CN115815730A - Vacuum welding equipment for preparing semiconductor laser - Google Patents

Abstract

The invention relates to vacuum welding equipment for preparing a semiconductor laser, which comprises a welding box body, a material conveying table and a material discharging table, wherein a top plate and a support plate are horizontally arranged in the middle of the welding box body, and movable openings are formed in the centers of the top plate and the support plate; a preheating furnace is arranged on the top plate, an upper welding furnace is arranged at the upper end of the preheating furnace, and an upper sealing device is arranged between the upper welding furnace and the preheating furnace; a lower welding furnace is arranged below the support plate, and a lower sealing device is arranged between the top of the lower welding furnace and the bottom of the support plate; a movable material carrying frame is longitudinally and movably arranged in the movable opening, and the upper end and the lower end of the movable material carrying frame are respectively provided with a material carrying platform. The movable material loading frame is driven by a lifting driving mechanism arranged in the welding box body to lift, and the two material loading platforms are enabled to respectively carry out feeding, preheating, vacuum welding and discharging in sequence. By adopting the upper and lower double-station structure, different material carrying platforms are lifted to different processing devices, so that different procedures are processed, and the welding efficiency is improved.

Description

Vacuum welding equipment for preparing semiconductor laser

Technical Field

The invention belongs to the technical field of laser production, and particularly relates to vacuum welding equipment for semiconductor laser preparation.

Background

Need weld the encapsulation with apron and base shell in semiconductor laser's preparation production process, generally adopt the fastener to fix apron and base shell among the prior art, but this kind of mode leakproofness is relatively poor, if adopt traditional welding mode, the welding can produce the cavity under conventional atmospheric environment to lead to the welding quality not high, also can influence the leakproofness.

Patent numbers: CN202210773344.0 discloses an online three-cavity vacuum welding furnace and a vacuum welding process, which comprises a furnace body, wherein a preheating cavity, a welding cavity and a cooling cavity are sequentially formed in the furnace body according to a material conveying direction, and an automatic separation plate capable of moving up and down to seal and separate the adjacent cavities is arranged between the two adjacent cavities; the preheating cavity and the welding cavity are respectively provided with an independent formic acid inflating device and an independent nitrogen inflating device in a positioning manner, and the preheating cavity, the welding cavity and the cooling cavity are respectively provided with an independent vacuumizing device in a positioning manner; this application sets gradually preheating chamber, welding chamber and cooling chamber inside the furnace body, and the tray passes through above cavity in proper order under transport mechanism's drive to realize vacuum welding process. In the practical use process, when the welding chamber is firstly conveyed only by a conveying mechanism such as a conveyor belt, the sealing performance between each two chambers cannot be ensured, and particularly when the welding chamber is vacuumized, when absolute sealing cannot be ensured in the chambers, welding seams are generated, so that the welding quality of the electric elements is influenced; in addition, in the welding process, a mode of feeding materials one by one is adopted, the welding efficiency is relatively low, and heat loss can be caused by frequent opening and closing of each chamber, so that the cost of energy consumption is increased.

Disclosure of Invention

Aiming at the problems, the invention discloses vacuum welding equipment for preparing a semiconductor laser, which can realize double-station simultaneous processing, ensure the sealing property of a vacuum chamber and avoid the heat loss of a preheating chamber.

The specific technical scheme is as follows:

a vacuum welding device for semiconductor laser preparation comprises a welding box body, a material conveying table and a material discharging table, wherein material inlet and outlet openings are formed in two sides of the welding box body, the material conveying table and the material discharging table are arranged at positions, located at the material inlet and outlet openings, of two sides of the welding box body respectively, material conveying assemblies are arranged on the material conveying table and the material discharging table respectively, one ends of the two material conveying assemblies extend into the welding box body through the material inlet and outlet openings respectively, a material tray provided with a laser shell is used for conveying the material tray, the material tray is of a rectangular groove structure, and wing plates are horizontally bent at the top ends of side walls of two sides of the material tray; a top plate and a support plate are horizontally arranged in the middle of the welding box body, the top plate is positioned above the support plate, and movable openings are formed in the centers of the top plate and the support plate; the upper end of the top plate is provided with a preheating furnace, the inner wall of the preheating furnace is provided with a heating assembly, the centers of the upper end and the lower end of the preheating furnace are provided with through holes with circular structures, the upper end of the preheating furnace is provided with an upper welding furnace, the top end of the upper welding furnace is fixedly connected with the inner wall of the top end of the welding box body through a support hanger, the center of the lower end of the upper welding furnace is provided with an opening corresponding to the through holes, the inner diameter of the opening is equal to that of the through holes, and an upper sealing device is arranged between the upper welding furnace and the preheating furnace; the lower welding furnace is arranged below the support plate, the size and the shape of the lower welding furnace are equal to those of the upper welding furnace, the lower welding furnace and the upper welding furnace are oppositely arranged, an opening in the lower welding furnace corresponds to the position of a movable opening in the support plate, independent vacuumizing devices are arranged in the lower welding furnace and the upper welding furnace, heating assemblies are arranged on the inner walls of the lower welding furnace and the upper welding furnace, and a lower sealing device is arranged between the top of the lower welding furnace and the bottom of the support plate.

The movable opening is longitudinally and movably provided with a movable material carrying frame, the upper end and the lower end of the movable material carrying frame are respectively provided with a material carrying platform, each material carrying platform is respectively used for carrying a material plate, the movable material carrying frame is driven by a lifting driving mechanism arranged in the welding box body to lift, and the two material carrying platforms are respectively subjected to loading, preheating, vacuum welding and unloading in sequence; a sealing groove is arranged between the two material loading platforms on the movable material loading frame, and the sealing groove is respectively matched with the upper sealing device and the lower sealing device to realize the sealing of the upper welding furnace or the lower welding furnace; and the two ends of the support plate, which are positioned at the movable opening, are respectively provided with a feeding mechanism and an unloading mechanism, the feeding mechanism is used for feeding a material tray on the material conveying assembly onto one of the material carrying platforms, and the unloading mechanism is used for unloading the material tray on one of the material carrying platforms onto the material conveying assembly at the other end.

The movable material loading frame comprises a sealing seat, a lower sealing cover, an upper sealing cover and two fixing pipes, wherein the sealing seat, the lower sealing cover and the upper sealing cover are all of a circular structure, a circle of sealing groove is formed in the side wall of the sealing seat, the cross section of the sealing groove is of an isosceles trapezoid structure, the sealing seat is longitudinally provided with the two fixing pipes in a penetrating mode, the two fixing pipes are respectively located on two sides of the sealing seat, the two fixing pipes are of a hollow structure, an internal thread is arranged on the inner wall of one fixing pipe, the upper sealing cover and the lower sealing cover are respectively arranged at the upper end and the lower end of the sealing seat and are oppositely arranged, two sides of the upper sealing cover and two sides of the lower sealing cover are respectively vertically penetrated through the two fixing pipes, and the top end and the bottom end of each fixing pipe are respectively flush with the top of the upper sealing cover and the bottom of the lower sealing cover; the constant head tank that is used for the holding charging tray is all seted up to seal receptacle upper surface and lower gland upper surface to make the charging tray both sides pass through the pterygoid lamina and place in the upper surface of seal receptacle and lower gland, the constant head tank sets up and lies in between two fixed pipes along the direction of defeated material subassembly, thereby makes seal receptacle upper end and lower gland upper end form respectively carry the material platform.

