CN115431169A - Vacuum connection conversion device, slide polishing method and polishing machine - Google Patents
Vacuum connection conversion device, slide polishing method and polishing machine Download PDFInfo
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- CN115431169A CN115431169A CN202211021727.9A CN202211021727A CN115431169A CN 115431169 A CN115431169 A CN 115431169A CN 202211021727 A CN202211021727 A CN 202211021727A CN 115431169 A CN115431169 A CN 115431169A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
- B24B29/02—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
The invention provides a vacuum connection conversion device, a slide polishing method and a polishing machine, belonging to the technical field of semiconductors and comprising the following steps: the bearing comprises a shaft sleeve, an inner sleeve, a bearing and a split end cover, wherein the shaft sleeve is provided with an upper connecting section and a lower connecting section, the aperture of an upper through hole in the upper connecting section is larger than that of a lower through hole in the lower connecting section, and a supporting platform is formed at the joint of the upper through hole and the lower through hole; the inner sleeve is arranged in the upper through hole; wherein, the upper connecting section is provided with a mounting hole for a vacuum pipeline, and the inner sleeve is provided with an air exhaust hole; the bearing is arranged on the supporting platform and is used for connecting the slide carrier shaft; the split end cover is packaged at the upper end of the upper through hole, and the vacuum cavity in the inner sleeve is sealed. The vacuum connection conversion device provided by the invention has the advantages that the bearing is utilized to ensure the uniformity of the rotation speed of the slide glass shaft, the uniformity of the polished surface of the slide glass can be improved, the rejection of products manufactured in the subsequent process is avoided, and the processing quality of the products is improved.
Description
Technical Field
The invention belongs to the technical field of semiconductor equipment, and particularly relates to a vacuum connection conversion device for connecting a slide head with a vacuum system, a slide polishing method and a polishing machine.
Background
Chemical planarization is a surface global planarization technique that planarizes a wafer surface by relative motion between the wafer and a polishing head with an abrasive material therebetween while applying pressure. The main structure of the equipment is schematically shown in fig. 1, a wafer is vacuum-sucked on a slide head, and an upper slide shaft is connected with a vacuum system of the equipment through a connecting device to provide required vacuum. The polishing pad is placed on the polishing turntable, the wafer and the polishing pad rotate relatively, the connecting device is connected with the wafer carrying shaft and the equipment vacuum system, and the rotation of the wafer and the reliability of vacuum adsorption are guaranteed in the grinding process. This places high demands on the connection device.
At present, the connecting device mainly adopts a vacuum joint directly arranged on a slide bearing shaft, the slide bearing shaft and a polishing turntable have relative motion, and the rotation of the slide bearing is easily influenced by the connection of pipelines, so that the wafer polishing is not uniform and the requirement of uniformity cannot be met.
Specifically, because the carrier shaft and the polishing turntable move relatively, the connection of the vacuumizing pipeline on the carrier shaft can block the relative movement, if the relative movement is not uniform, the polishing of a wafer is generally several microns, the thickness difference of several positions of the same wafer is large, the wafer cannot meet the requirement, one wafer needs to be provided with tens of thousands of die, the wafer is the basis for manufacturing the die, the wafer prepared from the basic process is uneven, the accumulated error of each subsequent link is larger and larger, and finally the product is rejected and unqualified.
Disclosure of Invention
The embodiment of the invention provides a vacuum connection conversion device, a slide polishing method and a polishing machine, and aims to solve the problems that pipeline connection hinders the stability of relative rotation of a slide shaft, so that the slide polishing is uneven, and products are scrapped.
