CN115435951B - Fiber bragg grating six-dimensional force sensor and working method thereof - Google Patents
Fiber bragg grating six-dimensional force sensor and working method thereof Download PDFInfo
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- 239000000835 fiber Substances 0.000 title claims abstract description 187
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
- G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
- G01L1/246—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre using integrated gratings, e.g. Bragg gratings
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Abstract
The invention belongs to the technical field of sensors and provides a fiber bragg grating six-dimensional force sensor and a working method thereof, wherein a plurality of accommodating cavities are formed in the inner wall of a circular elastic body in a first elastic body, a first flat beam is fixed in each accommodating cavity, a second flat beam is vertically fixed on each first flat beam, the plane of each first flat beam is vertical to the plane of each second flat beam, one end of each second flat Liang Yuanli first flat beam is commonly connected to a first connecting piece, and the moment elastic body is designed to be a structure consisting of a cross orthogonal vertical flat beam and a horizontal flat beam; meanwhile, the second elastic body comprises a plurality of third flat beams which are vertically connected with the annular elastic body through the first connecting piece, one end of the third flat Liang Yuanli first connecting piece is vertically connected with a plurality of fourth flat beams, and the force elastic body is designed to be a structure formed by longitudinally and orthogonally two double-layer flat beams; the sensing strength of force and moment is ensured, and the design of the force elastomer is simplified.
Description
Technical Field
The invention belongs to the technical field of sensors, and particularly relates to a fiber bragg grating six-dimensional force sensor and a working method thereof.
Background
Force sensing and moment sensing are of vital importance to the smart operation and control field of intelligent robots. The six-dimensional force sensor with the force sensing and moment sensing functions gives reliable data information for robot position control, and promotes the rapid development of robots from control theory to control application.
The inventor finds that, aiming at the problems of susceptibility to electromagnetic interference, larger size, serious inter-dimensional coupling and the like of the six-dimensional force sensor, although six-dimensional sensors with good symmetry, self-mechanical decoupling and temperature self-compensation are designed in the prior art, in the prior six-dimensional force sensor, the force transmission in a moment elastic part and a force elastic part is fast, the design of a rectangular beam and the like is unreasonable, the moment effect on the force and the force is influenced, and the structural design of the force elastic part in the prior six-dimensional force sensor is complex, so that the design and popularization of the six-dimensional force sensor are not facilitated.
Disclosure of Invention
In order to solve the problems, the invention provides a fiber bragg grating six-dimensional force sensor and a working method thereof, wherein the force sensor has the characteristics of good symmetry, self mechanical decoupling, temperature self compensation, high sensitivity and overload protection, a moment elastomer is designed into a structure consisting of a cross orthogonal vertical flat beam and a horizontal flat beam, a force elastomer is designed into a structure formed by longitudinally and orthogonally forming two double-layer flat beams, the perceived strength of force and moment is ensured, and the design of the force elastomer is simplified.
In order to achieve the above object, in a first aspect, the present invention provides a fiber bragg grating six-dimensional force sensor, which adopts the following technical scheme:
a fiber grating six-dimensional force sensor comprises a first elastic body and a second elastic body;
The first elastic body comprises a circular elastic body, a plurality of accommodating cavities are formed in the inner wall of the circular elastic body, and a first flat beam is fixed in each accommodating cavity; a second flat beam is vertically fixed on each first flat beam, and the plane of the first flat beam is mutually perpendicular to the plane of the second flat beam; one end of the first flat beam is commonly connected to the first connecting piece through all second flat Liang Yuanli;
The second elastic body comprises a plurality of third flat beams which are vertically connected with the annular elastic body through the first connecting piece, and one end of the third flat Liang Yuanli is vertically connected with a plurality of fourth flat beams.
Further, the accommodating cavity is a rectangular groove, and two ends of the first flat beam are respectively fixed on inner walls of two ends of the rectangular groove; the four accommodating cavities are uniformly formed in the inner wall of the annular elastic body.
Further, the plane of the first flat beam is parallel to or coincides with the plane of the annular elastic body.