Furthermore, the center of the inner wall of the opening at the lower end of the preheating furnace is provided with a circle of convex block, the upper end and the lower end of the convex block form a sealing groove respectively, the two sealing grooves are symmetrically arranged, and the two sealing grooves are matched with the upper sealing cover and the lower sealing cover respectively to seal the opening at the lower end of the preheating furnace.

Furthermore, the lifting driving mechanism comprises a solid guide rod, a hollow guide pipe, a rotating shaft and a lifting driving motor, wherein the core guide rod is longitudinally arranged on one side in the movable opening, the upper end of the solid guide rod is fixedly connected with the inner wall of the top end of the upper welding furnace, the lower end of the solid guide rod is fixedly connected with the inner wall of the bottom end of the lower welding furnace, the solid guide rod longitudinally penetrates through one of the fixed pipes on the movable material loading frame, and the solid guide rod is in sliding connection with the fixed pipe; the number of the hollow guide pipes is two, the upper end of one hollow guide pipe is fixedly connected with the top end of the upper welding furnace, the lower end of the other hollow guide pipe is fixedly connected with the inner wall of the bottom end of the lower welding furnace, the two hollow guide pipes are positioned on the same straight line and positioned on the other side in the movable port, a gap is reserved between the adjacent ends of the two hollow guide pipes, the gap is positioned at the position of a through port at the lower end of the preheating furnace, the two hollow guide pipes longitudinally penetrate through the other fixed pipe on the movable material carrying rack, and the two hollow guide pipes are in sliding connection with the fixed pipes; the rotary shaft is longitudinally arranged in the two hollow guide pipes in a penetrating mode, the outer walls of the upper end and the lower end of the rotary shaft are respectively connected with the two hollow guide pipes in a rotating mode through at least two bearings, the bottom end of the rotary shaft is arranged on the inner wall of the bottom end of the lower welding furnace in a rotating mode through the bearings, the upper end of the rotary shaft upwards penetrates through the top end of the upper welding furnace and is connected with the top end of the welding box body in a rotating mode through the bearings, a threaded connecting seat is arranged at the position, located in the gap position of the two hollow guide pipes, of the rotary shaft, external threads are arranged on the side wall of the threaded connecting seat, and the threaded connecting seat is matched with the internal threads on the fixed pipe through the external threads on the side wall to achieve threaded connection; the lifting driving motor is fixedly arranged at the top end of the welding box body, an output shaft of the lifting driving motor vertically penetrates through the top end of the welding box body and is connected with a driving shaft, the driving shaft is in transmission connection with the rotating shaft through a driving wheel matched with a transmission belt, the rotating shaft is driven to rotate through the lifting driving motor, and the rotating shaft is in threaded connection with one of the fixed pipes on the movable material carrying frame through the threaded connecting seat in the rotating process, so that the movable material carrying frame is driven to lift on the solid guide rod and the hollow guide pipe.

Furthermore, the upper sealing device and the lower sealing device respectively comprise a mounting plate, a driving cylinder, a movable ring, a linkage rod and movable blades, the movable ring is horizontally arranged, a plurality of arc-shaped sliding openings are uniformly distributed on the movable ring, a guide shaft longitudinally penetrates through each arc-shaped sliding opening, two limit blocks are arranged on the guide shaft, the two limit blocks are respectively attached to the upper end and the lower end of the movable ring to limit the longitudinal movement of the movable ring, the lower end of the guide shaft is vertically arranged on the mounting plate, and the periphery of the mounting plate is fixedly arranged on the inner wall of the welding box body; the driving air cylinder is horizontally arranged, one end of the driving air cylinder is hinged to the inner wall of the welding box body through a hinge seat, a rotating sleeve is arranged at one end of a movable rod of the driving air cylinder, a connecting rod is rotatably arranged in the rotating sleeve, and the bottom end of the connecting rod is vertically connected with the movable ring; the inner side of the movable ring is provided with a plurality of movable blades which are distributed in an annular shape, the surfaces of one ends of the outer sides of the movable blades are respectively and rotatably provided with the linkage rod through rotating shafts, the other ends of the linkage rods are respectively and rotatably connected with the surfaces of the movable rings through rotating shafts, the surfaces of the other ends of the outer sides of the movable blades are respectively and vertically provided with rotating shafts, and the lower ends of the rotating shafts are rotatably connected with the surfaces of the mounting plates, so that the driving cylinder is driven to push the movable rings to rotate and drive the movable blades to be unfolded or closed simultaneously under the action of the linkage rods; the inside wall of activity blade is the arc structure, and all overlaps on the inside wall of a plurality of activity blades to be equipped with the sealed gum cover, and the size shape and the seal groove size shape of the inside wall of sealed gum cover suit, is ring column structure between a plurality of sealed gum covers for when a plurality of activity blades are closed, a plurality of sealed gum covers cooperate with the seal groove to realize sealed, and support each other between two adjacent sealed gum covers and press the sealing.

Furthermore, a circle of sealing ring is arranged at the position, located at the opening, of the bottom of the upper welding furnace, a circle of sealing ring is also arranged at the position, located at the opening, of the top of the lower welding furnace, and the outer wall of each sealing ring is arranged in an inclined mode; every one side surface that the sealed gum cover is close to the sealing ring all is equipped with the sealing strip of arc structure, the inside wall of sealing strip is the slope setting for cooperate through the sealing strip and with the sealing ring when the movable vane closes and realize supporting to press sealedly.

Further, defeated material subassembly is including defeated material support, conveying motor, conveying roller, conveyer belt, defeated material support quantity is two and control the distribution, and two adjacent one sides of defeated material support set up the conveying roller, the conveying roller drives rotatoryly through installing conveying motor on defeated material support lateral wall, and sets up on the conveying roller the conveyer belt, the conveyer belt on two conveying supports the pterygoid lamina of charging tray both sides respectively and carries.

Further, the feeding mechanism comprises a cylinder seat, a feeding cylinder, a material pushing block, a first lifting cylinder and a first lifting plate, the first lifting cylinder is arranged at the bottom of the support plate, a piston rod of the first lifting cylinder upwards penetrates through the support plate and is horizontally arranged on the first lifting plate, the first lifting plate is positioned between the two conveying belts, the first lifting plate is pushed by the first lifting cylinder to ascend and lift a material tray on the material conveying assembly, and the position of the lifted material tray corresponds to the position of a positioning groove on one material carrying table; the bottom of the cylinder seat is arranged on the support plate through a support and is positioned above the material conveying assembly, the feeding cylinder is horizontally arranged on the cylinder seat, and the piston rod of the feeding cylinder is provided with the material pushing block which is used for pushing the material disc on the first lifting plate to the material loading platform.

