mechanism.
(II) technical scheme
In order to achieve the above purpose, the embodiment of the application provides a multimode compound and active gas bath ultra-precise temperature control device, which comprises a sealing box and a core heating component arranged on the inner side of the sealing box; a gas bath component for performing gas bath on the area where the core heating component is positioned is arranged on the inner side of the sealing box and on the upper side of the core heating component; the air bath assembly comprises an air bath plate, a static pressure box, an air bath air inlet pipe and an air bath air return pipe; the air bath air inlet pipe is connected with the static pressure box positioned at the inner side of the sealing box and the outer side of the sealing box; the air bath plate is arranged at the lower side of the static pressure box and is communicated with the static pressure box, and the air bath plate is positioned above the core heating component; one end of the air bath return pipe is connected with an anti-pollution filter layer and an air pressure regulating air valve at the inner side of the sealing box, and the other end of the air bath return pipe is connected with the atmosphere at the outer side of the sealing box; the pressure intensity of the air bath air inlet pipe is higher than the pressure intensity of the inner side of the sealing box, and the pressure intensity of the inner side of the sealing box is higher than the pressure intensity of the outer side of the sealing box; a plurality of groups of radiation convection dual-mode composite temperature control mechanisms for regulating and controlling the temperature of the inner side of the sealing box are arranged on the inner side wall of the sealing box; the radiation convection dual-mode composite temperature control mechanism comprises a heat insulation frame, wherein a plurality of mounting openings are formed in an array on the inner side of the heat insulation frame; a radiation plate and a convection assembly are respectively arranged in different mounting openings; the convection assembly comprises a convection heat exchanger detachably connected to the mounting port and a convection fan mounted on one side of the convection heat exchanger; the convection heat exchanger comprises a mounting frame detachably connected to the mounting port; a plurality of water-cooling pipelines are formed at intervals on the inner side of the mounting frame, a convection medium outflow pipe is arranged at the upper end of the mounting frame, and a convection medium inflow pipe is arranged at the lower end of the mounting frame; the convection medium inflow pipe and the convection medium outflow pipe are respectively communicated with the water cooling pipeline; the radiation plates and the convection assemblies are arranged at intervals in a staggered manner; a cooling assembly for refrigerating the core heating component is arranged on the sealing box; the cooling component comprises a cooling medium inlet pipe, a cooling medium outlet pipe and a circulating coil pipe for cooling the core heating component; two ends of the circulating coil pipe are respectively connected with the cooling medium inlet pipe and the cooling medium outlet pipe; the other ends of the cooling medium inlet pipe and the cooling medium outlet pipe are respectively positioned at the outer side of the sealing box; a temperature monitoring sensor for monitoring the temperature of the cooling medium is arranged on the cooling medium outflow pipe; a monitoring assembly for monitoring the environment inside the sealed box is arranged inside the sealed box; the outside of the sealing box is provided with a controller, the controller is communicated with the monitoring assembly, and based on the measurement result of the monitoring assembly, the gas bath assembly and the radiation convection dual-mode composite temperature control mechanism are controlled to adjust the temperature of the inner side of the sealing box.
A dehumidifying mechanism and a filtering and purifying mechanism are arranged on the inner side of the sealing box; the dehumidifying mechanism comprises a dehumidifier and a dehumidifying drainage pipeline which are arranged on the inner side of the sealing box, one end of the dehumidifying drainage pipeline is connected with the dehumidifier, and the other end of the dehumidifying drainage pipeline is connected with the outside of the sealing box; the filtering and purifying mechanism comprises a filtering and purifying host machine and a dust discharge pipeline which are arranged on the inner side of the sealing box, one end of the dust discharge pipeline is connected with the filtering and purifying host machine, and the other end of the dust discharge pipeline is connected with the outside of the sealing box.
The monitoring assembly includes a temperature sensor, a humidity sensor, a pressure sensor, and an environmental cleanliness sensor.
And the outside of the sealing box is wrapped with an insulating layer.
