CN117387821A - Orthogonal flexible hinge piece combined six-dimensional force sensor - Google Patents
Orthogonal flexible hinge piece combined six-dimensional force sensor Download PDFInfo
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- CN117387821A CN117387821A CN202311688757.XA CN202311688757A CN117387821A CN 117387821 A CN117387821 A CN 117387821A CN 202311688757 A CN202311688757 A CN 202311688757A CN 117387821 A CN117387821 A CN 117387821A
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/161—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
- G01L5/1627—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance of strain gauges
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Abstract
The invention relates to the field of sensors, in particular to an orthogonal flexible hinge piece combined six-dimensional force sensor, and aims to solve the problems of too much redundancy, large calculated amount and lower precision of the existing sensor in a multi-flexible hinge parallel connection mode. The technical scheme includes that the flexible unit comprises at least three groups of flexible hinges, and the flexible hinges are mutually and orthogonally connected along the axial direction; at least even number of conversion units, the conversion units are arranged along the direction of the minimum bending rigidity of each group of flexible hinges, and are symmetrically arranged on two sides of each flexible hinge. The invention adopts the orthogonal sheet type flexible unit, and arranges the strain sensor between two surfaces of the thinnest dimension of the sheet type flexible hinge, eliminates the stretching and torsion effects by differential symmetrical arrangement, realizes pure bending measurement, and also flexibly combines various different modes into a six-dimensional sensor, thereby not only solving the problem that the traditional strain sheet patch is difficult, but also ensuring the measurement precision to reach the precision of the single-degree-of-freedom force sensor.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to an orthogonal flexible hinge plate combined six-dimensional force sensor.
Background
The force sensor (also referred to as a mechanical sensor, a force sensor, etc.) is a sensor that can convert data such as the magnitude or direction of a detected force signal into a relevant electrical signal for information feedback. Because of the special feature of space mechanics, the force sensor can be divided into one dimension to six dimensions, so the complete shape is a six-dimensional force sensor. The six-dimensional force sensor (also called six-dimensional force/moment sensor, six-axis force sensor and F/T sensor) can detect the information change of the spatial six-dimensional force signal, namely the three-dimensional force and the three-dimensional moment, and provides accurate feedback information for high-precision actions, is a key component for force control and motion control, and is widely applied to the fields of humanoid robots, operation robots and the like.
Force sensors are generally composed mainly of force sensitive elements (i.e., force sensing elements), conversion elements, and circuit portions. The force sensitive element (namely force sensitive element) is also called an elastomer, and commonly used springs, beams, corrugated pipes, diaphragms and the like are made of aluminum alloy, alloy steel and stainless steel. The conversion element, commonly used strain gage, uses various metal foils or semiconductor materials. The circuit part comprises enameled wires, pcb boards and the like. The main structure of the six-dimensional force sensor is basically unchanged and can be roughly divided into a loading end and a fixed end.
The prior art mainly adopts a redundant design of parallel connection of multiple flexible hinges, and force with 6 dimensions is measured by 24-32 channels, and the whole precision is generally one percent of the measuring range and is far less than the precision of one thousandth of the measuring range of a single force sensor due to strong coupling among the degrees of freedom. In addition, the adoption of the multi-flexible hinge parallel connection mode is too much in redundancy, large in calculation amount and difficult to use in occasions with high real-time requirements.
Disclosure of Invention
The invention aims to solve the problems of too much redundancy, large calculated amount and lower precision of a multi-flexible hinge parallel connection mode in the background art, and provides an orthogonal flexible hinge sheet combined six-dimensional force sensor.
The technical scheme of the invention is as follows: the orthogonal flexible hinge piece combined six-dimensional force sensor comprises a flexible unit, wherein the flexible unit comprises at least three groups of flexible hinges, and the flexible hinges are mutually and orthogonally connected along the axial direction; at least even conversion units are arranged along the direction of minimum bending rigidity deformation of each group of flexible hinges and symmetrically arranged on two side surfaces of each flexible hinge.
Optionally, the flexible unit includes a first flexible hinge, a second flexible hinge, and a third flexible hinge, each in a different plane of the X, Y, Z axis.
Optionally, the second flexible hinge and the third flexible hinge form a T-shaped structure.
Optionally, the first flexible hinge, the second flexible hinge and the third flexible hinge are an integral structure.