Furthermore, the discharging mechanism comprises a movable seat, slide rails, a first driving motor, a first lead screw, a second driving motor, a second lead screw, a guide rod, a material clamping plate, a second lifting cylinder and a second lifting plate, wherein two sides of the top of the movable seat are respectively arranged at the bottom of the top plate through the slide rails in a sliding manner, the movable seat is displaced along the direction of the material conveying assembly, the first lead screw is rotatably arranged at the bottom of the top plate and positioned between the two slide rails through a rotating seat, one end of the first lead screw is driven to rotate through the first driving motor, a connecting block is arranged at the center of the top of the movable seat, the connecting block is in threaded connection with the first lead screw, so that the movable seat is driven to be displaced under the driving of the first driving motor, two sides of one end, close to the movable opening, of the movable seat are respectively provided with a support plate, the guide rod and a second lead screw are horizontally arranged between the two support plates, the second lead screw is driven to rotate by a second driving motor arranged on the outer wall of one support plate, two material clamping plates are arranged on the guide rod and the second lead screw in a distributed manner on the left side and the right side, the two material clamping plates are transversely arranged, the two material clamping plates are arranged on the guide rod in a sliding manner through linear bearings, the two material clamping plates are connected with the second lead screw in a threaded manner through threaded sleeves, and the thread directions of the threaded sleeves on the two material clamping plates are opposite, so that the two material clamping plates are driven to move in opposite directions when the second lead screw rotates; the second lifting cylinder is arranged at the bottom of the support plate, a piston rod of the second lifting cylinder upwards penetrates through the support plate and is horizontally arranged on the second lifting plate, the second lifting plate is located between the two conveying belts, the second lifting plate ascends under the pushing of the second lifting cylinder and supports the two material trays between the two material clamping plates, and after the two material clamping plates reset, the material trays are placed on the material conveying assembly under the moving of the second lifting plate.

Further still be provided with cooling device on the extension board, cooling device is including setting up in the cooling blower of expansion joint both sides, is the symmetry between two cooling blower and sets up and cool off the laser casing that carries on the material platform.

The invention has the following beneficial effects:

(1) The movable material loading frame adopts an upper and lower double-station structure and can be lifted under the driving of the lifting driving mechanism, so that different material loading tables can be lifted into different processing equipment, different procedures can be processed, the lifting type processing structure not only reduces the occupied equipment space, but also improves the welding efficiency.

(2) According to the invention, the upper welding furnace and the lower welding furnace are respectively provided with the sealing device, the sealing devices drive the movable ring to rotate through the air cylinder so as to drive the plurality of movable blades to synchronously rotate, thereby realizing the expansion or the closure, and when the plurality of movable blades are expanded, the movable blades can retract into the gap so as to avoid the interference on the lifting of the movable material carrying frame; when the plurality of movable blades are closed, the movable blades are matched with the sealing groove in the middle of the movable material carrying frame through the sealing rubber sleeve to seal the welding furnace, so that the welding furnace is ensured to be in an absolute vacuum environment in the welding process, the generation of phenomena such as gaps, cracking and the like is reduced, and the welding quality is effectively improved.

(3) According to the invention, the upper end and the lower end of the movable material loading frame are respectively provided with the sealing covers, and the two sealing covers can be respectively matched with the upper sealing groove and the lower sealing groove at the through hole at the lower end of the preheating furnace in sequence, so that the preheating furnace is sealed, the heat loss in the preheating furnace is prevented in the process of vacuum welding of the upper welding furnace and the lower welding furnace, and the effect of reducing energy consumption is achieved.

(4) According to the lifting driving mechanism, the solid guide rod and the hollow guide rod are matched with the fixed pipe, so that the two sides of the lifting material carrying rack are guided, and the hollow guide rod and the solid guide rod are fixedly connected with the inner wall of the welding furnace, so that the sealing performance of the upper welding furnace and the lower welding furnace is effectively guaranteed, and the influence of a rotating structure on the sealing performance in the furnace is avoided; the threaded connection seat is arranged in the gap between the two hollow guide pipes and is in threaded connection with one of the fixed pipes, when the lifting driving motor drives the rotating shaft and the threaded connection seat to rotate, the lifting driving of the movable material carrying frame is realized, and the position of the threaded connection seat is located in the lower end through hole of the preheating furnace, so that the movable material carrying frame is guaranteed to be in threaded connection with the fixed pipe all the time, the lifting driving mechanism can operate stably, and the practicability is high.

Drawings

Fig. 1 is a perspective view of the present invention.

Fig. 2 is a front cross-sectional view of the present invention.

Fig. 3 is a side sectional view of the present invention.

Fig. 4 is an enlarged schematic view of a portion a in fig. 3.

Fig. 5 is a schematic view of the internal structure of the present invention with the movable carrier removed.

Fig. 6 is an enlarged schematic view of B in fig. 5.

Fig. 7 is an enlarged schematic view of C in fig. 5.

Fig. 8 is a schematic structural view between the feeding mechanism and the discharging mechanism in the invention.

Fig. 9 is a schematic structural view of the upper sealing device after being folded.

FIG. 10 is a schematic view of the upper sealing device of the present invention after deployment.

The device comprises a welding box body 1, a material inlet and outlet 101, a material conveying platform 11, a material discharging platform 12, a top plate 13, a support plate 14, a movable opening 141, a preheating furnace 15, a heating device 151, a through opening 152, a convex block 153, a closed groove 154, an upper welding furnace 16, a sealing ring 161, a lower welding furnace 17, a vacuumizing device 18 and a cooling fan 19;

the conveying component 2, the conveying bracket 21, the conveying roller 22 and the conveying belt 23;

the movable material loading frame 3, the material loading platform 301, the sealing seat 31, the sealing groove 311, the positioning groove 312, the lower sealing cover 32, the upper sealing cover 33 and the fixed pipe 34;

the lifting driving mechanism 4, the solid guide rod 41, the hollow guide tube 42, the rotating shaft 43, the threaded connecting seat 431 and the lifting driving motor 44;

the upper sealing device 5, the mounting plate 51, the driving cylinder 52, the rotating sleeve 521, the movable ring 53, the connecting rod 531, the arc-shaped sliding opening 532, the guide shaft 533, the limiting block 534, the linkage rod 54, the movable blade 55, the rotating shaft 551, the sealing rubber sleeve 56 and the sealing strip 561

A lower sealing device 6;

the device comprises a feeding mechanism 7, a cylinder seat 71, a feeding cylinder 72, a material pushing block 73, a first lifting cylinder 74 and a first lifting plate 75;

the device comprises a discharging mechanism 8, a movable seat 81, a support plate 811, a connecting block 812, a sliding rail 82, a first driving motor 83, a first screw rod 84, a second driving motor 85, a second screw rod 86, a guide rod 87, a material clamping plate 88, a second lifting cylinder 89 and a second lifting plate 90;

a tray 10.