Further, a connecting clamping groove is formed in one end, connected with the first flat beam, of the second flat beam, the depth of the connecting clamping groove is equal to the width of the first flat beam, and the middle position of the first flat beam is inserted into the connecting clamping groove to be fixedly connected with the second flat beam.
Further, two third flat beams are arranged in parallel, one end of each third flat beam is vertically fixed on the second connecting piece, and the other end of each third flat beam is vertically fixed on the third connecting piece; the four flat beams are two, the two four flat beams are arranged in parallel, one ends of the two four flat beams are vertically fixed on one side, far away from the third flat beam, of the third connecting piece, and the other ends of the two four flat beams are vertically fixed on the fourth connecting piece.
Further, the second connecting piece is connected with the first connecting piece through a buffer body.
Further, the number of the second flat beams is 4, and the second flat beams are uniformly distributed in the circumferential direction of the first connecting piece; two third flat beams are parallel to two second flat beams which are symmetrically arranged, and two fourth flat beams are parallel to the other two second flat beams which are symmetrically arranged; the second flat beams are vertically fixed at the middle positions of the first flat beams, and each first flat beam is divided into two symmetrical parts.
Further, the two fourth flat beams are respectively provided with a first fiber Bragg grating and an eleventh fiber Bragg grating; the two third flat beams are respectively provided with a second fiber Bragg grating and a tenth fiber Bragg grating; a third fiber Bragg grating is arranged on one of the second flat beams; a fourth fiber Bragg grating is arranged on the first flat beam connected with the second flat beam provided with the third fiber Bragg grating; a fifth fiber bragg grating is arranged on the first flat beam adjacent to the first flat beam provided with the fourth fiber bragg grating; a sixth fiber Bragg grating is arranged at one end of the first flat beam symmetrical to the first flat beam provided with the fourth fiber Bragg grating, and the sixth fiber Bragg grating and the fourth fiber Bragg grating are symmetrically arranged; a seventh fiber bragg grating is arranged on the second flat beam symmetrical to the second flat beam provided with the third fiber bragg grating, and the seventh fiber bragg grating and the third fiber bragg grating are symmetrically arranged; an eighth fiber bragg grating is arranged at the other end of the first flat beam symmetrical to the first flat beam provided with the fourth fiber bragg grating; a ninth fiber bragg grating is arranged on the first flat beam symmetrical to the first flat beam provided with the fifth fiber bragg grating, and the ninth fiber bragg grating is symmetrical to the fifth fiber bragg grating;
The first fiber Bragg grating, the second fiber Bragg grating, the third fiber Bragg grating, the fourth fiber Bragg grating, the fifth fiber Bragg grating, the sixth fiber Bragg grating, the seventh fiber Bragg grating, the eighth fiber Bragg grating, the ninth fiber Bragg grating, the tenth fiber Bragg grating and the eleventh fiber Bragg grating are connected in series through optical fibers.
In order to achieve the above purpose, in a second aspect, the present invention further provides a working method of a fiber bragg grating six-dimensional force sensor, which adopts the following technical scheme:
A fiber grating six-dimensional force sensor working method, which adopts the fiber grating six-dimensional force sensor as described in the first aspect, comprising:
Measuring moment in Mx, my and Mz directions and measuring force in Fz directions by using a first elastic body comprising a circular ring-shaped elastic body, a first flat beam and a second flat beam; the measurement of forces in both the Fx and Fy directions is performed with a second elastomer comprising a third flat beam and a fourth flat beam.
Further, the third fiber Bragg grating and the seventh fiber Bragg grating are a group and are used for measuring the moment Mz; the fourth fiber Bragg grating and the sixth fiber Bragg grating are a group and are used for measuring the moment Mx; the fifth fiber Bragg grating and the ninth fiber Bragg grating are a group and are used for measuring the moment My; the fourth fiber Bragg grating and the eighth fiber Bragg grating are a group and are used for measuring force Fz; the second fiber Bragg grating and the tenth fiber Bragg grating are a group and are used for measuring force Fy; the first fiber Bragg grating and the eleventh fiber Bragg grating are in a group and are used for measuring force Fx;
Under the action of force and moment, the flat beam generates strain, the fiber Bragg grating on the flat beam generates the same strain, and the strain enables the center wavelength of the fiber Bragg grating to shift so as to realize the measurement of the force and moment; the wavelength shift of each group of fiber Bragg gratings is used for measuring force and moment after differential calculation.
