CN115648118A - Maintenance device for filter for epitaxial growth of compound semiconductor material - Google Patents
Maintenance device for filter for epitaxial growth of compound semiconductor material Download PDFInfo
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- CN115648118A CN115648118A CN202211682298.XA CN202211682298A CN115648118A CN 115648118 A CN115648118 A CN 115648118A CN 202211682298 A CN202211682298 A CN 202211682298A CN 115648118 A CN115648118 A CN 115648118A
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- 238000012423 maintenance Methods 0.000 title claims abstract description 23
- 150000001875 compounds Chemical class 0.000 title claims abstract description 19
- 239000000463 material Substances 0.000 title claims abstract description 19
- 239000004065 semiconductor Substances 0.000 title claims abstract description 19
- 238000009434 installation Methods 0.000 claims abstract description 20
- 230000007246 mechanism Effects 0.000 claims abstract description 20
- 239000000428 dust Substances 0.000 claims description 32
- 238000004140 cleaning Methods 0.000 claims description 13
- 239000012535 impurity Substances 0.000 claims description 4
- 238000007789 sealing Methods 0.000 abstract description 6
- 235000017166 Bambusa arundinacea Nutrition 0.000 abstract description 5
- 235000017491 Bambusa tulda Nutrition 0.000 abstract description 5
- 241001330002 Bambuseae Species 0.000 abstract description 5
- 235000015334 Phyllostachys viridis Nutrition 0.000 abstract description 5
- 239000011425 bamboo Substances 0.000 abstract description 5
- 230000009471 action Effects 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
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Abstract
The application discloses a maintenance device for a filter for epitaxial growth of compound semiconductor materials, which is used for assembling and disassembling filter cartridges or filter elements of filters with different installation angles, and comprises: a body; the grabbing assembly comprises clamping jaws and an angle adjusting mechanism, the clamping jaws are used for clamping the filter cartridge or the filter core, and the angle adjusting mechanism is used for adjusting the clamping angle of the clamping jaws so that the clamping jaws can clamp the filter cartridge or the filter core at different installation angles; and the moving assembly is arranged on the machine body and connected with the grabbing assembly, and the moving assembly is used for moving the grabbing assembly along different directions so as to enable the grabbing assembly to assemble and disassemble the filter cylinder or the filter core in different installation directions. The utility model provides a maintain the device, its clamping jaw angularly adjustable and can remove along the equidirectional not to can solve when manual loading and unloading strains a section of thick bamboo because of colliding with sealing washer and contact surface easily and lead to the leakproofness to reduce and the not strong problem of ordinary handling equipment suitability.
Description
Technical Field
The application belongs to the technical field of vapor phase epitaxial growth equipment, and particularly relates to a maintenance device for a filter for epitaxial growth of a compound semiconductor material.
Background
The vapor phase epitaxy (MOCVD) machine has a plurality of types of filters, and filter cartridges of different filters are installed in different ways, for example, the filter cartridges can be installed horizontally or vertically. The filter cartridge of the filter is generally heavy, and the seal ring and the contact surface are easily collided when the filter cartridge or the filter element of the filter is manually assembled and disassembled in the maintenance process, so that the sealing performance is reduced. And common handling equipment is difficult to adapt to the installation mode of the filter cartridge diversity, and different handling equipment is required to be used for different types of filters.
Therefore, the application provides a maintenance device for a filter for epitaxial growth of a compound semiconductor material, which can solve the problem that a filter cartridge of the filter is easy to collide with a sealing ring and a contact surface when the filter cartridge is manually assembled and disassembled, and can also solve the problem that common assembling and disassembling equipment is not strong in applicability.
Disclosure of Invention
The present application is directed to solve at least one of the problems of the prior art and to provide a maintenance apparatus for a filter used for epitaxial growth of a compound semiconductor material.