Detailed Description

In order to make the technical scheme of the invention clearer and clearer, the invention is further described with reference to the accompanying drawings, and any scheme obtained by carrying out equivalent replacement and conventional reasoning on the technical characteristics of the technical scheme of the invention falls into the protection scope of the invention. The fixing and the arrangement of the fixing and the connection are all general connection modes in the mechanical field, and the fixing and the connection can be performed by welding, bolt and nut connection and screw connection.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.

As shown in fig. 1-10, a vacuum welding apparatus for semiconductor laser fabrication includes a welding box 1, a material conveying table 11, and a material discharging table 12, wherein both sides of the welding box 1 are provided with material inlet and outlet ports 101, and both sides of the welding box 1 are located at the positions of the material inlet and outlet ports 101 and are respectively provided with the material conveying table 11 and the material discharging table 12, the material conveying table 11 and the material discharging table 12 are both provided with material conveying assemblies 2, one end of each of the two material conveying assemblies 2 extends into the welding box 1 through the material inlet and outlet ports 101, and the material conveying assemblies 2 are used for conveying a material tray 10 provided with a laser housing, and an upper cover of the laser housing and a base shell are fixed through a fixture, the material tray 10 is in a rectangular groove structure, and the top ends of the side walls of both sides of the material tray 10 are horizontally bent and provided with wing plates; a top plate 13 and a support plate 14 are horizontally arranged in the middle of the welding box body 1, the top plate 13 is positioned above the support plate 14, and the centers of the top plate 13 and the support plate 14 are both provided with a movable opening 141; a preheating furnace 15 is arranged at the upper end of the top plate 13, a heating assembly is arranged on the inner wall of the preheating furnace 15, through holes 152 of circular structures are formed in the centers of the upper end and the lower end of the preheating furnace 15, an upper welding furnace 16 is arranged at the upper end of the preheating furnace 15, the periphery of the top end of the upper welding furnace 16 is fixedly connected with the inner wall of the top end of the welding box body 1 through a support hanger, an opening corresponding to the through hole 152 in position is formed in the center of the lower end of the upper welding furnace 16, the inner diameter of the opening is equal to the inner diameter of the through hole 152, and an upper sealing device 5 is arranged between the upper welding furnace 16 and the preheating furnace 15; a lower welding furnace 17 is arranged below the support plate 14, the size and shape of the lower welding furnace 17 are equal to those of the upper welding furnace 16, the lower welding furnace 17 and the upper welding furnace 16 are oppositely arranged, an opening in the lower welding furnace 17 corresponds to the position of a movable opening 141 in the support plate 14, independent vacuumizing devices 18 are arranged in the lower welding furnace 17 and the upper welding furnace 16, heating components are also arranged on the inner walls of the lower welding furnace 17 and the upper welding furnace 16, each heating component comprises a plurality of heating pipes, and the heating pipes are respectively arranged on the inner walls of the upper welding furnace 16, the lower welding furnace 17 and the preheating furnace 15; a lower sealing device 6 is arranged between the top of the lower welding furnace 17 and the bottom of the support plate 14; the support plate 14 is provided with a cooling device, the cooling device comprises cooling fans arranged on two sides of the movable opening 141, and the two cooling fans 19 are symmetrically arranged and used for cooling the laser shell on the material loading platform 301.

A movable material loading frame 3 is longitudinally and movably arranged in the movable opening 141, the upper end and the lower end of the movable material loading frame 3 are respectively provided with a material loading platform 301, each material loading platform 301 is respectively used for loading a material tray 10, the movable material loading frame 3 is driven by a lifting driving mechanism 4 arranged in the welding box body 1 to lift, and the two material loading platforms 301 are respectively subjected to loading, preheating, vacuum welding and unloading in sequence; a sealing groove 311 is arranged between the two material loading platforms 301 on the movable material loading frame 3, and the sealing groove 311 is respectively matched with the upper sealing device 5 and the lower sealing device 6 to realize the sealing of the upper welding furnace 16 or the lower welding furnace 17; two ends of the support plate 14, which are located at the movable opening 141, are respectively provided with a feeding mechanism 7 and an unloading mechanism 8, the feeding mechanism 7 is used for feeding the tray 10 on the material conveying assembly 2 onto one of the material loading platforms 301, and the unloading mechanism 8 is used for unloading the tray 10 on one of the material loading platforms 301 onto the material conveying assembly 2 at the other end.

The movable material loading frame 3 comprises a sealing seat 31, a lower sealing cover 32, an upper sealing cover 33 and fixed pipes 34, wherein the sealing seat 31, the lower sealing cover 32 and the upper sealing cover 33 are all of a circular structure, the diameter of the sealing seat 31 is smaller than the diameters of the upper sealing cover 33 and the lower sealing cover 32, a circle of sealing groove 311 is formed in the side wall of the sealing seat 31, the cross section of the sealing groove 311 is of an isosceles trapezoid structure, two fixed pipes 34 longitudinally penetrate through the sealing seat 31, the two fixed pipes 34 are respectively located on two sides of the sealing seat 31, the two fixed pipes 34 are both of a hollow structure, internal threads are arranged on the inner wall of one fixed pipe 34, the upper sealing cover 33 and the lower sealing cover 32 are respectively arranged at the upper end and the lower end of the sealing seat 31 and are oppositely arranged, two sides of the upper sealing cover 33 and the lower sealing cover 32 are respectively vertically penetrated through the two fixed pipes 34, and the top end and the bottom end of each fixed pipe 34 are respectively flush with the top of the upper sealing cover 33 and the bottom of the lower sealing cover 32; the constant head tank 312 that is used for holding charging tray 10 is all offered to seal receptacle 31 upper surface and sealed lid 32 upper surface down to make charging tray 10 both sides pass through the pterygoid lamina and place in seal receptacle 31 and the upper surface of sealed lid 32 down, constant head tank 312 sets up and lies in between two fixed pipes 34 along the direction of defeated material subassembly 2, thereby make seal receptacle 31 upper end and sealed lid 32 upper end down form respectively and carry material platform 301, two carry material platform 301 can be in different station departments simultaneously respectively, thereby can carry out different processes and handle.

A circle of convex block 153 is arranged in the center of the inner wall of the through opening 152 at the lower end of the preheating furnace 15, the cross section of the convex block 153 is in an isosceles trapezoid structure, the upper end and the lower end of the convex block 153 form a closed groove 154 respectively, the two closed grooves 154 are symmetrically arranged, the two closed grooves 154 are matched with the upper sealing cover 33 and the lower sealing cover 32 respectively to seal the through opening 152 at the lower end of the preheating furnace 15, so that when the upper welding furnace 16 and the lower welding furnace 17 are subjected to welding process treatment respectively, the upper sealing cover 33 and the lower sealing cover 32 can be matched with the two closed grooves 154 in sequence to realize sealing, so as to prevent heat loss in the preheating furnace 15, and the inner diameter of the convex block 153 is matched with the diameter of the sealing seat 31, so that when the material carrying platform 301 at the upper end is positioned in the preheating furnace 15, the side wall of the sealing seat 31 is close to the inner wall of the convex block 153, thereby playing a certain sealing role and preventing heat loss in the preheating furnace 15.