(III) beneficial effects
The invention provides a multimode composite and active gas bath ultra-precise temperature control device, wherein when the device is used, a cooling assembly can realize rapid cooling of a core heating component, and the device is matched with a gas bath assembly and radiation convection dual-mode composite temperature control mechanism to realize composite control of the environmental temperature inside a sealing box.
The invention adopts a temperature control method compounded by a plurality of heat transfer modes, and improves the temperature control precision and efficiency. The radiation convection dual-mode composite temperature control mechanism, the cooling component and the air bath component are arranged in the sealing box of the device for multi-mode temperature control. When the cooling assembly is used, the core heating component is quickly cooled in a heat conduction mode, and heat from the core heating component is conveyed to the outside of the sealing box by circulating water to be dissipated, so that the long-term stable cooling effect of the cooling assembly is ensured. Meanwhile, the convection heat exchanger controls the temperature of air flowing through the convection heat exchanger, and the convection fan enables the air to flow through the convection heat exchanger and sends the temperature-controlled air to a temperature-controlled area. The radiation plate controls the temperature of the radiation plate in an electric temperature control mode, so that the radiation temperature control power of the radiation plate is controlled. The radiation convection dual-mode composite temperature control mechanism adopts an alternate and repeated mode to ensure the uniformity of a temperature field in a controlled area, thereby improving the composite temperature control effect. In the working area of the gas bath component, the convection temperature control effect of the gas bath gas and the heat radiation effect of the heat radiation plate form a dual-mode composite temperature control effect. Solves the problem that the single temperature control mode of the existing instrument equipment is difficult to consider the temperature control precision and the efficiency.
The invention adopts reasonable isolation measures to reduce the interference of the outer layer annular control area on the micro environment of the inner layer annular control area. The device is provided with the efficient heat preservation layer, and can avoid the influence of temperature interference outside the sealed box on the inside of the sealed box. In the sealing box, the air pressure outside the working area of the air bath component is slightly lower than the air pressure in the working area, and a micro-positive pressure structure is formed inside and outside the area. The temperature control precision of the gas in the region is higher than that of the air outside the region, and the composite temperature control mode in the region can obtain higher temperature control precision, so that the temperature interference outside the gas bath region is effectively blocked, and the temperature control precision of the region where the high-precision core heating component is located is ensured. The problem of current instrument equipment low accuracy environmental control area is to high accuracy environmental control area interference is solved.
The invention adopts reasonable measures for decoupling temperature control power and ensures the temperature control precision and efficiency of a composite temperature control mode. The convection power of the gas bath component in the sealing box of the device is controlled by the gas bath component, the conduction cooling power of the cooling component is controlled by the cooling component, the radiation power on the radiation plate is controlled by the radiation plate, the convection power in the convection component is controlled by the convection component, and the temperature control of the gas bath component, the cooling component, the radiation plate and the convection component are mutually independent. The conduction cooling effect of the cooling component mainly depends on a circulating cooling medium, and temperature crosstalk cannot be formed between the cooling component and the dual-mode composite temperature control mechanism. The radiation plate and the convection assembly are isolated by the heat insulation frame, so that the crosstalk of the temperature between the radiation plate and the convection assembly on the radiation convection dual-mode composite temperature control mechanism can be avoided, the problem that the radiation and convection composite temperature control power is difficult to decouple is solved, the good effect that the advantages of different temperature control modes are complementary in a core temperature control area is realized, and the problem that the temperature control power of different temperature control modes is difficult to decouple and interfere with each other in the composite temperature control mode of the traditional instrument equipment is solved, so that the temperature control precision and efficiency of the composite temperature control mode are difficult to effectively exert is solved.