In order to achieve the above object, the present invention adopts the following technical solutions: there is provided a vacuum connection switching apparatus comprising:
the shaft sleeve is provided with an upper connecting section and a lower connecting section, the aperture of an upper through hole in the upper connecting section is larger than that of a lower through hole in the lower connecting section, and a supporting platform is formed at the joint of the upper through hole and the lower through hole;
the inner sleeve is arranged in the upper through hole; the upper connecting section is provided with a mounting hole for a vacuum pipeline, and the inner sleeve is provided with an air suction hole;
the bearing is arranged on the supporting platform and is used for connecting the slide carrier shaft; and
and the split end cover is packaged at the upper end of the upper through hole and seals the vacuum cavity in the inner sleeve.
With reference to the first aspect, in one possible implementation manner, an inner diameter of the bearing is larger than an inner diameter of the inner sleeve, so that a lower end surface of the inner sleeve constitutes a stop surface of the slide shaft.
With reference to the first aspect, in a possible implementation manner, a flange is disposed at the lower end of the inner sleeve, a side surface of the flange abuts against an inner wall of the upper through hole, and the flange abuts against the bearing through the split end cover.
With reference to the first aspect, in a possible implementation manner, a vacuum buffer cavity is formed between an outer wall of the inner sleeve and an inner wall of the upper through hole.
With reference to the first aspect, in a possible implementation manner, a groove for installing a seal ring is formed in the lower through hole.
With reference to the first aspect, in a possible implementation manner, a shaft seal is further disposed at a lower end of the lower through hole.
With reference to the first aspect, in a possible implementation manner, the vacuum chamber further includes a vacuum sensor for acquiring a pressure in the vacuum chamber, and the vacuum sensor is mounted on the split end cover.
With reference to the first aspect, in a possible implementation manner, the slide holder further includes a magnetic switch mounted on an outer wall of the lower connection section, and the magnetic switch is used for detecting a rotation speed of the slide holder shaft.
Compared with the prior art, the vacuum connection conversion device provided by the invention has the beneficial effects that: the vacuum pipeline connected with the vacuum system is connected to the shaft sleeve, the bearing is arranged in the shaft sleeve, the slide bearing shaft is assembled in the bearing, when the slide bearing shaft moves relatively, the shaft sleeve and the vacuum pipeline cannot block the rotation of the slide bearing shaft, the rotation of the slide bearing shaft cannot be influenced, and the slide bearing shaft can rotate relatively smoothly and stably by taking the bearing as a base point under the action of the polishing disc, so that the uniformity of the relative movement of the slide bearing is ensured, and the planarization of a polished surface of the slide bearing is ensured.
This embodiment provides stable support for slide glass axle through the axle sleeve, utilizes the bearing to guarantee the homogeneity of slide glass axle pivoted speed, can promote the homogeneity of slide glass polished surface, avoids the product of follow-up preparation to scrap, improves the processingquality of product.
In a second aspect, an embodiment of the present invention further provides a slide polishing method, based on the vacuum connection switching apparatus, the method including:
the slide glass shaft is arranged in the shaft sleeve, the vacuum sensor is arranged on the end cover of the splitting body at the upper end of the shaft sleeve, the vacuum sensor is connected with the buzzer alarm, and the magnetic switch is arranged on the outer wall of the shaft sleeve;
acquiring an actually measured vacuum value in a vacuum cavity by using a vacuum sensor;
comparing the actual measurement vacuum value with a preset vacuum value;
when the actual vacuum value is within the range of the preset vacuum value, carrying out slide polishing operation;
when the actual measurement vacuum value is out of the range of the preset vacuum value, the buzzer alarm gives an alarm, and the polishing operation is stopped;
during slide operation, the magnetic switch is used for acquiring the actually measured rotating speed of the slide shaft;
comparing the actual measurement rotating speed with a preset rotating speed;
when the actual measurement rotating speed is within the range of the preset rotating speed, carrying out slide polishing operation;
and when the actual measurement rotating speed is out of the range of the preset rotating speed, the buzzer alarm gives an alarm, and the polishing operation is stopped.