The lifting driving mechanism 4 comprises a solid guide rod 41, a hollow guide pipe 42, a rotating shaft 43 and a lifting driving motor 44, the core guide rod is longitudinally arranged on one side in the movable opening 141, the upper end of the solid guide rod 41 is fixedly connected with the inner wall of the top end of the upper welding furnace 16, the lower end of the solid guide rod 41 is fixedly connected with the inner wall of the bottom end of the lower welding furnace 17, the solid guide rod 41 longitudinally penetrates through one of the fixed tubes 34 on the movable material loading frame 3, and the solid guide rod 41 is in sliding connection with the fixed tube 34; the number of the hollow guide pipes 42 is two, the upper end of one hollow guide pipe 42 is fixedly connected with the top end of the upper welding furnace 16, the lower end of the other hollow guide pipe 42 is fixedly connected with the inner wall of the bottom end of the lower welding furnace 17, the two hollow guide pipes 42 are positioned on the same straight line and positioned on the other side in the movable opening 141, a gap is reserved between the adjacent ends of the two hollow guide pipes 42, the gap is positioned at the position of a through opening 152 at the lower end of the preheating furnace 15, the two hollow guide pipes 42 longitudinally penetrate through the other fixed pipe 34 on the movable material loading frame 3, and the two hollow guide pipes 42 are in sliding connection with the fixed pipe 34; the rotating shaft 43 is longitudinally arranged in the two hollow guide pipes 42 in a penetrating manner, the outer walls of the upper end and the lower end of the rotating shaft 43 are respectively connected with the two hollow guide pipes 42 through at least two bearings in a rotating manner, the bottom end of the rotating shaft 43 is arranged on the inner wall of the bottom end of the lower welding furnace 17 in a rotating manner through the bearings, the upper end of the rotating shaft 43 upwards penetrates through the top end of the upper welding furnace 16 and is connected with the top end of the welding box body 1 in a rotating manner through the bearings, so that the two hollow guide pipes 42 are positioned by the rotating shaft 43, the hollow guide pipes 42 are prevented from shaking, a threaded connecting seat 431 (shown in fig. 6) is arranged at a gap position of the two hollow guide pipes 42 on the rotating shaft 43, the threaded connecting seat 431 is of a cylindrical structure, the side wall of the threaded connecting seat 431 is flush with the side wall of the hollow guide pipes 42, external threads are arranged on the side wall of the threaded connecting seat 431, and the threaded connecting seat 431 is matched with internal threads on the fixed pipe 34 through the external threads on the side wall to realize threaded connection; the lifting driving motor 44 is fixedly arranged at the top end of the welding box body 1, an output shaft of the lifting driving motor 44 vertically penetrates through the top end of the welding box body 1 and is connected with a driving shaft, the driving shaft is in transmission connection with the rotating shaft 43 through a transmission wheel matched transmission belt, the lifting driving motor 44 drives the rotating shaft 43 to rotate, and the rotating shaft 43 is in threaded connection with one of the fixed pipes 34 on the movable material carrying frame 3 through the threaded connecting seat 431 in the rotating process, so that the movable material carrying frame 3 is driven to lift on the solid guide rod 41 and the hollow guide tube 42.

The upper sealing device 5 and the lower sealing device 6 both comprise a mounting plate 51, a driving cylinder 52, a movable ring 53, a linkage rod 54 and movable blades 55, the movable ring 53 is horizontally arranged, a plurality of arc-shaped sliding openings 532 are uniformly distributed on the movable ring 53, a guide shaft 533 is longitudinally penetrated through each arc-shaped sliding opening 532, two limit blocks 534 are arranged on the guide shaft 533, the two limit blocks 534 are respectively attached to the upper end and the lower end of the movable ring 53 to limit the longitudinal movement of the movable ring 53, the lower end of the guide shaft 533 is vertically arranged on the mounting plate 51, and the periphery of the mounting plate 51 is fixedly arranged on the inner wall of the welding box body 1; the driving cylinder 52 is horizontally arranged, one end of the driving cylinder 52 is hinged to the inner wall of the welding box body 1 through a hinge seat, a rotating sleeve 521 is arranged at one end of a movable rod of the driving cylinder 52, a connecting rod 531 is rotatably arranged in the rotating sleeve 521, and the bottom end of the connecting rod 531 is vertically connected with a movable ring 53; the inner side of the movable ring 53 is provided with a plurality of movable blades 55, the plurality of movable blades 55 are distributed in a ring shape, the surfaces of one ends of the outer sides of the movable blades 55 are all rotatably provided with the linkage rods 54 through rotating shafts, the other ends of the linkage rods 54 are respectively rotatably connected with the surfaces of the movable ring 53 through rotating shafts, the surfaces of the other ends of the outer sides of the movable blades 55 are all vertically provided with rotating shafts 551, the lower ends of the rotating shafts 551 are respectively rotatably connected with the surfaces of the mounting plates 51, and therefore the driving cylinder 52 is enabled to drive the movable ring 53 to rotate and drive the plurality of movable blades 55 to be unfolded or closed simultaneously under the action of the linkage rods 54 (as shown in fig. 9-10); the inside wall of movable blade 55 is the arc structure, and all overlaps on a plurality of movable blade 55's the inside wall and be equipped with sealed gum cover 56, and the size shape of sealed gum cover 56's inside wall suits with seal groove 311 size shape, is ring structure between a plurality of sealed gum covers 56 for when a plurality of movable blade 55 closed, a plurality of sealed gum covers 56 cooperate with seal groove 311 to realize sealed, and support each other between two adjacent sealed gum covers 56 and press sealed.

A circle of sealing ring 161 is arranged at the position, located at the opening, of the bottom of the upper welding furnace 16, a circle of sealing ring 161 is also arranged at the position, located at the opening, of the top of the lower welding furnace 17, and the outer wall of the sealing ring 161 is arranged in an inclined mode; the surface of one side of each sealing rubber sleeve 56 close to the sealing ring 161 is provided with a sealing strip 561 with an arc structure, and the inner side wall of each sealing strip 561 is obliquely arranged, so that the movable blade 55 is matched with the sealing ring 161 through the sealing strip 561 to realize abutting sealing when being closed. Wherein the bottom of the sealing rubber sleeve 56 in the upper sealing device 5 is attached to the top of the preheating furnace 15, so that the sealing rubber sleeve 56 can seal the gap between the preheating furnace 15 and the upper welding furnace 16, and prevent the heat loss from the gap between the preheating furnace 15 and the upper welding furnace 16.