Compared with the prior art, the invention has the beneficial effects that:
1. The six-dimensional force sensor has the advantages of good symmetry, self-contained mechanical decoupling, temperature self-compensation, high sensitivity and overload protection; a plurality of accommodating cavities are formed in the inner wall of the annular elastic body in the first elastic body, a first flat beam is fixed in each accommodating cavity, a second flat beam is vertically fixed on each first flat beam, the plane where the first flat beam is located is mutually perpendicular to the plane where the second flat beam is located, one ends of all the second flat Liang Yuanli first flat beams are commonly connected to the first connecting piece, and therefore the moment elastic body is designed to be a structure consisting of a cross orthogonal vertical flat beam and a horizontal flat beam; meanwhile, the second elastic body comprises a plurality of third flat beams which are vertically connected with the annular elastic body through the first connecting piece, one end of the third flat Liang Yuanli first connecting piece is vertically connected with a plurality of fourth flat beams, and the force elastic body is designed to be a structure formed by longitudinally and orthogonally two double-layer flat beams; the moment elastic body is designed into a structure consisting of a cross orthogonal vertical flat beam and a horizontal flat beam, and the force elastic body is designed into a structure formed by two double-layer flat beams in a longitudinal orthogonal manner, so that the perceived strength of force and moment is ensured, and the design of the force elastic body is simplified;
2. the invention adopts the combined beam structure of the optimized Malta cross beam and the T-shaped beam and the orthogonal double-layer beam structure to realize the measurement of force and moment, and has good structural symmetry and certain mechanical self-decoupling function;
3. According to the invention, the force and the moment are separately measured, the coupling effect between the force and the moment is reduced, meanwhile, the mode of wavelength deviation differential calculation is adopted, the inter-dimensional interference is eliminated, the temperature self-compensation is realized without an additional fiber Bragg grating, and the interference caused by temperature change on the wavelength of the fiber Bragg grating is solved;
4. compared with the traditional six-dimensional force sensor, the sensor sensitive element adopts the Bragg fiber grating sensor which is connected in series, the sensor sensitive element has high sensitivity, electromagnetic interference resistance and good strain performance, and the sensing of structural strain can be finished by using one single-mode fiber, so that the circuit arrangement is simple.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments and are incorporated in and constitute a part of this specification, illustrate and explain the embodiments and together with the description serve to explain the embodiments.
FIG. 1 is a schematic structural diagram of embodiment 1 of the present invention;
FIG. 2 is a side sectional view of embodiment 1 of the present invention;
FIG. 3 is a schematic diagram of an optical fiber in series according to embodiment 1 of the present invention;
Wherein, 1, a first elastomer; 11. a circular ring-shaped elastic body; 12. a receiving chamber; 13. a first flat beam; 14. a second flat beam; 15. a first connector; 16. a connecting clamping groove; 2. a second elastomer; 21. a third flat beam; 22. a fourth flat beam; 23. a second connector; 24. a third connecting member; 25. a fourth connecting member; 3. and a buffer body.
Detailed Description
The invention will be further described with reference to the drawings and examples.
It should be noted that the following detailed description is exemplary and is intended to provide further explanation of the application. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.
Example 1:
As shown in fig. 1, the present embodiment provides a fiber grating six-dimensional force sensor, which includes a first elastic body 1, a circular ring-shaped elastic body 11, a receiving cavity 12, a first flat beam 13, a second flat beam 14, a first connecting piece 15, a connecting slot 16, a second elastic body 2, a third flat beam 21, a fourth flat beam 22, a second connecting piece 23, a third connecting piece 24, a fourth connecting piece 25 and a buffer body 3;
The first elastic body 1 comprises a circular elastic body 11, a plurality of accommodating cavities 12 are formed in the inner wall of the circular elastic body 11, and a first flat beam 13 is fixed in each accommodating cavity 12; a second flat beam 14 is vertically fixed on each first flat beam 13, and the plane of the first flat beam 13 is vertical to the plane of the second flat beam 14; all the ends of the second flat beams 14 remote from the first flat beam 13 are commonly connected to a first connection 15;
The second elastic body 2 comprises a plurality of third flat beams 21 vertically connected with the annular elastic body 11 through the first connecting piece 15, and a plurality of fourth flat beams 22 are vertically connected to one end of the third flat beams 21 far away from the first connecting piece 15.