Optionally, the device further comprises a parallelogram mechanism and first outer frames arranged on two sides outside the parallelogram mechanism, the parallelogram mechanism is arranged orthogonal to the first outer frames, at least two groups of flexible units are arranged, the flexible units and the first outer frames are connected in parallel to form a closed space, and the parallelogram mechanism is connected in series between at least two groups of flexible units.
Optionally, the parallelogram mechanism comprises a rigid frame with a hollow structure, wherein the two sides of the rigid frame are symmetrically provided with fourth flexible hinges, and the inner side and the outer side of the fourth flexible hinges are respectively provided with a first strain gauge;
the parallelogram mechanism further comprises a limit bolt penetrating through the middle of the rigid frame, and a gap is reserved between the limit bolt and the rigid frame.
Optionally, the flexible unit further comprises an inner polygonal frame and a plurality of groups of peripheral frames, wherein the flexible unit is provided with a plurality of groups of peripheral frames, the number of the groups of flexible units is the same as that of the peripheral frames, the flexible units and the peripheral frames are mutually staggered and connected around the periphery of the inner polygonal frame, and one end of the flexible unit is connected with the inner polygonal frame.
Optionally, the peripheral frame is equipped with three groups, the peripheral frame is connected with flexible unit and is formed equilateral triangle structure, flexible unit is located respectively the middle part of equilateral triangle structure each side.
Optionally, the peripheral frame is provided with four groups, the peripheral frame is connected with the flexible unit to form a square structure, and the flexible unit is respectively located in the middle of each side of the square structure.
Optionally, the inner polygonal frame includes a limit bolt penetrating along an axial direction thereof.
Compared with the prior art, the invention has the following beneficial technical effects:
the invention adopts the orthogonal sheet type flexible unit, integrates three groups of sheet type flexible hinges through orthogonal arrangement, arranges the strain sensor between two sides of the thinnest dimension of the sheet type flexible hinges, eliminates the influence of stretching and torsion through differential symmetrical arrangement, and realizes pure bending measurement;
further, two or more groups of orthogonal sheet type flexible units are combined into a six-dimensional force sensor, when two groups of symmetrical arrangement is adopted, six groups of bending sensors are arranged, translation in three directions, reverse pitching along an axis and torsion moment can be realized, and deflection along the axis direction leads to all flexible hinge sheets to be in a torsion state, so that the torsion force along the axis direction can be effectively measured by matching with a parallelogram mechanism;
furthermore, overload protection is realized by using the limit bolt, so that the sensor is prevented from being damaged by overload waves, and a gap is arranged at the joint of the limit bolt, so that the deformation of the flexible hinge is prevented from being damaged;
in addition, the six-dimensional sensor can be formed by flexibly combining a plurality of different modes in a redundant mode, so that the problem that the traditional strain gauge patch is difficult is solved, and the measurement precision can reach the precision of the single-degree-of-freedom force sensor, namely one thousandth of the measuring range.
Drawings
FIG. 1 is a front perspective view of an orthogonal flexible hinge plate combination six-dimensional force sensor of the present invention;
FIG. 2 is a bottom perspective view of FIG. 1;
FIG. 3 is a front plan view of FIG. 1;
FIG. 4 is a combined perspective view of two sets of flexible units and a parallelogram mechanism;
FIG. 5 is a top view of FIG. 4;
FIG. 6 is a cross-sectional view of FIG. 4;
FIG. 7 is a front view of FIG. 6;
FIG. 8 is a perspective view of a six-dimensional force sensor of equilateral triangle configuration;
fig. 9 is a perspective view of a six-dimensional force sensor of square configuration.
Reference numerals:
1. a flexible unit;
11. a first flexible hinge; 110. a second strain gage; 12. a second flexible hinge; 120. a third strain gage; 13. a third flexible hinge; 130. a fourth strain gage;
21. a first outer frame; 211. a screw; 22. a second outer frame; 23. a third outer frame;
31. a rigid frame; 311. a limit bolt; 312. a first strain gage; 313. a gap; 32. an inner triangular frame; 33. an inner quadrilateral frame.
Detailed Description
The technical scheme of the invention is further described below with reference to the attached drawings and specific embodiments.