Defeated material subassembly 2 is including defeated material support 21, conveying motor, conveying roller 22, conveyer belt 23, defeated material support 21 quantity is two and control the distribution, and two adjacent one sides settings of defeated material support 21 conveying roller 22, conveying roller 22 carry out the drive rotation through installing conveying motor on defeated material support 21 lateral wall, and sets up on the conveying roller 22 conveying belt 23, the conveyer belt 23 on two conveying supports and carries the pterygoid lamina of charging tray 10 both sides respectively.

The feeding mechanism 7 comprises a cylinder seat 71, a feeding cylinder 72, a material pushing block 73, a first lifting cylinder 74 and a first lifting plate 75, wherein the first lifting cylinder 74 is arranged at the bottom of the support plate 14, a piston rod of the first lifting cylinder 74 upwards penetrates through the support plate 14 and horizontally arranges the first lifting plate 75, the first lifting plate 75 is positioned between the two conveyer belts 23, one end of the first lifting plate 75 is arranged close to the movable opening 141, two sides of the first lifting plate 75 are respectively provided with a limiting strip which is used for limiting and guiding the material tray 10, the first lifting plate 75 is pushed by the first lifting cylinder 74 to ascend and lift the material tray 10 on the material conveying assembly 2, and the position of the lifted material tray 10 corresponds to the position of a positioning groove 312 on one material carrying platform 301; the bottom of the cylinder seat 71 is arranged on the support plate 14 through a bracket and is located above the material conveying assembly 2, the feeding cylinder 72 is horizontally arranged on the cylinder seat 71, the piston rod of the feeding cylinder 72 is provided with the material pushing block 73, the material pushing block 73 is used for pushing the material tray 10 on the first lifting plate 75 to the material loading platform 301, and two sides of one end of the positioning groove 312 close to the material pushing block 73 are arranged in a chamfer manner, so that the material tray 10 can be conveniently embedded into the positioning groove 312.

As shown in fig. 7, the discharging mechanism 8 includes a movable seat 81, a sliding rail 82, a first driving motor 83, a first lead screw 84, a second driving motor 85, a second lead screw 86, a guiding rod 87, a material clamping plate 88, a second lifting cylinder 89, and a second lifting plate 90, two sides of the top of the movable seat 81 are respectively slidably disposed at the bottom of the top plate 13 through the sliding rail 82, and the movable seat 81 is displaced along the direction of the material conveying assembly 2, the first lead screw 84 is rotatably disposed at the bottom of the top plate 13 through a rotating seat and is located between the two sliding rails 82, one end of the first lead screw 84 is driven to rotate by the first driving motor 83, a connecting block 812 is disposed at the center of the top of the movable seat 81, the connecting block 812 is in threaded connection with the first lead screw 84, so that the movable seat 81 is driven to be displaced by the first driving motor 83, two sides of one end of the movable seat 81 close to the movable opening 141 are respectively provided with a support plate 811, the guide rod 87 and the second screw rod 86 are horizontally arranged between the two support plates 811, the second screw rod 86 is driven to rotate by a second driving motor 85 arranged on the outer wall of one support plate 811, the guide rod 87 and the second screw rod 86 are provided with two material clamping plates 88, the two material clamping plates 88 are distributed on the left side and the right side, the two material clamping plates 88 are transversely arranged, the two material clamping plates 88 are arranged on the guide rod 87 in a sliding manner through linear bearings, the two material clamping plates 88 are in threaded connection with the second screw rod 86 through threaded sleeves, the thread directions of the threaded sleeves on the two material clamping plates 88 are opposite, so that the two material clamping plates 88 are driven to move in opposite directions when the second screw rod 86 rotates, and the two material clamping plates 88 clamp wing plates on the two sides of the material tray 10 and are driven by the movable seat 81 to discharge; second lift cylinder 89 sets up in extension board 14 bottom, and the piston rod of second lift cylinder 89 upwards runs through extension board 14 and level setting second lifter plate 90, and second lifter plate 90 is located between two conveyer belts 23, and the one end of second lifter plate 90 is pressed close to the setting with expansion gap 141, and second lifter plate 90 both sides also are equipped with two spacing, and second lifter plate 90 rises and supports two charging trays 10 that press from both sides between the flitch 88 under the promotion of second lift cylinder 89, and two back that press from both sides flitch 88 and reset, charging tray 10 are driven to transfer to arranging in on defeated material subassembly 2 at second lifter plate 90.

The working principle is as follows: when the welding furnace starts to work, the movable material carrying frame 3 is in an initial state, the movable material carrying frame 3 is positioned at the lowest end, namely the material carrying platform 301 at the upper end is positioned at one end of the material conveying assembly 2, and the material carrying platform 301 at the lower end is positioned in the lower welding furnace 17; then the tray 10 moves to one end close to the movable opening 141 under the conveying of the conveyer belt 23, the first lifting cylinder 74 pushes the first lifting plate 75 to ascend and lift the tray 10 on the conveyer belt, the position of the lifted tray 10 corresponds to the position of the positioning groove 312 on the loading platform 301, and then the loading cylinder 72 pushes the tray 10 on the first lifting plate 75 through the pushing block 73 to be horizontally embedded into the positioning groove 312; then, the lifting driving motor 44 drives the rotating shaft 43 to rotate in the two hollow guide pipes 42 through the driving wheel matched with the driving belt, so that the threaded connecting base 431 is matched with the internal thread on the inner wall of the fixed pipe 34 through an external nut, the movable material loading frame 3 is driven to ascend, the material loading platform 301 at the upper end ascends into the preheating furnace 15 at the moment, the workpieces in the material tray 10 are preheated through the heating device 151, and the material loading platform 301 at the lower end is positioned at one end of the material conveying assembly 2 and is used for loading through the loading mechanism 7; after the workpiece at the upper end is preheated, the movable material loading frame 3 continues to ascend, so that the material loading platform 301 at the upper end enters the upper welding furnace 16 to be subjected to vacuum welding treatment, the upper sealing device 5 is started and is matched with the sealing groove 311 through the sealing rubber sleeve 56 on the movable blade 55, the upper welding furnace 16 is sealed, and meanwhile, the material loading platform 301 at the lower end enters the preheating furnace 15 to be subjected to heating treatment. When the welding process and the preheating process are completed, the movable material loading frame 3 descends to the lowest end, so that the material loading platform 301 at the lower end enters the lower welding furnace 17 for vacuum welding treatment, the material loading platform 301 at the upper end descends to the initial position at the moment, the workpiece on the material loading platform 301 at the upper end is cooled by the cooling fan 19 at the moment, after the cooling is completed, the movable seat 81 in the discharging mechanism 8 is driven by the first screw rod 84 to move towards the movable opening 141, meanwhile, the two material clamping plates 88 respectively move onto the material loading platform 301 and are positioned on two sides of two wing plates of the material tray 10, the two material clamping plates 88 are driven to move towards opposite directions when the second screw rod 86 rotates, the wing plates on two sides of the material tray 10 are clamped and fixed by the two material clamping plates 88, then the movable seat 81 is reset, the second lifting plate 90 is lifted under the push of the second lifting cylinder 89 and supports the bottom of the material tray 10 between the two material clamping plates 88, after the two material clamping plates 88 are reset, the material tray 10 is driven by the second lifting plate 90 to be placed on the material conveying assembly 2 again, the discharging process is completed, and the material loading, the preheating process, the vacuum welding process is performed, the vacuum welding process, and the vacuum reciprocating cooling process is performed.