Drawings
FIG. 1 is a schematic diagram of the overall structure of a multimode composite and active gas bath ultra-precise temperature control device of the present invention;
FIG. 2 is a schematic diagram of a protruding gas bath plate in a multimode compound and active gas bath ultra-precise temperature control device of the present invention;
FIG. 3 is a schematic diagram of a dual mode composite temperature control mechanism for protruding radiation convection in a multi-mode composite and active gas bath ultra-precise temperature control device of the present invention;
FIG. 4 is a front view of a protruding convection assembly in a protruding radiation convection dual-mode composite temperature control mechanism in a multi-mode composite and active gas bath ultra-precise temperature control device of the present invention;
FIG. 5 is a side view of a protruding convection assembly in a protruding radiation convection dual-mode composite temperature control mechanism in a multi-mode composite and active gas bath ultra-precise temperature control device of the present invention;
Part number description in the drawings: 100 sealing boxes, 110 controllers, 120 heat preservation layers, 200 core heating components, 300 air bath assemblies, 310 air bath plates, 320 static pressure boxes, 330 air bath air inlet pipes, 340 air bath return pipes, 400 radiation convection double-mode composite temperature control mechanisms, 410 heat insulation frames, 420 radiation plates, 430 convection assemblies, 431 convection heat exchangers, 431a mounting frames, 431b water cooling pipelines, 431c convection medium outflow pipes, 431d convection medium inflow pipes, 432 convection fans, 500 monitoring assemblies, 600 dehumidification mechanisms, 700 filtering and purifying mechanisms, 800 cooling assemblies, 810 cooling medium inflow pipes, 820 cooling medium outflow pipes and 830 temperature monitoring sensors.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
Examples
The invention provides a multimode composite and active gas bath ultra-precise temperature control device, which is shown in fig. 1-5, and comprises a sealing box 100 and a core heating component 200 arranged on the inner side of the sealing box 100. The core heating component 200 is an area and a component with high requirements on environmental parameters in ultra-precise measurement and processing and manufacturing equipment in the sealing box 100, and the heating seriously affects the operation of instruments and equipment, so that the temperature of the core heating component 200 can be stably controlled by the scheme. It will be appreciated that the enclosure 100 is relatively sealed, with wiring holes, or other mounting holes, for connection of the device to the core heating component 200, being left therein, and with sealing structures provided at the wiring holes or mounting holes.
Specifically, an air bath assembly 300 is disposed on the inner side of the seal box 100 and on the upper side of the core heating component 200, and the air bath assembly 300 performs air bath on the area where the core heating component 200 is located; a plurality of groups of radiation convection dual-mode composite temperature control mechanisms 400 are arranged on the inner side wall of the sealing box 100, and the radiation convection dual-mode composite temperature control mechanisms 400 regulate and control the temperature of the inner side of the sealing box 100. A monitoring assembly 500 for monitoring the environment inside the sealed box 100 is arranged inside the sealed box 100; a controller 110 is arranged outside the sealing box 100, the controller 110 obtains a measurement result of the monitoring assembly 500, and controls the gas bath assembly 300 and the radiation convection dual-mode composite temperature control mechanism 400 to adjust the temperature inside the sealing box 100 based on the measurement result.
The radiation convection dual-mode composite temperature control mechanism 400 comprises a heat insulation frame 410, wherein a plurality of mounting openings are formed in an array on the inner side of the heat insulation frame 410; a radiation plate 420 and a convection assembly 430 are respectively provided in the different mounting ports; the radiation plates 420 and the convection assemblies 430 are arranged at intervals in a staggered manner, heat is insulated through the heat insulation frame 410, temperature crosstalk between the radiation plates 420 and the convection assemblies 430 is avoided, and the independence of temperature control of the radiation plates 420 and the convection assemblies 430 on the radiation convection dual-mode composite temperature control mechanism 400 is maintained.
The convection assembly 430 includes a convection heat exchanger 431 detachably connected to the mounting port and a convection fan 432 mounted to one side of the convection heat exchanger 431.
The convection heat exchanger 431 includes a mounting bracket 431a detachably connected to the mounting port; a plurality of water-cooling pipelines 431b are formed at intervals inside the mounting frame 431a, a convection medium outflow pipe 431c is arranged at the upper end of the mounting frame 431a, and a convection medium inflow pipe 431d is arranged at the lower end of the mounting frame 431a; the convection medium inflow pipe 431d and the convection medium outflow pipe 431c are respectively communicated with the water cooling pipe 431 b. It is understood that a circulating cooling medium temperature control device connected to the convection medium inflow pipe 431d and the convection medium outflow pipe 431c is provided outside the sealed box 100, and forms a stable closed loop reflux structure with the convection heat exchanger 431.