It can be appreciated that the first elastic body 1 is a moment elastic body, and the second elastic body 2 is a force elastic body; the sensor obtained by the first elastic body 1 and the second elastic body 2 has good symmetrical structure and has a mechanical self-decoupling function. The first elastic body 1 and the second elastic body 2 are respectively used for measuring moment and force, the first elastic body 1 is composed of a first flat beam 13 and a second flat beam 14 which are orthogonal in a cross mode, the first flat beam 13 and the second flat beam 14 are 90 degrees, and the whole body is of a cross T-shaped structure and is used for measuring moment Mx, my, mz and force Fz. The second elastic body 2 is formed by two double-layer flat beams in a longitudinal orthogonal mode, namely an x-direction double-layer flat beam formed by two fourth flat beams 21 and a y-direction double-layer flat beam formed by two third flat beams 22, and is mainly used for measuring forces Fx and Fy; the force and moment of the flat Liang Duiyu act, and compared with the force vertical to the flat surface, the force parallel to the flat surface is not easy to cause bending strain of the flat beam, and the force vertical to the flat surface is more easy to cause bending strain of the beam, namely the sensitivity of the flat beam to the two orthogonal directions of force and moment is greatly different.
The accommodating cavity 12 may be a rectangular groove, and two ends of the first flat beam 13 are respectively fixed on two inner walls of the rectangular groove; the number of the accommodating chambers 12 can be four, and the accommodating chambers are uniformly formed on the inner wall of the annular elastic body 11; it can be understood that the number of the first flat beams 13 and the second flat beams 14 is four; the side wall of the first flat beam 13 is not in contact with the inner wall of the accommodating cavity 12, so that the deformation of the first flat beam 13 under the stress is ensured.
The plane of the first flat beam 13 is parallel to or coincides with the plane of the annular elastic body 11; the second flat beams 14 are vertically fixed at the middle position of the first flat beams 13, and divide each first flat beam 13 into two symmetrical parts; specifically, a connection clamping groove 16 is formed at one end of the second flat beam 14 connected with the first flat beam 13, the depth of the connection clamping groove 16 is equal to the width of the first flat beam 13, and the middle position of the first flat beam 13 is inserted into the connection clamping groove 16 to be fixedly connected with the second flat beam 14.
The number of the third flat beams 21 may be two, the two third flat beams 21 are arranged in parallel, one end of the two third flat beams 21 is vertically fixed to the second connecting member 23, and the other end is vertically fixed to the third connecting member 24; the number of the fourth flat beams 22 may be two, the two fourth flat beams 22 are arranged in parallel, one ends of the two fourth flat beams 22 are vertically fixed to one side of the third connecting member 24 away from the third flat beam 21, and the other ends are vertically fixed to the fourth connecting member 25. The second connection 23 is connected to the first connection 15 via a damping body 3, which serves to reduce the coupling effect of the moment on the force; specifically, as shown in fig. 2, the diameter of the buffer body 3 is smaller than that of the second connecting member 23, and after the second connecting member 23 and the first connecting member 15 are connected by the buffer body 3, a certain gap exists between the first connecting member 15 and the second connecting member 23 at a non-connecting position, and the interaction between force and moment can be reduced by the gap. The first connecting member 15, the second connecting member 23, the third connecting member 24 and the fourth connecting member 25 may each be provided in a circular structure, and the fourth connecting structure may be used for connection with other external components, which will not be described in detail herein.
The number of the second flat beams is 4, and the second flat beams are uniformly distributed in the circumferential direction of the first connecting piece; two third flat beams 21 are parallel to two of the symmetrically arranged second flat beams 14, and two fourth flat beams 22 are parallel to the other two symmetrically arranged second flat beams 14.