The embodiment of the application provides a maintenance device for a filter for epitaxial growth of compound semiconductor materials, which is used for assembling and disassembling filter cartridges or filter elements of filters with different installation angles, and comprises:
a body;
the grabbing assembly comprises clamping jaws and an angle adjusting mechanism, the clamping jaws are used for clamping the filter cartridge or the filter core, and the angle adjusting mechanism is used for adjusting the clamping angle of the clamping jaws so that the clamping jaws can clamp the filter cartridge or the filter core at different installation angles;
the moving assembly is arranged on the machine body and connected with the grabbing assembly, and the moving assembly is used for moving the grabbing assembly along different directions so as to enable the grabbing assembly to be capable of assembling and disassembling the filter cartridge or the filter element in different installation directions.
Optionally, the moving assembly can specifically move along a first direction the grabbing assembly and move along a second direction the grabbing assembly, and the first direction and the second direction are arranged at an included angle.
Optionally, one of the first direction and the second direction is a vertical direction, and the other of the first direction and the second direction is a horizontal direction.
Optionally, the moving assembly comprises a first moving assembly and a second moving assembly;
the first moving assembly is connected with the grabbing assembly and used for moving the grabbing assembly along the first direction;
the second moving assembly is arranged on the machine body, connected with the first moving assembly and used for moving the first moving assembly and the grabbing assembly along the second direction.
Optionally, the first movement assembly comprises a telescopic arm;
the telescopic boom is provided with a first end and a second end, the first end is connected with the second moving assembly, the second end is connected with the grabbing assembly, and when the telescopic boom is telescopic, the grabbing assembly moves along the first direction.
Optionally, the second movement assembly comprises a track;
the track is arranged on the machine body, the first moving assembly is arranged on the track and can move along the track, and when the first moving assembly moves along the track, the grabbing assembly moves along the second direction.
Optionally, the clamping jaw comprises a plurality of clamping fingers which are folded to different degrees to realize the grabbing of the filter cartridge or the filter element.
Optionally, the angle adjustment mechanism comprises a hinged connection and a drive unit;
the moving assembly is hinged with the clamping jaw through the hinged connecting piece;
the driving unit is connected between the clamping jaw and the moving assembly and used for driving the clamping jaw to rotate around the hinged connecting piece so as to adjust the clamping angle of the clamping jaw.
Optionally, the maintenance device further comprises a cleaning assembly comprising a vacuum cleaner and a folding bracket;
the dust collector is provided with a dust collection pipeline;
the folding bracket is used for supporting the dust suction pipeline and has a folding state for retracting the dust suction pipeline and an unfolding state for extending the dust suction pipeline;
when the folding bracket is in an unfolded state, the dust suction pipeline extends into the filter cylinder to perform dust suction operation.
Optionally, be equipped with on the fuselage and hold the chamber, clean subassembly is located hold the intracavity, work as when folding support is in fold condition, dust absorption pipeline shrink in hold the intracavity, work as when folding support is in the extended condition, dust absorption pipeline follows hold the intracavity and stretch out.
Optionally, the cleaning assembly further comprises a vibrating mechanism; the vibration mechanism is arranged on the folding support and is used for vibrating to enable impurities in the filter cylinder to fall off and disperse.
The technical scheme of the application has the following beneficial technical effects:
according to the maintenance device for the filter for epitaxial growth of the compound semiconductor material, after the clamping jaws clamp the filter cartridge or the filter element of the filter, the clamping jaws are moved through the moving assembly, the filter cartridge or the filter element clamped by the clamping jaws can be assembled and disassembled, and compared with the traditional manual assembling and disassembling mode, the maintenance device can solve the problem that sealing performance is reduced due to the fact that a sealing ring and a contact surface are easily collided when the filter cartridge is assembled and disassembled manually. In addition, the clamping angle of the clamping jaw is adjustable and the clamping jaw can move along different directions, so that the maintenance device can also realize the assembly and disassembly of filter cartridges or filter elements with different installation angles, and the problem that common assembly and disassembly equipment is not strong in applicability can be solved.