The radiation plate 420 controls its temperature in an electric temperature control manner, and participates in the control of the microenvironment in the sealed box 100 in a heat radiation manner, the convective heat exchanger 431 controls the temperature by using a circulating cooling medium, and the circulating cooling medium with adjustable temperature enters the water cooling pipeline 431b from the convective medium inflow pipe 431d and finally flows out from the convective medium outflow pipe 431 c. In this process, the convection fan 432 is operated, and the air passes through the convection heat exchanger 431 and is controlled in temperature, and participates in the control of the microenvironment in the sealed box 100 by convection. The radiation temperature control power and the convection temperature control power of the radiation convection dual-mode composite temperature control mechanism 400 can be mutually coupled by dividing the radiation temperature control power and the convection temperature control power through the heat insulation frame 410, so that advantages of different temperature control modes can be complemented in the temperature control of the area where the core heating component 200 is located, the problem that different temperature control powers of the traditional instrument equipment composite temperature control modes are difficult to decouple and mutually interfere is solved, and the temperature control precision and efficiency of the composite temperature control modes are ensured.
The inside of the sealing case 100 is provided with a dehumidifying mechanism 600 and a filtering and purifying mechanism 700; the air inside the cabinet can be further filtered and purified by the dehumidifying mechanism 600 and the filtering and purifying mechanism 700. In ultra-precise environmental control, temperature and humidity are mutually coupled, and fluctuation of humidity directly affects the stability of temperature.
The dehumidifying mechanism 600 comprises a dehumidifying main machine and a dehumidifying drain pipe, wherein the dehumidifying main machine is positioned inside the sealing case 100, one end of the dehumidifying drain pipe is connected with the dehumidifying main machine, and the other end of the dehumidifying drain pipe is connected with the dehumidifying main machine and the outside of the sealing case 100. The dehumidifying mechanism 600 adopts a semiconductor refrigeration dehumidifying mode, air in the sealing box 100 is sucked into a dehumidifying host machine under the action of a fan, water vapor in the air is condensed into water, the water vapor is discharged through a dehumidifying drainage pipeline, and the dehumidified air is sent back into the sealing box 100 after being electrically heated and temperature-controlled.
The filtering and purifying mechanism 700 comprises a filtering and purifying host and a dust discharging pipeline, wherein the filtering and purifying host is positioned in the sealing box 100, one end of the dust discharging pipeline is connected with the filtering and purifying host, and the other end of the dust discharging pipeline is connected with the outside of the sealing box 100. The filtering and purifying host adopts a dust removing mode of active and passive combination, and collected dust can be discharged outside the sealing box 100 through a dust discharge pipeline.
The air bath assembly 300 comprises an air bath plate 310, a static pressure box 320, an air bath inlet pipe 330 and an air bath return pipe 340, wherein the air bath plate 310 is positioned above the core heating component 200. A static pressure box 320 is arranged between the air bath plate 310 and the air bath inlet pipe 330, constant temperature air from the air bath inlet pipe 330 is uniformly distributed in the static pressure box 320, and the pressure intensity of each area in the static pressure box 320 tends to be consistent. The air bath plate 310 is installed at the air outlet end of the static pressure box 320, and an air bath air outlet is formed at the lower side, through which the air flow uniformly distributed by the static pressure box 320 is discharged. Specifically, the form of the air outlet of the air bath is designed according to the heating condition and temperature control requirement of the core heating component 200.
The air bath return air pipe 340 is connected with the inner side and the outer side of the sealing box 100, an anti-pollution filter layer and an air pressure regulating air valve are arranged at the inner side end of the sealing box, and the other end of the air bath return air pipe is connected with the atmosphere outside the sealing box 100.