According to the slide polishing method provided by the embodiment of the invention, the vacuum measurement in the device is realized through the vacuum sensor, and when the actual measurement vacuum value in the vacuum cavity is out of the range of the preset vacuum value, the buzzer is connected to send out an alarm sound, so that an operator can find problems in time, replace damaged parts in advance and avoid the damage of polished wafers; the moving position conditions of the inner bearing and the slide glass shaft are judged in advance by additionally arranging the magnetic switch, early warning is timely carried out for maintenance, the uneven grinding and polishing is avoided, and the product processing quality is improved.
In a third aspect, an embodiment of the present invention further provides a polishing machine, including the vacuum connection conversion apparatus.
Drawings
Fig. 1 is a schematic structural diagram of a vacuum connection switching apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a slide holder according to an embodiment of the present invention;
description of reference numerals:
1. a vacuum sensor; 2. a split end cap; 3. a vacuum buffer chamber; 4. a shaft sleeve; 41. a groove; 42. mounting holes; 5. a bearing; 6. shaft sealing; 7. a magnetic switch; 8. an inner sleeve; 81. a flange plate; 82. an air exhaust hole; 83. a vacuum chamber; 9. a slide shaft; 10. carrying a slide; 11. and (7) polishing the disc.
Detailed Description
In order to make the technical problems, technical solutions and advantageous effects to be solved by the present invention more clearly apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Referring to fig. 1 and 2 together, the vacuum connection converting apparatus provided by the present invention will now be described. The vacuum connection switching device comprises: the bearing comprises a shaft sleeve 4, an inner sleeve 8, a bearing 5 and a split end cover 2, wherein the shaft sleeve 4 is provided with an upper connecting section and a lower connecting section, the aperture of an upper through hole in the upper connecting section is larger than that of a lower through hole in the lower connecting section, and a supporting platform is formed at the joint of the upper through hole and the lower through hole; the inner sleeve 8 is arranged in the upper through hole; wherein, the upper connecting section is provided with a mounting hole 42 for a vacuum pipeline, and the inner sleeve 8 is provided with an air suction hole 82; the bearing 5 is arranged on the supporting platform and is used for connecting the slide carrier shaft 9; the split end cap 2 is sealed at the upper end of the upper through hole to seal the vacuum cavity 83 in the inner sleeve 8.
Compared with the prior art, the vacuum connection conversion device provided by the invention has the beneficial effects that: the vacuum pipeline connected with the vacuum system is connected to the shaft sleeve 4, the bearing 5 is arranged in the shaft sleeve 4, the slide glass shaft 9 is assembled in the bearing 5, when the slide glass shaft 9 moves relatively, the shaft sleeve 4 and the vacuum pipeline cannot block the rotation of the slide glass shaft 9, the rotation of the slide glass shaft 9 cannot be influenced, the slide glass shaft 9 can rotate relatively smoothly with the bearing 5 as a base point under the action of the polishing disk 11, the uniformity of the relative movement of the slide glass 10 (such as a wafer) is further ensured, and the planarization of the polishing surface of the slide glass 10 is ensured.
This embodiment provides stable support for slide glass axle 9 through axle sleeve 4, utilizes bearing 5 to guarantee the homogeneity of slide glass axle 9 pivoted speed, can promote the homogeneity of slide glass 10 polished surface, avoids the product of follow-up preparation to scrap, improves the processingquality of product.
The side face of the split end cover 2 is provided with external threads, the upper end of the shaft sleeve 4 is provided with internal threads, the split end cover 2 is in threaded connection with the shaft sleeve 4, and when the slide glass shaft 9 is abraded or other faults occur to the device, the split end cover is convenient to detach, maintain and replace, maintenance efficiency is improved, and equipment downtime is reduced.
The slide holder shaft 9 passes through the lower through hole and is connected with the bearing 5, and the lower connecting section can also play a role in guiding and limiting the stable rotation of the slide holder shaft 9, so that the slide holder shaft 9 is prevented from moving and shaking.