Drawings
FIG. 1 is a schematic diagram of a maintenance apparatus for a filter for epitaxial growth of compound semiconductor material in an exemplary embodiment of the present application;
FIG. 2 is a schematic view of a jaw in an exemplary embodiment of the present application in a horizontal position;
FIG. 3 is a schematic view of a jaw in an exemplary embodiment of the present application in an upright position;
FIG. 4 is a schematic illustration of a telescoping arm after retraction in an exemplary embodiment of the application;
in the figure, 10, the fuselage; 11. a vehicle body; 12. a wheel; 13. an accommodating chamber; 14. a handle; 21. clamping fingers; 31. a hinged connection; 40. a first moving assembly; 41. a first arm segment; 42. a second arm segment; 43. a support beam; 50. a second moving assembly; 60. a vacuum cleaner; 61. a dust collection duct; 70. folding the bracket; 71. a first bar member; 72. a second bar member; 73. a rotating shaft; 80. a vibration mechanism; 90. scale lines; 100. a balancing weight; 110. a door panel is provided.
Detailed Description
Embodiments of the present application will be described in further detail below with reference to the drawings and examples. The following detailed description of the embodiments and the accompanying drawings are provided to illustrate the principles of the application, but are not intended to limit the scope of the application, i.e., the application is not limited to the described embodiments.
In the description of the present application, it is to be noted that, unless otherwise specified, "a plurality" means two or more; the terms "upper," "lower," "left," "right," "inner," "outer," and the like, indicate an orientation or positional relationship that is merely for convenience in describing the application and to simplify the description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the application. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. "vertical" is not strictly vertical but is within the tolerance of the error. "parallel" is not strictly parallel but within the tolerance of the error.
In the description of the present application, it is also to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; may be directly connected or indirectly connected through an intermediate. The specific meaning of the above terms in the present application can be understood as appropriate by one of ordinary skill in the art.
For a better understanding of the present application, the following description is made in conjunction with the embodiments of the present application of fig. 1 to 4.
As shown in fig. 1 to 4, the present application provides a maintenance device for a filter grown epitaxially from a compound semiconductor material, which is used for assembling and disassembling a filter cartridge or a filter core of the filter with different installation angles, and comprises a body 10, a grabbing component and a moving component. The grabbing component comprises clamping jaws and an angle adjusting mechanism, the clamping jaws are used for clamping a filter cartridge or a filter core, and the angle adjusting mechanism is used for adjusting the clamping angles of the clamping jaws so that the clamping jaws can clamp filter cartridges with different installation angles. And the moving assembly is arranged on the machine body 10 and connected with the grabbing assembly, and the moving assembly is used for moving the grabbing assembly along different directions so as to assemble and disassemble filter cartridges or filter cores in different installation directions.
In this embodiment, the cartridge is cylindrical and the filter element is axially inserted into the cartridge. Wherein, the installation angle is the angle of the axis of the filter cartridge or the filter element when the filter cartridge or the filter element is installed. For example, when the filter cartridge or the filter element is installed vertically, the angle of the axis is 90 ° with respect to the horizontal plane, and when the filter cartridge or the filter element is installed horizontally, the angle of the axis is 0 °.
In this embodiment, the moving assembly needs to move in the same direction as the installation angle of the filter cartridge or the filter element to achieve the installation and removal of the filter cartridge or the filter element. For example, when the filter cartridge or the filter element is vertically installed, the moving assembly can move the grabbing assembly in the vertical direction to assemble and disassemble the filter cartridge or the filter element, and when the filter cartridge or the filter element is horizontally installed, the moving assembly can move the grabbing assembly in the horizontal direction to assemble and disassemble the filter cartridge or the filter element.
In some embodiments, the fuselage 10 includes a cart with the moving assembly disposed thereon.