In force sensors, a sheet-type flexible hinge is commonly used, and deformation mainly includes bending, stretching and torsion. Wherein the stretching is related to the cross section and is the most rigid in all deformations. To obtain a sensitive stretch, the cross-sectional area needs to be small, resulting in a sensor with low strength, small measuring range and small overload capability.
In addition, the strain gauge is required to be stuck at an angle of 45 degrees in torsional deformation, so that the strain gauge is difficult to stick, and the strain gauge is mainly used for testing pure torsion. The current six-dimensional force sensor is a combination of bending, stretching and torsion, and is matched with other stretch bending sensors, so that the structure is complex. The existing one-dimensional force sensor commonly uses the most sensitive bending deformation strain of the sheet type flexible hinge to measure and calculate the stressed force, and the precision can reach one thousandth of the measuring range, which is far greater than the integral precision of the existing strong-coupling six-dimensional force sensor commonly at one hundredth of the measuring range.
The invention is thus described in terms of the following different embodiments for an orthogonal flexible hinge plate combination six-dimensional force sensor.
Example 1
As shown in fig. 1-3, the orthogonal flexible hinge sheet combined six-dimensional force sensor provided by the invention comprises a flexible unit 1, wherein the flexible unit 1 comprises at least three groups of flexible hinges, in the embodiment, the flexible unit 1 comprises a first flexible hinge 11, a second flexible hinge 12 and a third flexible hinge 13, and the three flexible hinges are integrally formed, are respectively positioned on different planes of X, Y, Z axes and are in orthogonal connection.
In this embodiment, the six-dimensional force sensor further includes at least an even number of conversion units, where the conversion units are arranged along the direction of minimum bending stiffness deformation of each group of the flexible hinges for strain gauges, and are symmetrically installed on two sides of the flexible hinges. The strain detection circuit forms a half-bridge or full-bridge differential type by adopting a mode of symmetrically installing the front and back sides of the strain gauge with even number, and the strain of the front and back sides is mutually counteracted when stretching or compressing, so that the influence of tensile and compressive strain is eliminated. When torsion is generated, the torsion strain is minimal because the strain gage is centered. In addition, the surface mounting mode is not in the 45-degree direction, and the up-down strain is just counteracted, so that the aims of error-free and high-precision measurement are fulfilled.
Referring specifically to fig. 1, the first flexible hinge 11 is located in the X-axis direction, and a second strain gauge 110 is provided in the middle of both sides of the thinnest dimension thereof; the second flexible hinge 12 is located in the Y-axis direction, and a third strain gauge 120 is arranged between two sides of the thinnest dimension of the second flexible hinge; the third flexible hinge 13 is located in the Z-axis direction, and a fourth strain gage 130 is disposed between the two sides of its thinnest dimension. The second strain gage 110, the third strain gage 120, and the fourth strain gage 130 of the even number are symmetrically arranged along the axial direction of the flexible unit 1, respectively.
Further, as shown in fig. 2 and 3, the second flexible hinge 12 and the third flexible hinge 13 form a T-shaped structure, and the fourth strain gauges 130 located on two sides of the third flexible hinge 13 are symmetrically disposed on two sides of the second flexible hinge 12 respectively. The six-dimensional force sensor is designed into an orthogonal sheet type flexible unit, three groups of sheet type flexible hinges are integrally processed through orthogonal arrangement, each group of strain gauges are arranged between two sides of the thinnest dimension of the sheet type flexible hinges, and the influence of stretching and torsion is eliminated through differential symmetrical arrangement, so that pure bending measurement is realized.
Since bending stiffness is proportional to the third power of thickness, when the ratio of width to thickness is >10, the stiffness is 1000 times worse, theoretically coupling is less than 1/1000, and by designing the ratio of width to thickness, a sensor with smaller coupling degree can be obtained.
Taking fig. 2 as an example, X, Y, Z is a three-way translational displacement, and acting forces in different directions of an X axis, a Y axis and a Z axis are respectively applied to the first flexible hinge 11, the second flexible hinge 12 and the third flexible hinge 13, which are expressed as follows:
1) When the force Fx is applied to the sensor in the X-axis direction, the first flexible hinge 11 is bent in the plane, and the second strain gauge 110 has no signal output; the second flexible hinge 12 bends out of plane, and the third strain gage 120 has signal output; the third flexible hinge 13 is bent reversely out of the plane, and the fourth strain gage 130 outputs signals.