The pressure of the air outlet of the air bath is higher than the pressure inside the sealing box 100. The region where the core heating component 200 is located is subjected to gas bath by the gas bath plate 310, and in the process, the region where the core heating component 200 is located and the outside of the region form a micro positive pressure, and the core heating component 200 is controlled to be in a certain temperature range by the gas bath mode. Meanwhile, in the micro-positive pressure area formed by the gas bath plate 310, the heat radiation temperature control of the radiation plate 420 and the gas bath temperature control of the gas bath plate 310 form a composite temperature control form, and the temperature control of the area where the core heating component 200 is located is realized through the composite temperature control form. The periphery of the sealing box, which is far away from the core heating component 200, is provided with an air bath return air pipe 340, the return air quantity is adaptively adjusted by an air pressure adjusting air valve according to the pressure in the device, and meanwhile, the air bath return air pipe 340 is provided with an anti-pollution filter layer to prevent the pollution outside the sealing box 100 from entering. The air bath plate 310 may be formed by splicing one or more pieces. The air-bath air inlet pipe 330 is connected with the outer side of the sealing box through a pipeline. It can be understood that a mechanism for controlling the temperature and supplying air with high precision is arranged on the outer side. The specific structure of the gas bath plate 310 adopts a gas bath temperature control form in the prior art, which can form a high-precision gas bath temperature control effect, and the specific form is not limited herein.
The monitoring assembly 500 includes a temperature sensor, a humidity sensor, a pressure sensor, and an environmental cleanliness sensor. The monitoring assembly 500 sends the measured results of the environmental parameters and the parameters of the circulating cooling medium to the controller 110, and the controller 110 controls the air bath assembly 300, the radiation plate 420, the convection assembly 430, the dehumidifying mechanism 600, the filtering and purifying mechanism 700 and the cooling assembly 800, so that the inner environmental temperature of the sealing box 100 and the temperature of the core heating component 200 are controlled efficiently.
A cooling module 800 for cooling the core heat generating component 200 is provided in the sealing case 100; the cooling assembly 800 includes a cooling medium inlet pipe 810, a cooling medium outlet pipe 820, and a circulation coil for cooling the core heating member 200; the both ends of the circulation coil are connected to the cooling medium inlet pipe 810 and the cooling medium outlet pipe 820, respectively.
The other ends of the cooling medium inlet pipe 810 and the cooling medium outlet pipe 820 are located outside the sealing case 100, respectively, and it is understood that a mechanism for connecting the cooling medium inlet pipe 810 and the cooling medium outlet pipe 820 and controlling the temperature of the cooling medium therein and providing circulating power is provided outside the sealing case 100. A temperature monitoring sensor 830 for monitoring the temperature of the cooling medium is provided in the cooling medium outflow pipe 820.
The cooling assembly 800, the radiation convection dual-mode temperature control mechanism 400 and the gas bath assembly 300 have a conduction radiation convection multi-mode temperature control mode, and the three modes are closely matched to achieve targeted control of the temperature in the sealing box 100.
The heat preservation layer 120 is wrapped on the outer side of the sealing box 100, and the heat preservation layer 120 can attenuate the interference of temperature fluctuation outside the sealing box 100 to the micro environment inside the sealing box 100, so that the temperature stability of the inner side of the sealing box 100 is further improved.
The invention provides a multimode composite and active gas bath ultra-precise temperature control device, which comprises a sealing box 100, a gas bath assembly 300 at the inner side of the sealing box 100, a radiation convection double-mode composite temperature control mechanism 400 and a cooling assembly 800, wherein the cooling assembly 800 can realize rapid cooling of a core heating component 200. Meanwhile, the composite control of the external environment temperature in the air bath area in the seal box 100 is realized through the air bath assembly 300 and the radiation convection dual-mode composite temperature control mechanism 400, and the air bath assembly 300, the radiation plate 420 and the cooling assembly 800 conduct radiation convection dual-mode composite temperature control on the core heating component 200 in the air bath area.