That is, the body 10 may move. As shown in fig. 2, the vehicle includes a vehicle body 11 and wheels 12, and the wheels 12 are located at the bottom of the vehicle body 11 for moving the vehicle body 11. Optionally, a handle 14 is provided on the vehicle body 11, and a worker can apply pushing or pulling force to move the vehicle through the handle 14.
In some embodiments, the moving assembly is capable of moving the grasping assembly in a first direction and moving the grasping assembly in a second direction, the first direction and the second direction being disposed at an angle. Optionally, one of the first direction and the second direction is a vertical direction and the other of the first direction and the second direction is a horizontal direction.
That is, the grasping assembly can load and unload the filter cartridge at least in a vertical direction or a horizontal direction under the action of the moving assembly. For example, when the clamping jaws clamp a vertically mounted filter cartridge, the moving assembly moves the clamping assembly in the vertical direction, and the filter cartridge filter can be taken out; when the clamping jaws clamp the filter element which is horizontally arranged, the moving assembly moves the clamping jaws along the horizontal direction, and the filter element can be taken out of the filter cylinder.
It should be noted that, in the case of meeting the installation requirement, the first direction and the second direction may also be directions other than the vertical direction and the horizontal direction, and the embodiment of the present application is not particularly limited.
In some embodiments, the moving assembly includes a first moving assembly 40 and a second moving assembly 50; the first moving assembly 40 is connected to the grasping assembly for moving the grasping assembly in a first direction; the second moving assembly 50 is disposed on the body 10 and connected to the first moving assembly 40 for moving the first moving assembly 40 and the grasping assembly in the second direction.
Illustratively, the first movement assembly 40 includes a telescoping arm; the telescopic boom has a first end connected to the second moving assembly 50 and a second end connected to the grasping assembly, and when the telescopic boom is telescopic, the grasping assembly moves in a first direction. As shown in fig. 2 and 4, the telescopic arm includes a first arm section 41 and a second arm section 42 connected in the axial direction, the second arm section 42 can be retracted into the first arm section 41 or exposed out of the first arm section 41, and the grabbing component can be moved in the first direction when the second arm section 42 is retracted into the first arm section 41 or exposed out of the first arm section 41. Optionally, the telescopic arm is horizontally arranged.
Illustratively, the second movement assembly 50 includes a track; the track is arranged on the body 10, the first moving assembly 40 is arranged on the track and can move along the track, and when the first moving assembly 40 moves along the track, the grabbing assembly moves along the second direction. Wherein, the track can be provided with scale marks 90, and the position of the first moving assembly 40 observed by the staff is assisted by the scale marks 90. In other exemplary embodiments, the second moving assembly 50 may be electrically controlled, for example, the second moving assembly 50 is a linear module, and the first moving assembly 40 is disposed on a slide block of the linear module and moves with the slide block. Optionally, the track is arranged vertically.
It should be noted that, under the condition that the moving requirement is met, the moving assembly may also adopt other design manners, and the embodiment of the present application is not specifically limited. For example, the moving assembly may be a two-axis robot.
In some embodiments, the clamping jaw includes a plurality of clamping fingers that are configured to be closed by different degrees to provide gripping of the filter cartridge or filter element.
Illustratively, the number of the clamping fingers 21 is two, the two clamping fingers 21 are oppositely arranged, and the two clamping fingers 21 are folded to clamp the filter cartridge or the filter element. Wherein the clamping fingers 21 are single-finger clamping jaws, as shown in fig. 1, each single-finger clamping jaw is arranged on one telescopic arm and can rotate relative to the corresponding telescopic arm to realize folding. In other exemplary embodiments, the two clamping fingers 21 may also be two clamping fingers 21 of a pneumatic clamping finger, and when the cylinder of the pneumatic clamping finger is operated, the two clamping fingers 21 are displaced to realize a closing action. Preferably, the clamping surface of the clamping fingers 21 is a cambered surface matched with the side surface of the filter cartridge, so that the clamping action is more reliable.