2) When the sensor is stressed Fy in the Y-axis direction, the first flexible hinge 11 bends out of the plane, and the second strain gauge 110 outputs signals; the second flexible hinge 12 is bent in-plane, and the third strain gage 120 has no signal output; the third flexible hinge 13 is twisted on its axis, and the fourth strain gage 130 outputs no signal.
3) When the sensor is stressed Fz in the Z-axis direction, the first flexible hinge 11 is pulled and pressed in the plane, and the second strain gauge 110 does not output signals; the second flexible hinge 12 is pulled and pressed in the plane, and the third strain gage 120 outputs no signal; the third flexible hinge 13 bends out of plane and the fourth strain gage 130 has a signal output.
In terms of torque test, the first flexible hinge 11, the second flexible hinge 12 and the third flexible hinge 13 are respectively subjected to input torques of an X axis, a Y axis and a Z axis, and the input torques are expressed as follows:
1) When the sensor is stressed Mx in the X-axis direction, the first flexible hinge 11 bends out of the plane, and the second strain gauge 110 outputs signals; the second flexible hinge 12 is bent in-plane, and the third strain gage 120 has no signal output; the third flexible hinge 13 is twisted on its axis, and the fourth strain gage 130 outputs no signal.
2) When the sensor is stressed by My in the Y-axis direction, the first flexible hinge 11 is bent in the plane, and the second strain gauge 110 does not output signals; the second flexible hinge 12 bends out of plane, and the third strain gage 120 has signal output; the third flexible hinge 13 is bent reversely out of the plane, and the fourth strain gage 130 outputs signals.
3) When the sensor is stressed Mz in the Z-axis direction, the axis of the first flexible hinge 11 is twisted, and the second strain gauge 110 does not output signals; the second flexible hinge 12 is twisted on the axis, and the third strain gage 120 outputs no signal; the third flexible hinge 13 is bent in reverse in plane, and the fourth strain gage 130 outputs no signal.
Example two
As shown in fig. 4 to 6, based on the first embodiment, the orthogonal flexible hinge piece combined six-dimensional force sensor further comprises a parallelogram mechanism and first outer frames 21 arranged on two sides outside the parallelogram mechanism, wherein two groups of flexible units 1 are arranged, the flexible units 1 and the first outer frames 21 are connected in parallel to form a closed space, and the parallelogram mechanism is connected in series between the two groups of flexible units 1.
Further, the parallelogram mechanism includes a rigid frame 31 having a hollow structure, the rigid frame 31 is centrally disposed in the enclosed space, the rigid frame 31 and the first outer frame 21 are orthogonally arranged, the two sides of the rigid frame 31 are symmetrically provided with fourth flexible hinges, the fourth flexible hinges and the rigid frame 31 are integrally formed, at least one first strain gauge 312 is respectively disposed on the inner side and the outer side of the fourth flexible hinges, the first strain gauge 312 is disposed along the axial direction of the fourth flexible hinges, that is, the first strain gauge 312, the second strain gauge 110, the third strain gauge 120 and the fourth strain gauge 130 are located on different planes, and are orthogonally arranged. The flexible hinge output voltage of each set of flexible units 1 is only dependent on bending deformation, thereby reducing the coupling of bending moments. When two sets of orthogonal flexible units 1 are provided in this embodiment, each set of first flexible hinges 11, second flexible hinges 12 and third flexible hinges 13 has three sensor signals, and the sum of the axis torsion signals of a set of parallelogram mechanisms (i.e. the sensor signals of the fourth flexible hinges) is 7 signals, so that 6-dimensional signals are obtained through calculation, the redundancy is the lowest, and the accuracy of the sensor is greatly improved.
In this embodiment, taking fig. 4 as an example, the forces in different directions of the X axis, the Y axis and the Z axis are respectively applied to the first flexible hinge 11, the second flexible hinge 12, the third flexible hinge 13 and the fourth flexible hinge, which are expressed as follows:
1) When the force Fx is applied to the sensor in the X-axis direction, the axis of the first flexible hinge 11 is twisted, and the second strain gauge 110 does not output signals; the second flexible hinge 12 is twisted on the axis, and the third strain gage 120 outputs no signal; the third flexible hinge 13 is reversely bent in the plane, and the fourth strain gage 130 has no signal output; the fourth flexible hinge of the parallelogram mechanism flexes out of plane and the first strain gage 312 has a signal output.