In some embodiments, as shown in fig. 1, the inner diameter of the bearing 5 is larger than the inner diameter of the inner sleeve 8, so that the lower end face of the inner sleeve 8 constitutes a stop face for the slide shaft 9. The inner sleeve 8 has a limiting effect on the axial direction of the slide glass shaft 9, so that the problem that the polishing surface is not uniform and uneven due to the fact that the slide glass shaft 9 moves axially and the adsorbed slide glass 10 is suddenly raised and suddenly lowered can be solved.
In some embodiments, as shown in fig. 1, the lower end of the inner sleeve 8 is provided with a flange 81, the side of the flange 81 abuts against the inner wall of the upper through hole, and the flange 81 abuts against the bearing 5 through a separate end cap. Because the ring flange 81 has great surface area, through the spacing bearing 5 of the axial of ring flange 81, can guarantee the stability of bearing 5 mounted position, avoid bearing 5 axial float, because the axial float of bearing 5, also can drive the axial float of slide glass axle 9, and then lead to absorbent slide glass 10 to suddenly rise suddenly, cause the inhomogeneous uneven problem of polished surface.
Carry out accurate location to bearing 5 axial position through ring flange 81, face the axial accurate counterpoint of slide axle 9 through the backstop, finally guarantee slide axle 9 at axial position's accurate location, avoid slide axle 9 at the polishing in-process, because with polishing dish 11 between the interact and take place the axial float, lead to slide 10 to neglect high suddenly low, polish the inhomogeneous problem of face.
As shown in fig. 1, in some embodiments, a vacuum buffer chamber 3 is formed between the outer wall of the inner sleeve 8 and the inner wall of the upper through hole. The inner sleeve 8 forms the vacuum buffer cavity 3 due to the structural design of the flange plate 81, namely the inner part of the inner sleeve 8 is the vacuum cavity 83, the outer part of the inner sleeve 8 is the vacuum buffer cavity 3, and during vacuum pumping, airflow is firstly discharged into the vacuum buffer cavity 3 from the air exhaust hole 82, so that the airflow is dispersed in the vacuum buffer cavity 3, and the stability of vacuum adsorption can be ensured.
The air suction holes 82 and the mounting holes 42 are arranged in a staggered manner in the radial direction, and the two holes are not on the same diameter.
In some embodiments, as shown in fig. 1, a groove 41 for mounting a seal ring is provided in the lower through hole.
In some embodiments, as shown in fig. 1, the lower end of the lower through hole is further provided with a shaft seal 6.
In this embodiment, the split end cap 2 is connected with the shaft sleeve 4 through threads, the inner sleeve 8 not only realizes the convenience of disassembly, assembly and maintenance, but also fixes the inner bearing 5, the shaft seal 6 is additionally arranged on the end face, the reliability of the vacuum sealing of the shaft seal 6 on the slide glass shaft 9 is improved, the double protection effect is achieved with the sealing ring in the shaft sleeve 4, the service life of the sealing device is also prolonged by the shaft seal 6, and the maintainability is improved.
The vacuum connection conversion device further comprises a vacuum sensor 1 for collecting pressure in the vacuum cavity 83, and the vacuum sensor 1 is mounted on the split end cover 2. The vacuum sensor 1 which is used for detecting constantly is arranged, the vacuum value in the vacuum cavity 83 is judged constantly, and when the actually measured vacuum value is lower than the preset vacuum value, the machine is stopped in time for maintenance and loss stopping, so that the problems of scrapping of the slide glass 10 and resource waste of the polishing machine are reduced, and unnecessary waste caused by the fact that the vacuum system increases power and supports the adsorption force is also reduced. Compared with the mode of repairing after damage, the mode of prejudging, repairing and replacing in advance can reduce the loss to the minimum.
The vacuum connection conversion device further comprises a magnetic switch 7 arranged on the outer wall of the lower connecting section and used for detecting the rotating speed of the slide holder shaft 9. In the grinding and polishing process, grinding and polishing liquid easily enters the bearing 5 through a gap between the slide glass shaft 9 and the shaft sleeve 4 to damage the bearing 5, the condition of the bearing 5 is judged in advance by additionally arranging the magnetic switch 7, and the bearing is replaced in time after the condition does not meet the design requirement, so that the polishing of the slide glass 10 is prevented from being influenced.