As shown in fig. 3, the sensor sensitive element uses a single mode fiber with 11 fiber bragg gratings (Volume Bragg Grating, FBGs) in series to adhere the FBGs to the corresponding flat beam mountain, i.e., the strain beam. The 11 FBGs are combined into a group two by two, and six groups are respectively used for measuring moment Mz, moment Mx, moment My, force Fz, force Fy and force Fx. Each group of FBG pasting positions are symmetrical, the pasting mode adopts a full pasting mode, and the pasting positions are all positioned at the central axis of the strain beam. Under the action of force and moment, the strain beams with the corresponding force and moment generate strains with equal magnitude and opposite directions, namely corresponding FBGs generate the same strain; specific:
The first fiber bragg grating FBG1 and the eleventh fiber bragg grating FBG11 are respectively arranged on the two fourth flat beams 22; the two third flat beams 21 are respectively provided with a second fiber bragg grating FBG2 and a tenth fiber bragg grating FBG10; a third fiber bragg grating FBG3 is arranged on one of the second flat beams 14; a fourth fiber bragg grating FBG4 is arranged on the first flat beam 13 connected to the second flat beam 14 provided with the third fiber bragg grating FBG3; a fifth fiber bragg grating FBG5 is arranged on the first flat beam 13 adjacent to the first flat beam 13 provided with the fourth fiber bragg grating FBG4; a sixth fiber bragg grating FBG6 is arranged at one end on the first flat beam 13 symmetrical to the first flat beam 13 provided with the fourth fiber bragg grating FBG4, and the sixth fiber bragg grating FBG6 and the fourth fiber bragg grating FBG4 are symmetrically arranged; a seventh fiber bragg grating FBG7 is arranged on the second flat beam 14 symmetrical to the second flat beam 14 provided with the third fiber bragg grating FBG3, and the seventh fiber bragg grating FBG7 and the third fiber bragg grating FBG3 are symmetrically arranged; the other end of the first flat beam 13 symmetrical to the first flat beam 13 provided with the fourth fiber bragg grating FBG4 is provided with an eighth fiber bragg grating FBG8; a ninth fiber bragg grating FBG9 is arranged on the first flat beam 13 symmetrical to the first flat beam 13 provided with the fifth fiber bragg grating FBG5, and the ninth fiber bragg grating FBG9 is symmetrical to the fifth fiber bragg grating FBG5;
Specifically, the third fiber bragg grating and the fourth fiber bragg grating are a first group and are used for measuring the moment Mz; the fourth fiber Bragg grating and the sixth fiber Bragg grating are in a second group and are used for measuring the moment Mx; the fifth fiber Bragg grating and the ninth fiber Bragg grating are in a third group and are used for measuring the moment My; the fourth fiber Bragg grating and the eighth fiber Bragg grating are in a fourth group and are used for measuring force Fz; the second fiber Bragg grating and the tenth fiber Bragg grating are in a fifth group and are used for measuring force Fy; the first fiber Bragg grating and the eleventh fiber Bragg grating are in a sixth group and are used for measuring force Fx;
Under the action of force and moment, the flat beam generates strain, the fiber Bragg grating on the flat beam generates the same strain, and the strain enables the center wavelength of the fiber Bragg grating to shift so as to realize the measurement of the force and moment; the wavelength shift of each group of fiber Bragg gratings is used for measuring force and moment after differential calculation.
The first fiber Bragg grating FBG1, the second fiber Bragg grating FBG2, the third fiber Bragg grating FBG3, the fourth fiber Bragg grating FBG4, the fifth fiber Bragg grating FBG5, the sixth fiber Bragg grating FBG6, the seventh fiber Bragg grating FBG7, the eighth fiber Bragg grating FBG8, the ninth fiber Bragg grating FBG9, the tenth fiber Bragg grating FBG10 and the eleventh fiber Bragg grating FBG11 are connected in series through optical fibers.
Specifically, the principle of the sensor perception and moment method in the implementation is as follows:
Under the action of force and moment, the flat beam generates strain, the same strain is generated along with the FBG, the strain enables the center wavelength of the FBG to shift, and the force and moment are measured by means of certain linear relation between the wavelength shift of the FBG and the magnitude of the force and moment.