2) When the sensor is stressed Fy in the Y-axis direction, the first flexible hinge 11 bends out of the plane, and the second strain gauge 110 outputs signals; the second flexible hinge 12 is bent in-plane, and the third strain gage 120 has no signal output; the axis of the third flexible hinge 13 is twisted, and the fourth strain gage 130 outputs no signal; the fourth flexible hinge of the parallelogram mechanism is pulled in-plane and no signal is output from the first strain gage 312.
3) When the sensor is stressed Fz in the Z-axis direction, the first flexible hinge 11 is reversely bent out of the plane, and the second strain gauge 110 outputs signals; the second flexible hinge 12 is bent in-plane, and the third strain gage 120 has no signal output; the third flexible hinge 13 bends out of plane, and the fourth strain gage 130 outputs signals; the fourth flexible hinge surface of the parallelogram mechanism is curved and the first strain gage 312 has no signal output.
In terms of torque test, the first flexible hinge 11, the second flexible hinge 12, the third flexible hinge 13 and the fourth flexible hinge are respectively subjected to input torques of an X axis, a Y axis and a Z axis, and the torque test is expressed as follows:
1) When the sensor is stressed Mx in the X-axis direction, the first flexible hinge 11 is reversely bent out of the plane, and the second strain gauge 110 outputs signals; the second flexible hinge 12 is bent in-plane, and the third strain gage 120 has no signal output; the axis of the third flexible hinge 13 is twisted, and the fourth strain gage 130 outputs no signal; the fourth flexible hinge surface of the parallelogram mechanism is curved and the first strain gage 312 has no signal output.
2) When the sensor is stressed by My in the Y-axis direction, the first flexible hinge 11 is bent in the plane, and the second strain gauge 110 does not output signals; the second flexible hinge 12 is reversely bent out of the plane, and the third strain gage 120 outputs signals; the third flexible hinge 13 is reversely bent out of the plane, and the fourth strain gage 130 outputs signals; the fourth flexible hinge axis of the parallelogram mechanism is twisted and the first strain gage 312 has no signal output.
3) When the sensor is stressed Mz in the Z-axis direction, the axis of the first flexible hinge 11 is twisted, and the second strain gauge 110 does not output signals; the second flexible hinge 12 is twisted on the axis, and the third strain gage 120 outputs no signal; the third flexible hinge 13 is reversely bent in the plane, and the fourth strain gage 130 has no signal output; the fourth flexible hinge of the parallelogram mechanism flexes out of plane and the first strain gage 312 has a signal output.
Example III
As shown in fig. 8, based on the first embodiment, the orthogonal flexible hinge sheet combined six-dimensional force sensor further includes an inner triangle frame 32 and three groups of second outer frames 22, the number of the flexible units 1 is the same as that of the second outer frames 22, and the two groups of the flexible units are mutually staggered to form an equilateral triangle structure, the whole structure is orthogonally connected with the inner triangle frame 32 in the middle, the first flexible hinge 11 in the flexible units 1 is connected with the inner triangle frame 32 on the same plane around the periphery of the inner triangle frame 32, and the third flexible hinge 13 in the flexible units 1 is connected with the second outer frames 22 on the same plane, so that 9 groups of bending signals can be processed in a bi-orthogonal manner, although redundancy is more, compared with 24 or even 30 sensing signals of the existing sensor, the number of the bending signals is greatly reduced, and no stretch bending coupling exists, so that the accuracy of the sensor is greatly improved.
Example IV
As shown in fig. 9, based on the first embodiment, the orthogonal flexible hinge sheet combined six-dimensional force sensor further includes an inner quadrilateral frame 33 and four groups of third outer frames 23, four groups of flexible units 1 are provided, the number of the four groups of flexible units is the same as that of the third outer frames 23, and the four groups of flexible units are mutually connected in a staggered manner to form a quadrilateral structure, in this embodiment, the square structure is formed by orthogonally connecting the integral structure with the inner quadrilateral frame 33 in the middle, the periphery of the inner quadrilateral frame 33 is surrounded, the first flexible hinge 11 in the flexible units 1 is connected with the inner quadrilateral frame 33 in the same plane, and the third flexible hinge 13 in the flexible units 1 is connected with the third outer frames 23 in the same plane, so that 12 groups of bending signals can be processed in the bi-orthogonal manner, and the accuracy of the sensor can be obviously improved.