Specifically, the radiation plate 420 is provided to control its temperature by adopting an electric temperature control manner, control the microenvironment inside the seal box 100 in a heat radiation manner, and the convection assembly 430 is provided to carry the air at the convection heat exchanger 431 to the controlled temperature region through the convection fan 432, so as to realize a convection heat exchange effect, and the air bath plate 310 is used to perform a constant temperature air bath on the region where the core heating component 200 is located, and perform a high precision temperature control on the region where the core heating component 200 is located by combining the high precision radiation temperature control effect of the radiation plate 420. Solves the problem that the single temperature control mode of the existing instrument equipment is difficult to improve the temperature control precision and efficiency at the same time.
The invention adopts reasonable isolation measures to reduce the interference of the outer layer annular control area on the micro environment of the inner layer annular control area. The high-efficiency heat preservation layer 120 is arranged on the outer layer of the device, so that the influence of temperature interference outside the device on the device can be avoided. The air pressure outside the air bath area in the device is slightly lower than the air pressure inside the air bath area to form a micro positive pressure structure, so that the temperature interference outside the air bath area is effectively blocked, and the temperature control precision of the area where the high-precision core heating component 200 is located is ensured. The problem of current instrument equipment low accuracy environmental control area is to high accuracy environmental control area interference is solved.
The invention adopts reasonable measures for decoupling temperature control power and ensures the temperature control precision and efficiency of a composite temperature control mode. The convection power of the gas bath assembly 300 in the sealing box of the device is controlled by the gas bath assembly, the conduction cooling power of the cooling assembly 800 is controlled by the cooling assembly, the radiation power on the radiation plate 420 is controlled by the radiation plate 420 and the convection power in the convection assembly 430 is controlled by the convection assembly 430, the temperature control of the gas bath assembly 300, the cooling assembly 800, the radiation plate 420 and the convection assembly 430 are mutually independent, and the radiation plate 420 and the convection assembly 430 are isolated by the heat insulation frame 410 between the radiation plate 420 and the convection assembly 430, so that the temperature crosstalk between the radiation plate 420 and the convection assembly 430 on the radiation convection dual-mode composite temperature control mechanism 400 can be avoided, the problem that the radiation and convection temperature control power is difficult to decouple is solved, the advantage complementation of different temperature control modes at the core temperature control area is realized, and the problems that the single temperature control power of the composite temperature control mode of the traditional instrument equipment is difficult to decouple and the mutual interference is difficult to ensure the temperature control precision and the efficiency of the composite temperature control mode are solved.
In the description of the present invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," "outer," "front," "rear," and the like indicate an azimuth or a positional relationship based on that shown in the drawings, and are merely for convenience of description and to simplify the description, but do not indicate or imply that the apparatus or elements to be referred to must have a specific azimuth, be configured and operated in a specific azimuth, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, unless explicitly stated and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, integrally connected, mechanically connected, electrically connected, directly connected, indirectly connected through an intermediary, or communicating between the two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art. Embodiments of the invention and features of the embodiments may be combined with each other without conflict.
Claims (4)