In the above embodiments, the descriptions of the respective embodiments have respective emphasis, and reference may be made to the related descriptions of other embodiments for parts that are not described or illustrated in a certain embodiment.
As shown in fig. 1, the vacuum connection switching apparatus provided in this embodiment is installed as follows:
(1) And selecting a proper type of bearing 5, wherein the inner diameter of the bearing 5 is matched with the outer diameter of the slide glass shaft 9.
(2) The bearing 5 is mounted inside the sleeve 4, and the outer diameter of the bearing 5 is matched with the inside of the sleeve 4.
(3) The inner sleeve 8 is arranged in the shaft sleeve 4, the hollow part of the inner sleeve 8 is communicated with the slide glass shaft 9 in vacuum, the middle of the side of the inner sleeve 8 is provided with an air exhaust hole 82 which is communicated with a vacuum system outside the shaft sleeve 4, the bottom of the inner sleeve 8 is abutted against the bearing 5, and the inner aperture of the inner sleeve 8 is smaller than the diameter of the slide glass shaft 9.
(4) The split end cover 2 is connected with a threaded hole in the upper part of the shaft sleeve 4, a threaded hole is formed in the center of the split end cover 2 and communicated with the inner sleeve 8 frame and the center of the shaft sleeve 4, and a through hole is formed in the split end cover 2 and used for the vacuum sensor 1 to collect vacuum in the vacuum cavity 83.
(5) The mounting hole 42 on the outer side of the shaft sleeve 4 is not a threaded hole, is externally connected with a reducer union of a vacuum system and can be connected with an external vacuum system.
(6) An annular groove 41 is formed in the shaft sleeve 4, a proper sealing ring is installed by a special tool, and the vacuum cavity 83 is sealed to prevent vacuum leakage from failing to meet the vacuum requirement.
(7) There is the heavy groove below the axle sleeve 4, installs suitable bearing seal 6, makes 6 internal diameters of bearing seal and slide glass axle 9 tight fit, and the resistant rotational friction of bearing seal 6 can improve life to with the double seal of sealing washer cooperation can provide better vacuum.
(8) The slide plate shaft 9 is arranged in the shaft sleeve 4, the upper part of the slide plate shaft 9 is matched with the inner ring of the bearing 5, the top end of the slide plate shaft is abutted against the lower end of the inner sleeve 8, and the lower end of the slide plate shaft 9 is abutted against the sealing ring and the shaft seal 6.
(9) The upper part of the split end cover 2 is provided with the vacuum sensor 1, the vacuum sensor 1 is connected with the buzzer alarm, the vacuum range of the vacuum sensor 1 is adjusted, and the requirement of the vacuum degree of the slide plate shaft 9 is met. Too low a vacuum level may not hold the wafer and may cause the wafer to fall onto the rapidly rotating polishing disk 11 and break.
When the actual measurement vacuum degree is lower than the minimum value of the preset vacuum value, the vacuum sensor 1 sends a signal, the equipment alarm gives an alarm, and the operator stops the equipment to avoid the damage of the wafer.
During maintenance, the sealing ring and the shaft seal 6 are directly replaced, and whether the vacuum degree of equipment meets the equipment requirement is tested.
(10) Magnetic switch 7 is installed on the outer side of shaft sleeve 4, magnetic switch 7 detects the rotating speed of slide glass shaft 9 in real time, the rotating speed is too high or too low and exceeds the preset rotating speed, unevenness of wafer polishing can be caused, magnetic switch 7 is connected with an alarm, slide glass shaft 9 and shaft sleeve 4 rotate relatively to send out signals, when magnetic switch 7 does not reach the signals for a long time, it is shown that bearing 5 is stuck, the alarm gives an alarm, bearing 5 is replaced in time through dismounting split end cover 2 and inner sleeve 8, and the problem that wafer polishing is not uniform due to the fact that slide glass shaft 9 and polishing disc 11 do not rotate relatively is avoided.