Example five
As shown in fig. 7, 8 and 9, based on the second embodiment, the third embodiment or the fourth embodiment, the orthogonal flexible hinge piece combined six-dimensional force sensor further comprises a limit bolt 311 penetrating through the middle part of the rigid frame 31, the inner triangle frame 32 or the inner quadrilateral frame 33 (not shown in the drawings), so as to realize overload protection, and a gap 313 is formed between the limit bolt 311 and the rigid frame 31, so that the limit bolt 311 has a certain movable space, the flexible hinge is prevented from being deformed and damaged, the service life of the sensor is prolonged, and the measurement accuracy is further improved.
Screws 211, shown in fig. 7, are provided on the first outer frame 21, the second outer frame 22, and the third outer frame 23 (not shown), respectively, for fixing the sensor base.
The above-described embodiments are merely a few alternative embodiments of the present invention, and many alternative modifications and combinations of the above-described embodiments will be apparent to those skilled in the art based on the technical solutions of the present invention and the related teachings of the above-described embodiments.
Claims (10)
1. The utility model provides an orthogonal flexible hinge piece combination formula six-dimensional force transducer which characterized in that includes:
the flexible unit comprises at least three groups of flexible hinges, and the flexible hinges are mutually orthogonally connected along the axial direction;
at least even conversion units are arranged along the direction of minimum bending rigidity deformation of each group of flexible hinges and symmetrically arranged on two side surfaces of each flexible hinge.
2. The orthographic flexible hinge plate combination six-dimensional force sensor of claim 1, wherein the flexible unit comprises a first flexible hinge, a second flexible hinge, and a third flexible hinge, each in a different plane of the X, Y, Z axis.
3. The orthographic flexible hinge tab combination six-dimensional force sensor of claim 2, wherein the second flexible hinge and the third flexible hinge form a T-shaped structure.
4. The orthographic flexible hinge tab combination six-dimensional force sensor of claim 2 or 3, wherein the first, second and third flexible hinges are of unitary construction.
5. The orthorhombic flexible hinge plate combined six-dimensional force sensor according to claim 1, further comprising a parallelogram mechanism and first outer frames arranged on two sides outside the parallelogram mechanism, wherein the parallelogram mechanism is orthogonally arranged with the first outer frames, at least two groups of flexible units are arranged, the flexible units and the first outer frames are connected in parallel to form a closed space, and the parallelogram mechanism is connected in series between at least two groups of flexible units.
6. The orthogonal flexible hinge plate combined six-dimensional force sensor according to claim 5, wherein the parallelogram mechanism comprises a rigid frame with a hollow structure, fourth flexible hinges are symmetrically arranged on two sides of the rigid frame, and first strain plates are respectively arranged on the inner side and the outer side of the fourth flexible hinges;
the parallelogram mechanism further comprises a limit bolt penetrating through the middle of the rigid frame, and a gap is reserved between the limit bolt and the rigid frame.
7. The orthogonal flexible hinge plate combined six-dimensional force sensor according to claim 1, further comprising an inner polygonal frame and a plurality of groups of peripheral frames, wherein the flexible units are provided with a plurality of groups of the same number as the peripheral frames, the two groups of the same number of the peripheral frames are mutually staggered and connected around the periphery of the inner polygonal frame, and one end of each flexible unit is connected with the inner polygonal frame.
8. The orthorhombic flexible hinge plate combined six-dimensional force sensor according to claim 7, wherein the peripheral frame is provided with three groups, the peripheral frame is connected with flexible units to form an equilateral triangle structure, and the flexible units are respectively positioned in the middle of each side of the equilateral triangle structure.
9. The orthographic flexible hinge plate combined six-dimensional force sensor according to claim 7, wherein the peripheral frame is provided with four groups, the peripheral frame is connected with flexible units to form a square structure, and the flexible units are respectively positioned in the middle of each side of the square structure.
10. The orthographic flexible hinge plate combination six-dimensional force sensor according to claim 8 or 9, wherein the inner polygonal frame comprises a limit bolt penetrating along an axial direction thereof.
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