1. A multimode compound and initiative gas bath ultra-precise temperature control device is characterized in that: comprises a sealing box (100) and a core heating component (200) arranged on the inner side of the sealing box (100); a gas bath assembly (300) for performing gas bath on the area where the core heating component (200) is positioned is arranged on the inner side of the sealing box (100) and positioned on the upper side of the core heating component (200); the air bath assembly (300) comprises an air bath plate (310), a static pressure box (320), an air bath air inlet pipe (330) and an air bath air return pipe (340); the air bath air inlet pipe (330) is connected with a static pressure box (320) positioned at the inner side of the sealing box (100) and the outer side of the sealing box (100); the air bath plate (310) is arranged at the lower side of the static pressure box (320), is communicated with the static pressure box (320), and is positioned above the core heating component (200); one end of the air bath return air pipe (340) is connected with an anti-pollution filter layer and an air pressure regulating air valve at the inner side of the sealing box (100), and the other end of the air bath return air pipe is connected with the atmosphere at the outer side of the sealing box (100); the pressure intensity of the air bath air inlet pipe (330) is higher than the pressure intensity of the inner side of the sealing box (100), and the pressure intensity of the inner side of the sealing box (100) is higher than the pressure intensity of the outer side of the sealing box (100); a plurality of groups of radiation convection dual-mode composite temperature control mechanisms (400) for regulating and controlling the temperature of the inner side of the sealing box (100) are arranged on the inner side wall of the sealing box (100), each radiation convection dual-mode composite temperature control mechanism (400) comprises a heat insulation frame (410), and a plurality of mounting ports (411) are formed in an array on the inner side of the heat insulation frame (410); a radiation plate (420) and a convection assembly (430) are respectively arranged in different mounting ports (411), and the convection assembly (430) comprises a convection heat exchanger (431) detachably connected to the mounting ports (411) and a convection fan (432) arranged on one side of the convection heat exchanger (431); -the convective heat exchanger (431) comprises a mounting bracket (431 a) detachably connected at the mounting opening (411); a plurality of water cooling pipelines (431 b) are formed at intervals on the inner side of the mounting frame (431 a), a convection medium outflow pipe (431 c) is arranged at the upper end of the mounting frame (431 a), and a convection medium inflow pipe (431 d) is arranged at the lower end of the mounting frame (431 a); the convection medium inflow pipe (431 d) and the convection medium outflow pipe (431 c) are respectively communicated with the water cooling pipeline (431 b); the radiation plates (420) and the convection assemblies (430) are arranged in a staggered mode at intervals; a cooling unit (800) for cooling the core heat generating component (200) is provided on the seal box (100); the cooling assembly (800) comprises a cooling medium inlet pipe (810), a cooling medium outlet pipe (820) and a circulating coil pipe for cooling the core heating component (200); two ends of the circulating coil pipe are respectively connected with the cooling medium inlet pipe (810) and the cooling medium outlet pipe (820); the other ends of the cooling medium inlet pipe (810) and the cooling medium outlet pipe (820) are respectively positioned outside the sealing box (100); a temperature monitoring sensor (830) for monitoring the temperature of the cooling medium is provided in the cooling medium outflow pipe (820); a monitoring assembly (500) for monitoring the environment inside the sealed box (100) is arranged inside the sealed box (100); the outside of the sealing box (100) is provided with a controller (110), the controller (110) is communicated with the monitoring assembly (500), and the gas bath assembly (300) and the radiation convection dual-mode composite temperature control mechanism (400) are controlled to adjust the temperature of the inner side of the sealing box (100) based on the measurement result of the monitoring assembly (500).
2. The multimode composite and active gas bath ultra-precise temperature control device according to claim 1, wherein: a dehumidifying mechanism (600) and a filtering and purifying mechanism (700) are arranged on the inner side of the sealing box (100); the dehumidifying mechanism (600) comprises a dehumidifier and a dehumidifying drainage pipeline which are arranged on the inner side of the sealing box (100), one end of the dehumidifying drainage pipeline is connected with the dehumidifier, and the other end of the dehumidifying drainage pipeline is connected with the outside of the sealing box (100); the filtering and purifying mechanism (700) comprises a filtering and purifying host machine and a dust discharging pipeline, wherein the filtering and purifying host machine and the dust discharging pipeline are arranged on the inner side of the sealing box (100), one end of the dust discharging pipeline is connected with the filtering and purifying host machine, and the other end of the dust discharging pipeline is connected with the outside of the sealing box (100).
3. The multimode composite and active gas bath ultra-precise temperature control device according to claim 1, wherein: the monitoring assembly (500) includes a temperature sensor, a humidity sensor, a pressure sensor, and an environmental cleanliness sensor.