The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are also included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (10)

1. A vacuum welding device for semiconductor laser preparation comprises a welding box body, a material conveying table and a material discharging table, wherein material inlet and outlet openings are formed in two sides of the welding box body, the material conveying table and the material discharging table are arranged at positions, located at the material inlet and outlet openings, of two sides of the welding box body respectively, material conveying assemblies are arranged on the material conveying table and the material discharging table respectively, one ends of the two material conveying assemblies extend into the welding box body through the material inlet and outlet openings respectively, a material tray provided with a laser shell is used for conveying the material tray, the material tray is of a rectangular groove structure, and wing plates are horizontally bent at the top ends of side walls of two sides of the material tray; the welding box is characterized in that a top plate and a support plate are horizontally arranged in the middle of the welding box body, the top plate is positioned above the support plate, and movable openings are formed in the centers of the top plate and the support plate; the upper end of the top plate is provided with a preheating furnace, the inner wall of the preheating furnace is provided with a heating assembly, the centers of the upper end and the lower end of the preheating furnace are provided with through holes with circular structures, the upper end of the preheating furnace is provided with an upper welding furnace, the top end of the upper welding furnace is fixedly connected with the inner wall of the top end of the welding box body through a support hanger, the center of the lower end of the upper welding furnace is provided with an opening corresponding to the through holes, and an upper sealing device is arranged between the upper welding furnace and the preheating furnace; a lower welding furnace is arranged below the support plate, the size and the shape of the lower welding furnace are equal to those of the upper welding furnace, the lower welding furnace and the upper welding furnace are oppositely arranged, an opening in the lower welding furnace corresponds to the position of a movable opening in the support plate, independent vacuumizing devices are arranged in the lower welding furnace and the upper welding furnace, heating assemblies are arranged on the inner walls of the lower welding furnace and the upper welding furnace, and a lower sealing device is arranged between the top of the lower welding furnace and the bottom of the support plate; the movable opening is longitudinally and movably provided with a movable material carrying frame, the upper end and the lower end of the movable material carrying frame are respectively provided with a material carrying platform, each material carrying platform is respectively used for carrying a material plate, the movable material carrying frame is driven by a lifting driving mechanism arranged in the welding box body to lift, and the two material carrying platforms are respectively subjected to loading, preheating, vacuum welding and unloading in sequence; a sealing groove is arranged between the two material loading platforms on the movable material loading frame, and the sealing groove is respectively matched with the upper sealing device and the lower sealing device to realize the sealing of the upper welding furnace or the lower welding furnace; and the two ends of the support plate, which are positioned at the movable opening, are respectively provided with a feeding mechanism and an unloading mechanism, the feeding mechanism is used for feeding a material tray on the material conveying assembly onto one of the material carrying platforms, and the unloading mechanism is used for unloading the material tray on one of the material carrying platforms onto the material conveying assembly at the other end.

2. The vacuum welding apparatus for semiconductor laser manufacturing according to claim 1, wherein the movable carrier comprises a sealing seat, a lower sealing cover, an upper sealing cover and fixed tubes, the sealing seat, the lower sealing cover and the upper sealing cover are all circular structures, a circle of the sealing groove is formed in a side wall of the sealing seat, the cross section of the sealing groove is in an isosceles trapezoid structure, two fixed tubes longitudinally penetrate through the sealing seat, the two fixed tubes are respectively located on two sides of the sealing seat, the two fixed tubes are both hollow structures, an internal thread is formed in an inner wall of one of the fixed tubes, the upper sealing cover and the lower sealing cover are respectively arranged at an upper end and a lower end of the sealing seat and are oppositely arranged, two sides of the upper sealing cover and two sides of the lower sealing cover respectively vertically penetrate through the two fixed tubes, and a top end and a bottom end of each fixed tube are respectively flush with a top of the upper sealing cover and a bottom of the lower sealing cover; the material loading platform is characterized in that positioning grooves for containing the material trays are formed in the upper surface of the sealing seat and the upper surface of the lower sealing cover, and the positioning grooves are arranged along the direction of the material conveying assembly and are located between the two fixing pipes, so that the upper end of the sealing seat and the upper end of the lower sealing cover form the material loading platform respectively.

3. The vacuum welding apparatus as claimed in claim 2, wherein a ring of the protrusion is formed at the center of the inner wall of the lower port of the preheating furnace, and the upper and lower ends of the protrusion form a sealing groove, respectively, the two sealing grooves are symmetrically disposed, and the two sealing grooves cooperate with the upper sealing cover and the lower sealing cover, respectively, to seal the lower port of the preheating furnace.

4. The vacuum welding equipment for preparing the semiconductor laser as claimed in claim 2, wherein the lifting driving mechanism comprises a solid guide rod, a hollow guide pipe, a rotating shaft and a lifting driving motor, the core guide rod is longitudinally arranged at one side in the movable opening, the upper end of the solid guide rod is fixedly connected with the inner wall of the top end of the upper welding furnace, the lower end of the solid guide rod is fixedly connected with the inner wall of the bottom end of the lower welding furnace, the solid guide rod longitudinally penetrates through one of the fixed tubes on the movable material loading frame, and the solid guide rod is slidably connected with the fixed tubes; the number of the hollow guide pipes is two, the upper end of one hollow guide pipe is fixedly connected with the top end of the upper welding furnace, the lower end of the other hollow guide pipe is fixedly connected with the inner wall of the bottom end of the lower welding furnace, the two hollow guide pipes are positioned on the same straight line and on the other side in the movable opening, a gap is reserved between the adjacent ends of the two hollow guide pipes, the gap is positioned at the position of a through opening at the lower end of the preheating furnace, the two hollow guide pipes longitudinally penetrate through the other fixed pipe on the movable material carrying frame, and the two hollow guide pipes are in sliding connection with the fixed pipes; the rotary shaft is longitudinally arranged in the two hollow guide pipes in a penetrating mode, the outer walls of the upper end and the lower end of the rotary shaft are respectively connected with the two hollow guide pipes in a rotating mode through at least two bearings, the bottom end of the rotary shaft is arranged on the inner wall of the bottom end of the lower welding furnace in a rotating mode through the bearings, the upper end of the rotary shaft upwards penetrates through the top end of the upper welding furnace and is connected with the top end of the welding box body in a rotating mode through the bearings, a threaded connecting seat is arranged at the position, located in the gap position of the two hollow guide pipes, of the rotary shaft, external threads are arranged on the side wall of the threaded connecting seat, and the threaded connecting seat is matched with the internal threads on the fixed pipe through the external threads on the side wall to achieve threaded connection; the lifting driving motor is fixedly arranged at the top end of the welding box body, an output shaft of the lifting driving motor vertically penetrates through the top end of the welding box body and is connected with a driving shaft, the driving shaft is in transmission connection with the rotating shaft through a driving wheel matched transmission belt, the rotating shaft is driven to rotate through the lifting driving motor, and the rotating shaft is in threaded connection with one of the fixed pipes on the movable material carrying frame through a threaded connecting seat in the rotating process, so that the movable material carrying frame is driven to lift on the solid guide rod and the hollow guide pipe.