In some embodiments, the angle adjustment mechanism includes an articulation link 31 and a drive unit; the moving component is hinged with the clamping jaw through a hinged connecting piece 31; the drive unit is connected between the jaws and the moving assembly for driving the jaws to rotate about the hinged connection 31 for adjusting the gripping angle of the jaws.
Illustratively, the hinge connection 31 comprises a hinge shaft or a hinge ball. For example, the articulated connection 31 comprises a hinge ball which is arranged at the end of the clamping finger 21 which is connected to the telescopic arm, by means of which hinge ball the clamping finger 21 is articulated with the telescopic arm, and by means of which hinge ball the clamping finger 21 can be rotated relative to the telescopic arm.
Illustratively, the driving unit comprises an electric push rod, one end of the electric push rod is hinged with the telescopic arm, the other end of the electric push rod is hinged with the clamping jaw, and when the electric push rod is telescopic, the clamping jaw is driven to rotate around the hinged connecting piece 31. In other exemplary embodiments, the drive unit may also employ a pneumatic ram.
It should be noted that the angle adjustment mechanism may also adopt other design manners, and the embodiment of the present application is not specifically limited.
In some embodiments, the maintenance device further comprises a cleaning assembly comprising a vacuum cleaner 60 and a folding bracket 70; the cleaner 60 has a cleaning duct 61; the folding bracket 70 is for supporting the dust suction duct 61, and has a folded state in which the dust suction duct 61 is retracted and an unfolded state in which the dust suction duct 61 is extended; when the folding bracket 70 is in the unfolded state, the dust suction duct 61 is inserted into the filter cartridge to perform a dust suction operation.
In this embodiment, the cleaning assembly can replace the manual work to clear up straining a section of thick bamboo, can save the manual work on the one hand, and on the other hand can avoid the influence of dust to workman's health.
Illustratively, the folding bracket 70 includes a rotating shaft 73, a first bar 71, a second bar 72, and a telescopic bar. The rotating shaft 73 is vertically arranged, the first rod piece 71 and the second rod piece 72 are horizontally arranged, the rotating shaft 73 is arranged on the machine body 10 and can rotate circumferentially relative to the machine body 10, the first end of the first rod piece 71 is connected with the side face of the rotating shaft 73, the second end of the first rod piece 71 is hinged to the second rod piece 72, the first end of the telescopic rod is hinged to the first rod piece 71, and the second end of the telescopic rod is hinged to the second rod piece 72. The first rod 71 is parallel to the extending side (the side of the body 10 facing the filter), and when the included angle between the first rod 71 and the second rod 72 is smaller than 90 °, the folding bracket 70 is in a folding state, after the rotating shaft rotates 90 ° clockwise and the telescopic rod is extended, the second end of the first rod 71 faces the extending side, and the included angle between the first rod 71 and the second rod 72 is 180 °, that is, the dust suction pipe 61 can be extended into the horizontally arranged filter cartridge for dust suction operation.
That is, the folding bracket 70 can be switched between the folded state and the unfolded state by rotating the rotating shaft 73 and extending and contracting the telescopic bar.
It should be noted that the folding bracket 70 may also adopt other design manners, and the embodiment of the present invention is not limited in particular.
In some embodiments, the main body 10 is provided with a receiving cavity 13, the cleaning assembly is located in the receiving cavity 13, the dust suction pipe 61 is retracted in the receiving cavity 13 when the folding bracket 70 is in the folding state, and the dust suction pipe 61 is extended out of the receiving cavity 13 when the folding bracket 70 is in the extending state.
Illustratively, the receiving cavity 13 is located on a side of the body 10 where the moving assembly is located. In order to balance the body 10, a weight 100 is provided inside the body 10.
In some embodiments, the body 10 is provided with a viewing window for viewing the operation of the cleaning assembly.