The wavelengths of six groups of FBGs can generate corresponding offset under the action of force and moment, and the wavelength offset of the first group of FBGs is thatAndThe second set of FBG wavelength offsets is/>And/>The third set of FBG wavelength offsets is/>And/>The fourth set of FBG wavelength offsets is/>And/>The fifth group of FBGs has a wavelength offset of/>And/>The sixth set of FBG wavelength offsets is/>And/>. The wavelength offset of each group of FBGs is subjected to differential calculation so as to eliminate interference between force and moment, and meanwhile, temperature self-compensation is realized, and the influence of temperature change on the wavelength is eliminated. Wherein/>For measuring moment Mz,/>For measuring moment Mx,/>For measuring the moment My,/>For measuring force Fz,/>For measuring force Fy,/>For measuring the force Fz.
Example 2:
the embodiment provides a working method of a fiber bragg grating six-dimensional force sensor, which adopts the fiber bragg grating six-dimensional force sensor as described in the embodiment 1, and comprises the following steps:
With the first elastic body 1 including the annular elastic body 11, the first flat beam 13, and the second flat beam 14, measurement of moment in Mx, my, and Mz directions, and measurement of force in Fz directions are performed; the measurement of forces in both the Fx and Fy directions is performed with the second elastic body 2 including the third flat beam 21 and the fourth flat beam 22. Specifically, the third fiber bragg grating and the seventh fiber bragg grating are a group and are used for measuring the moment Mz; the fourth fiber Bragg grating and the sixth fiber Bragg grating are a group and are used for measuring the moment Mx; the fifth fiber Bragg grating and the ninth fiber Bragg grating are a group and are used for measuring the moment My; the fourth fiber Bragg grating and the eighth fiber Bragg grating are a group and are used for measuring force Fz; the second fiber Bragg grating and the tenth fiber Bragg grating are a group and are used for measuring force Fy; the first fiber Bragg grating and the eleventh fiber Bragg grating are in a group and are used for measuring force Fx;
Under the action of force and moment, the flat beam generates strain, the fiber Bragg grating on the flat beam generates the same strain, and the strain enables the center wavelength of the fiber Bragg grating to shift so as to realize the measurement of the force and moment; the wavelength shift of each group of fiber Bragg gratings is used for measuring force and moment after differential calculation.
The above description is only a preferred embodiment of the present embodiment, and is not intended to limit the present embodiment, and various modifications and variations can be made to the present embodiment by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present embodiment should be included in the protection scope of the present embodiment.
Claims (6)
1. The fiber bragg grating six-dimensional force sensor is characterized by comprising a first elastomer and a second elastomer;
The first elastic body comprises a circular elastic body, a plurality of accommodating cavities are formed in the inner wall of the circular elastic body, and a first flat beam is fixed in each accommodating cavity; a second flat beam is vertically fixed on each first flat beam, and the plane of the first flat beam is mutually perpendicular to the plane of the second flat beam; one end of the first flat beam is commonly connected to the first connecting piece through all second flat Liang Yuanli;
The second elastic body comprises a plurality of third flat beams which are vertically connected with the annular elastic body through the first connecting piece, and one end of the third flat Liang Yuanli is vertically connected with a plurality of fourth flat beams;
The plane of the first flat beam is parallel to or coincides with the plane of the annular elastic body;
the two third flat beams are arranged in parallel, one end of each third flat beam is vertically fixed on the second connecting piece, and the other end of each third flat beam is vertically fixed on the third connecting piece; the two fourth flat beams are arranged in parallel, one ends of the two fourth flat beams are vertically fixed on one side, far away from the third flat beam, of the third connecting piece, and the other ends of the two fourth flat beams are vertically fixed on the fourth connecting piece; the second connecting piece is connected with the first connecting piece through a buffer body; after the second connecting piece and the first connecting piece are connected through the buffer body, a certain gap exists at a non-connecting part between the first connecting piece and the second connecting piece; the number of the second flat beams is 4, and the second flat beams are uniformly distributed in the circumferential direction of the first connecting piece; two third flat beams are parallel to two second flat beams which are symmetrically arranged, and two fourth flat beams are parallel to the other two second flat beams which are symmetrically arranged; the second flat beams are vertically fixed at the middle positions of the first flat beams, and each first flat beam is divided into two symmetrical parts.