5. The vacuum welding apparatus for preparing a semiconductor laser according to claim 1, wherein the upper sealing device and the lower sealing device each comprise a mounting plate, a driving cylinder, a movable ring, a linkage rod, and a movable blade, the movable ring is horizontally disposed, a plurality of arc-shaped sliding openings are uniformly distributed on the movable ring, a guide shaft longitudinally penetrates through each arc-shaped sliding opening, two limiting blocks are disposed on the guide shaft, the two limiting blocks are respectively attached to the upper end and the lower end of the movable ring, so as to limit the longitudinal movement of the movable ring, the lower end of the guide shaft is vertically disposed on the mounting plate, and the periphery of the mounting plate is fixedly disposed on the inner wall of the welding box; the driving air cylinder is horizontally arranged, one end of the driving air cylinder is hinged to the inner wall of the welding box body through a hinge seat, a rotating sleeve is arranged at one end of a movable rod of the driving air cylinder, a connecting rod is rotatably arranged in the rotating sleeve, and the bottom end of the connecting rod is vertically connected with the movable ring; the inner side of the movable ring is provided with a plurality of movable blades which are distributed in an annular shape, the surfaces of one ends of the outer sides of the movable blades are respectively provided with a linkage rod in a rotating mode through a rotating shaft, the other ends of the linkage rods are respectively connected with the surfaces of the movable rings in a rotating mode through the rotating shaft, the surfaces of the other ends of the outer sides of the movable blades are respectively and vertically provided with a rotating shaft, and the lower ends of the rotating shafts are respectively connected with the surfaces of the mounting plates in a rotating mode, so that the driving cylinder can drive the movable rings to rotate and drive the movable blades to be unfolded or closed simultaneously under the action of the linkage rods; the inside wall of movable blade is the arc structure, and all overlaps on a plurality of movable blade's the inside wall to be equipped with the packing gum cover, and the size shape and the seal groove size shape of the inside wall of packing gum cover suit, is the ring form structure between a plurality of packing gum covers for when a plurality of movable blade closed, a plurality of packing gum covers cooperate with the seal groove to realize sealed, and support each other between two adjacent packing gum covers and press sealedly.

6. The vacuum welding apparatus for semiconductor laser manufacturing according to claim 5, wherein a ring of sealing rings is provided at the bottom of the upper welding furnace at the position of the opening, and a ring of sealing rings is provided at the top of the lower welding furnace at the position of the opening, and the outer walls of the sealing rings are arranged obliquely; every one side surface that the sealed gum cover is close to the sealing ring all is equipped with the sealing strip of arc structure, the inside wall of sealing strip is the slope setting for cooperate through the sealing strip and with the sealing ring when the movable vane closes and realize supporting to press sealedly.

7. The vacuum welding apparatus for preparing a semiconductor laser as claimed in claim 1, wherein the material transporting assembly comprises two material transporting supports, a transporting motor, transporting rollers, and transporting belts, the number of the material transporting supports is two, the transporting rollers are disposed on adjacent sides of the two material transporting supports, the transporting rollers are driven to rotate by the transporting motor mounted on the side walls of the material transporting supports, and the transporting belts are disposed on the transporting rollers, and the transporting belts on the two transporting supports respectively support and transport the wing plates on both sides of the tray.

8. The vacuum welding apparatus for preparing semiconductor laser device as claimed in claim 7, wherein the feeding mechanism comprises a cylinder base, a feeding cylinder, a pusher block, a first lifting cylinder, and a first lifting plate, the first lifting cylinder is disposed at the bottom of the support plate, a piston rod of the first lifting cylinder penetrates the support plate upwards and horizontally disposes the first lifting plate, the first lifting plate is disposed between the two conveyor belts, and the first lifting plate is pushed by the first lifting cylinder to lift and lift the tray on the feeding assembly, and the position of the lifted tray corresponds to the position of the positioning groove on one of the material loading tables; the bottom of the cylinder seat is arranged on the support plate through a support and is positioned above the material conveying assembly, the feeding cylinder is horizontally arranged on the cylinder seat, and the piston rod of the feeding cylinder is provided with the material pushing block which is used for pushing the material disc on the first lifting plate to the material loading platform.

9. The vacuum welding apparatus of claim 7, wherein the unloading mechanism comprises a movable base, a slide rail, a first driving motor, a first lead screw, a second driving motor, a second lead screw, a guide rod, a material clamping plate, a second lifting cylinder and a second lifting plate, two sides of the top of the movable base are slidably disposed at the bottom of the top plate through the slide rail respectively, the movable base is displaced along the direction of the material conveying assembly, the first lead screw is rotatably disposed at the bottom of the top plate and located between the two slide rails through a rotating base, one end of the first lead screw is driven to rotate by the first driving motor, a connecting block is disposed at the center of the top of the movable base, the connecting block is in threaded connection with the first lead screw, the movable seat is driven by a first driving motor to move, two sides of one end, close to a movable opening, of the movable seat are respectively provided with a support plate, a guide rod and a second lead screw are horizontally arranged between the two support plates, the second lead screw is driven to rotate by a second driving motor arranged on the outer wall of one of the support plates, two material clamping plates are arranged on the guide rod and the second lead screw, the two material clamping plates are distributed on the left side and the right side, the two material clamping plates are transversely arranged, the two material clamping plates are arranged on the guide rod in a sliding mode, the two material clamping plates are in threaded connection with the second lead screw through threaded sleeves, the thread directions of the threaded sleeves on the two material clamping plates are opposite, and the two material clamping plates are driven to move in opposite directions when the second lead screw rotates; the second lifting cylinder is arranged at the bottom of the support plate, a piston rod of the second lifting cylinder upwards penetrates through the support plate and is horizontally arranged on the second lifting plate, the second lifting plate is located between the two conveying belts, the second lifting plate rises under the pushing of the second lifting cylinder and supports the two material discs between the two material clamping plates, and after the two material clamping plates reset, the material discs are placed on the material conveying assembly under the moving of the second lifting plate.

10. The vacuum welding apparatus for laser diode fabrication as claimed in claim 1, wherein the support plate further has a cooling device disposed thereon, the cooling device includes cooling fans disposed on both sides of the active port, and the two cooling fans are symmetrically disposed therebetween.

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