In some embodiments, a door panel 110 is further disposed on a side of the body 10, and the door panel 110 has a first state of opening and exposing the accommodating chamber 13 and a second state of closing and covering the accommodating chamber 13. The door panel 110 covers the receiving chamber 13 before the dust suction operation is performed or after the dust suction operation is completed, and foreign substances can be prevented from entering the receiving chamber 13.
In this embodiment, the door panel 110 can protect the cleaning assembly when the cleaning assembly is not used, and simultaneously prevent dust from entering the accommodating cavity 13 and depositing on the surface of the folding bracket 70, which affects the reliability of the folding bracket 70.
It should be noted that the door panel 110 may be opened before the folding bracket 70 is operated, or may be linked with the folding bracket 70 and opened while the folding bracket 70 is operated, and the embodiment of the present invention is not particularly limited.
In some embodiments, the cleaning assembly further comprises a vibration mechanism 80, and the vibration mechanism 80 is disposed on the folding bracket 70 and is used for vibrating to break off and disperse impurities in the filter cartridge.
Illustratively, the vibration mechanism 80 includes a vibrator disposed at the second end of the second rod 72, and when the vibrator is powered on, the vibrator generates vibration to drop and disperse the impurities accumulated in the filter cartridge, thereby increasing the dust collection efficiency and improving the dust collection quality.
The method of disassembling the filter cartridge or core of the above-described maintenance device will be described in detail.
Filter cartridge for vertical installation
1. The body 10 is moved to be located at one side of the filter.
2. The clamping angle of the clamping jaw is adjusted to be in a horizontal state.
3. The telescoping arms are moved upwardly along the rails to adjust the height of the jaws and are extended to bring the jaws closer to the filter cartridge.
4. The fingers 21 of the jaws are closed to grip the upper half of the cartridge (which is joined to the lower half of the cartridge to form the cartridge).
5. The telescoping arm continues to move upward to remove the upper half of the filter cartridge from the filter.
6. The filter cartridge is replaced and the filter cartridge is cleaned.
(II) aiming at filter cartridge installed horizontally
1. The body 10 is moved to be located at one side of the filter.
2. The clamping angle of the clamping jaw is adjusted to enable the clamping jaw to be in a vertical state.
3. The telescoping arm is moved on the track to adjust the height of the jaws and is extended to bring the jaws closer to the filter cartridge.
4. The fingers 21 of the jaws are closed to grip the filter element in the cartridge.
5. And (4) contracting the telescopic arm to take the filter element out of the filter cartridge.
6. The filter cartridge is cleaned using the cleaning assembly.
Above-mentioned maintain the device, its clamping jaw presss from both sides after getting a section of thick bamboo or the filter core of filter, removes the clamping jaw through removing the subassembly, can be in order to realize the loading and unloading of a section of thick bamboo that it got, for traditional manual handling's mode, this maintains the device and can solve when manual handling strains a section of thick bamboo because of colliding with the problem that sealing washer and contact surface lead to the leakproofness to reduce easily. In addition, the clamping angle of the clamping jaw is adjustable and the clamping jaw can move along different directions, so that the maintenance device can also realize the assembly and disassembly of filter cartridges or filter elements with different installation angles, and the problem that common assembly and disassembly equipment is not strong in applicability can be solved.
While the present embodiments have been described with reference to the accompanying drawings, it is to be understood that the present embodiments are not limited to those precise embodiments, which are intended to be illustrative rather than restrictive, and that various changes and modifications may be effected therein by one skilled in the art without departing from the scope of the appended claims.
Claims (10)
1. A maintenance device for a filter for epitaxial growth of compound semiconductor materials, which is used for loading and unloading a filter cartridge or a filter element of the filter with different installation angles, is characterized by comprising:
a body;
the grabbing assembly comprises clamping jaws and an angle adjusting mechanism, the clamping jaws are used for clamping the filter cartridge or the filter core, and the angle adjusting mechanism is used for adjusting the clamping angle of the clamping jaws so that the clamping jaws can clamp the filter cartridge or the filter core at different installation angles;
the moving assembly is arranged on the machine body and connected with the grabbing assembly, and the moving assembly is used for moving the grabbing assembly along different directions so as to enable the grabbing assembly to be capable of assembling and disassembling the filter cartridge or the filter element in different installation directions.