Based on the same inventive concept, the embodiment of the present application further provides a method for polishing a slide 10, and based on the vacuum connection switching apparatus, the method includes:
a slide shaft 9 is arranged in a shaft sleeve 4, a vacuum sensor 1 is arranged on a body end cover at the upper end of the shaft sleeve 4, the vacuum sensor 1 is connected with a buzzer alarm, and a magnetic switch 7 is arranged on the outer wall of the shaft sleeve 4;
acquiring an actually measured vacuum value in the vacuum cavity 83 by using the vacuum sensor 1;
comparing the actual measurement vacuum value with a preset vacuum value;
when the actual measurement vacuum value is within the range of the preset vacuum value, polishing the slide 10;
when the actual measurement vacuum value is out of the range of the preset vacuum value, the buzzer alarm gives an alarm, and the polishing operation is stopped;
when the slide 10 works, the magnetic switch 7 is utilized to obtain the actually measured rotating speed of the slide shaft 9;
comparing the actual measurement rotating speed with a preset rotating speed;
when the actual measurement rotating speed is within the range of the preset rotating speed, polishing the slide 10;
and when the actual measurement rotating speed is out of the range of the preset rotating speed, the buzzer alarm gives an alarm, and the polishing operation is stopped.
Because the sealing ring is arranged in the shaft sleeve 4 to ensure the sealing of the vacuum cavity 83, but along with the rotation of the slide bearing shaft 9, the sealing ring is inevitably worn in the process of high-speed rotation of the slide bearing shaft 9, so that vacuum leakage is caused, the vacuum degree is reduced, the adsorption force of the vacuum sucker is reduced, the slide bearing 10 is easily caused by incapability of adsorbing the slide bearing 10, and the fault limit is reached, at the moment, the problem that the slide bearing 10 being polished is not uniform is solved, and in the process of continuous reduction of the adsorption force, the problem that the previous slide bearing 10 is not uniformly polished is caused due to instability of adsorption and the difference of the height of the slide bearing 10 when the adsorption force is gradually reduced, so that the slide bearing 10 is scrapped, manpower, material resources and financial resources are wasted, and economic loss is caused. Therefore, the vacuum sensor 1 which is used for detecting constantly is arranged, the vacuum value in the vacuum cavity 83 is judged constantly, and when the actually measured vacuum value is lower than the preset vacuum value, the machine is stopped in time for maintenance and loss stopping, so that the problems of scrapping of the slide 10 and resource waste of the polishing machine are reduced, and unnecessary waste caused by the fact that the power of the vacuum system is increased to support the adsorption force is also reduced. Compared with the mode of repairing after damage, the mode of prejudging, repairing and replacing in advance can reduce the loss to the minimum.
According to the polishing method of the slide 10, the vacuum measurement in the device is realized through the vacuum sensor 1, when the actual measurement vacuum value in the vacuum cavity 83 is out of the range of the preset vacuum value, the buzzer is connected to send out an alarm sound, whether a fault occurs or not is judged in advance, so that an operator can find the problem in time, a damaged part is replaced in advance, the loss is reduced, and the damage to a polished wafer is avoided; the moving position conditions of the inner bearing 5 and the slide glass shaft 9 are judged in advance by additionally arranging the magnetic switch 7, early warning is timely carried out for maintenance, the uneven grinding and polishing is avoided, and the product processing quality is improved.