2. The fiber bragg grating six-dimensional force sensor according to claim 1, wherein the accommodating cavity is a rectangular groove, and two ends of the first flat beam are respectively fixed on two inner walls of the rectangular groove; the four accommodating cavities are uniformly formed in the inner wall of the annular elastic body.
3. The fiber bragg grating six-dimensional force sensor according to claim 1, wherein a connecting clamping groove is formed in one end, connected with the first flat beam, of the second flat beam, the depth of the connecting clamping groove is equal to the width of the first flat beam, and the middle position of the first flat beam is inserted into the connecting clamping groove to be fixedly connected with the second flat beam.
4. The fiber bragg grating six-dimensional force sensor of claim 1, wherein the two fourth flat beams are respectively provided with a first fiber bragg grating and an eleventh fiber bragg grating; the two third flat beams are respectively provided with a second fiber Bragg grating and a tenth fiber Bragg grating; a third fiber Bragg grating is arranged on one of the second flat beams; a fourth fiber Bragg grating is arranged on the first flat beam connected with the second flat beam provided with the third fiber Bragg grating; a fifth fiber bragg grating is arranged on the first flat beam adjacent to the first flat beam provided with the fourth fiber bragg grating; a sixth fiber Bragg grating is arranged at one end of the first flat beam symmetrical to the first flat beam provided with the fourth fiber Bragg grating, and the sixth fiber Bragg grating and the fourth fiber Bragg grating are symmetrically arranged; a seventh fiber bragg grating is arranged on the second flat beam symmetrical to the second flat beam provided with the third fiber bragg grating, and the seventh fiber bragg grating and the third fiber bragg grating are symmetrically arranged; an eighth fiber bragg grating is arranged at the other end of the first flat beam symmetrical to the first flat beam provided with the fourth fiber bragg grating; a ninth fiber bragg grating is arranged on the first flat beam symmetrical to the first flat beam provided with the fifth fiber bragg grating, and the ninth fiber bragg grating is symmetrical to the fifth fiber bragg grating;
The first fiber Bragg grating, the second fiber Bragg grating, the third fiber Bragg grating, the fourth fiber Bragg grating, the fifth fiber Bragg grating, the sixth fiber Bragg grating, the seventh fiber Bragg grating, the eighth fiber Bragg grating, the ninth fiber Bragg grating, the tenth fiber Bragg grating and the eleventh fiber Bragg grating are connected in series through optical fibers.
5. A method for operating a fiber grating six-dimensional force sensor, characterized in that a fiber grating six-dimensional force sensor according to any one of claims 1-4 is used, comprising:
Measuring moment in Mx, my and Mz directions and measuring force in Fz directions by using a first elastic body comprising a circular ring-shaped elastic body, a first flat beam and a second flat beam; the measurement of forces in both the Fx and Fy directions is performed with a second elastomer comprising a third flat beam and a fourth flat beam.
6. The method of claim 5, wherein the third fiber bragg grating and the seventh fiber bragg grating are a group for measuring the moment Mz; the fourth fiber Bragg grating and the sixth fiber Bragg grating are a group and are used for measuring the moment Mx; the fifth fiber Bragg grating and the ninth fiber Bragg grating are a group and are used for measuring the moment My; the fourth fiber Bragg grating and the eighth fiber Bragg grating are a group and are used for measuring force Fz; the second fiber Bragg grating and the tenth fiber Bragg grating are a group and are used for measuring force Fy; the first fiber Bragg grating and the eleventh fiber Bragg grating are in a group and are used for measuring force Fx;
Under the action of force and moment, the flat beam generates strain, the fiber Bragg grating on the flat beam generates the same strain, and the strain enables the center wavelength of the fiber Bragg grating to shift so as to realize the measurement of the force and moment; the wavelength shift of each group of fiber Bragg gratings is used for measuring force and moment after differential calculation.
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