2. The apparatus of claim 1, wherein the movement assembly is capable of moving the gripper assembly in a first direction and in a second direction, the first direction and the second direction being disposed at an angle.
3. The maintenance device of a filter for epitaxial growth of compound semiconductor material according to claim 2, characterized in that one of said first direction and said second direction is a vertical direction and the other of said first direction and said second direction is a horizontal direction.
4. The maintenance device of a filter for epitaxial growth of compound semiconductor materials according to claim 2, characterized in that said moving assembly comprises a first moving assembly and a second moving assembly;
the first moving assembly is connected with the grabbing assembly and used for moving the grabbing assembly along the first direction;
the second moving assembly is arranged on the machine body, connected with the first moving assembly and used for moving the first moving assembly and the grabbing assembly along the second direction.
5. The apparatus for maintaining a filter for epitaxial growth of compound semiconductor materials according to claim 4, characterized in that said first moving assembly comprises a telescopic arm;
the telescopic arm is provided with a first end and a second end, the first end is connected with the second moving assembly, and the second end is connected with the grabbing assembly;
when the telescopic arm stretches, the grabbing component moves along the first direction.
6. The apparatus for maintaining a filter for epitaxial growth of compound semiconductor materials according to claim 4, characterized in that said second moving assembly comprises a rail;
the track is arranged on the machine body, and the first moving assembly is arranged on the track and can move along the track;
when the first moving assembly moves along the track, the grabbing assembly moves along the second direction.
7. The apparatus for maintaining a filter for epitaxial growth of compound semiconductor material according to claim 1, characterized in that said clamping jaws comprise a plurality of clamping fingers, which by different closure degrees enable gripping of said filter cartridge or said filter element.
8. The maintenance device of a filter for epitaxial growth of compound semiconductor material according to claim 1, wherein said angle adjustment mechanism comprises a hinge connection and a driving unit;
the moving assembly is hinged with the clamping jaw through the hinged connecting piece;
the driving unit is connected between the clamping jaw and the moving assembly and used for driving the clamping jaw to rotate around the hinged connecting piece so as to adjust the clamping angle of the clamping jaw.
9. The maintenance device of a filter for epitaxial growth of compound semiconductor material according to claim 1, characterized in that it further comprises a cleaning assembly comprising a vacuum cleaner and a folding bracket;
the dust collector is provided with a dust collection pipeline;
the folding bracket is used for supporting the dust suction pipeline and has a folding state for retracting the dust suction pipeline and an unfolding state for extending the dust suction pipeline;
when the folding bracket is in an unfolded state, the dust suction pipeline extends into the filter cylinder to perform dust suction operation.
10. The maintenance device of a filter for epitaxial growth of compound semiconductor material according to claim 9, characterized in that said cleaning assembly further comprises a vibrating mechanism;
the vibration mechanism is arranged on the folding bracket and is used for vibrating to make impurities in the filter cylinder fall off and disperse.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211682298.XA CN115648118A (en) | 2022-12-27 | 2022-12-27 | Maintenance device for filter for epitaxial growth of compound semiconductor material |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211682298.XA CN115648118A (en) | 2022-12-27 | 2022-12-27 | Maintenance device for filter for epitaxial growth of compound semiconductor material |
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| CN115648118A true CN115648118A (en) | 2023-01-31 |
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| CN202211682298.XA Pending CN115648118A (en) | 2022-12-27 | 2022-12-27 | Maintenance device for filter for epitaxial growth of compound semiconductor material |
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Application publication date: 20230131 |
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