In a third aspect, the embodiment of the invention further provides a polishing machine, which comprises the vacuum connection conversion device.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (10)
1. A vacuum connection conversion apparatus, comprising:
the shaft sleeve (4) is provided with an upper connecting section and a lower connecting section, the aperture of an upper through hole in the upper connecting section is larger than that of a lower through hole in the lower connecting section, and a supporting platform is formed at the joint of the upper through hole and the lower through hole;
an inner sleeve (8) arranged in the upper through hole; wherein, the upper connecting section is provided with a mounting hole (42) for a vacuum pipeline, and the inner sleeve (8) is provided with an air suction hole (82);
the bearing (5) is arranged on the supporting platform and is used for connecting the slide plate shaft (9); and
and the split end cover (2) is packaged at the upper end of the upper through hole and seals the vacuum cavity (83) in the inner sleeve (8).
2. Vacuum connection changeover device according to claim 1, characterized in that the bearing (5) has an inner diameter which is larger than the inner diameter of the inner sleeve (8) so that the lower end face of the inner sleeve (8) constitutes a stop face for the slide shaft (9).
3. A vacuum connection converting device according to claim 1, characterized in that the lower end of the inner sleeve (8) is provided with a flange (81), the side of the flange (81) abuts against the inner wall of the upper through hole, and the flange (81) abuts against the bearing (5) through the split end cap.
4. A vacuum connection converting device according to claim 3, characterized in that a vacuum buffer chamber (3) is formed between the outer wall of the inner sleeve (8) and the inner wall of the upper through hole.
5. A vacuum connection converting device according to claim 1, wherein a groove (41) for mounting a sealing ring is provided in the lower through hole.
6. The vacuum connection converting device according to claim 1, wherein the lower end of the lower through hole is further provided with a shaft seal (6).
7. The vacuum connection converting apparatus according to claim 1, further comprising a vacuum sensor (1) for collecting pressure in the vacuum chamber (83), wherein the vacuum sensor (1) is mounted on the split end cap (2).
8. A vacuum connection converting apparatus according to claim 1, further comprising a magnetic switch (7) mounted on an outer wall of the lower connecting section for detecting a rotation speed of the carrier shaft (9).
9. A slide polishing method based on the vacuum connection switching device as claimed in any one of claims 1 to 8, wherein the method comprises:
a slide shaft (9) is arranged in a shaft sleeve (4), a vacuum sensor (1) is arranged on a body end cover at the upper end of the shaft sleeve (4), the vacuum sensor (1) is connected with a buzzer alarm, and a magnetic switch (7) is arranged on the outer wall of the shaft sleeve (4);
acquiring an actual measurement vacuum value in a vacuum cavity (83) by using a vacuum sensor (1);
comparing the actual measurement vacuum value with a preset vacuum value;
when the actual measurement vacuum value is within the range of the preset vacuum value, polishing the slide (10);
when the actual measurement vacuum value is out of the range of the preset vacuum value, the buzzer alarm gives an alarm, and the polishing operation is stopped;
when the slide (10) works, the actually measured rotating speed of the slide shaft (9) is obtained by using the magnetic switch (7);
comparing the actual measurement rotating speed with a preset rotating speed;
when the actual measurement rotating speed is within the range of the preset rotating speed, polishing the slide glass (10);
and when the actual measurement rotating speed is out of the range of the preset rotating speed, the buzzer alarm gives an alarm, and the polishing operation is stopped.
10. A polishing machine comprising a vacuum coupling changeover means according to any one of claims 1 to 8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211021727.9A CN115431169B (en) | 2022-08-24 | 2022-08-24 | Vacuum connection conversion device, slide polishing method and polishing machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211021727.9A CN115431169B (en) | 2022-08-24 | 2022-08-24 | Vacuum connection conversion device, slide polishing method and polishing machine |
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| Publication Number | Publication Date |
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| CN115431169A true CN115431169A (en) | 2022-12-06 |
| CN115431169B CN115431169B (en) | 2023-09-01 |
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| CN202211021727.9A Active CN115431169B (en) | 2022-08-24 | 2022-08-24 | Vacuum connection conversion device, slide polishing method and polishing machine |
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Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115431169B (en) | 2023-09-01 |
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