4. The multimode composite and active gas bath ultra-precise temperature control device according to claim 1, wherein: an insulating layer (120) is wrapped on the outer side of the sealing box (100).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211218943.2A CN115562388B (en) | 2022-10-07 | 2022-10-07 | Multi-mode composite and active gas bath ultra-precise temperature control device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211218943.2A CN115562388B (en) | 2022-10-07 | 2022-10-07 | Multi-mode composite and active gas bath ultra-precise temperature control device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115562388A CN115562388A (en) | 2023-01-03 |
| CN115562388B true CN115562388B (en) | 2024-05-14 |
Family
ID=84745794
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211218943.2A Active CN115562388B (en) | 2022-10-07 | 2022-10-07 | Multi-mode composite and active gas bath ultra-precise temperature control device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115562388B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102012710A (en) * | 2010-03-19 | 2011-04-13 | 深圳市英威腾电气股份有限公司 | Natural convection ambient temperature simulation text box |
| CN110829231A (en) * | 2019-09-25 | 2020-02-21 | 中车永济电机有限公司 | Temperature and humidity control device suitable for sealing environment |
| CN213119341U (en) * | 2020-07-06 | 2021-05-04 | 中国电子工程设计院有限公司 | Precision temperature control equipment |
| CN113448365A (en) * | 2021-06-10 | 2021-09-28 | 湖北云沛科技有限公司 | High-precision temperature control device for cross radiation convection |
| CN114489188A (en) * | 2022-01-17 | 2022-05-13 | 上海精测半导体技术有限公司 | Environment control device and semiconductor device |
-
2022
- 2022-10-07 CN CN202211218943.2A patent/CN115562388B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102012710A (en) * | 2010-03-19 | 2011-04-13 | 深圳市英威腾电气股份有限公司 | Natural convection ambient temperature simulation text box |
| CN110829231A (en) * | 2019-09-25 | 2020-02-21 | 中车永济电机有限公司 | Temperature and humidity control device suitable for sealing environment |
| CN213119341U (en) * | 2020-07-06 | 2021-05-04 | 中国电子工程设计院有限公司 | Precision temperature control equipment |
| CN113448365A (en) * | 2021-06-10 | 2021-09-28 | 湖北云沛科技有限公司 | High-precision temperature control device for cross radiation convection |
| CN114489188A (en) * | 2022-01-17 | 2022-05-13 | 上海精测半导体技术有限公司 | Environment control device and semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN115562388A (en) | 2023-01-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8741065B2 (en) | Substrate processing apparatus | |
| KR101548328B1 (en) | Method of manufacturing apparatus for cooling sever room and air conditioning system for data center therewith | |
| CN112013674A (en) | Vertical furnace equipment | |
| JPWO2014064804A1 (en) | Gas chromatograph | |
| CN115562388B (en) | Multi-mode composite and active gas bath ultra-precise temperature control device | |
| KR20150122578A (en) | Method of manufacturing apparatus for cooling sever room and air conditioning system for data center therewith | |
| CN207602525U (en) | A kind of temperature control device for power device ageing | |
| CN115586802B (en) | Multimode composite double-layer ultra-precise temperature control device | |
| CN109950821B (en) | Cooling and dehumidifying electric power cabinet based on semiconductor refrigeration piece | |
| CN115562387B (en) | Multimode composite low-voltage ultra-precise temperature control device | |
| CN115629635B (en) | Multimode composite ultra-precise temperature control device | |
| CN115963870B (en) | Double-mode composite low-pressure ultra-precise temperature control device | |
| CN110631302B (en) | Shell-and-tube heat exchanger with heat pipe combined with phase-change material | |
| JPH10116867A (en) | Method for testing semiconductor wafer and temperature controller for testing equipment | |
| KR101396539B1 (en) | Device for testing temperature of mobile memory module | |
| CN115509275B (en) | Multimode composite and active gas bath double-layer ultra-precise temperature control device | |
| CN115581043A (en) | Dual-mode composite ultra-precise temperature control device | |
| CN115525075B (en) | Double-mode composite double-layer ultra-precise temperature control device | |
| JP3810890B2 (en) | Constant temperature and humidity air supply device | |
| CN115629634B (en) | Multimode composite low-pressure double-layer ultra-precise temperature control device | |
| CN115542682B (en) | Double-mode composite low-pressure double-layer ultra-precise temperature control device | |
| CN114047673A (en) | Temperature control device for isolating internal fluctuation and decoupling control method thereof | |
| CN112241196A (en) | Dustproof radiating computer mainframe | |
| KR100635255B1 (en) | The backing plate of the linear motor | |
| CN220583054U (en) | Vacuum breaking heat exchange system for kerosene gas phase drying equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |